Classifications

• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
  • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
  • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
  • G11B7/266—Sputtering or spin-coating layers
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
  • C23C14/14—Metallic material, boron or silicon
  • C23C14/20—Metallic material, boron or silicon on organic substrates
  • C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
  • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
  • G11B7/2403—Layers; Shape, structure or physical properties thereof
  • G11B7/24035—Recording layers
  • G11B7/24038—Multiple laminated recording layers
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
  • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
  • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
  • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
  • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
  • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
  • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
  • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
  • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
  • G11B7/2533—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
  • G11B7/2534—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins polycarbonates [PC]
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
  • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
  • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
  • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
  • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
  • G11B7/259—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on silver
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
  • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
  • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
  • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
  • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
  • G11B7/2595—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on gold

Definitions

• the present invention relates to an optical data storage disk, in which, advancing from a disk surface in the direction of the disk thickness, at least two interfaces are provided, each of which is profiled, according to stored information, and the innermost, "profiled interface is a reflection layer, the at least one further profiled interface has a partially reflecting / partially transmitting layer, each for light of a given wavelength and at the same angles of incidence ⁇ 90 °, the rest of the disk material between the surface and the reflection layer essentially transmitting the light mentioned , wherein the reflection layer consists of a first metal alloy, the partial reflection layer consists of a second metal alloy.
• Such a data storage disk is known from US-A-5 640 382. Progressing from the one pane surface in the direction of the pane thickness expansion, it first has a transparent substrate, then a partially reflective layer on a first information-profiled interface, then a transmitting spacer layer and finally a highly reflective layer on a second information-profiled interface layer.
• the first-mentioned transparent substrate can be made of a polymer material, such as polycarbonate or amorphous polyolefin. On the other hand, it is also possible to use glass or a polymethyl methacrylate for this. As is known (loc. Cit.), This substrate can also consist of PMMA.
• the spacer layer also consists, for example, of a polymer.
• the highly reflective layer for laser light between 600 and 850 nm is made of aluminum, gold, silver, copper or one of their alloys. As mentioned elsewhere, the wavelength range of the laser light can reach up to 500 nm.
• Gold is preferably used for the partially reflecting layer in accordance with the aforementioned US Pat., Due to its optical properties and in particular its stability against environmental influences. However, it is recognized that gold is expensive. Therefore, it is further proposed for the partially reflecting layer mentioned to alloy gold with a less expensive metal in order to reduce the costs. At least 10 at% gold, preferably up to 20 at% gold, is retained on the alloy of the partially reflecting layer in order to maintain the stability against environmental influences.
• Silver or copper is proposed as the gold alloy metal.
• US Pat. No. 5,640,382 is introduced as an integrated part of the present invention with regard to the construction of an optical data storage medium from which the present invention is based.
• optical data storage disks embodied, for example, as DVD9, digital versatile disk, in accordance with definitions in the DVD standard “DVD Specifications for Read-Only Disks”, version 1.0 of August 1966, it is required that at a given wavelength of laser light, in particular at 650 nm, due to the reflections both at the partially reflecting layer and at the reflecting layer, laser light emerging again amounts to 18 to 30% of the light radiated by the laser have to wear.
• Today DVD9 is understood as a "single sided dual layer disc.”
• the alloys of the at least two layers contain one or more identical metal (s), the one or more metal (s) together accounting for more than 50 at% of the respective alloy,
• alloys contain gold, this is only a maximum of 50 at% of the respective alloy.
• the alloy contains one or more identical metal (s) with a proportion of the respective alloy of more than 50 at% makes it possible to use the same coating source arrangement at least for this respective alloy part. This creates the basis for significantly rationalizing the manufacturing process for the data disks mentioned. Characterized in that further, if at all gold at one and / or • other of the alloys is provided, this is only with an on part of at most 50 at% of the alloy material, it is further achieved that the disk according to the invention itself becomes inexpensive to manufacture due to the costs for the alloy materials used.
• the alloys as a whole are formed by the same metals, preferably with the same alloy proportions.
• further elements such as N, O, Ar can be contained in traces.
• the layers can then be deposited using the same coating source arrangement.
• Ma and Mb denote a second and third metal, respectively.
• a silver-palladium alloy or an alloy each comprising silver and palladium in a proportion of more than 50 at% is used with great preference.
• Gold can also be used as the above-mentioned second or third metal Ma or Mb, in particular as Ma, in this case instead of the preferred palladium given above
• the stability of the optical properties, in particular of the layers, that is to say reflection, transmission, absorption, is better than ⁇ 2%, preferably even better than ⁇ 1%, if exposed to air for 24 hours.
• a manufacturing method according to the invention is distinguished by the wording of claim 11, a preferred embodiment variant according to claim 12, a target according to the invention according to claim 17.
• the above-mentioned object with regard to specifications, cost-effective production and chemical resistance is also already achieved in that, apart from the formation of the reflection layer, the partially reflecting layer made of Ag ⁇ a y Mb.
• Mb a third metal, preferably except gold.
• the partially reflecting layer consists of Ag ⁇ a y Mb., And palladium is used as the second metal Ma.
• FIG. 1 schematically shows a cross section through an optical data storage disk with a double information carrier interface
• FIGS. 2a and 2b the conditions mentioned after 37.5 hours of air storage.
• 1 schematically shows an optical data storage disk of the type mentioned in the present application.
• a spacer layer 3 for example an adhesive layer, likewise in particular for transmitting the light mentioned, and a reflective layer L 1 # all on a carrier 5, such as again made of polycarbonate.
• the information embossing patterns are provided at the interfaces 1/3 and 3/5 each with the provided layer L 0 , L x .
• Laser light I E with 500 nm ⁇ ⁇ 8580 nm, preferably with ⁇ 650 nm, is directed onto the storage disk at an angle ⁇ ⁇ 90 ° and is partially reflected on the partially reflecting layer L 0 in order to emerge again with the share I 0 .
• the refractive index can be set to approximately n and the absorption coefficient to k for both alloys.
• the absorption coefficient k for metals or metal alloys is usually k> 2.
• the conditions at the reflection layer L x according to FIG. 1 largely correspond to the optical conditions at the bulk material.
• the signal calculated in bulk terms should be greater than 22 to 23% I E so that, in industrial mass production, the signal remains> 18%. For this industrial production is therefore preferred from
• Sputtering was carried out with a growth rate of 13 nm / kWsec.
• the optical values largely correspond to the optical values of the silver-palladium alloy in bulk. The following values were measured:
• n / k value of 0.136 results for the aforementioned silver-palladium alloy.
• a suitable layer thickness of 13 to 17 nm for the partially reflecting layer according to L 0 of FIG. 1 can now be calculated.
• the layers provided according to the invention can be implemented in an extremely stable manner, with a stability of their optical properties, namely reflection, transmission and absorption in the entire detected range from 500 to 900 nm of better than ⁇ 2% if they last at least 24 hours be stored in air.
• the particularly preferred silver-palladium alloy results in a stability even better than ⁇ 1% according to the figures shown.
• This material can be deposited at a very high rate using a conventional DC sputtering process. Compared to a gold coating, the costs of a silver-palladium coating are approximately 80% to 90% lower.
• M b can be gold, for example.
• silver-palladium alloys are suitable as universal materials for both layers, but an Ag 60 Au 40 alloy has an n / k value of 0.079 and an Ag 50 Au S0 alloy has an n / k value of 0.108.
• Copper-gold alloys were also suitable for universal material:
• Cu S0 Au 50 alloys have n / k values of 0.142,
• This also applies to copper-tin alloys (bronzes) and copper-palladium alloys.
• a main coating source is used for all layers, preferably even only one coating source for all layers.
• a DC sputter source such as a DC magnetron source, with the intended alloy content as the target material is particularly suitable for this purpose. Possibly. Metal components that vary from layer to layer can be adjusted at these sources by different process control. Furthermore, when reading An extremely small substrate / source spacing is maintained against the layers, and the substrate can be coated stationary with respect to the source, which overall leads to compact, inexpensive production systems.
• silver-palladium alloy it can further be stated that it is very particularly stable against environmental influences and can be deposited with a high sputtering yield during its production.
• the proposed universal materials are much cheaper than gold. Due to the features of forming at least one basic alloy portion of both layers from the same metals, preferably of producing the layers from the same alloys, it is possible to implement the data storage disks according to the invention in a single coating system, in particular sputtering system, preferably by using a single source.

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• Chemical & Material Sciences (AREA)
• Engineering & Computer Science (AREA)
• Organic Chemistry (AREA)
• Materials Engineering (AREA)
• Mechanical Engineering (AREA)
• Metallurgy (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Manufacturing & Machinery (AREA)
• Optical Record Carriers And Manufacture Thereof (AREA)
• Manufacturing Optical Record Carriers (AREA)
• Holo Graphy (AREA)
• Physical Vapour Deposition (AREA)
• Optical Recording Or Reproduction (AREA)
• Thermal Transfer Or Thermal Recording In General (AREA)

Priority Applications (5)

Applications Claiming Priority (4)

Publications (2)

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ID=25689256

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Cited By (7)

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• 1999
  • 1999-09-13 EP EP99941355A patent/EP1119848B1/de not_active Expired - Lifetime
  • 1999-09-13 WO PCT/CH1999/000431 patent/WO2000021079A2/de not_active Ceased
  • 1999-09-13 JP JP2000575122A patent/JP4282236B2/ja not_active Expired - Fee Related
  • 1999-09-13 DE DE59907819T patent/DE59907819D1/de not_active Expired - Lifetime
  • 1999-09-13 EP EP02020133A patent/EP1271501A3/de not_active Withdrawn
  • 1999-09-13 HK HK02100618.0A patent/HK1040453B/zh not_active IP Right Cessation
  • 1999-09-13 AT AT99941355T patent/ATE254792T1/de not_active IP Right Cessation
  • 1999-09-29 TW TW088116720A patent/TW504689B/zh not_active IP Right Cessation

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