TW504689B - Optical data storage wafer and its manufacturing method - Google Patents
Optical data storage wafer and its manufacturing method Download PDFInfo
- Publication number
- TW504689B TW504689B TW088116720A TW88116720A TW504689B TW 504689 B TW504689 B TW 504689B TW 088116720 A TW088116720 A TW 088116720A TW 88116720 A TW88116720 A TW 88116720A TW 504689 B TW504689 B TW 504689B
- Authority
- TW
- Taiwan
- Prior art keywords
- metal
- scope
- patent application
- alloy
- layer
- Prior art date
Links
- 238000013500 data storage Methods 0.000 title claims abstract description 33
- 230000003287 optical effect Effects 0.000 title claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000000956 alloy Substances 0.000 claims abstract description 68
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 64
- 229910052751 metal Inorganic materials 0.000 claims abstract description 45
- 239000002184 metal Substances 0.000 claims abstract description 45
- 239000010931 gold Substances 0.000 claims abstract description 32
- 229910052737 gold Inorganic materials 0.000 claims abstract description 30
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 19
- 150000002739 metals Chemical class 0.000 claims abstract description 8
- 229910001092 metal group alloy Inorganic materials 0.000 claims abstract 28
- 239000004615 ingredient Substances 0.000 claims abstract 3
- 238000000034 method Methods 0.000 claims description 36
- 235000012431 wafers Nutrition 0.000 claims description 28
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 19
- 239000013078 crystal Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 238000010521 absorption reaction Methods 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 229910052763 palladium Inorganic materials 0.000 claims description 7
- 239000004332 silver Substances 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims 5
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 108010028771 Complement C6 Proteins 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 150000002343 gold Chemical class 0.000 claims 1
- 230000016507 interphase Effects 0.000 claims 1
- 239000013589 supplement Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 65
- 229910000691 Re alloy Inorganic materials 0.000 description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910001316 Ag alloy Inorganic materials 0.000 description 5
- 230000002079 cooperative effect Effects 0.000 description 5
- 229910001020 Au alloy Inorganic materials 0.000 description 4
- 239000003353 gold alloy Substances 0.000 description 4
- QMTXMMSHFDUPLF-UHFFFAOYSA-N [Ag].[Re] Chemical compound [Ag].[Re] QMTXMMSHFDUPLF-UHFFFAOYSA-N 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 238000010422 painting Methods 0.000 description 3
- 239000002689 soil Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- GZRDJPGWGMWUQZ-UHFFFAOYSA-N [Re].[Au] Chemical compound [Re].[Au] GZRDJPGWGMWUQZ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229940098465 tincture Drugs 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001265 Eu alloy Inorganic materials 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 229910000979 O alloy Inorganic materials 0.000 description 1
- 229910001066 Pu alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910002065 alloy metal Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 238000009933 burial Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical class [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002650 habitual effect Effects 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 235000010755 mineral Nutrition 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 150000002941 palladium compounds Chemical class 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/266—Sputtering or spin-coating layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
- C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/2403—Layers; Shape, structure or physical properties thereof
- G11B7/24035—Recording layers
- G11B7/24038—Multiple laminated recording layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
- G11B7/2533—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
- G11B7/2534—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins polycarbonates [PC]
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
- G11B7/259—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on silver
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
- G11B7/2595—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on gold
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Holo Graphy (AREA)
- Physical Vapour Deposition (AREA)
- Optical Recording Or Reproduction (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH200998 | 1998-10-02 | ||
| CH256398 | 1998-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW504689B true TW504689B (en) | 2002-10-01 |
Family
ID=25689256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW088116720A TW504689B (en) | 1998-10-02 | 1999-09-29 | Optical data storage wafer and its manufacturing method |
Country Status (7)
| Country | Link |
|---|---|
| EP (2) | EP1119848B1 (enExample) |
| JP (1) | JP4282236B2 (enExample) |
| AT (1) | ATE254792T1 (enExample) |
| DE (1) | DE59907819D1 (enExample) |
| HK (1) | HK1040453B (enExample) |
| TW (1) | TW504689B (enExample) |
| WO (1) | WO2000021079A2 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6451402B1 (en) | 1998-06-22 | 2002-09-17 | Target Technology Company, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US6852384B2 (en) | 1998-06-22 | 2005-02-08 | Han H. Nee | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US6790503B2 (en) | 1998-06-22 | 2004-09-14 | Target Technology Company, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US6544616B2 (en) * | 2000-07-21 | 2003-04-08 | Target Technology Company, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US6764735B2 (en) | 1998-06-22 | 2004-07-20 | Target Technology Company, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US7314657B2 (en) | 2000-07-21 | 2008-01-01 | Target Technology Company, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US7045187B2 (en) | 1998-06-22 | 2006-05-16 | Nee Han H | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US6905750B2 (en) | 1998-06-22 | 2005-06-14 | Target Technology Company, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US7384677B2 (en) | 1998-06-22 | 2008-06-10 | Target Technology Company, Llc | Metal alloys for the reflective or semi-reflective layer of an optical storage medium |
| US6007889A (en) | 1998-06-22 | 1999-12-28 | Target Technology, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US7314659B2 (en) | 2000-07-21 | 2008-01-01 | Target Technology Company, Llc | Metal alloys for the reflective or semi-reflective layer of an optical storage medium |
| US7316837B2 (en) | 2000-07-21 | 2008-01-08 | Target Technology Company, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US7374805B2 (en) | 2000-07-21 | 2008-05-20 | Target Technology Company, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US7572517B2 (en) | 2002-07-08 | 2009-08-11 | Target Technology Company, Llc | Reflective or semi-reflective metal alloy coatings |
| EP1560704B1 (en) | 2003-04-18 | 2012-06-13 | Target Technology Company, LLC. | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| US8445091B2 (en) | 2007-08-22 | 2013-05-21 | Thomson Licensing | Dual metal optical discs |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7803069A (nl) * | 1978-03-22 | 1979-09-25 | Philips Nv | Meerlaags informatieschijf. |
| JPS6260108A (ja) * | 1985-09-10 | 1987-03-16 | Kobe Steel Ltd | センダスト系合金製磁気ヘツドコアの製造方法 |
| CA2017284C (en) * | 1989-07-04 | 1995-10-03 | Kazutomi Suzuki | Optical recording medium |
| JP3292890B2 (ja) * | 1992-08-10 | 2002-06-17 | 株式会社リコー | 光反射放熱用材料を用いた相変化形光記録媒体 |
| US5419939A (en) * | 1992-09-24 | 1995-05-30 | Tdk Corporation | Optical recording disk |
| US5726969A (en) * | 1994-12-28 | 1998-03-10 | Matsushita Electric Industrial Co., Ltd. | Optical recording medium having dual information surfaces |
| JPH08203125A (ja) * | 1995-01-31 | 1996-08-09 | Pioneer Electron Corp | 貼り合わせ型光ディスク及びその製造方法 |
| US5640382A (en) * | 1995-12-19 | 1997-06-17 | Imation Corp. | Dual layer optical medium having partially reflecting metal alloy layer |
| US6007889A (en) * | 1998-06-22 | 1999-12-28 | Target Technology, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
-
1999
- 1999-09-13 EP EP99941355A patent/EP1119848B1/de not_active Expired - Lifetime
- 1999-09-13 WO PCT/CH1999/000431 patent/WO2000021079A2/de not_active Ceased
- 1999-09-13 JP JP2000575122A patent/JP4282236B2/ja not_active Expired - Fee Related
- 1999-09-13 DE DE59907819T patent/DE59907819D1/de not_active Expired - Lifetime
- 1999-09-13 EP EP02020133A patent/EP1271501A3/de not_active Withdrawn
- 1999-09-13 HK HK02100618.0A patent/HK1040453B/zh not_active IP Right Cessation
- 1999-09-13 AT AT99941355T patent/ATE254792T1/de not_active IP Right Cessation
- 1999-09-29 TW TW088116720A patent/TW504689B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| HK1040453A1 (en) | 2002-06-07 |
| EP1119848B1 (de) | 2003-11-19 |
| DE59907819D1 (de) | 2003-12-24 |
| ATE254792T1 (de) | 2003-12-15 |
| WO2000021079A3 (de) | 2000-07-06 |
| WO2000021079A2 (de) | 2000-04-13 |
| HK1040453B (zh) | 2004-09-10 |
| EP1271501A3 (de) | 2008-10-29 |
| EP1119848A2 (de) | 2001-08-01 |
| EP1271501A2 (de) | 2003-01-02 |
| JP4282236B2 (ja) | 2009-06-17 |
| JP2002527846A (ja) | 2002-08-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW504689B (en) | Optical data storage wafer and its manufacturing method | |
| JPWO2019151321A1 (ja) | 反射防止膜付ガラス基板及び光学部品 | |
| TWI375048B (en) | Anti-reflection coating, and optical element and optical system with anti-reflection coating | |
| JPS6218881B2 (enExample) | ||
| JP2012108468A (ja) | ワイヤグリッド偏光板 | |
| CN102831962B (zh) | 一种介质导电膜、制备方法及电致变色后视镜 | |
| CN110095833A (zh) | 相位差补偿元件、液晶显示装置及投射型图像显示装置 | |
| CN110431122A (zh) | 抗反射涂层 | |
| JP2002527846A5 (enExample) | ||
| JP4768045B2 (ja) | 反射フイルム | |
| JPH05502738A (ja) | マグネシウム膜反射材 | |
| JP2838525B2 (ja) | 反射鏡 | |
| JP2011203359A (ja) | 誘電体層を用いたリフレクタおよびその製造方法 | |
| CN102264940B (zh) | 氧化铪或氧化锆镀层 | |
| CN104691040B (zh) | 减反射膜、其制备方法及减反射玻璃 | |
| JP3630808B2 (ja) | 非偏光ビームスプリッタ | |
| US11029514B2 (en) | Antireflection film and its use on a substrate | |
| JP3068252B2 (ja) | 反射防止膜を有する光学部材 | |
| JP2566634B2 (ja) | 多層反射防止膜 | |
| CN115050875B (zh) | 一种提高出光角度的Mini LED及其制造方法 | |
| CN109445120A (zh) | 一种干涉截止滤光片结构的偏振分光镜制作方法 | |
| WO2017145748A1 (ja) | 光反射フィルム及び液晶表示装置用バックライトユニット | |
| JP3056320B2 (ja) | 光学多層薄膜およびビームスプリッター | |
| JP2577938B2 (ja) | 高反射フイルム | |
| JPH0780274B2 (ja) | 高反射率のＡｇ反射フイルム |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |