TW202201592A - Equipment and method for transferring workpieces including a carrying apparatus, a pressing apparatus, a peeling apparatus and a controlling apparatus - Google Patents

Abstract

An equipment for transferring workpieces is suitable for transferring a plurality of workpieces and includes a carrying apparatus, a pressing apparatus, a peeling apparatus and a controlling apparatus. The carrying apparatus includes an adhesive film. The adhesive film has an adhesive surface for adhering the workpieces, and a top surface. The pressing apparatus is located above the adhesive film to press the top surface down. The peeling apparatus includes a carrier located under the adhesive film. The carrier is formed with a plurality of recesses, and each recess is configured to accommodate the corresponding workpieces aligned in position. Under the states in which the pressing apparatus presses the top surface down and the recesses accommodate the corresponding workpieces, the carrier may move to exert a force on the corresponding workpieces accommodated within the grooves and peel them off the adhesive surface. The controlling apparatus is configured to control relative positions and displacements among the adhesive film, the carrier and the pressing apparatus. Accordingly, the transfer man-hour may be reduced and the transfer efficiency may be improved.

Description

Transfer equipment and method for transferring workpieces

The present invention relates to a transfer device and a method for transferring a workpiece, and more particularly to a transfer device and a method for transferring the workpiece for peeling off the workpiece and transferring it to a carrier.

In the semiconductor manufacturing process, it is necessary to transfer a plurality of chips adhered to a film after dicing to a substrate, so as to facilitate the subsequent packaging process of the chips.

The commonly used transfer method is to use a pick-and-place device. The pick-and-place device uses a suction nozzle to suck a corresponding wafer on the diaphragm. Then, the wafer is ejected by the ejector pin on the base, and the suction nozzle drives The wafer moves to peel off the film, and finally, the suction nozzle drives the wafer to move and place it on the substrate, thus completing the pick-and-place operation of a single wafer. The suction nozzle of the pick-and-place device can only carry out the pick-and-place operations of the wafers one by one in sequence, because the suction nozzle needs to perform many steps and time-consuming when picking and placing each of the wafers. Therefore, it takes a long time to transfer all the wafers on the membrane to the substrate, which affects the time required for transferring the wafers to the subsequent process. Therefore, the existing transfer methods have the problems of slow transfer speed and poor efficiency.

Accordingly, one of the objects of the present invention is to provide a transfer apparatus that overcomes at least one of the disadvantages of the prior art.

Therefore, in some embodiments, the transfer apparatus of the present invention is suitable for transferring a plurality of workpieces, and the transfer apparatus includes a carrying device, a pressing device, a peeling device, and a control device.

The carrier device includes an adhesive film, the adhesive film has an adhesive surface for adhering the workpieces, and a top surface opposite to the adhesive surface. The pressing device is located above the adhesive film and presses the top surface with the following. The peeling device includes a carrier under the adhesive film, the carrier is formed with a plurality of grooves, each of the grooves is used for accommodating the corresponding workpieces aligned in position, and the pressing device presses the With the top surface and each of the grooves accommodating the corresponding workpieces, the carrier can move to exert force on the corresponding workpieces accommodated in the grooves and peel them off the adhesive surface. The control device is used for controlling the relative position and displacement among the adhesive film, the carrier and the pressing device.

In some embodiments, the peeling device further includes a moving mechanism connected to the carrier, and the moving mechanism is used to drive the carrier to move along at least a first lateral direction.

In some embodiments, the moving mechanism is further used to drive the carrier to move along a second lateral direction perpendicular to the first lateral direction.

In some embodiments, the carrier device further includes a transfer mechanism connected to the adhesive film, the transfer mechanism is used to drive the adhesive film to move up and down at least along a longitudinal direction, and the moving mechanism is also used to drive the carrier The tool moves up and down along the longitudinal direction.

In some embodiments, the pressing device includes a plurality of pressing members corresponding to the positions of the workpieces, and each of the pressing members is aligned with the position corresponding to the workpiece on the top surface by pressing below.

In some embodiments, the workpieces are arranged at intervals along a transverse direction, the pressing device includes a pressing member for pressing the top surface below, and a movement mechanism connected to the pressing member, the movement mechanism uses In order to drive the pressing member to move on the top surface at least along a lateral direction to press the workpieces in sequence and squeeze the workpieces into the grooves.

In some embodiments, the pressing member is a rotating member that can rotate around an axis perpendicular to the lateral direction, and the motion mechanism is further used to drive the pressing member to move along the lateral direction while simultaneously rotating on the top. Rotate around this axis.

In some embodiments, the carrier is further formed with a plurality of adsorption holes respectively communicating with the grooves, and each of the adsorption holes is used for adsorbing the corresponding workpiece.

In some embodiments, the carrier has a plurality of guide slopes respectively located on one side of the grooves, each guide slope is used for contacting the corresponding workpiece, and each guide slope allows the corresponding workpiece swipe on it.

In some embodiments, a first distance is formed between two adjacent workpieces among the workpieces, the grooves are arranged in the same manner as the workpieces, and two adjacent grooves among the grooves A second distance is formed therebetween, the second distance is the same as the first distance, and the grooves are respectively aligned with the workpieces and are respectively accommodated by the workpieces.

In some embodiments, a first distance is formed between two adjacent workpieces among the workpieces, the grooves are arranged differently from the workpieces, and two adjacent grooves among the grooves A second distance is formed therebetween, the second distance is different from the first distance, and each of the grooves can be selectively aligned with the corresponding workpiece and accommodated therein.

In some embodiments, the second distance is greater than the first distance, and the second distance is an integer multiple of the first distance.

In some embodiments, the workpieces are divided into at least two different adhesive areas arranged on the adhesive film, the first distance values in the adhesive areas are different, and the grooves are divided into at least two different adhesive areas arranged on the adhesive film. At least two different layout areas on the carrier, the second spacing values in the layout areas are different, and the second spacing in each layout area is an integer multiple of the first spacing in the corresponding adhesive area .

One object of the present invention is to provide a method of transferring workpieces that overcomes at least one of the disadvantages of the prior art.

Therefore, in some embodiments, the method for transferring workpieces of the present invention is suitable for transferring a plurality of workpieces, and the method includes the following steps:

providing a step of providing an adhesive film for adhering the workpieces with an adhesive surface at the bottom end;

The alignment step is to perform alignment between the adhesive film, a carrier with a plurality of grooves, and a pressing device, so that each of the grooves is aligned with the corresponding position of the workpiece, and the pressing device corresponds to on a top surface of the adhesive film opposite to the adhesive surface;

The relative movement step is to carry out the relative movement between the adhesive film, the carrier, and the pressing device, so that the corresponding workpieces of the grooves of the carrier are aligned with each other, and the lower part of the pressing device pressing the top surface; and

In the peeling step, the carrier is moved to exert force on the corresponding workpieces accommodated in the grooves and peeled off the adhesive surface.

In some embodiments, in the peeling step, the carrier is driven to move along a first lateral direction by a moving mechanism.

In some embodiments, in the peeling step, the moving mechanism is also used to drive the carrier to move along a second lateral direction perpendicular to the first lateral direction.

In some embodiments, in the relative movement step, the pressing device presses the top surface through a plurality of pressing pieces, and each of the pressing pieces is pressed down on the top surface to align with the corresponding position of the workpiece. part.

In some embodiments, in the relative movement step, the pressing device presses the top surface through a pressing member, and the pressing device also drives the pressing member along at least one lateral direction through a moving mechanism Move on the top surface to press the workpieces in sequence and squeeze the workpieces into the grooves, when the pressing member is positioned to squeeze the corresponding workpieces into the corresponding grooves When the position is in the position, the corresponding workpiece is adsorbed by suction through an adsorption hole communicated with the corresponding groove.

In some embodiments, in the relative movement step, the movement mechanism also drives the pressing member to rotate on the top surface around an axis perpendicular to the lateral direction during the movement in the lateral direction.

In some embodiments, in the relative movement step, suction is generated to adsorb the corresponding workpiece through an adsorption hole communicating with the corresponding groove.

In some embodiments, the grooves are arranged in the same manner as the workpieces, and the grooves are respectively aligned with the workpieces and are respectively accommodated by the workpieces.

In some embodiments, the grooves and the workpieces are arranged in different ways, and each of the grooves can selectively align with and accommodate the corresponding workpiece.

The present invention has at least the following effects: a plurality of workpieces can be quickly transferred into the grooves of the carrier at one time, thereby reducing the transfer man-hour and greatly improving the transfer efficiency. In addition, since the carrier is the target carrier for carrying the workpieces to drive them to the subsequent process, when the carrier peels off the workpieces from the adhesive film, the unloading of the workpieces is simultaneously completed. In this way, after the carrier is detached from the moving platform, the carrier can drive the workpieces to carry out the subsequent process, which can greatly shorten the time required for transferring the workpieces to the subsequent process.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are designated by the same reference numerals.

Referring to FIG. 1 and FIG. 2 , it is a first embodiment of the transfer apparatus 200 of the present invention. The transfer apparatus 200 is suitable for transferring a plurality of workpieces 1 in a process. In the first embodiment, the process is, for example, a semiconductor process, and each of the workpieces 1 is an example of a semiconductor element, specifically, a wafer. The length dimension of each workpiece 1 taken along a first transverse direction X and the width dimension taken along a second transverse direction Y perpendicular to the first transverse direction X are between 50um and 10mm. The thickness dimension taken in the longitudinal direction Z perpendicular to the first and second lateral directions X, Y is, for example, between 10 um and 1 mm. The first lateral direction X is, for example, the front-rear direction, the second lateral direction Y is, for example, the left-right direction, and the vertical direction Z is, for example, the up-down direction. Of course, each of the workpieces 1 can also be any other types of workpieces that need to be transferred from a work area to a carrier in other processes and transferred to subsequent processes through the carrier, not limited to wafers.

Referring to FIG. 1 , the transfer apparatus 200 includes a carrying device 2 , a pressing device 3 , a peeling device 4 , and a control device 5 (as shown in FIG. 3 ). The carrier device 2 includes an adhesive film 21 and a transfer mechanism 22 connected to the film adhesive film 21 . The adhesive film 21 is a blue film as an example, and its thickness is, for example, between 100um and 2mm. The adhesive film 21 has an adhesive surface 211 facing downward for adhering the workpieces 1 , and a top surface 212 opposite to the adhesive surface 211 . The adhesive film 21 can also be a film such as a UV release film, a pyrolysis film, a silicone film, or a PVA film, and is not limited to a blue film.

The transfer mechanism 22 is a three-axis moving mechanism and includes a base 221, two transfer fixtures 222, and a driving structure (not shown). The transfer fixtures 222 are movably connected to the base 221, and the transfer fixtures 222 can be driven by the driving structure along the first transverse direction X, the second transverse direction Y, or the longitudinal direction Z in the direction of the move on the base 221 . The transfer fixtures 222 are respectively connected to two opposite ends of the adhesive film 21 , and the transfer fixtures 222 can apply reverse pulling force to the adhesive film 21 , so that the adhesive film 21 has the shape shown in FIG. 1 . Flat and tight. The transfer mechanism 22 can drive the adhesive film 21 to move along the first and second lateral directions X, Y and the longitudinal direction Z through the transfer fixtures 222 . In the first embodiment, the method of connecting the transfer jigs 222 to the adhesive film 21 is a clamping method, but the adhesive film 21 can also be connected and fixed by means of frame fixing or vacuum adsorption.

The pressing device 3 includes a plurality of pressing members 31 and a movement mechanism 32 connected to the pressing members 31 . The pressing members 31 are located above the adhesive film 21 to press down the top surface 212 of the adhesive film 21 . In the first embodiment, the number of the pressing members 31 is the same as the number of the workpieces 1 , and the pressing members 31 can be aligned with the workpieces 1 respectively. Each of the pressing members 31 is, for example, in the shape of a long strip and has a rounded corner 311 at the bottom end. The width of the rounded corner 311 along the first lateral direction X is, for example, the length or width of the workpiece 1 . 10%~60%. The rounded corners 311 of each of the pressing members 31 are pressed on the top surface 212 to align with the part corresponding to the workpiece 1 , whereby pressure can be applied to the adhesive surface 211 and the corresponding workpiece 1 through the adhesive film 21 . 1 to reduce the adhesion between the adhesive surface 211 and the top surface corresponding to the workpiece 1 . It should be noted that the shape of each of the pressing members 31 may also be other shapes such as needle shape, elongated trapezoid shape, or elongated triangle shape.

The moving mechanism 32 is a three-axis moving mechanism and includes a moving platform 321 and a driving structure (not shown). The pressing members 31 are fixedly disposed at the bottom end of the moving platform 321 . The driving structure is used to drive the moving platform 321 to move along the first lateral direction X, the second lateral direction Y, or the longitudinal direction Z, so that the moving platform 321 can drive the pressing members 31 along the first lateral direction , the second horizontal direction X, Y and the vertical Z movement.

Referring to FIG. 1 and FIG. 2 , the peeling device 4 includes a carrier 41 and a moving mechanism 42 connected to the carrier 41 . The carrier 41 is located under the adhesive film 21 for peeling off and carrying the workpieces 1 , the carrier 41 has a top surface 410 , and the top surface 410 of the carrier 41 is recessed downward to form a plurality of spaced apart Each of the grooves 411 is used for accommodating the corresponding workpiece 1 that is aligned in position. In the first embodiment, the carrier 41 is, for example, a carrier plate, which is a target carrier for driving the workpieces 1 to perform subsequent processes. Of course, the carrier 41 can also be a target carrier of other bearing types such as a wiring substrate, a lead frame, or a glass substrate. The number of the grooves 411 is the same as the number of the workpieces 1 , and the grooves 411 can be aligned with the workpieces 1 respectively. The opening of each of the grooves 411 faces upward, and each of the grooves 411 is formed by a bearing surface 412 of the carrier 41 , two first side surfaces 413 respectively connected to two opposite sides of the bearing surface 412 , and two respectively The second side surfaces 414 connected to the other two opposite sides of the bearing surface 412 are jointly defined. The first side surfaces 413 are spaced apart along the first transverse direction X, and the second side surfaces 414 are spaced apart along the second transverse direction Y. Each of the first side surfaces 413 and each of the second side surfaces 414 are, for example, upright surfaces.

The depth of each of the grooves 411 along the longitudinal direction Z is, for example, 50% to 70% of the thickness of each of the workpieces 1 along the longitudinal direction Z, whereby the workpieces 1 are accommodated in the corresponding grooves After 411 , it can partially protrude out of the top surface 410 of the carrier 41 by an appropriate distance. The length dimension of each groove 411 taken along the first lateral direction X and the width dimension taken along the second lateral direction Y are, for example, 110% to 130% of the length of each workpiece 1, thereby making each The size of the space of the groove 411 is sufficient for the corresponding workpiece 1 to penetrate therethrough.

For convenience of description, the workpieces 1 , the grooves 411 , and the pressing members 31 in the first embodiment are arranged in the same manner, and each of them is, for example, arranged at intervals along the first lateral direction X as an example. A first distance P1 is formed between every two adjacent workpieces 1 along the first lateral direction X, and a second spacing P1 is formed along the first lateral direction X between every two adjacent grooves 411 A distance P2, a third distance P3 is formed between the rounded corners 311 of every two adjacent pressing members 31 along the first lateral direction X, the first distance P1, the second distance P2 and the The sizes of the third pitches P3 are all the same. Of course, the layout of the workpieces 1 , the grooves 411 , and the pressing members 31 in the first embodiment can also be arranged at intervals along the first lateral direction X and the second lateral direction Y at the same time. , not limited to the aforementioned arrangement.

The moving mechanism 42 is a three-axis moving mechanism and includes a moving platform 421 and a driving structure (not shown). The carrier 41 is detachably assembled and fixed on the top surface of the moving platform 421 . The carrier 41 and the moving platform 421 can be assembled and fixed together, for example, by means of screw locking, or by means of a buckle in which a hook is matched with a slot. The driving structure is used to drive the moving platform 421 to move along the first lateral direction X, the second lateral direction Y, or the longitudinal direction Z, so that the moving platform 421 can drive the carrier 41 along the first and second lateral directions. The two horizontal directions X, Y and the vertical Z move.

Referring to FIG. 3 , the control device 5 includes a controller 51 , an image sensor 52 , and a plurality of pressure sensors 53 . The controller 51 is electrically connected to the driving structure of the transfer mechanism 22 , the driving structure of the moving mechanism 32 , and the driving structure of the moving mechanism 42 . The image sensor 52 is electrically connected to the controller 51 for capturing images. The pressure sensors 53 are electrically connected to the controller 51 and are respectively disposed on the pressure-applying members 31 (as shown in FIG. 1 ). Each pressure sensor 53 is used to sense the corresponding pressure The pressure on the adhesive film 21 is exerted by the member 31 .

The following is a detailed description of the method for transferring workpieces using the transfer device 200 of the first embodiment:

4 is a one-step flow chart of a method for transferring a workpiece, comprising the following steps: providing step S1, alignment step S2, relative movement step S3, and peeling step S4.

Referring to FIGS. 1 and 4 , in the providing step S1 , the adhesive film 21 is provided to adhere a wafer (not shown) with the adhesive surface 211 , and the adhesive film 21 is cut by a conventional dicing method. to form a plurality of separate chips, the chips are the workpieces 1 adhered to the adhesion surface 211 . Afterwards, a reverse pulling force is applied to the adhesive film 21 along the first lateral direction X through the transfer fixtures 222 , so that the adhesive film 21 is in a flat and tight state as shown in FIG. 1 .

Referring to FIG. 3 , FIG. 4 and FIG. 5 , in the alignment step S2 , alignment among the carrier 41 , the adhesive film 21 and the pressing device 3 is performed. In the first embodiment, for example, the rounded corners 311 of the pressing members 31 are preset as reference origins, which are used as the basis for subsequent alignment of the carrier 41 and the adhesive film 21 .

First, the adhesive film 21 is moved to a position below the pressing members 31 through the transfer fixtures 222 , so that the top surface 212 of the adhesive film 21 and the rounded corners 311 are aligned along the longitudinal direction Z. at an appropriate distance. Next, drive the carrier 41 to move to the position below the adhesive film 21 and the workpieces 1 as shown in FIG. The longitudinal direction Z is separated by a suitable distance, for example, the distance is 10um~1mm. Subsequently, an image is captured from above the adhesive film 21 through the image sensor 52 disposed at the bottom of the motion platform 321 . After the controller 51 receives the image, an image recognition module of the controller 51 is used to capture the image. (Not shown) The image is identified to determine whether the alignment of the carrier 41 and the adhesive film 21 is completed. In the image, it is necessary to judge whether the alignment of the carrier 41 and the adhesive film 21 is completed. In the first embodiment, for example, whether the positions of the workpieces 1 and the workpieces 1 are aligned along the longitudinal direction Z through the grooves 411 Of course, it can also be judged by whether the alignment marks on the carrier 41 and the alignment marks on the adhesive film 21 are aligned along the longitudinal direction Z. At the same time, the image recognition module will also compare the image with a reference image pre-stored by the controller 51 with the reference origin position information of the rounded corners 311 to determine the grooves 411 and the Whether the position of the workpiece 1 is aligned with the position of the rounded corners 311 .

When the positions of the workpieces 1 or the grooves 411 are deviated, the controller 51 controls the driving structure of the transfer mechanism 22 to act to fine-tune the positions of the workpieces 1 , or controls the position of the moving mechanism 42 . The drive structure is actuated to fine-tune the positions of the grooves 411 . Thereby, each of the grooves 411 is aligned with the corresponding workpiece 1 , and the rounded corners 311 of each of the pressing members 31 are aligned with the corresponding workpiece 1 .

It should be noted that, in the first embodiment, the grooves 411 can also be preset as the reference origin, which is used as the basis for the subsequent alignment of the adhesive film 21 and the pressing members 31 . At this time, the image sensor 5 can be disposed at the top of the mobile platform 421 to capture an image from under the adhesive film 21 , and the image recognition module will compare the image with a pre-stored reference with the grooves 411 . The reference image of the origin position information is compared.

Referring to FIG. 3 , FIG. 4 and FIG. 6 , in the relative movement step S3 , the relative movement between the adhesive film 21 , the carrier 41 and the pressing device 3 is performed. Since the rounded corners 311 of the pressing members 31 are preset as reference origins in the alignment step S2, the pressing members 31 are kept in a fixed state.

First, the adhesive film 21 is driven to move upward along the longitudinal direction Z through the transfer fixtures 222 , and at the same time, the carrier 41 is driven to move upward along the longitudinal direction Z through the moving platform 421 . During the upward movement of the adhesive film 21 , when the top surface 212 is contacted and blocked by the rounded corners 311 of the pressing members 31 , the adhesive film 21 cannot continue to move upward. The transfer clamps 222 are moved upward for an appropriate distance and the two opposite ends of the adhesive film 21 are pulled upward, so that the two opposite ends of the adhesive film 21 are slightly warped and deformed upward, thereby making the inverted The rounded corners 311 can be pressed down tightly on the top surface 212 aligned with the position corresponding to the workpiece 1 . At this time, the transfer jigs 222 can be stopped at the positions shown in FIG. 6 .

By the two opposite ends of the adhesive film 21 being slightly warped and deformed upward, the adhesive surface 211 can be expanded to reduce its adhesive force. By applying down pressure to the top surface 212 in a stress concentration manner by each of the rounded corners 311 and transmitting it to the corresponding workpiece 1 through the adhesive film 21 , the adhesive surface 211 and the corresponding top surface of the workpiece 1 can be broken. air tightness between the two, so as to further reduce the adhesive force between the adhesive surface 211 and the corresponding top surface of the workpiece 1 .

During the upward movement of the carrier 41 , the workpieces 1 will first penetrate into the grooves 411 , and then, each of the bearing surfaces 412 will contact the bottom surface of the corresponding workpiece 1 and push it upwards. The pushing force is transmitted to the corresponding pressing member 31 via the corresponding workpiece 1 and the adhesive film 21 . In the first embodiment, each of the pressure sensors 53 senses the thrust force exerted by the corresponding bearing surface 412 on the corresponding workpiece 1 , which can be used to determine whether each workpiece 1 is indeed accommodated in the corresponding workpiece 1 . information in the groove 411 . After receiving the signal of the thrust force, the controller 51 compares the value of the thrust force with a preset value. When the value of the thrust force is smaller than the preset value, the controller 51 controls the driving structure of the moving mechanism 42 to continue to drive the moving platform 421 to move upward. When the controller 51 determines that the value of the thrust force is the same as the preset value, the controller 51 controls the driving structure of the moving mechanism 42 to stop driving the moving platform 421 to move upward, so that the carrier 41 is positioned at the position shown in FIG. 6 . A load-bearing position is shown. Thereby, it can be ensured that the corresponding workpieces 1 in which the accommodating positions of the grooves 411 are aligned are ensured.

It should be noted that the relative movement between the adhesive film 21, the carrier 41 and the pressing device 3 in the first embodiment can also be in the following two other ways:

One way is to keep the carrier 41 in a fixed state, and drive the adhesive film 21 to move downward along the longitudinal direction Z through the transfer fixtures 222 , so that the workpieces 1 are respectively accommodated in the grooves 411 Inside. The pressing members 31 are driven to move downward along the longitudinal direction Z through the moving platform 321 , so that the rounded corners 311 are pressed against the top surface 212 of the adhesive film 21 .

Another way is to keep the adhesive film 21 in a fixed state, first drive the pressing members 31 to move downward along the longitudinal direction Z through the moving platform 321, so that the rounded corners 311 are pressed tightly on the adhesive film The top surface 212 of the sheet 21 then drives the carrier 41 to move upward along the longitudinal direction Z through the moving platform 421 , so that the workpieces 1 are respectively accommodated in the grooves 411 .

Referring to FIGS. 4 , 7 and 8 , in the peeling step S4 , for example, the moving platform 421 drives the carrier 41 to move a short distance along the first lateral direction X, so that one of the first side surfaces 413 is applied The lateral thrust is on the corresponding side of the workpiece 1 accommodated in the corresponding groove 411 . Then, through the moving platform 421, the carrier 41 is driven to move a short distance along the second lateral direction Y, so that one of the second side surfaces 414 exerts a lateral thrust on the corresponding groove 411 accommodated in the corresponding groove 411. The other side of workpiece 1.

The lateral thrust exerted by the first side 413 on the corresponding side of the workpiece 1 and the lateral thrust exerted by the second side 414 on the other side of the workpiece 1 are equivalent to shear forces parallel to the adhesive surface 211 . By continuously applying lateral thrust on the workpiece 1, the adhesive force between the top surface of the workpiece 1 and the adhesive surface 211 can be gradually reduced, so that the carrier 41 can easily and quickly peel off the adhesive force from the workpieces 1 face 211.

It should be noted that the peeling step S4 in the first embodiment can also be implemented in the following manner:

Drive the carrier 41 to move along the first lateral direction X through the moving platform 421, and apply lateral thrust to the workpiece 1 only through one of the first side surfaces 413;

Drive the carrier 41 to move along the second lateral direction Y through the moving platform 421, and apply lateral thrust to the workpiece 1 only through one of the second side surfaces 414;

The moving platform 421 first drives the carrier 41 to move back and forth along the first lateral direction X, and then moves back and forth along the second lateral direction Y, so that both the first side surfaces 413 and the second side surfaces 414 can face each other. The corresponding workpiece 1 applies lateral thrust;

The moving platform 421 only drives the carrier 41 to reciprocate along the first lateral direction X, so that the first side surfaces 413 can apply lateral thrust to the corresponding workpiece 1;

The moving platform 421 only drives the carrier 41 to reciprocate along the second lateral direction Y, so that the second side surfaces 414 can apply lateral thrust to the corresponding workpiece 1 .

Referring to FIG. 9 , when the workpieces 1 are separated from the adhesive surface 211 without being adhered thereto, the moving platform 421 can drive the carrier 41 to move downward along the longitudinal direction Z. As shown in FIG. After that, the carrier 41 is detached from the moving platform 421 , and the carrier 41 can drive the workpieces 1 carried by the carrier 41 to carry out subsequent packaging processes.

Referring to FIG. 10 , it is a second embodiment of the transfer apparatus 200 of the present invention. The overall structure and the method for transferring workpieces are substantially the same as those of the first embodiment, and the difference lies in the structure of the carrier 41 .

In the second embodiment, the carrier 41 is further formed with a plurality of adsorption holes 415 respectively communicating with the bottom ends of the grooves 411 , and each of the adsorption holes 415 is formed on the corresponding bearing surface 412 . Through the action of external force, negative pressure is generated in each of the adsorption holes 415 , so that each of the adsorption holes 415 can adsorb the corresponding bottom surface of the workpiece 1 in a vacuum adsorption manner.

In the relative movement step S3, after each of the workpieces 1 is accommodated in the corresponding groove 411, each of the suction holes 415 suctions the bottom surface of the corresponding workpiece 1 in a vacuum suction manner, thereby making each of the workpieces 1 It can be stably positioned in the corresponding groove 411 . In the peeling step S4 , each of the suction holes 415 maintains the state of vacuum suction of the corresponding workpiece 1 . When the moving platform 421 drives the carrier 41 to move along the first lateral direction X or the second lateral direction Y, the suction force generated by the carrier 41 through the suction holes 415 drives the workpieces 1 to move laterally, respectively , whereby the adhesive force between the top surface of the workpiece 1 and the adhesive surface 211 can be gradually reduced, so that the carrier 41 can easily and quickly peel off the adhesive surface 211 from the workpieces 1 .

Referring to FIG. 11 , it is a third embodiment of the transfer apparatus 200 of the present invention. The overall structure and the method for transferring workpieces are substantially the same as those of the second embodiment, and the difference lies in the structure of the carrier 41 .

In the third embodiment, for example, the first side surface 413 ′ of one side of each of the grooves 411 is a guide slope connected to the bearing surface 412 obliquely, and the guide slope is used for the corresponding workpiece 1 contact, and the guide slope allows the corresponding workpiece 1 to slide thereon.

In the relative movement step S3, if the moving platform 421 drives the carrier 41 to move upward along the longitudinal direction Z slightly offset along the first lateral direction X, so that the first side surface of each groove 411 is slightly offset. When 413' is in contact with the bottom end of the corresponding workpiece 1, the lateral component force applied by the first side surface 413' to the corresponding workpiece 1 will cause it to move along the first lateral direction X, and at the same time, the workpiece 1 will move along the The first side surface 413 ′ slides downward, so that the workpiece 1 can be guided by the first side surface 413 ′ to be in contact with the bearing surface 412 . Thereby, it can be ensured that each workpiece 1 can surely penetrate into the corresponding groove 411 and contact the corresponding bearing surface 412 under the condition that the carrier 41 has a positional deviation in the first lateral direction X.

It should be noted that, in the third embodiment, the guiding inclined surface can also be designed in the following different ways: for example, the second side surface 414 on one side of each of the grooves 411 is a guiding inclined surface; The first sides 413 on both sides of the groove 411 are guide slopes; or the second sides 414 on the other sides of each groove 411 are guide slopes; or the two sides of each groove 411 Both the first side surface 413 and the second side surfaces 414 on the other two sides are guiding inclined surfaces.

Referring to FIG. 12, it is the fourth embodiment of the transfer apparatus 200 of the present invention, the overall structure and the method of transferring workpieces are basically the same as those of the first embodiment, the difference lies in the workpieces 1, the grooves 411 and the pressing The arrangement of the pieces 31 is different.

In the fourth embodiment, the grooves 411 are arranged differently from the workpieces 1 , and the second distance P2 is different from the first distance P1 . Specifically, the second pitch P2 is larger than the first pitch P1, for example, the second pitch P2 is an integer N times the first pitch P1, and the value of the integer N is, for example, 2. Of course, the value of the integer N may be a positive integer of 2 or more. The arrangement of the pressing members 31 and the workpieces 1 is different, but is the same as the arrangement of the grooves 411 , and the size of the third distance P3 is the same as the second distance P2 .

In the aligning step S2, firstly, the adhesive film 21 is driven to move to a position below the pressing members 31 through the transfer fixtures 222, and the carrier 41 is driven to move to the position below the pressure-applying members 31 through the moving platform 421 Adhesive film 21 and the position below the workpieces 1 . Then, the image sensor 52 cooperates with the image recognition module to determine whether the grooves 411 and the rounded corners 311 are aligned with the selected workpieces 1 . Thereby, each of the grooves 411 can be selectively aligned with the corresponding position of the workpiece 1 , and the rounded corners 311 of each of the pressing members 31 can be selectively aligned with the corresponding position of the workpiece 1 . The other parts of the workpieces 1 are not aligned with the grooves 411 and the pressing members 31 .

Referring to FIG. 13, in the relative movement step S3, firstly, the adhesive film 21 is driven to move upward along the longitudinal direction Z through the transfer fixtures 222, and at the same time, the carrier 41 is driven along the longitudinal direction through the moving platform 421 Z moves up. When the transfer fixtures 222 stop at the position shown in FIG. 13 , the two opposite ends of the adhesive film 21 are slightly warped and deformed upward, and each of the rounded corners 311 is pressed down on the top surface 212 tightly and is aligned with the selected The corresponding position of the workpiece 1 is aligned. When the carrier 41 is stopped and positioned at the bearing position shown in FIG. 13 , each of the grooves 411 is for accommodating the corresponding workpiece 1 . Wherein, the other parts of the workpieces 1 that are not aligned with the grooves 411 will be supported by the top surface 410 of the carrier 41 , so that the other parts of the workpieces 1 will move the adhesive film 21 to the top. The top brace makes it deformed.

Referring to FIG. 14 , in the peeling step S4 , the carrier 41 continuously exerts a lateral thrust on the workpieces 1 , so that the carrier 41 can easily and quickly remove the workpieces accommodated in the grooves 411 . The adhesive surface 211 is peeled off correspondingly to the workpiece 1 . After peeling off a part of the workpieces 1 on the adhesive film 21 , and repeating the above steps to peel off another part of the workpieces 1 , all the workpieces 1 on the adhesive film 21 can be peeled off.

Referring to FIG. 15 , it is a fifth embodiment of the transfer apparatus 200 of the present invention. The overall structure and the method for transferring workpieces are substantially the same as those of the first and second embodiments, except for the number of the pressing members 31 .

In the fifth embodiment, the number of the pressing member 31 is one. The carrier 41 forms the adsorption holes 415 as in the second embodiment. In the alignment step S2, firstly, the adhesive film 21 is driven to move to a position below the pressing member 31 through the transfer fixtures 222, and the carrier 41 is driven to move to the position located in the adhesive film through the moving platform 421 The position below the diaphragm 21 and the workpieces 1 . Then, through the cooperation of the image sensor 52 (as shown in FIG. 5 ) and the image recognition module, it is judged whether the alignment of the carrier 41 and the adhesive film 21 is completed, and the position of the pressing member 31 is judged. Whether the rounded corner 311 is aligned with the position of one of the grooves 411 and one of the workpieces 1 . Specifically, the rounded corner 311 of the pressing member 31 is aligned with the workpiece 1 that is closest to the side of one of the workpieces 1 arranged along the first lateral direction X.

Referring to FIGS. 16 and 17 , in the relative movement step S3 , first, the adhesive film 21 is driven to move upward along the longitudinal direction Z through the transfer fixtures 222 , and at the same time, the carrier 41 is driven to move along the longitudinal direction Z through the moving platform 421 . The longitudinal direction Z moves upwards. When the transfer fixtures 222 stop at the positions shown in FIG. 16 , the rounded corners 311 of the pressing member 31 are pressed down on the top surface 212 and aligned with the corresponding position of the workpiece 1 . When the carrier 41 is stopped and positioned at the bearing position shown in FIG. 16 , the workpieces 1 are respectively accommodated in the grooves 411 .

Subsequently, the moving platform 321 of the moving mechanism 32 drives the pressing member 31 to move along the first lateral direction X on the top surface 212 of the adhesive film 21 . The rounded corners 311 sequentially apply pressure on the workpieces 1 through the adhesive film 21, so as to break the air tightness between the adhesive surface 211 and the top surfaces of the workpieces 1 in sequence, so as to reduce the adhesion between the adhesive surface 211 and the workpieces 1. At the same time, the adhesion between the top surfaces of the workpieces 1 can also sequentially squeeze the workpieces 1 into the grooves 411 respectively. During the aforementioned movement of the pressing member 31 , when the pressing member 31 is at a position where the corresponding workpiece 1 is squeezed into the corresponding groove 411 , the corresponding suction hole 415 generates suction to attract the corresponding The workpiece 1, thereby, can ensure that when the pressing member 31 moves away from the aforementioned position, the aforementioned corresponding workpiece 1 can be adsorbed and still located in the corresponding groove 411 . When the pressing member 31 moves to align with the other workpiece 1 of the workpieces 1 that is closest to the side, the moving platform 321 stops driving the pressing member 31 to move.

Referring to FIG. 18 , in the peeling step S4 , the carrier 41 continuously exerts a lateral thrust on the workpiece 1 , so that the carrier 41 can easily and quickly remove the pair of objects accommodated in the grooves 411 . The adhesive surface 211 should be peeled off from the workpiece 1 . The above-mentioned relative movement step S3 and the peeling step S4 are repeated until the workpieces 1 to be transferred are all transferred to the carrier 41 .

Referring to FIG. 19 , it is the sixth embodiment of the transfer apparatus 200 of the present invention. The overall structure and the method of transferring the workpiece are basically the same as those of the fifth embodiment, and the difference lies in the structure of the pressing member 31 .

In the sixth embodiment, the pressing member 31 is a rotating member rotatably pivoted to a rotating shaft 322 , and the pressing member 31 can be defined around the rotating shaft 322 and perpendicular to the first lateral direction X The axis A rotates. The moving platform 321 is connected to one end of the rotating shaft 322 . Specifically, the pressing member 31 is an example of a gear having a plurality of gear teeth 312 for pressing the top surface 212 of the adhesive film 21 .

19 and FIG. 20, in the relative movement step S3, the moving platform 321 of the moving mechanism 32 drives the pressing member 31 along the first lateral direction X on the top of the adhesive film 21 through the rotating shaft 322 At the same time, the pressing member 31 is driven on the top surface 212 to rotate along a rotation direction R around the axis A through the rotating shaft 322, so that the pressing member 31 can press the adhesive on the adhesive through the gear teeth 312. The top surface 212 of the diaphragm 21 . During the moving and rotating process of the pressing member 31, the adhesive film 21 is pressed through the gear teeth 312 and the pressure is transmitted to the workpieces 1 in sequence, so that the adhesive surface 211 and the Equal air tightness between the top surfaces of the workpieces 1 to reduce the adhesive force between the adhesive surface 211 and the top surfaces of the workpieces 1, and at the same time, the workpieces 1 can be sequentially squeezed into the recesses. in the groove 411. During the aforementioned movement of the pressing member 31 , when the pressing member 31 is at a position where the corresponding workpiece 1 is squeezed into the corresponding groove 411 , the corresponding suction hole 415 generates suction to attract the corresponding The workpiece 1, thereby, can ensure that when the pressing member 31 moves away from the aforementioned position, the aforementioned corresponding workpiece 1 can be adsorbed and still located in the corresponding groove 411 . When the pressing member 31 moves to align with the other workpiece 1 of the workpieces 1 that is closest to the side, the moving platform 321 stops driving the pressing member 31 to move.

Referring to FIG. 21 , in the peeling step S4 , the carrier 41 continuously exerts a lateral thrust on the workpiece 1 , so that the carrier 41 can easily and quickly remove the pair of objects accommodated in the grooves 411 . The adhesive surface 211 should be peeled off from the workpiece 1 .

Referring to FIGS. 22 and 23 , it is a seventh embodiment of the transfer apparatus 200 of the present invention. The overall structure and the method of transferring workpieces are substantially the same as those of the fourth embodiment, except that the workpieces 1 are arranged on the adhesive film 21 , and the grooves 411 are arranged in different areas on the carrier 41 .

The workpieces 1 are divided into at least two different adhesive areas A1 and A2 arranged on the adhesive film 21, wherein the adhesive area A1 is adjacent to the periphery of the adhesive film 21, and the adhesive area A2 is adjacent to the adhesive film 21. Adhere the center of the diaphragm 21. The value of the first distance P1 in the adhesion area A1 is different from the value of the first distance P1' in the adhesion area A2, and the value of the first distance P1' is smaller than the value of the first distance P1 as an example.

The grooves 411 are divided into at least two different layout areas L1 and L2 disposed on the carrier 41 , wherein the layout area L1 is adjacent to the periphery of the carrier 41 , and the layout area L2 is adjacent to the carrier 41 . With 41 centers. The value of the second distance P2 in the layout area L1 is different from the value of the second distance P2' in the layout area L2, and the value of the second distance P2' is smaller than the value of the second distance P2 as an example. The second pitch P2 in the arrangement area L1 is an integer N times the first pitch P1 in the corresponding adhesive area A1, and the second pitch P2' in the arrangement area L2 is the corresponding adhesive area A2 Integer N times of the first pitch P1' within. Thereby, the adhesive film 21 and the carrier 41 can respectively have different values of the first pitch P1, P1' and the second pitch P2, P2' according to the region.

By designing the layout of the pressing members 31 (as shown in FIG. 12 ) to be the same as the layout of the grooves 411 shown in FIG. 23 , the process can be performed as disclosed in the fourth embodiment. Wait for the transfer of workpiece 1. After the overall transfer is completed, the carrier 41 will cooperate with the subsequent process to perform the related post-process.

To sum up, the method for transferring workpieces 1 using the transfer apparatus 200 of each embodiment can quickly transfer a plurality of workpieces 1 into the grooves 411 of the carrier 41 at a time by only performing a few steps. , thereby reducing the transfer man-hours and greatly improving the transfer efficiency. In addition, since the carrier 41 is a target carrier for carrying the workpieces 1 to drive the workpieces 1 to carry out subsequent processes, the workpieces 1 are simultaneously completed when the carrier 41 peels off the workpieces 1 from the adhesive film 21 . 1 unloading action. In this way, after the carrier 41 is detached from the moving platform 421, the carrier 41 can drive the workpieces 1 to carry out the subsequent process, which can greatly shorten the time required for transferring the workpieces 1 to the subsequent process. The purpose of the present invention can be achieved.

However, the above are only examples of the present invention, and should not limit the scope of the present invention. Any simple equivalent changes and modifications made according to the scope of the application for patent of the present invention and the content of the patent specification are still within the scope of the present invention. within the scope of the invention patent.

1: Workpiece 200: Transfer equipment 2: carrying device 21: Adhesive film 211: Adhesive Noodles 212: top surface 22: Transfer mechanism 221: Pedestal 222: Transfer fixture 3: Pressure device 31: Pressure parts 311: rounded corners 312: Gear teeth 32: Movement mechanism 321: Motion Platform 322: Spindle 4: Stripping device 41: Vehicle 410: Top surface 411: Groove 412: Bearing surface 413: First side 413’: first side 414: Second side 415: adsorption hole 42: Moving Mechanisms 421: Mobile Platforms 5: Control device 51: Controller 52: Image sensor 53: Pressure sensor A: axis A1: Adhesion area A2: Adhesion area P1: first pitch P1': first pitch P2: Second pitch P2': second pitch P3: The third pitch L1: Layout area L2: Layout area S1: Provide steps S2: Alignment step S3: Relative movement step S4: Stripping step R: direction of rotation X: the first horizontal direction Y: the second horizontal direction Z: portrait

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: 1 is a partial cross-sectional schematic view of the first embodiment of the transfer apparatus of the present invention, illustrating the configuration relationship among a plurality of workpieces, a carrying device, a pressing device, and a peeling device; Fig. 2 is a partial cross-sectional schematic view of the first embodiment; 3 is a block diagram of the first embodiment; FIG. 4 is a one-step flow chart of the method for transferring workpieces by the first embodiment; Figure 5 is a partial cross-sectional schematic view of the first embodiment; 6 is a partial cross-sectional schematic view of the first embodiment, illustrating a carrier for accommodating the workpieces, and a plurality of pressing members pressing down on an adhesive film; 7 is a schematic partial cross-sectional view of the first embodiment, illustrating the movement of the carrier and applying lateral thrust to the workpieces; 8 is a schematic partial cross-sectional view of the first embodiment, illustrating the movement of the carrier and applying lateral thrust to the workpieces; 9 is a partial cross-sectional schematic view of the first embodiment, illustrating that the carrier drives the peeled workpieces to move down; Fig. 10 is a partial cross-sectional schematic view of the second embodiment of the transfer apparatus of the present invention; Fig. 11 is a partial cross-sectional schematic view of the third embodiment of the transfer apparatus of the present invention; Fig. 12 is a partial cross-sectional schematic view of the fourth embodiment of the transfer apparatus of the present invention; Figure 13 is a partial cross-sectional schematic view of the fourth embodiment; Figure 14 is a partial cross-sectional schematic view of the fourth embodiment; Fig. 15 is a partial cross-sectional schematic view of the fifth embodiment of the transfer apparatus of the present invention; Figure 16 is a partial cross-sectional schematic view of the fifth embodiment; Figure 17 is a partial cross-sectional schematic view of the fifth embodiment; Figure 18 is a partial cross-sectional schematic view of the fifth embodiment; Fig. 19 is a partial cross-sectional schematic view of the sixth embodiment of the transfer apparatus of the present invention; Figure 20 is a partial cross-sectional schematic view of the sixth embodiment; Figure 21 is a partial cross-sectional schematic view of the sixth embodiment; Figure 22 is a bottom view of the adhesive film of the seventh embodiment of the transfer apparatus of the present invention; and 23 is a top view of the carrier of the seventh embodiment.

1: Workpiece

200: Transfer equipment

2: carrying device

21: Adhesive film

211: Adhesive Noodles

212: top surface

22: Transfer mechanism

221: Pedestal

222: Transfer fixture

3: Pressure device

31: Pressure parts

311: rounded corners

32: Movement mechanism

321: Motion Platform

4: Stripping device

41: Vehicle

410: Top surface

411: Groove

412: Bearing surface

413: First side

42: Moving Mechanisms

421: Mobile Platforms

53: Pressure sensor

P1: first pitch

P2: Second pitch

P3: The third pitch

X: the first horizontal direction

Y: the second horizontal direction

Z: portrait

Claims (22)

A transfer device suitable for transferring a plurality of workpieces, the transfer device comprising: a carrier device, comprising an adhesive film, the adhesive film has an adhesive surface for adhering the workpieces, and a top surface opposite to the adhesive surface; A pressing device, located above the adhesive film, presses the top surface with the following; A peeling device includes a carrier located under the adhesive film, the carrier is formed with a plurality of grooves, each of the grooves is used for accommodating the corresponding workpieces aligned in position, and the pressing device is pressed down In a state in which the top surface and each of the grooves accommodate the corresponding workpiece, the carrier can move to apply force to the corresponding workpiece accommodated in the grooves and peel it off the adhesive surface; and A control device is used to control the relative position and displacement among the adhesive film, the carrier and the pressing device. The transfer device according to claim 1, wherein the peeling device further comprises a moving mechanism connected to the carrier, and the moving mechanism is used to drive the carrier to move at least along a first lateral direction. The transfer device according to claim 2, wherein the moving mechanism is further used to drive the carrier to move along a second lateral direction perpendicular to the first lateral direction. The transfer device according to claim 2 or 3, wherein the carrying device further comprises a transfer mechanism connected to the adhesive film, the transfer mechanism is used to drive the adhesive film to move up and down at least along a longitudinal direction, the moving The mechanism is also used to drive the carrier to move up and down along the longitudinal direction. The transfer device according to claim 1, wherein the pressing device comprises a plurality of pressing pieces corresponding to the positions of the workpieces, and each of the pressing pieces is aligned with the corresponding workpiece on the top surface with the following pressing force. part. The transfer equipment according to claim 1, wherein the workpieces are arranged at intervals along a lateral direction, the pressing device includes a pressing member for pressing the top surface below, and a movement mechanism connected to the pressing member , the motion mechanism is used to drive the pressing member to move on the top surface at least along the transverse direction to press the workpieces in sequence and squeeze the workpieces into the grooves. The transfer device according to claim 6, wherein the pressing member is a rotating member that can rotate around an axis perpendicular to the lateral direction, and the motion mechanism is further used to drive the pressing member to move along the lateral direction while rotating around the axis on the top surface. The transfer device according to 6 or 7, wherein the carrier is further formed with a plurality of adsorption holes respectively communicating with the grooves, and each of the adsorption holes is used for adsorbing the corresponding workpiece. The transfer device according to claim 1, wherein the carrier has a plurality of guide slopes respectively located on one side of the grooves, each guide slope is used for contacting the corresponding workpiece, and each guide slope The corresponding workpiece is allowed to slide thereon. The transfer device according to claim 1, wherein a first distance is formed between two adjacent workpieces among the workpieces, the grooves are arranged in the same manner as the workpieces, and two of the grooves are arranged in the same manner as the workpieces. A second distance is formed between the adjacent grooves, the second distance is the same as the first distance, and the grooves are respectively aligned with the workpieces and are respectively accommodated by the workpieces. The transfer device according to claim 1, wherein a first distance is formed between two adjacent workpieces among the workpieces, the grooves are arranged differently from the workpieces, and two of the grooves are arranged in a different manner. A second spacing is formed between the adjacent grooves, the second spacing is different from the first spacing, and each of the grooves can be selectively aligned with the corresponding workpiece and accommodated therein. The transfer device of claim 11, wherein the second distance is greater than the first distance, and the second distance is an integer multiple of the first distance. The transfer device according to claim 11, wherein the workpieces are divided into at least two different adhesive areas arranged on the adhesive film, the first spacing values in the adhesive areas are different, and the grooves It is divided into at least two different layout areas arranged on the carrier, the value of the second spacing in the layout areas is different, and the second spacing in each layout area corresponds to the first spacing in the adhesive area. integer multiples of a spacing. A method for transferring workpieces, suitable for transferring a plurality of workpieces, the method comprising the steps of: providing a step of providing an adhesive film for adhering the workpieces with an adhesive surface at the bottom end; The alignment step is to perform alignment between the adhesive film, a carrier with a plurality of grooves, and a pressing device, so that each of the grooves is aligned with the corresponding position of the workpiece, and the pressing device corresponds to on a top surface of the adhesive film opposite to the adhesive surface; The relative movement step is to carry out the relative movement between the adhesive film, the carrier, and the pressing device, so that the corresponding workpieces of the grooves of the carrier are aligned with each other, and the lower part of the pressing device pressing the top surface; and In the peeling step, the carrier is moved to exert force on the corresponding workpieces accommodated in the grooves and peeled off the adhesive surface. The method for transferring workpieces as claimed in claim 14, wherein, in the peeling step, the carrier is driven to move along a first lateral direction by a moving mechanism. The method for transferring workpieces according to claim 15, wherein, in the peeling step, the moving mechanism is also used to drive the carrier to move along a second lateral direction perpendicular to the first lateral direction. The method for transferring workpieces as claimed in claim 14, wherein, in the relative movement step, the pressing device presses the top surface through a plurality of pressing members, and each of the pressing members presses down on the top surface Align with the part corresponding to the workpiece. The method for transferring workpieces as claimed in claim 14, wherein, in the relative movement step, the pressing device presses the top surface through a pressing member, and the pressing device also drives the pressing device through a motion mechanism The pressing piece moves on the top surface at least along a lateral direction to press the workpieces in sequence and squeeze the workpieces into the grooves. When the pressing piece is positioned to press the corresponding workpieces When entering the corresponding position in the groove, suction is generated through an adsorption hole communicated with the corresponding groove to attract the corresponding workpiece. The method for transferring workpieces as claimed in claim 18, wherein, in the relative movement step, the movement mechanism also drives the pressing member to move along the lateral direction while moving at the top around an axis perpendicular to the lateral direction. face turning. The method for transferring a workpiece according to claim 14, wherein, in the relative movement step, a suction force is generated to adsorb the corresponding workpiece through an adsorption hole communicating with the corresponding groove. The method for transferring workpieces as claimed in claim 14, wherein the grooves are arranged in the same manner as the workpieces, and the grooves are respectively aligned with the workpieces and are respectively accommodated by the workpieces. The method for transferring workpieces as claimed in claim 14, wherein the grooves and the workpieces are arranged in different ways, and each of the grooves can selectively align with and accommodate the corresponding workpiece.

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