TW202334748A - 轉印膜、具有導體圖案的積層體、具有導體圖案的積層體的製造方法、轉印膜的製造方法 - Google Patents

轉印膜、具有導體圖案的積層體、具有導體圖案的積層體的製造方法、轉印膜的製造方法 Download PDF

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Publication number
TW202334748A
TW202334748A TW111143850A TW111143850A TW202334748A TW 202334748 A TW202334748 A TW 202334748A TW 111143850 A TW111143850 A TW 111143850A TW 111143850 A TW111143850 A TW 111143850A TW 202334748 A TW202334748 A TW 202334748A
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TW
Taiwan
Prior art keywords
photosensitive composition
composition layer
meth
group
mass
Prior art date
Application number
TW111143850A
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English (en)
Chinese (zh)
Inventor
佐藤守正
Original Assignee
日商富士軟片股份有限公司
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Application filed by 日商富士軟片股份有限公司 filed Critical 日商富士軟片股份有限公司
Publication of TW202334748A publication Critical patent/TW202334748A/zh

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Materials For Photolithography (AREA)
TW111143850A 2021-11-30 2022-11-17 轉印膜、具有導體圖案的積層體、具有導體圖案的積層體的製造方法、轉印膜的製造方法 TW202334748A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-194465 2021-11-30
JP2021194465 2021-11-30

Publications (1)

Publication Number Publication Date
TW202334748A true TW202334748A (zh) 2023-09-01

Family

ID=86611855

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111143850A TW202334748A (zh) 2021-11-30 2022-11-17 轉印膜、具有導體圖案的積層體、具有導體圖案的積層體的製造方法、轉印膜的製造方法

Country Status (3)

Country Link
CN (1) CN118235091A (ja)
TW (1) TW202334748A (ja)
WO (1) WO2023100553A1 (ja)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004191648A (ja) * 2002-12-11 2004-07-08 Hitachi Chem Co Ltd 感光性エレメント、これを用いたレジストパターンの形成方法及びプリント配線板の製造方法
KR20160002887A (ko) * 2013-04-24 2016-01-08 히타치가세이가부시끼가이샤 감광성 엘리먼트, 감광성 엘리먼트 롤, 레지스트 패턴의 제조방법 및 전자부품

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Publication number Publication date
CN118235091A (zh) 2024-06-21
WO2023100553A1 (ja) 2023-06-08

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