|
US3875657A
(en)
*
|
1973-09-04 |
1975-04-08 |
Trw Inc |
Dielectrically isolated semiconductor devices
|
|
US4113512A
(en)
*
|
1976-10-28 |
1978-09-12 |
International Business Machines Corporation |
Technique for preventing forward biased epi-isolation degradation
|
|
JPS542657A
(en)
*
|
1977-06-08 |
1979-01-10 |
Mitsubishi Electric Corp |
Manufacture for semiconductor device
|
|
US4178191A
(en)
*
|
1978-08-10 |
1979-12-11 |
Rca Corp. |
Process of making a planar MOS silicon-on-insulating substrate device
|
|
JPS574163A
(en)
*
|
1980-06-09 |
1982-01-09 |
Nec Corp |
Manufacture of sos/mos transistor
|
|
JPS57162444A
(en)
*
|
1981-03-31 |
1982-10-06 |
Fujitsu Ltd |
Manufacture of semiconductor device
|
|
US4574209A
(en)
*
|
1982-06-21 |
1986-03-04 |
Eaton Corporation |
Split gate EFET and circuitry
|
|
US4498227A
(en)
*
|
1983-07-05 |
1985-02-12 |
Fairchild Camera & Instrument Corporation |
Wafer fabrication by implanting through protective layer
|
|
US4661202A
(en)
*
|
1984-02-14 |
1987-04-28 |
Kabushiki Kaisha Toshiba |
Method of manufacturing semiconductor device
|
|
US4583282A
(en)
*
|
1984-09-14 |
1986-04-22 |
Motorola, Inc. |
Process for self-aligned buried layer, field guard, and isolation
|
|
US4631804A
(en)
*
|
1984-12-10 |
1986-12-30 |
At&T Bell Laboratories |
Technique for reducing substrate warpage springback using a polysilicon subsurface strained layer
|
|
JPS61256740A
(ja)
*
|
1985-05-10 |
1986-11-14 |
Matsushita Electric Ind Co Ltd |
半導体装置の製造方法
|
|
JPS6224854A
(ja)
*
|
1985-07-24 |
1987-02-02 |
Nippon Kokan Kk <Nkk> |
真空ア−ク再溶解装置
|
|
JPS6276646A
(ja)
*
|
1985-09-30 |
1987-04-08 |
Toshiba Corp |
半導体装置の製造方法
|
|
DD258681A1
(de)
*
|
1986-04-02 |
1988-07-27 |
Erfurt Mikroelektronik |
Verfahren zum herstellen getterfaehiger und formstabiler halbleiterscheiben
|
|
JPS632370A
(ja)
*
|
1986-06-23 |
1988-01-07 |
Nissan Motor Co Ltd |
半導体装置
|
|
US4732865A
(en)
*
|
1986-10-03 |
1988-03-22 |
Tektronix, Inc. |
Self-aligned internal mobile ion getter for multi-layer metallization on integrated circuits
|
|
JPS63237574A
(ja)
*
|
1987-03-26 |
1988-10-04 |
Nec Corp |
Mis型半導体装置の製造方法
|
|
JPS63310123A
(ja)
*
|
1987-06-12 |
1988-12-19 |
Kyushu Denshi Kinzoku Kk |
シリコン半導体基板
|
|
US4820653A
(en)
*
|
1988-02-12 |
1989-04-11 |
American Telephone And Telegraph Company |
Technique for fabricating complementary dielectrically isolated wafer
|
|
US5059550A
(en)
*
|
1988-10-25 |
1991-10-22 |
Sharp Kabushiki Kaisha |
Method of forming an element isolating portion in a semiconductor device
|
|
JPH02148855A
(ja)
*
|
1988-11-30 |
1990-06-07 |
Fujitsu Ltd |
半導体装置及びその製造方法
|
|
US4883215A
(en)
*
|
1988-12-19 |
1989-11-28 |
Duke University |
Method for bubble-free bonding of silicon wafers
|
|
JPH02237120A
(ja)
*
|
1989-03-10 |
1990-09-19 |
Fujitsu Ltd |
半導体装置とその製造方法
|
|
US5001075A
(en)
*
|
1989-04-03 |
1991-03-19 |
Motorola |
Fabrication of dielectrically isolated semiconductor device
|
|
US5164218A
(en)
*
|
1989-05-12 |
1992-11-17 |
Nippon Soken, Inc. |
Semiconductor device and a method for producing the same
|
|
JP2597022B2
(ja)
*
|
1990-02-23 |
1997-04-02 |
シャープ株式会社 |
素子分離領域の形成方法
|
|
US5318919A
(en)
*
|
1990-07-31 |
1994-06-07 |
Sanyo Electric Co., Ltd. |
Manufacturing method of thin film transistor
|
|
JPH04363025A
(ja)
*
|
1991-01-28 |
1992-12-15 |
Mitsubishi Electric Corp |
半導体装置及びその製造方法
|
|
US5218213A
(en)
*
|
1991-02-22 |
1993-06-08 |
Harris Corporation |
SOI wafer with sige
|
|
EP0537889A2
(en)
*
|
1991-10-14 |
1993-04-21 |
Fujitsu Limited |
Quantum interference effect semiconductor device and method of producing the same
|
|
JPH05136153A
(ja)
*
|
1991-11-14 |
1993-06-01 |
Toshiba Corp |
半導体装置及びその製造方法
|
|
JPH05291265A
(ja)
*
|
1992-04-13 |
1993-11-05 |
Sony Corp |
ウエハ裏面ゲッター層の形成方法
|
|
JP3297937B2
(ja)
*
|
1992-10-16 |
2002-07-02 |
ソニー株式会社 |
半導体装置及びその製造方法
|
|
JPH06252153A
(ja)
*
|
1993-03-01 |
1994-09-09 |
Toshiba Corp |
半導体装置の製造方法
|
|
US5272104A
(en)
*
|
1993-03-11 |
1993-12-21 |
Harris Corporation |
Bonded wafer process incorporating diamond insulator
|
|
JPH0722517A
(ja)
*
|
1993-06-22 |
1995-01-24 |
Mitsubishi Electric Corp |
半導体装置およびその製造方法
|
|
US5294562A
(en)
*
|
1993-09-27 |
1994-03-15 |
United Microelectronics Corporation |
Trench isolation with global planarization using flood exposure
|
|
JPH07106413A
(ja)
*
|
1993-10-08 |
1995-04-21 |
Nippondenso Co Ltd |
溝分離半導体装置及びその製造方法
|