TW274636B - - Google Patents

Info

Publication number
TW274636B
TW274636B TW084110791A TW84110791A TW274636B TW 274636 B TW274636 B TW 274636B TW 084110791 A TW084110791 A TW 084110791A TW 84110791 A TW84110791 A TW 84110791A TW 274636 B TW274636 B TW 274636B
Authority
TW
Taiwan
Application number
TW084110791A
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of TW274636B publication Critical patent/TW274636B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW084110791A 1994-10-14 1995-10-13 TW274636B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US32329094A 1994-10-14 1994-10-14

Publications (1)

Publication Number Publication Date
TW274636B true TW274636B (zh) 1996-04-21

Family

ID=23258543

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084110791A TW274636B (zh) 1994-10-14 1995-10-13

Country Status (4)

Country Link
US (1) US5623214A (zh)
EP (1) EP0707214A3 (zh)
JP (1) JPH08211101A (zh)
TW (1) TW274636B (zh)

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US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
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JP2001091543A (ja) * 1999-09-27 2001-04-06 Hitachi Ltd 半導体検査装置
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US6437587B1 (en) * 1999-11-04 2002-08-20 Agilent Technologies, Inc. ICT test fixture for fine pitch testing
US6838890B2 (en) * 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
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US6912778B2 (en) 2001-07-19 2005-07-05 Micron Technology, Inc. Methods of fabricating full-wafer silicon probe cards for burn-in and testing of semiconductor devices
AU2002327490A1 (en) 2001-08-21 2003-06-30 Cascade Microtech, Inc. Membrane probing system
US7127550B1 (en) * 2001-10-31 2006-10-24 Sandisk Corporation Multi-module simultaneous program, erase test, and performance method for flash memory
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
JP2007517231A (ja) 2003-12-24 2007-06-28 カスケード マイクロテック インコーポレイテッド アクティブ・ウェハプローブ
US6943573B1 (en) * 2004-03-23 2005-09-13 Texas Instruments Incorporated System and method for site-to-site yield comparison while testing integrated circuit dies
KR20070058522A (ko) 2004-09-13 2007-06-08 캐스케이드 마이크로테크 인코포레이티드 양측 프루빙 구조
US7282933B2 (en) * 2005-01-03 2007-10-16 Formfactor, Inc. Probe head arrays
US7414418B2 (en) * 2005-01-07 2008-08-19 Formfactor, Inc. Method and apparatus for increasing operating frequency of a system for testing electronic devices
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
JP2006343182A (ja) * 2005-06-08 2006-12-21 Renesas Technology Corp 半導体集積回路装置の製造方法
JP2007101373A (ja) * 2005-10-05 2007-04-19 Renesas Technology Corp プローブシート接着ホルダ、プローブカード、半導体検査装置および半導体装置の製造方法
JP2007121180A (ja) * 2005-10-31 2007-05-17 Fujitsu Ltd 半導体装置の試験装置及び半導体装置の試験方法
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7649366B2 (en) 2006-09-01 2010-01-19 Formfactor, Inc. Method and apparatus for switching tester resources
US7852094B2 (en) * 2006-12-06 2010-12-14 Formfactor, Inc. Sharing resources in a system for testing semiconductor devices
US7764076B2 (en) * 2007-02-20 2010-07-27 Centipede Systems, Inc. Method and apparatus for aligning and/or leveling a test head
WO2008120302A1 (ja) * 2007-03-28 2008-10-09 Fujitsu Microelectronics Limited 半導体装置の試験装置
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8278958B2 (en) * 2009-05-01 2012-10-02 Cambridge Silicon Radio Ltd. Semiconductor test system and method
US8347689B2 (en) * 2009-12-08 2013-01-08 GM Global Technology Operations LLC Tool for assisting leak testing of an enclosed volume and method incorporating the tool
US8174793B2 (en) 2010-06-22 2012-05-08 Tdk Corporation Thin film magnetic head and magnetic disk device and electronic component
TWI473189B (zh) * 2012-06-15 2015-02-11 Powertech Technology Inc 已單離晶粒堆疊封裝件之晶圓級測試方法
JP5928203B2 (ja) * 2012-07-10 2016-06-01 三菱電機株式会社 検査装置
US9891266B2 (en) * 2014-02-25 2018-02-13 Taiwan Semiconductor Manufacturing Co., Ltd. Test circuit and method
CN114966139B (zh) * 2022-07-22 2022-10-25 威海双丰物探设备股份有限公司 水听器用阻抗匹配器参数测量装置

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JP2932674B2 (ja) 1990-10-31 1999-08-09 ソニー株式会社 ステツピングモータの製造方法
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Also Published As

Publication number Publication date
JPH08211101A (ja) 1996-08-20
US5623214A (en) 1997-04-22
EP0707214A2 (en) 1996-04-17
EP0707214A3 (en) 1997-04-16

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