TW242194B - - Google Patents
Info
- Publication number
- TW242194B TW242194B TW083101082A TW83101082A TW242194B TW 242194 B TW242194 B TW 242194B TW 083101082 A TW083101082 A TW 083101082A TW 83101082 A TW83101082 A TW 83101082A TW 242194 B TW242194 B TW 242194B
- Authority
- TW
- Taiwan
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4485—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation without using carrier gas in contact with the source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S427/00—Coating processes
- Y10S427/101—Liquid Source Chemical Depostion, i.e. LSCVD or Aerosol Chemical Vapor Deposition, i.e. ACVD
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5034204A JP2870719B2 (ja) | 1993-01-29 | 1993-01-29 | 処理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW242194B true TW242194B (zh) | 1995-03-01 |
Family
ID=12407635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW083101082A TW242194B (zh) | 1993-01-29 | 1994-02-08 |
Country Status (4)
Country | Link |
---|---|
US (2) | US5505781A (zh) |
JP (1) | JP2870719B2 (zh) |
KR (1) | KR100230693B1 (zh) |
TW (1) | TW242194B (zh) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0551105A3 (en) * | 1992-01-07 | 1993-09-15 | Fujitsu Limited | Negative type composition for chemically amplified resist and process and apparatus of chemically amplified resist pattern |
US6428623B2 (en) * | 1993-05-14 | 2002-08-06 | Micron Technology, Inc. | Chemical vapor deposition apparatus with liquid feed |
JPH07312329A (ja) * | 1994-05-18 | 1995-11-28 | Dainippon Screen Mfg Co Ltd | 密着強化処理装置および密着強化処理方法 |
US5641541A (en) * | 1995-09-29 | 1997-06-24 | Taiwan Semiconductor Manufacturing Company | Process to apply photoresist printer to a wafer |
US5763006A (en) * | 1996-10-04 | 1998-06-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus for automatic purge of HMDS vapor piping |
SG67433A1 (en) * | 1996-11-01 | 1999-09-21 | Tokyo Electron Ltd | Method and apparatus for processing substrate |
JPH1154496A (ja) * | 1997-08-07 | 1999-02-26 | Tokyo Electron Ltd | 熱処理装置及びガス処理装置 |
JP3406488B2 (ja) * | 1997-09-05 | 2003-05-12 | 東京エレクトロン株式会社 | 真空処理装置 |
US6207006B1 (en) | 1997-09-18 | 2001-03-27 | Tokyo Electron Limited | Vacuum processing apparatus |
KR100524204B1 (ko) * | 1998-01-07 | 2006-01-27 | 동경 엘렉트론 주식회사 | 가스 처리장치 |
US6136725A (en) * | 1998-04-14 | 2000-10-24 | Cvd Systems, Inc. | Method for chemical vapor deposition of a material on a substrate |
US6296711B1 (en) | 1998-04-14 | 2001-10-02 | Cvd Systems, Inc. | Film processing system |
KR20010034781A (ko) | 1998-04-14 | 2001-04-25 | 잭 피. 샐러노 | 박막 증착 시스템 |
US6358323B1 (en) * | 1998-07-21 | 2002-03-19 | Applied Materials, Inc. | Method and apparatus for improved control of process and purge material in a substrate processing system |
US6409837B1 (en) | 1999-01-13 | 2002-06-25 | Tokyo Electron Limited | Processing system and method for chemical vapor deposition of a metal layer using a liquid precursor |
US6537420B2 (en) * | 1999-12-17 | 2003-03-25 | Texas Instruments Incorporated | Method and apparatus for restricting process fluid flow within a showerhead assembly |
DE10003758A1 (de) * | 2000-01-28 | 2001-08-02 | Aixtron Gmbh | Vorrichtung und Verfahren zum Abscheiden wenigstens eines in flüssiger oder gelöster Form vorliegenden Prekursors |
US6596085B1 (en) * | 2000-02-01 | 2003-07-22 | Applied Materials, Inc. | Methods and apparatus for improved vaporization of deposition material in a substrate processing system |
KR20010083206A (ko) * | 2000-02-22 | 2001-08-31 | 히가시 데쓰로 | 처리장치 |
JP3872952B2 (ja) * | 2000-10-27 | 2007-01-24 | 東京エレクトロン株式会社 | 熱処理装置及び熱処理方法 |
JP2005523384A (ja) * | 2002-04-19 | 2005-08-04 | マットソン テクノロジイ インコーポレイテッド | 低蒸気圧のガス前駆体を用いて基板上にフィルムを蒸着させるシステム |
TWI336905B (en) * | 2002-05-17 | 2011-02-01 | Semiconductor Energy Lab | Evaporation method, evaporation device and method of fabricating light emitting device |
US20040040502A1 (en) * | 2002-08-29 | 2004-03-04 | Micron Technology, Inc. | Micromachines for delivering precursors and gases for film deposition |
US20040040503A1 (en) * | 2002-08-29 | 2004-03-04 | Micron Technology, Inc. | Micromachines for delivering precursors and gases for film deposition |
US20040157430A1 (en) * | 2003-02-07 | 2004-08-12 | Asml Netherlands B.V. | Methods and apparatus for processing semiconductor wafers with plasma processing chambers in a wafer track environment |
TW573317B (en) * | 2003-04-01 | 2004-01-21 | Mosel Vitelic Inc | Coating method of adhesive |
US7727588B2 (en) * | 2003-09-05 | 2010-06-01 | Yield Engineering Systems, Inc. | Apparatus for the efficient coating of substrates |
US7326469B2 (en) * | 2004-09-16 | 2008-02-05 | General Electric Company | Coating system and process and apparatus for depositing a coating system |
US7651306B2 (en) | 2004-12-22 | 2010-01-26 | Applied Materials, Inc. | Cartesian robot cluster tool architecture |
US7699021B2 (en) | 2004-12-22 | 2010-04-20 | Sokudo Co., Ltd. | Cluster tool substrate throughput optimization |
US7819079B2 (en) | 2004-12-22 | 2010-10-26 | Applied Materials, Inc. | Cartesian cluster tool configuration for lithography type processes |
US7798764B2 (en) | 2005-12-22 | 2010-09-21 | Applied Materials, Inc. | Substrate processing sequence in a cartesian robot cluster tool |
US7255747B2 (en) | 2004-12-22 | 2007-08-14 | Sokudo Co., Ltd. | Coat/develop module with independent stations |
US8097120B2 (en) * | 2006-02-21 | 2012-01-17 | Lam Research Corporation | Process tuning gas injection from the substrate edge |
CN1847980B (zh) * | 2006-03-24 | 2010-12-01 | 友达光电股份有限公司 | 低压处理设备 |
CN101479054B (zh) * | 2006-08-03 | 2010-09-01 | 和舰科技(苏州)有限公司 | 一种光阻涂布和显影装置中的管路自动清洗装置 |
US7993457B1 (en) * | 2007-01-23 | 2011-08-09 | Novellus Systems, Inc. | Deposition sub-chamber with variable flow |
JP5196220B2 (ja) * | 2007-04-23 | 2013-05-15 | 兵神装備株式会社 | 汲出し装置 |
US8596336B2 (en) * | 2008-06-03 | 2013-12-03 | Applied Materials, Inc. | Substrate support temperature control |
US8361231B2 (en) | 2009-09-30 | 2013-01-29 | Ckd Corporation | Liquid vaporization system |
KR101845580B1 (ko) | 2011-01-19 | 2018-04-04 | 시케이디 가부시키가이샤 | 액체 기화기 |
JP5810004B2 (ja) * | 2012-02-27 | 2015-11-11 | Ckd株式会社 | 液体制御装置 |
JP5989944B2 (ja) | 2011-09-30 | 2016-09-07 | Ckd株式会社 | 液体制御装置 |
KR101892758B1 (ko) | 2011-09-30 | 2018-10-04 | 시케이디 가부시키가이샤 | 액체 제어 장치 |
JP5819154B2 (ja) | 2011-10-06 | 2015-11-18 | 株式会社日立ハイテクノロジーズ | プラズマエッチング装置 |
JP5973178B2 (ja) | 2012-02-01 | 2016-08-23 | Ckd株式会社 | 液体制御装置 |
JP5919089B2 (ja) * | 2012-05-15 | 2016-05-18 | Ckd株式会社 | 液体制御装置 |
JP5919115B2 (ja) * | 2012-07-12 | 2016-05-18 | Ckd株式会社 | 液体制御装置、及び液体制御装置に適用される網状体組立体 |
US9353439B2 (en) | 2013-04-05 | 2016-05-31 | Lam Research Corporation | Cascade design showerhead for transient uniformity |
US10023959B2 (en) | 2015-05-26 | 2018-07-17 | Lam Research Corporation | Anti-transient showerhead |
CN105445973B (zh) * | 2015-12-31 | 2019-04-30 | 京东方科技集团股份有限公司 | 一种抽真空装置及采用该抽真空装置的操作方法 |
US10177001B2 (en) * | 2016-05-31 | 2019-01-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Surface modifying material for semiconductor device fabrication |
JP7314634B2 (ja) * | 2019-06-11 | 2023-07-26 | 東京エレクトロン株式会社 | 塗布装置及び塗布方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0028478B1 (en) * | 1979-10-31 | 1985-02-20 | The University Of Birmingham | Improvements in or relating to pipette means |
JPS59177368A (ja) * | 1983-03-29 | 1984-10-08 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
JPS62129846A (ja) * | 1985-12-02 | 1987-06-12 | Dainippon Screen Mfg Co Ltd | フオトレジストの塗布方法及び塗布装置 |
IT1198290B (it) * | 1986-12-02 | 1988-12-21 | Sgs Microelettronica Spa | Metodo di decontaminazione di una camera utilizzata nei processi sotto vuoto di deposizione,attacco o crescita di films di elevata purezza,di particolare applicazione nella tecnologia dei semiconduttori |
US4789564A (en) * | 1987-03-31 | 1988-12-06 | Union Carbide Corporation | Hydridoaminosilane treatment for rendering surfaces water-repellent |
JPH0333058Y2 (zh) * | 1987-06-26 | 1991-07-12 | ||
GB2213837B (en) * | 1987-12-22 | 1992-03-11 | Philips Electronic Associated | Electronic device manufacture with deposition of material |
US5278138A (en) * | 1990-04-16 | 1994-01-11 | Ott Kevin C | Aerosol chemical vapor deposition of metal oxide films |
US5252134A (en) * | 1991-05-31 | 1993-10-12 | Stauffer Craig M | Integrated delivery system for chemical vapor from non-gaseous sources for semiconductor processing |
US5203925A (en) * | 1991-06-20 | 1993-04-20 | Matsushita Electric Industrial Co., Ltd. | Apparatus for producing a thin film of tantalum oxide |
DE69218152T2 (de) * | 1991-12-26 | 1997-08-28 | Canon Kk | Herstellungsverfahren einer niedergeschlagenen Schicht mittels CVD, unter Verwendung von flüssigem Rohstoff und dazu geeignete Vorrichtung |
JP2906006B2 (ja) * | 1992-10-15 | 1999-06-14 | 東京エレクトロン株式会社 | 処理方法及びその装置 |
JP3319472B2 (ja) * | 1992-12-07 | 2002-09-03 | 富士通株式会社 | 半導体装置とその製造方法 |
-
1993
- 1993-01-29 JP JP5034204A patent/JP2870719B2/ja not_active Expired - Fee Related
-
1994
- 1994-01-28 US US08/189,071 patent/US5505781A/en not_active Expired - Lifetime
- 1994-01-28 KR KR1019940001584A patent/KR100230693B1/ko not_active IP Right Cessation
- 1994-02-08 TW TW083101082A patent/TW242194B/zh active
-
1996
- 1996-02-02 US US08/595,785 patent/US5681614A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5505781A (en) | 1996-04-09 |
KR100230693B1 (ko) | 1999-11-15 |
JPH06232035A (ja) | 1994-08-19 |
US5681614A (en) | 1997-10-28 |
JP2870719B2 (ja) | 1999-03-17 |