DE69623731D1 - Verfahren und Vorrichtung zur Reinigung eines Plasmareaktors - Google Patents
Verfahren und Vorrichtung zur Reinigung eines PlasmareaktorsInfo
- Publication number
- DE69623731D1 DE69623731D1 DE69623731T DE69623731T DE69623731D1 DE 69623731 D1 DE69623731 D1 DE 69623731D1 DE 69623731 T DE69623731 T DE 69623731T DE 69623731 T DE69623731 T DE 69623731T DE 69623731 D1 DE69623731 D1 DE 69623731D1
- Authority
- DE
- Germany
- Prior art keywords
- plasma
- wafer
- coupling
- chamber
- during processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 title 1
- 230000008878 coupling Effects 0.000 abstract 4
- 238000010168 coupling process Methods 0.000 abstract 4
- 238000005859 coupling reaction Methods 0.000 abstract 4
- 239000002245 particle Substances 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 1
- 239000000356 contaminant Substances 0.000 abstract 1
- 238000011109 contamination Methods 0.000 abstract 1
- 230000001737 promoting effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/905—Cleaning of reaction chamber
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Epidemiology (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/567,376 US5817534A (en) | 1995-12-04 | 1995-12-04 | RF plasma reactor with cleaning electrode for cleaning during processing of semiconductor wafers |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69623731D1 true DE69623731D1 (de) | 2002-10-24 |
DE69623731T2 DE69623731T2 (de) | 2003-06-05 |
Family
ID=24266907
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69623731T Expired - Fee Related DE69623731T2 (de) | 1995-12-04 | 1996-12-03 | Verfahren und Vorrichtung zur Reinigung eines Plasmareaktors |
Country Status (7)
Country | Link |
---|---|
US (1) | US5817534A (de) |
EP (1) | EP0778607B1 (de) |
JP (1) | JPH09181057A (de) |
KR (1) | KR100430644B1 (de) |
AT (1) | ATE224584T1 (de) |
DE (1) | DE69623731T2 (de) |
TW (1) | TW301840B (de) |
Families Citing this family (67)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2737720B2 (ja) * | 1995-10-12 | 1998-04-08 | 日本電気株式会社 | 薄膜形成方法及び装置 |
US6749717B1 (en) | 1997-02-04 | 2004-06-15 | Micron Technology, Inc. | Device for in-situ cleaning of an inductively-coupled plasma chambers |
US5942039A (en) * | 1997-05-01 | 1999-08-24 | Applied Materials, Inc. | Self-cleaning focus ring |
EP0883162A3 (de) * | 1997-06-05 | 2001-04-18 | Sizary Limited | Reinigungsvorrichtung für Halbleiterscheibe |
US6379575B1 (en) * | 1997-10-21 | 2002-04-30 | Applied Materials, Inc. | Treatment of etching chambers using activated cleaning gas |
US6797188B1 (en) | 1997-11-12 | 2004-09-28 | Meihua Shen | Self-cleaning process for etching silicon-containing material |
US6872322B1 (en) * | 1997-11-12 | 2005-03-29 | Applied Materials, Inc. | Multiple stage process for cleaning process chambers |
US6042654A (en) * | 1998-01-13 | 2000-03-28 | Applied Materials, Inc. | Method of cleaning CVD cold-wall chamber and exhaust lines |
US6067999A (en) * | 1998-04-23 | 2000-05-30 | International Business Machines Corporation | Method for deposition tool cleaning |
US6010967A (en) * | 1998-05-22 | 2000-01-04 | Micron Technology, Inc. | Plasma etching methods |
US6461970B1 (en) * | 1998-06-10 | 2002-10-08 | Micron Technology, Inc. | Method of reducing defects in anti-reflective coatings and semiconductor structures fabricated thereby |
US6349670B1 (en) * | 1998-11-30 | 2002-02-26 | Alps Electric Co., Ltd. | Plasma treatment equipment |
KR100542459B1 (ko) * | 1999-03-09 | 2006-01-12 | 가부시끼가이샤 히다치 세이사꾸쇼 | 플라즈마처리장치 및 플라즈마처리방법 |
AU767161B2 (en) * | 1999-08-20 | 2003-10-30 | Kaneka Corporation | Method and apparatus for manufacturing semiconductor device |
KR100415435B1 (ko) | 1999-09-21 | 2004-01-31 | 주성엔지니어링(주) | 반도체 소자 제조장치 |
US6291358B1 (en) | 1999-10-15 | 2001-09-18 | Micron Technology, Inc. | Plasma deposition tool operating method |
KR20010056655A (ko) * | 1999-12-16 | 2001-07-04 | 황 철 주 | 반도체 소자 제조 장치 |
US6518190B1 (en) | 1999-12-23 | 2003-02-11 | Applied Materials Inc. | Plasma reactor with dry clean apparatus and method |
TW518686B (en) | 1999-12-29 | 2003-01-21 | Tokyo Electron Ltd | System for automatic control of the wall bombardment to control wall deposition |
KR100502268B1 (ko) * | 2000-03-01 | 2005-07-22 | 가부시끼가이샤 히다치 세이사꾸쇼 | 플라즈마처리장치 및 방법 |
US6564810B1 (en) * | 2000-03-28 | 2003-05-20 | Asm America | Cleaning of semiconductor processing chambers |
US6531030B1 (en) * | 2000-03-31 | 2003-03-11 | Lam Research Corp. | Inductively coupled plasma etching apparatus |
TW478026B (en) * | 2000-08-25 | 2002-03-01 | Hitachi Ltd | Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield |
TW506234B (en) * | 2000-09-18 | 2002-10-11 | Tokyo Electron Ltd | Tunable focus ring for plasma processing |
JP4109861B2 (ja) * | 2000-12-12 | 2008-07-02 | キヤノン株式会社 | 真空処理方法 |
KR20020061814A (ko) * | 2001-01-18 | 2002-07-25 | 엘지전자주식회사 | 플라즈마 중합장치 전극구조 |
KR20030056522A (ko) * | 2001-12-28 | 2003-07-04 | 동부전자 주식회사 | 반도체 공정 쳄버의 제어 장치 |
US6828241B2 (en) * | 2002-01-07 | 2004-12-07 | Applied Materials, Inc. | Efficient cleaning by secondary in-situ activation of etch precursor from remote plasma source |
US20040025791A1 (en) * | 2002-08-09 | 2004-02-12 | Applied Materials, Inc. | Etch chamber with dual frequency biasing sources and a single frequency plasma generating source |
US20040040662A1 (en) * | 2002-08-28 | 2004-03-04 | Manabu Edamura | Plasma processing method and apparatus for etching nonvolatile material |
US6716765B1 (en) * | 2002-11-12 | 2004-04-06 | Novellus Systems, Inc. | Plasma clean for a semiconductor thin film deposition chamber |
US20040200498A1 (en) * | 2003-04-08 | 2004-10-14 | Applied Materials, Inc. | Method and apparatus for cleaning a substrate processing chamber |
WO2004095555A1 (ja) * | 2003-04-22 | 2004-11-04 | Tokyo Electron Limited | 熱処理装置のクリーニング方法 |
KR20040107983A (ko) * | 2003-06-16 | 2004-12-23 | 삼성전자주식회사 | 반도체 제조 장치 |
US20050106873A1 (en) * | 2003-08-15 | 2005-05-19 | Hoffman Daniel J. | Plasma chamber having multiple RF source frequencies |
US7431857B2 (en) * | 2003-08-15 | 2008-10-07 | Applied Materials, Inc. | Plasma generation and control using a dual frequency RF source |
US7510665B2 (en) * | 2003-08-15 | 2009-03-31 | Applied Materials, Inc. | Plasma generation and control using dual frequency RF signals |
US7838430B2 (en) * | 2003-10-28 | 2010-11-23 | Applied Materials, Inc. | Plasma control using dual cathode frequency mixing |
US7446335B2 (en) * | 2004-06-18 | 2008-11-04 | Regents Of The University Of Minnesota | Process and apparatus for forming nanoparticles using radiofrequency plasmas |
US20060027329A1 (en) * | 2004-08-09 | 2006-02-09 | Sinha Ashok K | Multi-frequency plasma enhanced process chamber having a torroidal plasma source |
JP4758159B2 (ja) * | 2005-07-19 | 2011-08-24 | 株式会社日立ハイテクノロジーズ | プラズマエッチング装置および微粒子除去方法 |
US7695633B2 (en) * | 2005-10-18 | 2010-04-13 | Applied Materials, Inc. | Independent control of ion density, ion energy distribution and ion dissociation in a plasma reactor |
KR100733080B1 (ko) | 2006-01-03 | 2007-06-29 | 삼성전자주식회사 | 식각장치 |
US8911590B2 (en) * | 2006-02-27 | 2014-12-16 | Lam Research Corporation | Integrated capacitive and inductive power sources for a plasma etching chamber |
US20070246163A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Plasma reactor apparatus with independent capacitive and inductive plasma sources |
US7780864B2 (en) * | 2006-04-24 | 2010-08-24 | Applied Materials, Inc. | Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution |
US20070245958A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Dual plasma source process using a variable frequency capacitively coupled source for controlling ion radial distribution |
US20070245960A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion density |
US7264688B1 (en) | 2006-04-24 | 2007-09-04 | Applied Materials, Inc. | Plasma reactor apparatus with independent capacitive and toroidal plasma sources |
US7645357B2 (en) * | 2006-04-24 | 2010-01-12 | Applied Materials, Inc. | Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency |
US20070245961A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Dual plasma source process using a variable frequency capacitively coupled source for controlling plasma ion dissociation |
US20070246161A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Plasma reactor apparatus with a toroidal plasma source and a VHF capacitively coupled plasma source with variable frequency |
US20070246443A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Process using combined capacitively and inductively coupled plasma process for controlling plasma ion dissociation |
US7727413B2 (en) * | 2006-04-24 | 2010-06-01 | Applied Materials, Inc. | Dual plasma source process using a variable frequency capacitively coupled source to control plasma ion density |
US20070246162A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Plasma reactor apparatus with an inductive plasma source and a VHF capacitively coupled plasma source with variable frequency |
US7550090B2 (en) * | 2007-01-23 | 2009-06-23 | Applied Materials, Inc. | Oxygen plasma clean to remove carbon species deposited on a glass dome surface |
JP5281766B2 (ja) * | 2007-07-31 | 2013-09-04 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置の製造方法 |
US7736914B2 (en) * | 2007-11-29 | 2010-06-15 | Applied Materials, Inc. | Plasma control using dual cathode frequency mixing and controlling the level of polymer formation |
US8118946B2 (en) | 2007-11-30 | 2012-02-21 | Wesley George Lau | Cleaning process residues from substrate processing chamber components |
KR100919487B1 (ko) * | 2009-01-22 | 2009-09-28 | 주식회사 맥시스 | 플라즈마 처리 장치 |
JP5451324B2 (ja) * | 2009-11-10 | 2014-03-26 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
JP5198616B2 (ja) * | 2011-03-28 | 2013-05-15 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
US9209032B2 (en) * | 2013-03-15 | 2015-12-08 | Tokyo Electron Limited | Electric pressure systems for control of plasma properties and uniformity |
JP6539113B2 (ja) * | 2015-05-28 | 2019-07-03 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置およびプラズマ処理方法 |
CN107154332B (zh) * | 2016-03-03 | 2019-07-19 | 中微半导体设备(上海)股份有限公司 | 一种等离子体处理装置及方法 |
WO2020166048A1 (ja) | 2019-02-15 | 2020-08-20 | 株式会社日立ハイテクノロジーズ | ガス成分のモニタ方法及びその装置並びにそれを用いた処理装置 |
US20220349050A1 (en) * | 2021-04-30 | 2022-11-03 | Applied Materials, Inc. | Method and apparatus with high conductance components for chamber cleaning |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07100348B2 (ja) * | 1987-07-13 | 1995-11-01 | 三菱化学株式会社 | フィルムの製造方法 |
JPH029115A (ja) * | 1988-06-28 | 1990-01-12 | Mitsubishi Electric Corp | 半導体製造装置 |
US5057185A (en) * | 1990-09-27 | 1991-10-15 | Consortium For Surface Processing, Inc. | Triode plasma reactor with phase modulated plasma control |
JPH0562936A (ja) * | 1991-09-03 | 1993-03-12 | Mitsubishi Electric Corp | プラズマ処理装置およびプラズマクリーニング方法 |
US5425842A (en) * | 1992-06-09 | 1995-06-20 | U.S. Philips Corporation | Method of manufacturing a semiconductor device using a chemical vapour deposition process with plasma cleaning of the reactor chamber |
US5252178A (en) * | 1992-06-24 | 1993-10-12 | Texas Instruments Incorporated | Multi-zone plasma processing method and apparatus |
US5286297A (en) * | 1992-06-24 | 1994-02-15 | Texas Instruments Incorporated | Multi-electrode plasma processing apparatus |
JP2674488B2 (ja) * | 1993-12-01 | 1997-11-12 | 日本電気株式会社 | ドライエッチング室のクリーニング方法 |
DE69531880T2 (de) * | 1994-04-28 | 2004-09-09 | Applied Materials, Inc., Santa Clara | Verfahren zum Betreiben eines CVD-Reaktors hoher Plasma-Dichte mit kombinierter induktiver und kapazitiver Einkopplung |
US5514246A (en) * | 1994-06-02 | 1996-05-07 | Micron Technology, Inc. | Plasma reactors and method of cleaning a plasma reactor |
US5585012A (en) * | 1994-12-15 | 1996-12-17 | Applied Materials Inc. | Self-cleaning polymer-free top electrode for parallel electrode etch operation |
US5523261A (en) * | 1995-02-28 | 1996-06-04 | Micron Technology, Inc. | Method of cleaning high density inductively coupled plasma chamber using capacitive coupling |
-
1995
- 1995-12-04 US US08/567,376 patent/US5817534A/en not_active Expired - Fee Related
-
1996
- 1996-06-15 TW TW085107245A patent/TW301840B/zh active
- 1996-12-03 DE DE69623731T patent/DE69623731T2/de not_active Expired - Fee Related
- 1996-12-03 EP EP96308747A patent/EP0778607B1/de not_active Expired - Lifetime
- 1996-12-03 AT AT96308747T patent/ATE224584T1/de not_active IP Right Cessation
- 1996-12-04 KR KR1019960061474A patent/KR100430644B1/ko not_active IP Right Cessation
- 1996-12-04 JP JP8324326A patent/JPH09181057A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
ATE224584T1 (de) | 2002-10-15 |
KR100430644B1 (ko) | 2004-09-16 |
US5817534A (en) | 1998-10-06 |
DE69623731T2 (de) | 2003-06-05 |
TW301840B (en) | 1997-04-01 |
EP0778607A1 (de) | 1997-06-11 |
EP0778607B1 (de) | 2002-09-18 |
KR970052753A (ko) | 1997-07-29 |
JPH09181057A (ja) | 1997-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |