TW371779B - Apparatus for manufacturing semiconductor device - Google Patents
Apparatus for manufacturing semiconductor deviceInfo
- Publication number
- TW371779B TW371779B TW086100714A TW86100714A TW371779B TW 371779 B TW371779 B TW 371779B TW 086100714 A TW086100714 A TW 086100714A TW 86100714 A TW86100714 A TW 86100714A TW 371779 B TW371779 B TW 371779B
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing semiconductor
- semiconductor device
- silicon
- silicon substrate
- average coarseness
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1143496 | 1996-01-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW371779B true TW371779B (en) | 1999-10-11 |
Family
ID=11777987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086100714A TW371779B (en) | 1996-01-26 | 1997-01-23 | Apparatus for manufacturing semiconductor device |
Country Status (6)
Country | Link |
---|---|
US (1) | US6214740B1 (zh) |
EP (1) | EP0966028A1 (zh) |
KR (1) | KR100309225B1 (zh) |
CN (1) | CN1134829C (zh) |
TW (1) | TW371779B (zh) |
WO (1) | WO1997027622A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5054874B2 (ja) * | 1999-12-02 | 2012-10-24 | ティーガル コーポレイション | リアクタ内でプラチナエッチングを行う方法 |
AU2002212963A1 (en) * | 2000-10-25 | 2002-05-06 | Tokyo Electron Limited | Method of and structure for controlling electrode temperature |
JP3971603B2 (ja) * | 2001-12-04 | 2007-09-05 | キヤノンアネルバ株式会社 | 絶縁膜エッチング装置及び絶縁膜エッチング方法 |
JP4645167B2 (ja) * | 2004-11-15 | 2011-03-09 | 東京エレクトロン株式会社 | フォーカスリング、プラズマエッチング装置及びプラズマエッチング方法。 |
US20090084987A1 (en) * | 2007-09-28 | 2009-04-02 | Varian Semiconductor Equipment Associates, Inc. | Charge neutralization in a plasma processing apparatus |
US20110057326A1 (en) * | 2008-12-17 | 2011-03-10 | Takayuki Kai | Method for forming through electrode and semiconductor device |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5776840A (en) | 1980-10-31 | 1982-05-14 | Victor Co Of Japan Ltd | Forming method of pattern |
JPS61276322A (ja) | 1985-05-31 | 1986-12-06 | Mitsubishi Electric Corp | 半導体製造装置 |
JPS6247130A (ja) | 1985-08-27 | 1987-02-28 | Kokusai Electric Co Ltd | 反応性イオンエツチング装置 |
US5556501A (en) * | 1989-10-03 | 1996-09-17 | Applied Materials, Inc. | Silicon scavenger in an inductively coupled RF plasma reactor |
JPH0826464B2 (ja) | 1989-10-20 | 1996-03-13 | イビデン株式会社 | プラズマエツチング用電極板 |
JP3044824B2 (ja) * | 1991-04-27 | 2000-05-22 | ソニー株式会社 | ドライエッチング装置及びドライエッチング方法 |
KR100281345B1 (ko) * | 1992-12-01 | 2001-03-02 | 조셉 제이. 스위니 | 전자기 결합성 플래너 플라즈마 장치에서의 산화물 에칭 공정 |
JPH07161702A (ja) | 1993-10-29 | 1995-06-23 | Applied Materials Inc | 酸化物のプラズマエッチング方法 |
JP3257741B2 (ja) * | 1994-03-03 | 2002-02-18 | 東京エレクトロン株式会社 | プラズマエッチング装置及び方法 |
US5474649A (en) * | 1994-03-08 | 1995-12-12 | Applied Materials, Inc. | Plasma processing apparatus employing a textured focus ring |
US6007673A (en) * | 1996-10-02 | 1999-12-28 | Matsushita Electronics Corporation | Apparatus and method of producing an electronic device |
-
1997
- 1997-01-23 US US09/051,815 patent/US6214740B1/en not_active Expired - Lifetime
- 1997-01-23 TW TW086100714A patent/TW371779B/zh not_active IP Right Cessation
- 1997-01-23 WO PCT/JP1997/000151 patent/WO1997027622A1/ja not_active Application Discontinuation
- 1997-01-23 EP EP97900766A patent/EP0966028A1/en not_active Withdrawn
- 1997-01-23 KR KR1019980705727A patent/KR100309225B1/ko not_active IP Right Cessation
- 1997-01-23 CN CNB971918805A patent/CN1134829C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0966028A4 (zh) | 1999-12-22 |
CN1209908A (zh) | 1999-03-03 |
KR100309225B1 (ko) | 2002-02-19 |
CN1134829C (zh) | 2004-01-14 |
EP0966028A1 (en) | 1999-12-22 |
KR19990082008A (ko) | 1999-11-15 |
US6214740B1 (en) | 2001-04-10 |
WO1997027622A1 (fr) | 1997-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |