CN120435818A - 静电卡盘 - Google Patents

静电卡盘

Info

Publication number
CN120435818A
CN120435818A CN202380089729.8A CN202380089729A CN120435818A CN 120435818 A CN120435818 A CN 120435818A CN 202380089729 A CN202380089729 A CN 202380089729A CN 120435818 A CN120435818 A CN 120435818A
Authority
CN
China
Prior art keywords
electrostatic chuck
releasing
adsorption
electrode
dielectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380089729.8A
Other languages
English (en)
Chinese (zh)
Inventor
长谷川乔彬
石桥一哉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Creative Technology Corp
Original Assignee
Creative Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Creative Technology Corp filed Critical Creative Technology Corp
Publication of CN120435818A publication Critical patent/CN120435818A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • H10P72/722—Details of electrostatic chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0085—Gripping heads and other end effectors with means for applying an electrostatic force on the object to be gripped
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/92—Devices for picking-up and depositing articles or materials incorporating electrostatic or magnetic grippers

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
CN202380089729.8A 2022-12-28 2023-12-26 静电卡盘 Pending CN120435818A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-212754 2022-12-28
JP2022212754 2022-12-28
PCT/JP2023/046818 WO2024143432A1 (ja) 2022-12-28 2023-12-26 静電チャック

Publications (1)

Publication Number Publication Date
CN120435818A true CN120435818A (zh) 2025-08-05

Family

ID=91717759

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380089729.8A Pending CN120435818A (zh) 2022-12-28 2023-12-26 静电卡盘

Country Status (5)

Country Link
EP (1) EP4645673A1 (https=)
JP (1) JPWO2024143432A1 (https=)
CN (1) CN120435818A (https=)
TW (1) TW202427678A (https=)
WO (1) WO2024143432A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004031599A (ja) 2002-06-25 2004-01-29 Kyocera Corp 静電チャック
JP2005166820A (ja) * 2003-12-01 2005-06-23 Toshiba Ceramics Co Ltd 静電チャック装置
JP2006332204A (ja) * 2005-05-24 2006-12-07 Toto Ltd 静電チャック
US8497980B2 (en) * 2007-03-19 2013-07-30 Nikon Corporation Holding apparatus, exposure apparatus, exposure method, and device manufacturing method

Also Published As

Publication number Publication date
TW202427678A (zh) 2024-07-01
WO2024143432A1 (ja) 2024-07-04
JPWO2024143432A1 (https=) 2024-07-04
EP4645673A1 (en) 2025-11-05

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