KR102589965B1 - Lamination apparatus and lamination method - Google Patents

Abstract

A lamination device is provided that manufactures a laminated body with high adhesion by modifying the surface of a sheet in the air more easily and without surface destruction.
A stacking device 10 that sequentially stacks sheets (L1 to L5) with exposed polymer sheets modified by UV irradiation on at least a part of the adhesive surface, and an alignment stage 50 that aligns the positions of the sheets (L1 to L5). ), a stacking stage 80 on which aligned sheets (L1 to L5) are stacked, a transfer holder 60 for moving the sheets (L1 to L5) from the alignment stage 50 to the stacking stage 80, and a sheet ( L1 to L5) is provided with a UV irradiation device 100 that irradiates UV with a wavelength of 350 nm or less, the UV irradiation device is installed between the alignment stage and the stacking stage, and the UV irradiation is performed after the positioning. A stacking device (10) is provided.

Description

Lamination device and lamination method {LAMINATION APPARATUS AND LAMINATION METHOD}

The present invention relates to a laminating device equipped with an ultraviolet (UV) irradiation device and a method of manufacturing a laminate.

When manufacturing electronic devices such as multilayer ceramic capacitors and ceramic substrates, ceramic green sheets (printed polymer sheets) with conductor patterns printed on them are used. The printed polymer sheet is formed by applying a dielectric material onto a carrier film, and additionally, for example, screen printing a metal paste onto the applied dielectric material. Electronic devices are manufactured by accurately stacking, pressing, and firing printed polymer sheets.

However, if the adhesion between the laminated sheets is weak, there is a risk that lamination may be misaligned during the lamination process or transport, leading to contact failure such as disconnection or short circuit of the electronic components being manufactured.

Accordingly, as a pretreatment for the stacking and pressing process of the printing polymer sheet, the sheet has been subjected to plasma treatment to modify the surface to improve adhesion (see, for example, Patent Document 1).

Japanese Patent Publication No. 2016-171151

However, in order to increase adhesion through plasma treatment, the treatment must generally be carried out under vacuum, which increases the device installation area, work hours, and cost. In addition, plasma treatment has strong roughness and, depending on the material of the sheet, there is a risk of deteriorating the characteristics.

Therefore, the purpose of the present invention is to provide a lamination device that produces a laminated body with high adhesion by modifying the surface of a polymer sheet in the air more easily and without surface destruction.

In order to solve the above problem, a stacking device according to an embodiment of the present invention is a stacking device that sequentially stacks sheets with exposed polymer sheets modified by UV irradiation on at least a part of the adhesive surface, and adjusts the position of the sheets. An alignment stage that performs, a stacking stage on which the aligned sheets are stacked, a transfer holder that moves the sheet from the alignment stage to the stacking stage, and a UV irradiation device that irradiates the sheet with UV light at a wavelength of 350 nm or less; , the UV irradiation device is a lamination device installed between the alignment stage and the lamination stage, and the UV irradiation is performed after the alignment.

In addition, the lamination method of another embodiment of the present invention includes a process of providing a sheet on an alignment stage with a polymer sheet modified by UV irradiation exposed on at least a portion of the adhesive surface, and a process of aligning the position of the sheet on the alignment stage. , a process of transferring the aligned sheet from the alignment stage to a lamination stage through a transfer holder, a process of UV irradiating the sheet with a wavelength of 350 nm or less by a UV irradiation device during the transfer, and the UV-irradiated sheet. is a lamination method including the step of lamination on the lamination stage.

The present invention can provide a lamination device and a lamination method for manufacturing a laminated body with high adhesion by modifying the surface of a sheet in the air more easily and without surface destruction.

1 is a perspective view showing a stacking device according to an embodiment of the present invention.
Figure 2 is an XZ side view showing a lamination device according to an embodiment of the present invention.
Figure 3 is a diagram illustrating a lamination process using a lamination device according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail, but the present invention is not limited thereto.

<Overall configuration of laminated device>

Figure 1 is a perspective view of a lamination device 10 according to an embodiment of the present invention. In one embodiment of the present invention, the stacking device 10 includes a controller 20, a sheet stocker 30L1 _f to 30L5 _f , a transfer holder 40 for the stocker, an alignment stage 50, and a transfer holder 60 for stacking. , equipped with a lamination stage 80, a compressor 90, and a UV irradiation device 100. Additionally, the stacking device 10 may be provided with a charging unit, for example, a stage charger 68, a holder charger 70, a stage static eliminator 72, and a holder static eliminator 74. ) can be provided.

In FIG. 1 , the X-axis, Y-axis, and Z-axis are appropriately used as direction axes for explaining the layout of the stacking device 10. The X-axis is an axis along the moving direction of the stacking transfer holder 60. The Y-axis is an axis that runs directly along the X-axis in the horizontal plane. The Z-axis is a vertical axis orthogonal to the X-axis and Y-axis and is the same as the lamination direction of the sheets (L1 to L5) to be laminated. In addition, when explaining the arrangement of each mechanism of the stacking device 10, the sheet stocker 30L1 _f to 30L5 _f side is the upstream side, and the stacking stage 80 side along the X axis is the downstream side.

(Sheet)

Sheets L1 to L5 are sheets that are stacked by the stacking device 10. Each of the sheets L1 to L5 has a polymer sheet modified by UV irradiation exposed on at least a portion of the surface where the sheets contact each other during adhesion (hereinafter referred to as the adhesive surface).

Polymer sheets are heat resistant. Additionally, the polymer sheet is formed by applying a dielectric material containing a polymer that is modified by UV irradiation onto a carrier film. For example, the polymer sheet may be a ceramic green sheet obtained by laminating a ceramic precursor on a carrier film using a doctor blade method or the like. The carrier film can be used as a protective sheet for the sheets (L1 to L5), as will be described later, and in this specification, the sheets (L1 to L5) provided with the carrier film (protective film) are referred to as L1 _f to L5 _f , respectively. The carrier film (protective film) can be peeled off before the UV irradiation process.

Additionally, the sheets L1 to L5 may be printed polymer sheets with a metal pattern formed on the applied dielectric material. The sheets L1 to L5 stacked by the stacking device 10 may each be a printed polymer sheet or a polymer sheet without a metal pattern. Printed polymer sheets are formed, for example, by applying a dielectric material containing a polymer that is modified by UV irradiation onto a carrier film and screen printing a metal paste. The printed polymer sheet is exposed to at least 20% of the adhesive surface, and preferably to 50% or more of the adhesive surface.

The polymer used for the polymer sheets (L1 to L5) may be one that is modified by UV irradiation and has heat resistance. Preferably, liquid crystal polymer (LCP), cycloolefin polymer (COP), polyethylene terephthalate (PET), polyimide (PI), polyethylene (PE), and polycarbonate (PC) can be used.

Sheets L1 to L5 may have an adhesive layer. Additionally, the sheets (L1 to L5) may be provided with a protective film that is peeled off before the UV irradiation process. The protective film can be used as a protective film for the adhesive layer.

(Sheet Stalker)

Sheets L1 _f to L5 _f each provided with a carrier film are accommodated in the sheet stockers 30L1 _f to 30L5 _f . Although this embodiment is described using a sheet provided with a carrier film, a sheet without a carrier film may be accommodated in the sheet stocker.

In addition, in Figure 1, the sheets L1 _f to L5 _f provided with a carrier film are shown as so-called paper-leafed sheets, and the sheet stockers 30L1 _f to 30L5 _f are also shown as sheets L1 f to L5 _f provided with a paper-based carrier film. Although shown as a cartridge accommodating L5 _f ), the stacking device 10 according to the present embodiment is not limited to this form. For example, a sheet roll in which a plurality of sheets are continuously formed is formed for each of the sheets L1 _f to L5 _f provided with a carrier film, and a cutter may be installed to cut the sheet roll. In this case, the sheet stockers 30L1 _f to 30L5 _f are composed of roll holders that respectively hold sheet rolls corresponding to sheets L1f to L5f provided with a carrier film.

(Transfer holder for stocker)

The stocker transfer holder 40 is a transfer device that reciprocates between the sheet stocker (30L1 _f ~ 30L5 _f ) and the alignment stage 50. Since the stocker transfer holder 40 is installed on the upstream side of the stacking transfer holder 60, it is also called a “front end holder.”

The transfer holder 40 for the stocker is _movable in the X-axis direction and the Y-axis direction, and sheets ( _L1f ~ L5f) can be transported. The transfer holder 40 for a stocker can move along, for example, an X-axis stage and a Y-axis stage (not shown).

A suction plate 44 is installed at the lower end of the lift mechanism 42. The lift mechanism 42 moves the suction plate 44 in the Z-axis direction (vertical direction).

The suction plate 44 has a structure in which a plurality of air holes are provided in a metal plate such as an aluminum plate, for example. The lower end of the air hole is exposed and the upper end is connected to the air pipe (46). Air at negative pressure (Vac) and positive pressure (Prs) is supplied to the air pipe 46. When the sheets (L1f to L5f) provided with the carrier film are adsorbed, the air pipe 46 is evacuated. When the sheets L1f to L5f provided with the carrier film are separated, pressurized air is supplied from the air pipe 46. Additionally, a soft porous sheet may be provided on the contact surface of the suction plate 44 that contacts the sheets L1f to L5f provided with the carrier film.

Additionally, in some cases, a reversal stage (not shown) may be provided before the alignment stage 50 to invert the sheets and then stack them.

(Sort Stage)

The alignment stage 50 aligns the sheets (L1f to L5f) provided with the carrier film delivered from the sheet stockers (30L1 _f to 30L5 _f ). The protective films of the sheets L1f to L5f with the carrier film loaded on the alignment stage 50 are removed by a peeling unit (not shown) before alignment, leaving the sheets L1 to L5.

The alignment stage 50 is provided with a moving mechanism 52, a stage plate 53 as a loading table, and an alignment camera 56.

The moving mechanism 52 can move the stage plate 53 in the X and Y axes, and is configured to rotate the stage plate 53 around the Z axis. The stage plate 53 is provided with a light transmitting plate 54 which is a light transmitting member. The light transmitting plate 54 is provided in at least a portion of the sheet loading area where the sheets L1 to L5 are stacked. For example, as shown in FIG. 1, portions of the stage plate 53 corresponding to the four corners of the sheets L1 to L5 may be composed of a light transmitting plate 54. In addition, instead of this, two diagonal corners of the four corners of the sheets (L1 to L5) may be composed of a light transmitting plate 54, and one light transmitting plate including the portion corresponding to the four corners of the sheets (L1 to L5) A plate 54 may be provided on the stage plate 53.

A plurality of alignment cameras 56 are installed below the stage plate 53. For example, the alignment camera 56 is disposed at a position that can capture images of the four corners of the sheets L1 to L5, or two corners diagonally. The alignment camera 56 can capture images of the sheets L1 to L5 loaded on the stage plate 53 through the light transmitting plate 54 (light transmitting member). The alignment of the sheets (L1 to L5) is achieved by moving the alignment stage 50 based on the image of the alignment camera 56.

(Transfer holder for lamination)

The stacking transfer holder 60 holds the aligned sheets (L1 to L5) on the alignment stage 50 through vacuum suction and transfers them to the stacking stage 80. For example, when the alignment stage 50 and the stacking stage 80 are disposed on the X-axis, the stacking transfer holder 60 can only move along the X-axis.

As shown in FIG. 2, the stacking transfer holder 60 has almost the same structure as the stocker transfer holder 40. That is, the transfer holder 60 for stacking is provided with a lift mechanism 62, a suction plate 64 installed at the lower end of the lift mechanism 62, and an air pipe 66 connected to the suction plate 64.

The lift mechanism 62 moves the suction plate 64 in the Z-axis direction (vertical direction).

The suction plate 64 has a structure in which a plurality of air holes are provided in a metal plate such as an aluminum plate, for example. The lower end of the air hole is exposed and the upper end is connected to the air pipe (66). Air at negative pressure (Vac) and positive pressure (Prs) is supplied to the air pipe 66. When the sheets L1 to L5 are adsorbed, the air pipe 66 is evacuated. When the sheets L1 to L5 are separated, pressurized air is supplied from the air pipe 66. Additionally, a soft porous sheet may be provided on the contact surface of the suction plate 64 that contacts the sheets L1 to L2.

(UV irradiation device)

The lamination device 10 is equipped with a UV irradiation device 100 that activates the sheets with UV irradiation to improve adhesion between sheets during lamination. In one embodiment of the present invention, UV irradiation is applied to the sheets (L1 to L5) to the stacking stage (80) through the stacking transfer holder 60 after the sheets (L1 to L5) are aligned in the alignment stage (50). This takes place during transport and stacking.

UV irradiation can irradiate the entire UV-irradiated surface (irradiated surface) of the sheet (L1 to L5) at once, and can also irradiate a part of the irradiated surface while irradiating the sheet (L1 to L5) or the UV irradiation device (100). You can also irradiate the entire irradiation surface by moving any one of them. Additionally, UV irradiation may be performed in any direction (for example, from top to bottom or from bottom to top) as long as the sheets (L1 to L5) can be irradiated facing each other. That is, UV irradiation is not limited to the case where it is performed on the exposed side of the polymer sheet, and if UV modification of the polymer sheet is possible, it can also be performed on the side opposite to the exposed side.

In one embodiment of the present invention, the UV irradiation device 100 is used to transfer sheets (L1 to L5) through a transfer holder 60 for stacking between the alignment stage 50 and the stacking stage 80, as shown in Figure 1. ) is installed to face the UV light source from below on the irradiation surface.

In one embodiment, the width of the UV light source of the UV irradiation device 100 is narrower in the The entire irradiation surface of L5) is exposed and activated. In another embodiment, the UV irradiation device has a UV light source (not shown) of a size capable of exposing the irradiation surfaces of the sheets (L1 to L5) at once, and a transfer holder for lamination on the alignment stage 50 ( The sheets (L1 to L5) transferred through 60) are installed at a position facing the light source of the UV irradiation device 100 and are UV irradiated.

For example, the UV irradiation device 100 irradiates UV light upward (forward Z-axis direction). As described above, the stacking transfer holder 60 vacuum-sucks the sheets L1 to L5 at its lower end. Therefore, when the transfer holder for lamination 60 moves over the UV irradiation device 100 and UV light is irradiated, the polymer sheets of the sheets L1 to L5 being transferred are modified by the UV light.

The UV light source of the UV irradiation device may be one that generates UV light with a wavelength of 350 nm or less. For example, as a UV light source, an excimer lamp with a wavelength of 172 nm, a low-pressure mercury lamp with a wavelength of 185 nm and 254 nm, or a UV-LED with a wavelength of 265 nm, 280 nm, or 310 nm can be used. By using a UV light source with a wavelength of 350 nm or less, but not limited to this, chemical bond cleavage and activation of oxygen species occur on the sheet surface, resulting in surface modification of the sheets (L1 to L5).

The cumulative amount of UV irradiation by the UV irradiation device 100 varies depending on the material of the sheets (L1 to L5), but is a level that improves the adhesion of the sheets (L1 to L5) while not destroying the surface of the sheets (L1 to L5). It is desirable. Preferably it is 1000mJ/cm ² or more and 50000mJ/cm ² or less. If the cumulative irradiation amount of the UV irradiation device 100 to the sheets (L1 to L5) is less than 1000 mJ/cm ² , the effect of improving adhesion is not sufficient, and if it is greater than 50000 mJ/cm ² , there is a risk that the surface of the sheet may be destroyed. .

As described above, the UV irradiation device 100 is installed facing the sheet surface at a distance where UV of the UV irradiation device 100 is sufficiently irradiated to the sheets (L1 to L5). For example, when the UV light source is UV-LED, the distance (WD) between the UV light source and the sheet surface may be approximately 10 mm or more and 30 mm or less, and is preferably approximately 20 mm. If the distance between the UV light source and the sheet surface is too close, uneven illumination is likely to occur. Additionally, if the distance between the UV light source and the sheet surface is too far, the illuminance of the UV light source is lowered and sufficient surface modification is not achieved. In order to equalize the illuminance of the UV-LED, the UV irradiation device 100 may be equipped with a reflector in the UV-LED module.

Additionally, UV-LEDs can be installed in a line (straight line) form as shown in FIG. 1. In this case, it is desirable that the transfer direction (X-axis direction) be 30 mm or more in width, and the direction perpendicular to the transfer direction (Y-axis direction) be several mm longer than the Y-axis direction dimension of the sheets L1 to L5. Using a UV light source of this size can provide uniform and sufficient illuminance while maintaining productivity.

(Laminated stage)

As described above, the sheets L1 to L5 are transferred from the alignment stage 50 to the stacking stage 80 through the stacking transfer holder 60 and stacked. An adsorption hole (not shown) for holding the lowest layer sheet L5 may be formed on the loading surface of the lamination stage 80 where the final laminated body is formed. This suction hole is connected to the air pipe 82 as shown in FIG. 2. Negative pressure is introduced from the air pipe 82 to hold the lowest layer sheet L5 on the lamination stage 80. Additionally, an adhesive sheet may be provided on the loading surface of the stacking stage 80 instead of vacuum adsorption.

(fixed unit)

The sheets (L1 to L5) stacked on the stacking stage (80) by aligning their positions in the alignment stage (50) are preferably fixed to prevent misalignment of the stacked sheets (L1 to L5) before compression. General methods can be used to fix the laminated sheet, for example, mechanical fixation, fixation by adhesive, fixation by heat welding, and fixation by electrified lamination.

In one embodiment of the invention, the sheet stack is fixed by electrified lamination. The lamination device 10 is a charged lamination fixing unit that irradiates charged particles to the lamination transfer holder 60, the sheets (L1 to L5) transported by the holder, and the lamination intermediate to be laminated on the lamination stage 80. Equipped with a charger and static eliminator.

Specifically, the stacking device 10 is provided with a stage charger 68, a holder charger 70, a stage static eliminator 72, and a holder static eliminator 74. These chargers and eliminators are composed of, for example, ionizers.

The stage charger 68 irradiates charged particles toward the loading surface of the lamination stage 80 and the exposed surface of the sheets L1 to L5 laminated on the lamination stage 80. The stage charger 68 may be able to move relative to the stacking stage 80. For example, as illustrated in FIG. 1, the stage charger 68 is mounted at the downstream end (position on the stacking stage 80 side) of the stacking transfer holder 60 and is connected to the transfer holder 60 for transfer. You can move on the X-axis together.

The holder charger 70 and the holder static eliminator 74 can move relative to the stacking transfer holder 60 in the X-axis direction, that is, along the movement direction of the stacking transfer holder 60. The holder charger 70 and the holder eliminator 74 are installed between the alignment stage 50 and the stacking stage 80 and are placed at a position where the stacking transfer holder passes over them. Preferably, the charger 70 for a charging holder and the static eliminator 74 for a holder are installed downstream of the UV irradiation device 100. By being installed downstream of the UV irradiation device 100, static electricity removal due to UV irradiation can be avoided.

For example, the holder charger 70 and the holder static eliminator 74 irradiate charged particles upward (in the positive Z-axis direction). Therefore, when the lamination transfer holder 60 moves on the holder charger 70 and the holder static eliminator 74, when charged particles are irradiated, the charged particles enter the exposed surfaces of the sheets L1 to L5 being transferred. do. When the holder charger 70 and the holder static eliminator 74 are installed downstream of the UV irradiation device 100, charged particles are incident on the surfaces of the sheets (L1 to L5) being transferred by UV light. It will happen.

The charger 70 for a holder and the static eliminator 74 for a holder irradiate charged particles on an area smaller than the exposed surface of the sheets L1 to L5 held in the lamination transfer holder 60. It can happen. For example, an area shorter than the length of the sheets L1 to L5 in the . Meanwhile, the length of the irradiation point in the Y-axis direction may be longer than the Y-axis direction of the sheets (L1 to L5). The stacking transfer holder 60, the holder charger 70, and the holder static eliminator 74 move relative to each other in the X-axis direction, exposing the sheets L1 to L5 transported by the stacking transfer holder 60. It becomes possible to irradiate charged particles across the entire surface.

The static eliminator 72 for the stage may be fixed to the stacking stage 80, for example. For example, the stage static eliminator 72 can irradiate charged particles over the entire loading surface of the stacking stage 80.

By these charged lamination fixing units, charged particles are incident on the lamination transfer holder 60, the sheets (L1 to L5) transported by the holder, and the lamination intermediate to be laminated on the lamination stage 80, and the lamination structure is fixed. .

(press)

The laminated body fixed as described above is heated by the compressor 90 and compressed in the vertical direction, that is, in the lamination direction. As a result of this pressing process, each layer is fixed in the final laminate. The lamination device 10 may have a press 90 as part of it, or it may be provided as another device.

(controller)

The controller 20 controls each device of the stacking device 10. For example, the controller 20 includes a stocker transfer holder control unit, a reversal unit control unit, an alignment stage control unit, a stacking transfer holder control unit, a UV irradiation device control unit, a sheet information storage unit, a charger control unit, a static eliminator control unit, and a compactor control unit. is provided. The controller 20 consists of a computer, for example.

<Laminating process>

Next, the stacking process of sheets L1 to L5 using the stacking device 10 according to one embodiment of the present invention will be described with reference to FIGS. 1 to 3.

Figure 3 is a schematic diagram of the lamination process of sheet L3.

The sheet L3 _f with the protective film is transferred from the sheet stocker 30L3 _f to the stage plate 53 of the alignment stage 50 by the stocker transfer holder 40 and fixed thereon. Then, the protective film f attached to the surface opposite to the surface in contact with the stage plate 53 of the alignment stage 50 of L3 is peeled off by a peeling unit (not shown) (FIG. 3(a)).

Subsequently, based on the image of the sheet L3 loaded on the stage plate 53 captured by the alignment camera 56, the positional and angular misalignments of the sheet L3 are corrected by moving the alignment stage 50. (Figure 3(b)).

The sheet L3 whose position has been corrected is transferred from the alignment stage 50 to the stacking stage 80 by the stacking transfer holder 60. At this time, UV is irradiated by the UV irradiation device 100 installed between the path of the alignment stage 50 and the stacking stage 80 (FIG. 3(c)). At this time, the distance between the UV source such as UV-LED and the exposed surface of the sheet L3 is controlled to about 20 mm. The UV irradiation intensity and the transfer speed of the sheet are controlled so that the cumulative irradiation amount to the sheet L3 of the UV irradiation device 100 is 1000 mJ/cm ² or more and 50000 mJ/cm ² or less. By irradiating under these conditions, the surface of the sheet L3 is modified in a depth range of 0.1 nm to 500 nm, thereby improving adhesion during lamination. On the other hand, in the case of plasma irradiation, the surface of the sheet may be destroyed at a depth of 1 μm or more, which may adversely affect the properties.

Additionally, while the sheet L3 is transferred from the alignment stage 50 to the stacking stage 80, charged particles are incident on the sheet L3 by the charging unit.

The sheet L3, which has undergone surface modification and electrification treatment by UV irradiation while being transported by the transfer holder 60 for lamination, is polymerized on the sheet L2 that has already been laminated on the sheet L1 in the lamination stage 80. The sheets are stacked so that the exposed sides are in contact (Figure 3(d)). The surface of the sheet L3 where the polymer sheet is exposed may be provided with an adhesive layer. In this case, the laminate can be fixed more firmly due to improved adhesion due to UV irradiation in addition to adhesion by the adhesive layer.

The lamination intermediate (FIG. 3(e)) obtained in this way can further repeat the lamination process (FIG. 3(a) to 3(d)), and after the desired lamination is achieved, it is heated and compressed with a press 90 (not shown). A laminate is provided.

(Embodiment of the invention)

The first embodiment of the present invention is a stacking device that sequentially stacks sheets in which a polymer sheet modified by UV irradiation is exposed on at least a part of the adhesive surface, including an alignment stage for positioning the sheets, and the position aligning stage for positioning the sheets. A stacking stage on which sheets are stacked, a transfer holder for moving the sheet from the alignment stage to the stacking stage, and a UV irradiation device that irradiates the sheet with UV light at a wavelength of 350 nm or less, wherein the UV irradiation device is connected to the alignment stage. It is a lamination device installed between the lamination stage and the UV irradiation is performed after the positioning.

This has the effect of manufacturing a laminate with high adhesion by modifying the surface of the sheet more easily and without surface destruction in the air.

In the second embodiment of the present invention, in the first embodiment, the cumulative irradiation amount of the UV irradiation is 1000 mJ/cm ² or more and 50,000 mJ/cm ² or less.

This has the effect of improving adhesion by sufficiently modifying the surface even in the air without destroying the sheet surface.

In the third embodiment of the present invention, in the first or second embodiment, the distance between the sheet and the UV light source of the UV irradiation device during the UV irradiation is 10 mm or more and 30 mm or less.

This has the effect of preventing illuminance unevenness from occurring and providing sufficient illuminance of the UV light source to achieve surface modification sufficient to improve adhesion.

In a fourth embodiment of the present invention, in any one of the first to third embodiments, the sheet is a ceramic green sheet.

As a result, a ceramic green sheet laminate with high adhesion can be provided, and as a result, a multilayer ceramic electronic component with less stack misalignment can be provided.

In a fifth embodiment of the present invention, the stacking device in any one of the first to fourth embodiments further includes a fixing unit for fixing the stacked sheets.

As a result, the stacked sheets have the effect of being more fixed to prevent misalignment.

In a sixth embodiment of the present invention, in the fifth embodiment, the fixing unit includes a charger and a static eliminator for irradiating charged particles to sheets to be laminated on the lamination stage.

This has the effect of fixing the laminated structure by injecting charged particles into the transfer holder, the sheet transferred by the holder, and the sheet laminated on the lamination stage.

A seventh embodiment of the present invention is a process of providing a sheet on an alignment stage with a polymer sheet modified by UV irradiation exposed on at least a part of the adhesive surface, a process of aligning the position of the sheet on the alignment stage, and the position of the sheet. A process of transferring the tailored sheet from the alignment stage to the stacking stage through a transfer holder, a process of UV irradiating the sheet with a wavelength of 350 nm or less by a UV irradiation device during the transfer, and the UV-irradiated sheet is stacked. It is a stacking method that includes the process of stacking on a stage.

This has the effect of manufacturing a laminate with high adhesion by modifying the surface of the sheet in the air more easily and without surface destruction.

The eighth embodiment of the present invention further includes a step in which the UV-irradiated sheet in the seventh embodiment is irradiated with charged particles in a charging device before the sheet is laminated on the lamination stage.

As a result, the laminated sheets have the effect of being more fixed to prevent misalignment.

In the ninth embodiment of the present invention, in the seventh or eighth embodiment, the cumulative irradiation amount of the UV irradiation is 1000 mJ/cm ² or more and 50,000 mJ/cm ^{2 or} less.

This has the effect of improving adhesion by sufficiently modifying the surface even in the air without destroying the sheet surface.

In a tenth embodiment of the present invention, in any one of the seventh to ninth embodiments, the distance between the sheet and the UV light source of the UV irradiation device during the UV irradiation is 10 mm or more and 30 mm or less.

This has the effect of preventing uneven illuminance from occurring and also providing sufficient illuminance of the UV light source to achieve surface modification sufficient to improve adhesion.

10 Stacking device
20 controller
30L1 _f seat stocker
30L2 _f seat stocker
30L3 _f seat stocker
30L4 _f seat stocker
30L5 _f seat stocker
40 Transfer holder for stocker
42 lift mechanism
44 suction cup
46 air piping
50 alignment stages
52 mobile devices
53 stage plate
56 Alignment Camera
60 Transfer holder for stacking
62 lift mechanism
64 suction cup
66 air piping
68 stage battle machine
70 Charger for holder
72 Static eliminator for stage
74 Static eliminator for holder
80 stacking stage
82 air piping
90 press
100 UV irradiation device
L1 sheet
L2 sheet
L3 sheet
L4 sheet
L5 sheet
L1 _f Sheet with carrier film (protective film)
L2 _f Sheet with carrier film (protective film)
L3 _f Sheet with carrier film (protective film)
L4 _f Sheet with carrier film (protective film)
L5 _f Sheet with carrier film (protective film)

Claims (12)

A stacking device that sequentially stacks sheets with exposed polymer sheets modified by UV irradiation on at least a portion of the adhesive surface,
an alignment stage that adjusts the position of the sheet;
a stacking stage on which the aligned sheets are stacked;
a transfer holder that moves a sheet from the alignment stage to the stacking stage; and
Provided with a UV irradiation device that irradiates the sheet with UV light at a wavelength of 350 nm or less,
The UV irradiation device is installed between the alignment stage and the stacking stage, and the UV irradiation is performed after the alignment,
A stacking device, characterized in that the cumulative irradiation amount of the UV irradiation is 1000 mJ/cm ² or more and 50,000 mJ/cm ² or less. delete According to paragraph 1,
A lamination device, characterized in that during the UV irradiation, the distance between the sheet and the UV light source of the UV irradiation device is 10 mm or more and 30 mm or less. According to paragraph 1,
A stacking device, characterized in that the sheet is a ceramic green sheet. According to paragraph 1,
A stacking device further comprising a fixing unit for fixing the stacked sheets. According to clause 5,
The fixing unit is installed between the UV irradiation device and the lamination stage, and includes a charger and a static eliminator for irradiating charged particles to the sheet to be laminated on the lamination stage after the UV irradiation. A process of providing a sheet with an exposed polymer sheet modified by UV irradiation on at least a portion of the adhesive surface to an alignment stage;
A process of aligning the position of the sheet on the alignment stage;
A process of transferring the aligned sheet from the alignment stage to a stacking stage through a transfer holder;
A process of UV irradiating the sheet with a wavelength of 350 nm or less by a UV irradiation device during the transfer; and
A process of stacking the UV-irradiated sheet on the stacking stage,
A lamination method, characterized in that the cumulative irradiation amount of the UV irradiation is 1000 mJ/cm ² or more and 50,000 mJ/cm ² or less. In clause 7,
A lamination method further comprising irradiating charged particles to the UV-irradiated sheet in a charger before the sheet is laminated on the lamination stage. delete In clause 7,
A lamination method, wherein during the UV irradiation, the distance between the sheet and the UV light source of the UV irradiation device is 10 mm or more and 30 mm or less. A stacking device that sequentially stacks sheets with exposed polymer sheets modified by UV irradiation on at least a portion of the adhesive surface,
an alignment stage that adjusts the position of the sheet;
a stacking stage on which the aligned sheets are stacked;
a transfer holder that moves a sheet from the alignment stage to the stacking stage; and
Provided with a UV irradiation device that irradiates the sheet with UV light at a wavelength of 350 nm or less,
The UV irradiation device is installed between the alignment stage and the stacking stage, and the UV irradiation is performed after the alignment,
A lamination device, characterized in that during the UV irradiation, the distance between the sheet and the UV light source of the UV irradiation device is 10 mm or more and 30 mm or less. A stacking device that sequentially stacks sheets with exposed polymer sheets modified by UV irradiation on at least a portion of the adhesive surface,
an alignment stage that adjusts the position of the sheet;
a stacking stage on which the aligned sheets are stacked;
a transfer holder that moves a sheet from the alignment stage to the stacking stage;
A UV irradiation device that irradiates the sheet with UV light at a wavelength of 350 nm or less; and
Includes a fixing unit for fixing the stacked sheets,
The UV irradiation device is installed between the alignment stage and the stacking stage, and the UV irradiation is performed after the alignment,
The fixing unit is installed between the UV irradiation device and the lamination stage, and includes a charger and a static eliminator for irradiating charged particles to the sheet to be laminated on the lamination stage after the UV irradiation.

Images