WO2020107809A1 - 一种led芯片、显示面板的组装设备及组装方法 - Google Patents
一种led芯片、显示面板的组装设备及组装方法 Download PDFInfo
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- WO2020107809A1 WO2020107809A1 PCT/CN2019/086058 CN2019086058W WO2020107809A1 WO 2020107809 A1 WO2020107809 A1 WO 2020107809A1 CN 2019086058 W CN2019086058 W CN 2019086058W WO 2020107809 A1 WO2020107809 A1 WO 2020107809A1
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
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- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
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- H01L2221/68363—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used in a transfer process involving transfer directly from an origin substrate to a target substrate without use of an intermediate handle substrate
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- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
- H01L2221/68386—Separation by peeling
Definitions
- the present application relates to display technology, in particular to LED chip and display panel assembly equipment and assembly methods.
- the method of setting a plurality of LED chips may include: grasping the LED chips one by one by using a mechanical device, and placing the LED chips one by one at a predetermined position in the receiving substrate.
- the present application provides an LED chip and display panel assembly equipment and assembly method.
- the LED chip provided by the present application includes a chip body and a magnetic member disposed on the chip body.
- the magnetic member can be adsorbed under the action of magnetic adsorption force;
- the chip body includes a substrate and an epitaxial layer structure disposed on the substrate, the magnetic member is located on the epitaxial layer structure away from the substrate Side.
- the present application also provides an assembly device for a display panel.
- the assembly equipment includes a transfer device for transferring the LED chip to the receiving substrate.
- the LED chip includes a chip body and a magnetic member disposed on the chip body;
- the transfer device includes: a transfer substrate; a plurality of transfer heads, the plurality of transfer heads are fixed to at least at least one of the transfer substrates in an array manner On one side surface, the LED chip corresponds to at least one of the transfer heads; a control component is used to control each of the transfer heads to generate a magnetic attraction force or release the magnetic attraction force to attract or release the LED chip.
- the application also provides a method for assembling the display panel.
- the assembling method includes: providing a donor substrate on which a plurality of LED chips are provided, wherein the LED chip includes a chip body and a magnetic member provided on the chip body; controlling a plurality of transfer heads to generate magnetism Adsorption force, the magnetic absorption force acts on the corresponding magnetic piece of the LED chip, the magnetic absorption force is greater than the bonding force between the LED chip and the donor substrate, so that a plurality of LEDs
- the chip is adsorbed from the donor substrate, wherein a plurality of the transfer heads are fixed in an array on at least one surface of the transfer substrate; the transfer substrate is moved above the receiving substrate; the plurality of transfer heads are controlled to remove the magnetic attraction force, In this way, the plurality of transfer heads releases the plurality of LED chips to the receiving substrate.
- the chip body of the LED chip provided by the present application is provided with a magnetic member, which can be adsorbed under the action of the magnetic adsorption force generated by the external transfer device, thereby causing the LED chip to be adsorbed; and the traditional machine Compared with grasping LED chips, magnetic adsorption can reduce the damage to the LED chips, and magnetic adsorption is more convenient. Therefore, the efficiency of setting multiple LED chips in the display panel can be improved.
- the transfer device in the display panel assembly device includes a plurality of transfer heads and a control assembly.
- the control assembly can individually control the generation of each transfer head or release the magnetic member that can act on the corresponding LED chip Magnetic adsorption force, so that each transfer head can separately absorb or release LED chips, so that selective transfer of multiple LED chips can be achieved, thereby improving the efficiency of setting multiple LED chips in the display panel.
- FIG. 1 is a schematic structural diagram of an LED chip provided by an exemplary embodiment of the present application.
- FIG. 2 is a schematic structural diagram of a display panel assembly device provided by an exemplary embodiment of the present application.
- FIG. 3 is a schematic structural diagram of a control component provided by an exemplary embodiment in FIG. 2;
- FIG. 4 is a schematic flowchart of a method of assembling a display panel provided by an exemplary embodiment of the present application
- FIG. 5 is a schematic structural diagram provided by an exemplary embodiment corresponding to steps S101 to S104 in FIG. 4.
- the inventor of the present application found during the long-term research that because of the large number of LED chips that need to be set in the display panel, it takes a lot of time and low efficiency to adopt the scheme described in the background art.
- FIG. 1 is a schematic structural diagram of an LED chip provided by an exemplary embodiment of the present application.
- the LED chip 1 provided by the present application may be an ordinary LED chip or a Micro-LED chip.
- the LED chip 1 provided by the present application may be a vertical type structure (ie, the anode and cathode of the LED chip 1 are located on opposite sides of the LED chip 1 respectively), or may be a horizontal type structure (ie, the anode and cathode of the LED chip 1 On the same side of the LED chip 1).
- the LED chip 1 provided by the present application includes a chip body 10 and a magnetic member 12 disposed on the chip body 10, wherein the magnetic member 12 can be attracted under the action of a magnetic attraction force, thereby causing the LED chip 1 to be absorbed Adsorption.
- the chip body 10 may include a structure commonly used in the art.
- the chip body 10 may include a substrate and an epitaxial layer structure provided on the substrate.
- An electrode eg, anode and/or cathode
- the magnetic member 12 is located on the electrode, and can cover the above electrode by sputtering or deposition.
- the material of the magnetic member 12 may be metal, preferably, it may be iron, cobalt, nickel or iron-nickel alloy. When the above materials are used, the magnetic member 12 is more easily attracted by the magnetic attraction force under the action of the external magnetic field.
- the magnetic member 12 may also be the electrode itself. In this case, the electrode of the LED chip is a magnetic electrode.
- the subsequent step of peeling off the magnetic member 12 may be omitted.
- a peeling device eg, a laser peeling device, etc.
- the LED chip 1 provided in this application further includes a sacrificial member 14 disposed between the magnetic member 12 and the chip body 10 To allow the magnetic member 12 to be peeled off the chip body 10 by a predetermined peeling means.
- the magnetic member 12 and the sacrificial member 14 are arranged in a layer, and are stacked on the chip body 10, wherein the sacrificial member 14 is disposed on the surface of the chip body 10 close to the magnetic member 12.
- the material of the sacrificial element 14 may be photoresist, or some similar materials to the chip body 10, such as silicon-containing materials.
- the sacrificial member 14 can be removed by peeling means such as laser peeling, thereby separating the magnetic member 12 from the chip body 10.
- the magnetic member 12 and the sacrificial member 14 may be other structures; for example, the sacrificial member 14 may be a layer, and the magnetic member 12 may be a plurality of magnetic blocks on the sacrificial member 14; or, the magnetic member 14 It may be magnetic particles doped in the sacrificial member 14 or the like.
- FIG. 2 is a schematic structural diagram of an assembly device of a display panel provided by an exemplary embodiment of the present application.
- the assembly equipment provided by the present application includes a transfer device 2 for transferring a plurality of LED chips 1 in any of the above embodiments to a receiving substrate, wherein the transfer device 2 includes a transfer substrate 20, a plurality of transfer heads 22 and Control assembly 24.
- the plurality of transfer heads 22 are fixed to at least one surface of the transfer substrate 20 in an array.
- the control component 24 is used to respectively control the plurality of transfer heads 22 to generate a magnetic attraction force that can act on the magnetic member 12 of the corresponding LED chip 1 or to release the magnetic attraction force, so that each transfer head 22 can separately adsorb or release the LED chip 1 .
- the area of the orthographic projection of one transfer head 22 on the transfer substrate 20 is equal to the area of the orthographic projection of one LED chip 1 on the transfer substrate 20, and one LED chip 1 can be attracted or released by one transfer head 22 .
- the area corresponding to at least two transfer heads 22 is equal to the area corresponding to one LED chip 1, and one LED chip 1 can be attracted or released by at least two transfer heads 22.
- the transfer head 22 includes a coil 220 that includes a first end A and a second end B that extend.
- the control assembly 24 is electrically connected to the first end A and the second end B.
- the control component 24 controls the coil 220 to generate or remove the magnetic attraction force.
- the structure of the coil 220 can be a planar coil, a chip coil, a thin film coil, etc.
- the material of the coil 220 can be copper, silver, etc.
- the number of turns of the coil 220 and the amount of current passing through the coil 220 can be set according to actual conditions. The application is not limited.
- the transfer head 22 further includes a convex post 222 fixed to at least one surface of the transfer substrate 20, and a coil 220 is surrounded around the convex post 222.
- the coil 220 may be wound on the outer surface of the convex post 222 in a spiral manner, and both the first end A and the second end B of the coil 220 protruding may be disposed toward the transfer substrate 20.
- the coil 220 passes current, the coil 220 induces an N-pole or S-pole magnetic field on the side away from the transfer substrate 20. Since the material of the magnetic member 12 on the LED chip 1 is metal, the coil 220 further generates a magnetic attraction force to the magnetic member 12.
- the material of the protrusion 220 may be designed as metal, preferably, the material of the protrusion 220 is iron.
- the strength of the magnetic field generated by the coil 220 can be enhanced to generate a stronger magnetic attraction force to the magnetic member 12.
- the coil 220 and the protrusion 222 may be designed in other ways. For example, the coil 220 is fixed to the end surface of the protrusion 222 away from the transfer substrate 20.
- control assembly 24 may be wholly or partially located in the transfer substrate 20; for the control assembly 24 to independently control each transfer head 22, please refer to FIG. 3, which is an example of FIG. 2.
- FIG. 3 is an example of FIG. 2.
- a schematic structural diagram of a control component provided by the embodiment of the present disclosure, the control component 24 provided by the present application includes:
- the current generating circuit 240 is used to supply current to the plurality of coils 220. One end of the current generating circuit 240 is connected to the first end A of the coil 220; the current generating circuit 240 may include a power supply, a resistor, etc. The magnitude of the current flowing through the coil 220 can be adjusted.
- a plurality of switches 242, one switch 242 is correspondingly connected to one coil 220, and the switch 242 may be various types of switches, for example, MEMS switches, N-type transistor switches, P-type transistor switches, and the like. Because the MEMS switch has the advantage of small size, it is more suitable for the assembly equipment provided by the present application.
- the switch 242 includes a control terminal K1, a third terminal K2, and a fourth terminal K3.
- the third terminal K2 is electrically connected to the other end of the current generating circuit 240, and the fourth terminal K3 is connected to the second end B of the coil 220;
- the switch control circuit 244 is used to connect the control terminals K1 of the plurality of switches 242 respectively.
- the switch control circuit 244 controls the connection and disconnection of the third terminal K2 and the fourth terminal K3 through the control terminal K1.
- the LED chip 1 further includes a sacrificial member 14, the sacrificial member 14 is disposed between the magnetic member 12 and the chip body 10; the assembly equipment provided by the present application further includes peeling In the device (not shown in FIG. 2 ), the peeling device is used to act on the sacrificial member 14 between the chip body 10 and the magnetic member 12, and then peel off the magnetic member 12 from the chip body 10.
- the peeling device may be a laser peeling device or the like.
- the sacrificial member 14 may not be provided, and the peeling device may be directly applied to the magnetic member 12 to peel the magnetic member 12 from the chip body 10.
- the LED chip 1 includes an electrode, and the magnetic member 12 is the electrode. When the magnetic member 12 is an electrode, the assembly equipment provided by the present application may not require a peeling device, and the subsequent step of peeling the magnetic member 12 may be omitted.
- FIG. 4 is a schematic flowchart of a method of assembling a display panel provided by an exemplary embodiment of the present application.
- FIG. 5 is an exemplary embodiment corresponding to steps S101-S104 in FIG. Provided is a schematic diagram of the structure.
- the assembly method includes:
- a donor substrate 3 is provided, and a plurality of LED chips 1 are provided on the donor substrate 3, wherein the LED chip 1 includes a chip body 10 and a magnetic member 12 provided on the chip body 10.
- the chip body 10 may be formed on the donor substrate 3 first, and then the magnetic member 12 may be formed on the surface of the chip body 10.
- the sacrificial member 14 may be formed on the surface of the chip body 10 and then sacrificed The member 14 forms a magnetic member 12 on the side away from the chip body 10.
- S102 Control a plurality of transfer heads 22 to generate a magnetic attraction force, which acts on the magnetic member 12 of the corresponding LED chip 1, and the magnetic attraction force is greater than the bonding force between the LED chip 1 and the donor substrate 3, so that The chip 1 is separated from the donor substrate 3, wherein a plurality of transfer heads 22 are fixed to at least one surface of the transfer substrate 20 in an array.
- the above step S102 specifically includes: the switch control circuit 244 in the control component 24 controls the plurality of switches 242 to be turned on, and the current output by the current generation circuit 240 flows corresponding to the plurality of switches 242
- the coils 220 in the plurality of transfer heads 22 connected, and the coils 220 in the plurality of transfer heads 22 generate a magnetic attraction force to attract the plurality of LED chips 1 of the donor substrate 3.
- the control assembly 24 controls the two switches 242 on the left in FIG. 5b to be turned on, and the transfer heads 22 (as shown in FIGS. 5b A and B) corresponding to the two switches 242 on the left generate a magnetic attraction force, thereby attracting The two LED chips 1 on the left on the corresponding donor substrate 3 (as indicated by a and b in FIG. 5b).
- the position of the transfer substrate 20 can be moved by a robot arm or the like, and the transfer head 22 to which the LED chip 1 is attracted to the transfer substrate 20 can be aligned with a predetermined position on the receiving substrate 4.
- the receiving substrate 4 may be an array substrate or an intermediate substrate.
- S104 Control the plurality of transfer heads 22 to remove the magnetic attraction force, so that the plurality of transfer heads 22 release the plurality of LED chips 1 to the receiving substrate 4.
- the switch control circuit 244 in the control assembly 24 controls the plurality of switches 242 to be turned off, and the coil 220 in the plurality of transfer heads 22 corresponding to the plurality of switches 242 flows without current.
- the coil 220 in the transfer head 22 removes the magnetic attraction force to release the plurality of LED chips 1 to the receiving substrate 4.
- the control component 24 controls the left switch 242 in FIG. 5d to turn off, and the transfer head 22 (as marked A in FIG. 5d) corresponding to the left switch 242 releases the magnetic attraction force, and then the LED chip 1 (as marked a in FIG. 5d) is released to the receiving substrate 4.
- the performance test of the LED chip 1 fails. Or because the position is not aligned with the predetermined position on the receiving substrate 4, the control assembly 24 controls the transfer head 22 (as marked B in FIG. 5d) not to release it.
- the assembly method provided by the present application further includes: removing the magnetic member 12 on the LED chip 1 to expose the chip body 10.
- the sacrificial member 14 between the chip body 10 and the magnetic member 12 in the LED chip 1, and the sacrificial member 14 is peeled by a peeling device such as laser peeling, thereby achieving The purpose of separating the piece 12 from the chip body 10.
- the relative position of the LED chip 1 and the receiving substrate 4 may also be fixed, for example, the receiving substrate 4.
- the chip body of the LED chip provided by the present application is provided with a magnetic member, which can be adsorbed under the action of the magnetic adsorption force generated by the external transfer device, thereby causing the LED chip to be adsorbed; and the traditional machine Compared with grasping LED chips, magnetic adsorption can reduce the damage to the LED chips, and magnetic adsorption is more convenient. Therefore, the efficiency of setting multiple LED chips in the display panel can be improved.
- the transfer device in the display panel assembly device includes a plurality of transfer heads and a control assembly.
- the control assembly can individually control the generation of each transfer head or release the magnetic member that can act on the corresponding LED chip Magnetic adsorption force, so that each transfer head can separately absorb or release LED chips, so that selective transfer of multiple LED chips can be achieved, thereby improving the efficiency of setting multiple LED chips in the display panel.
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- Computer Hardware Design (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Led Device Packages (AREA)
Abstract
Description
Claims (20)
- 一种LED芯片,所述LED芯片包括芯片主体以及设置于所述芯片主体上的磁性件,所述磁性件能在磁性吸附力的作用下被吸附;所述芯片主体包括衬底以及设置于所述衬底上的外延层结构,所述磁性件位于所述外延层结构远离所述衬底一侧。
- 根据权利要求1所述的LED芯片,其中,所述LED芯片进一步包括牺牲件,所述牺牲件设置于所述磁性件与所述芯片主体之间,以便于将所述磁性件从所述芯片主体上剥离。
- 根据权利要求2所述的LED芯片,其中,所述磁性件和所述牺牲件呈层状设置,且层叠设置于所述芯片主体的表面上。
- 根据权利要求1所述的LED芯片,其中,所述LED芯片进一步包括牺牲件,所述牺牲件设置于所述芯片主体上,所述磁性件为掺杂在所述牺牲件中的磁性颗粒。
- 根据权利要求1所述的LED芯片,其中,所述磁性件的材质为铁、钴、镍、铁镍合金中至少一种。
- 根据权利要求1所述的LED芯片,其中,所述磁性件为磁性电极。
- 一种显示面板的组装设备,所述组装设备包括转移装置,用于将LED芯片移转至接收基板,所述LED芯片包括芯片主体以及设置于所述芯片主体上的磁性件;所述转移装置包括:转移基板;多个转移头,所述多个转移头以阵列方式固定于所述转移基板的至少一侧表面,所述LED芯片与至少一个所述转移头相对应;控制组件,用于分别控制每个所述转移头产生磁性吸附力或者解除所述磁性吸附力,以吸附或者释放所述LED芯片。
- 根据权利要求7所述的组装设备,其中,至少一个所述转移头在所述转移基板上的正投影的面积与一个所述LED芯片在所述转移基板上的正投影的面积相等,一个所述LED芯片被至少一个所述转移头吸附或者释放。
- 根据权利要求7所述的组装设备,其中,每个所述转移头包括线圈,所述线圈包括第一端和第二端,所述控制组件与所述第一端和所述第二端电连接,以控制所述线圈产生或者去除所述磁性吸附力。
- 根据权利要求9所述的组装设备,其中,每个所述转移头还包括一个 凸柱,所述凸柱设置于所述转移基板的至少一侧表面,每个凸柱外表面设有线圈。
- 根据权利要求10所述的组装设备,其中,所述线圈以螺旋的方式绕设在所述凸柱的外表面,且所述线圈的所述第一端和所述第二端朝向所述转移基板。
- 根据权利要求10所述的组装设备,其中,所述凸柱的材料为金属。
- 根据权利要求12所述的组装设备,其中,所述凸柱的材料为铁。
- 根据权利要求9所述的组装设备,其中,所述控制组件包括:电流产生电路,用于向多个所述线圈提供电流,所述电流产生电路的一端与所述线圈的所述第一端连接;多个开关,一个所述开关对应连接一个所述线圈,所述开关包括控制端、第三端和第四端,所述第三端与所述电流产生电路的另一端电连接,所述第四端与所述线圈的所述第二端连接;开关控制电路,用于分别连接多个所述开关的所述控制端,所述开关控制电路通过所述控制端控制所述第三端与所述第四端的连接与断开。
- 根据权利要求14所述的组装设备,其中,所述开关为MEMS开关、N型晶体管开关、P型晶体管开关中至少一种。
- 根据权利要求7所述的组装设备,其中,所述磁性件为磁性电极。
- 根据权利要求7所述的组装设备,其中,所述组装设备进一步包括剥离装置,所述剥离装置用于从所述芯片主体上剥离所述磁性件。
- 根据权利要求8所述的组装设备,其中,所述LED芯片进一步包括牺牲件,所述牺牲件设置于所述磁性件与所述芯片主体之间;所述剥离装置作用于所述牺牲件,进而从所述芯片主体上剥离所述磁性件。
- 一种显示面板的组装方法,其中,所述组装方法包括:提供施主基板,所述施主基板上设置有多个LED芯片,其中,所述LED芯片包括芯片主体以及设置于所述芯片主体上的磁性件;控制多个转移头产生磁性吸附力,所述磁性吸附力作用于对应的所述LED芯片的所述磁性件,所述磁性吸附力大于所述LED芯片与所述施主基板之间的结合力,以将多个所述LED芯片从所述施主基板吸附,其中,多个所述转移头以阵列方式固定于转移基板的至少一侧表面;将所述转移基板移动至接收基板上方;控制多个转移头去除磁性吸附力,以使得多个所述转移头将多个所述LED芯片释放至接收基板。
- 根据权利要求19所述的组装方法,其中,所述组装方法还包括:去除所述LED芯片上的所述磁性件,以暴露出所述芯片主体。
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