CN113056119B

CN113056119B - Lamination device and method for manufacturing lamination body

Info

Publication number: CN113056119B
Application number: CN202011171428.4A
Authority: CN
Inventors: 牧野由; 森本崇; 泽田智世; 森隆博
Original assignee: Nikkiso Co Ltd
Current assignee: Nikkiso Co Ltd
Priority date: 2019-12-27
Filing date: 2020-10-28
Publication date: 2024-01-23
Anticipated expiration: 2040-10-28
Also published as: JP2021104664A; TW202124148A; JP6987834B2; TWI760840B; CN113056119A

Abstract

The present invention provides a lamination device capable of laminating sheets while eliminating warpage or deflection of the sheets, and a method for manufacturing a laminate. The lamination conveyance holder (60) holds the sheets (L1-L5) having the metal layers (104) laminated on the insulating film (106) by vacuum suction, and conveys the sheets to the lamination stage (80). The holder charger (70) irradiates charged particles onto the sheets (L1-L5) held by the lamination transport holder (60). The holder charger (60) irradiates charged particles with higher voltage as the insulating films (106) of the sheets (L1-L5) being conveyed are thinner.

Description

Lamination device and method for manufacturing lamination body

Technical Field

The present invention relates to a lamination apparatus and a method for manufacturing a laminate.

Background

As a circuit board to be mounted in a communication device or the like, for example, as disclosed in patent documents 1 and 2, a laminate formed by laminating sheets in which a metal layer is formed on an insulating film is used.

In the manufacturing process of the laminate, the sheets are conveyed layer by layer to the lamination stage by the holder. For example, the positional alignment of the sheets is performed before the sheets are conveyed by the holder, and the sheets after the positional alignment are stacked on the stacking table. By performing the positional alignment, positional displacement between layers is suppressed. Further, the laminate is heated and pressure-bonded by pressing the laminate from the upper and lower ends, whereby the layers are fixed.

[ Prior Art literature ]

[ patent literature ]

Patent document 1: international publication No. 2017/150678

Patent document 2: japanese patent application laid-open No. 2018-170521

Disclosure of Invention

Technical problem to be solved by the invention

However, the sheet may warp or flex due to a difference between the expansion rate and the contraction rate of the insulating sheet and the metal layer accompanying a temperature change. When a laminate having sheets having warpage or deflection is press-bonded, the warpage and deflection of the sheets are eliminated in this process, but the positions of the sheets may be shifted in the course of the elimination of the warpage and deflection.

Accordingly, an object of the present invention is to provide a lamination device and a method for manufacturing a laminate, which can laminate sheets while eliminating warpage or deflection of the sheets.

Solution for solving the technical problems

The present invention relates to a laminating apparatus for laminating a plurality of sheets each having a metal layer laminated on an insulating film. The laminating device comprises a laminating table, a conveying retainer and a retainer charger. The sheets are stacked on a stacking table. The transport holder holds the sheet by vacuum suction and transports it to the lamination stage. The holder irradiates charged particles with a charger toward the sheet held by the conveyance holder. The holder charger irradiates charged particles of higher voltage as the insulating film of the sheet being conveyed becomes thinner.

According to the above-described structure, by irradiating charged particles to a sheet being conveyed, the sheet is electrostatically attracted to the conveyance holder, and warpage and deflection are eliminated in the process. Here, as the insulating film of the sheet material is thinner, the surface elastic modulus of the film is lower, and the amount of warpage and deflection due to the expansion ratio difference and the shrinkage ratio difference with the metal layer are increased. Therefore, in the present invention, the thinner the insulating film of the sheet being conveyed, the higher the voltage of the irradiated charged particles. In this way, the voltage of the charged particles is adjusted according to the thickness of the insulating film, thereby eliminating the warp and deflection of the sheet with high accuracy.

In the above configuration, a stage charger may be provided to irradiate charged particles toward the exposed surface of the uppermost sheet of the multilayer sheets stacked on the stacking table. In this case, the holder charger and the stage charger irradiate charged particles having equal voltages to each other.

According to the above configuration, the charged particles are irradiated to the sheet vacuum-adsorbed to the conveyance holder, and the charged particles are also irradiated to the exposed surface of the uppermost sheet among the multilayered sheets stacked on the stacking table. By equalizing the voltages of the charged particles, the electrostatic attraction force for attracting the sheet to the transport holder is matched with the electrostatic attraction force for attracting the sheet to be transported to the uppermost sheet on the stacking table. Thus, for example, the warp and deflection of the sheet can be eliminated at a maximum voltage within a range where the sheet is separated from the conveyance holder by the positive pressure air blowing is not hindered by electrostatic adsorption.

The present invention also relates to a laminating apparatus for laminating a plurality of sheets each having a metal layer laminated on an insulating film. The laminating device comprises a laminating table, a conveying retainer, a retainer charger and a camera. The sheets are stacked on a stacking table. The transport holder holds the sheet by vacuum suction and transports it to the lamination stage. The holder irradiates charged particles with a charger toward the sheet held by the conveyance holder. The camera captures the surface shape of the sheet held by the conveyance holder. The holder irradiates a floating portion of the sheet, which is determined based on the surface shape of the sheet photographed by the camera and separated from the holding surface of the conveying holder, with charged particles having a higher voltage than an adhesion portion of the sheet adhered to the holding surface with the charger.

According to the above configuration, charged particles of relatively high voltage are irradiated to the floating portion of the sheet, and electrostatic attraction force is relatively suppressed to the closely-adhered portion around the floating portion. Thus, it is possible to avoid excessive electrostatic attraction force on the sheet and to eliminate warpage and deflection.

In the above configuration, the charged particles irradiated to the floating portion of the sheet may be set to a higher voltage as the insulating film of the sheet is thinner.

As described above, as the insulating film becomes thinner, the amount of warpage and deflection of the sheet increases. The thinner the insulating film is, the higher the voltage of the charged particles is set, and thus warpage and deflection can be eliminated with high accuracy.

In addition, in the above-described structure, the holder charger may determine the irradiation point of the charged particles on the exposed surface of the sheet held by the transport holder in a region smaller than the exposed surface. In this case, the holder charger irradiates the charged particles only when at least a part of the irradiation point overlaps with the floating portion of the sheet held by the conveyance holder.

According to the above configuration, the charged particles are irradiated only when at least a part of the irradiation points overlap with the floating portion, and the charged particles are not irradiated to the other sheet regions. Therefore, excessive electrostatic attraction force can be prevented from being generated on the sheet, and the sheet can be easily detached from the holder by the lamination stage.

In the above configuration, an alignment table may be provided, which mounts the sheet before being held by the conveyance holder and positions the mounted sheet. Further, a pressing member may be provided, which is further placed on the sheet placed on the alignment table, to press the entire surface of the sheet. In this case, at least a part of the sheet mounting region of the alignment table is constituted by the light-transmissive member. Further, an alignment camera may be provided which photographs the sheet placed on the alignment stage through the light-transmissive member. The alignment camera photographs the sheet pressed against the alignment stage by the pressing member.

According to the above configuration, even if there is a sheet having warpage or deflection, the sheet can be eliminated by pressing the sheet against the alignment stage with the pressing member. At this time, by photographing the sheet, alignment with high accuracy can be performed.

The present invention also relates to a method for producing a laminate, which is used for producing a laminate including a plurality of sheets in which metal layers are laminated on an insulating film. The manufacturing method includes a lamination step and a crimping step. In the lamination step, the sheets are held by a conveyance holder by vacuum suction and conveyed to a lamination stage, and the sheets are sequentially laminated on the lamination stage. In the pressure bonding step, the laminated body of the sheets laminated on the lamination stage is pressure bonded and the layers are fixed. In the lamination step, the thinner the insulating film of the sheet is, the higher the voltage of the charged particles irradiated to the sheet being conveyed held by the conveyance holder is.

In addition, in the above-described structure, in the lamination step, charged particles of equal voltage to each other may be irradiated toward the exposed surface of the uppermost sheet of the sheets under conveyance held by the conveyance holder and the multilayered sheet laminated on the lamination stage.

The present invention also relates to a method for producing a laminate, which is used for producing a laminate including a plurality of sheets in which metal layers are laminated on an insulating film. The manufacturing method includes a lamination step and a crimping step. In the lamination step, the sheets are held by a conveyance holder by vacuum suction and conveyed to a lamination stage, and the sheets are sequentially laminated on the lamination stage. In the pressure bonding step, the laminated body of the sheets laminated on the lamination stage is pressure bonded and the layers are fixed. In the lamination step, charged particles having a higher voltage than the adhering portion of the sheet adhering to the holding surface are irradiated to the floating portion of the sheet, which is determined based on the surface shape of the sheet held by the conveyance holder and is separated from the holding surface of the conveyance holder.

In the above-described structure, the thinner the insulating film of the sheet is, the higher the voltage of the charged particles irradiated to the floating portion of the sheet can be.

Effects of the invention

According to the present invention, the sheet can be laminated while eliminating warpage or deflection of the sheet.

Drawings

Fig. 1 is a diagram illustrating a laminated body manufactured by the laminating apparatus according to the present embodiment.

Fig. 2 is a diagram illustrating a laminate including sheets having warpage.

Fig. 3 is a diagram illustrating a laminate including sheets in which deflection exists.

Fig. 4 is a perspective view illustrating the structure of the stacking apparatus according to the present embodiment.

Fig. 5 is an X-Z side view illustrating the structure of the stacking apparatus according to the present embodiment.

Fig. 6 is a diagram illustrating a hardware configuration of the controller.

Fig. 7 is a diagram illustrating functional blocks of the controller.

Fig. 8 is a diagram illustrating a voltage setting flow of electrification and neutralization performed in the lamination process of sheets.

Fig. 9 is a diagram illustrating a sheet stacking process (1/10) using the stacking apparatus according to the present embodiment.

Fig. 10 is a diagram illustrating a sheet stacking process (2/10) using the stacking apparatus according to the present embodiment.

Fig. 11 is a diagram illustrating a sheet stacking process (3/10) using the stacking apparatus according to the present embodiment.

Fig. 12 is a diagram illustrating a sheet stacking process (4/10) using the stacking apparatus according to the present embodiment.

Fig. 13 is a diagram illustrating a sheet stacking process (5/10) using the stacking apparatus according to the present embodiment.

Fig. 14 is a diagram illustrating a sheet stacking process (6/10) using the stacking apparatus according to the present embodiment.

Fig. 15 is a diagram illustrating a sheet stacking process (7/10) using the stacking apparatus according to the present embodiment.

Fig. 16 is a diagram illustrating a sheet stacking process (8/10) using the stacking apparatus according to the present embodiment.

Fig. 17 is a diagram illustrating a sheet stacking process (9/10) using the stacking apparatus according to the present embodiment.

Fig. 18 is a diagram illustrating a sheet stacking process (10/10) using the stacking apparatus according to the present embodiment.

Fig. 19 is a diagram illustrating a structure of a stacking apparatus according to another example of the present embodiment.

Fig. 20 is a diagram showing another example of a voltage setting flow of electrification and neutralization performed in the lamination process of sheets.

Fig. 21 is a diagram showing another example of the alignment stage.

Description of the reference numerals

A 10 stacking apparatus, a 12 floating portion, a 20 controller, 30L1 to 30L5 sheet stock, a 40 stock conveyance holder (front stage holder), a 50 alignment stage, a 52 moving mechanism, a 53 stage plate, a 54 light transmitting plate, a 56 alignment camera, a 60 stacking conveyance holder, a 68 stage charger, a 70 stage charger, a 72 stage eliminator, a 74 stock eliminator, an 80 stacking stage, a 90 press, a stack in the middle of 100A stacking, a 100B final stack, a 110 stock conveyance holder control, a 112 alignment stage control, a 114 stacking conveyance holder control, a 116 sheet information storage, a 118 charger control, a 120 eliminator control, a 122 press controller, and a 130 camera (video camera).

Detailed Description

< laminate >

Fig. 1 illustrates a laminate 100B produced by the laminating apparatus according to the present embodiment. The laminate 100B is a final laminate obtained by laminating the lowermost sheet L5 to the uppermost sheet L1, and differs from a laminate 100A in the lamination process illustrated in fig. 5, for example, described later in the description. Further, for convenience, the laminated body 100A in the middle of lamination also includes a state in which only the lowermost sheet L5 is placed on the lamination stage 80 (see fig. 4).

In the embodiment shown in fig. 1 to 21, the final laminate 100B is composed of a 5-layer laminate including the sheets L1 to L5, but the laminate produced by the laminating apparatus according to the present embodiment is not limited to this example. For example, the laminating apparatus according to the present embodiment may laminate a plurality of layers other than 5 layers, such as 12 layers or 20 layers.

The final laminate 100B may be, for example, a circuit substrate mounted in a communication device. According to the example of fig. 1, the final laminate 100B is formed by laminating the multilayer sheets L1 to L5. Each of the sheets L1 to L5 is composed of, for example, a multilayer sheet in which a metal layer 104 is laminated on an insulating film 106. The insulating film 106 is made of, for example, a thermoplastic liquid crystal polymer. The metal layer 104 is made of copper, for example.

The lowermost sheet L5 and the uppermost sheet L1 are arranged to expose the metal layer 104. For example, the lowermost sheet L5 is disposed in reverse with respect to the other sheets L1 to L4. The metal layer 104 of the uppermost sheet L1 and the lowermost sheet L5 may be, for example, a so-called solid film in which a metal film is formed on one surface of the insulating film 106.

The metal layer 104 of the uppermost sheet L1 and the lowermost sheet L5 is in contact with the heated pressing surface of the crimper 90 in the crimping step. The metal layer 104 having a relatively higher melting point than the insulating film 106 is in contact with the heated pressing surface, and thus melting of the contact surface of the final laminate 100B with the pressing surface is suppressed.

In addition, in the metal layers 104 of the sheets L2 to L4 as the intermediate layers, wiring patterns are formed differently for each sheet. From this point, the sheets L2 to L4 are also called patterned insulating films. The metal layers 104 of the sheets L2 to L4 are connected by the through holes 102 penetrating in the thickness direction of the insulating film 106.

The insulating films 106 of the sheets L1 to L5 of each layer may be formed so as to have a different thickness from those of the other layers. For example, the thicker the sheet is, the closer to the upper layer of the laminate. Alternatively, the thinner the sheet is, the closer to the upper layer of the laminate.

As shown in the upper portions of fig. 2 and 3, the sheets L1 to L5 may warp or flex. For example, the sheets L1 to L5 warp or flex based on the difference in expansion or contraction rate between the insulating film 106 and the metal layer 104.

As shown in the lower parts of fig. 2 and 3, in the press-bonding step, the warpage or deflection is eliminated, and as a result, a positional shift occurs between the layer in which the warpage or deflection occurs and the lower layer thereof. As described later, the stacking apparatus according to the present embodiment includes a structure capable of eliminating warpage or deflection of the respective sheets L1 to L5 before stacking.

In fig. 1, a so-called adhesive sheet in which the metal layer 104 is formed on the insulating film 106 is shown as an example of a sheet, but the sheet laminated by the laminating apparatus according to the present embodiment is not limited to this form. For example, only one electrically insulating film such as only an insulating film may be a sheet to be laminated. The sheet to be laminated may be an adhesive sheet obtained by bonding two electrically insulating films, or an adhesive sheet having metal layers formed on both surfaces of one electrically insulating film. The sheet to be laminated may be an adhesive sheet formed by sandwiching a metal layer between a pair of electrically insulating sheets. The sheet to be laminated may be a sheet formed by adhering a PET film or an adhesive sheet to one or both surfaces.

< integral Structure of laminate device >

Fig. 4 and 5 illustrate a stacking apparatus 10 according to the present embodiment. Hereinafter, as the direction axes for explaining the layout and the like of the stacking apparatus 10, the X-axis, the Y-axis, and the Z-axis are appropriately used. The X axis is an axis along the moving direction of the lamination conveyance holder 60. The Y axis is an axis orthogonal to the X axis in the horizontal plane. The Z axis is a vertical axis orthogonal to the X axis and the Y axis, and is equivalent to the stacking direction of the sheets L1 to L5.

In the description of the arrangement of the respective mechanisms of the stacking apparatus 10, the sheet reservoirs 30L1 to 30L5 are upstream and downstream along the X-axis stacking table 80.

The stacking apparatus 10 includes a controller 20, sheet holders 30L1 to 30L5, a holder 40, an alignment stage 50, a holder 60, a stacking stage 80, and a presser 90. Further, as the charged particle irradiation mechanism, the stacking apparatus 10 includes a stage charger 68, a holder charger 70, a stage remover 72, and a holder remover 74.

The sheet holders 30L1 to 30L5 accommodate the sheets L1 to L5, respectively. Note that in fig. 4, the sheets L1 to L5 are illustrated as so-called individual sheets, and the sheet holders 30L1 to 30L5 are illustrated as cassettes accommodating individual sheets, but the stacking apparatus 10 according to the present embodiment is not limited to this form. For example, a sheet roll in which a plurality of sheets are continuously formed may be formed for each of the sheets L1 to L5, and a cutter for cutting the sheet roll may be provided. In this case, the sheet holders 30L1 to 30L5 are configured as roll holders for holding the sheet rolls corresponding to the sheets L1 to L5, respectively.

The transport holder 40 for the accumulator is a transport device that reciprocates between the sheet accumulators 30L1 to 30L5 and the alignment table 50. The accumulator conveyance holder 40 is provided on the upstream side of the lamination conveyance holder 60, and is therefore also referred to as a "preceding stage holder".

The sheet holders 30L1 to 30L5 are dispersed in the X-axis direction and the Y-axis direction, and therefore the transport holder 40 for the holder can move in the X-axis direction and the Y-axis direction. The transport holder 40 for the storage can be moved along an X-axis table and a Y-axis table, which are not shown, for example.

As shown in fig. 5, the transport holder 40 for a reservoir includes a lifting mechanism 42. An adsorption plate 44 is provided at the lower end of the lifting mechanism 42. The lifting mechanism 42 moves the suction plate 44 in the Z-axis direction (vertical direction). As the moving mechanism in the Z-axis direction, the lifting mechanism 42 includes, for example, a rack, a pinion mechanism, a stepping motor, or a servo motor.

The adsorption plate 44 is formed with a plurality of air holes in a metal plate such as an aluminum plate. The lower end of the air hole is exposed, and the upper end is connected to the air pipe 46. Air of negative pressure (Vac) and positive pressure (Prs) is supplied to the air pipe 46. In the adsorption of the sheets L1 to L5, the air pipe 46 is evacuated. When the sheets L1 to L5 are separated, pressurized air is sent out from the air pipe 46. A soft porous sheet may be provided on the contact surface of the suction plate 44 with the sheets L1 to L5.

As shown in fig. 4, the alignment table 50 aligns the sheets L1 to L5 conveyed from the conveying holder 40 for storage. The alignment stage 50 includes a moving mechanism 52, a stage plate 53 as a mounting stage, and an alignment camera 56.

The moving mechanism 52 can move the stage plate 53 in the X-axis and the Y-axis, and can rotate the stage plate 53 about the Z-axis as a rotation axis. The stage plate 53 includes a light-transmitting plate 54 as a light-transmitting member. The light-transmitting plate 54 is provided in at least a part of the sheet mounting area where the sheets L1 to L5 are mounted. For example, as shown in fig. 4, at least portions of the stage plate 53 corresponding to the four corners of the sheets L1 to L5 are constituted by light-transmitting plates 54. Instead of the form shown in fig. 4, a single light-transmitting plate 54 may be provided on the stage plate 53 at positions corresponding to the four corners of the sheets L1 to L5.

A plurality of alignment cameras 56 are provided below the stage plate 53. For example, the alignment camera 56 is arranged at a position capable of photographing four corners or two corners on a diagonal line of the sheets L1 to L5. The alignment camera 56 can capture the sheets L1 to L5 mounted on the stage plate 53 through the light-transmitting plate 54 (light-transmitting member). The alignment process of the loaded sheets L1 to L5 is described later.

As shown in fig. 4, the lamination conveyance holder 60 holds the sheets L1 to L5 aligned by the alignment table 50 by vacuum suction, and conveys them to the lamination table 80. For example, when the alignment stage 50 and the lamination stage 80 are disposed on the X axis, the lamination conveyance holder 60 may be moved only along the X axis.

As shown in fig. 5, the lamination conveyance holder 60 has substantially the same structure as the reservoir conveyance holder 40. That is, the lamination conveyance holder 60 includes a lifting mechanism 62, a suction plate 64 provided at a lower end of the lifting mechanism 62, and an air pipe 66 connected to the suction plate 64.

The lifting mechanism 62 moves the suction plate 64 in the Z-axis direction (vertical direction). As the moving mechanism in the Z-axis direction, the lifting mechanism 62 includes, for example, a rack, a pinion mechanism, a stepping motor, or a servo motor.

The adsorption plate 64 is formed with a plurality of air holes in a metal plate such as an aluminum plate. The lower end of the air hole is exposed, and the upper end is connected to the air pipe 66. Air of negative pressure (Vac) and positive pressure (Prs) is supplied to the air pipe 66. When adsorbing the sheets L1 to L5, air is sucked from the air pipe 66. When the sheets L1 to L5 are separated, pressurized air is sent out from the air pipe 66. A soft porous sheet may be provided on the contact surface of the suction plate 64 with the sheets L1 to L5.

As shown in fig. 4, the sheets L1 to L5 are stacked on the stacking table 80. On the mounting surface of the lamination table 80 on which the final laminate 100B (see fig. 1) is formed, suction holes (not shown) for holding the lowermost sheet L5 may be formed. As shown in fig. 5, the adsorption hole is connected to an air pipe 82. By sucking negative pressure from the air pipe 82, the lowermost sheet L5 is held on the lamination table 80. Instead of vacuum suction, an adhesive sheet may be attached to the mounting surface of the lamination table 80.

As shown in fig. 4, the stacking apparatus 10 is provided with a charger and a static eliminator for irradiating charged particles on a stacking conveyance holder 60, sheets L1 to L5 conveyed by the holder, and a stack 100A in the middle of stacking on a stacking table.

Specifically, the stacking apparatus 10 includes a stage charger 68, a holder charger 70, a stage remover 72, and a holder remover 74. These chargers and deactivators are constituted by, for example, ionizers.

The stage charger 68 irradiates charged particles onto the mounting surface of the lamination stage 80. As shown in fig. 5, the stage charger 68 irradiates charged particles onto the exposed surface of the uppermost sheet L3 of the plurality of sheets L3 to L5 stacked on the stacking stage 80. For example, the stage charger 68 can be moved relative to the lamination stage 80. Specifically, as shown in fig. 4, the stage charger 68 is attached to the downstream end of the lamination transport holder 60 (a position close to the lamination stage 80) and is movable in the X-axis together with the lamination transport holder 60.

For example, the stage charger 68 determines the irradiation point of the charged particles on the exposed surface of the uppermost sheet L3 shown in fig. 5 in a region smaller than the exposed surface. For example, as shown in fig. 5, a region shorter than the length of the lamination stage 80 and the sheets L3 to L5 in the X-axis direction is an irradiation point on the exposed surface of the uppermost sheet L3 of the stage charger 68. The length of the irradiation point in the Y-axis direction may be equal to or longer than the length of the lamination stage 80 and the sheets L3 to L5 in the Y-axis direction. By relatively moving the lamination stage 80 and the stage charger 68 in the X-axis direction, charged particles can be irradiated onto the entire surface of the uppermost surface of the laminate 100A on the mounting surface of the lamination stage 80 and in the middle of lamination.

The holder charger 70 and the holder discharger 74 are movable relative to the stacking transport holder 60 along the X-axis direction, that is, the moving direction of the stacking transport holder 60. For example, the holder charger 70 and the holder remover 74 are provided between the alignment stage 50 and the lamination stage 80, and are arranged so that the lamination conveyance holder 60 passes above them.

For example, the holder charger 70 and the holder static eliminator 74 irradiate charged particles upward (in the positive Z-axis direction). As described above, the lamination conveyance holder 60 vacuum-adsorbs the sheets L1 to L5 at the lower ends thereof. Therefore, when charged particles are irradiated while the lamination conveyance holder 60 is moved on the holder charger 70 and the holder static eliminator 74, the charged particles are incident on the exposed surfaces of the conveyed sheets L1 to L5.

The holder charger 70 and the holder discharger 74 determine irradiation points of charged particles on the exposed surfaces of the sheets L1 to L5 held by the lamination conveyance holder 60 in a region smaller than the exposed surfaces. For example, the areas shorter than the length of the sheets L1 to L5 in the X-axis direction are irradiation points on the exposed surfaces of the sheets L1 to L5 of the holder charger 70 and the holder remover 74. The length of the irradiation point in the Y-axis direction may be equal to or longer than the lengths of the sheets L1 to L5 in the Y-axis direction. By relatively moving the lamination conveyance holder 60, the holder charger 70, and the holder discharger 74 in the X-axis direction, charged particles can be irradiated on the entire exposed surfaces of the sheets L1 to L5 conveyed by the lamination conveyance holder 60.

The stage power eliminator 72 may be fixed to the lamination stage 80, for example. For example, the stage charge remover 72 may irradiate charged particles on the entire surface of the mounting surface of the lamination stage 80. That is, the stage charge remover 72 is set to have a wider irradiation point of charged particles on the lamination stage 80 than the stage charge remover 68, the holder charge remover 70, and the holder charge remover 74.

The distance between the stage charger 68, the holder charger 70, the stage static eliminator 72, and the holder static eliminator 74 and the sheets L1 to L5 to be irradiated with the charged particles may be 10mm or more and 120mm or less. Further, the spacing distance may be kept at 50mm. In this regard, a Z-lift mechanism for adjusting the position in the Z-axis direction may be provided in the stage charger 68, the holder charger 70, the stage static eliminator 72, and the holder static eliminator 74.

The stage charger 68, the holder charger 70, the stage static eliminator 72, and the holder static eliminator 74 may be configured to irradiate charged particles having a voltage value V in the range of-50 kV < V < -5kV and 5kV < V <50 kV.

For example, as described later, the holder charger 70 irradiates charged particles to eliminate warpage and deflection of the sheets L1 to L5 conveyed to the lamination conveyance holder 60. Here, by irradiating charged particles having a voltage value lower than-5 kV or a voltage value exceeding 5kV, warpage and deflection of the sheets L1 to L5 are effectively eliminated. Further, by setting the voltage value to a voltage value higher than-50 kV or a voltage value lower than 50kV, damage such as insulation breakdown of the sheets L1 to L5 can be suppressed.

The controller 20 shown in fig. 6 controls the respective devices of the laminating apparatus 10. The controller 20 is constituted by a computer, for example. That is, the controller 20 includes an input/output controller 21, a CPU22, a ROM23, a RAM24, and a Hard Disk Drive (HDD) 25, which are connected to an internal bus 28. Further, the controller 20 includes an input section 26 such as a mouse, a keyboard, and a display section 27 such as a display, which are connected to an internal bus 28.

In the ROM23 as a storage section of the controller 20, a program for executing the voltage setting flow shown in fig. 8 and the stacking process shown in fig. 9 to 18 is stored. The program may be provided by a communication unit or may be stored in a computer-readable recording medium such as a CD-ROM or a USB memory and executed.

The program stored in the ROM23 or provided by the communication unit and the recording medium is executed by the CPU22 of the computer constituting the controller 20. By executing this program, the controller 20 is provided with the functional blocks shown in fig. 7.

That is, the controller 20 includes a storage conveyance holder control unit 110, a stage control unit 112, a lamination conveyance holder control unit 114, a sheet information storage unit 116, a charger control unit 118, a static eliminator control unit 120, and a crimper control unit 122.

As shown in fig. 7, the storage conveyance holder control unit 110 controls the operation of the storage conveyance holder 40. For example, the storage conveyance holder control unit 110 sets the movement destination of the storage conveyance holder 40 that does not hold a sheet from among the sheet storages 30L1 to 30L5 shown in fig. 4.

For example, the conveyance holder control section for a reservoir 110 includes a sheet counter 111. The sheet counter 111 stores the order of the sheet storages 30L1 to 30L5 designated as the movement destination of the storage conveyance holder 40.

For example, the storage conveyance holder control unit 110 specifies the movement destination of the storage conveyance holder 40 in the order of the sheet storage 30L5, the sheet storage 30L4, the sheet storage 30L3, the sheet storage 30L2, and the sheet storage 30L 1. After the sheet stock 30L1 is designated, the stock conveyance holder control unit 110 returns the movement destination of the stock conveyance holder 40 to the sheet stock 30L5.

In addition, for example, in the sheet counter 111, as an initial setting, the sheet accumulator 30L5 is set as a movement destination of the first accumulator conveyance holder 40 at the time of starting the stacking apparatus 10. Alternatively, the movement destination of the conveyance holder 40 for the accumulator at the time of starting the stacking apparatus 10 may be set to any one of the sheet accumulators 30L1 to 30L5 by an equipment manager or the like.

The storage conveyance holder control unit 110 sets the conveyance destination of the storage conveyance holders 40 holding the sheets L1 to L5 from the sheet storages 30L1 to 30L5 on the alignment table 50.

The storage transport holder control unit 110 controls the lowering and raising operations of the suction plate 44. For example, when the conveying holder 40 for a container reaches the sheet storages 30L1 to 30L5 designated as the moving destination, the conveying holder control section for a container 110 lowers the suction plate 44 of the conveying holder 40 for a container. For example, the storage conveyance holder 40 drives the lifting mechanism 42 to lower the suction plate 44 until the suction plate is brought into contact with the uppermost sheets L1 to L5 of the sheet storages 30L1 to 30L5. When the suction plate 44 sucks the sheets L1 to L5, the storage conveyance holder control unit 110 drives the lifting mechanism 42 to raise the suction plate 44.

When the transport holder 40 for the stocker reaches the stage plate 53 of the alignment table 50 designated as the transport destination of the sheets L1 to L5, the transport holder control unit 110 for the stocker drives the elevating mechanism 42 to lower the suction plate 44 until the suction plate comes into contact with the stage plate 53. When the sheets L1 to L5 are separated from the suction plate 44, the storage conveyance holder control unit 110 drives the lifting mechanism 42 to raise the suction plate 44.

Regarding the adsorption and detachment of the sheets L1 to L5, the accumulator conveyance holder control unit 110 controls the internal pressure of the air pipe 46 shown in fig. 5. For example, when the sheets L1 to L5 are sucked from the sheet holders 30L1 to 30L5 to the holder 40, the holder control unit 110 sets the air piping 46 in a negative pressure state. For example, the accumulator conveyance holder control unit 110 outputs an opening command to a valve (not shown) provided in a branch pipe branched from the air pipe 46 and connected to a negative pressure source (not shown).

When the sheets L1 to L5 being conveyed are transferred from the accumulator conveyance holder 40 to the stage plate 53 of the alignment stage 50, the accumulator conveyance holder control unit 110 outputs a closing command to a valve provided in a branch pipe branched from the air pipe 46 and connected to a negative pressure source. Then, the accumulator conveyance holder control unit 110 outputs an opening command to a valve (not shown) provided in a branch pipe branched from the air pipe 46 and connected to a positive pressure source (not shown).

As shown in fig. 5 and 7, the alignment stage control section 112 generates a drive instruction for the moving mechanism 52 based on the image of the sheet material mounted on the stage plate 53 acquired from the alignment camera 56. The alignment stage control section 112 compares a captured image of, for example, the alignment camera 56 with a reference image stored in advance, and obtains a sheet position shift and an angle shift with respect to a target position and an angle determined in the reference image. Further, the alignment stage control section 112 outputs a driving instruction for canceling the obtained offset to the moving mechanism 52.

The lamination conveyance holder control unit 114 controls the operation of the lamination conveyance holder 60. For example, the lamination conveyance holder control unit 114 reciprocates the lamination conveyance holder 60 between the alignment stage 50 and the lamination stage 80.

The lamination conveyance holder control unit 114 controls the lowering and raising operations of the suction plate 64. For example, when the lamination conveyance holder 60 reaches the stage plate 53 of the alignment stage 50 designated as the movement destination shown in fig. 5, the lamination conveyance holder control unit 114 lowers the suction plate 64. For example, the lamination conveyance holder control unit 114 drives the lifting mechanism 62 to lower the suction plate 64 until it contacts the stage plate 53. When the suction plate 64 sucks the sheets L1 to L5, the stacking conveyance holder control unit 114 drives the lifting mechanism 62 to raise the suction plate 64.

When the lamination conveyance holder 60 reaches the lamination stage 80 designated as the conveyance destination of the sheets L1 to L5, the lamination conveyance holder control unit 114 lowers the suction plate 64 of the lamination conveyance holder 60. For example, the lamination conveyance holder control unit 114 drives the lifting mechanism 62 to lower the suction plate 64 until it contacts the lamination table 80. When the sheets L1 to L5 are separated from the suction plate 64, the stacking conveyance holder control unit 114 drives the lifting mechanism 62 to raise the suction plate 64.

Regarding the adsorption and detachment of the sheets L1 to L5, the lamination conveyance holder control unit 114 controls the internal pressure of the air pipe 66 shown in fig. 5. For example, when the sheets L1 to L5 are sucked from the stage plate 53 to the lamination conveyance holder 60, the lamination conveyance holder control unit 114 outputs an opening command to a valve (not shown) provided in a branching pipe branching from the air pipe 66 and connected to a negative pressure source (not shown).

When the sheets L1 to L5 being conveyed are transferred from the lamination conveyance holder 60 to the lamination table 80, the lamination conveyance holder control unit 114 outputs a closing command to a valve provided in a branching pipe branching from the air pipe 66 and connected to a negative pressure source (not shown). Then, the lamination conveyance holder control unit 114 outputs an opening command to a valve (not shown) provided in a branch pipe branched from the air pipe 66 and connected to a positive pressure source (not shown).

The charger control unit 118 performs irradiation control of charged particles by the stage charger 68 and the holder charger 70. The irradiation control includes control of irradiation timing and voltage control of charged particles. As described later, the voltage control is performed together with the voltage control of the power divider control section 120.

As shown in fig. 7, the lamination conveyance holder control unit 114 transmits the coordinate information of the lamination conveyance holder 60 to the charger control unit 118. Based on the coordinate information, the charger control unit 118 sets the irradiation timing of the charged particles of the stage charger 68 and the holder charger 70. The charger control unit 118 may confirm the actual position of the lamination conveyance holder 60 captured by a camera or the like, not shown, and control the stage charger 68 and the holder charger 70 to irradiate charged particles at the timing when the lamination conveyance holder 60 reaches a predetermined position.

The charge remover control unit 120 performs irradiation control of charged particles by the stage charge remover 72 and the holder charge remover 74. The irradiation control includes control of irradiation timing and voltage control of charged particles.

As shown in fig. 7, the coordinate information of the lamination conveyance holder 60 is transmitted from the lamination conveyance holder control unit 114 to the static eliminator control unit 120. The charge remover control unit 120 sets the irradiation timing of charged particles of the stage charge remover 72 and the holder charge remover 74 based on the coordinate information. The charge remover control unit 120 may confirm the actual position of the lamination conveyance holder 60 captured by a camera or the like, not shown, and control the charge remover 74 to irradiate charged particles at the timing when the lamination conveyance holder 60 reaches a predetermined position.

< procedure for setting Voltage >

Fig. 8 illustrates a voltage setting flow of the charger control unit 118 and the static eliminator control unit 120 for each of the stage charger 68, the holder charger 70, the stage static eliminator 72, and the holder static eliminator 74.

For example, the voltage setting flow of fig. 8 is performed for each batch of sheets L1 to L5 accommodated in the sheet storages 30L1 to 30L 5. The batch is a unit of a roll of the sheets L1 to L5 before the sheets are cut into individual sheets, and in short, means that the thickness of the insulating film 106 of each of the sheets L1 to L5 can be regarded as a constant unit.

For example, when stacking the first sheets L1 to L5 of a new batch, the voltage setting flow of fig. 8 is executed. After the second sheet, the voltages V0 to V4 set for each of the sheets L1 to L5 are stored in the charger control unit 118 and the static eliminator control unit 120. Further, voltages V0 to V4 are set based on the sheets L1 to L5 to be conveyed to the lamination conveyance holder 60 sent from the sheet counter 111.

As shown in fig. 7 and 8, the charger control section 118 determines sheets to be conveyed to the conveyance holder 60 for lamination, in other words, sheets to be laminated next to the laminated body 100A in the middle of lamination (acquired sheet numbers) (S10).

The charger control section 118 refers to the sheet information storage section 116 to acquire sheet thickness information of the conveyance target sheet (S12). Next, the charger control portion 118 obtains a voltage value V0 based on the sheet thickness information (S14). The voltage value V0 is a voltage value required for eliminating warpage or deflection of the sheets L1 to L5 in the lamination conveyance holder 60, and is obtained by, for example, experiments and simulations in advance.

Here, the voltage value is qualitatively determined according to the thickness of the insulating film 106 of the sheets L1 to L5. More specifically, the thinner the insulating film 106, the higher the set voltage. Here, the high voltage includes a positive high voltage and a negative high voltage, and in short, refers to a voltage having a high absolute value of a voltage value.

As the insulating film 106 becomes thinner, the surface elastic modulus (in other words, the stretching degree) of the insulating film 106 decreases, and the amount of warpage and deflection due to the expansion ratio difference and the shrinkage ratio difference with the metal layer 104 increase. Therefore, in the voltage setting flow according to the present embodiment, the thinner the insulating films 106 of the sheets L1 to L5 during conveyance, the higher the voltage of the irradiated charged particles is set.

Further, the charger control unit 118 sets the voltage value V1 of the charged particles irradiated by the holder charger 70 to the voltage value V0 (S16). Further, the charge remover control unit 120 sets the voltage value V3 of the charged particles irradiated by the holder charge remover 74 to a voltage value having an absolute value equal to V0 (=v1) and an opposite polarity (S18). Note that, even if the charging voltage V0 and the charge-removing voltage V3 are of the same polarity, v3=v0 may be set instead of v3= -v0 to obtain the charge-removing effect by polarization. The absolute values of the charging voltage and the neutralization voltage are not limited to be equal, and the neutralization voltage may be appropriately set according to the neutralization device and the neutralization method.

The charger control unit 118 sets the voltage V2 of the charged particles irradiated by the stage charger 68 to the voltage V0 (S20). Further, the charge trap control unit 120 sets the voltage value V4 of the charged particles irradiated by the stage charge trap 72 to a voltage value having an absolute value equal to V0 (=v2) and an opposite polarity (S22). Note that even if the charging voltage V0 and the charge-removing voltage V4 are of the same polarity, v4=v0 may be set instead of v4= -v0 to obtain the charge-removing effect by polarization. The absolute values of the charging voltage and the neutralization voltage are not limited to be equal, and the neutralization voltage may be appropriately set according to the neutralization device and the neutralization method.

According to the above-described voltage setting flow, by irradiating the charged particles to the sheets L1 to L5 vacuum-sucked by the lamination conveyance holder 60, the warped portions or the deflected portions (floating portions) of the sheets L1 to L5 are sucked by the lamination conveyance holder 60 by electrostatic suction. Here, the thinner the insulating films 106 of the sheets L1 to L5 during conveyance, that is, the larger the warpage amount and the deflection amount as described above, the higher the voltage of the irradiated charged particles, thereby increasing the electrostatic attraction force and eliminating the warpage and the deflection.

Further, the uppermost surface of the laminate 100A in the middle of lamination is irradiated with charged particles having a voltage equal to the electrostatic attraction at the lamination stage 80. That is, the electrostatic attraction force by which the lamination conveyance holder 60 attracts the sheets L1 to L5 is equal to the electrostatic attraction force by which the lamination body 100A in the middle of lamination attracts the sheets L1 to L5. Accordingly, when the sheets L1 to L5 are separated by jetting positive pressure air from the lamination conveyance holder 60 and transferred to the lamination stage 80, the separation is prevented from being hindered by the electrostatic attraction force applied to the lamination conveyance holder 60 to eliminate warpage and deflection. In other words, the warpage and deflection of the sheets L1 to L5 can be eliminated at the maximum voltage within the range where the sheets L1 to L5 are not prevented from being separated from the lamination conveyance holder 60 by electrostatic attraction.

As shown in fig. 7, the crimper control portion 122 controls the crimper 90 to crimp the final laminated body 100B. The final laminate 100B of the sheet L1 laminated to the uppermost layer on the lamination stage 80 is conveyed to the crimper 90 by the conveyance holder 91.

The press-bonding device 90 compresses the final laminate 100B from the up-down direction, in other words, the lamination direction while heating it. The crimping process is controlled by the crimper control portion 122. As a result of the press-bonding process, the layers of the final laminate 100B are fixed as shown in the lower part of fig. 1, and mounted as a circuit substrate to a communication device or the like.

< lamination Process >

Fig. 9 to 18 illustrate a lamination process of the lamination device 10 according to the present embodiment. In the sheet counter 111 of the storage conveyance holder control unit 110 shown in fig. 7, the sheet storage 30L5 is set as the movement destination of the first storage conveyance holder 40 at the start-up of the stacking apparatus 10. Therefore, as shown in fig. 9, the movement destination of the conveying holder 40 for the reservoir is designated as the sheet reservoir 30L5.

As shown in fig. 9 and 10, the conveyance holder 40 for a reservoir (front stage holder) vacuum-sucks the sheet L5 from the sheet reservoir 30L5 and moves it to the alignment stage 50.

As shown in fig. 10, when the transport holder 40 for the storage reaches the aligning table 50, the suction plate 44 and the sheet L5 sucked thereby are lowered by the elevating mechanism 42. When the sheet L5 comes into contact with the stage plate 53 of the alignment table 50, the lowering drive of the elevating mechanism 42 is stopped. For example, the lowering drive of the elevating mechanism 42 is stopped by a torque sensor.

At this time, as shown in fig. 10, the sheet L5 is pressed against the stage plate 53 of the alignment table 50 by the conveying holder 40 for reservoir (front stage holder). Even when the sheet L5 is warped or deflected, the warping or deflection can be temporarily eliminated by pressing the lamination conveyance holder 40. In this state (unfolded state), the alignment camera 56 photographs the sheet L5 on the stage plate 53 through the light-transmitting plate 54 (see fig. 1).

As shown in fig. 7, the alignment stage control portion 112 generates a drive instruction for the moving mechanism 52 based on the image of the sheet L5 acquired from the alignment camera 56. The alignment stage control section 112 compares, for example, a captured image of the alignment camera 56 with a reference image stored in advance, and obtains a positional shift and an angular shift of the sheet L5 with respect to the target position, angle determined in the reference image. Further, the alignment stage control section 112 outputs a driving instruction for canceling the obtained offset to the moving mechanism 52.

As shown in fig. 11, after the suction plate 44 of the transport holder 40 for the storage is separated from the stage plate 53, the sheet L5 is aligned with the drive of the moving mechanism 52. As shown in fig. 12, the aligned sheet L5 is vacuum-sucked by the lamination conveyance holder 60.

The lamination conveyance holder 60 for vacuum suction sheets L5 moves toward the lamination stage 80 in the X-axis direction in accordance with a drive command of the lamination conveyance holder control unit 114 (see fig. 7). During this movement, as shown in fig. 13, charged particles such as ion particles are irradiated from the holder charger 70 onto the exposed surface of the sheet L5 vacuum-sucked by the lamination conveyance holder 60.

At this time, the storage conveyance holder control unit 110 shown in fig. 7 designates the destination of movement of the storage conveyance holder 40 as the sheet storage 30L4 in the order stored in the sheet counter 111. Accordingly, as shown in fig. 13, the transport holder 40 for the accumulator is moved to the sheet accumulator 30L4, and the second-layer sheet L4 is sucked (vacuum sucked).

For example, as shown in fig. 7, the current coordinates of the lamination conveyance holder 60 are sent from the lamination conveyance holder control section 114 to the charger control section 118. Upon receiving the coordinates, the charger control unit 118 controls the holder charger 70, and irradiates charged particles upward from the holder charger 70 in the entire process of passing the sheet L5 conveyed to the lamination conveyance holder 60 over the holder charger 70. Thereby, charged particles are incident on the entire exposed surface of the sheet L5.

As shown in fig. 14, the charged particles are irradiated to eliminate warpage or deflection of the sheet L5. By the irradiation of the charged particles, an adsorption force due to electrostatic attraction (coulomb force) is generated on the sheet L5 in addition to an adsorption force due to vacuum. By such electrostatic adsorption, the floating portion 12 of the sheet L5 separated (peeled) from the holding surface of the adsorption plate 64 is attracted by the adsorption plate 64. As will be described later in the voltage setting process, the charged particles irradiated from the holder charger 70 may be positively charged or negatively charged.

Note that, as described above, the voltage of the charged particles irradiated onto the sheet attracted by the lamination conveyance holder 60 is set to be higher as the sheet is thinner. Here, the high voltage includes a positive high voltage and a negative high voltage, and in short, refers to a voltage having a high absolute value of a voltage value.

As the insulating film 106 shown in fig. 1 becomes thinner, the surface elastic modulus (in other words, the stretching degree) of the insulating film 106 decreases, and the amount of warpage and deflection due to the expansion ratio difference and the shrinkage ratio difference with the metal layer 104 increase. Therefore, in the lamination process according to the present embodiment, the thinner the insulating films 106 of the sheets L1 to L5 during conveyance, the higher the voltage of the irradiated charged particles is set.

As shown in fig. 15, the second-layer sheet L4 is conveyed to the alignment table 50 by the conveyance holder 40 for a reservoir. The stage charger 68 attached to the lamination transport holder 60 irradiates charged particles onto the sheet mounting surface of the lamination stage 80. For example, charged particles are irradiated from the stage charger 68 from the upstream end to the downstream end of the X axis of the lamination stage 80.

In fig. 15, the sheets L1 to L5 are not placed on the lamination stage 80, but when the sheets L1 to L5 are laminated on the lamination stage 80, charged particles are irradiated from the stage charger 68 onto the uppermost surface of the laminated body 100A in the middle of lamination. In other words, the charged particles are irradiated from the stage charger 68 onto the exposed surface of the uppermost sheet of the plurality of sheets stacked on the stacking table 80. Note that, since the size of the lamination stage 80 is larger than the sizes of the sheets L1 to L5, charged particles are also irradiated to the portions where the sheets L1 to L5 are not placed (i.e., the exposed portions of the lamination stage 80).

At this time, as described in the above-described voltage setting flow, the charged particles irradiated from the stage charger 68 and the charged particles irradiated from the holder charger 70 are set to the same voltage (v1=v2). By the irradiation of the charged particles, electrostatic attraction is generated on the mounting surface of the lamination table 80 and the uppermost surface of the lamination body 100A (see fig. 5) in the middle of lamination.

When the stacking transport holder 60 reaches the stacking table 80, as shown in fig. 16, the suction plate 64 and the sheet L5 sucked at the lower end thereof are lowered by the lowering drive of the elevating mechanism 62. When the sheet L5 comes into contact with the mounting surface of the lamination table 80 or the uppermost surface of the laminate 100A during lamination, positive pressure air for release is ejected from the air pipe 66.

At this time, an electrostatic attraction force acts between the lamination conveyance holder 60 and the sheet L5. On the other hand, electrostatic attraction force also acts between the lamination stage 80 and the sheet L5. As described above, the charged particles irradiated from the stage charger 68 and the charged particles irradiated from the holder charger 70 are set to the same voltage (v1=v2). Therefore, the electrostatic attraction force acting between the lamination conveyance holder 60 and the sheet L5 and the electrostatic attraction force acting between the lamination table 80 and the sheet L5 are theoretically equal. As a result, the warpage and deflection of the sheets L1 to L5 can be eliminated at the maximum voltage within the range where the sheets L1 to L5 are not prevented from being separated from the lamination conveyance holder 60 by the positive pressure air due to the electrostatic adsorption.

As shown in fig. 17, when the lamination transport holder 60 is moved away from the lamination stage 80 and toward the alignment stage 50, charged particles are irradiated from the stage charge remover 72 onto the mounting surface of the lamination stage 80. The voltage value of the charged particles is set to a value that is opposite to the polarity of the charged particles irradiated from the stage charger 68 and equal to the absolute value of the voltage value by the charge remover control unit 120 (see fig. 7), for example.

The charged particles are irradiated from the stage charger 68 onto the stacked body 100A (including the state of only the sheet L5 for convenience) during stacking, but if the irradiation is repeated to accumulate charges, there is a possibility that damage such as insulation breakdown may occur in the stacked body 100A. Therefore, the stacked body 100A in the middle of stacking is subjected to the charge removal by the stage charge remover 72.

Further, as shown in fig. 18, charged particles are irradiated from the holder static eliminator 74 toward the adsorption plate 64 during the movement of the lamination conveyance holder 60. The voltage value of the charged particles is set to a value that is opposite to the polarity of the charged particles irradiated from the holder charger 70 and equal to the absolute value of the voltage value by the charge remover control unit 120 (see fig. 7), for example. The adsorption plate 64 is subjected to the charge removal by the irradiation of the charged particles.

As shown in fig. 18, the aligned second sheet L4 is placed on the alignment table 50. The lamination conveyance holder 60 vacuum-adsorbs the sheet L4, and the processes of fig. 12 to 18 are repeated until the uppermost sheet L1 is laminated.

The final laminate 100B obtained by laminating the uppermost sheet L1 on the lamination stage 80 is conveyed to the crimper 90 by the conveyance holder 91. The press-bonding device 90 compresses the final laminate 100B from the up-down direction, in other words, the lamination direction while heating it. As a result of this crimping process, the layers of the final laminate 100B are fixed as shown in the lower part of fig. 1, and mounted as a circuit substrate to a communication device or the like.

< other examples of laminating apparatus >

In the above-described embodiment, the charged particles are irradiated on the entire exposed surfaces of the sheets L1 to L5 conveyed by the conveying holders 60 for lamination, but the lamination apparatus 10 according to the present embodiment is not limited to this form. Since the purpose of irradiation of the charged particles is to eliminate the floating portions 12 (see fig. 14) of the sheets L1 to L5, the charged particles may be irradiated while focusing on the floating portions 12.

For example, as shown in fig. 19, the stacking apparatus 10 is provided with a camera 130 between the alignment table 50 and the holder-use static eliminator 74. The camera 130 takes the upper side thereof as an imaging area, and can image the surface shapes of the sheets L1 to L5 that are conveyed to the lamination conveyance holder 60 and pass above the camera 130. Note that, when the lamination conveyance holder 60 is positioned above the camera 130, the movement may be temporarily stopped to perform shooting.

Instead of providing the camera 130, the alignment camera 56 may take an image of the surface shapes of the aligned sheets L1 to L5 on the alignment table 50.

In this case, for example, as a functional block of the controller 20, images of the sheets L1 to L5 captured by the camera 130 or the registration camera 56 are sent to the charger control section 118 shown in fig. 7.

The captured images of the sheets L1 to L5 acquired by the camera 130 or the registration camera 56 are sent to the charger control unit 118 (see fig. 7). The charger control unit 118 determines the timing and voltage at which charged particles are irradiated from the holder charger 70 to the sheets L1 to L5 held by the lamination conveyance holder 60, based on the captured surface shapes of the sheets L1 to L5.

Specifically, the charger control unit 118 controls the holder charger 70 so that the floating portions 12 (see fig. 14) of the sheets L1 to L5 separated from the holding surface of the lamination conveyance holder 60 are irradiated with charged particles having a higher voltage than the contact portion of the sheets in contact with the holding surface.

For example, the holder charger 70 irradiates the charged particles only when at least a part of the irradiation points of the charged particles on the exposed surfaces of the conveyed sheets L1 to L5 overlap with the floating portions 12 of the sheets L1 to L5 held by the lamination conveyance holder 60. The irradiation timing can be obtained from the coordinates of the lamination conveyance holder 60 sent from the lamination conveyance holder control section 114 and the surface shapes of the photographed sheets L1 to L5. Note that the irradiation of the charged particles is stopped at the contact portions other than the floating portions 12 of the sheets L1 to L5.

Fig. 20 shows a voltage setting flow related to another example of fig. 8. In the following, regarding fig. 20, the same steps as those of fig. 8 are denoted by the same reference numerals, and the description thereof will be omitted appropriately because the process contents are not changed.

In step S14 of fig. 20, a voltage value V0 is obtained based on the sheet thickness information. Specifically, as described above, the thinner the insulating films 106 of the sheets L1 to L5 shown in fig. 1, the higher the set voltage.

Next, the charger control unit 118 shown in fig. 7 analyzes the surface shapes of the sheets L1 to L5, and determines whether or not at least a part of the sheets is lifted from the suction plate 64 of the lamination conveyance holder 60, in other words, whether or not the lifted portion 12 is present (S30). In the image analysis using the captured image of the alignment camera 56, the presence or absence of the floating portion 12 is determined based on the surface shapes of the sheets L1 to L5 on the stage plate 53. Here, in order to emphasize the floating portion 12 in image analysis, a flash mechanism may be provided in the camera 130 or the alignment camera 56.

When it is determined by image analysis that the sheets L1 to L5 do not have the floating portion 12, the charger control unit 118 sets the set voltage value V1 of the holder charger 70 to 0[ V ] because the floating portion 12 does not need to be eliminated by the charged particles.

On the other hand, when the floating portions 12 of the sheets L1 to L5 are determined in step S30 (S36), the charger control unit 118 sets the irradiation section of the charged particles of the holder charger 70 and the holder static eliminator 74 to only the floating portions 12 (S38). Since the coordinates of the lamination conveyance holder 60 are transmitted from the lamination conveyance holder control unit 114 to the charger control unit 118, the irradiation and stop of the charged particles are controlled in synchronization with the change of the coordinates.

Further, the voltage value V1 of the charged particles irradiated by the charger 70 for the holder is set to the voltage value V0 (S16). The voltage value V3 of the charged particles irradiated by the charge remover 74 for the holder is set to a voltage value equal to V0 (=v1) in absolute value and opposite in polarity (S18).

Here, even when the set voltage value V1 of the holder charger 70 is set to 0V in step S32, the voltage V3 of the holder charge remover 74 is set to the voltage value V0 (S18), and the lamination conveyance holder 60 is charged.

For example, as shown in fig. 16, when sheets are transferred from the lamination conveyance holder 60 to the lamination table 80, there is a possibility that charges may be transferred from the laminate 100A (the sheet L5 in fig. 16) in the midstream of lamination of the charges to the lamination conveyance holder 60 to charge the sheets. Therefore, whether or not charged particles are irradiated by the holder charger 70, the sheets are transferred to the lamination stage 80, and then the lamination transport holder 60 is subjected to charge removal.

According to the stacking apparatus 10 according to the embodiment described above, the floating portions 12 of the sheets L1 to L5 are irradiated with charged particles of relatively high voltage, and the electrostatic attraction force is relatively suppressed in the vicinity of the contact portion including 0[ v ]. This can prevent excessive electrostatic attraction of the sheets L1 to L5, and the sheets L1 to L5 can be easily separated from the stacking transport holder 60 at the stacking table 80.

< other examples of alignment station >

In the above embodiment, as shown in fig. 10, the sheet L5 is pressed against the stage plate 53 of the alignment table 50 by the conveying holder 40 for a reservoir (front stage holder). Thereby, the warp or deflection of the sheet L5 is eliminated, and photographing by the alignment camera 56 is performed in this state.

The manner of eliminating warpage and deflection on the alignment stage 50 according to the present embodiment is not limited to the above manner. In short, if the pressing member is provided, the warp and deflection of the sheets L1 to L5 can be eliminated, and the pressing member is further placed on the sheets L1 to L5 placed on the stage plate 53 of the alignment table 50, and presses the entire surfaces of the sheets L1 to L5.

For example, as shown in fig. 21, a pressing plate 55 may be provided as a pressing member on the alignment stage 50. The pressing plate 55 may be constituted by an acrylic plate, for example. In order to suck the additional platen 55, an air chuck 51 may be provided on the stage plate 53.

Further, as the pressing member, a film member such as a PET film may be used. In this case, the air chuck 51 is evacuated in a state where the sheets L1 to L5 on the stage plate 53 are covered with the film members, whereby the sheets L1 to L5 are sealed with the film members. At this time, the sheets L1 to L5 are pressed by the film members, and the warp and deflection of the sheets L1 to L5 are eliminated.

Note that the pressing plate 55 and the film member may be configured to have an area larger than that of the sheets L1 to L5 so as to be held by the air chuck 51. The pressing plate 55 and the film member are stacked on the sheets L1 to L5 on the stage plate 53 by an equipment manager who manages the stacking process of the stacking apparatus 10 or by a not-shown conveyance robot.

The sheets L1 to L5 pressed against the stage plate 53 of the alignment table 50 by the pressing plate 55 or the film member are photographed by the alignment camera 56. Based on the captured image, the positional shift and the angular shift of the sheets L1 to L5 on the stage plate 53 are corrected.

Claims

1. A laminating apparatus that multilayer-laminates sheets having metal layers laminated on insulating films, wherein the laminating apparatus comprises:

a lamination stage for laminating the sheets;

a conveyance holder that holds the sheet by vacuum suction and conveys it to the lamination stage; and

A holder charger for irradiating charged particles toward the sheet held by the transport holder,

the holder charger irradiates charged particles of higher voltage as the insulating film of the sheet being conveyed is thinner.

2. The stacking device according to claim 1, wherein,

the laminating apparatus includes a stage charger that irradiates charged particles toward an exposed surface of an uppermost one of the sheets laminated on the laminating stage,

the holder charger and the stage charger irradiate charged particles having equal voltages to each other.

3. A laminating apparatus that multilayer-laminates sheets having metal layers laminated on insulating films, wherein the laminating apparatus comprises:

a lamination stage for laminating the sheets;

a conveyance holder that holds the sheet by vacuum suction and conveys it to the lamination stage;

a holder charger for irradiating charged particles toward the sheet held by the transport holder; and

a camera for photographing the surface shape of the sheet held by the conveyance holder,

the holder irradiates a floating portion of the sheet, which is determined based on a surface shape of the sheet photographed by the camera and separated from a holding surface of the conveyance holder, with charged particles having a higher voltage than an adhesion portion of the sheet to be adhered to the holding surface, with a charger.

4. The stacking device according to claim 3, wherein,

the charged particles irradiated to the floating portion of the sheet are set to a higher voltage as the insulating film of the sheet is thinner.

5. The laminating apparatus according to claim 3 or 4, wherein,

the holder determines an irradiation point of charged particles on an exposed surface of the sheet held by the transport holder in a region smaller than the exposed surface,

the holder charger irradiates charged particles only when at least a part of the irradiation point overlaps the floating portion of the sheet held by the transport holder.

6. The stacking device of claim 1, comprising:

an alignment stage for placing the sheet before being held by the conveyance holder and aligning the placed sheet; and

a pressing member further mounted on the sheet mounted on the alignment table and pressing the entire surface of the sheet,

at least a part of the sheet mounting area of the alignment table is made of a light-transmitting member,

an alignment camera for photographing the sheet material placed on the alignment stage through the light-transmitting member is provided,

The alignment camera photographs the sheet pressed against the alignment stage by the pressing member.

7. A method of manufacturing a laminate for manufacturing a laminate including a plurality of sheets in which metal layers are laminated on an insulating film, wherein the method of manufacturing a laminate includes:

a lamination step of holding the sheets by a conveyance holder by vacuum suction and conveying the sheets to a lamination stage on which the sheets are sequentially laminated; and

a pressure bonding step of pressure bonding the laminated body of the sheets laminated on the lamination stage and fixing the layers,

in the lamination step, as the insulating film of the sheet becomes thinner, charged particles of a higher voltage are irradiated to the sheet in conveyance held by the conveyance holder.

8. The method for producing a laminate according to claim 7, wherein,

in the lamination step, charged particles of equal voltage to each other are irradiated toward the exposed surface of the sheet in conveyance held by the conveyance holder and the uppermost sheet of the plurality of layers of the sheets laminated on the lamination stage.

9. A method of manufacturing a laminate for manufacturing a laminate including a plurality of sheets in which metal layers are laminated on an insulating film, wherein the method of manufacturing a laminate includes:

in the stacking step, charged particles having a higher voltage than the adhering portion of the sheet adhering to the holding surface are irradiated to the floating portion of the sheet, which is determined based on the surface shape of the sheet held by the conveyance holder and is separated from the holding surface of the conveyance holder.

10. The method for producing a laminate according to claim 9, wherein,

the thinner the insulating film of the sheet is, the higher the voltage of the charged particles irradiated to the floating portion of the sheet is.