TW202427678A - 靜電卡盤 - Google Patents

靜電卡盤 Download PDF

Info

Publication number
TW202427678A
TW202427678A TW112151091A TW112151091A TW202427678A TW 202427678 A TW202427678 A TW 202427678A TW 112151091 A TW112151091 A TW 112151091A TW 112151091 A TW112151091 A TW 112151091A TW 202427678 A TW202427678 A TW 202427678A
Authority
TW
Taiwan
Prior art keywords
electrostatic chuck
adsorption
electrode
force
dielectric layer
Prior art date
Application number
TW112151091A
Other languages
English (en)
Chinese (zh)
Inventor
長谷川喬彬
石橋一哉
Original Assignee
日商創意科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商創意科技股份有限公司 filed Critical 日商創意科技股份有限公司
Publication of TW202427678A publication Critical patent/TW202427678A/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • H10P72/722—Details of electrostatic chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0085—Gripping heads and other end effectors with means for applying an electrostatic force on the object to be gripped
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/92—Devices for picking-up and depositing articles or materials incorporating electrostatic or magnetic grippers

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
TW112151091A 2022-12-28 2023-12-27 靜電卡盤 TW202427678A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-212754 2022-12-28
JP2022212754 2022-12-28

Publications (1)

Publication Number Publication Date
TW202427678A true TW202427678A (zh) 2024-07-01

Family

ID=91717759

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112151091A TW202427678A (zh) 2022-12-28 2023-12-27 靜電卡盤

Country Status (5)

Country Link
EP (1) EP4645673A1 (https=)
JP (1) JPWO2024143432A1 (https=)
CN (1) CN120435818A (https=)
TW (1) TW202427678A (https=)
WO (1) WO2024143432A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004031599A (ja) 2002-06-25 2004-01-29 Kyocera Corp 静電チャック
JP2005166820A (ja) * 2003-12-01 2005-06-23 Toshiba Ceramics Co Ltd 静電チャック装置
JP2006332204A (ja) * 2005-05-24 2006-12-07 Toto Ltd 静電チャック
US8497980B2 (en) * 2007-03-19 2013-07-30 Nikon Corporation Holding apparatus, exposure apparatus, exposure method, and device manufacturing method

Also Published As

Publication number Publication date
WO2024143432A1 (ja) 2024-07-04
JPWO2024143432A1 (https=) 2024-07-04
CN120435818A (zh) 2025-08-05
EP4645673A1 (en) 2025-11-05

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