JP2023091938A - Lamination apparatus and lamination method - Google Patents

Abstract

To provide a lamination apparatus which manufactures a laminate of high adhesiveness by modifying surfaces of sheets more easily and without surface destruction under atmospheric air.SOLUTION: The present invention relates to a lamination apparatus 10 for successively laminating sheets L1-L5, in which a polymer sheet is exposed, to be modified by UV irradiation in at least a portion of an adhesive surface. The lamination apparatus 10 comprises: an alignment stage 50 for aligning the sheets L1-L5; a lamination stage 80 on which the aligned sheets L1-L5 are laminated; a transfer holder 60 for moving the sheets L1-L5 from the alignment stage 50 to the lamination stage 80; and a UV irradiation device 100 for performing UV irradiation upon the sheets L1-L5 with a wavelength equal to or less than 350 nm. The UV irradiation device 100 is provided in front of the alignment stage 50, and the UV irradiation is performed in prior to the alignment.SELECTED DRAWING: Figure 1

Description

TECHNICAL FIELD The present invention relates to a lamination apparatus equipped with an ultraviolet (UV) irradiation device and a method for manufacturing a laminate.

Ceramic green sheets (printed polymer sheets) on which conductor patterns are printed are used in the manufacture of electronic components such as laminated ceramic capacitors and ceramic substrates. A printed polymer sheet is formed by applying a dielectric material onto a carrier film and then screen-printing a metal paste onto the applied dielectric material, for example. Electronic devices are created by precisely laminating, crimping and firing printed printed polymer sheets.

However, if the adhesion between the laminated sheets is weak, the lamination may be displaced during the lamination process or during transportation, which may lead to contact failure such as disconnection or short circuit of the manufactured electronic component.

Therefore, as a pretreatment for laminating and pressure-bonding a printed polymer sheet, the sheet has been subjected to a plasma treatment to modify the surface and improve the adhesiveness (see, for example, Patent Document 1).

JP 2016-171151 A

However, in order to improve adhesiveness by plasma treatment, it is generally necessary to perform the treatment under vacuum, which increases the installation area of the apparatus, the number of man-hours, and the cost. In addition, the plasma treatment has a high illuminance, and depending on the material of the sheet, there is a possibility that the characteristics may be deteriorated.

On the other hand, modification by UV irradiation is conceivable as a method of modifying more moderately than plasma treatment. However, the present inventors have found that if the UV irradiation time is lengthened in order to sufficiently modify the sheet, the sheet is thermally deformed and the lamination accuracy is lowered.

Therefore, the present invention provides a lamination apparatus that can easily modify the surface of a polymer sheet in the atmosphere without damaging the surface and manufacture a laminate with high adhesion without lowering the lamination accuracy due to thermal deformation, and the use of the same. It is an object of the present invention to provide a lamination method that

In order to solve the above problems, a lamination device according to an embodiment of the present invention includes:
A lamination device for sequentially laminating sheets in which a polymer sheet modified by UV irradiation is exposed on at least a part of the adhesive surface,
an alignment stage that aligns the sheet;
a stacking stage on which the aligned sheets are stacked;
a conveying holder that moves the sheet from the alignment stage to the stacking stage;
a UV irradiation device that irradiates the sheet with a wavelength of 350 nm or less,
The UV irradiation device is provided in front of the alignment stage, and the UV irradiation is performed before the alignment.

Moreover, the lamination method of another embodiment of the present invention includes:
providing to a UV irradiation stage a sheet having a polymer sheet exposed on at least a portion of an adhesive surface thereof, the polymer sheet being modified by UV irradiation;
a step of irradiating the sheet with a UV irradiation device at a wavelength of 350 nm or less;
providing the UV irradiated sheet to an alignment stage;
aligning the sheet on the alignment stage;
a step of conveying the aligned sheets from the alignment stage to a stacking stage by a conveying holder;
A lamination method comprising laminating the aligned sheets on the lamination stage.

The present invention provides a lamination apparatus and a lamination method for easily modifying the surface of a sheet in the atmosphere without damaging the surface and manufacturing a laminate with high adhesion without lowering the lamination accuracy due to thermal deformation. can be done.

1 is a perspective view showing a stacking device according to one embodiment of the present invention; FIG. 1 is an XZ side view showing a stacking device according to one embodiment of the present invention; FIG. It is a perspective view which shows the lamination|stacking apparatus which concerns on the modification of one Embodiment of this invention. It is an XZ side view showing a lamination device according to a modification of one embodiment of the present invention. It is a figure explaining the lamination|stacking process in a 1st form using the lamination|stacking apparatus which concerns on one Embodiment of this invention. It is a schematic diagram of the adsorption plate used for the lamination apparatus which concerns on one Embodiment of this invention. It is a figure explaining the lamination process in a 2nd form.

Embodiments of the present invention will be described in detail below, but the present invention is not limited thereto.

<Overall configuration of stacking device>
FIG. 1 is a perspective view of a stacking device 10 according to one embodiment of the invention. In one embodiment of the present invention, the stacking device 10 includes a controller 20, sheet stockers 30L1 _f to 30L5 _f , a stocker transport holder 40, an alignment stage 50, a stacking transport holder 60, a stacking stage 80, a crimping device 90, a UV An irradiation device 100 and a UV irradiation stage 110 having a reversing mechanism are provided. The stacking device 10 may also include a charging unit, for example, a stage charger 68 , a holder charger 70 , a stage neutralizer 72 , and a holder neutralizer 74 .

In FIG. 1, the X-axis, Y-axis, and Z-axis are appropriately used as directional axes for describing the layout of the stacking device 10 and the like. The X-axis is an axis along the moving direction of the stacking carrier holder 60 . The Y-axis is an axis perpendicular to the X-axis on the horizontal plane. The Z-axis is a vertical axis orthogonal to the X-axis and the Y-axis, and is equal to the stacking direction of the sheets L1 to L5 (see FIGS. 2 and 5) to be stacked. Further, in describing the arrangement of each mechanism of the stacking device 10, the sheet stockers 30L1 _f to 30L5 _f are upstream, and the stacking stage 80 is downstream along the X-axis.

(sheet)
The sheets L1 to L5 are sheets laminated by the laminating device 10. FIG. In each of the sheets L1 to L5, the polymer sheet that is modified by UV irradiation is exposed on at least a part of the surface where the sheets contact each other during adhesion (hereinafter referred to as the adhesion surface). In one embodiment of the invention, the adhesive surfaces of the sheets L1-L5 are provided with a protective film f. In this specification, the sheets L1 to L5 provided with protective films are referred to as L1 _f to L5 _f , respectively. As will be described later, the protective film is preferably peeled off after UV irradiation of the sheets L1 to L5 and before the alignment process.

The polymer sheets forming sheets L1-L5 are heat resistant. A polymer sheet is formed by applying a dielectric material containing a polymer that is modified by UV irradiation onto a carrier film. For example, the polymer sheet may be a ceramic green sheet obtained by laminating a ceramic precursor on a carrier film by a doctor blade method or the like. A carrier film can be used as a protective sheet for the sheets L1 to L5.

Sheets L1-L5 may also be printed polymer sheets with metal patterns formed on a coated dielectric material. A printed polymer sheet is formed, for example, by applying a dielectric material containing a polymer that is modified by UV irradiation onto a carrier film and screen printing a metal paste. The printed polymer sheet is exposed over an area of at least 20% or more of the adhesive surface, preferably 50% or more of the adhesive surface. Each of the sheets L1-L5 laminated by the laminator 10 may be a printed polymer sheet or a polymer sheet without a metal pattern.

The polymer used for the polymer sheets of the sheets L1 to L5 should be modified by UV irradiation and have heat resistance. Preferably, liquid crystal polymer (LCP), cycloolefin polymer (COP), polyethylene terephthalate (PET), polyimide (PI), polyethylene (PE), polycarbonate (PC) can be used.

Sheets L1-L5 may have an adhesive layer. Moreover, the sheets L1 to L5 may have a protective film that is peeled off after the UV irradiation process as a protective film for the adhesive layer.

The protective film f may have sufficient heat resistance and abrasion resistance to protect the adhesive surface. As will be described later, when UV irradiation is performed from the protective film f side, the protective film f is preferably UV-transmissive. For example, a PET film or the like can be used as the protective film f.

(sheet stocker)
Sheet stockers 30L1 _f to 30L5 _f store sheets L1 _f to L5 _f provided with protective films, respectively. In this embodiment, the sheets L1 _f to L5 _f provided with the protective film are used for explanation, but the sheets not provided with the protective film are stored in the sheet stockers 30L1 _f to 30L5 _f . Various steps may be performed.

In FIG. 1, the sheets L1 _f to L5 _f provided with the protective film are illustrated as so-called foliage type sheets, and the sheet stockers 30L1 _f to 30L5 _f are the sheets L1 _f to L5 _f provided with the foliage type protective film. , but the stacking device 10 according to this embodiment is not limited to this form. For example, a sheet roll in which a plurality of sheets are continuously formed is formed for each of the sheets L1 _f to L5 _f provided with the protective film, and a cutter for cutting the sheet roll is provided. good too. In this case, the sheet stockers 30L1 _f to 30L5 _f are configured as roll holders that respectively hold sheet rolls corresponding to the sheets L1 _f to L5 _f provided with protective films.

(Conveyance holder for stocker)
The stocker transport holder 40 is a transport device that reciprocates between the sheet stockers 30L1 _f to 30L5 _f and the UV irradiation stage 110 . Since the stocker transport holder 40 is provided upstream of the stacking transport holder 60, it is also called a "previous stage holder".

The _stocker transport holder 40 is movable in the X-axis direction and the Y-axis _{direction .} L5 _f can be carried. The stocker transport holder 40 is movable along, for example, an X-axis stage and a Y-axis stage (not shown).

A suction plate 44 is provided at the lower end of the lift mechanism 42 . The lift mechanism 42 moves the suction plate 44 in the Z-axis direction (vertical direction).

The suction plate 44 has a structure in which a plurality of air holes are provided in a metal plate such as an aluminum plate. The lower end of the air hole is exposed and the upper end is connected to the air pipe 46 . Air of negative pressure (Vac) and static pressure (Prs) is supplied to the air pipe 46 . The air pipe 46 is evacuated when the sheets L1 _f to L5 _f provided with protective films are sucked. Pressurized air is supplied from an air pipe 46 when the sheets L1 _f to L5 _f provided with protective films are removed. Also, a soft porous sheet may be provided on the contact surface of the adsorption plate 44 that contacts the sheets L1 _f to L5 _f provided with protective films.

(UV irradiation device)
The lamination apparatus 10 is equipped with a UV irradiation device 100 that activates the sheets with UV irradiation to improve the adhesiveness between the sheets during lamination. The sheets L1 _f to L5 _f with the protective film sent from the sheet stockers 30L1 _f to 30L5 _f are placed on the UV irradiation stage 110 facing the UV irradiation device 100 for UV irradiation. In one embodiment, the UV irradiation stage 110 may include a reversing mechanism, which will be described later.

UV irradiation is performed by moving either the sheets L1 _f to L5 _f provided with a protective film or the UV irradiation device 100 while irradiating a part of the UV irradiated surface (irradiated surface) of the sheets L1 _f to L5 _f . , the entire illuminated surface can be illuminated (see FIGS. 1 and 2). Further, in a modification of this embodiment, the entire irradiated surface may be irradiated at once (see FIGS. 3 and 4). UV irradiation can be performed in any direction (for example, from the Z _- axis positive direction to the Z-axis _negative direction, or from the Z-axis negative direction to the direction). In the following description, the embodiment shown in FIGS. 1 and 2 will be described.

In one embodiment of the present invention, the UV irradiation device 100 is installed to face the UV irradiation stage 110 as shown in _FIG. ˜L5 _f is installed so that the UV light source faces from above.

In one embodiment, the width of the UV light source of the UV irradiation device 100 is narrower in the X-axis direction than the sheets L1 _f to L5 _f , and the UV irradiation device 100 moves over the sheets L1 _f to L5 _f provided with protective films. , the entire illuminated surface of sheets L1 _f -L5 _f is exposed and activated. In another embodiment, the UV irradiation device has a UV light source (not shown) large enough to expose the irradiation surfaces of the sheets L1 _f to L5 _f provided with the protective films at once, and the sheets with the protective films L1 _f to L5 _f are installed at positions facing the light source of the UV irradiation device 100 and are irradiated with UV.

For example, in FIG. 1, the UV irradiation device 100 irradiates UV light downward (negative direction of the Z-axis). As described above, the sheets L1 _f to L5 _f having protective films are placed on the UV irradiation stage 110, and are placed on the UV irradiation stage 110 when the UV irradiation device 100 moves in the X-axis direction while irradiating UV light. The polymer sheet is modified by UV light.

In many cases, the UV irradiation is carried out from the side where the polymer sheet is exposed, but it is not limited to this, and may be carried out from the protective film f side if UV modification of the polymer sheet is possible. When the polymer sheet is UV-modified from the side of the protective film f, the protective film f is preferably made of a material that transmits the irradiated UV.

The UV light source of the UV irradiation device should just generate UV light with a wavelength of 350 nm or less. For example, an excimer lamp with a wavelength of 172 nm, a low-pressure mercury lamp with wavelengths of 185 nm and 254 nm, or a UV-LED with a wavelength of 265 nm, 280 nm or 310 nm can be used as the UV light source. By using a UV light source having a wavelength of 350 nm or less, although not limited thereto, chemical bond scission and activation of oxygen species are performed on the sheet surface, and the surfaces of the sheets L1 to L5 are modified.

The cumulative irradiation amount of UV irradiation by the UV irradiation device 100 depends on the materials of the sheets L1 to L5, but it is desirable to improve the adhesion of the sheets L1 to L5 and not to damage the surfaces of the sheets L1 to L5. . It is preferably 1,000 mJ/cm ² or more and 1,000,000 mJ/cm ² or less, more preferably 20,000 mJ/cm ² or more and 1,000,000 mJ/cm ² or less, and still more preferably 20,000 mJ/cm ² or more and 200,000 mJ/cm ² or less. By irradiating UV under such conditions, the surface properties of the sheets L1 to L5 are modified, and the adhesion strength is improved when the sheets are laminated. If the cumulative irradiation amount of the sheets L1 to L5 of the UV irradiation ^device 100 is less than 1000 mJ/cm ² , the effect of improving adhesion is not sufficient. diminished sexuality. Moreover, when plasma irradiation is performed, the surface of the sheet is destroyed at a depth of 1 μm or more, which may adversely affect the characteristics.

As described above, the UV irradiation device 100 faces the sheet surface and is installed at a distance such that the sheets L1 to L5 are sufficiently irradiated with the UV from the UV irradiation device 100. FIG. The distance (WD) between the UV light source and the sheet surface can be appropriately adjusted depending on the optical system used. For example, when the UV light source is an excimer lamp (wavelength: 172 nm), the WD is about 1 mm or more and 5 mm or less. , in the case of a UV-LED lamp (wavelength of 250 nm or more and 365 nm or less), it can be set to about 5 mm or more and 50 mm or less. If the distance between the UV light source and the sheet surface is too short, uneven illuminance tends to occur. Also, if the distance between the UV light source and the sheet surface is too long, the illuminance from the UV light source will be low and the surface will not be sufficiently modified.

Also, the UV-LEDs may be arranged in a line (straight line) as shown in FIG. In that case, the width may be 30 mm or more in the conveying direction (X-axis direction), and the size may be several mm longer than the Y-axis dimension of the sheets L1 to L5 in the direction perpendicular to the conveying direction (Y-axis direction). By using a UV light source of such a size, uniform and sufficient illumination can be provided while maintaining productivity.

As already mentioned, UV irradiation can cause thermal expansion of the UV irradiated sheets L1-L5. Since thermal expansion may deform the sheet and cause the four corners to lift, the UV irradiation stage 110 preferably has a sheet fixing mechanism. The sheet fixing mechanism may be composed of vacuum suction using a plurality of suction ports, mechanical chuck, magnetic force, or a combination thereof. When vacuum suction by a suction port is used as a sheet fixing mechanism, the suction port is provided on a suction plate 110 a provided on the uppermost surface of the UV irradiation stage 110 . An example of a suction plate 110a having suction ports on its surface is shown in FIGS. 6(a) to 6(c).

The adsorption plate 110a may have a configuration in which the entire adsorption surface has a constant adsorption force, or an area having a greater adsorption force than other locations on the adsorption surface may be provided. For example, in FIGS. 6A to 6C, a corner area of the UV irradiation stage 110 is provided with a portion (A) having a stronger attraction force than the other area (B), and the four corners of the sheet L are strongly attached. can be fixed.

The adsorption force may be adjusted, for example, by changing the distribution of the holes of the adsorption ports provided on the adsorption plate 110a. 6(a) and 6(b), an area (A) having a large number of suction ports provided within a single area is provided at the four corners of the suction plate 110a, and the area A is provided within a single area. It can have a larger adsorption force than the area (B) where the number of adsorption ports is small. Further, as shown in FIGS. 6A and 6B, the sheet L can be fixed to the suction plate 110a even if the size of the sheet L is changed as long as the size of the sheet L can be placed in the area B. be able to. In the modification of the suction plate 110a shown in FIG. 6(c), the area A is provided in a band shape on the diagonal line, and the size of the area A in contact with the small size sheet L is increased, so that the sheet L can be fixed more strongly. . Further, in order to increase the attraction force, the attraction force of the attraction line connected to the area where the attraction force is to be increased may be increased. Furthermore, both of them may be used together to improve the adsorption force.

(reversing mechanism)
The reversing mechanism is a mechanism for placing and reversing the sheets L1 _f to L5 _f having UV-irradiated protective films thereon. In one embodiment of the invention, the UV irradiation stage 110 may have a reversing mechanism (see FIGS. 1-5). The sheets L1 _f to L5 _f placed on the UV irradiation stage 110 are UV-irradiated by the UV irradiation device 100 and then reversed by the UV irradiation stage 110 having a reversing mechanism (see FIG. 5).

Also, in another embodiment, the reversing mechanism is incorporated into the apparatus as a separate component from the UV irradiation stage. Specifically, the sheets L1 _f to L5 _f provided with protective films are UV-irradiated on a separate UV irradiation stage (not shown), then placed on the reversing stage of the reversing mechanism and reversed.

Additionally, in other embodiments of the invention, the device may not include an inverting mechanism. For example, when UV irradiation is performed from the protective film side of sheets L1 _f to L5 _f provided with protective films, the polymer sheets L1 to L5 can be laminated without inverting the sheets.

The reversing mechanism includes a reversing stage and a reversing unit drive mechanism (not shown) that moves the reversing unit in the X-axis direction, Z-axis direction, and rotation around the Y-axis. The rotation axis of the inversion stage may be provided at any position as long as it can rotate around the Y axis. For example, the center portion of the reversing stage in the X-axis direction may be an axis extending in the Y-axis direction, or either end portion of the X-axis direction may be an axis extending in the Y-axis direction.

The reversing mechanism includes a sheet fixing mechanism that fixes the sheets L1 _f to L5 _f placed on the reversing stage. This sheet fixing mechanism may be composed of vacuum suction by a plurality of suction ports provided on the reversing stage, a mechanical chuck, magnetic force, or a combination thereof. The holding force of the sheet fixing mechanism is preset to a value that prevents the sheets L1 _f to L5 _f from falling from the reversing stage when the reversing stage is reversed.

(alignment stage)
The alignment stage 50 is a stage that aligns the UV-irradiated sheets L1 to L5. In one embodiment of the invention, the polymer sheets L1-L5 are provided with a protective film f, and the protective film f is peeled from the sheets L1-L5 prior to alignment. The peeling of the protective film f may be performed in a state where it is placed on the alignment stage 50 . In another embodiment, after UV irradiation of the sheets L1 _f to L5 _f provided with protective films, the protective film f is peeled off on a separate peeling stage (not shown), and then the sheets L1 to L5 are separated from each other by the alignment stage 50. can be placed on

The alignment stage 50 includes a moving mechanism 52 , a stage plate 53 as a mounting table, and an alignment camera 56 .

The moving mechanism 52 is configured to be able to move the stage plate 53 along the X and Y axes and to rotate the stage plate 53 around the Z axis. The stage plate 53 includes a translucent plate 54 that is a translucent member. The light-transmitting plate 54 is provided in at least part of the sheet placing area where the sheets L1 to L5 are placed. For example, as shown in FIG. 1, portions of the stage plate 53 corresponding to the four corners of the sheets L1 to L5 may be composed of a transparent plate . Alternatively, of the four corners of the sheets L1 to L5, the two diagonal corners may be formed by the light-transmitting plate 54, and the portions corresponding to the four corners of the sheets L1 to L5 may be A sheet of transparent plate 54 may be provided on the stage plate 53 .

A plurality of alignment cameras 56 are provided under the stage plate 53 . For example, the alignment camera 56 is arranged at a position where four corners or two diagonal corners of the sheets L1 to L5 can be imaged. The alignment camera 56 can image the sheets L1 to L5 placed on the stage plate 53 through the translucent plate 54 (translucent member). Based on the image from the alignment camera 56, the alignment stage 50 is moved to align the sheets L1 to L5.

After the UV irradiation, the sheets L1 to L5 are cooled to the ambient temperature (the temperature of the sheets L1 to L5 before the UV irradiation) before the sheets L1 to L5 are aligned. By cooling the sheets L1 to L5 to the temperature before the UV irradiation, the sheets L1 to L5 after being placed on the alignment stage 50 are prevented from expanding due to heat or shrinking due to cooling.

The UV-irradiated sheets L1 to L5 may be cooled by placing the sheets on the UV irradiation stage or the alignment stage 50 and leaving them for a certain period of time. In another embodiment, a cooling mechanism (not shown) may be used to cool the sheets L1 to L5 on the UV irradiation stage or the alignment stage 50. FIG. The cooling mechanism may be an air cooling mechanism. The air cooling mechanism is preferable because it can control the cooling process by controlling the blowing intensity, the blowing time, and the like. As the air cooling mechanism, an air blowing mechanism, an ionizer with a fan, or the like can be used.

(conveyance holder for stacking)
The stacking transport holder 60 holds the sheets L1 to L5 aligned on the alignment stage 50 by vacuum adsorption and transports them to the stacking stage 80 . For example, when the alignment stage 50 and the stacking stage 80 are arranged on the X-axis, the stacking carrier holder 60 can move only along the X-axis.

As shown in FIG. 2 , the stacking transport holder 60 has substantially the same structure as the stocker transport holder 40 . Specifically, the stacking transport holder 60 includes a lift mechanism 62 , a suction plate 64 provided at the lower end of the lift mechanism 62 , and an air pipe 66 connected to the suction plate 64 .

The lift mechanism 62 moves the adsorption plate 64 in the Z-axis direction (vertical direction).

The suction plate 64 has a structure in which a plurality of air holes are provided in a metal plate such as an aluminum plate. The lower end of the air hole is exposed and the upper end is connected to air pipe 66 . Air of negative pressure (Vac) and static pressure (Prs) is supplied to the air pipe 66 . The air pipe 66 is evacuated when the sheets L1 to L5 are sucked. Pressurized air is supplied from the air pipe 66 when the sheets L1 to L5 are removed. Also, a soft porous sheet may be provided on the contact surface of the adsorption plate 64 that contacts the sheets L1 to L2. The suction plate 64 may have improved suction force at the four corners as shown in FIG.

(Lamination stage)
As described above, the sheets L1 to L5 are transported from the alignment stage 50 to the stacking stage 80 by the stacking transport holder 60 and stacked. A suction hole (not shown) for holding the lowermost sheet L5 may be formed on the mounting surface of the stacking stage 80 on which the final stack is formed. This suction hole is connected to an air pipe 82 as shown in FIG. The lowermost sheet L<b>5 is held on the stacking stage 80 by drawing a negative pressure from the air pipe 82 . Also, an adhesive sheet may be provided on the mounting surface of the stacking stage 80 instead of vacuum adsorption.

(fixed unit)
The sheets L1 to L5, which are aligned on the alignment stage 50 and stacked on the stacking stage 80, are preferably fixed so that the stacked sheets L1 to L5 do not shift before pressure bonding. A general method can be used for fixing the laminated sheet, and for example, fixing by mechanical fixing, fixing by adhesive, fixing by heat welding, and fixing by charged lamination can be used.

In one embodiment of the invention, the stack of sheets is secured by charging lamination. The lamination apparatus 10, as a charged lamination fixing unit, irradiates charged particles to the lamination transport holder 60, the sheets L1 to L5 conveyed by the holder, and the lamination intermediates laminated on the lamination stage 80. Equipped with a charger and a static eliminator.

Specifically, the lamination device 10 includes a stage charger 68 , a holder charger 70 , a stage neutralizer 72 , and a holder neutralizer 74 . These chargers and static eliminators are composed of ionizers, for example.

The stage charger 68 irradiates charged particles toward the placement surface of the stacking stage 80 and the exposed surfaces of the sheets L1 to L5 stacked on the stacking stage 80 . The stage charger 68 may be movable relative to the stacking stage 80 . For example, as illustrated in FIG. 1, the stage charger 68 is attached to the downstream end of the stacking transport holder 60 (position near the stacking stage 80), and is movable along the X-axis along with the transporting transport holder 60. It has become.

The holder charger 70 and the holder static eliminator 74 are movable relative to the stacking transport holder 60 in the X-axis direction, that is, along the moving direction of the stacking transport holder 60 . The holder charger 70 and the holder static eliminator 74 are provided between the alignment stage 50 and the stacking stage 80, and arranged at a position over which the stacking transport holder 60 passes. Preferably, the charging holder charger 70 and the holder static eliminator 74 are provided downstream of the UV irradiation device 100 . By being provided downstream of the UV irradiation device 100, static elimination due to UV irradiation can be avoided.

For example, the holder charger 70 and the holder static eliminator 74 irradiate charged particles upward (in the positive Z-axis direction). Therefore, when the charged particles are irradiated while the stacking transport holder 60 moves over the holder charger 70 and the holder static eliminator 74, the charged particles are incident on the exposed surfaces of the sheets L1 to L5 being transported. be. When the holder charger 70 and the holder static eliminator 74 are provided downstream of the UV irradiation device 100, charged particles are incident on the surfaces of the sheets L1 to L5 being conveyed that have been surface-modified by UV light. The Rukoto.

The holder charger 70 and the holder static eliminator 74 set the irradiation spots of the charged particles on the exposed surfaces of the sheets L1 to L5 held by the stacking transport holder 60 in areas smaller than the exposed surfaces. good. For example, an area shorter than the length of the sheets L1 to L5 in the X-axis direction becomes the irradiation spots of the holder charger 70 and the holder static eliminator 74 on the exposed surfaces of the sheets L1 to L5. On the other hand, the length of the irradiation spot in the Y-axis direction may be equal to or longer than the length of the sheets L1 to L5 in the Y-axis direction. By relatively moving the stacking transport holder 60, the holder charger 70, and the holder static eliminator 74 in the X-axis direction, the entire exposed surface of the sheets L1 to L5 transported to the stacking transport holder 60 is It becomes possible to irradiate charged particles.

The stage static eliminator 72 may be fixed to the lamination stage 80, for example. For example, the stage static eliminator 72 can irradiate charged particles over the entire mounting surface of the lamination stage 80 .

Charged particles are incident on the stacking conveying holder 60, the sheets L1 to L5 transported by the holder, and the stacking intermediates stacked on the stacking stage 80 by these charged stacking fixing units, thereby fixing the stacking structure. .

(crimper)
The stacked body fixed as described above is compressed in the vertical direction, in other words, in the stacking direction while being heated by the crimping device 90 . As a result of this crimping process, the final laminate is secured layer by layer. The lamination device 10 may include the crimping device 90 as part thereof or as a separate device.

(controller)
The controller 20 controls each device of the stacking device 10 . For example, the controller 20 includes a stocker transport holder control section, a reversing unit control section, an alignment stage control section, a stacking transport holder control section, a UV irradiation device control section, a sheet information storage section, a charger control section, and a static eliminator control. and a crimper controller. The controller 20 is composed of, for example, a computer.

<Lamination process in the first embodiment>
Next, the lamination process of the first embodiment of the sheets L1 to L5 using the lamination apparatus 10 of one embodiment of the present invention will be described with reference to FIGS. 1, 2 and 5. FIG.

FIG. 5 is a schematic diagram of the lamination process of the sheet L3.

The sheet L3 _f having the protective film is transported from the sheet stocker 30L3 _f onto the UV irradiation stage 110 by the transport holder 40 for the stocker, and is fixed so that the polymer sheet L3 faces the UV irradiation device 100 (see FIG. 5A )).

Next, the sheet L3 _f is irradiated with UV by the UV irradiation device 100 (FIG. 5B).

After the UV irradiation, the reversing mechanism provided on the UV irradiation stage 110 reverses the UV-irradiated sheet L3 _f provided with the protective film (FIG. 5C). After flipping, the sheet L3 _f with the protective film may be placed on the stage plate 53 of the alignment stage 50 .

Before being placed on the stage plate 53 of the alignment stage 50, the sheet _L3f with the protective film is cooled to the ambient temperature (pre-UV irradiation temperature). Cooling may be performed by a cooling mechanism such as an air cooling mechanism. As a result, even if the sheet L3 _f having the protective film is placed on the stage plate 53, expansion or contraction due to heat of the stage plate or the like will not occur.

Next, the protective film f attached to the surface of the alignment stage 50 of L3 opposite to the surface in contact with the stage plate 53 is peeled off by a peeling unit (not shown) (FIG. 5(d)).

Next, based on the image of the sheet L3 placed on the stage plate 53 captured by the alignment camera 56, the positional and angular deviations of the sheet L3 are corrected by moving the alignment stage 50 (see FIG. 5 ( e)).

The position-corrected sheet L3 is transported from the alignment stage 50 to the stacking stage 80 by the stacking transport holder 60 .

Furthermore, while the sheet L3 is conveyed from the alignment stage 50 to the stacking stage 80, charged particles are incident thereon by the charging unit.

The sheet L3, which has been subjected to surface modification and charging treatment by UV irradiation while being conveyed by the lamination conveying holder 60, is placed on the sheet L2, which has already been laminated on the sheet L1, on the lamination stage 80. are in contact with each other (FIG. 5(f)).

The laminated intermediate (FIG. 5(g)) thus obtained may be further subjected to the lamination process (FIGS. 5(a) to (f)). (not shown) to provide a laminate by thermocompression bonding.

<Lamination process in the second embodiment>
The lamination process (FIG. 7) in the second embodiment of the invention will be described below. The lamination process of the second embodiment differs from the lamination process of the first embodiment in that the lamination process is performed with the sheet _L3f provided with the protective film turned upside down.

The sheet L3 _f having the protective film is transported from the sheet stocker 30L3 _f onto the UV irradiation stage 110 by the transport holder 40 for the stocker, and the protective film f is fixed so as to face the UV irradiation device 100 (FIG. 7A )).

Then, UV irradiation is performed by the UV irradiation device 100 (FIG. 7(b)). At this time, as the wavelength of the UV irradiation, a wavelength that passes through the carrier film f is used. For example, when the carrier film f is made of PET, a UV wavelength longer than 310 nm is used.

After the UV irradiation, the sheet L3f with the protective film is cooled to the ambient temperature (pre-UV irradiation temperature). Cooling may be performed by a cooling mechanism such as an air cooling mechanism. The sheet _L3f with the cooled protective film is placed on the stage plate 53 of the alignment stage 50 by the transfer mechanism.

Next, the protective film f attached to the surface of the alignment stage 50 of L3 opposite to the surface in contact with the stage plate 53 is peeled off by the peeling unit (FIG. 7(c)).

After the peeling process, based on the image of the sheet L3 placed on the stage plate 53 captured by the alignment camera 56, the positional and angular deviations of the sheet L3 are corrected by moving the alignment stage 50 (Fig. 7(d)).

The position-corrected sheet L3 is transported from the alignment stage 50 to the stacking stage 80 by the stacking transport holder 60 .

Furthermore, while the sheet L3 is conveyed from the alignment stage 50 to the stacking stage 80, charged particles are incident thereon by the charging unit.

The sheet L3, which has been subjected to surface modification and electrification treatment by UV irradiation while being conveyed by the lamination conveying holder 60, is coated with a carrier film on the surface opposite to the sheet L2 already laminated on the sheet L1 on the lamination stage 80. It is laminated so that the surface where f is separated is positioned (FIG. 7(e)). An adhesive layer may be provided on the surface of the sheet L3 from which the carrier film f is peeled off. In this case, in addition to the adhesion by the adhesive layer, the laminate can be fixed more firmly due to the improvement in adhesion due to UV irradiation.

The lamination process thus obtained may be further repeated, and after the desired lamination is performed, a crimping machine 90 (not shown) is used to heat and compress to provide a laminate (Fig. 7(f)).

(Embodiment of invention)
A first embodiment of the present invention is
A lamination apparatus for sequentially laminating sheets in which a polymer sheet modified by UV irradiation is exposed on at least a part of an adhesive surface, comprising an alignment stage for aligning the sheets, and the aligned sheets being laminated. a stacking stage, a conveying holder that moves the sheet from the alignment stage to the stacking stage, and a UV irradiation device that irradiates the sheet with a wavelength of 350 nm or less, wherein the UV irradiation device is the alignment stage , wherein said UV irradiation is performed before said alignment.

As a result, it is possible to easily modify the surface of the sheet in the air without destroying the surface, thereby producing a laminate having high adhesion.

According to a second embodiment of the present invention, in the first embodiment, the cumulative dose of UV irradiation is 1000 mJ/cm ² or more and 100000 mJ/cm ² or less.

As a result, the surface of the sheet is sufficiently reformed even in the atmosphere without destroying the surface of the sheet, and the adhesiveness can be improved.

A third embodiment of the present invention is the first or second embodiment, wherein the distance between the sheet and the UV light source of the UV irradiation device is 5 mm or more and 50 mm or less during the UV irradiation. That's what it is.

As a result, there is an effect that sufficient illuminance from the UV light source is provided without causing illuminance unevenness, and sufficient surface modification is performed to improve adhesiveness.

According to a fourth embodiment of the present invention, in any one of the first to third embodiments, the sheet is a ceramic green sheet.

As a result, it is possible to provide a ceramic green sheet laminate with high adhesion, and as a result, it is possible to provide an electronic component made of a laminated ceramic with little lamination deviation.

According to a fifth embodiment of the present invention, in any one of the first to fourth embodiments, the stacking device further comprises a fixing unit for fixing the stacked sheets.

This has the effect of further fixing the stacked sheets so that they do not shift.

According to a sixth embodiment of the present invention, in the fifth embodiment, the fixing unit includes a charger and a neutralizer for irradiating charged particles onto the sheets stacked on the stacking stage. be.

As a result, the charged particles are incident on the transport holder, the sheets transported by the holder, and the sheets stacked on the stacking stage, thereby fixing the stacked structure.

A seventh embodiment of the present invention is
A step of providing a sheet in which a polymer sheet to be modified by UV irradiation is exposed on at least a part of an adhesive surface to a UV irradiation stage; providing the UV-irradiated sheet to an alignment stage; aligning the sheet on the alignment stage; and transporting the aligned sheet from the alignment stage to a stacking stage by a transport holder. and stacking the aligned sheets on the stacking stage.

As a result, it is possible to easily modify the surface of the sheet in the air without destroying the surface, thereby producing a laminate having high adhesion.

According to an eighth embodiment of the present invention, in the seventh embodiment, the UV-irradiated sheet is irradiated with charged particles from a charger before the sheet is laminated on the lamination stage. It further includes the step of

This has the effect of further fixing the stacked sheets so that they do not shift.

A ninth embodiment of the present invention resides in that in the seventh or eighth embodiment, the integrated dose of UV irradiation is 1000 mJ/cm ² or more and 100000 mJ/cm ² or less.

As a result, the surface of the sheet is sufficiently reformed even in the atmosphere without destroying the surface of the sheet, and the adhesiveness can be improved.

According to a tenth embodiment of the present invention, in any one of the seventh to ninth embodiments, when the UV irradiation is performed, the distance between the sheet and the UV light source of the UV irradiation device is 5 mm or more and 50 mm. It consists in the following.

As a result, there is an effect that sufficient illuminance from the UV light source is provided without causing illuminance unevenness, and sufficient surface modification is performed to improve adhesiveness.

REFERENCE SIGNS LIST 10 stacking device 20 controller 30L1 _f sheet stocker 30L1 _f sheet stocker 30L3 _f sheet stocker 30L4 _f sheet stocker 30L5 _f sheet stocker 40 transport holder for stocker 42 lift mechanism 44 adsorption plate 46 air pipe 50 alignment stage 52 movement mechanism 53 stage plate 56 Alignment camera 60 Lamination carrier holder 62 Lift mechanism 64 Adsorption plate 66 Air pipe 68 Stage charger 70 Holder charger 72 Stage static eliminator 74 Holder static eliminator 80 Lamination stage 82 Air pipe 90 Crimping device 100 UV irradiation device 110 UV irradiation stage provided with a reversing mechanism 110a Suction plate 110b UV irradiation stage main body _f Protection film L Sheet L1 Sheet L2 Sheet L3 Sheet L4 Sheet L5 Sheet L1 f Sheet L2 _f with protective film Sheet L3 _f Sheet with protective film L4 _f Sheet with protective film L5 _f Sheet with protective film L1′ Modified portion of sheet L1 L2′ Modified portion of sheet L2 L3′ Modified portion of sheet L3 modified portion L4' modified portion of sheet L4 L5' modified portion of sheet L5

Claims (10)

A lamination device for sequentially laminating sheets in which a polymer sheet modified by UV irradiation is exposed on at least a part of the adhesive surface,
an alignment stage that aligns the sheet;
a stacking stage on which the aligned sheets are stacked;
a conveying holder that moves the sheet from the alignment stage to the stacking stage;
a UV irradiation device that irradiates the sheet with a wavelength of 350 nm or less,
The laminating apparatus, wherein the UV irradiation device is provided in front of the alignment stage, and the UV irradiation is performed before the alignment. 2. The laminating apparatus according to claim 1, wherein the cumulative irradiation dose of said UV irradiation is 1000 mJ/cm ^<2> or more and 1000000 mJ/cm ^<2> or less. 3. The lamination device according to claim 1, wherein the distance between the sheet and the UV light source of the UV irradiation device is 5 mm or more and 50 mm or less during the UV irradiation. 4. The lamination device according to any one of claims 1 to 3, wherein the sheet is a ceramic green sheet. The stacking device according to any one of claims 1 to 4, further comprising a fixing unit that fixes the stacked sheets. The fixing unit is provided between the UV irradiation device and the lamination stage, and includes a charger and a discharger for irradiating charged particles onto the sheets laminated on the lamination stage after the UV irradiation. Item 6. The lamination device according to item 5. providing to a UV irradiation stage a sheet having a polymer sheet exposed on at least a portion of an adhesive surface thereof, the polymer sheet being modified by UV irradiation;
a step of irradiating the sheet with a UV irradiation device at a wavelength of 350 nm or less;
providing the UV irradiated sheet to an alignment stage;
aligning the sheet on the alignment stage;
a step of conveying the aligned sheets from the alignment stage to a stacking stage by a conveying holder;
and c. laminating the aligned sheets on the lamination stage. 8. The lamination method according to claim 7, further comprising a step of irradiating the UV-irradiated sheet with charged particles from a charger before the sheet is laminated on the lamination stage. 9. The lamination method according to claim 7 or 8, wherein the cumulative dose of UV irradiation is 1000 mJ/cm2 or ^more and 100000 mJ/ ^cm2 or less. 10. The lamination method according to any one of claims 7 to 9, wherein the distance between the sheet and the UV light source of the UV irradiation device is 5 mm or more and 50 mm or less during the UV irradiation.

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