TW500822B - Positive displacement type liquid-delivery apparatus - Google Patents

Positive displacement type liquid-delivery apparatus Download PDF

Info

Publication number
TW500822B
TW500822B TW089125285A TW89125285A TW500822B TW 500822 B TW500822 B TW 500822B TW 089125285 A TW089125285 A TW 089125285A TW 89125285 A TW89125285 A TW 89125285A TW 500822 B TW500822 B TW 500822B
Authority
TW
Taiwan
Prior art keywords
liquid
pressure
positive
diaphragm
chamber
Prior art date
Application number
TW089125285A
Other languages
English (en)
Chinese (zh)
Inventor
Kuniaki Horie
Kiwamu Tsukamoto
Kenji Kamoda
Hirotake Yamagishi
Shinya Uemura
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11034399A external-priority patent/JP2000230910A/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of TW500822B publication Critical patent/TW500822B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/07—Pressure difference over the pump

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Formation Of Insulating Films (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
TW089125285A 1999-02-12 2000-11-29 Positive displacement type liquid-delivery apparatus TW500822B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11034399A JP2000230910A (ja) 1999-02-12 1999-02-12 基板の付着異物検査装置および付着異物除去装置および付着異物除去方法
JP2000217926A JP3844418B2 (ja) 1999-02-12 2000-07-18 容積式送液装置

Publications (1)

Publication Number Publication Date
TW500822B true TW500822B (en) 2002-09-01

Family

ID=82943391

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089125285A TW500822B (en) 1999-02-12 2000-11-29 Positive displacement type liquid-delivery apparatus

Country Status (5)

Country Link
EP (1) EP1106826B9 (ja)
JP (1) JP3844418B2 (ja)
KR (1) KR100710914B1 (ja)
DE (1) DE60038775D1 (ja)
TW (1) TW500822B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112424447A (zh) * 2018-07-16 2021-02-26 韦尔矿物荷兰有限公司 泵送系统

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005077489A1 (ja) * 2004-02-18 2005-08-25 Koganei Corporation フィルタおよび薬液吐出装置
JP2007291857A (ja) * 2006-04-20 2007-11-08 Nidec Sankyo Corp 定量ポンプ装置
CN101960144A (zh) 2008-07-08 2011-01-26 松下电器产业株式会社 使用了导电性高分子的流体运送装置
WO2010091454A1 (en) * 2009-02-13 2010-08-19 Davey Water Products Pty Ltd Controller for a liquid supply pump
AU2012379018B2 (en) 2012-05-02 2017-05-25 Afl Telecommunications Llc Round and small diameter optical cables with a ribbon-like optical fiber structure
WO2014174957A1 (ja) 2013-04-24 2014-10-30 株式会社村田製作所 カフ圧制御装置
KR101879033B1 (ko) * 2016-03-31 2018-08-20 주식회사 포스코 유체량 조절장치
RU2636948C1 (ru) * 2016-11-30 2017-11-29 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) Устройство подачи, измерения, регулирования количества и расхода жидкости
JP2023020185A (ja) * 2021-07-30 2023-02-09 株式会社コガネイ 液体供給装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5371828A (en) * 1991-08-28 1994-12-06 Mks Instruments, Inc. System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure
JPH10506150A (ja) * 1994-08-01 1998-06-16 フランツ ヘーマン、 非平衡軽量合金及び製品のために選択される処理
JPH10238470A (ja) * 1997-02-24 1998-09-08 Ebara Corp 送液装置
DE19748449C1 (de) * 1997-11-03 1999-06-24 Lang Apparatebau Gmbh Einrichtung zur Dosierüberwachung einer Membranpumpe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112424447A (zh) * 2018-07-16 2021-02-26 韦尔矿物荷兰有限公司 泵送系统
CN112424447B (zh) * 2018-07-16 2023-04-07 韦尔矿物荷兰有限公司 泵送系统

Also Published As

Publication number Publication date
EP1106826A2 (en) 2001-06-13
DE60038775D1 (de) 2008-06-19
JP2001221163A (ja) 2001-08-17
EP1106826B9 (en) 2008-12-24
EP1106826A3 (en) 2003-05-02
KR20010062048A (ko) 2001-07-07
JP3844418B2 (ja) 2006-11-15
KR100710914B1 (ko) 2007-04-27
EP1106826B1 (en) 2008-05-07

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees