TW334616B - Method for programming flash memory cells - Google Patents

Method for programming flash memory cells

Info

Publication number
TW334616B
TW334616B TW086104001A TW86104001A TW334616B TW 334616 B TW334616 B TW 334616B TW 086104001 A TW086104001 A TW 086104001A TW 86104001 A TW86104001 A TW 86104001A TW 334616 B TW334616 B TW 334616B
Authority
TW
Taiwan
Prior art keywords
flash memory
gate
programming
memory cell
electric field
Prior art date
Application number
TW086104001A
Other languages
English (en)
Inventor
Jin Ahn Byung
Seob Kim Myong
Chun An Jae
Hyun Sone Jea
Original Assignee
Hyundai Eletronics Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Eletronics Ind Co Ltd filed Critical Hyundai Eletronics Ind Co Ltd
Application granted granted Critical
Publication of TW334616B publication Critical patent/TW334616B/zh

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B41/00Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/32055Deposition of semiconductive layers, e.g. poly - or amorphous silicon layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/788Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881Programmable transistors with only two possible levels of programmation
    • H01L29/7884Programmable transistors with only two possible levels of programmation charging by hot carrier injection
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B41/00Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H10B41/41Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region of a memory region comprising a cell select transistor, e.g. NAND

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
  • Read Only Memory (AREA)
TW086104001A 1996-04-01 1997-03-28 Method for programming flash memory cells TW334616B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960009730A KR100217900B1 (ko) 1996-04-01 1996-04-01 플래쉬 메모리 셀의 프로그램 방법

Publications (1)

Publication Number Publication Date
TW334616B true TW334616B (en) 1998-06-21

Family

ID=19454775

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086104001A TW334616B (en) 1996-04-01 1997-03-28 Method for programming flash memory cells

Country Status (8)

Country Link
US (1) US5867426A (zh)
EP (1) EP0800179B1 (zh)
JP (1) JP2963882B2 (zh)
KR (1) KR100217900B1 (zh)
CN (1) CN1084931C (zh)
DE (1) DE69719584T2 (zh)
GB (1) GB2311895B (zh)
TW (1) TW334616B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100207504B1 (ko) * 1996-03-26 1999-07-15 윤종용 불휘발성 메모리소자, 그 제조방법 및 구동방법
KR100276653B1 (ko) 1998-08-27 2001-01-15 윤종용 스프릿 게이트형 불휘발성 메모리 셀의 구동방법 및 이 셀들을구비한 반도체 메모리 장치의 구동방법
KR100293637B1 (ko) 1998-10-27 2001-07-12 박종섭 드레인 전압 펌핑 회로
US6638821B1 (en) * 2002-01-10 2003-10-28 Taiwan Semiconductor Manufacturing Company Flash EEPROM with function of single bit erasing by an application of negative control gate selection
US7057931B2 (en) * 2003-11-07 2006-06-06 Sandisk Corporation Flash memory programming using gate induced junction leakage current
TW200607080A (en) * 2004-08-02 2006-02-16 Powerchip Semiconductor Corp Flash memory cell and fabricating method thereof
US8369155B2 (en) 2007-08-08 2013-02-05 Hynix Semiconductor Inc. Operating method in a non-volatile memory device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5280446A (en) * 1990-09-20 1994-01-18 Bright Microelectronics, Inc. Flash eprom memory circuit having source side programming
JP3004043B2 (ja) * 1990-10-23 2000-01-31 株式会社東芝 不揮発性半導体メモリ装置
BE1004424A3 (nl) * 1991-01-31 1992-11-17 Imec Inter Uni Micro Electr Transistorstruktuur voor uitwisbare en programmeerbare geheugens.
US5274588A (en) * 1991-07-25 1993-12-28 Texas Instruments Incorporated Split-gate cell for an EEPROM
US5317179A (en) * 1991-09-23 1994-05-31 Integrated Silicon Solution, Inc. Non-volatile semiconductor memory cell
WO1994015363A1 (en) * 1992-12-28 1994-07-07 Yu Shih Chiang Non-volatile semiconductor memory cell
US5324998A (en) * 1993-02-10 1994-06-28 Micron Semiconductor, Inc. Zero power reprogrammable flash cell for a programmable logic device
JP3105109B2 (ja) * 1993-05-19 2000-10-30 株式会社東芝 不揮発性半導体記憶装置
US5349220A (en) * 1993-08-10 1994-09-20 United Microelectronics Corporation Flash memory cell and its operation
US5471422A (en) * 1994-04-11 1995-11-28 Motorola, Inc. EEPROM cell with isolation transistor and methods for making and operating the same
US5511021A (en) * 1995-02-22 1996-04-23 National Semiconductor Corporation Method for programming a single EPROM or flash memory cell to store multiple levels of data that utilizes a forward-biased source-to-substrate junction
US5491657A (en) * 1995-02-24 1996-02-13 Advanced Micro Devices, Inc. Method for bulk (or byte) charging and discharging an array of flash EEPROM memory cells

Also Published As

Publication number Publication date
KR970072447A (ko) 1997-11-07
EP0800179B1 (en) 2003-03-12
JP2963882B2 (ja) 1999-10-18
GB2311895A (en) 1997-10-08
EP0800179A3 (en) 1999-04-28
JPH1032272A (ja) 1998-02-03
DE69719584D1 (de) 2003-04-17
CN1168539A (zh) 1997-12-24
EP0800179A2 (en) 1997-10-08
DE69719584T2 (de) 2004-04-08
CN1084931C (zh) 2002-05-15
GB2311895B (en) 2001-03-14
KR100217900B1 (ko) 1999-09-01
GB9706573D0 (en) 1997-05-21
US5867426A (en) 1999-02-02

Similar Documents

Publication Publication Date Title
TWI322498B (en) Non-volatile memory device and method for forming
EP0690452A3 (en) Electrically erasable memory and method of erasure
US5777361A (en) Single gate nonvolatile memory cell and method for accessing the same
JPS608634B2 (ja) 単相電荷転送装置
KR100397048B1 (ko) 자기정렬매몰채널/접합적층게이트플래시메모리셀
EP0948058B1 (en) Floating gate memory with substrate band-to-band tunneling induced hot electron injection
US5049956A (en) Memory cell structure of semiconductor memory device
TW359041B (en) Non-volatile semiconductor memory cell utilizing asymmetrical charge trapping
US6894340B2 (en) Non-volatile semiconductor memory cell utilizing poly-edge discharge
KR960043250A (ko) 반도체 장치
TW368749B (en) Semiconductor memory device and driving method thereof
KR970018492A (ko) 불휘발성 메모리 셀 및 그 제조방법
TW363230B (en) Manufacturing method for the flash memory cell with split-gate
TW334616B (en) Method for programming flash memory cells
US5141886A (en) Vertical floating-gate transistor
GB2200795A (en) Eprom cell with integral select transistor
US5726933A (en) Clipped sine shaped waveform to reduce the cycling-induced electron trapping in the tunneling oxide of flash EEPROM
JPH0878541A (ja) 単一トランジスタメモリセル構造および自己整合単一トランジスタメモリセル構造を形成するための方法
JPH01320700A (ja) パルスによって消去可能なeprom
JPH0132673B2 (zh)
TW428287B (en) Manufacturing method for flash memory and the operation method for its erasure
JPS56104473A (en) Semiconductor memory device and manufacture thereof
KR100259580B1 (ko) 반도체장치의 분리형 게이트 플래쉬 셀 및 그의 제조방법
KR20010036727A (ko) 비휘발성 메모리 소자 및 그의 제조방법
TW478152B (en) Improved floating gate field effect transistor and method of driving the same

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees