TW208091B - The fabrication of read-only-memory - Google Patents

The fabrication of read-only-memory

Info

Publication number
TW208091B
TW208091B TW81109469A TW81109469A TW208091B TW 208091 B TW208091 B TW 208091B TW 81109469 A TW81109469 A TW 81109469A TW 81109469 A TW81109469 A TW 81109469A TW 208091 B TW208091 B TW 208091B
Authority
TW
Taiwan
Prior art keywords
polysilicon
fabrication
oxidizing layer
depositing
substrate
Prior art date
Application number
TW81109469A
Other languages
Chinese (zh)
Inventor
Yeun-Ding Horng
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW81109469A priority Critical patent/TW208091B/en
Application granted granted Critical
Publication of TW208091B publication Critical patent/TW208091B/en

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Abstract

This is one type of fabrication of the narrow type code area of ROM. It consists of: 1. Forming the gate oxidizing layer and depositing the first polysilicon on the surface of substrate; 2. Coating, etching and removing the photo resistance in fixed pitch on the first polysilicon; 3. Embedding the N+ ion into the substrate to form N+ source/drain area; 4. Forming an oxidizing layer of high thickness with low temperature oxidizing way and removing photo resistance to form an oxidizing layer between the neighboring N+ source/drain area; 5. Depositing the second polysilicon on the outer surface.
TW81109469A 1992-11-26 1992-11-26 The fabrication of read-only-memory TW208091B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW81109469A TW208091B (en) 1992-11-26 1992-11-26 The fabrication of read-only-memory

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW81109469A TW208091B (en) 1992-11-26 1992-11-26 The fabrication of read-only-memory

Publications (1)

Publication Number Publication Date
TW208091B true TW208091B (en) 1993-06-21

Family

ID=51356874

Family Applications (1)

Application Number Title Priority Date Filing Date
TW81109469A TW208091B (en) 1992-11-26 1992-11-26 The fabrication of read-only-memory

Country Status (1)

Country Link
TW (1) TW208091B (en)

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