TW202124148A - Laminating device and method for manufacturing laminated body capable of laminating sheet materials after warpages or deflections of the sheet materials are eliminated - Google Patents

Abstract

The present invention is capable of laminating sheet materials after warpages or deflections of the sheet materials are eliminated. A transporting and holding device 60 for lamination is used to hold, by vacuum suction, sheet materials L1- L5 on which a metal layer 104 is laminated on an insulating film 106, and transport them to a lamination platform 80. An electrical charge carrier 70 for a holder irradiates the sheet materials L1-L5 held on the transporting and holding device 60 for lamination with charged particles. The voltage of the charged particles irradiated by the electrical charge carrier 60 for a holder is higher when the insulating film 106 of the sheet materials L1-L5 being transported is thinner.

Description

Laminated device and manufacturing method of laminated body

The present invention relates to a laminated device and a method of manufacturing a laminated body.

As a circuit board mounted on a communication device etc., as disclosed in Patent Documents 1 and 2, for example, a laminate formed by laminating sheets in which a metal layer is formed on an insulating film is used.

In the manufacturing process of the laminate, the sheets are transported layer by layer by the holder to the laminate platform. For example, the position of the sheet is aligned before being transported to the holder, and the aligned sheet is stacked on the stacking platform. By performing position alignment, the position shift between layers can be suppressed. Furthermore, the layered body is heated and pressure-bonded by compressing it from the upper and lower ends to fix each layer. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] International Publication No. 2017/150678 [Patent Document 2] Japanese Patent Laid-Open No. 2018-170521

[The problem to be solved by the invention]

However, there are cases in which warpage or deflection occurs on the sheet based on the difference between the temperature-dependent expansion rate and the shrinkage rate of the insulating sheet and the metal layer. If a laminate with a sheet that produces warpage or deflection is crimped, the warpage and deflection of the sheet can be eliminated during the crimping process, but in the process of eliminating the warpage and deflection, there is a sheet The risk of position shift.

Therefore, the object of the present invention is to provide a layering device and a method of manufacturing a layered body capable of laminating the sheet after eliminating the warpage or deflection of the sheet. [Technical means to solve the problem]

The present invention relates to a laminate device in which a plurality of layers of a sheet material having a metal layer laminated on an insulating film are laminated. The stacking device includes a stacking platform, a transport holder, and a charger for the holder. Laminate sheets on a laminating platform. The transport holder holds the sheet by vacuum suction and transports it to the stacking platform. The charger for the holder irradiates charged particles to the sheet held by the transport holder. The holder charging device irradiates the charged particles whose voltage is higher as the insulating film of the sheet being conveyed is thinner.

According to the above-mentioned structure, by irradiating the sheet material being conveyed with charged particles, the sheet material is electrostatically attracted to the conveying holder, and the warpage and deflection are eliminated in the process. Here, the thinner the insulating film of the sheet, the lower the surface elastic modulus of the film, and the greater the amount of warpage and deflection caused by the difference in expansion rate and shrinkage rate with the metal layer. Therefore, in the present invention, the thinner the insulating film of the sheet being conveyed, the higher the voltage of the charged particles. In this way, by adjusting the voltage of the charged particles according to the thickness of the insulating film, the warpage and deflection of the sheet can be eliminated with higher accuracy.

In addition, in the above-mentioned configuration, a charger for a platform may be provided that irradiates charged particles on the exposed surface of the uppermost sheet among the plurality of sheets stacked on the stacking platform. In this case, the charger for the holder and the charger for the platform irradiate charged particles of equal voltage to each other.

According to the above configuration, the sheet material vacuum-adsorbed on the transport holder is irradiated with charged particles, and the exposed surface of the uppermost sheet of the plurality of layers of sheets laminated on the stacking platform is also irradiated with the charged particles. By making the voltages of the charged particles of the two equal, the electrostatic adsorption force of the sheet to be adsorbed to the transport holder is consistent with the electrostatic adsorption force of the sheet to be transported to the uppermost sheet on the stacking platform. Thereby, for example, it is possible to eliminate the warpage and deflection of the sheet under the maximum voltage within the range that does not hinder the separation of the sheet from the conveying holder by blowing the positive pressure air due to electrostatic adsorption.

In addition, the present invention relates to a layering device in which a plurality of layers of sheets in which metal layers are layered on an insulating film are layered. This layering device includes a layering platform, a transport holder, a charger for the holder, and a camera. Laminate sheets on a laminating platform. The transport holder holds the sheet by vacuum suction and transports it to the stacking platform. The charger for the holder irradiates charged particles to the sheet held by the transport holder. The camera photographs the surface shape of the sheet held by the transport holder. The charger for the holder irradiates the raised portion of the sheet separated from the holding surface of the conveying holder, which is specified based on the surface shape of the sheet captured by the camera, with a higher voltage than the close contact portion of the sheet closely attached to the holding surface Of charged particles.

According to the above-mentioned configuration, relatively high-voltage charged particles are irradiated to the raised portion of the sheet, and the electrostatic attraction force is relatively suppressed in the close contact portion around it. In this way, on the one hand, excessive electrostatic adsorption force on the sheet is avoided, and on the other hand, warpage and deflection can be eliminated.

Furthermore, in the above configuration, the charged particles irradiated to the raised portion of the sheet material are set such that the thinner the insulating film of the sheet material, the higher the voltage.

As described above, the thinner the insulating film, the greater the amount of warpage and deflection of the sheet. By setting that the thinner the insulating film, the higher the voltage of the charged particles, which can eliminate warpage and deflection with higher accuracy.

Furthermore, in the above-mentioned configuration, the charger for the holder defines the irradiation point of the charged particles on the exposed surface in an area smaller than the exposed surface of the sheet held by the transport holder. In this case, the charger for the holder is limited to irradiating charged particles when at least a part of the irradiation point overlaps with the raised portion of the sheet held by the transport holder.

According to the above configuration, the charged particles are irradiated only when at least a part of the irradiation spot overlaps the ridge portion, and the charged particles are not irradiated on the other sheet regions. Therefore, excessive electrostatic adsorption force on the sheet is avoided, and the sheet can be easily detached from the holder on the stacking platform.

Furthermore, in the above configuration, an alignment platform may be provided for placing the sheet held in front of the transport holder and aligning the placed sheet. In addition, a pressing member may be provided, and the pressing member is further placed on the sheet placed on the alignment platform to press the entire surface of the sheet. In this case, at least a part of the sheet placement area of the alignment platform is composed of a light-transmitting member. In addition, an alignment camera may be provided, and the alignment camera uses a light-transmitting member to photograph the sheet placed on the alignment platform. Aim the camera to shoot the sheet pressed against the alignment platform by the pressing member.

According to the above-mentioned structure, even if it is a sheet material which has a warpage or a flexure, the warpage or flexure can be eliminated by pressing the sheet material against the alignment platform by a pressing member. High-precision alignment can be performed by shooting the sheet at this time.

In addition, the present invention relates to a method for manufacturing a laminated body, which manufactures a laminated body composed of a sheet including a plurality of layers and a metal layer laminated on an insulating film. This manufacturing method includes a stacking step and a crimping step. In the layering step, the sheets are held in the transport holder by vacuum suction and transported to the layering platform, and the sheets are sequentially layered on the layering platform. In the crimping step, the laminated body of the sheets laminated on the lamination platform is crimped to fix each layer. In the layering step, the sheet material held in the conveying holder is irradiated with charged particles whose voltage is higher as the insulating film of the sheet material is thinner.

In addition, in the above-mentioned structure, in the lamination step, the exposed surface of the uppermost sheet of the sheets held in the conveying holder and the plurality of sheets laminated on the lamination platform may be irradiated to each other during the lamination step. Charged particles of equal voltage.

In addition, the present invention relates to a method for manufacturing a laminated body, which manufactures a laminated body composed of a sheet including a plurality of layers and a metal layer laminated on an insulating film. This manufacturing method includes a stacking step and a crimping step. In the layering step, the sheets are held in the transport holder by vacuum suction and transported to the layering platform, and the sheets are sequentially layered on the layering platform. In the crimping step, the laminated body of the sheets laminated on the lamination platform is crimped to fix each layer. In the layering step, the swelling part of the sheet separated from the holding surface of the transport holder, which is specified based on the surface shape of the sheet held on the transport holder, is applied to the close contact of the sheet that is closer to the holding surface than the holding surface. Part of the highly charged particles.

Furthermore, in the above configuration, the thinner the insulating film of the sheet, the higher the voltage of the charged particles irradiated to the raised portion of the sheet. [Effects of Invention]

According to the present invention, the lamination of the sheet can be performed after the warpage or deflection of the sheet is eliminated.

＜Laminated body＞ FIG. 1 illustrates a laminate 100B produced by the laminate apparatus of this embodiment. The laminated body 100B is the final laminated body formed by laminating the sheet L5 of the lowest layer to the sheet L1 of the uppermost layer. Furthermore, for convenience, the layered body 100A in the middle of the layering also includes a state where only the sheet L5 of the lowermost layer is placed on the layering platform 80 (refer to FIG. 4).

In addition, in the embodiment shown in FIGS. 1 to 21, the final laminate 100B is composed of a 5-layer laminate composed of sheets L1 to L5, but the laminate made by the laminate device of this embodiment is not Limited to this example. For example, the laminating device of this embodiment can laminate multiple sheets of sheets other than 5 layers, such as 12 layers or 20 layers.

The final laminate 100B may also be, for example, a circuit board mounted on a communication device. According to the example of FIG. 1, the final laminate 100B is formed by laminating a plurality of sheets L1 to L5. The sheets L1 to L5 are each composed of a plurality of sheets in which a metal layer 104 is laminated on an insulating film 106, for example. The insulating film 106 is made of, for example, a thermoplastic liquid crystal polymer. In addition, the metal layer 104 is made of copper, for example.

The lowermost sheet L5 and the uppermost sheet L1 are arranged in such a way that the metal layer 104 is exposed. For example, the sheet L5 of the lowermost layer is arranged in reverse with respect to the other sheets L1 to L4. The metal layer 104 of the uppermost sheet L1 and the lowermost sheet L5 may be, for example, a so-called solid film in which a metal film is formed on one surface of the insulating film 106.

The metal layer 104 of the uppermost sheet L1 and the lowermost sheet L5 abuts against the heated pressing surface of the crimping device 90 during the pressing process. The metal layer 104, which has a relatively higher melting point than the insulating film 106, is in contact with the heated pressing surface, thereby suppressing the melting of the contact surface of the final laminate 100B with the pressing surface.

In addition, the metal layer 104 of the sheets L2 to L4 as the intermediate layer is formed with a different wiring pattern for each sheet. In this regard, the sheets L2 to L4 are also referred to as patterned insulating films. In addition, the metal layers 104 of the sheets L2 to L4 are connected by through holes 102 penetrating through the thickness direction of the insulating film 106.

In addition, the insulating film 106 of the sheets L1 to L5 of each layer may be formed to have a thickness different from that of the sheets of other layers. For example, the closer to the upper layer of the laminate, the thicker the sheet. Alternatively, the closer to the upper layer of the laminate, the thinner the sheet.

In addition, as illustrated in the upper stage of FIGS. 2 and 3, the sheets L1 to L5 may warp or bend. For example, based on the difference between the expansion rate or contraction rate of the insulating film 106 and the metal layer 104, the sheets L1 to L5 warp or flex.

As shown in the lower part of Fig. 2 and Fig. 3, in the crimping process, the warpage or deflection can be eliminated, and as a result, the warped or deflection layer has a positional deviation from the lower layer. As described below, the laminating device of this embodiment has a structure capable of eliminating warpage or deflection of each sheet L1 to L5 before laminating.

In addition, in FIG. 1, as an example of the sheet, a so-called laminated sheet in which the metal layer 104 is formed on the insulating film 106 is shown, but the sheet laminated by the laminating apparatus of this embodiment is not limited to this form. For example, only one electrically insulating film such as an insulating film may be a sheet to be laminated. In addition, the sheet to be laminated may be a laminated sheet formed by bonding two electrically insulating films, or a laminated sheet having metal layers formed on both sides of one electrically insulating film. In addition, the sheet to be laminated may be a laminated sheet in which a metal layer is sandwiched by a set of electrically insulating sheets. Furthermore, the sheet to be laminated may also be a sheet with a PET film or an adhesive sheet attached to one or both sides.

＜Integral structure of laminated device＞ Fig. 4 and Fig. 5 illustrate the stacking apparatus 10 of this embodiment. Hereinafter, as the direction axis for explaining the layout of the layering device 10, etc., the X axis, the Y axis, and the Z axis are appropriately used. The X-axis is an axis along the moving direction of the transfer holder 60 for lamination. The Y axis is the axis orthogonal to the X axis on the horizontal plane. The Z axis is a vertical axis orthogonal to the X axis and the Y axis, and is the same as the stacking direction of the sheets L1 to L5.

In the description of the arrangement of the various mechanisms of the layering apparatus 10, the sheet storage 30L1 to 30L5 side becomes the upstream side, and the layering platform 80 side along the X axis becomes the downstream side.

The stacking apparatus 10 includes a controller 20, sheet storage warehouses 30L1 to 30L5, a storage transport holder 40, an alignment platform 50, a stacking transport holder 60, a stacking platform 80, and a crimper 90. Furthermore, as a mechanism for irradiating charged particles, the layered device 10 includes a charger 68 for a platform, a charger 70 for a holder, a static remover 72 for a platform, and a static remover 74 for a holder.

The sheet materials L1 to L5 are respectively stored in the sheet material storage warehouses 30L1 to 30L5. Furthermore, in FIG. 4, the sheets L1 to L5 are shown as so-called single-piece sheets, and the sheet storage warehouses 30L1 to 30L5 are shown as cassettes for storing the single-piece sheets, but this The layering apparatus 10 of the embodiment is not limited to this form. For example, it is also possible to form a sheet roll in which several sheets are continuously formed on the sheets L1 to L5, and provide a cutter for cutting the sheet roll. In this case, the sheet storage warehouses 30L1 to 30L5 are configured as roll holders that respectively hold the sheet rolls corresponding to the sheets L1 to L5.

The transport holder 40 for the storage is a transport device that reciprocates between the sheet storage 30L1-30L5 and the alignment platform 50. The transport holder 40 for storage is provided on the upstream side of the transport holder 60 for lamination, so it is also called a "front stage holder".

The sheet storages 30L1 to 30L5 are scattered in the X-axis direction and the Y-axis direction, so the storage transport holder 40 can move in the X-axis direction and the Y-axis direction. The transport holder 40 for storage is movable along the X-axis stage and Y-axis stage which are not shown in figure, for example.

As illustrated in FIG. 5, the transport holder 40 for storage is provided with an elevating mechanism 42. A suction plate 44 is provided at the lower end of the lifting mechanism 42. The elevating mechanism 42 moves the suction plate 44 in the Z-axis direction (vertical direction). The elevating mechanism 42 is configured to include, for example, a rack and pinion mechanism, a stepping motor, or a servo motor as a moving mechanism in the Z-axis direction.

The suction plate 44 has several air holes formed in a metal plate such as an aluminum plate, for example. The lower end of the air hole is exposed, and the upper end is connected to the air pipe 46. The air piping 46 is supplied with negative pressure (Vac) and positive pressure (Prs) air. When the sheets L1 to L5 are adsorbed, the air pipe 46 is evacuated. When the sheets L1 to L5 are detached, pressurized air is sent from the air pipe 46. A soft porous sheet can also be provided on the abutting surface of the adsorption plate 44 with the sheets L1 to L5.

As shown in FIG. 4, the alignment platform 50 performs position alignment of the sheets L1 to L5 conveyed from the conveyance holder 40 for storage. The alignment platform 50 includes a moving mechanism 52, a platform plate 53 as a mounting table, and an alignment camera 56.

The moving mechanism 52 enables the platform plate 53 to move along the X axis and the Y axis, and enables the platform plate 53 to rotate about the Z axis as a rotation axis. The platform board 53 includes a light-transmitting plate 54 as a light-transmitting member. The light-transmitting plate 54 is provided in at least a part of the sheet placement area where the sheets L1 to L5 are placed. For example, as illustrated in FIG. 4, at least parts of the platform plate 53 corresponding to the four corners of the sheets L1 to L5 are constituted by a light-transmitting plate 54. Alternatively, instead of the form illustrated in FIG. 4, a light-transmitting plate 54 may be provided on the platform plate 53 including the parts corresponding to the four corners of the sheets L1 to L5.

A plurality of cameras 56 are arranged under the platform board 53. For example, the alignment camera 56 is arranged at a position where the four corners of the sheets L1 to L5 can be photographed, or two corners on the diagonal line. The alignment camera 56 can photograph the sheets L1 to L5 placed on the platform plate 53 through the light-transmitting plate 54 (light-transmitting member). The alignment process of the placed sheets L1 to L5 will be described below.

As shown in FIG. 4, the lamination transport holder 60 holds the sheets L1 to L5 aligned by the alignment platform 50 by vacuum suction, and transports them to the lamination platform 80. For example, when the alignment platform 50 and the build-up platform 80 are arranged on the X-axis, the build-up transport holder 60 can move only along the X-axis.

As illustrated in FIG. 5, the transport holder for lamination 60 has a structure substantially the same as that of the transport holder 40 for storage. That is, the transport holder 60 for lamination includes an elevating mechanism 62, a suction plate 64 provided at the lower end of the elevating mechanism 62, and an air pipe 66 connected to the suction plate 64.

The lifting mechanism 62 moves the suction plate 64 in the Z-axis direction (vertical direction). The elevating mechanism 62 is configured to include, for example, a rack and pinion mechanism, and a stepping motor or a servo motor as a moving mechanism in the Z-axis direction.

The suction plate 64 has a plurality of air holes formed in a metal plate such as an aluminum plate, for example. The lower end of the air hole is exposed, and the upper end is connected to the air pipe 66. The air pipe 66 is supplied with negative pressure (Vac) and positive pressure (Prs) air. When the sheets L1 to L5 are adsorbed, air is fed from the air pipe 66. When the sheets L1 to L5 are detached, pressurized air is sent from the air pipe 66. A soft porous sheet can also be provided on the abutting surface of the adsorption plate 64 with the sheets L1 to L5.

As shown in FIG. 4, the sheets L1 to L5 are laminated on the laminated platform 80. On the placement surface of the laminated platform 80 forming the final laminated body 100B (refer to FIG. 1), suction holes (not shown) for holding the lowermost sheet L5 can be formed. As shown in FIG. 5, the suction hole is connected to an air pipe 82. By feeding negative pressure from the air pipe 82, the sheet L5 of the lowermost layer is held on the stacking platform 80. In addition, instead of vacuum suction, an adhesive sheet may be attached to the placement surface of the build-up platform 80.

As shown in FIG. 4, the laminating device 10 is provided with a transport holder 60 for laminating, the sheets L1 to L5 transported by the holder, and a belt for irradiating charged particles to the laminate 100A in the middle of the laminating of the laminating platform. Electrical appliances and in addition to electrical appliances.

Specifically, the layered device 10 includes a charger 68 for a platform, a charger 70 for a holder, a static remover 72 for a platform, and a static remover 74 for a holder. These chargers and eliminators are composed of ionizers, for example.

The charger 68 for the platform irradiates charged particles to the mounting surface of the laminated platform 80. Furthermore, as shown in FIG. 5, the stage charger 68 irradiates charged particles on the exposed surface of the uppermost sheet L3 among the plurality of sheets L3 to L5 stacked on the stacking platform 80. For example, the charger 68 for the platform can move relative to the build-up platform 80. Specifically, as shown in FIG. 4, the charger 68 for the stage is installed at the downstream end of the transfer holder for build-up 60 (a position biased against the build-up platform 80), and can be mounted on the X axis together with the transfer holder for build-up 60 move.

For example, the charger 68 for a platform is illustrated in FIG. 5 in a region smaller than the exposed surface of the uppermost sheet L3, and defines the irradiation point of the charged particles on the exposed surface. For example, as shown in FIG. 5, a region having a shorter length in the X-axis direction than the laminated platform 80 and the sheets L3 to L5 becomes the irradiation spot on the exposed surface of the uppermost sheet L3 of the platform charger 68. Furthermore, the length of the irradiation point in the Y-axis direction may be greater than the length of the layered platform 80 and the sheet materials L3 to L5 in the Y-axis direction. By the relative movement of the layered platform 80 and the platform charger 68 in the X-axis direction, the charged particles can be irradiated over the placement surface of the layered platform 80 and the entire upper surface of the layered body 100A in the middle of the layering.

The holder charger 70 and the holder static remover 74 can move relative to the stacking transport holder 60 in the X-axis direction, that is, in the moving direction of the stacking transport holder 60. For example, the holder charger 70 and the holder static remover 74 are arranged so as to be provided between the alignment platform 50 and the build-up platform 80, and the transfer holder 60 for the build-up can pass therethrough.

For example, the holder charging device 70 and the holder removing device 74 irradiate the charged particles upward (the Z-axis positive direction). As described above, the transport holder 60 for lamination vacuum sucks the sheets L1 to L5 to the lower end thereof. Therefore, if the charged particles are irradiated when the carrier holder 60 for stacking is moved on the charger 70 for holder and the static remover 74 for holder, the charged particles enter the exposed surfaces of the conveyed sheets L1 to L5.

The holder charging device 70 and the holder removing device 74 define the irradiation point of the charged particles on the exposed surface in an area smaller than the exposed surface of the sheets L1 to L5 held in the laminated transport holder 60. For example, a region having a shorter length in the X-axis direction compared to the sheets L1 to L5 becomes the irradiation spot on the exposed surfaces of the sheets L1 to L5 of the holder charging device 70 and the holder removing device 74. Furthermore, the length of the irradiation spot in the Y-axis direction may be longer than the length of the sheets L1 to L5 in the Y-axis direction. By relatively moving in the X-axis direction of the carrier holder 60 for the lamination, the charger 70 for the holder, and the eliminator 74 for the holder, it is possible to cover the entire exposed surface of the sheets L1 to L5 that are conveyed to the carrier holder 60 for the lamination. The surface is irradiated with charged particles.

The neutralizer 72 for the platform may be fixed to the build-up platform 80, for example. For example, the static remover 72 for the platform can irradiate the charged particles over the entire surface of the placement surface of the laminated platform 80. That is, the platform-use static remover 72 is set so that the irradiation spot of the charged particles on the laminated platform 80 becomes wider compared with the platform-use charger 68, the holder-use charger 70, and the holder-use static remover 74.

The distance between the charger 68 for the platform, the charger 70 for the holder, the static remover 72 for the platform, and the static remover 74 for the holder, and the sheets L1 to L5, which are the objects to be irradiated by the charged particles, may be 10 mm or more and 120 mm or less. Furthermore, the separation distance can also be maintained at 50 mm. Regarding this point, a Z lifting mechanism for adjusting the position of the Z-axis direction may be provided in the platform charger 68, the holder charger 70, the platform static remover 72, and the holder static remover 74.

In addition, the charger 68 for the platform, the charger 70 for the holder, the static remover 72 for the platform, and the static remover 74 for the holder can all be irradiated with voltages in the range of -50 kV＜V＜-5 kV, 5kv＜V＜50 kV Charged particles of value V.

For example, as described below, the charger 70 for a holder irradiates charged particles in order to eliminate warpage and deflection of the sheets L1 to L5 that are transported to the transport holder 60 for lamination. Here, by irradiating charged particles with a voltage value of less than -5 kV or a voltage value of more than 5 kV, the warpage and deflection of the sheets L1 to L5 can be eliminated well. In addition, by setting the voltage value to a voltage value higher than -50 kV or a voltage value less than 50 kV, it is possible to suppress damage such as insulation breakdown of the sheets L1 to L5.

The controller 20 illustrated in FIG. 6 controls each device of the layering apparatus 10. The controller 20 is constituted by, for example, a computer. That is, the controller 20 includes an input/output controller 21, a CPU 22, a ROM 23, a RAM 24, and a hard disk drive (HDD) 25, and these are connected to the internal bus 28. Furthermore, the controller 20 includes an input unit 26 such as a mouse or a keyboard, and a display unit 27 such as a display, and these are connected to the internal bus 28.

In the memory portion of the controller 20, that is, the ROM 23, a program for executing the voltage setting process illustrated in FIG. 8 and the build-up process illustrated in FIGS. 9 to 18 is stored. Moreover, the program is of course provided by communication means, and can also be stored in a computer-readable recording medium such as CD-ROM or USB memory for execution.

The program stored in the ROM 23 or provided by the communication means or recording medium is executed by the CPU 22 of the computer constituting the controller 20. By executing the program, the controller 20 is provided with functional blocks as shown in FIG. 7.

That is, the controller 20 includes a storage transport holder control unit 110, an alignment platform control unit 112, a stacking transport holder control unit 114, a sheet information storage unit 116, a charger control unit 118, and a static eliminator control unit 120 , And the crimper control unit 122.

As illustrated in FIG. 7, the storage transport holder control unit 110 controls the operation of the storage transport holder 40. For example, the storage transport holder control unit 110 sets the movement destination of the storage transport holder 40 for which the sheet is not held from the sheet storages 30L1 to 30L5 illustrated in FIG. 4.

For example, the transport holder control unit 110 for storage includes a sheet counter 111. In the sheet counter 111, the order of designating the sheet storage warehouses 30L1 to 30L5 as the movement destination of the transport holder 40 for the storage warehouse is memorized.

For example, the storage transport holder control unit 110 specifies the storage transport holders in the order of sheet storage 30L5, sheet storage 30L4, sheet storage 30L3, sheet storage 30L2, and sheet storage 30L1. The mobile destination of 40. After designating the sheet storage 30L1, the storage transport holder control unit 110 restores the movement destination of the storage transport holder 40 to the sheet storage 30L5.

In addition, for example, in the sheet counter 111, as an initial setting, the sheet storage 30L5 is set as the movement destination of the first storage transport holder 40 when the stacking apparatus 10 is activated. Alternatively, the machine manager or the like may set the movement destination of the storage transport holder 40 when the stacking apparatus 10 is activated to any of the sheet storages 30L1 to 30L5.

In addition, the storage transport holder control unit 110 sets the transport destination of the storage transport holder 40 holding the sheets L1 to L5 from the sheet storages 30L1 to 30L5 as the alignment platform 50.

In addition, the storage transport holder control unit 110 controls the descending and ascending operations of the suction plate 44. For example, when the storage transport holder 40 reaches the sheet storages 30L1 to 30L5 designated as the movement destination, the storage transport holder control unit 110 lowers the suction plate 44 of the storage transport holder 40. For example, the storage transport holder 40 drives the elevating mechanism 42 to lower the suction plate 44 until it abuts on the uppermost sheet L1 to L5 of the sheet storage 30L1 to 30L5. In addition, when the suction plate 44 suctions the sheets L1 to L5, the storage transport holder control unit 110 drives the elevating mechanism 42 to raise the suction plate 44.

In addition, when the storage transport holder 40 reaches the platform plate 53 of the alignment platform 50 designated as the transport destination of the sheets L1 to L5, the storage transport holder control unit 110 drives the elevating mechanism 42 to make The suction plate 44 descends until it abuts on the platform plate 53. In addition, when the sheets L1 to L5 are separated from the suction plate 44, the storage transport holder control unit 110 drives the elevating mechanism 42 to raise the suction plate 44.

Regarding the adsorption and detachment of the aforementioned sheets L1 to L5, the storage transport holder control unit 110 controls the internal pressure of the air pipe 46 illustrated in FIG. 5. For example, when the sheets L1 to L5 are sucked from the sheet storages 30L1 to 30L5 to the storage transport holder 40, the storage transport holder control unit 110 causes the air pipe 46 to be in a negative pressure state. For example, the transport holder control unit 110 for storage outputs an opening command to a valve (not shown) provided in a branch pipe branched from the air pipe 46 and connected to a negative pressure source (not shown).

In addition, when the transport holder 40 for the storage transfers the sheets L1 to L5 that are being transported to the platform plate 53 of the alignment platform 50, the transport holder control unit 110 for the storage pair is installed in the air piping 46 branching and The valve of the branch piping connected to the negative pressure source outputs a closing command. After that, the storage transport holder control unit 110 outputs an opening command to a valve (not shown) provided in a branch pipe branched from the air pipe 46 and connected to a positive pressure source (not shown).

As shown in FIGS. 5 and 7, the alignment platform control unit 112 generates a drive command to the moving mechanism 52 based on the image of the sheet placed on the platform plate 53 obtained by the self-aligning camera 56. The alignment platform control unit 112, for example, compares the captured image of the alignment camera 56 with the reference image stored in advance, and obtains the target position, angle, and angle offset of the sheet material from the reference image. Furthermore, the alignment platform control unit 112 outputs to the moving mechanism 52 a drive command for eliminating the obtained offset.

The stacking transport holder control unit 114 controls the operation of the stacking transport holder 60. For example, the transfer holder for build-up control unit 114 reciprocates the transfer holder for build-up 60 between the alignment platform 50 and the build-up platform 80.

In addition, the stacking carrier holder control unit 114 controls the descending and ascending operations of the suction plate 64. For example, when the lamination carrier 60 reaches the platform plate 53 of the alignment platform 50 designated as the movement destination illustrated in FIG. 5, the lamination carrier controller 114 lowers the suction plate 64. For example, the stacking transport holder control unit 114 drives the elevating mechanism 62 to lower the suction plate 64 until it abuts on the platform plate 53. In addition, when the suction plate 64 suctions the sheets L1 to L5, the lamination transport holder control unit 114 drives the elevating mechanism 62 to raise the suction plate 64.

In addition, when the lamination transport holder 60 reaches the lamination platform 80 designated as the transport destination of the sheets L1 to L5, the lamination transport holder control unit 114 lowers the suction plate 64 of the lamination transport holder 60. For example, the stacking transport holder control unit 114 drives the elevating mechanism 62 to lower the suction plate 64 until it abuts the stacking platform 80. In addition, when the sheets L1 to L5 are separated from the suction plate 64, the lamination transport holder control unit 114 drives the elevating mechanism 62 to raise the suction plate 64.

Regarding the adsorption and detachment of the above-mentioned sheets L1 to L5, the lamination transport holder control unit 114 controls the internal pressure of the air pipe 66 illustrated in FIG. 5. For example, when the lamination transport holder 60 sucks the sheets L1 to L5 from the platform plate 53, the lamination transport holder control unit 114 is provided on a branch that is branched from the air pipe 66 and connected to a negative pressure source (not shown) The piping valve (not shown) outputs an open command.

In addition, when the transport holder 60 for laminating transfers the sheets L1 to L5 that are being transported to the laminating platform 80, the transport holder controller 114 for laminating is branched from the air pipe 66 and connected to a negative pressure source (not shown) The connected branch piping outputs a closing command to the valve. After that, the lamination carrier holder control unit 114 outputs an opening command to a valve (not shown) provided on a branch pipe branched from the air pipe 66 and connected to a positive pressure source (not shown).

The charger control unit 118 performs irradiation control of the charged particles of the charger 68 for the platform and the charger 70 for the holder. Irradiation control includes the control of the time of irradiation and the voltage control of the charged particles. As described below, the voltage control is executed together with the voltage control of the eliminator control unit 120.

As shown in FIG. 7, the self-stacking transport holder control unit 114 transmits the coordinate information of the laminating transport holder 60 to the charger control unit 118. Based on the coordinate information, the charger control unit 118 sets the irradiation time point of the charged particles of the charger 68 for the platform and the charger 70 for the holder. Furthermore, the charger control unit 118 may also control the charger 68 for the platform and the charger 70 for the holder in the following way, that is, confirm the actual position of the transport holder 60 for the lamination taken by a camera not shown in the figure, and use it for the lamination. When the transport holder 60 reaches a predetermined position, the charged particles are irradiated.

The static eliminator control unit 120 performs irradiation control of the charged particles of the static eliminator 72 for the platform and the static eliminator 74 for the holder. Irradiation control includes the control of the time of irradiation and the voltage control of the charged particles.

As shown in FIG. 7, the self-stacking transport holder control unit 114 transmits the coordinate information of the laminating transport holder 60 to the static eliminator control unit 120. Based on the coordinate information, the static eliminator control unit 120 sets the irradiation time point of the charged particles of the static eliminator 72 for the platform and the static eliminator 74 for the holder. Furthermore, the static remover control unit 120 may also control the static remover 74 for the holder by confirming the actual position of the stacking transport holder 60 photographed by a camera not shown in the figure, and reaching the specified position at the stacking transport holder 60 Irradiate charged particles at the point in time.

＜Voltage setting procedure＞ In FIG. 8, the voltage setting flow of the charger control unit 118 and the neutralizer control unit 120 for each of the platform charger 68, the holder charger 70, the platform static remover 72, and the holder static remover 74 is exemplified.

For example, the voltage setting process in FIG. 8 is executed for each batch of sheets L1 to L5 stored in the sheet storage warehouses 30L1 to 30L5. The so-called batch refers to, for example, the unit of the sheet roll before the sheet material L1~L5 is cut into a single sheet. In short, it means that the thickness of the insulating film 106 of each sheet material L1~L5 can be regarded as a fixed unit .

For example, when the first sheets L1 to L5 of a new batch are laminated, the voltage setting process of FIG. 8 is executed. After the second sheet, the voltages V0 to V4 set for each sheet L1 to L5 are stored in the charger control section 118 and the static eliminator control section 120. Furthermore, the voltages V0 to V4 are set based on the sheets L1 to L5 sent from the sheet counter 111 to be transported to the stacking transport holder 60.

As shown in Figs. 7 and 8, the charger control unit 118 specifies the sheet to be transported to the transport holder 60 for the lamination, in other words, specifies the sheet of the laminate 100A to be laminated in the middle of the lamination (acquisition sheet Material number) (S10).

The charger control unit 118 refers to the photo material information storage unit 116 to obtain sheet thickness information of the conveyed target sheet (S12). Then, the charger control unit 118 obtains the voltage value V0 based on the sheet thickness information (S14). The voltage value V0 refers to the voltage value required to eliminate the warpage or deflection of the sheets L1 to L5 in the laminated transport holder 60, and is determined by, for example, prior experiments or simulations.

Here, qualitatively, the voltage value is set according to the thickness of the insulating film 106 of the sheets L1 to L5. More specifically, the thinner the insulating film 106 is, the higher the voltage is set. Here, the so-called high voltage includes a positive high voltage and a negative high voltage. In short, it refers to a voltage with a higher absolute value of the voltage value.

The thinner the insulating film 106, the lower the surface elastic modulus (in other words, the degree of tightness) of the insulating film 106, and the greater the amount of warpage and deflection caused by the difference in expansion and contraction from the metal layer 104 . Therefore, in the voltage setting process of the present embodiment, the thinner the insulating film 106 of the sheets L1 to L5 being conveyed, the higher the voltage of the charged particles to be irradiated is set.

Furthermore, the charger control unit 118 sets the voltage value V1 of the charged particles irradiated by the holder charger 70 to the voltage value V0 (S16). Furthermore, the static eliminator control unit 120 sets the voltage value V3 of the charged particles irradiated by the holder static eliminator 74 to a voltage value whose absolute value is equal to V0 (=V1) and opposite in polarity (S18). Furthermore, even if the charged voltage V0 and the neutralization voltage V3 are set to the same polarity, the neutralization effect can be obtained by polarization, so instead of V3=-V0, V3=V0 may be set. Moreover, it is not limited to making the absolute value of the electrification voltage and the neutralization voltage equal, and the neutralization voltage can be appropriately set according to the neutralization device and the neutralization method.

In addition, the charger control unit 118 sets the voltage value V2 of the charged particles irradiated by the stage charger 68 to the voltage value V0 (S20). Furthermore, the neutralizer control unit 120 sets the voltage value V4 of the charged particles irradiated by the platform neutralizer 72 to a voltage value whose absolute value is equal to V0 (=V2) and opposite in polarity (S22). Furthermore, even if the charged voltage V0 and the neutralization voltage V4 have the same polarity, the neutralization effect can be obtained by polarization, so instead of V4=-V0, V4=V0 can be set. Moreover, it is not limited to making the absolute value of the electrification voltage and the neutralization voltage equal, and the neutralization voltage can be appropriately set according to the neutralization device and the neutralization method.

According to the above-mentioned voltage setting process, by irradiating the charged particles on the sheets L1~L5 vacuum-adsorbed on the carrier holder 60 for lamination, the warped parts or the flexed parts (protruding parts) of the sheets L1~L5 are absorbed by electrostatic adsorption. It is adsorbed on the conveying holder 60 for lamination. Here, the thinner the insulating film 106 of the sheets L1 to L5 that are being conveyed, that is, the greater the amount of warpage and the amount of deflection as described above, the higher the voltage of the charged particles is irradiated, thereby increasing the electrostatic adsorption force. Thereby eliminating warpage and deflection.

Furthermore, in the build-up platform 80, charged particles having a voltage equal to the electrostatic adsorption described above are irradiated to the uppermost surface of the layered body 100A in the middle of the build-up. That is, the electrostatic adsorption force of the sheet materials L1 to L5 to the laminated transport holder 60 is equal to the electrostatic adsorption force of the sheet materials L1 to L5 to the laminated body 100A in the middle of the laminated layer. Thereby, when the positive pressure air is ejected from the transport holder for lamination 60 to detach the sheets L1 to L5 and delivered to the lamination platform 80, it is possible to suppress the application of the transport holder for lamination 60 to eliminate warpage and deflection. The electrostatic adsorption force of the song hinders the above-mentioned detachment. In other words, it is possible to eliminate the warpage and deflection of the sheets L1 to L5 under the maximum voltage within a range that does not prevent the sheets L1 to L5 from being separated from the laminated transport holder 60 due to electrostatic adsorption.

As illustrated in FIG. 7, the crimper control unit 122 controls the crimper 90 to crimp the final laminated body 100B. The final laminated body 100B, which is the sheet L1 laminated to the uppermost layer on the laminated platform 80, is transported to the crimper 90 by the transport holder 91.

In the crimper 90, the final laminated body 100B is heated while being compressed from the vertical direction, in other words, the self-laminating direction. The crimping process is controlled by the crimping device control unit 122. The result of the crimping process is shown in the lower part of FIG.

＜Layer Process＞ 9 to 18 illustrate the lamination process of the lamination apparatus 10 of this embodiment. In the sheet counter 111 of the storage transport holder control unit 110 illustrated in FIG. 7, the sheet storage 30L5 is set as the movement destination of the first storage transport holder 40 when the stacking device 10 is activated. . Therefore, as illustrated in FIG. 9, the moving destination of the transport holder 40 for storage is designated as the sheet storage 30L5.

As illustrated in FIGS. 9 and 10, the storage transport holder 40 (front stage holder) vacuum sucks the sheet L5 from the sheet storage 30L5 and moves it to the alignment platform 50.

As shown in FIG. 10, when the transport holder 40 for the storage warehouse arrives on the alignment platform 50, the suction plate 44 and the sheet L5 sucked to the suction plate 44 are lowered by the lifting mechanism 42. When the sheet L5 abuts on the platform plate 53 of the alignment platform 50, the lowering driving of the lifting mechanism 42 stops. For example, the lowering driving of the lifting mechanism 42 is stopped by the torque sensor.

At this time, as illustrated in FIG. 10, the sheet L5 is pressed against the platform plate 53 of the alignment platform 50 by the transport holder 40 (front stage holder) for storage. Even when the sheet material L5 is warped or deflection, the warpage or deflection can be temporarily eliminated by the pressing of the transport holder 40 for storage. In this state (expanded state), the aiming camera 56 passes through the light-transmitting plate 54 (refer to FIG. 1) to photograph the sheet L5 on the platform plate 53.

As shown in FIG. 7, the alignment platform control unit 112 generates a drive command to the moving mechanism 52 based on the image of the sheet L5 obtained from the alignment camera 56. The alignment platform control unit 112, for example, compares the captured image of the alignment camera 56 with the reference image stored in advance, and obtains the target position, angle position offset, and angle offset of the sheet L5 set from the reference image. shift. Furthermore, the alignment platform control unit 112 outputs to the moving mechanism 52 a drive command for eliminating the obtained offset.

As shown in FIG. 11, after the suction plate 44 of the transport holder 40 for storage is separated from the platform plate 53, the sheet L5 is aligned with the driving of the moving mechanism 52. The aligned sheet L5 is exemplified in FIG. 12 and is vacuum sucked by the lamination transport holder 60.

The transfer holder 60 for lamination with vacuum suction of the sheet L5 moves in the X-axis direction toward the stacking table 80 in accordance with a drive command of the transfer holder control unit 114 (see FIG. 7) for the lamination. During this movement, as illustrated in FIG. 13, the exposed surface of the sheet L5 vacuum-adsorbed by the carrier holder 60 for lamination is irradiated with charged particles such as ion particles from the charger 70 for a holder.

At this time, the storage transport holder control unit 110 illustrated in FIG. 7 designates the movement destination of the storage transport holder 40 as the sheet storage 30L4 based on the order stored in the sheet counter 111. In response to this, as illustrated in FIG. 13, the storage transport holder 40 moves to the sheet storage 30L4 and sucks (vacuum sucks) the second-layer sheet L4.

For example, as shown in FIG. 7, the self-laminating transport holder control unit 114 transmits the current coordinates of the laminating transport holder 60 to the charger control unit 118. The charger control unit 118 receives the current coordinates and controls the charger 70 for the holder, and the entire process of the sheet L5 conveyed to the transport holder 60 for lamination passing on the charger 70 for the holder continues upward from the charger 70 for the holder Irradiation irradiates charged particles. Thereby, charged particles are incident on the entire surface of the exposed surface of the sheet L5.

As shown in FIG. 14, the charged particles are irradiated in order to eliminate the warpage or deflection of the sheet material L5. By the irradiation of the charged particles, in addition to the vacuum suction force, the electrostatic attraction force (Coulomb force) is also generated on the sheet L5. With this electrostatic adsorption, the raised portion 12 of the sheet L5 separated (peeled off) from the holding surface of the adsorption plate 64 is pulled by the adsorption plate 64. As explained in the voltage setting process described below, the charged particles irradiated by the charger 70 for the self-sustainer may be positively charged or negatively charged.

Furthermore, as described above, the voltage of the charged particles irradiated to the sheet material adsorbed on the carrier holder 60 for lamination is set to a higher voltage as the sheet material is thinner. Here, the so-called high voltage includes a positive high voltage and a negative high voltage. In short, it refers to a voltage with a higher absolute value of the voltage value.

The thinner the insulating film 106 illustrated in FIG. 1 is, the more the surface elastic modulus (in other words, the degree of tightness) of the insulating film 106 decreases, and the amount of warpage caused by the difference in expansion and contraction with the metal layer 104 The amount of deflection increases. Therefore, in the lamination process of this embodiment, the thinner the insulating film 106 of the sheets L1 to L5 that are being conveyed, the higher the voltage of the charged particles to be irradiated is set.

As illustrated in FIG. 15, the storage transport holder 40 transports the second layer sheet L4 to the alignment platform 50. In addition, the charger 68 for the platform attached to the transport holder 60 for the build-up is irradiated with the charged particles toward the sheet placement surface of the build-up platform 80. For example, from the upstream end to the downstream end of the X axis of the layered platform 80, the charged particles are irradiated from the platform charger 68.

Furthermore, in FIG. 15, the sheets L1 to L5 are not placed on the layering platform 80, but when the sheets L1 to L5 are layered on the layering platform 80, the charger 68 for the platform is used for the layered body in the middle of the layering. The top surface of 100A is irradiated with charged particles. In other words, the exposed surface of the uppermost sheet among the plurality of sheets stacked on the stacking platform 80 is irradiated with the charged particles from the charger 68 for the platform. Furthermore, the size of the layered platform 80 is larger than the size of the sheets L1 to L5, so the part where the sheets L1 to L5 are not placed (ie, the exposed part of the layered platform 80) is also irradiated with charged particles.

At this time, as explained in the above-mentioned voltage setting process, the charged particles irradiated by the charger 68 for the self-sustainer and the charged particles irradiated by the charger 70 for the self-sustainer are set to equal voltages (V1=V2). By irradiating the charged particles, electrostatic attraction is generated on the placement surface of the layered platform 80 and the uppermost surface of the layered body 100A (refer to FIG. 5) in the middle of the layering.

When the lamination transport holder 60 arrives on the lamination platform 80, as shown in FIG. 16, the suction plate 64 and the sheet L5 adsorbed to the lower end thereof are lowered by the descending drive of the elevating mechanism 62. When the sheet material L5 comes into contact with the placement surface of the layering platform 80 or the uppermost surface of the layered body 100A in the middle of the layering, positive pressure air for detachment is ejected from the air pipe 66.

At this time, electrostatic attractive force acts between the transport holder 60 for lamination and the sheet L5. On the other hand, electrostatic attraction also acts between the laminated platform 80 and the sheet L5. As described above, the charged particles irradiated by the charger 68 for the self-sustainer and the charged particles irradiated by the charger 70 for the self-sustainer are set to equal voltages (V1=V2). Therefore, the electrostatic attractive force acting between the lamination conveyance holder 60 and the sheet L5 and the electrostatic attractive force acting between the lamination platform 80 and the sheet L5 are theoretically equal. As a result, it is possible to eliminate the warpage and deflection of the sheets L1 to L5 under the maximum voltage within the range where the positive pressure air is not hindered by electrostatic adsorption and the sheet materials L1 to L5 are detached from the laminated transport holder 60. .

As shown in FIG. 17, when the transfer holder 60 for the build-up is away from the build-up platform 80 and faces the alignment platform 50, the charge particles are irradiated from the separator 72 for the platform to the placement surface of the build-up platform 80. The voltage value of the charged particles is set by the static eliminator control unit 120 (see FIG. 7) to have the opposite polarity to the charged particles irradiated from the platform charger 68, and the absolute value of the voltage value is the same.

In the layered body 100A in the middle of the layering (for convenience, only the state of the sheet L5 is included), the platform charger 68 is irradiated with charged particles, but if the irradiation is repeated to accumulate the electric charge, it will be in the layered body 100A Risk of damage such as insulation breakdown. Therefore, the layered body 100A in the middle of the layering is neutralized by the platform neutralizer 72.

Furthermore, as illustrated in FIG. 18, during the movement of the transport holder 60 for the build-up, the adsorption plate 64 is irradiated with the charged particles from the separator 74 for the holder. The voltage value of the charged particles is set by the static eliminator control unit 120 (refer to FIG. 7) to have the opposite polarity to the charged particles irradiated by the self-retainer charger 70, and the absolute value of the voltage value is the same. The adsorption plate 64 is de-charged by irradiating such charged particles.

As shown in FIG. 18, the aligned second layer sheet L4 is placed on the alignment platform 50. The conveying holder 60 for lamination vacuum sucks the sheet L4, and repeats the process of FIGS. 12 to 18 until the uppermost sheet L1 is laminated.

The final laminated body 100B, which is the sheet L1 laminated to the uppermost layer on the laminated platform 80, is transported to the crimper 90 by the transport holder 91. In the crimper 90, the final laminated body 100B is heated while being compressed from the vertical direction, in other words, the self-laminating direction. As a result of the crimping process, as shown in the lower part of FIG. 1, the layers of the laminate 100B are finally fixed and mounted as a circuit board in communication equipment or the like.

＜Another example of multilayer device＞ In the above-mentioned embodiment, the charged particles are irradiated over the entire exposed surface of the sheets L1 to L5 conveyed to the conveying holder 60 for lamination, but the lamination apparatus 10 of this embodiment is not limited to this form. Since the purpose of irradiating the charged particles is to eliminate the raised portions 12 of the sheets L1 to L5 (refer to FIG. 14), the raised portions 12 can also be irradiated concentratedly.

For example, as illustrated in FIG. 19, in the layering apparatus 10, a camera 130 is provided between the alignment platform 50 and the holder static remover 74. The camera 130 uses its upper portion as an imaging area, and can image the surface shapes of the sheets L1 to L5 that are transported to the lamination transport holder 60 and pass above the camera 130. In addition, when the transport holder 60 for lamination is located above the camera 130, the movement may be temporarily stopped for shooting.

In addition, the camera 130 can be replaced by the alignment camera 56 to photograph the surface shapes of the sheets L1 to L5 after the alignment platform 50 is aligned.

In this case, for example, as a functional block of the controller 20, the charger control unit 118 illustrated in FIG.

The photographed images of the sheets L1 to L5 obtained by the camera 130 or the aiming camera 56 are sent to the charger control unit 118 (refer to FIG. 7). The charger control unit 118 sets the irradiation time point and voltage of the charged particles from the holder charger 70 to the sheets L1 to L5 held by the laminated transport holder 60 based on the surface shapes of the photographed sheets L1 to L5.

Specifically, the charger control unit 118 irradiates the raised portion 12 (refer to FIG. 14) of the sheets L1 to L5 separated from the holding surface of the lamination transport holder 60 with a voltage that is more closely connected to the sheet of the holding surface The method of closely contacting the high-charged particles is to control the charger 70 for the holder.

For example, the holder charger 70 is limited to the case where at least a part of the irradiation point of the charged particles on the exposed surface of the conveyed sheets L1 to L5 overlaps with the raised portion 12 of the sheets L1 to L5 held by the laminated conveying holder 60 Irradiate charged particles. The irradiation time point can be obtained from the coordinates of the laminated transport holder 60 sent from the laminated transport holder control unit 114 and the surface shape of the photographed sheets L1 to L5. Furthermore, the irradiation of the charged particles is stopped at the close contact part of the sheets L1 to L5 except the raised part 12.

FIG. 20 illustrates the voltage setting process of another example in FIG. 8. Hereinafter, regarding the steps in FIG. 20 that are repeated with the symbols in FIG. 8, since there is no change in the content of the itinerary, the description is appropriately omitted.

In step S14 of FIG. 20, the voltage value V0 is obtained based on the sheet thickness information. Specifically, as described above, the thinner the insulating film 106 of the sheets L1 to L5 illustrated in FIG. 1, the higher the voltage is set.

Next, the charger control unit 118 illustrated in FIG. 7 analyzes the surface shapes of the sheets L1 to L5, and determines whether at least a part of the sheet is raised from the suction plate 64 of the laminated transport holder 60, in other words, whether there is a raised portion 12 ( S30). Furthermore, in the image analysis using the captured image of the alignment camera 56, the presence or absence of the raised portion 12 is determined based on the surface shape of the sheets L1 to L5 on the platen 53. Here, in order to emphasize the protruding part 12 in the image analysis, a flasher mechanism may also be provided in the camera 130 or the aiming camera 56.

If it is determined by image analysis that there is no raised portion 12 on the sheets L1 to L5, there is no need to eliminate the raised portion 12 by the charged particles, so the charger control unit 118 sets the voltage value V1 of the holder charger 70 Set to 0[V] (S32).

On the other hand, in step S30, if the raised portion 12 of the sheets L1 to L5 is specified (S36), the charger control unit 118 will only irradiate the charged particles of the holder charger 70 and the holder separator 74 Set to the raised portion 12 (S38). The self-laminating transport holder control unit 114 sends the coordinates of the laminating transport holder 60 to the charger control unit 118, so that the irradiation and stopping of the charged particles are controlled in synchronization with the change of the coordinates.

Furthermore, the voltage value V1 of the charged particles irradiated by the holder charger 70 is set to the voltage value V0 (S16). In addition, the voltage value V3 of the charged particles irradiated by the eliminator 74 for the holder is set to a voltage value whose absolute value is equal to V0 (=V1) and opposite in polarity (S18).

Here, when the set voltage value V1 of the holder charger 70 is set to 0 [V] in step S32, the voltage V3 of the holder charger 74 can also be set to the voltage value V0 (S18). The conveyance holder 60 is used for neutralization.

For example, as shown in FIG. 16, when the self-laminating transport holder 60 delivers the sheet to the laminating platform 80, the laminated body 100A (sheet L5 in FIG. 16) in the middle of the laminating layer that is self-charged with electric charge is transferred to the laminating transport holder 60 The movement may cause the build-up transport holder 60 to become charged. Therefore, regardless of whether or not the charged particles are irradiated by the holder charger 70, after the sheet is delivered to the build-up platform 80, the build-up transport holder 60 is de-charged.

According to the laminating device 10 of the embodiment described above, relatively high-voltage charged particles are irradiated to the raised portion 12 of the sheets L1 to L5, and the surrounding close contact portion, including the case of 0 [V], is relatively suppressed from electrostatic adsorption. force. Thereby, it is possible to avoid excessive electrostatic adsorption force on the sheets L1 to L5, and on the stacking platform 80, the sheets L1 to L5 can be easily detached from the transfer holder 60 for stacking.

＜Another example of alignment platform＞ In the above embodiment, as illustrated in FIG. 10, the sheet L5 is pressed against the platform plate 53 of the alignment platform 50 by the transport holder 40 (front stage holder) for storage. Thereby, the warpage or deflection of the sheet L5 is eliminated, and the aiming camera 56 is used for shooting in this state.

The means for eliminating warpage and deflection on the alignment platform 50 in this embodiment is not limited to the above-mentioned means. In short, the warpage and deflection of the sheets L1 to L5 can be eliminated as long as the pressing member is provided, and the pressing member is then placed on the sheet L1 to L5 placed on the platform plate 53 of the alignment platform 50 Above, pressurize the entire surface of the sheets L1 to L5.

For example, as shown in FIG. 21, on the alignment platform 50, a pressing plate 55 may also be provided as a pressing member. The pressure plate 55 may be composed of, for example, an acrylic resin plate. In addition, in order to adsorb the pressure plate 55, a pneumatic chuck 51 may also be provided on the platform plate 53.

In addition, as the pressing member, a film member such as a PET film may also be used. In this case, since the sheets L1 to L5 on the platform plate 53 are covered by the film member, the air chuck 51 is evacuated to seal the sheets L1 to L5 to the film member. At this time, the sheets L1 to L5 are pressurized by the film member, and the warpage and deflection of the sheets L1 to L5 are eliminated.

Furthermore, the pressure plate 55 and the film member can be held by the pneumatic chuck 51, so they can also be configured to have a larger area than the sheets L1 to L5. The pressure plate 55 or the film member is overlapped with the sheets L1 to L5 on the platform plate 53 by a machine manager who manages the lamination process of the lamination device 10, or by a transport robot not shown.

The sheets L1 to L5 pressed against the platform plate 53 of the alignment platform 50 by the pressure plate 55 or the film member are photographed by the alignment camera 56. Based on the captured image, the positional deviation and the angular deviation of the sheets L1 to L5 on the platform plate 53 are corrected.

10: Layered device 12: Uplift 20: Controller 21: Input and output controller 22: CPU 23: ROM 24: RAM 25: Hard Disk Drive (HDD) 26: Input section 27: Display 28: Internal bus 30L1~30L5: Sheet storage 40: Transport holder for storage warehouse (front holder) 42: Lifting mechanism 44: Adsorption board 46: Air piping 50: Align the platform 51: Pneumatic chuck 52: mobile agency 53: platform board 54: Translucent board 55: pressure plate 56: Point at the camera 60: Conveyor holder for stacking 62: Lifting mechanism 64: Adsorption board 66: Air piping 68: Platform with electrical appliances 70: With electrical appliances for retainers 72: In addition to electrical appliances for platforms 74: In addition to electrical appliances for retainers 80: Multilayer platform 82: Air piping 90: Crimper 91: Transport holder 100A: Stacked body in the middle of stacking 100B: Final laminate 102: Through hole 104: Metal layer 106: insulating film 110: Conveyor holder control unit for storage 111: sheet counter 112: Align the platform control department 114: Conveyor holder control unit for stacking 116: Sheet Information Memory Department 118: Charger control department 120: In addition to the electrical control unit 122: Crimper control unit 130: camera (video camera) L1~L5: Sheet

[FIG. 1] A diagram illustrating a laminate manufactured by the laminate apparatus of this embodiment. [Fig. 2] A diagram illustrating a laminate including a sheet having warpage. [Fig. 3] A diagram illustrating a laminate including a sheet having a flexure. [FIG. 4] A perspective view illustrating the structure of the stacking device of this embodiment. [Fig. 5] An X-Z side view illustrating the structure of the stacking device of this embodiment. [Figure 6] A diagram illustrating the hardware configuration of the controller. [Figure 7] is a diagram illustrating the functional blocks of the controller. [Fig. 8] A diagram illustrating the voltage setting flow of charging and discharging performed in the lamination process of the sheet material. [Fig. 9] is a diagram illustrating the lamination process (1/10) of sheets using the lamination device of this embodiment. [Fig. 10] is a diagram illustrating the lamination process (2/10) of sheets using the lamination device of this embodiment. [Fig. 11] is a diagram illustrating the lamination process (3/10) of sheets using the lamination device of this embodiment. [Fig. 12] is a diagram illustrating the lamination process (4/10) of sheets using the lamination device of this embodiment. [Fig. 13] is a diagram illustrating the lamination process (5/10) of sheets using the lamination device of this embodiment. [Fig. 14] is a diagram illustrating the lamination process (6/10) of sheets using the lamination device of this embodiment. [Fig. 15] is a diagram illustrating the lamination process (7/10) of sheets using the lamination device of this embodiment. [Fig. 16] is a diagram illustrating the lamination process (8/10) of sheets using the lamination device of this embodiment. [Fig. 17] is a diagram illustrating the lamination process (9/10) of sheets using the lamination device of this embodiment. [Fig. 18] is a diagram illustrating the lamination process (10/10) of sheets using the lamination device of this embodiment. [FIG. 19] A diagram illustrating the structure of another example of a laminate device of this embodiment. [Fig. 20] is a diagram showing another example of the voltage setting process of charging and discharging performed in the laminate process of the sheet. [Fig. 21] A diagram showing another example of the alignment platform.

10: Layered device

20: Controller

30L1~30L5: Sheet storage

40: Transport holder for storage warehouse (front holder)

50: Align the platform

52: mobile agency

53: platform board

54: Translucent board

56: Point at the camera

60: Conveyor holder for stacking

68: Platform with electrical appliances

70: With electrical appliances for retainers

72: In addition to electrical appliances for platforms

74: In addition to electrical appliances for retainers

80: Multilayer platform

90: Crimper

91: Transport holder

L1~L5: Sheet

Claims (10)

A layering device that laminates a plurality of layers of sheets with metal layers laminated on an insulating film, and is provided with: Laminating platform for laminating the above-mentioned sheets; A transport holder that holds the above-mentioned sheet by vacuum suction and transports it to the above-mentioned stacking platform; and A charger for a holder, which irradiates charged particles onto the sheet held in the transport holder; The charger for the holder irradiates the charged particles whose voltage is higher as the insulating film of the sheet material being transported is thinner. For example, the layered device of claim 1, which has a charger for the platform, The charger for the platform irradiates charged particles on the exposed surface of the uppermost layer among the plurality of layers of the above-mentioned sheets laminated on the above-mentioned layered platform, and The charger for the holder and the charger for the platform irradiate charged particles of equal voltage to each other. A layering device that laminates a plurality of layers of sheets with metal layers laminated on an insulating film, and is provided with: Laminating platform for laminating the above-mentioned sheets; A transport holder, which holds the above-mentioned sheet by vacuum suction and transports it to the above-mentioned stacking platform; A charger for a holder, which irradiates charged particles on the sheet held in the transport holder; and A camera that photographs the surface shape of the sheet material held in the transport holder; The charger for the holder irradiates the raised portion of the sheet separated from the holding surface of the transport holder, which is specified based on the surface shape of the sheet photographed by the camera, with a relatively close contact with the holding surface. Highly charged particles in the close contact part of the above-mentioned sheet. Such as the layered device of claim 3, in which, The charged particles irradiated to the raised portion of the sheet material are set such that the thinner the insulating film of the sheet material, the higher the voltage. Such as the layered device of claim 3 or 4, in which, The charger for the holder defines the irradiation point of the charged particles on the exposed surface in an area smaller than the exposed surface of the sheet held on the transport holder, The charger for the holder is limited to irradiating charged particles when at least a part of the irradiation point overlaps with the raised portion of the sheet held by the transport holder. Such as the layered device of claim 1, which has: An alignment platform for placing the above-mentioned sheet material held before the above-mentioned conveying holder, and aligning the placed above-mentioned sheet material; and A pressing member, which is further placed on the sheet placed on the alignment platform, and pressurizes the entire surface of the sheet; At least a part of the sheet placement area of the alignment platform is composed of a light-transmitting member, The layering device is provided with an alignment camera that photographs the sheet material placed on the alignment platform through the light-transmitting member, The alignment camera shoots the sheet material pressed against the alignment platform by the pressing member. A method for manufacturing a laminated body, which manufactures a laminated body composed of a plurality of sheets with a metal layer laminated on an insulating film, and comprising: A layering step, which is to hold the sheet material in a conveying holder by vacuum suction and convey it to a layering platform, and layer the sheets in sequence on the layering platform; and The crimping step is to crimp the laminated body of the above-mentioned sheets laminated on the above-mentioned laminated platform to fix each layer; In the laminating step, the sheet material held in the conveying holder is irradiated with charged particles whose voltage is higher as the insulating film of the sheet material is thinner. Such as the manufacturing method of the laminated body of claim 7, in which, In the above-mentioned layering step, the exposed surface of the uppermost layer of the above-mentioned sheet material among the plurality of layers of the above-mentioned sheets layered on the above-mentioned layering platform and the above-mentioned sheet material being held in the conveyance of the carrying holder is irradiated with equal voltages of each other. Charged particles. A method for manufacturing a laminated body, which manufactures a laminated body composed of a plurality of sheets with a metal layer laminated on an insulating film, and comprising: The layering step is to hold the above-mentioned sheet in a transport holder by vacuum suction and transport it to a layering platform, where the above-mentioned sheets are sequentially layered on the layering platform; The crimping step is to crimp the laminated body of the above-mentioned sheets laminated on the above-mentioned laminated platform to fix each layer; In the lamination step, the swelling part of the sheet separated from the holding surface of the transport holder, which is specified based on the surface shape of the sheet held by the transport holder, is irradiated with a voltage that is relatively close to the holder Highly charged particles in the close contact part of the above-mentioned sheet on the surface. Such as the manufacturing method of the laminated body of claim 9, in which: The thinner the insulating film of the sheet, the higher the voltage of the charged particles irradiated to the raised portion of the sheet.

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