TW253977B - - Google Patents
Info
- Publication number
- TW253977B TW253977B TW083107313A TW83107313A TW253977B TW 253977 B TW253977 B TW 253977B TW 083107313 A TW083107313 A TW 083107313A TW 83107313 A TW83107313 A TW 83107313A TW 253977 B TW253977 B TW 253977B
- Authority
- TW
- Taiwan
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/02—Devices for holding articles during cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02082—Cleaning product to be cleaned
- H01L21/0209—Cleaning of wafer backside
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02096—Cleaning only mechanical cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32982093 | 1993-11-30 | ||
| JP6114779A JPH07211677A (ja) | 1993-11-30 | 1994-04-28 | 基板のスクラビング方法とその装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW253977B true TW253977B (zh) | 1995-08-11 |
Family
ID=26453449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW083107313A TW253977B (zh) | 1993-11-30 | 1994-08-10 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US5465447A (zh) |
| EP (2) | EP0655772A3 (zh) |
| JP (1) | JPH07211677A (zh) |
| TW (1) | TW253977B (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI668781B (zh) * | 2016-12-28 | 2019-08-11 | 日商斯庫林集團股份有限公司 | 除電裝置及除電方法 |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6050884A (en) * | 1996-02-28 | 2000-04-18 | Ebara Corporation | Polishing apparatus |
| US6200201B1 (en) * | 1996-08-29 | 2001-03-13 | Lam Research Corporation | Cleaning/buffer apparatus for use in a wafer processing device |
| US5967881A (en) * | 1997-05-29 | 1999-10-19 | Tucker; Thomas N. | Chemical mechanical planarization tool having a linear polishing roller |
| JP3333733B2 (ja) * | 1998-02-20 | 2002-10-15 | 東京エレクトロン株式会社 | 洗浄装置 |
| TW393378B (en) * | 1998-04-08 | 2000-06-11 | Applied Materials Inc | Apparatus and methods for slurry removal in chemical mechanical polishing |
| DE69928319T2 (de) * | 1998-04-27 | 2006-04-20 | Tokyo Seimitsu Co. Ltd., Mitaka | Oberflächenbearbeitungsverfahren und Oberflächenbearbeitungsvorrichtung für Halbleiterscheiben |
| US6864186B1 (en) * | 1998-07-28 | 2005-03-08 | Micron Technology, Inc. | Method of reducing surface contamination in semiconductor wet-processing vessels |
| US6672358B2 (en) | 1998-11-06 | 2004-01-06 | Canon Kabushiki Kaisha | Sample processing system |
| TW484184B (en) * | 1998-11-06 | 2002-04-21 | Canon Kk | Sample separating apparatus and method, and substrate manufacturing method |
| JP2000150836A (ja) * | 1998-11-06 | 2000-05-30 | Canon Inc | 試料の処理システム |
| TW472296B (en) * | 1999-05-25 | 2002-01-11 | Ebara Corp | Substrate treating apparatus and method of operating the same |
| AT407828B (de) * | 2000-02-15 | 2001-06-25 | Knetsch Ges M B H Ing | Vorrichtung zur mechanischen reinigung und chemischen desinfektion von medizinischen instrumenten |
| US20020170574A1 (en) * | 2001-05-21 | 2002-11-21 | Speedfam-Ipec Corporation | Differential Cleaning for semiconductor wafers with copper circuitry |
| JP2002353081A (ja) | 2001-05-25 | 2002-12-06 | Canon Inc | 板部材の分離装置及び分離方法 |
| JP2002353423A (ja) * | 2001-05-25 | 2002-12-06 | Canon Inc | 板部材の分離装置及び処理方法 |
| JP3958539B2 (ja) | 2001-08-02 | 2007-08-15 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
| JP3944368B2 (ja) * | 2001-09-05 | 2007-07-11 | 株式会社荏原製作所 | 基板処理装置及び基板処理方法 |
| US6616516B1 (en) * | 2001-12-13 | 2003-09-09 | Lam Research Corporation | Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates |
| US6703317B1 (en) * | 2003-01-30 | 2004-03-09 | Taiwan Semiconductor Manufacturing Co., Ltd | Method to neutralize charge imbalance following a wafer cleaning process |
| KR100963814B1 (ko) * | 2005-10-07 | 2010-06-16 | 주식회사 코미코 | 파티클 제거 방법 및 장치, 및 이를 포함하는 파티클 측정방법 및 장치 |
| KR100933431B1 (ko) * | 2005-07-26 | 2009-12-23 | 주식회사 코미코 | 파티클 제거 방법 및 장치, 및 이를 포함하는 파티클 측정방법 및 장치 |
| US8578953B2 (en) * | 2006-12-20 | 2013-11-12 | Tokyo Electron Limited | Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium |
| CN101346045B (zh) * | 2007-07-13 | 2010-05-26 | 富葵精密组件(深圳)有限公司 | 电路板清洁装置 |
| JP6057334B2 (ja) * | 2013-03-15 | 2017-01-11 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
| JP6403564B2 (ja) * | 2014-12-12 | 2018-10-10 | 株式会社ディスコ | 洗浄装置 |
| CN104624539A (zh) * | 2015-02-14 | 2015-05-20 | 济南大学 | 一种三爪卡盘式钢丝绳除垢装置 |
| JP6887280B2 (ja) * | 2017-03-27 | 2021-06-16 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置、基板処理方法およびプログラム記録媒体 |
| CN107662161B (zh) * | 2017-11-07 | 2023-07-14 | 佛山市高明富东机械制造有限公司 | 一种具有防尘功能的板材抛光机 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3479222A (en) * | 1966-06-22 | 1969-11-18 | Disc Pack Corp | Apparatus for and method of cleaning memory discs |
| US3748677A (en) * | 1970-09-18 | 1973-07-31 | Western Electric Co | Methods and apparatus for scrubbing thin, fragile slices of material |
| US4109337A (en) * | 1977-12-08 | 1978-08-29 | Machine Technology, Inc. | Automated two-sided cleaning apparatus |
| US4208760A (en) * | 1977-12-19 | 1980-06-24 | Huestis Machine Corp. | Apparatus and method for cleaning wafers |
| JPS59193029A (ja) * | 1983-04-15 | 1984-11-01 | Hitachi Ltd | 洗浄方法およびその装置 |
| JPS6080560A (ja) * | 1983-10-12 | 1985-05-08 | Toppan Printing Co Ltd | マスクの裏面研磨方法 |
| JPS62259447A (ja) * | 1986-05-02 | 1987-11-11 | Nec Kyushu Ltd | ブラシスクラバ−装置 |
| JP2607479B2 (ja) * | 1986-09-10 | 1997-05-07 | 株式会社日立製作所 | 異物検査用鏡面ウェハの再生用スクラバ |
| KR0134962B1 (ko) * | 1989-07-13 | 1998-04-22 | 나까다 구스오 | 디스크 세척장치 |
| US5317778A (en) * | 1991-07-31 | 1994-06-07 | Shin-Etsu Handotai Co., Ltd. | Automatic cleaning apparatus for wafers |
| US5345639A (en) * | 1992-05-28 | 1994-09-13 | Tokyo Electron Limited | Device and method for scrubbing and cleaning substrate |
| JPH1184831A (ja) * | 1997-09-08 | 1999-03-30 | Ricoh Co Ltd | 画像形成装置 |
-
1994
- 1994-04-28 JP JP6114779A patent/JPH07211677A/ja active Pending
- 1994-08-10 TW TW083107313A patent/TW253977B/zh active
- 1994-09-07 US US08/301,562 patent/US5465447A/en not_active Expired - Lifetime
- 1994-10-11 EP EP94307442A patent/EP0655772A3/en not_active Withdrawn
- 1994-10-11 EP EP95202045A patent/EP0677867A2/en not_active Withdrawn
-
1996
- 1996-10-10 US US08/729,077 patent/US5795401A/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI668781B (zh) * | 2016-12-28 | 2019-08-11 | 日商斯庫林集團股份有限公司 | 除電裝置及除電方法 |
| US11064598B2 (en) | 2016-12-28 | 2021-07-13 | SCREEN Holdings Co., Ltd. | Static eliminator and static eliminating method |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0677867A3 (zh) | 1995-11-22 |
| JPH07211677A (ja) | 1995-08-11 |
| EP0677867A2 (en) | 1995-10-18 |
| EP0655772A3 (en) | 1995-07-12 |
| US5795401A (en) | 1998-08-18 |
| US5465447A (en) | 1995-11-14 |
| EP0655772A2 (en) | 1995-05-31 |