TW219953B - - Google Patents

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Publication number
TW219953B
TW219953B TW081107437A TW81107437A TW219953B TW 219953 B TW219953 B TW 219953B TW 081107437 A TW081107437 A TW 081107437A TW 81107437 A TW81107437 A TW 81107437A TW 219953 B TW219953 B TW 219953B
Authority
TW
Taiwan
Prior art keywords
silicon
nitride
gold
titanium
oxynitride
Prior art date
Application number
TW081107437A
Other languages
English (en)
Original Assignee
Ppg Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27118090&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TW219953(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from US07/768,791 external-priority patent/US5705278A/en
Priority claimed from US07/799,806 external-priority patent/US6274244B1/en
Application filed by Ppg Industries Inc filed Critical Ppg Industries Inc
Application granted granted Critical
Publication of TW219953B publication Critical patent/TW219953B/zh

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3605Coatings of the type glass/metal/inorganic compound
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/225Nitrides
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/245Oxides by deposition from the vapour phase
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3441Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising carbon, a carbide or oxycarbide
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3607Coatings of the type glass/inorganic compound/metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3615Coatings of the type glass/metal/other inorganic layers, at least one layer being non-metallic
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3618Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3642Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366Low-emissivity or solar control coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3689Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one oxide layer being obtained by oxidation of a metallic layer
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/40Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal all coatings being metal coatings
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676Oxynitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/18Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
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    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/23Mixtures
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    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/25Metals
    • C03C2217/27Mixtures of metals, alloys
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    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/28Other inorganic materials
    • C03C2217/281Nitrides
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    • C03C2217/00Coatings on glass
    • C03C2217/70Properties of coatings
    • C03C2217/78Coatings specially designed to be durable, e.g. scratch-resistant

Description

219953 經濟部中央標準局β工消费合作社印般 五、發明説明(1 ) 發明之背署 本發明大致闞於真空塗膜之技藝,且更特別Μ於製造真 空塗膜之技S,其在如彎曲、層合及回火之高溫處理維持 金羼外觀及其他金屬性。 沈積時具有所欲金臞外觀及其他金雇性質之大部份玻璃 真空塗祺在進行高溫處理時失去其特徽金羼外觀及性質。 具有金臛外觀及其他金羼性質,如導電性及紅外線反射性 之真空塗膜*通常為金鼷、金臞氮化物、金觸碳化物或金 覼硼化物,其在空氣中加热時氧化而形成絕緣、較透明及 較不吸收之金羼氧化物。雖然許多金靨可在空氣中加热至 發生保護氧化物表層之玻瑰形成溫度(600至70〇υ),透 明金靥塗膜之薄及其必然之非巨甚至多孔本性防止通畨保 護層之形成。因此,薄透明金羼表膜通常無法加热至玻璃 可彎曲而不退化金雇性質之溫度。 Holscher之美國専利4,992,087揭示製造以減少穿透塗 膜回火或彎曲玻璃板之方法,其中玻璃板之一側施Μ至少 一主要為元素22至28之金饜或合金之不透明金麵塗膜•及 鋁與至少10原子%钛及/或雎之合金且厚度為回火或彎曲 時金属塗膜不重大擴散氧之含金颶保護塗膜。 氮化呔塗膜具有使其遘用為持久日光控制塗膜之金羼性 質。《由改變塗膜厚度可改變穿透性及日光性質,且藉加 入介電層之缠當姐合可改變反射比及顔色而維持化學及櫬 械持久性。 此塗覆物件在單片汽車玻璃窗具有特定應用。當塗膜沈 (請先閱-背而之注意苹項孙艰艿^ 本紙ft尺度遑用中BS家«準(CHS)甲4規格(2ΚΪΧ297公: 81, 7. 20,000^(11) 經浒部屮央楳準局β工消费合作社印製 219933 · λ 6 __Π6_____ 五、發明説明(2) 積於如Solargray®»玻璃之暗受質時,其可用作為具有強 化日光性質及所欲反射比與顔色之皤密玻璃窗。在胃 璃*氮化鈦層可調整Μ得大於70X之具有低内反射 外観及強化日光性質之檷準光源A (LTA)穿透率。然而大 部份車輛玻璃為彎曲且回火。 窈明之概里 沈棟時具有金屬外覼之真空塗膜可製造Μ在以形成厚氧 化物之相異金属塗面而彎曲時維持其金羼外觀。金羼薄膜 抗氧化力之進一步改良可薄引入另一曆相異物質,特別是 非晶性金羼氧化物之額外介面而得。 具有金屬性霣之金颶化合物興空塗膜,如氮化钛•其在 Κ介電物質塗面時維持其金靨性質,在氮化钛Μ下加人延 展金羼、合金或半導體層而回火時安定。此具有等於或小 於受質之熱膨脹係數之底層對玻璃受質及氮化钛層具有良 好之黏附性,排除鑼、斑駁、圈像及表面污染,且大增回 火之操作溫度範圍。較佳底層物質包括矽、钛、皓、鉅、 鉻、鈮、矽合金及鎳一鉻合金。 (請先闓讀背而之注意事項再蜴寫-'*' 裝· 訂_ 線· 圖1包含加熱但未氧化之依照本發明(Α)金羼層之反射比 與氧化金雇曆(Β之反射比及未加熱金羼層〇之反射比。 臞2包含加热但未氧化之依照本發明(Α)金羼暦之穿透率 與加热氧化金颶層©之穿透率及未加熱金露層〇之穿透率 4 本紙》尺度逍用中a國家標準(CNS) f 4規格(210x297公釐) 81. 7. 20,000^(11) 219953 Λ 6 Π 6 五、發明説明(3) 經濟部中央橾準局貝工消费合作社印姐 圖3描述本發明之塗覆物件,受質ίο塗有含一第一延展 金鼷層2〇,其安定具有金颶性霣之第二金羼化合物層30 · 其保請矽基介電層40氧化。 圖4描述本發明塗膜在1300ΤΜ 7041)加熱3.5分鏟之 穿透率為波長之函數。 較栋亘«拥之明 依照本發明•某些ίϊ抗氧化塗膜,最好為氮化輅及氮化 钛,其一般在700t:快速氧化,可》另一抗氧化金靥保護 此氧化。保護層必須厚到防止底層金靨曆氧化。由於在輿 空沈積時金羼氧化物通常不夠厚•因此保護層Μ金靥沈積 而形成防止底層物質氧化之厚氧化物表曆。保護層之金臞 必須異於金羼靥之金羼Μ防止經介面處理時氧化。因此· 例如钛保護層可防止氮化絡層之氧化*而絡雇則否。類似 地*钛保謅曆不能防止氮化钛曆之氧化,而矽保護層刖可 以。 未保護塗k在加熱氧化,其生成比依照本發明之金羼塗 祺高之穿透率及較低反射比,如園1及圈2所示*及霉狀 與半透明外觀。相反地*例如氮化絡或氮化钛之金羼外覼 真空塗膜•依照本發明被各如钛或矽之相異抗氧化層保謂 ,在加熱至玻璃彎曲溫度時將保留其特徽金靥反射比、穿 透率及吸收性質,如圖1及圖2所示。加熱塗膜之稍低反 射比及較高穿透率為保護曆表面氣化之结果。 (請先閲讀背而之注意事項再艰艽」 〇 本紙張尺度遑用中《國家榣準(CNS)肀4規格(210X297公龙) 81. 7. 20,000¾ (II) 219953 Λ fi η 6 經濟部中央標準局貞工消费合作社印製 五、發明説明(4 ) 抗氧化力之進一步改良可»引入另一相異型式物筲形成 之額外介面而得。此物質最好為玻璃受霣,例如非晶性金 靨氧化物,如鋅一鍚氧化物,最好為Zn2Sn04之相似姐合 物0 為了在實質上回火之平坦玻璃受質使用氮化钛,現已發 現其不僅須賴保譜面漆靥之氧化而保護•亦須對例如玻璃 受質一氮化钛曆交互作用或在回火所痛之高溫發生之鼴力 引發”破裂”安定。例如,藉磁控嘖塗法製造之氮化鈦/ 氮化矽塗膜* Μ氮化私面漆防止氮化钛氧化•被發現不能 通過達800 Α厚之氮化矽層回火。此塗膜在回火後變成霧 狀、斑駁、裂開且發生圈像效應(塗膜沿玻璃板邊緣破裂 )。此外•塗膜在加熱後易為玻璃表面污染,如條紋形式 之裝填帶檷記、墊圈污染,或塗膜之斑點。 依照本發明,抗氧化金羼化金靨氧化物塗膜,特別是氮 化鈦,其一般在700 ¾快速氧化,可賴介電氧化物或氮化 物之氧化而保護•如果安定曆也沈積於氮化钛層下。這些 安定曆對相鄰層應具有良好之黏附性,稍微延展性並具有 小於或等於玻瑰之熱膨脹係數。較佳安定層為矽及矽合金 、鈦、锆、钽、鉻、鈮、練一鉻及含鎳一輅合金。氮化鋁 亦可用作為安定層,特別是維持高穿透率。矽一鋁作為安 定層在相同檷準光源A (LTA)之光源穿透率值生成比矽一 鎳及氮化鋁高之總日光能量穿透率(TSET)值。 安定層隔離玻璃受霣與金羼化金饜化合物層並提供均勻 控制表面。在此熱處理,其防止例如氮化钛層與玻瑰表面 (請先間讀背而之注意事項#艰窝4 裝- 訂_ 線- 本紙Λ尺度遑用中《Β家樣準(CNS)甲4規格(210x297公Λ) 81. 7. 20,000^(11) 經濟部中央標準局员工消费合作社印製 S1D953 Λ 6 ___Π_6_ 五、發明説明($) 反應•並提供玻璃受霣與氮化钛靥間之櫬械遇渡曆。安定 層與玻璃受質反應形成氣化物,如此增加穿透率,並仍維 持對金屬化金靨化合物之黏結。安定層懕厚到足以隔離金 羼化金屬化合物暦與玻璃,但薄到足以氧化並提供最大穿 透率,因為此層不重大強化日光性質。安定層之厚度最好 在5至100 Α之範國。較佳安定層為矽,厚度最好在2〇至 50A之範圍。呔為另一較佳安定層,特別是厚度在is至 40 A之範臞。 依照本發明,矽合i介霣性對面漆較佳。用於面漆之矽 合金介電性在防止加熱時塗膜破裂為嚴格的。矽可與許多 相異元素合金或摻染。各元素對矽从噴塗沈積目檷物霣形 式或哦塗塗膜形式增加獨特性質。此外•藉績棋或霣漿噴 射之目檷構造賴合金而便利。依照本發明,與矽合金或摻 染之元素包括鋁、鎳、銘、娥、鎳一銘合金、硼、鈦及结 。與矽合金之其他金靥量随金臞而改變且僅為目檷及塗膜 所欲性質些限制。一般可使用達矽之額外金靥50重量%, 最好為5至2 5 合金金屬及/或達2 之摻染物。 在氧一氬混合物Κ比唄塗矽一鋁之平面目檷高40ίΚ之噴 塗比率噴塗例如矽一鎳之平面目檷較安定,且20重量%嫌 在氧化物塗膜之吸收及折射率之效應對在此所述之應用不 重要。然而•當Κ氮化物哦塗吸收時|矽一練程度視練量 而定,矽一鋁氮化物則否。畨需要折射率變化或吸收時, 例如1«密型塗膜*可改變合金含量。如此使額外層之增加 可撓性改變光學性質且特別是降低穿透率。絡及絡一鎳合 (請先閱讀背而之注意事項再项·^,- 本紙a尺度遑用中a困家樣準(CNS)甲4規格(210x297公没) 81. 7. 20,000ffc(ll) 經濟部中央標準局EX工消伢合作社印製 219953 · Λ6 ___Π6_ 五、發明説明(6) 金作用類似辣*具有增加之化學持久性,特別是對氮化物 塗膜。另一方面,矽一鋁氮化物非為化學持久性。 一般而言*矽合金氧化物、氮化物及氧基氮化物塗膜均 提供持久面漆,其有肋防止底下金羼化金屬化合物層在回 火過程之氧化。在金羼化金羼化合物上具有額外靥之矽一 饑為最有效。此外*回火時之加热處理更強化埴些層之化 學及櫬械持久性°例如矽一鋁或矽一練氮化物、氮化物或 氧基氮化物特別有效。在氮化钛及矽一鐵氮化物靥之間具 有中間矽一鋁氮化物、氮化鋁、矽或矽合金層之矽一鐵氮 化物為最有效。矽合金氧化物保護面漆在400至1100A之 範國之厚度特別有效,最好為5 00至10 00 A,而矽合金氮 化物保護面漆厚度在125至1000 A之範圍特別有效,最好 為 200至 800 A。 一般而言,在汽車之日光控制玻璃窗,塗膜堆疊一般由 夾於介霣層間Μ形成干擾塗膜堆蠹並提供保護面漆之氮化 钛姐成。依照本發明,安定金羼層插於玻璃受質及具有金 羼性霣之金颺化合物之間。較佳金靥化合物為氮化钛’一 般厚度為20至1 000 Α,最好厚度為30至500 Α。金鼷化合 物曆賴介電物質面漆保護而不氧化,最好是矽基介鼋物質 。塗_然後在彎曲或回火處理安定。這些層及熱處理之姐 合強化塗膜性質。此具有安定金雇層、氮化钛及矽合金介 電物質之回火或彎曲塗覆玻璃之日光性霣總是優於不具有 安定層之相等未加热塗膜。較佳矽基介電物質為含矽與矽 合金之氧化物、氮化物及氧基氮化物,例如鋁、鎳及/或 (請先間讀背而之注意帘項洱碣寫"0 裝· 線‘ 本紙»尺度遑用中《围家«準(CHS) T 4規格(210x297公釐〉 81. 7. 20,000ife(ll) 219953 Λ 6 _____Π6__ 五、發明説明(7 ) (請先間讀背而之注意事項#填寫 絡。 矽合金氧化物面漆層在光源穿透率(LTA)要求大於70Χ •且需要持久、中性外觀、抗反射、曰光強化玻璃之車辆 視覺領域具有特定應用。較高光源穿透率 (LTA)要求,例 如歐洲要求75¾,可藉降低氮化呔餍厚度而符合*其亦可 在有色玻璃受質依照本發明塗覆時補償較低穿透率而完成 Ο 然而,在不具有大於70XLT A要求之處•氧化物、氮化物 及氧基氮化物層之姐备亦可用作為面漆。氮化矽或氧化物 、氮化物及氧基氮化物作為面漆曆之姐合提供在顔色及反 射比選擇具有蝤加揮性之持久塗膜。埴些面漆在具有強化 曰光性質之皤密玻瑰具有特定應用。 本發明之較佳塗覆物件具有一般姐態 線. 玻璃/M1/M3/ 矽 (M2)介竃性 經濟部屮央標準局员工消货合作杜印製 其中Ml 為半導體或金屬合金或其姐合,M2 為與矽在矽 合金目標姐合之元素•且M3 為保罐不氧化並在如回火之 高溫處理時安定之金臞化金羼化合物。堪揮性中間層可沈 積於金靥化合物與矽基介電物質之間。 參考圖3 ·玻璃受質(10)首先賴嗔塗塗覆安定層(20)· 其用Μ防止塗膜在高溫處理時破裂。堪而為具有金屬性質 之金靨化金靨化合物層(30) ·其主要用Μ降低日光热量負 載’其次為滿足美學需求。此層可繼而為埋揮性中間曆( 本紙Λ尺度连用中8國家《準(CNS)T4規格(210x297公;¢) 81. 7. 20,000^(11) 219953 Λ 6 Β 6 經濟部中央標準局只工消#合作社印製 五、發明説明(8) 未示),如果需要, 擇性在塗膜及穿透性 面漆層(40),其用以 ,並提供持久性面漆 安定層最好選自矽 一絡合金及氮化鋁。 其主要用Κ降低日光 自金羼硼化物、金羼 選擇性中間層最好選 氮化物及氧基氮化物 Κ防止塗膜在高溫處 之氮化物、氧化物及 此外,為了提供控 及穿透率之彈性,可 於安定層(20)與金颺 性層序列與壤自安定 物層,且在保護面漆 例如*保護面漆層下 於保護面漆層(40)上 在本發明之較佳具 X 144 英吋(2.54 X 以下實例,塗膜使用 例如鉻或钛之金羼目 (7.6公分)直徑矽或 其功能為強化保護面漆之性能,及選 得到增加之彈性。此層後為介電保護 防止金靥化合物層在高溫處理時氧化 、鈦、結、 具有金«性 熱悬負載, 氮化物、金 自矽、钛、 。最後,介 理時破裂並 氣基氮化物 制符合日光 噴塗選擇性 化金鼷化合 層之群姐交 層(40)上增 之額外金屬 钽、輅、鈮 質之金羼化 其次為提供 靨碳化物及 矽金鼷合金 電保護面漆 提供持久性 及矽金羼合 性質要求之 曆。例如, 物靥(30)之 錯地谁叠金 加金羼曆。 化金羼化合 、矽合 合物層 美學需 氧基氮 及其氧 層(40) 面漆, 金。 顔色、 気化矽 間。其 圈化金 層亦可 物層亦 金、嫌 (30), 求,選 化物。 化物、 •其用 選自矽 反射比 層可插 他選擇 羼化合 重複, 可哦塗 Μ例,塗_製造於可塗覆玻璃達100 3.66米)之大規横磁控曠塗裝置。在 具有5x17英吋(12.7x43.2公分) 檷物之平面磁控陽棰,或3英时 矽合金轉動陽檯沈樓於小規横。在各 10 1紙張尺度遑用中國围家搮準(CNS) Ή規格(210x297公龙) 81. 7. 20,000¾ (|[) (請先閲誚背而之注意事項#项"·- 0 經濟部屮央樣準局员工消奸合作杜印製 219953 λ6 ___Π_6_ 五、發明説明(9) 實例,6nm厚玻璃受質在傳送輥Μ每分鐘120英吋 (3.05米)之速度通過目檷。基壓在16_e To pr之範園。 塗膜可Μ首先使哦塗氣«為4奄Torr之壓力然後設定播 極為固定®力而製造。在各實例•除非另有指示· 6·»厚 玻璃受質在傳送轘Μ每分》 120英吋(3.05米)之速度通 過目檷,除非另有指示。此步驟在姐態之各靥重複。 塗膜轅垂吊 2x12英吋 (5.1x30.5公分)塗覆 6.0透 明玻璃於鉗子之帶並舉至48x30x12英时(1.2x0.76χ 0.3米)加熱至705 υ1垂直”箱式”爐而試驗热安定性。 帶加熱3.5分鐘,除非另有指示•假設回火。在回火處理 空氣驟冷未造成任何塗膜退化。為了测定與製造法之相容 性•塗覆玻璃板12英吋(0.3米)平方被加邊、濟洗•通濾 黒圈玻料並在垂直及水平爐回火。檢査穿透率、反射比、 顔色、及總日光掂量穿透率與總日光紅外埭穿透率 (TSET及TSIR)之塗膜性質。》行挺度磨損試驗並記錄霧狀 比例。 本發明由以下特定實例之說明而進一步了解。 g例1 薄Μ 7.5仟瓦、587伏特於壓力4毫托耳之純氮氣哦塗 路金鼷目檷(2次)直到光源穿透率為9«而製造約380 A 厚之氮化路塗膜。塗覆玻璃然後在570t:加热10分鐮。塗 膜藉热氧化,且其穿透率曲線類似圖2之B。 (請先閲請背而之注意事項再项窝九 - 11 - 本紙Λ疋度遑用中《«家«準(CNS)肀4規格(210x297公釐) 81. 7. 20,000¾ (1!) 219953 Λ 6 η 6 五、發明説明(1C) 啻例2 為了比較寊例1 ,藉以7.5仟瓦、586伏特於壓力4毫 托耳之纯氮氣哦塗絡金屬目檷(2次)直到光源穿透率為 10¾而製造約380A厚之氮化貉塗膜。然後以〇.5仟瓦、 3 46伏特哦塗钛目檷靥(1次)直到光源穿透率降為 8.9X而沈積約40 A厚之呔金羼曆。樣品在570 1C加熱10分 鐘且塗膜穿透率雖然稍微降低*仍具有金靨外觀,並顧示 類似圖1及2之(A) 之分光曲線。當在625Ϊ:加热i〇分鐘 時塗膜氧化。 富例·? 如Μ上實例所應用之約380A厚之氮化路薄膜·穿透率 906Χ,W約60Α厚之藉Μ 1.8仟瓦、3 46 6伏特於50«1積% 氧、50體積%氬混合物唄塗Zn-2Sn姐合物之鋅一堪合金目 欏而製造之類似姐合物Zn2Sn04之鋅/錫氧化物。穿透率 為10.2¾最後,應用如賞例2之約40A厚之钛金羼層直到 穿透率降為8.7X。塗膜在570 1加热1〇分鐘及在625¾ 加熱1〇分鐘後維持金羼外覜。 (請先閱誚背而之注意事項再碭寫/ 0 經濟部屮央標準扃员工消费合作社印製 為了比較實例3 *賴M8仟瓦、532伏特於50XS —氧 混合物壓力4«托耳啧塗鉻目檷(2次)而製造如實例3 之相同氮化鉻層及氮化鈦層,但在二層間具有約40A厚之 钛層。穿透率由9.5X升至10.4X。塗膜在625¾加热1〇分 - 12 - 本紙張尺度逍用中《国家楳準(CNS)T4規格(2丨0X297公釐) 81. 7. 20,000¾ (II) 219953 Λ 6η 6 五、發明説明 鐘後氧化。 藉Μ8仟瓦、532伏特於Κ力4毫托耳之純氮氣大氣哦 塗絡目禰(1次)而製造具有如實例3之相同氮化輅曆及 気化钛層之塗縝在625Ϊ:加熱10分鐘後完全氣化。 奩例R 縈於懕力4亳托耳純氮氣大氣噴塗輅金羼目檷而沈積約 450 Α 厚之氮化呔層。霣懕為764伏特且功率為8仟瓦。 在570¾在空氣加热10分鐘後塗膜完全氧化。 霞例7 為了比較實例6,如》例6沈稹約500 Α厚之«化鈦曆 。穿透率為20.2!ϋ。約200A厚之矽雇W1仟瓦、583伏 特(2次)唄塗具有矽目檷物霣之Airco塗R技術C-Mag 轉動陽極而沈積。穿透率為10.8X。在625*C加热10分鐘 後,塗膜仍為青色及金屬外觀。 (請先閲讀背而之注意事項办堝寫'fc} 經濟部中央標準局貝工消费合作社印製 使用如實例6之約470 A厚之氮化钛曆。穿透率為 22.8¾ 。約100A厚之氮化矽層在如實例7之C-Mag陽棰 W3仟瓦、416伏特在4奄托耳之純氮氣噴塗矽目欏而使 用。單次後穿透率提高至25»。在625 C加热1Q分鎗後樣 - 13 - 本紙張尺度逡用中《國家楳準(CNS) 4規格(2丨0乂297公货) 81. 7. 20,000張(||) 219953 Λ 6 Η 6 五、發明説明(12) 品外《未變。 奮俐q 钛曆在氬氣K 0.6仟瓦、332伏特哦塗平面钛陽極至 62H! (1次)之穿透率,繼而9次使用平面呔陽極在纯氮氣 K 4.0仟瓦、536伏特至18.5X之穿透率,繼而5次使用 具有矽-5X鋁之轉動陽極在纯氮氣Μ 2.8仟瓦、473伏特 至23«之穿透率而嘖塗。各個別雇之塗膜厚度為鈦25Α、 氮化呔400 Α及矽-5Χ鋁氮化物270Α。加熱前後在透明 玻璃之性質如下: (請先閲讀背而之注意事項再项寫''- 經濟部中央櫺準局β工消费合作杜印製 - 14 - 本紙ft尺度逍用f β*家«準(CNS)T4規格(210x297公*) 81. 7. 20,000张⑻ 219953 Λ 6 Π 6 五、發明説明(1习 C. Ι.Ε. 色度座檷 經濟部屮央標準扃员工消费合作社印51 (1931 2程 度覲察貝) 反 射 hh 去加热 加 熱 (光源 D65) 膜側 Y 13.59* 10.31% X .357 .3264 Y .3767 .3411 玻璃側 Y 29.25X 19.11X X .3042 .2945 Y .3366 .3234 窃 m 率 (光源 A ) Y 24.11* 34.7¾ X • 4479 .4387 Y • 4156 .4165 TSET 17.9¾ 21.7* TSIR 10.7* 10.3* 穿透總 日光紅外線輻射嫌 (TSIR)顯示氮化呔在加热 未退化*卻稍為強化。其亦在大於900η·之波長區域* TSIR比未加熱樣品低U而證賁。加热後之抗磨損性低於玻 璃霧吠限制所要求之2Χ。加热前抗刮性逭超遇通遇完成製 15 本紙ft尺度遑用中钃家《準(CNS) 4規格(2丨0Χ29·7公釐) 81. 7. 20,000¾ (II)
(請先閲誚背而之注意苹項再填寫-V 訂_ 線· 經濟部中央櫺準局貝工消t合作杜印製 5:9353 Λ 6 __Π_6_ 五、發明説明(U) 造回火處理(切割、加通、濟洗、過濾及回火)而無刮傷 或塗膜退化。 施於4.0奄米汽車側光及觜光皤密玻璃窗用之 Solargray® 玻璃之此塗膜降低光源穿透率至約20¾且總 日光穿透率為13X。 奮例1 0 第一曆在氬氣Μ 0. 4仟瓦、500伏特唄塗平面矽-7 . 5¾ 鎳隈極至81.4X (1&)之穿透率,繼而1次使用平面钛 陽棰在純氮氣Μ 6.0仟瓦、596伏特以每分鐘90英吋 (2. 3米)至53.7«之穿透率,繼而12次使用具有矽 -7.5Χ嫌之平面陽極在50!K氬-50!U氧氣Μ 3.0仟瓦、348 伏特至63.2»之穿透率而噴塗。各個別層之塗膜厚度為矽 -7.5¾娣23Α、氮化肽100Α及矽-5¾鋁氧化物790Α。 如圓4所描述在加熱前(未加热)及在1300Τ(740·〇) 加熱3.5分鐘後(加熱)在6.0奄米透明浮法玻璃之性質 如下: (請先WI讀背而之注意事項再艰寫+ 線· 本紙張尺度遑用中a國家«毕(CHS) Τ 4規格(210X297公釐〉 81. 7. 20,000張(II) 219953 A 6 Π 6 五、發明説明(15) C.I.E. 色度座檷 經濟部中央櫺準局Μ工消费合作社印製 (1931 2程 度覜察員) &__&. th 未加鷂 加 埶 (光源 D65) 膜側 Y 3.28 3.02 X .3350 .3068 Y .3187 .3443 玻璃側 Y 13.25 9.51 X .3102 .3037 Y • 33 8 8 .3323 窈 m Μ (光源 A ) Y 63.21 70.88 X .4511 .4431 Y .4140 .4120 TSET 52.56 55.26 TSIR 43.84 40.38 讕4顯示加热前後在光譜曰 光匾域之穿透 率%為彼長 Urn)之函數。逭些数據顬示穿透率在可見光增加,但是 熱後在紅外區降低,因此強化塗膜之總日光性能。 當塗膜沈稹於如Solex®»玻璃之熱吸收玻璃時,4.0mm - 17 - 本紙a尺度边用中《困家《準(CNS)?*!規格(2丨0X297公;Jt) 81. 7. 20,00()¾ (II) (請先閲讀背而之注意事項再填寫4 :) 219933 Λ 6 Π6 五、發明説明(16) Solex玻璃之氮化钛層降低至45AM符合70X (光源A) 穿透率要求。此塗膜於 4.0nmSolex玻瑰在1300T加熱 1.75分鐘對穿透率71.03X之檷準光源A之日光性質TSET =47.78¾ TSIR = 27.67X ° 生成塗膜抗膜側反射並在穿透率及反射比具有中性外観 。厚度範麵790A (12次)至925A (14次)並具有厚度 小於或等於100A之氮化呔之矽 -7.5X鎳氧化物之穿透率 (光源A )為最大且TEST最小。 此簧例所述之矽 -+.5¾嫌 (0.4仟瓦)為回火後安定塗 膜之最小厚度。如前所述之塗膜破裂在更薄靥快速發生。 塗膜破裂之開始可在底層降低穿透率下降時看見。另一方 面,如果底曆在大於0.7仟瓦(40 A >嗔塗塗臢不符合 要求之70¾或更大(光源A )之光穿透率。一般而言*如 果此層在 0.6仟瓦、525伏特哦塗,在6. 0亳米适明玻璃 1次(34A)後生成73X之穿透率,塗膜具有大於70¾ (光源A)之穿透率而安定。 (諳先閲讀背而之注意事項再项寫-Μ) 装· 線. 經濟部中央橾準局貝工消费合作社印3i 如賁例1〇製備之塗覆物件,但是具有Μ下姐態 玻璃/Si-5«A1/Ti氮化物/Si-5S!A1氮化物 具有Si-5XA1氮化物層厚度大於或等於125A、Si-5»iAl 厚度大於或等於25A,在回火安定。 - 18 本紙Λ尺度遑和中國家《準(CNS) TM規格(210x297公货) 81. 7. 20,000ik(ll) 219953 Λ 6 Π 6 五、發明説明(17) 窗例1 ? 如實例U製備之塗覆物件•但是具有Μ下姐態 玻璃/Si-81l!Fe-0.25!l;B/Ti 氮化物 /Α1 氮化物 / Si-8!«Fe-0.25B 氮化物 具有厚度25A之Si-8XFe-0.25XB、厚度80A之A1氮化物及 厚度 2 00A之Si-8XFe-0.25XB氮化物,在回火安定。雖然 具有Μ上姐態之塗膜之氮化鋁溶解於水•未加熱塗W通過 在水3〇分鐮且回火安定。加熱塗膜亦通過沸騰3〇分鐘。當 希望吸收時在塗膜使用Si-8XPe-0. 25ΧΒ ·例如在《密玻璃 (請先閱請背而之注意事項再项寫.- 經濟部中央搮準局员工消费合作社印製 奮例1 3 如Μ上實例製備之塗覆物件,具有Μ下姐態 玻璃 / Si-8XFe-0.25XB/Ti 氮化物/Si-8XFe-0.25XB / Si-8XFe-0.25B 氮化物。 此塗腆具有厚度25A之Si-8XFe-0.25S!B及厚度 350A之 Si-8XFe-〇.25B氮化物,在回火安定。除了熱安定性,額 外層在改變顔色、穿透率及反射比得到増加之彈性。 - 19 - 本紙»尺度遑用中β «家樣準(CNS)甲4規格(210X297公*) 81. 7. 20,000^(11) 219953 Λ 6 Β6 五、發明説明(18) 奮例Ί 4 如Κ上實例製備之塗覆物件·具有以下姐態 玻璃/ Ti/Ti氮化物/ Si-13!«A1氮化物或氧基氮化物 這些塗料描述Si- M2氮化物及氧基氮化物面漆間之差異。 這些塗膜均對回火安定。塗膜之首先三靥«噴塗實例1所 述之曆於6mm透明玻璃而製備,除了 9次氮化呔暦以4. 4 仟瓦、543伏特唄塗至16.5!«之穿透率。氮化呔曆之厚度 為440 A。二面漆層然後嗔塗至 220 A之相同物理厚度。 Si-13XA丨氮化物面漆賴在純氮氣以3.0仟瓦、456伏特在 平面陽極嗔塗5次至19. 7X之最终穿透率而製備。 Si -13XA1氣基氮化物藉在6X氧一氮氣混合物Μ 2.6仟瓦、 450伏特在相同平面隔棰唄塗5次至18.9Χ之最終穿透率 而製備。加熱薄膜及玻璃側後然後比較塗膜之CIE顔色座 檷。 (諳先閲請背而之注意事項再堝寫,. 琪· 訂_ 線. 經濟部屮央標準局貝工消费合作社印製 本紙Λ尺度逡用中《«家標準(CNS) Τ4規格(210x297公*) 81. 7. 20,000¾ (II) 219953 Λ 6η 6 五、發明説明(19) s.__it_n_ 氬 化__%- 氧.基^化物 膜 側 Y (D85) 12.08* 15.42¾ X .3292 .3341 Y .3311 .3288 玻璃 側 Y (D65) 20.2¾ 17 . 94X X .2973 .2977 Y • 3219 .3114 (諳先閲讀背而之注意I項洱埙-士 經濟部屮央標準局負工消份合作社印製 由以上结果可知具有固定物理厚度之面漆由氮化物變成氧 基氮化物時•由於塗膜折射率之改變而在反射比有顔色之 轉移及改變。 啻例15 如以上實例製備之塗覆物件*具有以下姐態 玻璃/ Si-7.5XNi / Ti氮化物/ Si-10J!Cr氮化物 例如具有厚度範圓290A至1050A之Si-10XCr氮化物》厚 度100A之氮化钛及厚度34A之Si-7.5XHi層在回火後安定。 塗膜之首先兩曆如實例4所述嗔塗於6m<>透明玻璃而製 備。第三層»在純氮氣Μ 3.0仟瓦、510伏特在平面 - 21 - 本紙張尺度遑用中國國家楳準(CNS)肀4規格(210X297公*) 81. 7. 20,000¾ (II) 訂 線- 219953 Λ 6η 6 五、發明説明(2C) 51-10»〇陳極喷塗4次嗔塗至53.1!<之最終穿透率而製備 。此暦之厚度為290A。 以上實例僅提供Μ描述本發明。其他金_ •金颺氮化物 及金羼碳化物金羼化外觀薄犋可如上述所賴厚氣化物表面 形成金靥靥而保護不氧化。其他金属氮化物、金钃碳化物 及金屬®化物金羼薄膜與姐合物之範圈可與用作為保護面 漆之其他氧化物、氧基氮化物及氮化物層,及其他安定金 雇曆用作為金屬化金蘼化合物曆。沈積條件依照沈積之装 置及物霣而改變。塗^厚度可改變Κ產生所欲反射比及穿 透率性霣。本發明之範圍由Μ下申請專利範靨所定義。 (請先閲讀背而之注意事項#褀冇1 V.) 裝· 訂_ 經濟部屮央標準局CX工消赀合作社印3i 本紙张尺度遑用+ «囑家樣1MCNS)T4規格(210x297公釐) 81. 7. 20,00()¾ (||)

Claims (1)

  1. 2 a 4. 5. & 六、申請專利範圊 219953
    A7 B7 C7 D7
    種可熱加工之具金羼外觀塗覆物件,包含: 玻璃物質; 外覲之含金羼薄膜,其包括氮化絡或氮化钛; a · 透明 b. 金羼 及 c · 包含 屬薄 矽。 根據申請 氮化路且 根據申請 氮化鈦且 根據申請 氧化物層 根據申謫 物層包含 根據申請 氧化物層 一棰可回 a. 透明 異於含金靥薄膜之金靥之保護曆,其滅少含金 膜在加热時之氧化作用,且其係遵自絡,钛及 b 經 濟 部 中 揉 準 局 印 製 含矽 或氮 具有 係氮 化姶 専利範 保護層 專利範 保謅層 専利範 沈積於 専利範 $及錫 専利範 具有類 火之金 玻璃物 、鈦、 化鋁之 金羼性 化鉻、 、氮化 園第1項之塗覆物件,其中 為钛。 圍第1項之塗覆物件•其中 為矽。 圍第ί項之塗覆物件*其中 含金羼曆與保護曆之間。 爾第4項之塗覆物件,其中 含金属曆為 含金m爾為 非晶性金屬 該金羼氧化 非晶性金羼 圍第5項之塗覆物件*其中 似Zn2Sn〇4之姐成。 臛塗覆物件,包含: 霣; 結、钽、絡、鈮、矽合金、鍊一路合金 安定層;. · 質之金靨化合物薄膜•其中金羼化合物 氮化鈦、硼化钛、碳化钛、氮化結、氮 妲、氮化鈮、氧氮化钛、氧氮化结、氧 •................................. ..............^..............................^ (請先聞讀背面之注意事項再填宵本頁) 74(210X297 公省) A B c D 經濟部中央棣準局印^ 六、申請專利葩明219953 氮化鉻、氧氮化钽或氧氮化鈮; d. 保謂靥,其防止金羼化合物薄膜在加热時之氧化作 用,且其包含矽之氮化物、氧化物或氧氮化物·或 砂一金属合金。 8· 根據申講專利範圍第7項之塗覆物件,其中該保護層包 括^化矽、氮化矽、氧氮化矽、矽一鎳氧化物、矽一嫌 氮化物、矽一辣氧氮化物、矽一鋁氧化物、矽一鋁氮化 物、矽一 8B氧氮化物、矽一嫌氧化物、矽一嫌氮化物、 矽一戡氧氮化物、矽一絡氮化物、矽一輅氧氮化物、砂 -練一鉻氧化物、矽一嫌一絡氮化物、矽一嫌一輅氧氮 化物、矽一硼氧化物、矽一硼氮化物或矽一礪氧氮化物 .· a 根據申請專利範園第7項之塗覆物件,其中安定靨包含 矽或钛•金羼化合物靥包含氮化钛•且保護曆包含氮化 矽、氧化印或《氮化矽。 m 根據申請專利範園第7項之塗覆物件,其中安定暦為砂 ~金羼合金或呔*金颺化合物層為氮化钛,且保護曆為 矽一金屬合金氣化物或矽一金臞合金氣氮化物。 11 根據申請専利範園第7項之塗覆物件,其中一額外靥沈 積於含金靨層與保護層之間。 12 根據申講專利範画第11項之橥覆物件•其中該額外靥為 矽、钛、矽一金臑合金或其氧化物、氮化物或氧氰化物 〇 ia 根據申講専利範圃第12項之塗覆物件,其中安定靥包含 .................................................^..............................打 (請先聞讀背面之注意事項再填宵本頁) 肀 4 (210X297 公廣) 219953 A7 B7 C7 D7 六,申請專利範ffl 經濟部中央搮準局印裝 矽或钛,含金饜層為氮化钛*額外曆包括矽、钛、矽一 金羼合金或氮化鋁•且保護層包括氣化矽、氮化矽、氧 氮化矽、矽一鎳氧化物、矽一嫌氮化物、矽一嫌氧氮化 物、矽一鋁氧化物、矽一鋁氮化物、矽一綹氧氮化物、 矽--嫌氧化物、矽一級氮化物、矽一锇氧氮化物、矽一 路氮化物、矽-鉻氧氮化物、矽一嫌一輅氧化物、矽一 鏵一路氮化物矽一嫌一路氧氮化物、矽一通氧化物、矽 —®氮化物或矽一碥氧氮化物。 一種賴由使用如申謫専利範園第1 一 6項中任一項之塗 覆物件Κ製造熱加工金屬外觀塗覆物件之方法,包含Μ 下步驟: 在玻璃受質表面沈積金屬外觀含金屬薄膜(b); 沈積包含不同金靨之保護層(C) ,Μ防止含金屬薄膜在 加熱時之氧化;Μ及 如果需要*可於該金羼薄膜及該保護層之間沈積非晶相 金羼氧化物層; 加热所得之塗覆物件至足以彎曲玻璃之溫度。 1& 一種藉由使用如申請專利範圍第7 — 12項中任一項之塗 覆物件Μ製造回火金羼外観塗覆物件之方法*包含以下 步驟: 在破璃受《表面沈稹一薄膜Μ提供安定層(b); 在安定曆上沈稹具有金羼性質之金钃化合物薄膜(c); 沈稹保護層(d),以防止底下金靨化合物在加热時之氧 化; (請先VI讀背面之注意事項再填坧本頁) •装· •打· ,璆.. T 4(210X297 公廣) 219953 Cl ___D7_ 六、申請專利兑® 如果褥要,可於該金屬化合物薄膜及該保護層之間沈積 額外層;Μ及 加熱所得之塗覆物件至足Μ回火玻璃之溫度。 .................................. ...............5t..............................ίτ.......: ..................^ (請先閲請背面之注意事項再填寫本頁) 經濟祁中央搮準局印裝 甲 4 (210X297公廣)
TW081107437A 1991-09-30 1992-09-21 TW219953B (zh)

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US07/768,791 US5705278A (en) 1991-09-30 1991-09-30 Heat processable metallic vacuum coatings
US07/799,806 US6274244B1 (en) 1991-11-29 1991-11-29 Multilayer heat processable vacuum coatings with metallic properties

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