TW202302332A - 燒結機 - Google Patents
燒結機 Download PDFInfo
- Publication number
- TW202302332A TW202302332A TW111105249A TW111105249A TW202302332A TW 202302332 A TW202302332 A TW 202302332A TW 111105249 A TW111105249 A TW 111105249A TW 111105249 A TW111105249 A TW 111105249A TW 202302332 A TW202302332 A TW 202302332A
- Authority
- TW
- Taiwan
- Prior art keywords
- press
- lower plate
- load cell
- plate
- silicon wafers
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
- B30B15/0094—Press load monitoring means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
- B30B15/007—Means for maintaining the press table, the press platen or the press ram against tilting or deflection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
- B30B15/02—Dies; Inserts therefor; Mounting thereof; Moulds
- B30B15/026—Mounting of dies, platens or press rams
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0438—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/30—Mounting, exchanging or centering
- B29C33/308—Adjustable moulds
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Silicon Compounds (AREA)
- Presses And Accessory Devices Thereof (AREA)
- Powder Metallurgy (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT102021000018458A IT202100018458A1 (it) | 2021-07-13 | 2021-07-13 | Pressa di sinterizzazione |
| IT102021000018458 | 2021-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202302332A true TW202302332A (zh) | 2023-01-16 |
Family
ID=78086672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111105249A TW202302332A (zh) | 2021-07-13 | 2022-02-14 | 燒結機 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20240339343A1 (enExample) |
| EP (1) | EP4370320A1 (enExample) |
| JP (1) | JP7849072B2 (enExample) |
| CN (1) | CN117715746A (enExample) |
| CA (1) | CA3224468A1 (enExample) |
| IT (1) | IT202100018458A1 (enExample) |
| MX (1) | MX2024000677A (enExample) |
| TW (1) | TW202302332A (enExample) |
| WO (1) | WO2023285876A1 (enExample) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4076780A (en) * | 1977-01-27 | 1978-02-28 | General Motors Corporation | Programmable velocity and force control method for compression molding |
| JP3490606B2 (ja) * | 1998-03-20 | 2004-01-26 | 富士通株式会社 | 半導体装置製造用金型 |
| JP5977592B2 (ja) | 2012-06-20 | 2016-08-24 | 東京応化工業株式会社 | 貼付装置 |
| US9427893B2 (en) | 2014-09-18 | 2016-08-30 | Asm Technology Singapore Pte Ltd | Molding press and a platen for a molding press |
| IT201800020272A1 (it) | 2018-12-20 | 2020-06-20 | Amx Automatrix S R L | Pressa di sinterizzazione per sinterizzare componenti elettronici su un substrato |
-
2021
- 2021-07-13 IT IT102021000018458A patent/IT202100018458A1/it unknown
- 2021-12-28 JP JP2024501755A patent/JP7849072B2/ja active Active
- 2021-12-28 MX MX2024000677A patent/MX2024000677A/es unknown
- 2021-12-28 CN CN202180100562.1A patent/CN117715746A/zh active Pending
- 2021-12-28 EP EP21844065.9A patent/EP4370320A1/en active Pending
- 2021-12-28 US US18/577,814 patent/US20240339343A1/en active Pending
- 2021-12-28 WO PCT/IB2021/062386 patent/WO2023285876A1/en not_active Ceased
- 2021-12-28 CA CA3224468A patent/CA3224468A1/en active Pending
-
2022
- 2022-02-14 TW TW111105249A patent/TW202302332A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP4370320A1 (en) | 2024-05-22 |
| WO2023285876A1 (en) | 2023-01-19 |
| CN117715746A (zh) | 2024-03-15 |
| JP7849072B2 (ja) | 2026-04-21 |
| MX2024000677A (es) | 2024-07-22 |
| IT202100018458A1 (it) | 2023-01-13 |
| CA3224468A1 (en) | 2023-01-19 |
| JP2024529344A (ja) | 2024-08-06 |
| US20240339343A1 (en) | 2024-10-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6838993B2 (ja) | 半導体ボンディング装置および関連技術 | |
| US9553069B2 (en) | Bonding apparatus and substrate manufacturing equipment including the same | |
| JP2013187393A (ja) | 貼り合わせ装置及び貼り合わせ方法 | |
| TWI583976B (zh) | Wafer inspection interface | |
| WO2017208909A1 (ja) | ラミネート装置、ラミネート方法および太陽電池モジュールの製造方法 | |
| US20230207369A1 (en) | Wafer chuck table and wafer chuck system | |
| TW202302332A (zh) | 燒結機 | |
| CN116313977A (zh) | 真空手臂及其制造方法 | |
| TWI830090B (zh) | 接合裝置及接合方法 | |
| KR20240090684A (ko) | 압력 센서 | |
| JP7329996B2 (ja) | 基板保持装置 | |
| KR101494317B1 (ko) | 압착 장치 및 이를 이용한 플렉시블 디스플레이 장치의 제조 방법 | |
| JP4012871B2 (ja) | セラミック板の焼成方法 | |
| JP2010118483A (ja) | 基板保持部材および接合装置 | |
| JP2018190815A (ja) | 真空吸着部材 | |
| CN105612609A (zh) | 黏晶平台及其制造方法 | |
| JP2024529344A5 (enExample) | ||
| WO2021039427A1 (ja) | 押圧装置、基板処理システム、及び基板処理方法 | |
| JP2766443B2 (ja) | セラミックスヒーターの製造方法 | |
| KR102534660B1 (ko) | 합지장치를 이용한 기판 합지방법 | |
| JP4289054B2 (ja) | 積層セラミック電子部品の製造方法 | |
| JP2009272388A (ja) | 積層半導体素子製造方法および積層半導体素子製造装置 | |
| TWM645355U (zh) | 用於設備的載盤自動校正支撐架 | |
| KR20250101778A (ko) | 웨이퍼 본딩 장치 | |
| JP2023156160A (ja) | 基板重ね合わせ装置及び基板重ね合わせ方法 |