JP2014107380A - Method of manufacturing metal foil laminate and method of manufacturing solar cell module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow for quick formation of an electrode which can be connected electrically to a first metal foil, without performing chemical treatment for removing an oxide film, in a method for manufacturing a metal foil laminate.SOLUTION: A method for manufacturing a metal foil laminate including a substrate, a first metal foil, and a second metal foil comprises: a first laminate formation step S11 for forming a first laminate by fixing a first metal foil onto a substrate; an electrostatic attraction step S12 for generating an electrostatic attraction force distribution, for holding an electrode formation member including a second metal foil in a positional relationship corresponding to the arrangement pattern of electrode, on the surface of an electrostatic attraction stage, and attracting the electrode formation member to the surface of the electrostatic attraction stage; a second laminate formation step S13 for forming a second laminate by transferring the electrode formation member thus attracted onto the first metal foil with a conductive adhesive interposed therebetween; and a press bonding step S14 for bonding the first and second metal foils while interconnecting electrically, by hardening the conductive adhesive.

Description

  The present invention relates to a method for manufacturing a metal foil laminate and a method for manufacturing a solar cell module.

In recent years, solar power generation, which is a power generation system using natural energy, has been rapidly spread. For example, in the solar cell module 100 shown in FIG. 17, the solar cell module for performing photovoltaic power generation is for the translucent substrate 120 disposed on the light incident surface and the solar cell module disposed on the back surface side thereof. It has the base material (back sheet | seat) 110, and the many photovoltaic cell 130 sealed between the translucent board | substrate 120 and the base material 110 for solar cell modules. The solar battery cell 130 is sandwiched and sealed between a sealing film (resin) 140 such as an ethylene / vinyl acetate copolymer (EVA) film.
In such a solar cell module 100, a large number of solar cells 130 are electrically connected in series with the wiring material 150. Since the solar cell 130 is provided with a negative electrode on the front surface side which is the sunlight receiving surface 130a and a positive electrode on the rear surface side, when connected by the wiring member 150, wiring is formed on the light receiving surface of the solar cell 130. The material 150 overlapped, and there existed a fault which the area efficiency of photoelectric conversion fell.

Moreover, in the arrangement | positioning of an electrode mentioned above, since it became the structure where the wiring material 150 wraps around from the front side of the photovoltaic cell 130, there existed a possibility that the wiring material 150 might be disconnected by the difference in the thermal expansion coefficient of each member.
Therefore, Patent Documents 1 and 2 propose a back contact type solar cell in which both the positive electrode and the negative electrode are installed on the back surface of the cell. Solar cells of this system can be connected in series on the back surface of the cell, and the light receiving area on the cell surface is not sacrificed, and a reduction in light receiving rate and area efficiency of photoelectric conversion can be prevented. Moreover, since it is not necessary to have a structure in which the wiring material is wound around from the front side to the back side, disconnection of the wiring material due to the difference in the coefficient of thermal expansion of each member can be prevented.

  In such a solar cell module, a laminated body in which a metal foil that forms a wiring pattern for connecting to a solar battery cell is attached to the surface of an insulating base material via an insulating adhesive layer. A component structure formed by laminating on a back sheet for use is known.

Moreover, although copper foil is generally used as a material of metal foil, copper foil belongs to noble metals and is expensive. On the other hand, since aluminum foil is cheaper and cheaper than copper foil, the cost of metal foil can be reduced.
As a technique for forming a wiring pattern using a metal foil including a copper foil and an aluminum foil, for example, in Patent Document 3, a conductive pattern forming metal foil sheet having an insulating heat-sensitive adhesive layer is attached to an insulating substrate. A technique for punching into the shape of the wiring pattern after attaching is described.

JP 2005-11869 A JP 2009-111122 A JP 2007-76288 A

However, the prior art as described above has the following problems.
When a solar cell module is configured by wiring a back contact solar cell as described in Patent Documents 1 and 2 with a metal foil having a wiring pattern formed thereon, the aluminum foil described in Patent Document 3 is used. In the metal foil sheet used, an oxide film layer having insulating properties and poor solder wettability is usually formed on the aluminum surface. For this reason, there exists a problem that the connection electrode of a photovoltaic cell and aluminum foil cannot be electrically connected, for example using electroconductive connection materials, such as solder and silver paste.
For example, it may be possible to remove the oxide film layer on the surface of the aluminum foil by means of etching, plating, etc., but in this case, many chemical solutions and materials such as plating solution, etching solution, removal solution for each remaining chemical solution are required. Therefore, the process becomes complicated and the manufacturing cost is high.
Moreover, when the aluminum wiring pattern is processed by etching, plating, or the like, the chemical solution in each step is immersed in the insulating heat-sensitive adhesive layer, so that the heat-sensitive adhesive layer is deteriorated and reliability may be impaired.

  In addition, when the aluminum foil is plated, the entire surface of the aluminum foil is processed. Therefore, when joining with the solar battery cell, the conductive connecting material flows on the aluminum foil and the solar battery cell There was also a problem that the installation accuracy deteriorated.

It is also conceivable to secure solderability with the solar battery cell on the metal foil by laminating the metal foil on the surface of the aluminum foil via a conductive adhesive.
However, in this case, it is necessary to align and arrange the conductive adhesive and the metal foil at a number of locations according to the number of connection electrodes at positions corresponding to the connection electrodes on the back surface of the solar battery cell.
For this reason, for example, when a metal foil is arranged on a huge aluminum foil of about 2 m × 1.5 m, there is a problem that it takes time to arrange the conductive adhesive and the metal foil. .

  The present invention has been made in view of such a problem, and even when the first metal foil is made of a metal foil having an oxide film on the surface, an electrode portion that can be electrically connected to the first metal foil, It aims at providing the manufacturing method of the metal foil laminated body and the manufacturing method of a solar cell module which can be formed rapidly, without performing the chemical | medical solution process for oxide film removal.

  In order to solve the above problems, a method for producing a metal foil laminate according to the first aspect of the present invention includes a sheet-like base material, and a first metal foil that is fixed on the base material, A method for producing a metal foil laminate comprising: an electrode portion including a second metal foil that is fixed on the first metal foil so as to be electrically connected to the first metal foil. A first laminated body forming step of forming a first laminated body including the base material and the first metal foil, and at least for forming the electrode portion. The electrode part forming member is generated by generating an electrostatic attraction force distribution on the surface of the electrostatic adsorption stage for holding the electrode part forming member including the second metal foil in a positional relationship corresponding to the arrangement pattern of the electrode part. An electrostatic adsorption step of adsorbing a member to the surface of the electrostatic adsorption stage; and Positioning on the first metal foil of one laminated body, the electrode part forming member adsorbed on the electrostatic adsorption stage is transferred onto the first metal foil in a state through a conductive adhesive. A second laminated body forming step of forming a second laminated body, and heating the second laminated body and pressing in the laminating direction to cure the conductive adhesive, And a press bonding step of bonding the second metal foil to each other in a conductive state.

  In the manufacturing method of the metal foil laminate, in the electrostatic adsorption step, a through-hole in which the electrode part forming member can be accommodated is formed on the electrostatic adsorption surface that forms a substantially uniform electrostatic attraction force distribution. It is preferable to generate the electrostatic attraction force distribution by providing an insulating sheet formed in accordance with the arrangement pattern of the portions.

  In the method for manufacturing the metal foil laminate, it is preferable that the insulator sheet is provided such that a height of the surface from the electrostatic adsorption surface is lower than a thickness of the electrode part forming member.

  In the manufacturing method of the metal foil laminate, in the first laminate forming step, the first laminate is formed by laminating a sheet member on the side of the base opposite to the first metal foil. Is preferred.

  In the metal foil laminate manufacturing method, in the first laminate forming step, a metal foil sheet covering the base material is stacked and fixed on the base material, and then a part of the metal foil sheet is removed and processed. By doing so, it is preferable to form the first metal foil having a pattern-formed shape.

  In the manufacturing method of the metal foil laminate, in the first laminate forming step, the first metal foil is formed by stacking and fixing a metal foil sheet covering the substrate on the substrate, It is preferable to provide a pattern forming step of removing a part of the first metal foil and forming a pattern on the first metal foil after the press bonding step.

  The manufacturing method of the solar cell module of the 2nd aspect of this invention is a metal foil laminated body which manufactures the said metal foil laminated body with the manufacturing method of the said metal foil laminated body which has the said 1st metal foil in which the pattern was formed. A manufacturing process, the metal foil laminate, a conductive connection material disposed on the second metal foil of the metal foil laminate, and a connection electrode provided on the back surface are aligned on the conductive connection material. The disposed solar battery cell, a sealing material disposed between the metal foil laminate and the back surface of the solar battery cell and on the light receiving surface of the solar battery cell, and the metal foil laminate on the sealing material A solar cell module laminate forming step of forming a solar cell module laminate by laminating a translucent front plate disposed at a position covering the body, and laminating the solar cell module laminate, and being heated at that time Depending on the conductive connecting material Serial second metal foil and a said connection electrode of the solar cell are electrically connected, and a method and a laminating lamination step of forming a solar cell module.

  In the method for manufacturing the solar cell module according to the third aspect of the present invention, the metal foil sheet covering the base material is bonded onto the base material, and then a part of the metal foil sheet is removed to process the pattern. Forming the first metal foil of the formed shape to form a first laminate including the base material and the first metal foil, and at least to form an electrode portion; Generating an electrostatic attraction force distribution on the surface of the electrostatic adsorption stage for holding the electrode part forming member including the second metal foil in a positional relationship corresponding to the arrangement pattern of the electrode part; Is attracted to the electrostatic adsorption stage by positioning the electrostatic adsorption stage on the first metal foil of the first laminate. The electrode part forming member is interposed via a conductive adhesive. A second laminate forming step of transferring the first laminate onto the first metal foil to form a second laminate, and arranging the second laminate on the second metal foil of the second laminate. A conductive cell, a solar cell in which a connection electrode provided on the back surface is arranged on the conductive material, and the solar cell between the second stacked body and the back surface of the solar cell. A solar cell module laminate is formed by laminating a sealing material arranged on the light receiving surface of the cell and a translucent front plate arranged at a position covering the second laminated body on the sealing material. Laminating the solar cell module laminate and the solar cell module laminate, and pressing the first metal foil and the second metal foil in the laminating direction through the conductive adhesive Conducting and heating the second metal by the heated conductive connecting material And the connection electrode of the solar cell electrically connected to, and a method and a laminating lamination step of forming a solar cell module.

  According to the method for manufacturing a metal foil laminate and the method for manufacturing a solar cell module according to the present invention, after the electrode part forming member is adsorbed to the positional relationship corresponding to the arrangement pattern of the electrode part by the electrostatic adsorption stage, conductive bonding In order to form the second laminated body by transferring the electrode part forming member onto the first metal foil of the first laminated body with the agent interposed therebetween, and press and bond the second laminated body in the laminating direction. Even when one metal foil is made of a metal foil having an oxide film on the surface, an electrode portion that can be electrically connected to the first metal foil is formed quickly without performing chemical treatment for removing the oxide film. There is an effect that can be.

It is typical sectional drawing which shows schematic structure of the solar cell module manufactured by the manufacturing method of the solar cell module of embodiment of this invention, and the metal foil laminated body used for this. It is a typical top view which shows schematic structure of the metal foil laminated body manufactured by the manufacturing method of the metal foil laminated body of embodiment of this invention. It is a flowchart which shows an example of the process flow of the manufacturing method of the solar cell module of embodiment of this invention. It is a flowchart which shows an example of the process flow of the manufacturing method of the metal foil laminated body of embodiment of this invention. It is process explanatory drawing of the 1st laminated body formation process of the manufacturing method of the metal foil laminated body of embodiment of this invention. It is the exploded view and sectional drawing which show an example of the manufacturing method of the electrostatic adsorption stage used for the electrostatic adsorption process of the manufacturing method of the metal foil laminated body of embodiment of this invention. It is a top view of the insulating sheet of the electrostatic attraction stage used for the manufacturing method of the metal foil laminated body of embodiment of this invention. It is process explanatory drawing of the electrostatic adsorption process of the manufacturing method of the metal foil laminated body of embodiment of this invention. It is process explanatory drawing of the 2nd laminated body formation process of the manufacturing method of the metal foil laminated body of embodiment of this invention. It is process explanatory drawing of the press bonding process of the manufacturing method of the metal foil laminated body of embodiment of this invention. It is typical sectional drawing which shows the state which laminated | stacked the sheet | seat member on the 2nd laminated body press-bonded with the manufacturing method of the metal foil laminated body of embodiment of this invention. It is process explanatory drawing of the solar cell module laminated body formation process of the manufacturing method of the solar cell module of embodiment of this invention. It is process explanatory drawing of the lamination | stacking lamination process of the manufacturing method of the solar cell module of embodiment of this invention. It is a flowchart which shows the process flow of the manufacturing method of the metal foil laminated body of the 1st modification of embodiment of this invention. It is typical sectional drawing which shows schematic structure of the metal foil laminated body manufactured by the manufacturing method of the metal foil laminated body of the 2nd-4th modification of embodiment of this invention. It is a flowchart which shows the process flow of the manufacturing method of the solar cell module of the 5th modification of embodiment of this invention. It is typical sectional drawing which shows an example of a structure of the solar cell module of a prior art.

Below, the manufacturing method of the metal foil laminated body of the embodiment of this invention and the manufacturing method of a solar cell module are demonstrated with reference to an accompanying drawing.
FIG. 1 is a schematic cross-sectional view showing a schematic configuration of a solar cell module manufactured by a method for manufacturing a solar cell module according to an embodiment of the present invention and a metal foil laminate used for the solar cell module.
FIG. 2 is a schematic plan view showing a schematic configuration of the metal foil laminate produced by the method for producing a metal foil laminate of the embodiment of the present invention.

First, an example of a metal foil laminate and a solar cell module produced by the method for producing a metal foil laminate and the method for producing a solar cell module of the present embodiment will be described.
As shown in FIG. 1, the solar cell module 50 manufactured by the method for manufacturing a solar cell module according to the present embodiment has a wiring connection on the back surface 20c side opposite to the light receiving surface 20b that receives light for power generation. Solar cell 20 provided with a plurality of electrodes 20a, metal foil laminate 10 for wiring solar cell 20, and laminated on metal foil laminate 10 and solar cell 20 to seal solar cell 20 And a translucent substrate 40 (translucent front plate) laminated on the encapsulant 30.
Here, the metal foil laminated body 10 is manufactured by the manufacturing method of the metal foil laminated body of this embodiment.

The solar battery cell 20 generates electric power by photoelectrically converting the light incident from the light receiving surface 20b. If the solar battery cell is a so-called back contact type solar battery provided with the connection electrode 20a on the back surface 20c, an appropriate method is used. Can be adopted. Although FIG. 1 is a schematic diagram, the illustration is simplified. However, the number of connection electrodes 20a can be appropriately set to two or more as necessary.
Moreover, as shown in a two-dot chain line in FIG. 2, for example, an appropriate shape such as a rectangular shape in a plan view can be adopted as the plan view shape of the solar battery cell 20. Although not shown in FIGS. 1 and 2, a plurality of solar cells 20 in the solar cell module 50 are arranged adjacent to each other with a gap along the surface direction of the metal foil laminate 10. ing.

  As shown in FIG. 1, the metal foil laminate 10 includes a back sheet 6 (sheet member), a base material 1, an insulating adhesive layer 2, an aluminum foil 3 (first metal foil), and a conductive adhesive layer 4 ( The conductive adhesive) and the copper foil 5 (second metal foil, electrode part) are laminated in this order.

The back sheet 6 constitutes one outer surface in the stacking direction of the metal foil laminate 10, and moisture, oxygen, and the like enter the inside of the metal foil laminate 10 and the solar cell module 50. It is a sheet-like member for suppressing. For this reason, the back sheet 6 has a barrier function as a shield material.
As a material of the back sheet 6, an appropriate resin material having excellent barrier property against moisture and oxygen, an aluminum foil, or a composite laminated film of an aluminum foil and an appropriate resin can be used.

The base material 1 is a member formed by laminating on the back sheet 6 and supporting the aluminum foil 3 via the insulating adhesive layer 2. In the present embodiment, the base material 1 is composed of a flexible sheet-like member. Is done. Moreover, it is preferable that the base material 1 consists of a material excellent in electrical insulation.
For example, the base material 1 can employ a resin material formed into a sheet or film.
As a material of the base material 1, for example, a resin material such as acrylic, polycarbonate, polyethylene terephthalate, polyethylene naphthalate, polyimide, urethane, epoxy, melamine, styrene, or a resin material obtained by copolymerization thereof can be used. .
Moreover, the material of the base material 1 can also use the material which mixed the organic filler or the inorganic filler etc. as needed for control of heat insulation, elasticity, or an optical characteristic.
The substrate 1 can also employ a laminated film in which a plurality of the above resin materials are laminated, or a composite laminated film in which a layer of the above resin material and a metal foil such as an aluminum foil are laminated. is there.
In addition, for example, when the above-mentioned composite laminated film is used, the back sheet 6 is deleted when the base material 1 has the necessary strength and moisture or oxygen barrier properties as the outer surface of the solar cell module 50. And it is good also as a structure in which the base material 1 serves as the function of the back sheet | seat 6. FIG.

  The insulating adhesive layer 2 is a layered portion for fixing the aluminum foil 3 to the surface of the base material 1. For example, urethane, acrylic, epoxy, polyimide, olefin, which is a curable resin, or a copolymer thereof. It is formed by curing the cured curable adhesive. The kind of curable adhesive is not specifically limited, For example, a thermosetting adhesive, a UV curable adhesive, etc. can be employ | adopted suitably. Moreover, you may use the adhesive layer which is not a step hardening type as the insulating adhesive layer 2. FIG.

The aluminum foil 3 forms a wiring pattern for wiring the solar cells 20. The aluminum foil 3 has an appropriate plan view shape depending on the arrangement of the connection electrodes 20 a of the solar cells 20, and the insulating adhesive layer 2 is interposed therebetween. The base material 1 is laminated and joined to the base material 1 integrally.
As a wiring pattern of the aluminum foil 3, for example, as shown in FIG. 2, four linear portions 3 a ₁ , 3 a ₂ , 3 a ₃ , 3 a ₄ (hereinafter referred to as linear portions 3 a ₁ to 3) having a substantially constant line width. 3a ₄ ) may be described as a comb-like portion 3A arranged in a comb-like shape, and four linear portions 3b ₁ , 3b ₂ , 3b ₃ , 3b ₄ (which have a substantially constant line width). Hereinafter, the linear portions 3b _{1 to} 3b ₄ may be described as comb-like portions 3B arranged in a comb-tooth shape, and these comb-tooth-like portions 3A and 3B are mutually connected. An example of the pattern that penetrates into the gap between the shaped parts and is arranged in close proximity to each other can be given.
In this example, the comb-like portions 3A and 3B correspond to the positive electrode wiring and the negative electrode wiring of the power generation output, respectively. Further, above the comb-like portions 3A and 3B (on the translucent substrate 40 side), as shown by a two-dot chain line in FIG. 2, the solar battery cell 20 is positioned so as to cover the comb-like portions 3A and 3B from above. Is placed. At such a connection position, the solar battery cell 20 includes a total of 24 connection electrodes 20a (two points in FIG. 2), three above each of the linear portions 3a _{1 to} 3a ₄ and 3b _{1 to} 3b ₄ . (See chain line).
On each linear portion _3a of each pattern of the aluminum foil _{3 1 ~3a 4, 3b 1 ~3b} 4 is a opposable position to the connection electrode 20a, through the conductive adhesive layer 4 (see FIG. 1) the copper foil Three pieces of 5 are bonded.
In addition, the shape of the pattern of the aluminum foil 3 shown in FIG. 2 and the number and arrangement of the connection electrodes 20a of the solar battery cells 20 are examples and are not limited thereto.

  As a material of the aluminum foil 3, it is desirable to use, for example, high-purity aluminum such as 1N30 material or 1100 material in order to ensure as good electrical conductivity as possible.

The conductive adhesive layer 4 adheres the copper foil 5 to the aluminum foil 3 so that the copper foil 5 and the aluminum foil 3 are electrically connected, and is a conductive adhesive used for electrical element mounting. Alternatively, a conductive adhesive film can be used. As an example, for example, a film in which metal particles are mixed in an epoxy-based cured resin can be used.
In the present embodiment, the conductive adhesive layer 4 is made of a conductive adhesive or a conductive adhesive film containing at least one of zinc particles and nickel particles. Here, zinc particles (nickel particles) mean zinc (nickel) having a purity of 99% or more or zinc alloy (nickel alloy) particles containing 90% or more of zinc (nickel).
The inventor presses zinc particles (nickel particles) against the surface of the aluminum foil 3 even when the oxide film layer is formed on the surface of the aluminum foil 3. The inventors have found that conductivity can be obtained by contacting the aluminum portion, and have reached the present invention. This is because stress concentration occurs at the contact portion when a conductive particle such as metal is pressed against aluminum, and if it has a certain degree of hardness, it is formed in a thin layer on the surface of the aluminum foil 3. This is because the particle body penetrates into the aluminum foil 3 through the aluminum oxide film, and the surface of the aluminum and the particle body is in direct contact.

Since the conductive particles contained in the conductive adhesive layer 4 are inexpensive, zinc particles and nickel particles are particularly preferable. However, the particles are not limited to zinc or nickel, and may contain other metal particles. . For example, it is more preferable to contain particles such as silver and copper because the conductivity is increased.
Moreover, you may contain the particle body which consists of alloys containing metals, such as zinc, nickel, copper, silver, and gold | metal | money.
In particular, when the conductive connecting material 7 is made of silver paste or solder, the metal particles may be particles whose surfaces are plated with gold or silver. In this case, better reliability can be maintained even in a high-temperature and high-humidity environment test or the like.

In addition, the conductive particles contained in the conductive adhesive layer 4 have a particle size and hardness that can break through the oxide film layer, and at least the surface has conductivity, the metal particles It is not limited to the body.
For example, particles that are made of a polymer or inorganic particles are plated with a metal having good conductivity such as zinc, nickel, copper, silver, gold, etc. May be included.
The particle size of the conductive particles contained in the conductive adhesive layer 4 is desirably larger than the surface roughness of the copper foil 5 and the aluminum foil 3. Thereby, the copper foil 5 and the aluminum foil 3 can be stably connected.

As an example of the conductive adhesive layer 4, a configuration in which at least one of zinc particles and nickel particles is contained in a curable adhesive that is a curable resin such as urethane, acrylic, epoxy, polyimide, olefin, or a copolymer thereof. Can be mentioned.
In the conductive adhesive layer 4, a particularly suitable configuration is a conductive film in which metal particles are mixed in an epoxy-based cured resin.
The conductive adhesive layer 4 may use a conductive adhesive or a conductive adhesive film that is used for mounting electrical elements on a printed circuit board as long as it contains at least one of zinc particles and nickel particles. it can.

The copper foil 5 is connected to the connection electrode 20a via the conductive connecting material 7 on the surface on the solar cell 20 side, and has an appropriate size and shape on which the conductive connecting material 7 necessary for connection can be placed. , Is formed. The shape of the copper foil 5 is designed according to the connection electrode 20a. For example, a circle, a rectangle, a hexagon, or the like can be used. Further, depending on the shape of the aluminum foil 3, for example, a comb-like pattern similar to that of the aluminum foil 3 can be adopted.
However, since the copper foil 5 and the conductive adhesive layer 4 increase costs, it is desirable to make the installation area as small and thin as possible.
Specifically, the cost increase can be minimized by installing the solar cell module 50 just below the connection electrode 20a. For this reason, it is desirable to optimize the shape of the copper foil 5 in plan view according to the shape of the connection electrode 20a.
In this embodiment, the plan view shape of the copper foil 5, as an example, a circular shape with a diameter d ₅ is the outer diameter substantially the same diameter of the connection electrode 20a.

The conductive connecting material 7 is not particularly limited as long as electrical connection between the copper foil 5 and the connection electrode 20a is possible. Preferable examples of the conductive connecting material 7 include solder and conductive paste. As an example of the conductive paste, a silver paste containing silver particles can be given.
As the solder, a solder containing tin, silver, copper, bismuth, lead, a flux component or the like can be used.
As the silver paste, a paste containing silver particles in a silicone-based cured resin, an epoxy-based cured resin, a urethane-based cured resin, an acrylic-based cured resin, or the like can be used.
A well-known method can be used for the solder melting method and the silver paste hardening method depending on the respective materials. For example, techniques such as hot air reflow, IR reflow, oven heating, hot plate heating, and vacuum pressure lamination can be used.

In the present embodiment, as an example, the shape of the copper foil 5 is formed in a circular shape in plan view as shown in FIG.
In the present embodiment, the copper foil 5 is arranged at the center of the line width of each of the linear portions 3a _{1 to} 3a ₄ and 3b _{1 to} 3b ₄ , whereby the outer peripheral side of the copper foil 5 is aluminum over the entire circumference in plan view. The positional relationship is surrounded by the foil 3.
For this reason, for example, when the conductive connecting material 7 is a solder, the melted solder has poor wettability with respect to the aluminum foil 3. In this state, it rises and remains on the surface of the copper foil 5. Thereby, on the metal foil laminated body 10, since the position of the solder is fixed, the position shift of the joining position of the photovoltaic cell 20 can be suppressed.
Moreover, as a material of the copper foil 5, an appropriate copper foil used for electric wiring can be used.

If the sealing material 30 can seal and insulate the photovoltaic cell 20 on the insulating adhesive layer 2 of the aluminum foil 3 and the metal foil laminated body 10, it can be comprised from a suitable material. Examples of suitable materials for the sealing material 30 include an ethylene / vinyl acetate copolymer (EVA) film.
In this embodiment, as will be described later, the sealing material 30 is formed by laminating and laminating two or more EVA films so as to sandwich the solar battery cell 20.

  The translucent substrate 40 is a member that guides incident light to the light receiving surface 20 b of the solar battery cell 20 and forms an outer surface opposite to the back sheet 6 in the solar battery module 50. In this embodiment, the structure which adhere | attached the glass panel on the surface of the sealing material 30 is employ | adopted.

Next, a method for manufacturing the solar cell module 50 having such a configuration will be described.
FIG. 3 is a flowchart showing an example of a process flow of the method for manufacturing the solar cell module according to the embodiment of the present invention. FIG. 4 is a flowchart showing an example of a process flow of the method for manufacturing the metal foil laminate according to the embodiment of the present invention.

  As shown in FIG. 3, the manufacturing method of the solar cell module 50 includes a metal foil laminate manufacturing step S1, a solar cell module laminate forming step S2, and a laminate laminating step S3, and performing these steps in this order. is there.

Metal foil laminated body manufacturing process S1 is a process of manufacturing metal foil laminated body 10, and as shown in FIG. 4, 1st laminated body formation process S11, electrostatic adsorption process S12, 2nd laminated body formation process S13, And press bonding process S14 is performed in this order.
FIGS. 5A, 5 </ b> B, and 5 </ b> C are process explanatory views of a first laminate forming process of the method for manufacturing a metal foil laminate according to the embodiment of the present invention. 6A and 6B are an exploded view and a cross-sectional view showing an example of a method for manufacturing an electrostatic adsorption stage used in the electrostatic adsorption step of the method for manufacturing a metal foil laminate according to the embodiment of the present invention. FIG. 7 is a plan view of an insulating sheet of an electrostatic adsorption stage used in the method for manufacturing a metal foil laminate according to the embodiment of the present invention. FIGS. 8A and 8B are process explanatory diagrams of an electrostatic adsorption process of the method for manufacturing a metal foil laminate according to the embodiment of the present invention. FIGS. 9A, 9B, and 9C are process explanatory views of a second laminate forming process of the method for manufacturing a metal foil laminate according to the embodiment of the present invention. FIG. 10 is a process explanatory diagram of a pressure bonding process of the method for manufacturing a metal foil laminate according to the embodiment of the present invention. FIG. 11 is a schematic cross-sectional view showing a state in which a sheet member is laminated on the second laminate that is pressure-bonded by the method for producing a metal foil laminate according to the embodiment of the present invention.

1st laminated body formation process S11 is the process of forming the 1st laminated body 56 (refer FIG.5 (c)) which overlaps and fixes the aluminum foil 3 on the base material 1, and contains the base material 1 and the aluminum foil 3. FIG. is there.
In the present embodiment, first, as shown in FIG. 5A, an aluminum foil sheet 53 (metal foil sheet) is laminated and bonded to the base material 1 via the insulating adhesive layer 2 to form a laminate to be processed. Form body 54.
The aluminum foil sheet 53 is a sheet member for forming the aluminum foil 3, and is a sheet member having a size that covers the substrate 1 with the same material and thickness as the aluminum foil 3. For this reason, the aluminum foil sheet 53 is different from the aluminum foil 3 only in that the wiring pattern is not formed.
Next, as shown in FIG. 5B, a resist 55 corresponding to the wiring pattern is formed by patterning on the surface of the aluminum foil sheet 53 of the processed laminate 54, and the resist 55 is covered by chemical etching. The aluminum foil sheet 53 that is not covered is etched to remove the aluminum foil sheet 53 at a portion that is not covered with the resist 55.
In this chemical etching, if an aluminum etching solution residue remains on the insulating adhesive layer 2, it causes electric migration. Therefore, it is desirable to include a residue removing step.
After the etching is completed, the resist 55 on the aluminum foil 3 is removed.
Thus, as shown in FIG. 5 (c), the aluminum foil 3 forming the wiring pattern is laminated on the insulating adhesive layer 2, and the base material 1, the insulating adhesive layer 2, A first laminated body 56 in which the aluminum foil 3 is laminated is formed.
At this time, when the surface of the aluminum foil 3 is exposed to the atmosphere, an oxide film layer is formed on the aluminum foil 3. However, in this embodiment, the chemical treatment for removing the oxide film layer is not performed.
Above, 1st laminated body formation process S11 is complete | finished.

  In this step, the method for forming the pattern of the aluminum foil 3 is not limited to etching. For example, the aluminum foil 3 can be formed by punching the aluminum foil sheet 53 of the laminated body 54 to be processed with a mold having a shape that matches the pattern.

Next, electrostatic adsorption process S12 is performed. In this step, since the copper foil 5 serving as the electrode part is disposed on the aluminum foil 3, an electrode part forming member including at least the copper foil 5 is statically placed on the electrostatic adsorption stage 60 (see FIG. 6B) described later. This is a step of performing electroadsorption and maintaining the positional relationship corresponding to the arrangement pattern of the copper foil 5 on the metal foil laminate 10.
In the present embodiment, as an example of the electrode portion forming member, the circular electrode portion forming member 64 having an outer diameter d ₅ comprised a laminate of the copper foil 5 and the conductive adhesive layer 4 (see etc. to FIG. 8 (a)) Adopted.

Although the circuit of the application of the solar cell module 50 depends on the configuration of the solar cells 20 and the number of solar cells 20 used, for example, the size is about 1 m × 2 m. For this reason, the range in which the base material 1 and the aluminum foil 3 are formed is also about the same size. In this case, the number of connection electrodes 20a of the solar battery cell 20 is about 2000.
Therefore, about 2000 copper foils 5 respectively connected to the connection electrodes 20a need to be arranged.
In the present embodiment, using such an electrostatic adsorption stage corresponding to the size of the solar cell module 50, these copper foils 5 are collectively aligned and stacked on the aluminum foil 3.

As shown in FIGS. 6A and 6B, the main part of the electrostatic adsorption stage 60 used in this step is
It has the structure by which the insulator sheet 62 was affixed on the surface of the stage main body 61 which generate | occur | produces an electrostatic attraction force.
As the electrostatic adsorption stage, a Coulomb force type and a Johnson-Labeck force type are known depending on the adsorption method, and the stage main body 61 of this embodiment adopts the Coulomb force type.
That is, the stage main body 61 has an electrostatic attraction surface 61a made of an insulating material, and a large number of electrodes (not shown) are arranged on the inner side in the vicinity of the electrostatic attraction surface 61a. In these electrodes, positive electrodes and negative electrodes are alternately arranged. When a voltage is applied to each electrode, an electric field is generated in the vicinity of the electrostatic attraction surface 61a.
At this time, if the object to be attracted approaches the electrostatic attraction surface 61a, surface polarization occurs in the object to be attracted by an electric field, and a charge distribution opposite to each electrode is generated on the object to be attracted. The object to be attracted is attracted to the electrostatic attraction surface 61a by the Coulomb force generated between the surface charge and the electrode in the stage body 61.
For this reason, the stage main body 61 can generate a substantially uniform electrostatic attraction force on the electrostatic attraction surface 61a when the insulator sheet 62 is not attached. Here, “substantially uniform” means that the electrostatic attraction force may vary in a microscopic manner, but the object to be attracted can be electrostatically attracted at any position on the electrostatic attraction surface 61a. doing.

The insulator sheet 62 is a member for controlling the electrostatic attraction force distribution on the electrostatic attraction surface 61 a and guiding the side portion of the electrode portion forming member 64. In the present embodiment, as shown in FIG. 6 (a), FIG. 7, provided on the resin sheet having a thickness of t _62, the arrangement pattern of the copper foil 5, a through hole 62a which is formed in accordance with the arrangement number penetrates It has been. The inner diameter d _62a of the through hole 62a, it is necessary to be larger than the outer diameter d ₅ of the copper foil 5, as the copper foil 5 can be accurately positioned, it is preferably close to d _5. For example, d _62a -d ₅ is preferably about 100 μm or less. In the present embodiment, as an example, the value of the inner diameter d _62a is larger than the outer diameter d ₅ of the copper foil ₅ by 100 μm.

One surface 62b of the insulator sheet 62 is electrostatically attracted via an adhesive (not shown) so that the insulator sheet 62 is in close contact with the electrostatic attracting surface 61a even when voltage application to the electrodes of the stage body 61 is stopped. 61a (see FIG. 6B). Thereby, even if the adsorption operation of the electrostatic adsorption stage 60 is stopped, the insulator sheet 62 is not peeled off or displaced.
The thickness t ₆₂ of the insulating sheets 62, the sum of the thickness of the adhesive used in the pasted, is to become thinner than the thickness the thickness t ₆₄ of the electrode portion forming member 64 _(see FIG. 8 (a)) Yes.
For this reason, in the present embodiment, the surface of the electrostatic adsorption stage 60 is formed with a concave hole portion 60a having a circular shape in plan view surrounded by the through hole 62a and the electrostatic adsorption surface 61a.
Examples of the material of the insulator sheet 62 include insulating films such as PET (polyethylene terephthalate) film, PEN (polyethylene naphthalate) film, and polycarbonate film.

As shown in FIG. 8A, when a voltage is applied to an electrode (not shown) of the stage body 61 (hereinafter referred to as “applying a voltage to the electrostatic adsorption stage 60”), the stage main body 61 comes into close contact with the electrostatic adsorption surface 61a. As a result of the surface polarization of the surface 62b of the insulating sheet 62 and a charge opposite to that generated in the electrode in the stage body 61 being induced, a Coulomb force acting as an attractive force toward the electrode acts on the insulating sheet 62.
At this time, since the electric field generated between the electrodes of the stage main body 61 is weak, the surface 62c opposite to the surface 62b of the insulator sheet 62 is not surface-polarized or is surface-polarized, even if the surface is polarized. No electrostatic attraction force capable of electrostatically attracting 64 is generated.
As a result, the effective electrostatic attraction force distribution on the surface of the electrostatic adsorption stage 60 is generated only in the portion of the electrostatic adsorption surface 61a that constitutes the bottom of the recessed hole portion 60a. The electrode part forming member 64 can be electrostatically adsorbed in the recessed hole part 60a.

In order to electrostatically attract the electrode part forming member 64 to the electrostatic suction stage 60, first, as shown in FIG. 8A, the electrode part forming member 64 with the copper foil 5 facing upward is placed on the tray 63. To place.
The tray 63 is formed with a section wider than the electrode portion forming member 64 so that the electrode portion forming member 64 can be disposed at a position substantially opposite to the recessed hole portion 60a when the electrostatic adsorption stage 60 is disposed above the tray 63. The partition part 63a to perform is provided. For this reason, when the electrode part forming member 64 is dispersed with the conductive adhesive layer 4 facing down on the tray 63 and vibration is applied to the tray 63, the electrode part forming member 64 moves into the section surrounded by the partition part 63a. Then, one electrode part forming member 64 is arranged in each section.
At that time, if the conductive adhesive layer 4 has adhesive strength, the electrode portion forming member 64 may adhere to the tray 63 and be disposed across the partition portion 63a, or two or more may overlap. Conceivable. For this reason, in this process, it is preferable that the ambient temperature of the tray 63 and its surroundings is a temperature at which the adhesive force of the conductive adhesive layer 4 to the tray 63 can be suppressed. For example, when the conductive adhesive layer 4 is highly sticky at room temperature, the stickiness of the conductive adhesive layer 4 can be suppressed by controlling the temperature of the atmosphere of the tray 63 and its surroundings to about 5 ° C., for example. preferable.
Further, in order to prevent the conductive adhesive layer 4 from sticking, the surface of the tray 63 can be processed with fluorine.

Next, a voltage is applied to the electrostatic adsorption stage 60, and the electrostatic adsorption stage 60 is moved closer to the tray 63 from above while being swung in the horizontal biaxial direction. As shown in FIG. 8B, when the electrostatic attraction stage 60 approaches to a distance where the electrostatic attraction force generated on the electrostatic attraction surface 61a in the concave hole 60a acts on the electrode portion forming member 64, the concave portion The electrode portion forming member 64 at a position facing the hole portion 60a is sucked, and the upper copper foil 5 is sucked to the electrostatic suction surface 61a.
At this time, even if the electrode portion forming member 64 is sucked in a state of protruding from the recessed hole portion 60a, the electrode portion forming member 64 cannot enter the recessed hole portion 60a, so that a sufficient electrostatic attraction force does not act, The electrostatic chucking stage 60 is dropped due to the swinging shock of the electrostatic chucking stage 60 or the like.
For this reason, the electrode part forming member 64 is attracted | sucked to the electrostatic attraction surface 61a only when attracted | sucked in the position just opposite to the recessed hole part 60a.

As described above, in the present embodiment, since the electrostatic attraction stage 60 is swung to perform the electrostatic attraction operation, the arrangement position of the electrode portion forming member 64 disposed on the tray 63 is the position of the electrostatic attraction stage 60. It is only necessary that the recessed hole portion 60a and the electrode portion forming member 64 can face each other within the moving range. For this reason, when the electrostatic adsorption stage 60 is stationary, it does not have to exactly coincide with the arrangement position of the connection electrode 20a in the solar battery cell 20.
Further, the electrostatic adsorption stage 60 and the tray 63 need only be relatively swung, and the tray 63 may be swung in the horizontal direction while the electrostatic adsorption stage 60 is lowered. Further, both the electrostatic adsorption stage 60 and the tray 63 may be swung.

The inner peripheral surface of the recessed hole portions 60a, since a through hole 62a having a slightly larger inner diameter d _62a than the outer diameter d ₅ of the electrode portion forming member 64, the electrode portion forming member 64 is guided to the recessed hole portions 60a , Electrostatically attracted while being positioned in the horizontal direction, and accommodated in the recessed hole portion 60a.
Moreover, since the thickness dimension of the electrode part formation member 64 is larger than the dimension from the electrostatic adsorption surface 61a to the surface 62c of the insulator sheet 62, the electroconductive adhesion layer 4 of the electrode part formation member 64 electrostatically adsorbed. This surface protrudes more than the surface 62c.
In addition, since no charge is generated on the surface 62c or a small amount is generated, the electrode portion forming member 64 at a position facing the surface 62c is not electrostatically attracted.
Further, when one electrode part forming member 64 is adsorbed in each recessed hole part 60a, the surface of the conductive adhesive layer 4 of the adsorbed electrode part forming member 64 is applied to the surface of the adsorbed electrode part forming member 64, as with the surface 62c of the insulator sheet 62. Since substantially no charge is generated, two or more electrode part forming members 64 are not adsorbed.

  Thus, when the electrode part formation member 64 is each adsorb | sucked to the recessed hole part 60a, electrostatic adsorption process S12 will be complete | finished.

Next, 2nd laminated body formation process S13 is performed. In this step, the electrostatic adsorption stage 60 is positioned on the aluminum foil 3 of the first laminated body 56, and the electrode part forming member 64 adsorbed on the electrostatic adsorption stage 60 is placed via the conductive adhesive layer 4. This is a step of forming a second laminated body by transferring onto the aluminum foil 3.
As shown in FIG. 9A, the electrostatic chucking stage 60 that sucks the electrode portion forming member 64 is placed at a predetermined position on the aluminum foil 3 on the first laminated body 56. Position to be placed in
For example, the first laminated body 56 is positioned and held with respect to a position reference on a holding table (not shown) based on the outer shape of the base material 1, the shape of a positioning portion appropriately formed, and the like. Then, by moving the position of the electrostatic adsorption stage 60 based on the coordinate system fixed to the holding table, the electrode part forming member 64 is positioned at a position where the electrode part is to be formed.
Since the mutual positional relationship between the electrode part forming members 64 is fixed by the through-holes 62a of the insulator sheet 62, the electrostatic chucking stage 60 determines the position of each electrode when the positional relationship with the first stacked body 56 is determined. The part forming member 64 is simultaneously positioned with respect to each aluminum foil 3.

Next, as shown in FIG. 9B, the electrostatic adsorption stage 60 is lowered to a position where the conductive adhesive layer 4 of each electrode part forming member 64 and the aluminum foil 3 are close to each other or abut against each other. The distance in the case where the electrodes are brought close to each other is a distance that can be dropped onto the aluminum foil 3 so that the holding position of the electrode portion forming member 64 does not change when the voltage application of the electrostatic adsorption stage 60 is stopped. For example, the distance between the surface 62c and the aluminum foil 3 is, if less than the thickness d ₆₄ of the electrode portion forming member 64, securely to the range of the inner diameter of the through hole 62a in the electrode portion forming member 64 from falling Since it falls, it is preferable.
In the present embodiment, the surface 62 c of the insulator sheet 62 is recessed more than the conductive adhesive layer 4 of the electrode part forming member 64 held by the electrostatic adsorption stage 60. For this reason, even if the electrostatic adsorption stage 60 is lowered to a position where the conductive adhesive layer 4 comes into contact with the aluminum foil 3, the surface 62 c of the insulator sheet 62 is at a position separated from the aluminum foil 3. Thereby, since the external force from the aluminum foil 3 does not act on the surface 62c, compared with the case where the surface 62c contacts the aluminum foil 3, the lifetime of the insulator sheet 62 can be improved.

Next, voltage application to the electrostatic adsorption stage 60 is stopped. Thereby, since the electrostatic attraction force acting on each electrode part forming member 64 disappears, even when the electrode part forming member 64 is separated from the aluminum foil 3, the conductive adhesive layer 4 is dropped by gravity. Laminated on the surface of the aluminum foil 3.
At this time, the temperature of the aluminum foil 3 and the ambient temperature around the aluminum foil 3 and the conductive adhesive layer 4 are preferably set to temperatures at which the adhesiveness of the conductive adhesive layer 4 is manifested. For example, the temperature of the aluminum foil 3 and the ambient temperature around the aluminum foil 3 and the conductive adhesive layer 4 are set to about 20 ° C. to 40 ° C.
Thereby, since the conductive adhesive layer 4 has a certain degree of tackiness, the position of the electrode portion forming member 64 on the aluminum foil 3 is easily stabilized.
From this state, as shown in FIG. 9C, the electrostatic adsorption stage 60 is moved upward. In this way, the electrode portion forming member 64 held on the electrostatic adsorption stage 60 is transferred to the surface of the aluminum foil 3, and the electrode portion forming member 64 is laminated on the aluminum foil 3 of the first laminate 56. A second laminated body 66 is formed.
Above, 2nd laminated body formation process S13 is complete | finished.

Thus, in this step, the electrode part forming member 64 electrostatically attracted in a state of being previously positioned on the electrostatic adsorption stage 60 on the aluminum foil 3 of the first laminated body 56 is collectively collected from the electrostatic adsorption stage 60. All the electrode part forming members 64 can be simultaneously transferred onto the first stacked body 56 by transferring them. For this reason, for example, compared with the case where the electrode part forming member 64 is positioned and arranged one by one on the aluminum foil 3 by using a robot or the like, the arrangement work can be performed more quickly. The manufacturing cost can be reduced.
Moreover, since the arrangement accuracy of each electrode part forming member 64 is determined by the positional accuracy of the through-hole 62a of the insulator sheet 62 and the alignment accuracy of the electrostatic attraction stage 60, the positional accuracy is excellent in reproducibility.
In the present embodiment, since a large number of electrode portion forming members 64 are electrostatically attracted at a time, it is conceivable that an adsorption failure may occur for some reason. For this reason, the formed second laminated body 66 is inspected for the absence of the electrode part forming member 64, and if there is a missing part, the electrode part forming member 64 is added.
Further, even if the positions of some of the electrode portion forming members 64 are displaced due to transfer failure or the electrode portion forming members 64 are reversed, in this step, the electrode portion forming members 64 are made of aluminum foil. 3 is laminated with its own weight and is not easily moved due to the adhesiveness of the conductive adhesive layer 4, so that the arrangement position can be individually corrected.

Next, the press bonding step S14 is performed. In this step, as shown in FIG. 10, the second laminated body 66 is heated and pressed in the laminating direction to cure the conductive adhesive layer 4, thereby electrically connecting the aluminum foil 3 and the copper foil 5 to each other. It is a process of bonding in a state.
In the present embodiment, as an example, the second laminate 66 is first heated and pre-laminated using an air release laminate roller, and then placed in a hot air oven to cure the conductive adhesive layer 4. The pressurizing conditions and heating conditions for heat curing by the heating prelaminate and hot air oven are appropriately set according to the characteristics of the conductive adhesive layer 4.

The temperature at the time of heating prelaminating is set to a temperature at which the conductive adhesive layer 4 has flexibility. At this time, the 2nd laminated body 66 receives a pressurization from an air release lamination roller, and the electroconductive particle body contained in the electroconductive contact bonding layer 4 closely_contact | adheres to the copper foil 5 or the aluminum foil 3. FIG. Thereby, especially on the surface of the aluminum foil 3, the conductive particles are brought into contact with the aluminum of the aluminum foil 3 by breaking through the oxide film. Similarly, when an oxide film is formed on the copper foil 5 side, the conductive particles contact the copper of the copper foil 5 by breaking through the oxide film.
As a result, due to the pressurization, the conductive particles in the conductive adhesive layer 4 come into contact with each other and break through the oxide film to contact the surfaces of the aluminum foil 3 and the copper foil 5 with the aggregate of conductive particles. The aluminum foil 3 and the copper foil 5 are electrically connected.

Next, the 2nd laminated body 66 is heated with a hot air oven, and the electroconductive contact bonding layer 4 is hardened. In the present embodiment, since the conductive adhesive layer 4 includes a thermosetting adhesive, the conductive adhesive layer 4 is heated and cured to the curing temperature of the adhesive.
When a solar cell module that does not require the back sheet 6 is manufactured, the second laminate 66 pressed and bonded in this way becomes a metal foil laminate for forming the solar cell module. For this reason, press bonding process S14 is complete | finished and it transfers to the solar cell module laminated body formation process S2 shown in FIG.
In this embodiment, since the solar cell module 50 has the back sheet 6, as shown in FIG. 11, the back sheet 6 is laminated | stacked on the 2nd laminated body 66, and the metal foil laminated body 10 is formed.
That is, the back sheet 6 is laminated on the side of the substrate 1 opposite to the conductive adhesive layer 4. As a method for laminating the back sheet 6, an appropriate laminating method according to the material of the back sheet 6 can be adopted. For example, the back sheet resin can be laminated by printing, or an aluminum foil or a composite laminated film of an aluminum foil and an appropriate resin can be bonded using an adhesive.
In this way, the metal foil laminate 10 is manufactured.
With the above, the press bonding step S14 is completed, and the metal foil laminate manufacturing step S1 is completed.

  According to the metal foil laminate 10 manufactured in this manner, the copper foil is disposed on the aluminum foil 3 having the wiring pattern at a position that can face the connection electrode 20a of the solar battery cell 20 via the conductive adhesive layer 4. The foil 5 is bonded. For this reason, even if it is the aluminum foil 3 in which the oxide film was formed in the surface, an oxide film is pierced by the particle body of the metal of at least one of the zinc particle and nickel particle which are contained in the electroconductive contact bonding layer 4. Thus, the aluminum foil 3 and the copper foil 5 are electrically connected. Therefore, in this embodiment, electrical connectivity can be improved without performing a chemical treatment that removes the oxide film on the surface of the aluminum foil.

Next, returning to the flow shown in FIG. 2, the solar cell module laminate forming step S <b> 2 is performed.
12 (a) and 12 (b) are process explanatory views of a solar cell module laminate forming step of the method for manufacturing the solar cell module according to the embodiment of the present invention.

In this step, as shown in FIGS. 12A and 12B, the metal foil laminate 10, the conductive connection material 7 disposed on the copper foil 5 of the metal foil laminate 10, and the connection electrode 20 a are electrically conductive. Sealing cells disposed on the connecting material 7 and positioned between the metal foil laminate 10 and the back surface 20c of the solar battery cell 20 and on the light receiving surface 20b of the solar battery cell 20, respectively. In this step, the solar cell module laminate 70 is formed by laminating the materials 30A and 30B and the translucent substrate 40 arranged at a position covering the metal foil laminate 10 on the sealing material 30B.
Here, the sealing materials 30A and 30B are sheet members made of the same material as the sealing material 30 and are integrated by heat melting in a laminating and laminating step S3 described later, so that the sealing material 30 of the solar cell module 50 is integrated. To form.
The sealing material 30 </ b> A is provided with a through hole 30 a into which the conductive adhesive layer 4 and the copper foil 5, which are electrode portions on the aluminum foil 3, can be inserted.

Although these lamination | stacking procedures are not specifically limited, An example is demonstrated below.
First, the conductive connecting material 7 is disposed on the copper foil 5 of the metal foil laminate 10.
The conductive connecting material 7 may be simply disposed. For example, when the conductive connecting material 7 is a solder, a solder ball is disposed on the copper foil 5 and is heated and melted, or the heat-melted solder is copper foil. It is also possible to drip on 5.
In this state, the molten solder spreads on the copper foil 5 with good wettability and is dammed up with the aluminum foil 3 with poor wettability. For this reason, the solder is raised and accumulated on the copper foil 5 and is prevented from leaking onto the aluminum foil 3.

Next, the sealing material 30A is laminated. That is, the inside of each through-hole 30a which each copper foil 5 respond | corresponds by laminating | stacking sealing material 30A on the metal foil laminated body 10 according to the position of each copper foil 5 and the through-hole 30a of sealing material 30A. The sealing material 30 </ b> A can be stacked in a state where the sealing material 30 </ b> A is inserted.
Next, the solar battery cell 20 is laminated on the conductive connecting material 7 by aligning the position of the connection electrode 20a.
Next, the sealing material 30 </ b> B and the translucent substrate 40 are laminated in this order on the light receiving surface 20 b of the solar battery cell 20.
Thus, the solar cell module stacked body 70 is formed.

Next, a lamination laminating step S3 is performed.
FIG. 13 is a process explanatory diagram of a laminating and laminating process of the method for manufacturing a solar cell module according to the embodiment of the present invention.

In this step, as shown in FIG. 13, the solar battery module laminate 70 is laminated, and the copper foil 5 and the connection electrode 20 a of the solar battery cell 20 are electrically connected by the conductive connection material 7 heated at that time. It is the process of forming the solar cell module 50 by connecting.
Specifically, the solar cell module laminate 70 is laminated using a module laminator.
The heating condition of the laminate is appropriately set to a condition in which the sealing materials 30A and 30B are thermally melted and can be electrically connected by the conductive connecting material 7.
The heating conditions that allow electrical connection by the conductive connecting material 7 vary depending on the material of the conductive connecting material 7. For example, when the conductive connecting material 7 is solder, the heating condition is set to cause the solder to melt. Further, when the conductive connecting material 7 is a conductive paste such as a silver paste, for example, the heating condition is such that the conductive paste is cured by heating to develop conductivity.

By performing this process in this manner, the sealing materials 30A and 30B are thermally melted and laminated and bonded to the metal foil laminate 10 and the translucent substrate 40, and between them, the solar battery cell 20 A layer of the sealing material 30 that seals is formed. Further, the copper foil 5 and the connection electrode 20 a are electrically connected to each other through the conductive connection material 7.
With the above, the lamination laminating step S3 is finished, and the solar cell module 50 is manufactured.

In the solar cell module 50 manufactured in this way, in the metal foil laminate 10, the copper foil 5 is provided on the aluminum foil 3 having the wiring pattern at a position that can face the connection electrode 20a of the solar cell 20, The outer peripheral side of the copper foil 5 is surrounded by the aluminum foil 3 over the entire periphery.
For this reason, when solder is used as the conductive connecting material 7, the aluminum foil 3 repels the solder when it is heated and melted and held in a fluid state on the copper foil 5. It can be prevented from exiting. As a result, the solar battery cell 20 and the electrodes and wirings of other members can be reliably joined without short-circuiting with the adjacent aluminum wiring pattern.
In addition, due to the difference in wettability between the copper foil 5 and the aluminum foil 3, the heat-melted solder can be selectively positioned on the copper foil 5.
As a result, the self-alignment positioning of the solder is possible, and the solder application process cost can be reduced. In addition, the connection electrode 20a of the solar battery cell 20 and the metal foil laminate 10 can be reliably bonded.

According to the method for manufacturing the metal foil laminate 10 of the present embodiment described above, the electrostatic chucking stage 60 sucks the electrode part forming member 64 into the positional relationship corresponding to the arrangement pattern of the electrode parts, and then the conductivity. The electrode part forming member 64 is transferred onto the copper foil 5 of the first laminated body 56 with the adhesive layer 4 interposed therebetween to form a second laminated body 66, and the second laminated body 66 is pressed and adhered in the laminating direction. To do. For this reason, even when the aluminum foil 3 is made of a metal foil having an oxide film on the surface, an electrode portion that can be electrically connected to the aluminum foil 3 can be quickly formed without performing a chemical treatment for removing the oxide film. Can do. For this reason, the manufacturing cost of the metal foil laminated body 10 can be reduced.
Moreover, since the manufacturing method of the solar cell module of this embodiment is the method of manufacturing the solar cell module 50 using the metal foil laminated body 10, after manufacturing the metal foil laminated body 10, the metal foil laminated body 10 The manufacturing time and manufacturing cost can be reduced. For this reason, the solar cell module 50 can be manufactured quickly and inexpensively.

[First Modification]
Next, the manufacturing method of the metal foil laminated body of the 1st modification of this embodiment is demonstrated.
FIG. 14 is a flowchart showing a process flow of a method for manufacturing a metal foil laminate according to a first modification of the embodiment of the present invention.

The manufacturing method of the metal foil laminated body of this modification is a method of manufacturing the metal foil laminated body 10 similar to the above embodiment, and as shown in FIG. 14, the first laminated body forming step S31, the electrostatic adsorption step S32, 2nd laminated body formation process S33, press adhesion process S34, and pattern formation process S35 are performed in this order.
Moreover, as shown in FIG. 3, the manufacturing method of the solar cell module of this modification is replaced with metal foil laminated body manufacturing process S1 of the manufacturing method of the solar cell module of the said embodiment, and metal foil laminated body manufacturing process S21. This is a method for manufacturing the solar cell module 50 similar to that in the above embodiment. Here, metal foil laminated body manufacturing process S21 is a process which consists of said 1st laminated body formation process S31, electrostatic adsorption process S32, 2nd laminated body formation process S33, press bonding process S34, and pattern formation process S35. .
Hereinafter, a description will be given focusing on differences from the above embodiment.

  In the first laminated body forming step S31 of this modification, as shown in FIG. 5A, the laminated body in which the aluminum foil sheet 53 is fixed to the base material 1 via the insulating adhesive layer 2 is used as the first laminated body. This is a step of forming as 84. That is, this step is a step in which the step of forming a pattern by removing the metal foil sheet is omitted in the first laminate forming step S11 of the above embodiment.

Next, electrostatic adsorption process S32 is performed. This step is exactly the same as the electrostatic adsorption step S12 of the above embodiment.
Next, 2nd laminated body formation process S33 is performed. This step is different only in that the first stacked body 56 is replaced with the first stacked body 84 in the second stacked body forming step S13 of the above embodiment. The alignment of the electrostatic adsorption stage 60 and the first laminated body 84 is performed based on the outer shape of the base material 1, the shape of the positioning portion appropriately formed, and the like, as in the above-described embodiment. Even if it is not formed, it can be aligned in the same manner.
Next, the press bonding step S34 is performed. This step is different only in that the first laminated body 56 is replaced with the first laminated body 84 in the press bonding step S14 of the above embodiment.

Next, pattern formation process S35 is performed. This process is a process of removing a part of the aluminum foil sheet 53 of the first laminate 84 to form the aluminum foil 3 having a pattern formed on the aluminum foil sheet 53.
The aluminum foil 3 can be formed, for example, by etching or punching the aluminum foil sheet 53 in the same manner as in the first laminate forming step S11 of the above embodiment.

According to the present modification, the metal foil laminate 10 and the solar cell module 50 similar to those in the above embodiment can be manufactured only with different timings for forming a pattern on the aluminum foil sheet 53. It has the same effect.
However, in the above-described embodiment, in the second laminated body forming step S13, the surface 62c of the insulator sheet 62 is opposed to the outer edge of the patterned aluminum foil 3 and the insulating adhesive layer 2, whereas In the modified example, the surface 62c faces only the surface of the aluminum foil sheet 53 in the second stacked body forming step S33.
Therefore, for example, even when the height of the surface 62c of the insulator sheet 62 is equal to or higher than the surface of the conductive adhesive layer 4 of the electrode portion forming member 64, the surface 62c is planar in the second stacked body forming step S33. Only the aluminum foil sheet 53. In this case, the lifetime of the insulator sheet 62 can be improved as compared with the case where the outer edge of the aluminum foil 3 and the insulating adhesive layer 2 are in contact with each other.

[Second Modification]
Next, the manufacturing method of the metal foil laminated body of the 2nd modification of this embodiment is demonstrated.
Fig.15 (a) is typical sectional drawing which shows schematic structure of the metal foil laminated body manufactured by the manufacturing method of the metal foil laminated body of the 2nd modification of embodiment of this invention.

As shown in FIG. 15A, the metal foil laminate 10A according to this modification is obtained by laminating a precoat solder 11 on the copper foil 5 of the metal foil laminate 10 of the above embodiment.
10A of metal foil laminated bodies can be used instead of the metal foil laminated body 10 in the solar cell module 50 of the said embodiment, when using a solder as the electrically-conductive connection material 7. FIG.
Hereinafter, a description will be given focusing on differences from the above embodiment.

In the second laminated body forming step S13 of the present modification, after the copper foil 5 is laminated on the aluminum foil 3, the copper foil 5 is formed by, for example, a screen printing method or a dispensing method in the same manner as the above embodiment. A precoat solder 11 is laminated thereon.
Thereby, since the surface of the copper foil 5 is covered with the precoat solder 11 before the oxide film is formed on the copper foil 5, the progress of oxidation over time can be prevented.
For this reason, according to this modification, even if it takes time until the soldering which connects the photovoltaic cell 20 is performed, the photovoltaic cell 20 can be favorably soldered.

[Third Modification]
Next, the manufacturing method of the metal foil laminated body of the 3rd modification of this embodiment is demonstrated.
FIG.15 (b) is typical sectional drawing which shows schematic structure of the metal foil laminated body manufactured by the manufacturing method of the metal foil laminated body of the 3rd modification of embodiment of this invention.

As shown in FIG. 15B, the metal foil laminate 10B according to this modification is obtained by applying the preflux 12 on the copper foil 5 of the metal foil laminate 10 of the above embodiment.
When using solder as the conductive connecting material 7, the metal foil laminate 10 </ b> B can be used in place of the metal foil laminate 10 in the solar cell module 50 of the above embodiment.
Hereinafter, a description will be given focusing on differences from the above embodiment.

In the second laminated body forming step S13 of this modification, after the copper foil 5 is laminated on the aluminum foil 3, the preflux made of, for example, imidazole is formed on the copper foil 5 in the same manner as in the above embodiment. 12 is applied.
Thereby, since the surface of the copper foil 5 is covered with the preflux 12 before the oxide film is formed on the copper foil 5, the progress of oxidation over time can be prevented.
For this reason, according to this modification, even if it takes time until the soldering which connects the photovoltaic cell 20 is performed, the photovoltaic cell 20 can be favorably soldered.

[Fourth Modification]
Next, the manufacturing method of the metal foil laminated body of the 4th modification of this embodiment is demonstrated.
FIG.15 (c) is typical sectional drawing which shows schematic structure of the metal foil laminated body manufactured by the manufacturing method of the metal foil laminated body of the 4th modification of embodiment of this invention.

As shown in FIG. 15C, a metal foil laminate 10C according to this modification is obtained by forming a rust prevention layer 13 on the copper foil 5 of the metal foil laminate 10 of the above embodiment. As the rust prevention layer 13, for example, a thin film made of a metal such as zinc or chromium or an alloy containing these metals can be adopted. When higher reliability is required, a thin film such as silver or gold can be used.
10 C of metal foil laminated bodies can be used instead of the metal foil laminated body 10 in the solar cell module 50 of the said embodiment.
Hereinafter, a description will be given focusing on differences from the above embodiment.

In the second laminated body forming step S13 of this modification, after the copper foil 5 is laminated on the aluminum foil 3, as in the above embodiment, for example, plating, sputtering, or vapor deposition is performed on the copper foil 5. For example, a thin film made of a simple metal or alloy such as zinc, chromium, silver, and gold is formed.
Thereby, since the surface of the copper foil 5 is covered with the rust preventive layer 13 before the oxide film is formed on the copper foil 5, the progress of oxidation over time can be prevented.
For this reason, according to this modification, the solar cells 20 can be connected well even if it takes a long time until the solar cells 20 are connected by the conductive connecting material 7.

[Fifth Modification]
Next, the manufacturing method of the solar cell module of the 5th modification of this embodiment is demonstrated.
FIG. 16: is a flowchart which shows the process flow of the manufacturing method of the solar cell module of the 5th modification of embodiment of this invention.

In the said embodiment, although the metal foil laminated body 10 was manufactured previously and demonstrated in the example in the case of forming the solar cell module 50, when it is not necessary to manufacture the metal foil laminated body 10 single-piece | unit, metal foil is demonstrated. You may make it perform a part of manufacturing process of the laminated body 10 with the other manufacturing process of the solar cell module 50 simultaneously.
For example, the curing of the conductive adhesive layer 4 can be performed together with the stacking process of other members during the manufacturing process of the solar cell module 50.
The manufacturing method of the solar cell module of this modification is one of such modifications, and as shown in FIG. 16, the first stacked body forming step S41, the electrostatic adsorption step S42, and the second stacked body forming step. The method includes S43, a solar cell module laminate forming step S44, and a laminate laminate step S45, and performing these steps in this order.

  The first laminated body forming step S41 and the electrostatic adsorption step S42 of the present modification are exactly the same as the first laminated body forming step S11 and the electrostatic adsorption step S12 of the above embodiment.

In the second laminated body forming step S43 of the present modification, the electrode part forming member 64 is transferred and laminated on the first laminated body 56 in the same manner as in the second laminated body forming step S13 of the above-described embodiment. 66 is formed. However, since the second laminated body 66 is not immediately pressed and bonded, it is appropriately heated to increase the adhesiveness of the conductive adhesive layer 4 so that the position of the transferred electrode portion forming member 64 does not shift. The conductive adhesive layer 4 of the electrode part forming member 64 may be appropriately pressed so as to be securely attached to the aluminum foil 3.
Above, 2nd laminated body formation process S43 is complete | finished.

Next, the solar cell module laminated body formation process S44 of this modification is performed. In this process, the point which forms the solar cell module laminated body 70 using the 2nd laminated body 66 with which the electroconductive contact bonding layer 4 has not hardened differs from solar cell module laminated body formation process S2 of the said embodiment.
That is, the non-adhesive back sheet 6 is disposed on the lower surface of the second laminated body 66 where the conductive adhesive layer 4 is not cured via an appropriate adhesive or the like. Moreover, the sealing material 30A, the conductive connection material 7, the solar battery cell 20, the sealing material 30B, and the translucent substrate 40 are provided on the surface of the second laminated body 66 on the aluminum foil 3 side, as in the above embodiment. Laminate.
Above, solar cell module laminated body formation process S44 is complete | finished.

  Next, in the lamination laminating step S45 of the present modification, the solar cell module laminate 70 is laminated using a module laminator. The heating condition and the pressurizing condition of the laminate are added to the conditions of the above embodiment, and the conductive The point which sets in consideration of the pressurization conditions and heating conditions in press bonding process S14 of the said embodiment so that the aluminum foil 3 and the copper foil 5 may conduct | electrically_connect by the adhesive bond layer 4 differs from the said embodiment.

According to the present modification, the conductive adhesive layer 4 is cured in the lamination laminating step S45, whereby the lamination of the respective layers, the connection of the solar battery cells 20, and the sealing can be performed simultaneously.
Thereby, in 2nd laminated body formation process S43, the heating pre-lamination of the 2nd laminated body 66 and the heat hardening by a hot air oven can be abbreviate | omitted.
For this reason, compared with 2nd laminated body formation process S13 of the said embodiment, 2nd laminated body formation process S43 can be simplified. Moreover, the manufacturing cost of the solar cell module 50 can be reduced.

In addition, the manufacturing method of the metal foil laminated body of this invention demonstrated above and the manufacturing method of a solar cell module are not limited to the above-mentioned embodiment and the form of each modification, and do not deviate from the summary of this invention. Changes, substitutions, and deletions of appropriate configurations and materials can be made within the scope, and these are also included in the present invention.
Moreover, all the components described above can be implemented in appropriate combination.

In the above-described embodiment, an example in which the electrostatic attraction force distribution is generated by providing the insulator sheet 62 on the electrostatic attraction surface 61a has been described. According to such a method, when manufacturing the metal foil laminate 10 having different arrangement patterns of the electrode part forming members 64, it is only necessary to replace the insulator sheet 62. The metal foil laminated body 10 from which an arrangement pattern differs can be manufactured using.
However, when the arrangement pattern of the electrode part forming member 64 is constant, an electrostatic adsorption stage having an electrostatic attraction force distribution corresponding to the arrangement pattern may be used. For example, the specific electrostatic attraction force distribution may be generated by appropriately setting the arrangement of the electrodes inside the stage main body 61 or changing the material and shape of the electrostatic attraction surface.

  In the above-described embodiment, the example in which the copper foil 5 and the conductive adhesive layer 4 are laminated as the electrode portion forming member 64 has been described. However, for example, the conductive adhesive layer 4 is previously formed on the aluminum foil 3 by printing or the like. Alternatively, the copper foil 5 may be attracted to the electrostatic adsorption stage 60 as an electrode part forming member.

  In the above-described embodiment, the example in which the height of the surface 62c of the insulator sheet 62 from the electrostatic attraction surface 61a is lower than the thickness of the electrode portion forming member 64 has been described. The height may be higher.

  In above-mentioned embodiment, although the metal foil laminated body 10 demonstrated in the example in the case of providing the back sheet 6, when manufacturing the solar cell module which does not require the back sheet 6, the process of laminating | stacking the back sheet 6 is carried out. It may be omitted.

  In the above-described embodiment and the first modified example, the aluminum foil sheet 53 is overlapped and fixed to the base material 1 and then the aluminum foil sheet 53 is partially removed to form the aluminum foil 3. Alternatively, a pre-patterned aluminum foil 3 may be transferred to the substrate 1.

  In the first modified example described above, the example of manufacturing the metal foil laminate 10 in which the first metal foil is patterned has been described. However, the metal foil laminate has the first metal foil patterned. It does not have to be. For example, in a 1st modification, when the contractor who performs the process to press bonding process S34 and the contractor who performs pattern formation process S35 differ, the 1st laminated body 84 before performing pattern formation process S35 is metal foil laminated body. Can be shipped to the processing destination of the pattern forming step S35.

In the above-mentioned embodiment and each modification, although the metal foil laminated body demonstrated in the example in the case of comprising a part of solar cell module, the metal foil laminated body in this invention is limited to what is used for a solar cell module. Not. That is, the use of the metal foil laminate is arbitrary.
For example, by appropriately changing the shape of the pattern of the aluminum foil 3, it can be used as various products or used for manufacturing various products. For example, it can also be used as a metal foil laminate that constitutes various conductive patterns such as antennas for IC tags, conductors and circuit patterns.
Moreover, the use of the pattern of the aluminum foil 3 is not specifically limited. For example, a wiring pattern for forming a conductive path, an electrode pattern for accumulating static electricity, a shield pattern, a display pattern, or any other pattern formed of a metal foil is possible.

In the above-described embodiment, an example in which the first metal foil is the aluminum foil 3 and the second metal foil is the copper foil 5 has been described. If it does in this way, the 1st metal foil with much usage-amount will be a cheap material, and the 2nd metal foil used as an electrode will become a material with favorable electrical connectivity. However, this is an example, and the material of the first metal foil and the second metal foil is not particularly limited.
For example, both may be configured as an aluminum foil or a copper foil, the first metal foil may be a copper foil, and the second metal foil may be an aluminum foil.
In addition, any metal foil such as a metal foil made of nickel, tin, zinc, or an alloy thereof, a gold foil, or a silver foil can be used as any metal foil.
In addition, it is important that the second metal foil is appropriately selected in consideration of electrical connectivity and durability according to the material of the conductive connecting material. For example, when solder is used as the conductive connecting material, it is preferable to use copper, nickel, tin, zinc, and alloys thereof as materials capable of forming an alloy with the solder.

  In the above-described embodiment, solder or silver paste is provided as the conductive connecting material 7 that joins the aluminum foil 3 of the wiring pattern and the solar battery cell 20. However, the conductive connecting material 7 is not limited to this and is appropriately selected. These fusible conductive members can be used.

  In the above-described embodiment, the insulating adhesive layer 2 is laminated on the entire surface of the substrate 1 as the metal foil laminate 10, and the aluminum foil 3 is laminated on the insulating adhesive layer 2. Instead of this configuration, the insulating adhesive layer 2 may also be applied and disposed on the substrate 1 in a pattern similar to the wiring pattern of the aluminum foil 3.

  In the above-described embodiment, the example in which the outer peripheral side of the copper foil 5 is surrounded by the aluminum foil 3 over the entire periphery has been described. However, the conductive connecting material 7 is made of copper foil 5 and aluminum, such as silver paste, for example. If the difference in wettability with the foil 3 is not a problem and there is no possibility of flowing outside the copper foil 5, a part of the outer periphery of the copper foil 5 may not be surrounded by the aluminum foil 3.

  In the above-described embodiment, the aluminum foil 3 has been described as an example of a linear portion having a certain width. However, the line width of the wiring pattern of the aluminum foil 3 may be changed, for example, the linear portion. In the middle, a shape such as a quadrangle or a circle provided so as to widen the line width may be formed. If the copper foil 5 is installed in such a widened portion, the degree of freedom of the shape of the copper foil 5 is increased, and the area of the aluminum foil 3 surrounding the copper foil 5 can be easily increased.

DESCRIPTION OF SYMBOLS 1 Base material 2 Insulating adhesive layer 3 Aluminum foil (1st metal foil)
4 Conductive adhesive layer (conductive adhesive)
5 Copper foil (second metal foil, electrode part)
6 Back sheet (sheet member)
7 Conductive connection material 8 Insulating resin 10, 10A, 10B, 10C, 10D Metal foil laminate 11 Precoat solder 12 Preflux 13 Anticorrosive layer 20 Solar cell 20a Connection electrode 20b Light receiving surface 30, 30A, 30B Sealing material 40 Translucent substrate 50 Solar cell module 53 Aluminum foil sheet (metal foil sheet)
56, 84 1st laminated body 60 Electrostatic adsorption stage 60a Recessed hole part 61 Stage main body 61a Electrostatic adsorption surface 62 Insulator sheet 62a Through-hole 63 Tray 63a Partition part 64 Electrode part formation member 66 2nd laminated body 70 Solar cell module Laminated body S1, S21 Metal foil laminated body manufacturing process S2, S44 Solar cell module laminated body forming process S3, S45 Laminated laminate process S11, S31, S41 First laminated body forming process S12, S32, S42 Electrostatic adsorption process S13, S33 , S43 Second laminated body forming step S14, S34 Press bonding step S35 Pattern forming step

Claims (8)

A sheet-like base material, a first metal foil that is fixed over the base material, and a second metal foil that is fixed over the first metal foil so as to be electrically connected to the first metal foil A method for producing a metal foil laminate comprising an electrode part including a metal foil,
A first laminate forming step of forming the first laminate including the substrate and the first metal foil by fixing the first metal foil on the substrate;
An electrostatic attraction force distribution for holding an electrode part forming member including at least the second metal foil in a positional relationship corresponding to the arrangement pattern of the electrode part in order to form the electrode part. An electrostatic adsorption step of attracting the electrode part forming member to the surface of the electrostatic adsorption stage,
The electrostatic adsorption stage is positioned on the first metal foil of the first laminate, and the electrode part forming member adsorbed on the electrostatic adsorption stage is placed in a state through a conductive adhesive. A second laminated body forming step of forming a second laminated body by transferring it onto one metal foil;
Pressing in the state where the first metal foil and the second metal foil are electrically connected to each other by heating the second laminated body and pressing in the laminating direction to cure the conductive adhesive. The manufacturing method of a metal foil laminated body provided with an adhesion process. In the electrostatic adsorption step,
By providing an insulating sheet in which through holes in which the electrode part forming member can be accommodated are formed in accordance with the arrangement pattern of the electrode parts on an electrostatic attraction surface that forms a substantially uniform electrostatic attraction force distribution The method for producing a metal foil laminate according to claim 1, wherein the electrostatic attraction force distribution is generated. The insulator sheet is
The method for producing a metal foil laminate according to claim 2, wherein a height of the surface from the electrostatic adsorption surface is provided to be lower than a thickness of the electrode part forming member. In the first laminate forming step,
The first laminate is
The method for producing a metal foil laminate according to any one of claims 1 to 3, wherein a sheet member is laminated on the side of the substrate opposite to the first metal foil. In the first laminate forming step,
The metal foil sheet covering the base material is stacked and fixed on the base material, and then a part of the metal foil sheet is removed to form the first metal foil having a pattern-formed shape. The manufacturing method of the metal foil laminated body of any one of Claims 1-4 characterized by the above-mentioned. In the first laminate forming step,
Forming the first metal foil by stacking and fixing a metal foil sheet covering the substrate on the substrate,
After performing the pressure bonding step,
The metal according to any one of claims 1 to 4, further comprising a pattern forming step of removing a part of the first metal foil to form a pattern on the first metal foil. Manufacturing method of foil laminated body. A metal foil laminate production process for producing the metal foil laminate by the metal foil laminate production method according to claim 5,
The solar cell in which the metal foil laminate, the conductive connection material arranged on the second metal foil of the metal foil laminate, and the connection electrode provided on the back surface are arranged on the conductive connection material. A cell, a sealing material disposed between the metal foil laminate and the back surface of the solar battery cell and on a light receiving surface of the solar battery cell, and a position covering the metal foil laminate on the sealing material A solar cell module laminate forming step of forming a solar cell module laminate by laminating a translucent front plate disposed in
The solar cell module laminate is laminated, and the second metal foil and the connection electrode of the solar cell are electrically connected by the conductive connecting material heated at that time to form a solar cell module The manufacturing method of a solar cell module provided with the lamination laminating process to do. After bonding the metal foil sheet covering the base material on the base material, by removing a part of the metal foil sheet, a first metal foil having a pattern is formed, A first laminate forming step of forming a first laminate including a substrate and the first metal foil;
An electrostatic attraction force distribution is generated on the surface of the electrostatic adsorption stage to hold the electrode part forming member including at least the second metal foil in a positional relationship corresponding to the arrangement pattern of the electrode part in order to form the electrode part. An electrostatic adsorption step of adsorbing the electrode part forming member to the surface of the electrostatic adsorption stage;
The electrostatic adsorption stage is positioned on the first metal foil of the first laminate, and the electrode part forming member adsorbed on the electrostatic adsorption stage is placed in a state through a conductive adhesive. A second laminated body forming step of forming a second laminated body by transferring it onto one metal foil;
The solar cell in which the second laminate, the conductive connection material arranged on the second metal foil of the second laminate, and the connection electrode provided on the back surface are arranged on the conductive connection material. A cell, a sealing material disposed between the second stacked body and the back surface of the solar battery cell and on a light receiving surface of the solar battery cell, and a position covering the second stacked body on the sealing material A solar cell module laminate forming step of forming a solar cell module laminate by laminating a translucent front plate disposed in
Laminating the solar cell module laminate, in which case the first metal foil and the second metal foil are pressed in the laminating direction to conduct through the conductive adhesive, and the heated conductive A method for manufacturing a solar cell module, comprising: a lamination laminating step of electrically connecting the second metal foil and the connection electrode of the solar battery cell with a connecting material to form a solar cell module.

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