WO2024004277A1 - Lamination device and lamination system - Google Patents

Lamination device and lamination system Download PDF

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Publication number
WO2024004277A1
WO2024004277A1 PCT/JP2023/008258 JP2023008258W WO2024004277A1 WO 2024004277 A1 WO2024004277 A1 WO 2024004277A1 JP 2023008258 W JP2023008258 W JP 2023008258W WO 2024004277 A1 WO2024004277 A1 WO 2024004277A1
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WO
WIPO (PCT)
Prior art keywords
holding
stacking
stacked
supply position
lamination
Prior art date
Application number
PCT/JP2023/008258
Other languages
French (fr)
Japanese (ja)
Inventor
村田航大
鈴木新
福田康平
Original Assignee
株式会社村田製作所
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Publication of WO2024004277A1 publication Critical patent/WO2024004277A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/26Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles
    • B65G47/28Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles during transit by a single conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G57/00Stacking of articles
    • B65G57/02Stacking of articles by adding to the top of the stack
    • B65G57/03Stacking of articles by adding to the top of the stack from above
    • B65G57/04Stacking of articles by adding to the top of the stack from above by suction or magnetic devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H29/00Delivering or advancing articles from machines; Advancing articles to or into piles
    • B65H29/24Delivering or advancing articles from machines; Advancing articles to or into piles by air blast or suction apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H9/00Registering, e.g. orientating, articles; Devices therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/04Construction or manufacture in general

Definitions

  • the present invention relates to a laminating apparatus and a laminating system for laminating objects to be laminated.
  • a stacking apparatus that picks up objects to be stacked that are sequentially conveyed and stacks them sequentially on a stacking stage. Furthermore, a technique for correcting a relative positional shift between the stacking objects and the stacking stage before stacking the stacking objects on the stacking stage is also known.
  • Patent Document 1 discloses a stacking device in which an arm member attracts and holds objects to be stacked that are transported by a transport device such as a belt conveyor, and stacks the objects on a stacking stage.
  • a camera images the stacked objects being transported by the transport device, corrects the positional shift of the stacked objects based on the captured image, and then transfers the stacked objects whose positional shift has been corrected to the arm.
  • the members are configured to be held by suction and stacked on the stacking stage.
  • the present invention is intended to solve the above-mentioned problems, and even if the positional shift occurs when the stacked objects are held by the holding section, the positional shift of the stacked objects stacked on the stacking stage can be suppressed. It is an object of the present invention to provide a laminating device capable of performing the following steps, and a laminating system equipped with such a laminating device.
  • the laminating apparatus of the present invention includes: A holding part that holds a stacked object, the holding part having a transparent part that can transmit imaging light in a direction perpendicular to a holding surface in contact with the stacked object, and an alignment mark provided on the transparent part.
  • an apparatus control unit capable of correcting a relative positional shift between an object and the stacking stage; It is characterized by having the following.
  • the lamination system of the present invention includes: the laminating device; a plurality of supply mechanisms capable of supplying the laminated objects to each of a plurality of supply positions; a moving mechanism including a stator of a linear motor having a predetermined running track, and a movable element of the linear motor that is movable between the plurality of supply positions along the running track; Equipped with The holding part and the lamination stage of the lamination apparatus are included in the movable element.
  • the imaging unit images at least a part of the laminated object held by the holding unit and the alignment mark through the transparent part of the holding unit
  • the device control unit Based on the image captured by the imaging unit, the positional deviation of the stacking target held by the holding unit is detected, and based on the detected positional deviation, the stacking target held by the holding unit and the stacking stage are separated. Since the relative positional deviation between the stacked objects is corrected, even if a positional deviation occurs when the stacked objects are held by the holding section, the positional deviation of the stacked objects stacked on the stacking stage can be suppressed. Can be done.
  • the lamination apparatus described above a plurality of supply mechanisms capable of supplying objects to be laminated, and a movement mechanism are provided, and the holding part and the lamination stage of the lamination apparatus are movable by the movement mechanism. Included in child. Therefore, even if a positional shift occurs when the stacked objects are held by the holding section included in the movable element, the positional shift of the stacked objects stacked on the stacking stage can be suppressed.
  • FIG. 1 is a perspective view schematically showing the configuration of a lamination device in one embodiment.
  • FIG. 3 is a plan view schematically showing the configuration of the holding section when viewed from the holding surface side.
  • FIG. 3 is an enlarged view of the area near the transparent portion when the holding portion is viewed from the side opposite to the holding surface.
  • FIG. 3 is an enlarged view of the area near the transparent portion when the holding portion holding the stacked object provided with the position confirmation mark is viewed from the opposite side to the holding surface.
  • FIG. 3 is a plan view for explaining the moving direction of the stacking stage.
  • FIG. 1 is a plan view schematically showing the configuration of a lamination system including a lamination apparatus in one embodiment.
  • FIG. 3 is a diagram schematically showing the configuration of a movable element of a moving mechanism when viewed in a direction along a travel trajectory of a stator.
  • FIG. 1 is a perspective view schematically showing the configuration of a laminating apparatus 100 in one embodiment.
  • the stacking apparatus 100 in one embodiment includes a holding section 10, a stacking stage 20, an imaging section 30, and a device control section 40.
  • FIG. 1 shows the external shape of the holding portion 10 whose detailed shape is shown in FIG. 2 in a simplified form.
  • the holding unit 10 is configured to hold the stacking objects 1 and to stack the held stacking objects 1 on the stacking stage 20.
  • the stacking objects 1 stacked on the stacking stage 20 have, for example, a sheet-like shape.
  • the object to be laminated 1 is not limited to a sheet-like object.
  • the stacking objects 1 are stacked one after another on the stacking stage 20.
  • a plurality of suction holes 11 are provided on the holding surface 10a of the holding part 10 that is in contact with the object to be laminated 1, and the object to be laminated is The object 1 is held by suction on the holding surface 10a.
  • the objects 1 to be stacked can be stably held by suction.
  • the shape of the suction hole 11 when viewed in the direction perpendicular to the holding surface 10a is circular, but the shape of the suction hole 11 is not limited to a circle.
  • the stacked objects 1 held by suction on the holding surface 10a are shown by dotted lines.
  • the shape of the holding portion 10 when viewed in the direction perpendicular to the holding surface 10a is not rectangular.
  • the shape of the holding portion 10 when viewed in a direction perpendicular to the holding surface 10a is a shape having four inwardly recessed portions 10b with respect to a rectangular shape. Therefore, as shown in FIG. 2, when the stacking object 1 is suction-held on the holding surface 10a, a part of the stacking object 1 is located outside the holding surface 10a.
  • the shape of the holding part 10 is not limited to the shape shown in FIG. 2.
  • the method by which the holding unit 10 holds the stacked objects 1 is not limited to suction holding.
  • the holding part 10 has a transparent part 12 that can transmit imaging light in a direction perpendicular to the holding surface 10a.
  • the transparent portion 12 is made of a material having a transmittance that transmits imaging light, such as a transparent glass material such as quartz glass or float glass, or a transparent resin material such as acrylic.
  • the transparent portion 12 is provided at a position where it overlaps at least a portion of the stacked object 1 in the direction perpendicular to the holding surface 10a when the holding section 10 holds the stacked object 1.
  • the transparent part 12 is provided at a corner position of the holding part 10, as shown in FIGS. 1 and 2.
  • the transparent parts 12 are preferably provided at two corner positions of the holding part 10 for reasons described later.
  • the transparent portion 12 has a rectangular shape when viewed in a direction perpendicular to the holding surface 10a, but may have a shape other than a rectangle.
  • Alignment marks 13 are provided on the transparent portion 12 of the holding portion 10.
  • the alignment mark 13 is a mark that serves as a reference when detecting a positional shift of the stacked object 1 held by the holding unit 10.
  • alignment marks 13 are provided on each of the two transparent parts 12.
  • the alignment mark 13 is provided on the holding surface 10a of the transparent portion 12 having a thickness in a direction perpendicular to the holding surface 10a.
  • the position of the transparent part 12 in the holding part 10 is made into a recessed part with nothing provided therein, and the position of the alignment mark 13 is determined from the edge of the recessed part.
  • a configuration in which the protruding tip is used instead of the alignment mark 13 is also considered, but by providing the transparent part 12, the area for holding the stacking object 1 increases, so that the stacking object 1 is It becomes possible to hold it stably.
  • FIG. 3 is an enlarged view of the area near the transparent portion 12 when the holding portion 10 is viewed from the side opposite to the holding surface 10a.
  • the stacked object 1 held by the holding unit 10 is also shown as a dotted area.
  • the shape of the alignment mark 13 can be any shape as long as the positional shift of the stacked object 1 held by the holding part 10 can be detected.
  • the alignment mark 13 has a rectangular shape.
  • the holding unit 10 holds the stacked objects 1 at the supply position of the stacked objects 1, moves toward the stacking stage 20, and then releases the holding of the stacked objects 1, thereby stacking the stacked objects 1 on the stacking stage 20.
  • Object 1 is stacked.
  • the direction perpendicular to the holding surface 10a of the holding part 10 is the vertical direction, and the holding part 10 is configured to be movable up and down. That is, after holding the stacking object 1 , the holding section 10 descends toward the stacking stage 20 and releases the holding of the stacking object 1 , thereby stacking the stacking object 1 on the stacking stage 20 . .
  • the stacking stage 20 is for stacking the stacking objects 1 held by the holding section 10.
  • the imaging section 30 is disposed at a position opposite to the holding surface 10a with respect to the holding section 10, and captures the stacked object 1 held by the holding section 10 through the transparent section 12 of the holding section 10. At least a portion of the alignment mark 13 can be imaged.
  • the imaging section 30 is located vertically above the holding section 10 holding the stacked object 1.
  • the stacking stage 20 is located vertically below the holding section 10 that holds the stacking objects 1.
  • the shape of the stacked object 1 is rectangular, and the imaging section 30 detects the corner 1a (see FIG. 3) of the stacked object 1 held by the holding section 10 and the alignment mark 13 of the holding section 10.
  • the images are taken at the same time.
  • the imaging part 30 can detect the corner 1a of the stacked object 1 held by the holding part 10. It is possible to image the alignment mark 13 at the same time.
  • the alignment mark 13 is provided on the holding surface 10a of the holding part 10 in the transparent part 12, the distance from the imaging part 30 to the alignment mark 13 and the stacked layer held by the holding part 10 from the imaging part 30 The distance to the object 1 is approximately the same. In this case, at least a portion of the stacked object 1 and the alignment mark 13 can be imaged at the same time in a state where the focus is more closely matched. Therefore, the alignment mark 13 is preferably provided on the holding surface 10a of the holding section 10 in the transparent section 12.
  • FIG. 1 shows a configuration example in which transparent parts 12 are provided at two corners of the holding part 10, and two imaging parts 30 are provided corresponding to the two transparent parts 12.
  • the two imaging units 30 each image one corner of the stacked object 1 and one alignment mark 13 of the holding unit 10.
  • the relative position of the stacked object 1 with respect to the holding part 10 can be imaged more accurately.
  • only one imaging section 30 may be provided, and the two corners of the stacked object 1 and the two alignment marks 13 may be simultaneously imaged by the one imaging section 30.
  • the device control unit 40 detects the positional deviation of the stacked object 1 held by the holding unit 10 based on the image captured by the imaging unit 30, and the device control unit 40 detects the positional deviation of the stacked object 1 held by the holding unit 10 based on the detected positional deviation. It is possible to correct the relative positional deviation between the stacking object 1 and the stacking stage 20 that have been stacked. Further, the device control unit 40 can move up and down at least one of the holding unit 10 and the stacking stage 20.
  • the imaging unit 30 and the device control unit 40 may be connected by wiring such as a signal line, or may be connected wirelessly.
  • the device control unit 40 may move the holding unit 10 or move the stacking stage 20. may be moved, or both the holding section 10 and the stacking stage 20 may be moved.
  • the imaging unit 30 may include an image processing unit, and the image processing unit may detect a positional shift of the stacked object 1 held by the holding unit 10 based on the captured image. In that case, the positional deviation of the stacked objects 1 detected by the image processing section is sent to the device control section 40. In this configuration, the image processing section of the imaging section 30 is included in the device control section 40.
  • the first side 13a of the alignment mark 13 which is rectangular in plan view when viewed in a direction perpendicular to the holding surface 10a, is the first side 13a of the transparent portion 12, which is rectangular in plan view.
  • the alignment mark 13 is arranged so that the second side 13b of the alignment mark 13 is parallel to the second side 12b of the transparent part 12.
  • the device control unit 40 detects the center 13c of the alignment mark 13 and the corner 1a of the stacked object 1 held by the holding unit 10 based on the image captured by the imaging unit 30, and The relative position of the corner 1a of the stacked object 1 with respect to the center 13c is detected.
  • the device control unit 40 measures the distance X1 in the X-axis direction and the distance Y1 in the Y-axis direction of the corner 1a of the stacked object 1 with respect to the center 13c of the alignment mark 13.
  • the X-axis direction is a direction parallel to the first side 13a of the alignment mark 13
  • the Y-axis direction is a direction parallel to the second side 13b of the alignment mark 13.
  • the device control unit 40 calculates the difference (Xa -
  • the stacking object 1 held by the holding unit 10 is determined based on the difference (Ya - Y1) between the reference distance Ya in the Y-axis direction when there is no positional shift of the object 1 and the measured distance Y1 in the Y-axis direction. Detect positional deviation.
  • the holding unit 10 holds the stacked object 1
  • the stacked object 1 shifts only in at least one of the X-axis direction and the Y-axis direction, the above-mentioned distance difference in the X-axis direction (Xa-X1) and the distance in the Y-axis direction (Ya-Y1), it is possible to detect the positional shift of the stacked object 1 held by the holding unit 10.
  • the device control part 40 controls the position of the two alignment marks 13. For each, the distance X1 in the X-axis direction and the distance Y1 in the Y-axis direction described above are measured. In that case, the device control unit 40 calculates two distance differences in the X-axis direction (Xa-X1) and two distance differences in the Y-axis direction (Ya-Y1), thereby controlling the stacking target object 1. Detect positional deviation. By using the two alignment marks 13 to obtain two distance differences (Xa-X1) and (Ya-Y1), the positional deviation of the stacked objects 1 can be determined with higher accuracy.
  • the inclination of the stacked object 1 can also be detected. That is, not only the positional deviation of the stacked object 1 along the X-axis direction and the positional deviation along the Y-axis direction, but also the positional deviation in the rotational direction around the center of the stacked object 1 can be detected. Therefore, it is preferable that the transparent parts 12 be provided at two corner positions of the holding part 10.
  • a position confirmation mark 14 may be provided at the position (see FIG. 4).
  • the imaging unit 30 simultaneously images the position confirmation mark 14 of the stacked object 1 held by the holding unit 10 and the alignment mark 13 of the holding unit 10.
  • the device control unit 40 detects a positional shift of the stacked object 1 by detecting the relative position of the position confirmation mark 14 of the stacked object 1 with respect to the center 13c of the alignment mark 13.
  • the position confirmation mark 14 can have any shape.
  • the device control unit 40 corrects the relative positional deviation between the stacking object 1 held by the holding unit 10 and the stacking stage 20 based on the detected positional deviation. That is, the holding unit holds the stacked objects 1 so that the above-mentioned distance difference in the X-axis direction (Xa-X1) and distance difference in the Y-axis direction (Ya-Y1) are each zero. At least one of the stacking stage 10 and the stacking stage 20 is moved. However, if the difference in distance in the X-axis direction (Xa-X1) and the difference in distance in the Y-axis direction (Ya-Y1) described above are each 0, the holder holding the stacked object 1 There is no need to move the section 10 and the stacking stage 20, respectively.
  • the stacking stage 20 is configured to be movable in the X-axis direction, the Y-axis direction, and the ⁇ direction, which is the direction of rotation of the stacking stage 20 around the center.
  • the lamination stage 20 is, for example, a UVW stage movable in the X-axis direction, the Y-axis direction, and the ⁇ direction.
  • the device control unit 40 moves the stacking stage 20 in at least one of the X-axis direction, the Y-axis direction, and the ⁇ direction based on the detected positional deviation, thereby removing the stacked layers held by the holding unit 10. A relative positional shift between the object 1 and the stacking stage 20 is corrected.
  • the device control unit 40 may move the holding unit 10 instead of the stacking stage 20.
  • the device control unit 40 moves the holding unit 10 holding the stacked object 1 in the X-axis direction, the Y-axis direction, and the rotation direction ⁇ around the center of the holding unit 10 based on the detected positional deviation.
  • the relative positional shift between the stacking stage 20 and the stacking object 1 held by the holding unit 10 is corrected.
  • the device control unit 40 may move the holding unit 10 holding the stacking object 1 and the stacking stage 20, respectively, based on the detected positional deviation.
  • the device control unit 40 After correcting the positional deviation described above, the device control unit 40 lowers the holding unit 10 to release the holding unit 10 from adhering to the stacked objects 1 . Thereby, the stacking objects 1 are stacked on the stacking stage 20.
  • FIG. 6 is a plan view schematically showing the configuration of a lamination system 200 including the lamination apparatus 100 in one embodiment.
  • the lamination system 200 includes a lamination device 100, a plurality of supply mechanisms 210, and a movement mechanism 220.
  • the holding section 10 and the lamination stage 20 of the lamination apparatus 100 are included in a moving mechanism 220, as will be described later.
  • the stacked object 1 is a sheet-shaped battery material
  • the object to be laminated 1 is not limited to a sheet-like battery material.
  • the plurality of supply mechanisms 210 supply the stacked objects 1 to each of the plurality of supply positions A1 to A4.
  • One type of stacking object 1 is supplied to each of the plurality of supply positions A1 to A4.
  • the plurality of supply mechanisms 210 include four supply mechanisms: a first supply mechanism 210a, a second supply mechanism 210b, a third supply mechanism 210c, and a fourth supply mechanism 210d.
  • the number of multiple supply mechanisms 210 is not limited to four.
  • the first supply mechanism 210a supplies the stacked objects 1 to the first supply position A1.
  • the object to be laminated 1 supplied by the first supply mechanism 210a is, for example, a resin film.
  • the resin film is a sheet-shaped battery material that functions as a separator, and is made of polyethylene, for example.
  • the first supply mechanism 210a is a belt conveyor, and conveys and supplies the stacked objects 1 placed on the belt to the first supply position A1.
  • the second supply mechanism 210b supplies the stacked objects 1 to the second supply position A2.
  • the object to be laminated 1 supplied by the second supply mechanism 210b is, for example, a first metal foil.
  • the first metal foil is a sheet-shaped battery material that functions as one of the positive electrode and the negative electrode, and is made of, for example, aluminum.
  • the second supply mechanism 210b is a belt conveyor, and conveys and supplies the stacked objects 1 placed on the belt to the second supply position A2.
  • the third supply mechanism 210c supplies the stacked object 1 to the third supply position A3.
  • the object to be laminated 1 supplied by the third supply mechanism 210c is, for example, a resin film.
  • the resin film is a sheet-shaped battery material that functions as a separator, and is made of polyethylene, for example.
  • the resin film supplied by the third supply mechanism 210c can be the same as the resin film supplied by the first supply mechanism 210a. However, a resin film different from that supplied by the first supply mechanism 210a may be used.
  • the third supply mechanism 210c is a belt conveyor, and conveys and supplies the stacked objects 1 placed on the belt to the third supply position A3.
  • the fourth supply mechanism 210d supplies the stacked object 1 to the fourth supply position A4.
  • the laminated object 1 supplied by the fourth supply mechanism 210d is, for example, a second metal foil.
  • the second metal foil is a sheet-shaped battery material that functions as the other electrode of the positive electrode and the negative electrode, and is made of, for example, aluminum.
  • the fourth supply mechanism 210d is a belt conveyor, and conveys and supplies the stacked objects 1 placed on the belt to the fourth supply position A4.
  • first supply mechanism 210a the second supply mechanism 210b, the third supply mechanism 210c, and the fourth supply mechanism 210d are not limited to belt conveyors, and may be used to transport the stacked objects 1. Any structure that can be used will suffice.
  • the supply mechanism 210 may be configured to transport elongated stacked objects 1 instead of transporting the separated stacked objects 1.
  • the long laminated object 1 may be cut into pieces at the supply positions A1 to A4.
  • stacking object 1 is rectangular shape, it may be a shape other than a rectangle.
  • the moving mechanism 220 includes a stator 221 of a linear motor having a predetermined running track, and a mover 222 of a linear motor that can move between a plurality of supply positions A1 to A4 along the running track.
  • the running track of the stator 221 has an elliptical annular shape in plan view, as shown in FIG.
  • the shape of the running track in plan view is not limited to an elliptical annular shape.
  • the mover 222 includes a first mover 222a, a second mover 222b, a third mover 222c, a fourth mover 222d, a fifth mover 222e, and a sixth mover.
  • a child 222f, a seventh mover 222g, and an eighth mover 222h are included.
  • Each of the movers 222a to 222h can move independently. Since the moving mechanism 220 includes a plurality of movers 222, the stacking objects 1 can be stacked efficiently in a short time.
  • FIG. 7 is a diagram schematically showing the configuration of the movable element 222 of the moving mechanism 220 when viewed in the direction along the travel trajectory of the stator 221.
  • the holding section 10 and the lamination stage 20 of the lamination apparatus 100 are included in a movable member 222.
  • a drive mechanism for driving at least one of the holding unit 10 and the stacking stage 20 is included in the mover 222, and the correction amount for driving the drive mechanism is The part that issues instructions for calculating and driving may be placed at a fixed location.
  • FIG. 7 is a diagram schematically showing the configuration of the movable element 222 of the moving mechanism 220 when viewed in the direction along the travel trajectory of the stator 221.
  • the holding section 10 and the lamination stage 20 of the lamination apparatus 100 are included in a movable member 222.
  • a drive mechanism for driving at least one of the holding unit 10 and the stacking stage 20 is included in the mover 222, and the correction amount for driving the drive mechanism is The part that issues instructions for
  • the X-axis direction is the direction in which the supply mechanism 210 conveys the stacked objects 1
  • the Y-axis direction is the direction in which the movable element 222 moves along the traveling track.
  • the Z-axis direction is a vertical direction.
  • the holding unit 10 holds the stacking object 1 conveyed by the supply mechanism 210.
  • the holding unit 10 is movable in the Z-axis direction, approaches the stacked object 1 from above by descending, and holds the stacked object 1.
  • the device control unit 40 lowers the holding unit 10 holding the stacking object 1 toward the stacking stage 20. At this time, it is preferable to adjust the amount of descent of the holding section 10 according to the number of stacked objects 1 stacked on the stacking stage 20. However, the device control unit 40 lowers the holding unit 10 by a predetermined amount, and the system control unit (described later) lowers the stacking stage 20 according to the number of stacked objects 1 stacked on the stacking stage 20. It may be moved in the Z-axis direction. In that case, the amount by which the holding section 10 is lowered by the device control section 40 can be kept constant.
  • the holding unit 10 descends to release the stacking object 1 from adsorption, and the stacking stage The object to be laminated 1 is laminated on the layer 20.
  • stacking target 1 is stacked on the stacking stage 20
  • stacking target 1 on the stacking stage 20 means that the stacking target 1 is stacked on the stacking stage 20. This means that the object 1 to be laminated is laminated.
  • the movable element 222 is attached to two guide rails 223 of the stator 221 that form a running track, and moves along the guide rails 223.
  • the guide rail 223 of the stator 221 is provided not vertically below the movable element 222 but on the side thereof.
  • control must be performed taking into account the difference in the inner races of the two guide rails 223, but in a structure in which the guide rail 223 is provided on the side, the difference in the inner races must be taken into account. It is not necessary and the control is simple.
  • the imaging units 30 of the laminating apparatus 100 are provided at four locations corresponding to the four supply positions A1 to A4. Specifically, a first imaging section 30a is provided corresponding to the first supply position A1, a second imaging section 30b is provided corresponding to the second supply position A2, and a second imaging section 30b is provided corresponding to the second supply position A2. A third imaging section 30c is provided corresponding to A3, and a fourth imaging section 30d is provided corresponding to the fourth supply position A4.
  • FIG. 6 shows an example in which one imaging unit 30 is provided corresponding to one supply position, as described above, two imaging units 30 may be provided corresponding to one supply position. It is preferable.
  • the imaging unit 30 may be provided in a fixed state at positions corresponding to the supply positions A1 to A4, or may be included in the movable element 222 and configured to move with the movement of the movable element 222. Good too.
  • the sixth mover 222f has a (3T)/8 delay timing
  • the fifth mover 222e has a (4T)/8 delay timing
  • the fourth mover 222d has a (5T)/8 delay timing.
  • the third movable element 222c performs the same operation as the first movable element 222a at a timing delayed by (6T)/8
  • the second movable element 222b operates at a timing delayed by (7T)/8.
  • the stacking system 200 includes a system control unit that controls the operations of the plurality of supply mechanisms 210 and the plurality of movement mechanisms 220.
  • the system control unit controls the first supply mechanism 210a so that the resin film, which is the object to be laminated 1, is supplied to the first supply position A1, and also controls the first movable member 222a to the first supply position A1. It is stopped at the first supply position A1.
  • the device control unit 40 lowers the holding unit 10 to hold the stacked object 1 at the first supply position A1.
  • the system control unit controls the first imaging unit 30a to image at least a portion of the stacked object 1 held by the holding unit 10 and the alignment mark 13 of the holding unit 10.
  • the first movable element 222a is stopped at the first supply position A1
  • the third movable element 222c is stopped at the second supply position A2
  • the fifth movable element 222c is stopped at the third supply position A3.
  • the movable element 222e is stopped
  • the seventh movable element 222g is stopped at the fourth supply position A4.
  • the third movable element 222c, the fifth movable element 222e, and the seventh movable element 222g each have a laminated layer supplied at each supply position A1 to A4, similarly to the first movable element 222a, as described later.
  • the objects 1 are held by the holding section 10 and stacked on the stacking stage 20 while moving to the next supply positions A1 to A4 and stopping.
  • the second movable element 222b is located between the first supply position A1 and the second supply position A2
  • the fourth mover 222d is located between the second supply position A2 and the third supply position A3
  • the sixth mover 222f is located between the third supply position A3 and the fourth supply position A4.
  • the eighth movable element 222h is located between the fourth supply position A4 and the first supply position A1.
  • the second movable element 222b, the fourth movable element 222d, the sixth movable element 222f, and the eighth movable element 222h each move to the next supply position A1 to A4 and stop, as will be described later.
  • the relative position of the object to be laminated 1 with respect to the lamination stage 20 is corrected and laminated.
  • the system control unit moves the first movable element 222a from the first supply position A1 to the second supply position A2 along the traveling track. While the first mover 222a moves from the first supply position A1 to the second supply position A2 and stops, the device control unit 40 controls the stacking target object 1 held by the holding unit 10.
  • the position relative to the stacking stage 20 is corrected. Specifically, the device control unit 40 moves at least one of the stacking stage 20 and the holding unit 10 in the By moving in at least one of the axial direction and the ⁇ direction, the relative position of the stacking object 1 held by the holding unit 10 with respect to the stacking stage 20 is corrected.
  • part of the processing performed by the device control unit 40 may be performed by the image processing unit and system control unit of the first imaging unit 30a.
  • the image processing unit detects the positional deviation of the stacked object 1 held by the holding unit 10 based on the captured image
  • the system control unit detects the positional deviation of the stacked object 1 held by the holding unit 10. Based on this, a correction amount for correcting the positional shift is calculated.
  • the apparatus control unit 40 moves at least one of the holding unit 10 and the stacking stage 20 based on the correction amount calculated by the system control unit.
  • the image processing unit and system control unit of the first imaging unit 30a are also included in the configuration of the device control unit 40. The same applies to the following explanation.
  • the device control unit 40 lowers the holding unit 10 and then causes the holding unit 10 to release the stacking object 1 from attracting it. Thereby, the stacking objects 1 are stacked on the stacking stage 20.
  • system control unit not only moves the first movable element 222a from the first supply position A1 to the second supply position A2, but also moves the third movable element 222c from the second supply position A2 to the second supply position A2.
  • the fifth movable element 222e is moved from the third supply position A3 to the fourth supply position A4, and the seventh movable element 222g is moved from the fourth supply position A4 to the fourth supply position A4. 1 to the supply position A1.
  • the system control unit controls the second supply mechanism 210b so that the first metal foil, which is the object to be laminated 1, is supplied to the second supply position A2, and The movable element 222a is stopped at the second supply position A2.
  • the device control unit 40 lowers the holding unit 10 to hold the stacked object 1 at the second supply position A2.
  • the system control unit controls the second imaging unit 30b to image at least a portion of the stacked object 1 held by the holding unit 10 and the alignment mark 13 of the holding unit 10.
  • the third mover 222c is stopped at the third supply position A3, and the fifth mover 222c is stopped at the fourth supply position A4.
  • the seventh movable element 222e is stopped, and the seventh movable element 222g is stopped at the first supply position A1.
  • the second movable element 222b is located between the second supply position A2 and the third supply position A3, and the fourth movable element 222d is located between the third supply position A3 and the fourth supply position.
  • the sixth movable element 222f is located between the fourth supply position A4 and the first supply position A1
  • the eighth movable element 222h is located between the fourth supply position A4 and the first supply position A1. and the second supply position A2.
  • the system control unit moves the first movable element 222a from the second supply position A2 to the third supply position A3 along the traveling track. While the first mover 222a moves from the second supply position A2 to the third supply position A3 and stops, the device control unit 40 controls the stacking target object 1 held by the holding unit 10.
  • the position relative to the stacking stage 20 is corrected. Specifically, the device control unit 40 moves at least one of the stacking stage 20 and the holding unit 10 in the By moving in at least one of the axial direction and the ⁇ direction, the relative position of the stacking object 1 held by the holding unit 10 with respect to the stacking stage 20 is corrected. After the position correction, the operation of stacking the stacking objects 1 on the stacking stage 20 is the same as the operation of stacking the stacking objects 1 supplied to the first supply position A1.
  • system control unit not only moves the first movable element 222a from the second supply position A2 to the third supply position A3, but also moves the third movable element 222c from the third supply position A3 to the third supply position A3.
  • the fifth movable element 222e is moved from the fourth supply position A4 to the first supply position A1
  • the seventh movable element 222g is moved from the first supply position A1 to the first supply position A1. 2 to the supply position A2.
  • the system control unit controls the third supply mechanism 210c so that the resin film, which is the laminated object 1, is supplied to the third supply position A3, and also controls the first mover 222a is stopped at the third supply position A3.
  • the device control unit 40 lowers the holding unit 10 to hold the stacked object 1 at the third supply position A3.
  • the system control unit controls the third imaging unit 30c to image at least a portion of the stacked object 1 held by the holding unit 10 and the alignment mark 13 of the holding unit 10.
  • the third movable element 222c is stopped at the fourth supply position A4, and the fifth movable element is stopped at the first supply position A1.
  • the seventh movable element 222e is stopped, and the seventh movable element 222g is stopped at the second supply position A2.
  • the second movable element 222b is located between the third supply position A3 and the fourth supply position A4, and the fourth movable element 222d is located between the fourth supply position A4 and the first supply position.
  • the sixth movable element 222f is located between the first supply position A1 and the second supply position A2
  • the eighth movable element 222h is located between the second supply position A2. and the third supply position A3.
  • the system control unit moves the first movable element 222a from the third supply position A3 to the fourth supply position A4 along the traveling track. While the first mover 222a moves from the third supply position A3 to the fourth supply position A4 and stops, the device control unit 40 controls the stacking target object 1 held by the holding unit 10. The position relative to the stacking stage 20 is corrected.
  • the device control unit 40 moves at least one of the stacking stage 20 and the holding unit 10 in the X-axis direction and the Y-axis direction based on the image of the stacking object 1 captured by the third imaging unit 30c By moving in at least one of the axial direction and the ⁇ direction, the relative position of the stacking object 1 held by the holding unit 10 with respect to the stacking stage 20 is corrected. After the position correction, the operation of stacking the stacking objects 1 on the stacking stage 20 is the same as the operation of stacking the stacking objects 1 supplied to the first supply position A1.
  • system control unit not only moves the first movable element 222a from the third supply position A3 to the fourth supply position A4, but also moves the third movable element 222c from the fourth supply position A4 to the fourth supply position A4.
  • the fifth movable element 222e is moved from the first supply position A1 to the second supply position A2, and the seventh movable element 222g is moved from the second supply position A2 to the second supply position A2. 3 to supply position A3.
  • the system control unit controls the fourth supply mechanism 210d so that the second metal foil, which is the object to be laminated 1, is supplied to the fourth supply position A4, and also controls the fourth supply mechanism 210d to The movable element 222a is stopped at the fourth supply position A4.
  • the device control unit 40 lowers the holding unit 10 to hold the stacked object 1 at the fourth supply position A4.
  • the system control unit controls the fourth imaging unit 30d to image at least a portion of the stacked object 1 held by the holding unit 10 and the alignment mark 13 of the holding unit 10.
  • the third mover 222c is stopped at the first supply position A1
  • the fifth mover 222c is stopped at the second supply position A2.
  • the movable element 222e is stopped, and the seventh movable element 222g is stopped at the third supply position A3.
  • the second movable element 222b is located between the fourth supply position A4 and the first supply position A1
  • the fourth movable element 222d is located between the first supply position A1 and the second supply position A1.
  • the sixth movable element 222f is located between the second supply position A2 and the third supply position A3
  • the eighth movable element 222h is located between the second supply position A2 and the third supply position A3. and the fourth supply position A4.
  • the system control unit moves the first movable element 222a from the fourth supply position A4 to the first supply position A1 along the traveling track. While the first mover 222a moves from the fourth supply position A4 to the first supply position A1 and stops, the device control unit 40 controls the stacking target object 1 held by the holding unit 10. The position relative to the stacking stage 20 is corrected. Specifically, the device control unit 40 moves at least one of the stacking stage 20 and the holding unit 10 in the X-axis direction and the Y-axis direction based on the image of the stacking object 1 captured by the fourth imaging unit 30d.
  • the relative position of the stacking object 1 held by the holding unit 10 with respect to the stacking stage 20 is corrected.
  • the operation of stacking the stacking objects 1 on the stacking stage 20 is the same as the operation of stacking the stacking objects 1 supplied to the first supply position A1.
  • system control unit not only moves the first mover 222a from the fourth supply position A4 to the first supply position A1, but also moves the third mover 222c from the first supply position A1 to the first supply position A1.
  • the fifth movable element 222e is moved from the second supply position A2 to the third supply position A3, and the seventh movable element 222g is moved from the third supply position A3 to the third supply position A3. 4 to supply position A4.
  • the laminate is used, for example, as a constituent material of an assembled battery.
  • the object to be laminated 1 is not limited to the above-mentioned sheet-shaped battery material.
  • the plurality of types of lamination objects 1 are sheet-like conductive layers and insulating layers, and a multilayer substrate can also be produced by laminating the plurality of types of lamination objects 1.
  • the conductive layer is made of, for example, copper, silver, an alloy containing copper, an alloy containing silver, or Sn--Ag solder.
  • the insulating layer is made of, for example, a liquid crystal polymer, a thermoplastic resin such as polyetheretherketone, polyetherimide, or polyimide, or a thermosetting resin such as epoxy resin or unsaturated polyester.
  • the holding section 10 is configured to approach the supply mechanism 210 by descending to hold the stacked object 1, but when the supply mechanism 210 rises, the holding section 10 approaches the supply mechanism 210. It may be configured to approach 10.
  • the laminating apparatus and laminating system in this application are as follows. ⁇ 1>.
  • a holding part that holds a stacked object the holding part having a transparent part that can transmit imaging light in a direction perpendicular to a holding surface in contact with the stacked object, and an alignment mark provided on the transparent part.
  • a laminating device capable of correcting a relative positional shift between an object and the stacking stage;
  • a laminating device comprising: ⁇ 2>.
  • ⁇ 6> The laminating device according to any one of ⁇ 1> to ⁇ 5>, wherein the holding surface of the holding part is provided with a plurality of suction holes. ⁇ 7>.
  • the laminating device according to any one of ⁇ 1> to ⁇ 6>, a plurality of supply mechanisms capable of supplying the laminated objects to each of a plurality of supply positions; a moving mechanism comprising a stator of a linear motor having a predetermined running track, and a movable element of the linear motor movable between the plurality of supply positions along the running track; Equipped with A lamination system, wherein the holding part and the lamination stage of the lamination apparatus are included in the movable element.
  • the moving mechanism includes a plurality of the movers.

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Abstract

This lamination device 100 comprises: a retention part 10 that retains a lamination object 1, has a transparent portion 12 capable of transmitting imaging light therethrough in a direction perpendicular to a retention surface 10a that comes into contact with the lamination object 1, the transparent portion 12 being provided with an alignment mark 13; a lamination stage 20 that is for laminating the lamination object 1 retained by the retention part 10; an imaging unit 30 that is disposed at a position on the side opposite to the retention surface 10a across the retention part 10 and is capable of capturing, via the transparent portion 12 of the retention part 10, an image of the alignment mark 13 and at least a portion of the lamination object 1 retained by the retention part 10; and a device control unit 40 that is capable of detecting the positional displacement of the lamination object 1 retained by the retention part 10 on the basis of the image captured by the imaging unit 30 and, on the basis of the detected positional displacement, correcting the relative positional displacement between the lamination object 1 retained by the retention part 10 and the lamination stage 20.

Description

積層装置および積層システムLamination equipment and systems
 本発明は、積層対象物を積層する積層装置および積層システムに関する。 The present invention relates to a laminating apparatus and a laminating system for laminating objects to be laminated.
 順次搬送されてくる積層対象物をピックアップし、積層ステージ上に順に積層する積層装置が知られている。また、積層対象物を積層ステージに積層する前に、積層対象物と積層ステージとの間の相対的な位置ずれを補正する技術も知られている。 A stacking apparatus is known that picks up objects to be stacked that are sequentially conveyed and stacks them sequentially on a stacking stage. Furthermore, a technique for correcting a relative positional shift between the stacking objects and the stacking stage before stacking the stacking objects on the stacking stage is also known.
 特許文献1には、ベルトコンベアなどの搬送装置によって搬送されてくる積層対象物をアーム部材が吸着保持して、積層ステージ上に積層する積層装置が開示されている。この積層装置では、搬送装置によって搬送されてくる積層対象物をカメラで撮像し、撮像された画像に基づいて積層対象物の位置ずれを補正した後、位置ずれが補正された積層対象物をアーム部材が吸着保持して、積層ステージ上に積層するように構成されている。 Patent Document 1 discloses a stacking device in which an arm member attracts and holds objects to be stacked that are transported by a transport device such as a belt conveyor, and stacks the objects on a stacking stage. In this stacking device, a camera images the stacked objects being transported by the transport device, corrects the positional shift of the stacked objects based on the captured image, and then transfers the stacked objects whose positional shift has been corrected to the arm. The members are configured to be held by suction and stacked on the stacking stage.
特開2016-33868号公報Japanese Patent Application Publication No. 2016-33868
 しかしながら、特許文献1に記載の積層装置では、アーム部材が積層対象物を吸着保持する際に積層対象物の位置ずれが生じると、位置ずれが生じた状態で積層対象物が積層ステージに積層される可能性がある。 However, in the stacking apparatus described in Patent Document 1, if a positional shift of the stacking target occurs when the arm member attracts and holds the stacking target, the stacking target is stacked on the stacking stage with the positional shift occurring. There is a possibility that
 本発明は、上記課題を解決するものであり、保持部によって積層対象物が保持されたときに位置ずれが生じた場合でも、積層ステージ上に積層される積層対象物の位置ずれを抑制することができる積層装置、および、そのような積層装置を備えた積層システムを提供することを目的とする。 The present invention is intended to solve the above-mentioned problems, and even if the positional shift occurs when the stacked objects are held by the holding section, the positional shift of the stacked objects stacked on the stacking stage can be suppressed. It is an object of the present invention to provide a laminating device capable of performing the following steps, and a laminating system equipped with such a laminating device.
 本発明の積層装置は、
 積層対象物を保持する保持部であって、前記積層対象物と接する保持面と直交する方向に撮像光を透過可能な透明部を有し、前記透明部にアライメントマークが設けられている保持部と、
 前記保持部によって保持される前記積層対象物を積層するための積層ステージと、
 前記保持部に対して前記保持面とは反対側の位置に配置され、前記保持部の前記透明部を介して、前記保持部によって保持されている前記積層対象物の少なくとも一部と、前記アライメントマークとを撮像可能な撮像部と、
 前記撮像部によって撮像された画像に基づいて、前記保持部によって保持されている前記積層対象物の位置ずれを検出し、検出した位置ずれに基づいて、前記保持部によって保持されている前記積層対象物と前記積層ステージとの間の相対的な位置ずれを補正可能な装置制御部と、
を備えることを特徴とする。
The laminating apparatus of the present invention includes:
A holding part that holds a stacked object, the holding part having a transparent part that can transmit imaging light in a direction perpendicular to a holding surface in contact with the stacked object, and an alignment mark provided on the transparent part. and,
a stacking stage for stacking the stacking objects held by the holding unit;
At least a portion of the object to be laminated, which is arranged at a position opposite to the holding surface with respect to the holding part, and which is held by the holding part through the transparent part of the holding part, and the alignment an imaging unit capable of imaging the mark;
Based on the image captured by the imaging unit, a positional shift of the stacked object held by the holding unit is detected, and based on the detected positional shift, the stacked target held by the holding unit is detected. an apparatus control unit capable of correcting a relative positional shift between an object and the stacking stage;
It is characterized by having the following.
 本発明の積層システムは、
 前記積層装置と、
 複数の供給位置のそれぞれに前記積層対象物を供給可能な複数の供給機構と、
 所定の走行軌道を有するリニアモータの固定子と、前記走行軌道に沿って複数の前記供給位置の間を移動可能なリニアモータの可動子とを備える移動機構と、
を備え、
 前記積層装置の前記保持部と前記積層ステージは、前記可動子に含まれることを特徴とする。
The lamination system of the present invention includes:
the laminating device;
a plurality of supply mechanisms capable of supplying the laminated objects to each of a plurality of supply positions;
a moving mechanism including a stator of a linear motor having a predetermined running track, and a movable element of the linear motor that is movable between the plurality of supply positions along the running track;
Equipped with
The holding part and the lamination stage of the lamination apparatus are included in the movable element.
 本発明の積層装置によれば、撮像部によって、保持部の透明部を介して、保持部によって保持されている積層対象物の少なくとも一部と、アライメントマークとを撮像し、装置制御部は、撮像部によって撮像された画像に基づいて、保持部によって保持されている積層対象物の位置ずれを検出し、検出した位置ずれに基づいて、保持部によって保持されている積層対象物と積層ステージとの間の相対的な位置ずれを補正するので、保持部によって積層対象物が保持されたときに位置ずれが生じた場合でも、積層ステージ上に積層される積層対象物の位置ずれを抑制することができる。 According to the laminating apparatus of the present invention, the imaging unit images at least a part of the laminated object held by the holding unit and the alignment mark through the transparent part of the holding unit, and the device control unit: Based on the image captured by the imaging unit, the positional deviation of the stacking target held by the holding unit is detected, and based on the detected positional deviation, the stacking target held by the holding unit and the stacking stage are separated. Since the relative positional deviation between the stacked objects is corrected, even if a positional deviation occurs when the stacked objects are held by the holding section, the positional deviation of the stacked objects stacked on the stacking stage can be suppressed. Can be done.
 本発明の積層システムによれば、上述した積層装置と、積層対象物を供給可能な複数の供給機構と、移動機構とを備えており、積層装置の保持部と積層ステージは、移動機構の可動子に含まれる。したがって、可動子に含まれる保持部によって積層対象物が保持されたときに位置ずれが生じた場合でも、積層ステージ上に積層される積層対象物の位置ずれを抑制することができる。 According to the lamination system of the present invention, the lamination apparatus described above, a plurality of supply mechanisms capable of supplying objects to be laminated, and a movement mechanism are provided, and the holding part and the lamination stage of the lamination apparatus are movable by the movement mechanism. Included in child. Therefore, even if a positional shift occurs when the stacked objects are held by the holding section included in the movable element, the positional shift of the stacked objects stacked on the stacking stage can be suppressed.
一実施形態における積層装置の構成を模式的に示す斜視図である。FIG. 1 is a perspective view schematically showing the configuration of a lamination device in one embodiment. 保持部を保持面側から見たときの構成を模式的に示す平面図である。FIG. 3 is a plan view schematically showing the configuration of the holding section when viewed from the holding surface side. 保持面とは反対側から保持部を見たときの、透明部付近の領域の拡大図である。FIG. 3 is an enlarged view of the area near the transparent portion when the holding portion is viewed from the side opposite to the holding surface. 保持面とは反対側から、位置確認用マークが設けられた積層対象物を保持した保持部を見たときの、透明部付近の領域の拡大図である。FIG. 3 is an enlarged view of the area near the transparent portion when the holding portion holding the stacked object provided with the position confirmation mark is viewed from the opposite side to the holding surface. 積層ステージの移動方向を説明するための平面図である。FIG. 3 is a plan view for explaining the moving direction of the stacking stage. 一実施形態における積層装置を含む積層システムの構成を模式的に示す平面図である。FIG. 1 is a plan view schematically showing the configuration of a lamination system including a lamination apparatus in one embodiment. 固定子の走行軌道に沿った方向に見たときに、移動機構の可動子の構成を模式的に示す図である。FIG. 3 is a diagram schematically showing the configuration of a movable element of a moving mechanism when viewed in a direction along a travel trajectory of a stator.
 以下に本発明の実施形態を示して、本発明の特徴を具体的に説明する。 Embodiments of the present invention will be shown below to specifically explain the features of the present invention.
 図1は、一実施形態における積層装置100の構成を模式的に示す斜視図である。一実施形態における積層装置100は、保持部10と、積層ステージ20と、撮像部30と、装置制御部40とを備える。なお、図1では、図2で詳しい形状を示している保持部10の外観形状を簡略化した形で示している。 FIG. 1 is a perspective view schematically showing the configuration of a laminating apparatus 100 in one embodiment. The stacking apparatus 100 in one embodiment includes a holding section 10, a stacking stage 20, an imaging section 30, and a device control section 40. Note that FIG. 1 shows the external shape of the holding portion 10 whose detailed shape is shown in FIG. 2 in a simplified form.
 保持部10は、積層対象物1を保持し、保持した積層対象物1を積層ステージ20上に積層可能に構成されている。積層ステージ20上に積層される積層対象物1は、例えば、シート状の形状を有する。ただし、積層対象物1がシート状のものに限定されることはない。積層対象物1は、積層ステージ20上に、順に積層される。 The holding unit 10 is configured to hold the stacking objects 1 and to stack the held stacking objects 1 on the stacking stage 20. The stacking objects 1 stacked on the stacking stage 20 have, for example, a sheet-like shape. However, the object to be laminated 1 is not limited to a sheet-like object. The stacking objects 1 are stacked one after another on the stacking stage 20.
 一例として、積層対象物1と接する保持部10の保持面10aには、図2に示すように、複数の吸引孔11が設けられており、複数の吸引孔11を介した吸引によって、積層対象物1を保持面10aに吸着保持する。保持部10の保持面10aに複数の吸引孔11が設けられていることにより、積層対象物1を安定的に吸着保持することができる。図2に示す例では、保持面10aと直交する方向に見たときの吸引孔11の形状は、円形であるが、吸引孔11の形状が円形に限定されることはない。なお、図2では、保持面10aで吸着保持された積層対象物1を点線で示している。 As an example, as shown in FIG. 2, a plurality of suction holes 11 are provided on the holding surface 10a of the holding part 10 that is in contact with the object to be laminated 1, and the object to be laminated is The object 1 is held by suction on the holding surface 10a. By providing the plurality of suction holes 11 in the holding surface 10a of the holding part 10, the objects 1 to be stacked can be stably held by suction. In the example shown in FIG. 2, the shape of the suction hole 11 when viewed in the direction perpendicular to the holding surface 10a is circular, but the shape of the suction hole 11 is not limited to a circle. In addition, in FIG. 2, the stacked objects 1 held by suction on the holding surface 10a are shown by dotted lines.
 図2に示す例において、保持面10aと直交する方向に見たときの保持部10の形状は矩形ではない。具体的には、保持面10aと直交する方向に見たときの保持部10の形状は、矩形の形状に対して内側に凹んだ部位10bを4つ有する形状である。したがって、図2に示すように、積層対象物1が保持面10aで吸着保持されたときに、積層対象物1の一部は、保持面10aよりも外側に位置する。ただし、保持部10の形状が図2に示す形状に限定されることはない。また、保持部10が積層対象物1を保持する方法が吸着保持に限定されることはない。 In the example shown in FIG. 2, the shape of the holding portion 10 when viewed in the direction perpendicular to the holding surface 10a is not rectangular. Specifically, the shape of the holding portion 10 when viewed in a direction perpendicular to the holding surface 10a is a shape having four inwardly recessed portions 10b with respect to a rectangular shape. Therefore, as shown in FIG. 2, when the stacking object 1 is suction-held on the holding surface 10a, a part of the stacking object 1 is located outside the holding surface 10a. However, the shape of the holding part 10 is not limited to the shape shown in FIG. 2. Furthermore, the method by which the holding unit 10 holds the stacked objects 1 is not limited to suction holding.
 保持部10は、保持面10aと直交する方向に撮像光を透過可能な透明部12を有している。透明部12は、撮像光を透過する透過率を有する材料、例えば、石英ガラスやフロートガラスなどの透明ガラス材料や、アクリルなどの透明樹脂材料などからなる。 The holding part 10 has a transparent part 12 that can transmit imaging light in a direction perpendicular to the holding surface 10a. The transparent portion 12 is made of a material having a transmittance that transmits imaging light, such as a transparent glass material such as quartz glass or float glass, or a transparent resin material such as acrylic.
 透明部12は、保持部10が積層対象物1を保持したときに、保持面10aと直交する方向において積層対象物1の少なくとも一部と重なる位置に設けられている。本実施形態において、透明部12は、図1および図2に示すように、保持部10の角の位置に設けられている。透明部12は、後述する理由により、保持部10の2つの角の位置に設けられていることが好ましい。図1および図2に示す例では、保持面10aと直交する方向に見たときの透明部12の形状は矩形であるが、矩形以外の形状であってもよい。 The transparent portion 12 is provided at a position where it overlaps at least a portion of the stacked object 1 in the direction perpendicular to the holding surface 10a when the holding section 10 holds the stacked object 1. In this embodiment, the transparent part 12 is provided at a corner position of the holding part 10, as shown in FIGS. 1 and 2. The transparent parts 12 are preferably provided at two corner positions of the holding part 10 for reasons described later. In the example shown in FIGS. 1 and 2, the transparent portion 12 has a rectangular shape when viewed in a direction perpendicular to the holding surface 10a, but may have a shape other than a rectangle.
 保持部10の透明部12には、アライメントマーク13が設けられている。アライメントマーク13は、保持部10によって保持された積層対象物1の位置ずれを検出する際に基準となるマークである。透明部12が保持部10の2つの角に設けられている場合、2つの透明部12のそれぞれに、アライメントマーク13が設けられている。本実施形態において、アライメントマーク13は、保持面10aと直交する方向に厚みを有する透明部12のうち、保持面10aに設けられている。 Alignment marks 13 are provided on the transparent portion 12 of the holding portion 10. The alignment mark 13 is a mark that serves as a reference when detecting a positional shift of the stacked object 1 held by the holding unit 10. When the transparent parts 12 are provided at two corners of the holding part 10, alignment marks 13 are provided on each of the two transparent parts 12. In this embodiment, the alignment mark 13 is provided on the holding surface 10a of the transparent portion 12 having a thickness in a direction perpendicular to the holding surface 10a.
 なお、積層対象物1の位置ずれを検出するために、保持部10のうち、透明部12が設けられている位置を、何も設けない凹部とするとともに、凹部の縁からアライメントマーク13の位置まで突出するような形状として、突出した先端をアライメントマーク13の代わりとする構成も考えられるが、透明部12を設けることにより、積層対象物1を保持する面積が増えるため、積層対象物1を安定的に保持することが可能となる。 In order to detect the positional deviation of the laminated object 1, the position of the transparent part 12 in the holding part 10 is made into a recessed part with nothing provided therein, and the position of the alignment mark 13 is determined from the edge of the recessed part. A configuration in which the protruding tip is used instead of the alignment mark 13 is also considered, but by providing the transparent part 12, the area for holding the stacking object 1 increases, so that the stacking object 1 is It becomes possible to hold it stably.
 図3は、保持面10aとは反対側から保持部10を見たときの、透明部12付近の領域の拡大図である。図3では、ドットを施した領域として、保持部10によって保持されている積層対象物1も合わせて示している。 FIG. 3 is an enlarged view of the area near the transparent portion 12 when the holding portion 10 is viewed from the side opposite to the holding surface 10a. In FIG. 3, the stacked object 1 held by the holding unit 10 is also shown as a dotted area.
 保持部10によって保持された積層対象物1の位置ずれが検出できるのであれば、アライメントマーク13の形状は、任意の形状とすることができる。図3に示す例では、アライメントマーク13の形状は矩形である。 The shape of the alignment mark 13 can be any shape as long as the positional shift of the stacked object 1 held by the holding part 10 can be detected. In the example shown in FIG. 3, the alignment mark 13 has a rectangular shape.
 保持部10は、積層対象物1の供給位置で積層対象物1を保持し、積層ステージ20に向かって移動した後、積層対象物1の保持を解除することによって、積層ステージ20の上に積層対象物1を積層する。本実施形態では、保持部10の保持面10aと直交する方向は鉛直方向であり、保持部10は上下に移動可能に構成されている。すなわち、保持部10は、積層対象物1を保持した後、積層ステージ20に向かって下降し、積層対象物1の保持を解除することによって、積層ステージ20の上に積層対象物1を積層する。 The holding unit 10 holds the stacked objects 1 at the supply position of the stacked objects 1, moves toward the stacking stage 20, and then releases the holding of the stacked objects 1, thereby stacking the stacked objects 1 on the stacking stage 20. Object 1 is stacked. In this embodiment, the direction perpendicular to the holding surface 10a of the holding part 10 is the vertical direction, and the holding part 10 is configured to be movable up and down. That is, after holding the stacking object 1 , the holding section 10 descends toward the stacking stage 20 and releases the holding of the stacking object 1 , thereby stacking the stacking object 1 on the stacking stage 20 . .
 積層ステージ20は、保持部10によって保持された積層対象物1を積層するためのものである。 The stacking stage 20 is for stacking the stacking objects 1 held by the holding section 10.
 撮像部30は、保持部10に対して保持面10aとは反対側の位置に配置されており、保持部10の透明部12を介して、保持部10によって保持されている積層対象物1の少なくとも一部と、アライメントマーク13とを撮像可能である。本実施形態のように、保持部10の保持面10aが水平方向と平行な方向にある場合、撮像部30は、積層対象物1を保持した保持部10の鉛直上方に位置する。また、積層ステージ20は、積層対象物1を保持した保持部10の鉛直下方に位置する。 The imaging section 30 is disposed at a position opposite to the holding surface 10a with respect to the holding section 10, and captures the stacked object 1 held by the holding section 10 through the transparent section 12 of the holding section 10. At least a portion of the alignment mark 13 can be imaged. When the holding surface 10a of the holding section 10 is in a direction parallel to the horizontal direction as in this embodiment, the imaging section 30 is located vertically above the holding section 10 holding the stacked object 1. Furthermore, the stacking stage 20 is located vertically below the holding section 10 that holds the stacking objects 1.
 本実施形態において、積層対象物1の形状は矩形であり、撮像部30は、保持部10によって保持されている積層対象物1の角1a(図3参照)と、保持部10のアライメントマーク13とを同時に撮像する。図2および図3に示すように、透明部12が保持部10の角の位置に設けられていることにより、撮像部30によって、保持部10に保持されている積層対象物1の角1aとアライメントマーク13とを同時に撮像することができる。 In this embodiment, the shape of the stacked object 1 is rectangular, and the imaging section 30 detects the corner 1a (see FIG. 3) of the stacked object 1 held by the holding section 10 and the alignment mark 13 of the holding section 10. The images are taken at the same time. As shown in FIGS. 2 and 3, since the transparent part 12 is provided at the corner position of the holding part 10, the imaging part 30 can detect the corner 1a of the stacked object 1 held by the holding part 10. It is possible to image the alignment mark 13 at the same time.
 アライメントマーク13が透明部12のうち、保持部10の保持面10aに設けられている場合、撮像部30からアライメントマーク13までの距離と、撮像部30から、保持部10によって保持されている積層対象物1までの距離とは、略同じである。この場合、焦点がより一致した状態で、積層対象物1の少なくとも一部とアライメントマーク13とを同時に撮像することができる。したがって、アライメントマーク13は、透明部12のうち、保持部10の保持面10aに設けられていることが好ましい。 When the alignment mark 13 is provided on the holding surface 10a of the holding part 10 in the transparent part 12, the distance from the imaging part 30 to the alignment mark 13 and the stacked layer held by the holding part 10 from the imaging part 30 The distance to the object 1 is approximately the same. In this case, at least a portion of the stacked object 1 and the alignment mark 13 can be imaged at the same time in a state where the focus is more closely matched. Therefore, the alignment mark 13 is preferably provided on the holding surface 10a of the holding section 10 in the transparent section 12.
 図1では、透明部12が保持部10の2つの角に設けられており、2つの透明部12に対応して、撮像部30を2つ設けた構成例を示している。この場合、2つの撮像部30はそれぞれ、積層対象物1の1つの角と、保持部10の1つのアライメントマーク13とを撮像する。このように、2つの透明部12に対応して撮像部30を2つ設けることにより、より正確に、保持部10に対する積層対象物1の相対的な位置を撮像することができる。ただし、撮像部30を1つだけ設けて、1つの撮像部30によって、積層対象物1の2つの角と、2つのアライメントマーク13とを同時に撮像するようにしてもよい。 FIG. 1 shows a configuration example in which transparent parts 12 are provided at two corners of the holding part 10, and two imaging parts 30 are provided corresponding to the two transparent parts 12. In this case, the two imaging units 30 each image one corner of the stacked object 1 and one alignment mark 13 of the holding unit 10. By providing two imaging units 30 corresponding to the two transparent parts 12 in this way, the relative position of the stacked object 1 with respect to the holding part 10 can be imaged more accurately. However, only one imaging section 30 may be provided, and the two corners of the stacked object 1 and the two alignment marks 13 may be simultaneously imaged by the one imaging section 30.
 装置制御部40は、撮像部30によって撮像された画像に基づいて、保持部10によって保持されている積層対象物1の位置ずれを検出し、検出した位置ずれに基づいて、保持部10によって保持されている積層対象物1と積層ステージ20との間の相対的な位置ずれを補正可能である。また、装置制御部40は、保持部10および積層ステージ20のうちの少なくとも一方を昇降させることができる。撮像部30と装置制御部40との間は、信号線などの配線で接続されていてもよいし、無線で接続されていてもよい。 The device control unit 40 detects the positional deviation of the stacked object 1 held by the holding unit 10 based on the image captured by the imaging unit 30, and the device control unit 40 detects the positional deviation of the stacked object 1 held by the holding unit 10 based on the detected positional deviation. It is possible to correct the relative positional deviation between the stacking object 1 and the stacking stage 20 that have been stacked. Further, the device control unit 40 can move up and down at least one of the holding unit 10 and the stacking stage 20. The imaging unit 30 and the device control unit 40 may be connected by wiring such as a signal line, or may be connected wirelessly.
 保持部10によって保持されている積層対象物1と積層ステージ20との間の相対的な位置ずれを補正するため、装置制御部40は、保持部10を移動させてもよいし、積層ステージ20を移動させてもよいし、保持部10と積層ステージ20の両方を移動させてもよい。 In order to correct the relative positional deviation between the stacking target 1 held by the holding unit 10 and the stacking stage 20, the device control unit 40 may move the holding unit 10 or move the stacking stage 20. may be moved, or both the holding section 10 and the stacking stage 20 may be moved.
 なお、撮像部30が画像処理部を備えており、画像処理部が撮像された画像に基づいて、保持部10によって保持されている積層対象物1の位置ずれを検出するようにしてもよい。その場合、画像処理部によって検出された積層対象物1の位置ずれは、装置制御部40に送られる。この構成の場合、撮像部30の画像処理部は、装置制御部40に含まれる。 Note that the imaging unit 30 may include an image processing unit, and the image processing unit may detect a positional shift of the stacked object 1 held by the holding unit 10 based on the captured image. In that case, the positional deviation of the stacked objects 1 detected by the image processing section is sent to the device control section 40. In this configuration, the image processing section of the imaging section 30 is included in the device control section 40.
 撮像部30によって撮像された画像に基づいて、保持部10によって保持されている積層対象物1の位置ずれを検出する方法の一例について説明する。図3に示す例において、保持面10aと直交する方向に見たときの平面視で、矩形であるアライメントマーク13の第1の側辺13aは、平面視で矩形である透明部12の第1の側面12aと平行であり、アライメントマーク13の第2の側辺13bは、透明部12の第2の側面12bと平行となるように、アライメントマーク13が配置されている。 An example of a method for detecting a positional shift of the stacked object 1 held by the holding unit 10 based on an image captured by the imaging unit 30 will be described. In the example shown in FIG. 3, the first side 13a of the alignment mark 13, which is rectangular in plan view when viewed in a direction perpendicular to the holding surface 10a, is the first side 13a of the transparent portion 12, which is rectangular in plan view. The alignment mark 13 is arranged so that the second side 13b of the alignment mark 13 is parallel to the second side 12b of the transparent part 12.
 装置制御部40は、撮像部30によって撮像された画像に基づいて、アライメントマーク13の中心13cと、保持部10によって保持されている積層対象物1の角1aをそれぞれ検出し、アライメントマーク13の中心13cに対する積層対象物1の角1aの相対的な位置を検出する。一例として、装置制御部40は、アライメントマーク13の中心13cに対する、積層対象物1の角1aのX軸方向における距離X1、および、Y軸方向における距離Y1を測定する。図3において、X軸方向は、アライメントマーク13の第1の側辺13aと平行な方向であり、Y軸方向は、アライメントマーク13の第2の側辺13bと平行な方向である。 The device control unit 40 detects the center 13c of the alignment mark 13 and the corner 1a of the stacked object 1 held by the holding unit 10 based on the image captured by the imaging unit 30, and The relative position of the corner 1a of the stacked object 1 with respect to the center 13c is detected. As an example, the device control unit 40 measures the distance X1 in the X-axis direction and the distance Y1 in the Y-axis direction of the corner 1a of the stacked object 1 with respect to the center 13c of the alignment mark 13. In FIG. 3, the X-axis direction is a direction parallel to the first side 13a of the alignment mark 13, and the Y-axis direction is a direction parallel to the second side 13b of the alignment mark 13.
 続いて、装置制御部40は、積層対象物1の位置ずれが無い場合のX軸方向における基準距離Xaと、測定したX軸方向における距離X1との差(Xa-X1)、および、積層対象物1の位置ずれが無い場合のY軸方向における基準距離Yaと、測定したY軸方向における距離Y1との差(Ya-Y1)に基づいて、保持部10によって保持された積層対象物1の位置ずれを検出する。保持部10が積層対象物1を保持したときに、積層対象物1がX軸方向およびY軸方向のうちの少なくとも1つの方向にのみずれる場合には、上述したX軸方向の距離の差(Xa-X1)およびY軸方向の距離の差(Ya-Y1)を求めることによって、保持部10によって保持された積層対象物1の位置ずれを検出することができる。 Subsequently, the device control unit 40 calculates the difference (Xa - The stacking object 1 held by the holding unit 10 is determined based on the difference (Ya - Y1) between the reference distance Ya in the Y-axis direction when there is no positional shift of the object 1 and the measured distance Y1 in the Y-axis direction. Detect positional deviation. When the holding unit 10 holds the stacked object 1, if the stacked object 1 shifts only in at least one of the X-axis direction and the Y-axis direction, the above-mentioned distance difference in the X-axis direction ( By determining the difference in distance in the Y-axis direction (Xa-X1) and the distance in the Y-axis direction (Ya-Y1), it is possible to detect the positional shift of the stacked object 1 held by the holding unit 10.
 透明部12が保持部10の2つの角の位置に設けられており、2つの透明部12のそれぞれに、アライメントマーク13が設けられている場合、装置制御部40は、2つのアライメントマーク13のそれぞれに対して、上述したX軸方向における距離X1とY軸方向における距離Y1とを測定する。その場合、装置制御部40は、上述したX軸方向における距離の差(Xa-X1)、および、Y軸方向における距離の差(Ya-Y1)をそれぞれ2つ求めることによって、積層対象物1の位置ずれを検出する。2つのアライメントマーク13を用いて、上述した距離の差(Xa-X1)と(Ya-Y1)をそれぞれ2つ求めることによって、積層対象物1の位置ずれをより精度良く求めることができる。また、上述した距離の差(Xa-X1)と(Ya-Y1)をそれぞれ2つ求めることによって、積層対象物1の傾きも検出することができる。すなわち、積層対象物1のX軸方向に沿った位置ずれ、および、Y軸方向に沿った位置ずれだけでなく、積層対象物1の中心周りの回転方向における位置ずれも検出することができる。したがって、透明部12は、保持部10の2つの角の位置に設けられていることが好ましい。 When the transparent parts 12 are provided at two corner positions of the holding part 10 and the alignment marks 13 are provided on each of the two transparent parts 12, the device control part 40 controls the position of the two alignment marks 13. For each, the distance X1 in the X-axis direction and the distance Y1 in the Y-axis direction described above are measured. In that case, the device control unit 40 calculates two distance differences in the X-axis direction (Xa-X1) and two distance differences in the Y-axis direction (Ya-Y1), thereby controlling the stacking target object 1. Detect positional deviation. By using the two alignment marks 13 to obtain two distance differences (Xa-X1) and (Ya-Y1), the positional deviation of the stacked objects 1 can be determined with higher accuracy. Furthermore, by obtaining two distance differences (Xa-X1) and (Ya-Y1) as described above, the inclination of the stacked object 1 can also be detected. That is, not only the positional deviation of the stacked object 1 along the X-axis direction and the positional deviation along the Y-axis direction, but also the positional deviation in the rotational direction around the center of the stacked object 1 can be detected. Therefore, it is preferable that the transparent parts 12 be provided at two corner positions of the holding part 10.
 なお、積層対象物1の位置を確認するため、積層対象物1のうち、保持部10の保持面10aと接する側の面であって、保持面10aと直交する方向において透明部12と重なる位置に、位置確認用マーク14を設けるようにしてもよい(図4参照)。その場合、撮像部30は、保持部10によって保持されている積層対象物1の位置確認用マーク14と、保持部10のアライメントマーク13とを同時に撮像する。装置制御部40は、アライメントマーク13の中心13cに対する、積層対象物1の位置確認用マーク14の相対的な位置を検出することによって、積層対象物1の位置ずれを検出する。なお、位置確認用マーク14の形状は、任意の形状とすることができる。 In order to confirm the position of the stacked object 1, check the position of the surface of the stacked object 1 on the side that is in contact with the holding surface 10a of the holding section 10 and overlaps with the transparent section 12 in the direction orthogonal to the holding surface 10a. A position confirmation mark 14 may be provided at the position (see FIG. 4). In that case, the imaging unit 30 simultaneously images the position confirmation mark 14 of the stacked object 1 held by the holding unit 10 and the alignment mark 13 of the holding unit 10. The device control unit 40 detects a positional shift of the stacked object 1 by detecting the relative position of the position confirmation mark 14 of the stacked object 1 with respect to the center 13c of the alignment mark 13. Note that the position confirmation mark 14 can have any shape.
 上述したように、装置制御部40は、検出した位置ずれに基づいて、保持部10によって保持されている積層対象物1と積層ステージ20との間の相対的な位置ずれを補正する。すなわち、上述したX軸方向における距離の差(Xa-X1)、および、Y軸方向における距離の差(Ya-Y1)がそれぞれ0になるように、積層対象物1を保持している保持部10および積層ステージ20のうちの少なくとも一方を移動させる。ただし、上述したX軸方向における距離の差(Xa-X1)、および、Y軸方向における距離の差(Ya-Y1)がそれぞれ0である場合には、積層対象物1を保持している保持部10および積層ステージ20はそれぞれ移動させる必要がない。 As described above, the device control unit 40 corrects the relative positional deviation between the stacking object 1 held by the holding unit 10 and the stacking stage 20 based on the detected positional deviation. That is, the holding unit holds the stacked objects 1 so that the above-mentioned distance difference in the X-axis direction (Xa-X1) and distance difference in the Y-axis direction (Ya-Y1) are each zero. At least one of the stacking stage 10 and the stacking stage 20 is moved. However, if the difference in distance in the X-axis direction (Xa-X1) and the difference in distance in the Y-axis direction (Ya-Y1) described above are each 0, the holder holding the stacked object 1 There is no need to move the section 10 and the stacking stage 20, respectively.
 例えば、積層ステージ20は、図5に示すように、X軸方向、Y軸方向、および、積層ステージ20の中心周りの回転方向であるθ方向に移動可能に構成されている。積層ステージ20は、例えば、X軸方向、Y軸方向およびθ方向に移動可能なUVWステージである。装置制御部40は、検出した位置ずれに基づいて、積層ステージ20をX軸方向、Y軸方向およびθ方向のうちの少なくとも1つの方向に移動させることによって、保持部10によって保持されている積層対象物1と積層ステージ20との間の相対的な位置ずれを補正する。 For example, as shown in FIG. 5, the stacking stage 20 is configured to be movable in the X-axis direction, the Y-axis direction, and the θ direction, which is the direction of rotation of the stacking stage 20 around the center. The lamination stage 20 is, for example, a UVW stage movable in the X-axis direction, the Y-axis direction, and the θ direction. The device control unit 40 moves the stacking stage 20 in at least one of the X-axis direction, the Y-axis direction, and the θ direction based on the detected positional deviation, thereby removing the stacked layers held by the holding unit 10. A relative positional shift between the object 1 and the stacking stage 20 is corrected.
 また、装置制御部40は、積層ステージ20の代わりに保持部10を移動させてもよい。その場合、装置制御部40は、検出した位置ずれに基づいて、積層対象物1を保持した保持部10をX軸方向、Y軸方向、および、保持部10の中心周りの回転方向であるθ方向のうちの少なくとも1つの方向に移動させることによって、保持部10によって保持されている積層対象物1と積層ステージ20との間の相対的な位置ずれを補正する。 Furthermore, the device control unit 40 may move the holding unit 10 instead of the stacking stage 20. In that case, the device control unit 40 moves the holding unit 10 holding the stacked object 1 in the X-axis direction, the Y-axis direction, and the rotation direction θ around the center of the holding unit 10 based on the detected positional deviation. By moving in at least one of the directions, the relative positional shift between the stacking stage 20 and the stacking object 1 held by the holding unit 10 is corrected.
 なお、装置制御部40は、検出した位置ずれに基づいて、積層対象物1を保持した保持部10と積層ステージ20とをそれぞれ移動させてもよい。 Note that the device control unit 40 may move the holding unit 10 holding the stacking object 1 and the stacking stage 20, respectively, based on the detected positional deviation.
 装置制御部40は、上述した位置ずれの補正後に、保持部10を下降させて、保持部10による積層対象物1の吸着を解除させる。これにより、積層ステージ20上に積層対象物1が積層される。 After correcting the positional deviation described above, the device control unit 40 lowers the holding unit 10 to release the holding unit 10 from adhering to the stacked objects 1 . Thereby, the stacking objects 1 are stacked on the stacking stage 20.
 (積層システム)
 続いて、上述した一実施形態における積層装置100を備えた積層システム200の構成について説明する。
(Laminated system)
Next, the configuration of a lamination system 200 including the lamination apparatus 100 in the above-described embodiment will be described.
 図6は、一実施形態における積層装置100を含む積層システム200の構成を模式的に示す平面図である。積層システム200は、積層装置100と、複数の供給機構210と、移動機構220とを備える。積層装置100の保持部10と積層ステージ20は、後述するように、移動機構220に含まれている。ここでは、積層対象物1がシート状の電池材料である例について説明する。ただし、積層対象物1がシート状の電池材料に限定されることはない。 FIG. 6 is a plan view schematically showing the configuration of a lamination system 200 including the lamination apparatus 100 in one embodiment. The lamination system 200 includes a lamination device 100, a plurality of supply mechanisms 210, and a movement mechanism 220. The holding section 10 and the lamination stage 20 of the lamination apparatus 100 are included in a moving mechanism 220, as will be described later. Here, an example in which the stacked object 1 is a sheet-shaped battery material will be described. However, the object to be laminated 1 is not limited to a sheet-like battery material.
 複数の供給機構210は、複数の供給位置A1~A4のそれぞれに積層対象物1を供給する。複数の供給位置A1~A4にはそれぞれ、1種類の積層対象物1が供給される。本実施形態において、複数の供給機構210には、第1の供給機構210a、第2の供給機構210b、第3の供給機構210c、および、第4の供給機構210dの4つの供給機構が含まれる。ただし、複数の供給機構210の数が4つに限定されることはない。 The plurality of supply mechanisms 210 supply the stacked objects 1 to each of the plurality of supply positions A1 to A4. One type of stacking object 1 is supplied to each of the plurality of supply positions A1 to A4. In this embodiment, the plurality of supply mechanisms 210 include four supply mechanisms: a first supply mechanism 210a, a second supply mechanism 210b, a third supply mechanism 210c, and a fourth supply mechanism 210d. . However, the number of multiple supply mechanisms 210 is not limited to four.
 第1の供給機構210aは、第1の供給位置A1に積層対象物1を供給する。第1の供給機構210aが供給する積層対象物1は、例えば、樹脂フィルムである。樹脂フィルムは、セパレータとして機能するシート状の電池材料であって、例えば、ポリエチレンからなる。本実施形態では、第1の供給機構210aはベルトコンベアであり、ベルト上に載置された積層対象物1を第1の供給位置A1まで運搬して供給する。 The first supply mechanism 210a supplies the stacked objects 1 to the first supply position A1. The object to be laminated 1 supplied by the first supply mechanism 210a is, for example, a resin film. The resin film is a sheet-shaped battery material that functions as a separator, and is made of polyethylene, for example. In this embodiment, the first supply mechanism 210a is a belt conveyor, and conveys and supplies the stacked objects 1 placed on the belt to the first supply position A1.
 第2の供給機構210bは、第2の供給位置A2に積層対象物1を供給する。第2の供給機構210bが供給する積層対象物1は、例えば、第1の金属箔である。第1の金属箔は、正極および負極のうちの一方の電極として機能するシート状の電池材料であって、例えば、アルミニウムからなる。本実施形態では、第2の供給機構210bはベルトコンベアであり、ベルト上に載置された積層対象物1を第2の供給位置A2まで運搬して供給する。 The second supply mechanism 210b supplies the stacked objects 1 to the second supply position A2. The object to be laminated 1 supplied by the second supply mechanism 210b is, for example, a first metal foil. The first metal foil is a sheet-shaped battery material that functions as one of the positive electrode and the negative electrode, and is made of, for example, aluminum. In this embodiment, the second supply mechanism 210b is a belt conveyor, and conveys and supplies the stacked objects 1 placed on the belt to the second supply position A2.
 第3の供給機構210cは、第3の供給位置A3に積層対象物1を供給する。第3の供給機構210cが供給する積層対象物1は、例えば、樹脂フィルムである。樹脂フィルムは、セパレータとして機能するシート状の電池材料であって、例えば、ポリエチレンからなる。第3の供給機構210cによって供給される樹脂フィルムは、第1の供給機構210aによって供給される樹脂フィルムと同じものを用いることができる。ただし、第1の供給機構210aによって供給される樹脂フィルムと異なるものを用いてもよい。本実施形態では、第3の供給機構210cはベルトコンベアであり、ベルト上に載置された積層対象物1を第3の供給位置A3まで運搬して供給する。 The third supply mechanism 210c supplies the stacked object 1 to the third supply position A3. The object to be laminated 1 supplied by the third supply mechanism 210c is, for example, a resin film. The resin film is a sheet-shaped battery material that functions as a separator, and is made of polyethylene, for example. The resin film supplied by the third supply mechanism 210c can be the same as the resin film supplied by the first supply mechanism 210a. However, a resin film different from that supplied by the first supply mechanism 210a may be used. In this embodiment, the third supply mechanism 210c is a belt conveyor, and conveys and supplies the stacked objects 1 placed on the belt to the third supply position A3.
 第4の供給機構210dは、第4の供給位置A4に積層対象物1を供給する。第4の供給機構210dが供給する積層対象物1は、例えば、第2の金属箔である。第2の金属箔は、正極および負極のうちの他方の電極として機能するシート状の電池材料であって、例えば、アルミニウムからなる。本実施形態では、第4の供給機構210dはベルトコンベアであり、ベルト上に載置された積層対象物1を第4の供給位置A4まで運搬して供給する。 The fourth supply mechanism 210d supplies the stacked object 1 to the fourth supply position A4. The laminated object 1 supplied by the fourth supply mechanism 210d is, for example, a second metal foil. The second metal foil is a sheet-shaped battery material that functions as the other electrode of the positive electrode and the negative electrode, and is made of, for example, aluminum. In this embodiment, the fourth supply mechanism 210d is a belt conveyor, and conveys and supplies the stacked objects 1 placed on the belt to the fourth supply position A4.
 なお、第1の供給機構210a、第2の供給機構210b、第3の供給機構210c、および、第4の供給機構210dがベルトコンベアに限定されることはなく、積層対象物1を運搬して供給できる構造であればよい。 Note that the first supply mechanism 210a, the second supply mechanism 210b, the third supply mechanism 210c, and the fourth supply mechanism 210d are not limited to belt conveyors, and may be used to transport the stacked objects 1. Any structure that can be used will suffice.
 また、供給機構210が個片化された積層対象物1を運搬する代わりに、長尺状の積層対象物1を運搬するように構成されていてもよい。その場合、長尺状の積層対象物1を供給位置A1~A4でカットして、個片化すればよい。なお、本実施形態において、積層対象物1の形状は矩形形状であるが、矩形以外の形状であってもよい。 Furthermore, the supply mechanism 210 may be configured to transport elongated stacked objects 1 instead of transporting the separated stacked objects 1. In that case, the long laminated object 1 may be cut into pieces at the supply positions A1 to A4. In addition, in this embodiment, although the shape of the lamination|stacking object 1 is rectangular shape, it may be a shape other than a rectangle.
 移動機構220は、所定の走行軌道を有するリニアモータの固定子221と、走行軌道に沿って複数の供給位置A1~A4の間を移動可能なリニアモータの可動子222とを備える。本実施形態では、固定子221の走行軌道は、図6に示すように、平面視で楕円形の環状の形状を有する。ただし、走行軌道の平面視の形状が楕円形の環状の形状に限定されることはない。 The moving mechanism 220 includes a stator 221 of a linear motor having a predetermined running track, and a mover 222 of a linear motor that can move between a plurality of supply positions A1 to A4 along the running track. In this embodiment, the running track of the stator 221 has an elliptical annular shape in plan view, as shown in FIG. However, the shape of the running track in plan view is not limited to an elliptical annular shape.
 本実施形態において、可動子222には、第1の可動子222a、第2の可動子222b、第3の可動子222c、第4の可動子222d、第5の可動子222e、第6の可動子222f、第7の可動子222g、および、第8の可動子222hが含まれる。各可動子222a~222hは、それぞれ独立して動くことが可能である。移動機構220が複数の可動子222を含むことにより、積層対象物1の積層を短時間で効率的に行うことができる。 In this embodiment, the mover 222 includes a first mover 222a, a second mover 222b, a third mover 222c, a fourth mover 222d, a fifth mover 222e, and a sixth mover. A child 222f, a seventh mover 222g, and an eighth mover 222h are included. Each of the movers 222a to 222h can move independently. Since the moving mechanism 220 includes a plurality of movers 222, the stacking objects 1 can be stacked efficiently in a short time.
 図7は、固定子221の走行軌道に沿った方向に見たときに、移動機構220の可動子222の構成を模式的に示す図である。図7に示すように、積層装置100の保持部10と積層ステージ20は、可動子222に含まれる。また、装置制御部40の構成のうち、例えば、保持部10および積層ステージ20のうちの少なくとも一方を駆動するための駆動機構は、可動子222に含まれ、駆動機構を駆動するための補正量の算出および駆動の指示を出す部分は、固定された場所に配置するようにしてもよい。なお、図7において、X軸方向は、供給機構210が積層対象物1を搬送する方向であり、Y軸方向は、可動子222が走行軌道に沿って移動する方向である。また、Z軸方向は、鉛直方向である。 FIG. 7 is a diagram schematically showing the configuration of the movable element 222 of the moving mechanism 220 when viewed in the direction along the travel trajectory of the stator 221. As shown in FIG. 7, the holding section 10 and the lamination stage 20 of the lamination apparatus 100 are included in a movable member 222. Further, in the configuration of the device control unit 40, for example, a drive mechanism for driving at least one of the holding unit 10 and the stacking stage 20 is included in the mover 222, and the correction amount for driving the drive mechanism is The part that issues instructions for calculating and driving may be placed at a fixed location. In addition, in FIG. 7, the X-axis direction is the direction in which the supply mechanism 210 conveys the stacked objects 1, and the Y-axis direction is the direction in which the movable element 222 moves along the traveling track. Further, the Z-axis direction is a vertical direction.
 保持部10は、供給機構210によって搬送されてくる積層対象物1を保持する。保持部10は、Z軸方向に移動可能であり、下降することによって上方から積層対象物1に接近して、積層対象物1を保持する。 The holding unit 10 holds the stacking object 1 conveyed by the supply mechanism 210. The holding unit 10 is movable in the Z-axis direction, approaches the stacked object 1 from above by descending, and holds the stacked object 1.
 装置制御部40は、積層対象物1を保持した保持部10を積層ステージ20に向かって下降させる。このとき、積層ステージ20上に積層されている積層対象物1の積層枚数に応じて、保持部10の下降量を調整することが好ましい。ただし、装置制御部40は、保持部10を決まった量だけ下降させ、後述するシステム制御部が、積層ステージ20上に積層されている積層対象物1の積層枚数に応じて、積層ステージ20をZ軸方向に移動させるようにしてもよい。その場合、装置制御部40による保持部10の下降量を一定に保つことができる。 The device control unit 40 lowers the holding unit 10 holding the stacking object 1 toward the stacking stage 20. At this time, it is preferable to adjust the amount of descent of the holding section 10 according to the number of stacked objects 1 stacked on the stacking stage 20. However, the device control unit 40 lowers the holding unit 10 by a predetermined amount, and the system control unit (described later) lowers the stacking stage 20 according to the number of stacked objects 1 stacked on the stacking stage 20. It may be moved in the Z-axis direction. In that case, the amount by which the holding section 10 is lowered by the device control section 40 can be kept constant.
 本実施形態では、後述するように、可動子222が固定子221の走行軌道に沿って移動している間に、保持部10が下降して、積層対象物1の吸着を解除し、積層ステージ20上に積層対象物1を積層する。ただし、積層ステージ20上に積層対象物1が積層されている場合、「積層ステージ20上に積層対象物1を積層」とは、積層ステージ20上に積層されている積層対象物1の上に積層対象物1を積層という意味である。 In this embodiment, as will be described later, while the mover 222 is moving along the travel trajectory of the stator 221, the holding unit 10 descends to release the stacking object 1 from adsorption, and the stacking stage The object to be laminated 1 is laminated on the layer 20. However, if the stacking target 1 is stacked on the stacking stage 20, "stacking the stacking target 1 on the stacking stage 20" means that the stacking target 1 is stacked on the stacking stage 20. This means that the object 1 to be laminated is laminated.
 本実施形態において、可動子222は、図7に示すように、走行軌道を形成する固定子221の2本のガイドレール223に取り付けられ、ガイドレール223に沿って移動する。図7に示すように、固定子221のガイドレール223は、可動子222の鉛直下方ではなく、側方に設けられている。ガイドレール223が可動子222の鉛直下方に設けられた構造では、2本のガイドレール223の内輪差を考慮した制御を行わなければいけないが、側方に設けた構造では、内輪差を考慮する必要がなく、制御が簡単となる。 In this embodiment, as shown in FIG. 7, the movable element 222 is attached to two guide rails 223 of the stator 221 that form a running track, and moves along the guide rails 223. As shown in FIG. 7, the guide rail 223 of the stator 221 is provided not vertically below the movable element 222 but on the side thereof. In a structure where the guide rail 223 is provided vertically below the movable element 222, control must be performed taking into account the difference in the inner races of the two guide rails 223, but in a structure in which the guide rail 223 is provided on the side, the difference in the inner races must be taken into account. It is not necessary and the control is simple.
 上述したように、本実施形態では、4種類の積層対象物1を供給するために、積層対象物1の供給位置A1~A4が4つある。積層装置100の撮像部30は、4つの供給位置A1~A4に対応して、4箇所に設けられている。具体的には、第1の供給位置A1に対応して第1の撮像部30aが設けられ、第2の供給位置A2に対応して第2の撮像部30bが設けられ、第3の供給位置A3に対応して第3の撮像部30cが設けられ、第4の供給位置A4に対応して第4の撮像部30dが設けられている。図6では、1つの供給位置に対応して1つの撮像部30を設けた例を示しているが、上述したように、1つの供給位置に対応して2つの撮像部30を設けるようにすることが好ましい。 As described above, in this embodiment, there are four supply positions A1 to A4 for the stacking objects 1 in order to supply the four types of stacking objects 1. The imaging units 30 of the laminating apparatus 100 are provided at four locations corresponding to the four supply positions A1 to A4. Specifically, a first imaging section 30a is provided corresponding to the first supply position A1, a second imaging section 30b is provided corresponding to the second supply position A2, and a second imaging section 30b is provided corresponding to the second supply position A2. A third imaging section 30c is provided corresponding to A3, and a fourth imaging section 30d is provided corresponding to the fourth supply position A4. Although FIG. 6 shows an example in which one imaging unit 30 is provided corresponding to one supply position, as described above, two imaging units 30 may be provided corresponding to one supply position. It is preferable.
 撮像部30は、供給位置A1~A4に対応する位置に固定された状態で設けられていてもよいし、可動子222に含まれて、可動子222の移動とともに移動するように構成されていてもよい。 The imaging unit 30 may be provided in a fixed state at positions corresponding to the supply positions A1 to A4, or may be included in the movable element 222 and configured to move with the movement of the movable element 222. Good too.
 以下では、一実施形態における積層装置100を備えた積層システム200によって、4種類の積層対象物1を順に積層する方法について説明する。ここでは、8つの可動子222のうち、第1の可動子222aが積層対象物1を積層する動作について説明するが、他の可動子222b~222hが積層対象物1を積層する動作についても同様である。すなわち、第1の可動子222aが固定子221の走行軌道を1周する時間をTとすると、第8の可動子222hはT/8遅れのタイミング、第7の可動子222gは(2T)/8遅れのタイミング、第6の可動子222fは(3T)/8遅れのタイミング、第5の可動子222eは(4T)/8遅れのタイミング、第4の可動子222dは(5T)/8遅れのタイミング、第3の可動子222cは(6T)/8遅れのタイミング、第2の可動子222bは(7T)/8遅れのタイミングで、第1の可動子222aと同じ動作をする。 Hereinafter, a method for sequentially stacking four types of stacking objects 1 using a stacking system 200 including a stacking apparatus 100 in one embodiment will be described. Here, the operation of the first movable element 222a of the eight movable elements 222 to laminate the laminated objects 1 will be described, but the same applies to the operations of the other movable elements 222b to 222h to laminate the laminated objects 1. It is. That is, if the time for the first mover 222a to make one revolution around the running track of the stator 221 is T, the timing of the eighth mover 222h is delayed by T/8, and the timing of the seventh mover 222g is (2T)/ The sixth mover 222f has a (3T)/8 delay timing, the fifth mover 222e has a (4T)/8 delay timing, and the fourth mover 222d has a (5T)/8 delay timing. The third movable element 222c performs the same operation as the first movable element 222a at a timing delayed by (6T)/8, and the second movable element 222b operates at a timing delayed by (7T)/8.
 ここでは、複数の供給機構210および複数の移動機構220の動作を制御するシステム制御部を積層システム200が備えているものとして説明する。 Here, the explanation will be given assuming that the stacking system 200 includes a system control unit that controls the operations of the plurality of supply mechanisms 210 and the plurality of movement mechanisms 220.
 (S1)システム制御部は、第1の供給位置A1に、積層対象物1である樹脂フィルムが供給されるように、第1の供給機構210aを制御するとともに、第1の可動子222aを第1の供給位置A1で停止させる。装置制御部40は、保持部10を下降させて、第1の供給位置A1における積層対象物1を保持させる。システム制御部は、保持部10によって保持された積層対象物1の少なくとも一部と、保持部10のアライメントマーク13とを撮像するように、第1の撮像部30aを制御する。 (S1) The system control unit controls the first supply mechanism 210a so that the resin film, which is the object to be laminated 1, is supplied to the first supply position A1, and also controls the first movable member 222a to the first supply position A1. It is stopped at the first supply position A1. The device control unit 40 lowers the holding unit 10 to hold the stacked object 1 at the first supply position A1. The system control unit controls the first imaging unit 30a to image at least a portion of the stacked object 1 held by the holding unit 10 and the alignment mark 13 of the holding unit 10.
 なお、第1の供給位置A1に第1の可動子222aが停止しているとき、第2の供給位置A2には第3の可動子222cが停止し、第3の供給位置A3には第5の可動子222eが停止し、第4の供給位置A4には第7の可動子222gが停止している。第3の可動子222c、第5の可動子222e、および、第7の可動子222gはそれぞれ、後述するように、第1の可動子222aと同様、各供給位置A1~A4において供給された積層対象物1を保持部10が保持して、次の供給位置A1~A4に移動して停止するまでの間に、積層ステージ20上に積層する。 Note that when the first movable element 222a is stopped at the first supply position A1, the third movable element 222c is stopped at the second supply position A2, and the fifth movable element 222c is stopped at the third supply position A3. The movable element 222e is stopped, and the seventh movable element 222g is stopped at the fourth supply position A4. The third movable element 222c, the fifth movable element 222e, and the seventh movable element 222g each have a laminated layer supplied at each supply position A1 to A4, similarly to the first movable element 222a, as described later. The objects 1 are held by the holding section 10 and stacked on the stacking stage 20 while moving to the next supply positions A1 to A4 and stopping.
 また、第1の供給位置A1に第1の可動子222aが停止しているとき、第2の可動子222bは、第1の供給位置A1と第2の供給位置A2との間に位置し、第4の可動子222dは、第2の供給位置A2と第3の供給位置A3との間に位置し、第6の可動子222fは、第3の供給位置A3と第4の供給位置A4との間に位置し、第8の可動子222hは、第4の供給位置A4と第1の供給位置A1との間に位置する。第2の可動子222b、第4の可動子222d、第6の可動子222f、および、第8の可動子222hはそれぞれ、後述するように、次の供給位置A1~A4に移動して停止するまでの間に、積層ステージ20に対する積層対象物1の相対的な位置補正を行って積層を行う。 Further, when the first movable element 222a is stopped at the first supply position A1, the second movable element 222b is located between the first supply position A1 and the second supply position A2, The fourth mover 222d is located between the second supply position A2 and the third supply position A3, and the sixth mover 222f is located between the third supply position A3 and the fourth supply position A4. The eighth movable element 222h is located between the fourth supply position A4 and the first supply position A1. The second movable element 222b, the fourth movable element 222d, the sixth movable element 222f, and the eighth movable element 222h each move to the next supply position A1 to A4 and stop, as will be described later. In the meantime, the relative position of the object to be laminated 1 with respect to the lamination stage 20 is corrected and laminated.
 (S2)続いて、システム制御部は、第1の可動子222aを、走行軌道に沿って第1の供給位置A1から第2の供給位置A2へと移動させる。第1の可動子222aが第1の供給位置A1から第2の供給位置A2へと移動して停止するまでの間に、装置制御部40は、保持部10によって保持されている積層対象物1の積層ステージ20に対する相対的な位置を補正する。具体的には、装置制御部40は、第1の撮像部30aによって撮像された積層対象物1の画像に基づいて、積層ステージ20および保持部10のうちの少なくとも一方を、X軸方向、Y軸方向、および、θ方向のうちの少なくとも1つの方向に移動させることによって、保持部10によって保持されている積層対象物1の積層ステージ20に対する相対的な位置を補正する。 (S2) Subsequently, the system control unit moves the first movable element 222a from the first supply position A1 to the second supply position A2 along the traveling track. While the first mover 222a moves from the first supply position A1 to the second supply position A2 and stops, the device control unit 40 controls the stacking target object 1 held by the holding unit 10. The position relative to the stacking stage 20 is corrected. Specifically, the device control unit 40 moves at least one of the stacking stage 20 and the holding unit 10 in the By moving in at least one of the axial direction and the θ direction, the relative position of the stacking object 1 held by the holding unit 10 with respect to the stacking stage 20 is corrected.
 なお、装置制御部40で行う処理のうちの一部を、第1の撮像部30aの画像処理部およびシステム制御部で行うようにしてもよい。例えば、画像処理部は、撮像された画像に基づいて、保持部10によって保持されている積層対象物1の位置ずれを検出し、システム制御部は、検出された積層対象物1の位置ずれに基づいて、位置ずれを補正するための補正量を算出する。装置制御部40は、システム制御部によって算出された補正量に基づいて、保持部10と積層ステージ20のうちの少なくとも一方を移動させる。そのような構成の場合、第1の撮像部30aの画像処理部およびシステム制御部も、装置制御部40の構成に含まれる。以下の説明でも同様である。 Note that part of the processing performed by the device control unit 40 may be performed by the image processing unit and system control unit of the first imaging unit 30a. For example, the image processing unit detects the positional deviation of the stacked object 1 held by the holding unit 10 based on the captured image, and the system control unit detects the positional deviation of the stacked object 1 held by the holding unit 10. Based on this, a correction amount for correcting the positional shift is calculated. The apparatus control unit 40 moves at least one of the holding unit 10 and the stacking stage 20 based on the correction amount calculated by the system control unit. In such a configuration, the image processing unit and system control unit of the first imaging unit 30a are also included in the configuration of the device control unit 40. The same applies to the following explanation.
 その後、装置制御部40は、保持部10を下降させた後、保持部10による積層対象物1の吸着を解除させる。これにより、積層ステージ20上に積層対象物1が積層される。 Thereafter, the device control unit 40 lowers the holding unit 10 and then causes the holding unit 10 to release the stacking object 1 from attracting it. Thereby, the stacking objects 1 are stacked on the stacking stage 20.
 なお、システム制御部は、第1の可動子222aを第1の供給位置A1から第2の供給位置A2へと移動させるだけでなく、第3の可動子222cを第2の供給位置A2から第3の供給位置A3へと移動させ、第5の可動子222eを第3の供給位置A3から第4の供給位置A4へと移動させ、第7の可動子222gを第4の供給位置A4から第1の供給位置A1へと移動させる。 Note that the system control unit not only moves the first movable element 222a from the first supply position A1 to the second supply position A2, but also moves the third movable element 222c from the second supply position A2 to the second supply position A2. The fifth movable element 222e is moved from the third supply position A3 to the fourth supply position A4, and the seventh movable element 222g is moved from the fourth supply position A4 to the fourth supply position A4. 1 to the supply position A1.
 (S3)続いて、システム制御部は、第2の供給位置A2に、積層対象物1である第1の金属箔が供給されるように、第2の供給機構210bを制御するとともに、第1の可動子222aを第2の供給位置A2で停止させる。装置制御部40は、保持部10を下降させて、第2の供給位置A2における積層対象物1を保持させる。システム制御部は、保持部10によって保持された積層対象物1の少なくとも一部と、保持部10のアライメントマーク13とを撮像するように、第2の撮像部30bを制御する。 (S3) Next, the system control unit controls the second supply mechanism 210b so that the first metal foil, which is the object to be laminated 1, is supplied to the second supply position A2, and The movable element 222a is stopped at the second supply position A2. The device control unit 40 lowers the holding unit 10 to hold the stacked object 1 at the second supply position A2. The system control unit controls the second imaging unit 30b to image at least a portion of the stacked object 1 held by the holding unit 10 and the alignment mark 13 of the holding unit 10.
 なお、第2の供給位置A2に第1の可動子222aが停止しているとき、第3の供給位置A3には第3の可動子222cが停止し、第4の供給位置A4には第5の可動子222eが停止し、第1の供給位置A1には第7の可動子222gが停止している。また、第2の可動子222bは、第2の供給位置A2と第3の供給位置A3との間に位置し、第4の可動子222dは、第3の供給位置A3と第4の供給位置A4との間に位置し、第6の可動子222fは、第4の供給位置A4と第1の供給位置A1との間に位置し、第8の可動子222hは、第1の供給位置A1と第2の供給位置A2との間に位置する。 Note that when the first mover 222a is stopped at the second supply position A2, the third mover 222c is stopped at the third supply position A3, and the fifth mover 222c is stopped at the fourth supply position A4. The seventh movable element 222e is stopped, and the seventh movable element 222g is stopped at the first supply position A1. Further, the second movable element 222b is located between the second supply position A2 and the third supply position A3, and the fourth movable element 222d is located between the third supply position A3 and the fourth supply position. A4, the sixth movable element 222f is located between the fourth supply position A4 and the first supply position A1, and the eighth movable element 222h is located between the fourth supply position A4 and the first supply position A1. and the second supply position A2.
 (S4)続いて、システム制御部は、第1の可動子222aを、走行軌道に沿って第2の供給位置A2から第3の供給位置A3へと移動させる。第1の可動子222aが第2の供給位置A2から第3の供給位置A3に移動して停止するまでの間に、装置制御部40は、保持部10によって保持されている積層対象物1の積層ステージ20に対する相対的な位置を補正する。具体的には、装置制御部40は、第2の撮像部30bによって撮像された積層対象物1の画像に基づいて、積層ステージ20および保持部10のうちの少なくとも一方を、X軸方向、Y軸方向、および、θ方向のうちの少なくとも1つの方向に移動させることによって、保持部10によって保持されている積層対象物1の積層ステージ20に対する相対的な位置を補正する。位置補正後に、積層ステージ20の上に積層対象物1を積層させる動作については、第1の供給位置A1に供給された積層対象物1を積層させる動作と同様である。 (S4) Subsequently, the system control unit moves the first movable element 222a from the second supply position A2 to the third supply position A3 along the traveling track. While the first mover 222a moves from the second supply position A2 to the third supply position A3 and stops, the device control unit 40 controls the stacking target object 1 held by the holding unit 10. The position relative to the stacking stage 20 is corrected. Specifically, the device control unit 40 moves at least one of the stacking stage 20 and the holding unit 10 in the By moving in at least one of the axial direction and the θ direction, the relative position of the stacking object 1 held by the holding unit 10 with respect to the stacking stage 20 is corrected. After the position correction, the operation of stacking the stacking objects 1 on the stacking stage 20 is the same as the operation of stacking the stacking objects 1 supplied to the first supply position A1.
 なお、システム制御部は、第1の可動子222aを第2の供給位置A2から第3の供給位置A3へと移動させるだけでなく、第3の可動子222cを第3の供給位置A3から第4の供給位置A4へと移動させ、第5の可動子222eを第4の供給位置A4から第1の供給位置A1へと移動させ、第7の可動子222gを第1の供給位置A1から第2の供給位置A2へと移動させる。 Note that the system control unit not only moves the first movable element 222a from the second supply position A2 to the third supply position A3, but also moves the third movable element 222c from the third supply position A3 to the third supply position A3. The fifth movable element 222e is moved from the fourth supply position A4 to the first supply position A1, and the seventh movable element 222g is moved from the first supply position A1 to the first supply position A1. 2 to the supply position A2.
 (S5)続いて、システム制御部は、第3の供給位置A3に、積層対象物1である樹脂フィルムが供給されるように、第3の供給機構210cを制御するとともに、第1の可動子222aを第3の供給位置A3で停止させる。装置制御部40は、システム制御部は、保持部10を下降させて、第3の供給位置A3における積層対象物1を保持させる。システム制御部は、保持部10によって保持された積層対象物1の少なくとも一部と、保持部10のアライメントマーク13とを撮像するように、第3の撮像部30cを制御する。 (S5) Subsequently, the system control unit controls the third supply mechanism 210c so that the resin film, which is the laminated object 1, is supplied to the third supply position A3, and also controls the first mover 222a is stopped at the third supply position A3. The device control unit 40 lowers the holding unit 10 to hold the stacked object 1 at the third supply position A3. The system control unit controls the third imaging unit 30c to image at least a portion of the stacked object 1 held by the holding unit 10 and the alignment mark 13 of the holding unit 10.
 なお、第3の供給位置A3に第1の可動子222aが停止しているとき、第4の供給位置A4には第3の可動子222cが停止し、第1の供給位置A1には第5の可動子222eが停止し、第2の供給位置A2には第7の可動子222gが停止している。また、第2の可動子222bは、第3の供給位置A3と第4の供給位置A4との間に位置し、第4の可動子222dは、第4の供給位置A4と第1の供給位置A1との間に位置し、第6の可動子222fは、第1の供給位置A1と第2の供給位置A2との間に位置し、第8の可動子222hは、第2の供給位置A2と第3の供給位置A3との間に位置する。 Note that when the first movable element 222a is stopped at the third supply position A3, the third movable element 222c is stopped at the fourth supply position A4, and the fifth movable element is stopped at the first supply position A1. The seventh movable element 222e is stopped, and the seventh movable element 222g is stopped at the second supply position A2. Further, the second movable element 222b is located between the third supply position A3 and the fourth supply position A4, and the fourth movable element 222d is located between the fourth supply position A4 and the first supply position. A1, the sixth movable element 222f is located between the first supply position A1 and the second supply position A2, and the eighth movable element 222h is located between the second supply position A2. and the third supply position A3.
 (S6)続いて、システム制御部は、第1の可動子222aを、走行軌道に沿って第3の供給位置A3から第4の供給位置A4へと移動させる。第1の可動子222aが第3の供給位置A3から第4の供給位置A4に移動して停止するまでの間に、装置制御部40は、保持部10によって保持されている積層対象物1の積層ステージ20に対する相対的な位置を補正する。具体的には、装置制御部40は、第3の撮像部30cによって撮像された積層対象物1の画像に基づいて、積層ステージ20および保持部10のうちの少なくとも一方を、X軸方向、Y軸方向、および、θ方向のうちの少なくとも1つの方向に移動させることによって、保持部10によって保持されている積層対象物1の積層ステージ20に対する相対的な位置を補正する。位置補正後に、積層ステージ20の上に積層対象物1を積層させる動作については、第1の供給位置A1に供給された積層対象物1を積層させる動作と同様である。 (S6) Subsequently, the system control unit moves the first movable element 222a from the third supply position A3 to the fourth supply position A4 along the traveling track. While the first mover 222a moves from the third supply position A3 to the fourth supply position A4 and stops, the device control unit 40 controls the stacking target object 1 held by the holding unit 10. The position relative to the stacking stage 20 is corrected. Specifically, the device control unit 40 moves at least one of the stacking stage 20 and the holding unit 10 in the X-axis direction and the Y-axis direction based on the image of the stacking object 1 captured by the third imaging unit 30c By moving in at least one of the axial direction and the θ direction, the relative position of the stacking object 1 held by the holding unit 10 with respect to the stacking stage 20 is corrected. After the position correction, the operation of stacking the stacking objects 1 on the stacking stage 20 is the same as the operation of stacking the stacking objects 1 supplied to the first supply position A1.
 なお、システム制御部は、第1の可動子222aを第3の供給位置A3から第4の供給位置A4へと移動させるだけでなく、第3の可動子222cを第4の供給位置A4から第1の供給位置A1へと移動させ、第5の可動子222eを第1の供給位置A1から第2の供給位置A2へと移動させ、第7の可動子222gを第2の供給位置A2から第3の供給位置A3へと移動させる。 Note that the system control unit not only moves the first movable element 222a from the third supply position A3 to the fourth supply position A4, but also moves the third movable element 222c from the fourth supply position A4 to the fourth supply position A4. The fifth movable element 222e is moved from the first supply position A1 to the second supply position A2, and the seventh movable element 222g is moved from the second supply position A2 to the second supply position A2. 3 to supply position A3.
 (S7)続いて、システム制御部は、第4の供給位置A4に、積層対象物1である第2の金属箔が供給されるように、第4の供給機構210dを制御するとともに、第1の可動子222aを第4の供給位置A4で停止させる。装置制御部40は、保持部10を下降させて、第4の供給位置A4における積層対象物1を保持させる。システム制御部は、保持部10によって保持された積層対象物1の少なくとも一部と、保持部10のアライメントマーク13とを撮像するように、第4の撮像部30dを制御する。 (S7) Next, the system control unit controls the fourth supply mechanism 210d so that the second metal foil, which is the object to be laminated 1, is supplied to the fourth supply position A4, and also controls the fourth supply mechanism 210d to The movable element 222a is stopped at the fourth supply position A4. The device control unit 40 lowers the holding unit 10 to hold the stacked object 1 at the fourth supply position A4. The system control unit controls the fourth imaging unit 30d to image at least a portion of the stacked object 1 held by the holding unit 10 and the alignment mark 13 of the holding unit 10.
 なお、第4の供給位置A4に第1の可動子222aが停止しているとき、第1の供給位置A1には第3の可動子222cが停止し、第2の供給位置A2には第5の可動子222eが停止し、第3の供給位置A3には第7の可動子222gが停止している。また、第2の可動子222bは、第4の供給位置A4と第1の供給位置A1との間に位置し、第4の可動子222dは、第1の供給位置A1と第2の供給位置A2との間に位置し、第6の可動子222fは、第2の供給位置A2と第3の供給位置A3との間に位置し、第8の可動子222hは、第3の供給位置A3と第4の供給位置A4との間に位置する。 Note that when the first mover 222a is stopped at the fourth supply position A4, the third mover 222c is stopped at the first supply position A1, and the fifth mover 222c is stopped at the second supply position A2. The movable element 222e is stopped, and the seventh movable element 222g is stopped at the third supply position A3. Further, the second movable element 222b is located between the fourth supply position A4 and the first supply position A1, and the fourth movable element 222d is located between the first supply position A1 and the second supply position A1. A2, the sixth movable element 222f is located between the second supply position A2 and the third supply position A3, and the eighth movable element 222h is located between the second supply position A2 and the third supply position A3. and the fourth supply position A4.
 (S8)続いて、システム制御部は、第1の可動子222aを、走行軌道に沿って第4の供給位置A4から第1の供給位置A1へと移動させる。第1の可動子222aが第4の供給位置A4から第1の供給位置A1に移動して停止するまでの間に、装置制御部40は、保持部10によって保持されている積層対象物1の積層ステージ20に対する相対的な位置を補正する。具体的には、装置制御部40は、第4の撮像部30dによって撮像された積層対象物1の画像に基づいて、積層ステージ20および保持部10のうちの少なくとも一方を、X軸方向、Y軸方向、および、θ方向のうちの少なくとも1つの方向に移動させることによって、保持部10によって保持されている積層対象物1の積層ステージ20に対する相対的な位置を補正する。位置補正後に、積層ステージ20の上に積層対象物1を積層させる動作については、第1の供給位置A1に供給された積層対象物1を積層させる動作と同様である。 (S8) Subsequently, the system control unit moves the first movable element 222a from the fourth supply position A4 to the first supply position A1 along the traveling track. While the first mover 222a moves from the fourth supply position A4 to the first supply position A1 and stops, the device control unit 40 controls the stacking target object 1 held by the holding unit 10. The position relative to the stacking stage 20 is corrected. Specifically, the device control unit 40 moves at least one of the stacking stage 20 and the holding unit 10 in the X-axis direction and the Y-axis direction based on the image of the stacking object 1 captured by the fourth imaging unit 30d. By moving in at least one of the axial direction and the θ direction, the relative position of the stacking object 1 held by the holding unit 10 with respect to the stacking stage 20 is corrected. After the position correction, the operation of stacking the stacking objects 1 on the stacking stage 20 is the same as the operation of stacking the stacking objects 1 supplied to the first supply position A1.
 なお、システム制御部は、第1の可動子222aを第4の供給位置A4から第1の供給位置A1へと移動させるだけでなく、第3の可動子222cを第1の供給位置A1から第2の供給位置A2へと移動させ、第5の可動子222eを第2の供給位置A2から第3の供給位置A3へと移動させ、第7の可動子222gを第3の供給位置A3から第4の供給位置A4へと移動させる。 Note that the system control unit not only moves the first mover 222a from the fourth supply position A4 to the first supply position A1, but also moves the third mover 222c from the first supply position A1 to the first supply position A1. The fifth movable element 222e is moved from the second supply position A2 to the third supply position A3, and the seventh movable element 222g is moved from the third supply position A3 to the third supply position A3. 4 to supply position A4.
 上述した(S1)~(S8)の工程によって、4種類の積層対象物1である樹脂フィルム、第1の金属箔、樹脂フィルム、第2の金属箔が順に積層された1組の半製品が得られる。以後、(S1)~(S8)の工程を繰り返し行うことにより、所定の組数が積層された製品、すなわち、セパレータとして機能する樹脂フィルムを介して、正極と負極が交互に複数積層された積層体が得られる。積層体は、例えば、組電池の構成材料として用いられる。 Through the steps (S1) to (S8) described above, a set of semi-finished products in which four types of laminated objects 1, such as a resin film, a first metal foil, a resin film, and a second metal foil are laminated in this order, is produced. can get. Thereafter, by repeating the steps (S1) to (S8), a product in which a predetermined number of sets are laminated, that is, a laminate in which a plurality of positive electrodes and negative electrodes are alternately laminated with a resin film functioning as a separator interposed therebetween. You get a body. The laminate is used, for example, as a constituent material of an assembled battery.
 本発明は、上記実施形態に限定されるものではなく、本発明の範囲内において、種々の応用、変形を加えることが可能である。 The present invention is not limited to the above embodiments, and various applications and modifications can be made within the scope of the present invention.
 例えば、積層対象物1が上述したシート状の電池材料に限定されることはない。例えば、複数種類の積層対象物1がシート状の導電層および絶縁層であり、複数種類の積層対象物1を積層することによって、多層基板を作製することもできる。その場合、導電層は、例えば、銅、銀、銅を含む合金、銀を含む合金、または、Sn-Ag系のはんだなどからなる。絶縁層は、例えば、液晶ポリマー、ポリエーテルエーテルケトン、ポリエーテルイミド、ポリイミドなどの熱可塑性樹脂、または、エポキシ樹脂、不飽和ポリエステルなどの熱硬化性樹脂からなる。 For example, the object to be laminated 1 is not limited to the above-mentioned sheet-shaped battery material. For example, the plurality of types of lamination objects 1 are sheet-like conductive layers and insulating layers, and a multilayer substrate can also be produced by laminating the plurality of types of lamination objects 1. In that case, the conductive layer is made of, for example, copper, silver, an alloy containing copper, an alloy containing silver, or Sn--Ag solder. The insulating layer is made of, for example, a liquid crystal polymer, a thermoplastic resin such as polyetheretherketone, polyetherimide, or polyimide, or a thermosetting resin such as epoxy resin or unsaturated polyester.
 上述した実施形態において、保持部10は、積層対象物1を保持するために下降することによって、供給機構210へと接近するように構成されているが、供給機構210が上昇することによって保持部10に接近するように構成してもよい。 In the embodiment described above, the holding section 10 is configured to approach the supply mechanism 210 by descending to hold the stacked object 1, but when the supply mechanism 210 rises, the holding section 10 approaches the supply mechanism 210. It may be configured to approach 10.
 本出願における積層装置、および積層システムは、以下の通りである。
 <1>.積層対象物を保持する保持部であって、前記積層対象物と接する保持面と直交する方向に撮像光を透過可能な透明部を有し、前記透明部にアライメントマークが設けられている保持部と、
 前記保持部によって保持される前記積層対象物を積層するための積層ステージと、
 前記保持部に対して前記保持面とは反対側の位置に配置され、前記保持部の前記透明部を介して、前記保持部によって保持されている前記積層対象物の少なくとも一部と、前記アライメントマークとを撮像可能な撮像部と、
 前記撮像部によって撮像された画像に基づいて、前記保持部によって保持されている前記積層対象物の位置ずれを検出し、検出した位置ずれに基づいて、前記保持部によって保持されている前記積層対象物と前記積層ステージとの間の相対的な位置ずれを補正可能な装置制御部と、
を備えることを特徴とする積層装置。
 <2>.前記アライメントマークは、前記透明部のうち、前記保持面に設けられていることを特徴とする<1>に記載の積層装置。
 <3>.前記透明部は、前記保持部の角の位置に設けられていることを特徴とする<1>または<2>に記載の積層装置。
 <4>.前記透明部は、前記保持部の2つの角の位置に設けられていることを特徴とする<1>または<2>に記載の積層装置。
 <5>.前記撮像部は、2つの前記透明部に対応して2つ設けられていることを特徴とする<4>に記載の積層装置。
 <6>.前記保持部の前記保持面には、複数の吸引孔が設けられていることを特徴とする<1>~<5>のいずれか一つに記載の積層装置。
 <7>.<1>~<6>のいずれか一つに記載の前記積層装置と、
 複数の供給位置のそれぞれに前記積層対象物を供給可能な複数の供給機構と、
 所定の走行軌道を有するリニアモータの固定子と、前記走行軌道に沿って複数の前記供給位置の間を移動可能なリニアモータの可動子とを備える移動機構と、
を備え、
 前記積層装置の前記保持部と前記積層ステージは、前記可動子に含まれることを特徴とする積層システム。
 <8>.前記移動機構は、複数の前記可動子を備えることを特徴とする<7>に記載の積層システム。
The laminating apparatus and laminating system in this application are as follows.
<1>. A holding part that holds a stacked object, the holding part having a transparent part that can transmit imaging light in a direction perpendicular to a holding surface in contact with the stacked object, and an alignment mark provided on the transparent part. and,
a stacking stage for stacking the stacking objects held by the holding unit;
At least a portion of the object to be laminated, which is arranged at a position opposite to the holding surface with respect to the holding part, and which is held by the holding part through the transparent part of the holding part, and the alignment an imaging unit capable of imaging the mark;
Based on the image captured by the imaging unit, a positional shift of the stacked object held by the holding unit is detected, and based on the detected positional shift, the stacked target held by the holding unit is detected. an apparatus control unit capable of correcting a relative positional shift between an object and the stacking stage;
A laminating device comprising:
<2>. The laminating device according to <1>, wherein the alignment mark is provided on the holding surface of the transparent portion.
<3>. The laminating device according to <1> or <2>, wherein the transparent part is provided at a corner of the holding part.
<4>. The laminating device according to <1> or <2>, wherein the transparent part is provided at two corner positions of the holding part.
<5>. The laminating device according to <4>, wherein two of the imaging sections are provided corresponding to the two transparent sections.
<6>. The laminating device according to any one of <1> to <5>, wherein the holding surface of the holding part is provided with a plurality of suction holes.
<7>. The laminating device according to any one of <1> to <6>,
a plurality of supply mechanisms capable of supplying the laminated objects to each of a plurality of supply positions;
a moving mechanism comprising a stator of a linear motor having a predetermined running track, and a movable element of the linear motor movable between the plurality of supply positions along the running track;
Equipped with
A lamination system, wherein the holding part and the lamination stage of the lamination apparatus are included in the movable element.
<8>. The lamination system according to <7>, wherein the moving mechanism includes a plurality of the movers.
1   積層対象物
1a  積層対象物の角
10  保持部
10a 保持面
11  吸引孔
12  透明部
13  アライメントマーク
14  位置確認用マーク
20  積層ステージ
30  撮像部
40  装置制御部
100 積層装置
200 積層システム
210 供給機構
220 移動機構
221 固定子
222 可動子
223 ガイドレール
1 Object to be laminated 1a Corner of the object to be laminated 10 Holding part 10a Holding surface 11 Suction hole 12 Transparent part 13 Alignment mark 14 Mark for position confirmation 20 Lamination stage 30 Imaging part 40 Device control part 100 Lamination apparatus 200 Lamination system 210 Supply mechanism 220 Moving mechanism 221 Stator 222 Mover 223 Guide rail

Claims (8)

  1.  積層対象物を保持する保持部であって、前記積層対象物と接する保持面と直交する方向に撮像光を透過可能な透明部を有し、前記透明部にアライメントマークが設けられている保持部と、
     前記保持部によって保持される前記積層対象物を積層するための積層ステージと、
     前記保持部に対して前記保持面とは反対側の位置に配置され、前記保持部の前記透明部を介して、前記保持部によって保持されている前記積層対象物の少なくとも一部と、前記アライメントマークとを撮像可能な撮像部と、
     前記撮像部によって撮像された画像に基づいて、前記保持部によって保持されている前記積層対象物の位置ずれを検出し、検出した位置ずれに基づいて、前記保持部によって保持されている前記積層対象物と前記積層ステージとの間の相対的な位置ずれを補正可能な装置制御部と、
    を備えることを特徴とする積層装置。
    A holding part that holds a stacked object, the holding part having a transparent part that can transmit imaging light in a direction perpendicular to a holding surface in contact with the stacked object, and an alignment mark provided on the transparent part. and,
    a stacking stage for stacking the stacking objects held by the holding unit;
    At least a portion of the object to be laminated, which is arranged at a position opposite to the holding surface with respect to the holding part, and which is held by the holding part through the transparent part of the holding part, and the alignment an imaging unit capable of imaging the mark;
    Based on the image captured by the imaging unit, a positional shift of the stacked object held by the holding unit is detected, and based on the detected positional shift, the stacked target held by the holding unit is detected. an apparatus control unit capable of correcting a relative positional shift between an object and the stacking stage;
    A laminating device comprising:
  2.  前記アライメントマークは、前記透明部のうち、前記保持面に設けられていることを特徴とする請求項1に記載の積層装置。 The laminating apparatus according to claim 1, wherein the alignment mark is provided on the holding surface of the transparent part.
  3.  前記透明部は、前記保持部の角の位置に設けられていることを特徴とする請求項1または2に記載の積層装置。 The laminating device according to claim 1 or 2, wherein the transparent part is provided at a corner of the holding part.
  4.  前記透明部は、前記保持部の2つの角の位置に設けられていることを特徴とする請求項1または2に記載の積層装置。 The laminating device according to claim 1 or 2, wherein the transparent portion is provided at two corners of the holding portion.
  5.  前記撮像部は、2つの前記透明部に対応して2つ設けられていることを特徴とする請求項4に記載の積層装置。 5. The laminating apparatus according to claim 4, wherein two imaging sections are provided corresponding to the two transparent sections.
  6.  前記保持部の前記保持面には、複数の吸引孔が設けられていることを特徴とする請求項1~5のいずれか一項に記載の積層装置。 The laminating device according to any one of claims 1 to 5, wherein the holding surface of the holding portion is provided with a plurality of suction holes.
  7.  請求項1~6のいずれか一項に記載の前記積層装置と、
     複数の供給位置のそれぞれに前記積層対象物を供給可能な複数の供給機構と、
     所定の走行軌道を有するリニアモータの固定子と、前記走行軌道に沿って複数の前記供給位置の間を移動可能なリニアモータの可動子とを備える移動機構と、
    を備え、
     前記積層装置の前記保持部と前記積層ステージは、前記可動子に含まれることを特徴とする積層システム。
    The laminating device according to any one of claims 1 to 6,
    a plurality of supply mechanisms capable of supplying the laminated objects to each of a plurality of supply positions;
    a moving mechanism including a stator of a linear motor having a predetermined running track, and a movable element of the linear motor that is movable between the plurality of supply positions along the running track;
    Equipped with
    A lamination system, wherein the holding section and the lamination stage of the lamination apparatus are included in the mover.
  8.  前記移動機構は、複数の前記可動子を備えることを特徴とする請求項7に記載の積層システム。 The lamination system according to claim 7, wherein the moving mechanism includes a plurality of the movers.
PCT/JP2023/008258 2022-07-01 2023-03-06 Lamination device and lamination system WO2024004277A1 (en)

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JP2016033868A (en) * 2014-07-31 2016-03-10 株式会社村田製作所 Position correction/conveyance stage device and correction method for position correction/conveyance stage
WO2021220770A1 (en) * 2020-04-30 2021-11-04 株式会社村田製作所 Lamination device

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Publication number Priority date Publication date Assignee Title
JP2013167572A (en) * 2012-02-16 2013-08-29 Canon Inc Workpiece transport apparatus and workpiece transport method
JP2014127273A (en) * 2012-12-25 2014-07-07 Nissan Motor Co Ltd Electrode position detection device
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