JP3227482B2 - Method and apparatus for manufacturing ceramic multilayer substrate - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention passes through various steps including through-hole processing, electrode printing, electrode drying, and multi-layer bonding.
TECHNICAL FIELD The present invention relates to a method and an apparatus for manufacturing a ceramic multilayer substrate applied to manufacture a ceramic multilayer substrate from ceramic green sheets.

[0002]

2. Description of the Related Art A conventional example of manufacturing a laminated ceramic capacitor is as follows. First, a ceramic slurry containing a dielectric material powder, a binder, a plasticizer, an organic solvent and the like is coated on a film surface of a base film made of polyethylene terephthalate or the like. To obtain a ceramic green sheet. The ceramic green sheet is continuously fed through a base film and subjected to processing such as through-hole processing, electrode printing, and electrode drying. Then, the base film is peeled off from the ceramic green sheet, and the internal electrodes are formed to form the ceramic green sheet. Has been proposed to form a multi-layer ceramic sheet by joining a plurality of sheets (Japanese Patent Laid-Open No. 63-188926).

[0003] When the continuous feeding by the base film is applied, the ceramic green sheet can be fed by being carried on the base film, so that the ceramic green sheet can be securely bonded without being deformed. However, in this film feeding, it is necessary to repeatedly wind and unwind the ceramic green sheet in a roll shape, and to repeat the roll winding again, depending on the process, replace the roll with equipment or rewind the roll after the process. Work is also required, and the time and labor required for changing the roll and winding the rolls are increased, which makes the process extremely complicated and mechanically large.

[0004] In addition, if troubles such as bleeding or blurring of printing occur during the electrode printing process, for example, the subsequent printing electrode drying process must be stopped until the cause is eliminated. In addition, if the ceramic green sheets are kept stagnant in the furnace, there arises a problem that the base film is thermally deformed.

[0005]

SUMMARY OF THE INVENTION According to the present invention, a ceramic green sheet is cut into a card shape, and the resulting green sheet is treated as a ceramic green card one by one, thereby improving the product yield and manufacturing different types of products. To provide a method and apparatus for manufacturing a ceramic multi-layer substrate which can easily cope with the problems, shorten the setup time for product changeover and shorten the manufacturing lead time, improve the equipment operation rate, and reduce the size of the equipment. With the goal.

[0006]

According to a first aspect of the present invention, there is provided a method of manufacturing a ceramic multi-layer substrate, wherein a ceramic green sheet formed on a film surface of a base film is a ceramic green card having a predetermined size with the base film attached. The ceramic green card with the base film is stacked and placed on a cassette table provided between each process with the green sheet side of the ceramic green card facing upward, and is taken out from the cassette table to the next process. By repeating the transfer, through-hole processing, electrode printing and drying are sequentially applied to the ceramic green card with the base film to form internal electrodes, and then the base film is peeled off from the ceramic green card in a multilayer bonding process. Multiple ceramic green cards only It is adapted to be stacked.

In the method for manufacturing a ceramic multilayer substrate according to a second aspect of the present invention, prior to the step of cutting the ceramic green sheet as a ceramic green card with a base film, a card positioning hole is formed in the sheet surface of the ceramic green sheet. After that, the ceramic green sheet is cut into ceramic green cards of a predetermined size, and a spindle rising from the surface of the cassette table is inserted into the card positioning hole to support the ceramic green card with the base film on the cassette table for each process. It is arranged so that it is aligned and stacked on a shaft.

In the method for manufacturing a ceramic multilayer substrate according to a third aspect of the present invention, in the ceramic green card multilayer bonding step, the ceramic green card is taken out by the lamination head and the ceramic green card is removed by the lamination head on the base film side. Then, the substrate is heated by being pressed against a heating platen, the base film is peeled off from the heat-treated ceramic green card, and only the ceramic green card is held by the lamination head.

In the method for manufacturing a ceramic multi-layer substrate according to a fourth aspect of the present invention, prior to the ceramic green card multi-layer bonding step, the ceramic green cards are divided into different forms and individually mounted on a plurality of cassette tables. The ceramic green cards are taken out of the individual cassette tables in the order in which the ceramic green cards are multilayer-bonded, and each ceramic green card is edited in the multilayer bonding order so that a plurality of ceramic green cards are stacked and mounted on one mounting table. Have been.

In the apparatus for manufacturing a ceramic multi-layer substrate according to a fifth aspect of the present invention, the ceramic green sheet is provided with a predetermined size with the ceramic green sheet attached to the base film, after the machine for feeding the ceramic green sheet formed on the film surface of the base film. A card cutting machine for cutting as a ceramic green card is provided, and a through-hole processing machine for processing ceramic green cards with a base film one by one and an electrode printing / drying machine are sequentially provided.
Further, a card multi-layer joining machine is provided in which the base film is peeled off from the ceramic green card and only a plurality of ceramic green cards are stacked, and as a means for transferring the ceramic green card between the respective machines, a ceramic green card with a base film is provided. Card receiving means for receiving the ceramic green cards one by one, a cassette table on which the ceramic green cards are sequentially stacked by the card receiving means, and a card removing means for transferring the ceramic green cards one by one to the next process from the cassette table. It is constituted by equipping each.

In the apparatus for manufacturing a ceramic multi-layer substrate according to a sixth aspect of the present invention, a card positioning hole is provided before a card cutting machine for cutting a ceramic green sheet as a ceramic green card having a predetermined size with a base film attached. Is provided on the surface of the ceramic green sheet, and a support shaft for aligning and stacking the ceramic green cards with the base film by inserting them into the card positioning holes of the ceramic green card is provided. It is configured by equipping a cassette stand.

In the apparatus for manufacturing a ceramic multi-layer substrate according to claim 7 of the present invention, a ceramic green card heating platen for heating a ceramic green card from a base film side and a ceramic green card receiving from a green sheet side are provided. By mounting the card multi-layer bonding machine equipped with a lamination head that holds the ceramic green card only by peeling the base film from the heat-treated ceramic green card while pressing against the heating surface plate from the base film side It is configured.

In the apparatus for manufacturing a ceramic multi-layer substrate according to claim 8 of the present invention, a plurality of ceramic green cards are separately stacked and placed separately in different modes before the card multi-layer bonding machine is provided. A cassette table, card removing means for taking out the ceramic green cards one by one from the cassette table in the order of multi-layer stacking, and one placing table for stacking and placing the ceramic green cards in the removing order by the card removing means. It is configured with a card editing machine.

[0014]

In the method of manufacturing a ceramic multilayer substrate according to the first aspect of the present invention, a ceramic green sheet is cut into a card with a base film, and through-hole processing and electrode formation are performed on each of the ceramic green cards. Processing such as printing and multi-layer joining can be performed individually and sequentially.
Since a ceramic green card with a base film is handled, it is possible to prevent deformation due to wrinkles, twists, and the like, thereby improving product yield. Also, by individually processing the ceramic green cards one by one, after processing, they are sequentially stacked and mounted on the cassette table, and in the next process, sequentially from the stacked cassette tables, a plurality of sheets are stacked one by one. , The ceramic green card can be stacked or sent out quickly, shortening the lead time,
Since the variety can be easily changed, a wide variety of products can be efficiently manufactured.

In the method for manufacturing a ceramic multi-layer substrate according to a second aspect of the present invention, the ceramic green cards are stacked and mounted on the cassette table while being aligned with the support shaft inserted into the card positioning hole. The sheets can be stacked and placed on the table in an orderly manner, and individual sheets can be easily taken out.

In the method for manufacturing a ceramic multilayer substrate according to a third aspect of the present invention, in the ceramic green card multilayer bonding step, the ceramic green card taken out of the cassette table is pressed and heated from a base film side to a heating platen. Since the base film is peeled off from the heat-treated ceramic green card and only the ceramic green card is held by the laminating head, the base film can be easily peeled off, and the multilayer bonding by softening the ceramic green card by heating can be reliably performed.

In the method for manufacturing a ceramic multilayer substrate according to a fourth aspect of the present invention, prior to the step of bonding the ceramic green cards to the multilayer, the ceramic green cards are divided into different forms and stacked and mounted on individual cassette tables. By taking out the ceramic green cards one by one from the individual cassette tables in the order in which the ceramic green cards are to be multilayer-bonded, the ceramic green cards having different aspects are multilayered in order to be edited in the multilayer bonding order and to be stacked and mounted on one cassette table. Joining can be done quickly.

In the apparatus for manufacturing a ceramic multilayer substrate according to a fifth aspect of the present invention, the ceramic green cards are processed one by one, and the ceramic green cards are stacked one by one on a cassette table by card receiving means. Since a plurality of stacked ceramic green cards are sent one by one from the cassette table to the next process, the ceramic green cards can be smoothly received or taken out, thereby shortening the manufacturing lead time and reducing the size of the entire apparatus. Can be configured into something. In addition, since different types of products can be applied uniformly, the range of product types can be expanded, product types can be easily switched, and the equipment operation rate can be improved.

In the apparatus for manufacturing a ceramic multi-layer substrate according to claim 6 of the present invention, since a plurality of ceramic green cards are stacked on a support shaft as a cassette table, the ceramic green cards can be aligned. It can be stacked and taken out easily.

In the apparatus for manufacturing a ceramic multilayer substrate according to a seventh aspect of the present invention, when the ceramic green cards are joined in multiple layers, the ceramic green cards are heated from the base film side by a heating platen to form the base of the ceramic green cards. Since the ceramic green card is peeled off from the film and at the same time, only the ceramic green card is held by the lamination head, the ceramic green card can be efficiently subjected to multi-layer bonding by a simple mechanism.

According to an eighth aspect of the present invention, there is provided an apparatus for manufacturing a ceramic multi-layer substrate, comprising a card editing machine which takes out ceramic green cards having different aspects one by one in a multilayer joining order and sequentially stacks and mounts them on one cassette table. In order to provide, it is also possible to quickly perform multilayer bonding of different aspects of the ceramic green card, and a plurality of cassette tables for individually stacking and mounting different aspects of the ceramic green card,
Since there is provided one cassette table on which the ceramic green cards to be taken out from the cassette table are placed in the stacking order, the structure can be made mechanically simple.

[0022]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
The ceramic multilayer board manufacturing equipment shown in (1) uses a ceramic slurry mixed with ceramic powder of magnetic or dielectric material, binder, plasticizer, organic solvent, etc., selected according to the type of electronic component manufactured as the final product. This is applied to manufacture a ceramic multilayer substrate from a ceramic green sheet S formed in a sheet shape.

The ceramic green sheet S is formed so as to be continuously formed in a belt shape using a polyethylene terephthalate film or the like as a base film, wound up in a roll shape and provided so that it can be fed out into the apparatus. Since the ceramic green sheet S is formed on the film surface of the base film, it can be formed into a thin film having a thickness of 10 μm or less or a thick film having a lamination thickness of 1.5 mm or more. In addition, in winding in a roll, the base film is preferably positioned on the outer layer side to protect the ceramic green layer.

The ceramic green card S is shown in FIG.
As shown in the figure, the ceramic green card C having a predetermined size is cut and supplied to each step. Further, this ceramic green card C is cut into a card shape while the ceramic green layer 1 is provided with the base film 2 formed on the film surface, and deformation such as wrinkles and twists occurs during continuous feeding to each step as described later. To prevent it from occurring.

The ceramic green card C is shown in FIG.
At the stage of the ceramic green sheet S, the card positioning holes 3a, 3b... For stacking and mounting on the cassette table and the image positioning reference holes 4a, 4b. After being provided on the sheet surface, it is cut and formed into a card having a predetermined size.

As an apparatus for producing a ceramic multilayer substrate from the ceramic green card C, a ceramic green sheet feeding machine 10, a card positioning hole processing machine 20, a card cutting machine 30, a through hole processing machine 40, an electrode printing machine 50, Printing electrode dryer 60, card editing machine 7
0, a card multi-layer joining machine 80, and a stack base 90 of multi-layer ceramic green cards are sequentially arranged.

[0027] In the structure, between the card cutting machine 30 and the through hole processing machine 40, between the through hole processing machine 40 and the electrode printing machine 50, between the printing electrode drying machine 60 and the card editing machine 70, Editing machine 70 and card multilayer bonding machine 80
The cassette tables 100, 110, 120, and 130 on which a plurality of ceramic green cards are stacked and placed are arranged respectively.

These cassette tables 100, 110, 12
As described with reference to 0 and 130, which are disposed between the through-hole processing machine 40 and the electrode printing machine 50, they are inserted into the card positioning holes 3a, 3b... (See FIG. 3) as shown in FIG. The ceramic green card C
, A plurality of support shafts 110a, 110b ...
Is mounted on the table surface.

When the card positioning holes are separately provided at a plurality of locations of the ceramic green card C, the same number of the support shafts 110a, 110b,... Further, the cassette table 110 is provided with a ceramic green card that receives ceramic green cards from the previous process and stacks them, and a ceramic green card that stacks and mounts a plurality of ceramic green cards for the next process and transfers them in one place. It is advisable to use a double cassette auto changer mechanism.

Centering on the cassette table 110, a card receiving means 111 for receiving a plurality of ceramic green cards from the previous process and stacking a plurality of ceramic green cards, and transferring the plurality of ceramic green cards C stacked and mounted one by one to the next process. The card transfer means is provided as a card transfer means in combination with the card removal means 112 for transferring and sending. The card receiving means 111 and the card removing means 112 can be constituted by a vacuum suction head using + or-air or a suction pad using a flexible member. The card transfer means is provided so that the entire apparatus receives and takes out and transfers the ceramic green card by continuously performing all the processes from the cassette table to the cassette table.

Feeding machine 10 for ceramic green sheet
Are provided with guide rollers 12, 13,... For winding a ceramic green sheet S wound in a roll shape on a reel 11 and feeding the base sheet with the base film side facing upward as shown in FIG. ing.

Subsequent to the ceramic green sheet feeding machine 10, a card positioning hole processing machine 20 and a card cutting machine 30 are arranged in this order. In the card positioning hole processing machine 20, each of the blade dies 22a and 22b for simultaneously forming the receiving base 21 of the ceramic green sheet S and the card positioning holes 3a, 3b... And the image positioning reference holes 4a, 4b. , 23a, 23b, and a mold 24 that can move up and down.

The card cutting machine 30 includes a pair of cutting blades 31 which are vertically movable and vertically movable. Further, when the cutting blade 31 is operated, a pair of sheet fixing claws 32 for holding the ceramic green sheet S from above and below.
Is provided near the card positioning machine 20, and a pair of members that horizontally move in a horizontal direction according to a length cut as a ceramic green card from the sheet fixing claw 32 by holding the front end side of the ceramic green sheet S from above and below. The sheet feeding claw 33 is provided.

In this step, the ceramic green sheet S is fed out by a predetermined length, and the leading end side is fixed to the sheet fixing claw 32.
First, the sheet is caught by the sheet feeding claw 33 that has moved closer.
The card positioning hole and the image positioning reference hole are
To form on the sheet surface. After that, the sheet feeding claw 33
Is moved in the horizontal direction by a predetermined distance to pull out the ceramic green sheet S by one ceramic green card. When the stroke movement of the sheet feeding claw 33 is completed, the sheet fixing claw 32 and the cutting blade 31 are operated to cut the ceramic green sheet S into one ceramic green card C.
And is placed on the cassette table 100.

The cassette table 100 is provided with a card receiving means 101 for sucking and holding the ceramic green card C from below, and the card receiving means 101 receives the ceramic green card C and inverts the base film downward. Cassette table 10
Place on 0. During this time, the above-described operation is repeatedly performed by the sheet feeding claws 33, and the ceramic green cards are sequentially cut by the cutting blade 31, and the cut cards are received by the card receiving means 101, and a plurality of sheets can be stacked and mounted on the cassette table 100.

Subsequent to the card cutting machine 30, a through hole processing machine 40 shown in FIG. 6 is provided. The through-hole processing machine 40 is provided to provide a through-hole on which a conductive material is loaded on a card surface so that an electrode formed by printing is used as an internal electrode and connected to another as described later. The through-hole processing machine 40 includes a punching machine 41 such as a YAG laser irradiator or a punching machine, and a cassette table 100 in which a ceramic green card C is used in a previous process.
And an XYθ table 42 which is taken out and placed one by one from

The XYθ table 42 corrects the misalignment of the ceramic green card placed on the table surface by moving the table surface forward or backward or left and right in the horizontal direction or by rotating the table surface by the required angle about the vertical axis. Equipped as The XYθ table 42 is horizontally slidable by a cylinder from a position close to the cassette table 100 in the previous process to a position immediately below the punching machine 41. The ceramic green card of the cassette table 100 is vacuum-adsorbed on the table surface. Card take-out means 1 using a head or the like
02 (indicated by an arrow) and is configured to be transferred.

On the table surface of the XYθ table 42, the image positioning reference holes of each ceramic green card are captured by the imaging camera 43, image-processed, and the XYθ table 42 is controlled to adjust the positions of the through holes. Image processing means. The XYθ table 42 is provided with an auxiliary table 44 for transferring a ceramic green card having a through-hole formed from the table surface to the next step.

From the XYθ table 42, the ceramic green card in which the through-holes have been punched is transferred to the auxiliary table 44, and the above-mentioned cassette table 110 is transferred.
The card is received and held by the card receiving means 111 (indicated by an arrow), and a plurality of sheets are stacked and mounted on the cassette table 110.

Following the through hole processing machine 40, FIG.
An electrode printing machine 50 and a printing electrode drying machine 60 shown in FIG. The electrode printing machine 50 includes a screen printing machine 51 for forming electrodes of a predetermined pattern on the card surface of the ceramic green card, and a card ejection means 11 for transferring the ceramic green sheets from the cassette table 110 in the previous process.
XYθ placed by taking out at 2 (indicated by an arrow)
And a table 52. Table 52 operates in the same manner as the XYθ table 42 of the through-hole processing machine 40, the image processing means for positioning the ceramic green card by the imaging camera 53, and the auxiliary table for transferring the ceramic green card on which the electrodes are printed from the table surface. 54.

The printed electrode dryer 60 is a drying furnace having a plurality of circulating and moving shelf boards 61a, 61b,... Inside thereof, for drying electrodes printed on the card surface of a ceramic green card. Equipped as Between the printed electrode dryer 60 and the electrode printer 50,
The electrode-printed ceramic green card is sequentially placed on a plurality of shelf boards 61a, 61b.
There is no need to arrange a cassette table since the card feeding timing with 0 can be sufficiently set. However, a cassette table similar to that shown in FIG. 3 may be preliminarily arranged.

After the drying process of the printed electrodes, the ceramic green card subjected to the drying process of the printed electrodes is placed on the shelf board 61.
a, 61b, etc., can be received by the card receiving means 121 (indicated by an arrow) and a plurality of sheets can be stacked and mounted on the cassette table 120.

Subsequent to the printing electrode dryer 60, a card editing machine 70 shown in FIG. 8 is provided. When the card editing machine 70 requires a ceramic green card on which electrodes having different printing patterns are formed to form one ceramic multilayer substrate, the card editing machine 70 stacks a plurality of sheets separately for each ceramic green card having a different aspect from the printing pattern. The ceramic green cards having different aspects are edited and stacked in the order of the multilayer joining performed in the next step.

In order to perform this editing, the card editing machine 70 has a plurality of cassette tables 71, 72, 73,... Which are stacked and mounted for each of the ceramic green cards having different modes, and the plurality of cassette tables 71, 72, 73,. And a single cassette table 130 on which ceramic green cards of different modes are stacked in the multilayer stacking order.

The card editor 70 receives a ceramic green card for each mode from the cassette table 120 in the previous process, and stacks the ceramic green cards on the cassette tables 71, 72, 73,. 73, card ejection means 131 (shown by arrows) such as an XYθ multi-axis mobile robot for receiving ceramic green cards in the order of multilayer joining and sequentially placing them on the cassette table 130.

As the cassette table 130, double auto changer cassettes (130a, 130b) are provided so that ceramic green cards of different modes can be quickly stacked in a multilayer stacking order by the card takeout means 131 and taken out.
It is good to equip with.

Subsequent to the card editing machine 70, a card multi-layer joining machine 80 shown in FIG. 9 is provided. The card multi-layer bonding machine 80 is provided with a mounting table 81 for mounting a ceramic green card from a cassette table 130 in a previous process by a card extracting means 132 (indicated by an arrow) and mounting the ceramic green card on a table surface from the base film side. .

In addition, a cutter 82 capable of moving up and down to make a cut 5 for dividing the card surface of the ceramic green card placed on the table surface of the placing table 81 into a predetermined area, and a ceramic having the cut 5 formed therein The stacking head 83 includes a vertically movable stacking head 83 for receiving and holding the green card from the green sheet side, and a heating platen 84 for heating the ceramic green card received and held by the stacking head 83 from the base film side against the board surface. It is configured.

The placement table 81 is moved horizontally back and forth or left and right as described above to correct the misalignment of the ceramic green card placed on the table surface, or the table surface is centered on the vertical axis. Can be equipped with an XYθ table capable of rotating the required angle. At a predetermined position on the table surface, the image processing means is provided with an imaging camera 85 to measure the amount of displacement of the ceramic green card by image processing, and to control the driving of the mounting table 81 according to the amount of displacement. Equipped.

The cutter 82 is mounted on the ceramic green card mounting table 81 so as to move up and down at a predetermined position. The cutter 82 corrects the misalignment of the ceramic green card on the table surface of the mounting table 81 and then moves down, and cuts the quadrilateral cut 5 into the card surface of the ceramic green card, thereby setting the card surface of the ceramic green card to a predetermined value. A blade die 86 is provided which is divided into areas.

The laminating head 83 adsorbs and holds the same ceramic green card as the above-described card receiving and taking out means from the green sheet side, and also adsorbs the laminated ceramic green card by blowing air after laminating a predetermined number of layers. A vacuum suction head using + or-air separated from the surface or a suction pad using a flexible member can be provided.

The laminating head 83 is equipped so as to reciprocate between a ceramic green card mounting table 81 and a heating platen 84 and to move up and down at respective predetermined positions. The heating platen 84 is a flat mold including a heater and the like, and can be configured to include extraction means such as a chuck for discarding the base film peeled from the ceramic green card from the surface of the plate as described later.

In this card multi-layer joining machine 80, the ceramic green card with the base film is
From 0, when cards are sent one by one onto the table surface of the mounting table 81 by the card removing means 132 (indicated by an arrow),
Each time the ceramic green card is fed, the displacement of the ceramic green card is measured by image processing by the imaging camera 85, and the placement table 81 is moved in the XYθ direction in accordance with the displacement amount to correct the displacement. After the correction of the positional deviation, the mounting table 81 moves to a position below the raising / lowering position of the cutter 82 while keeping the table surface at the predetermined position.

When the mounting table 81 moves below the position where the cutter 82 moves up and down, the cutter 82 moves
The ceramic green card is moved downwardly toward the card surface of the ceramic green card placed on the table surface, and a cut 5 is formed in the ceramic green card to divide the card surface of the corrected ceramic green card into a predetermined area. After attaching the cut 5, the cutter 82 immediately moves upward, and the mounting table 81 holds the ceramic green card with the cut 5 at a predetermined position and waits until the lamination head 83 moves.

When the laminating head 83 moves downward from the mounting table 81, the ceramic green card is sucked and held from the green sheet side. When the ceramic green card is attracted, the laminating head 83 moves down at a predetermined position, so that the laminating head 83 is maintained at the correct position where the misalignment has been corrected.
Received and held.

The lamination head 83 immediately moves up when the ceramic green card is sucked and held from the green sheet side, and moves down to the heating platen 84 by returning to the position where the heating platen 84 is disposed. I do. As the laminating head 83 descends, the ceramic green card is pressed against the heating platen 84 from the base film side and heat-treated. When the ceramic green card is heated from the base film side, the binder of the ceramic green card is softened, and the base film comes off from the green card side.

After the heat treatment, as the laminating head 83 moves upward, the ceramic green card having a predetermined area defined by the cut 5 is peeled off from the base film while being sucked and held by the laminating head 83. Further, the base film is peeled off from the ceramic green card and remains on the surface of the heating platen 84. The remaining base film is removed from the surface of the heating platen 84 and discarded before the lamination head 83 returns to the next position.

The laminating head 83 is directed toward the mounting table 81 on which the ceramic green card with the base film, which has been subjected to the next misalignment correction and has a cut 5, stands by while holding the ceramic green card having a predetermined area by suction. Move. The stacking head 83 is mounted on the mounting table 8.
When the ceramic green card is moved downward toward 1, the binder of the ceramic green card sucked and held by the lamination head 83 is kept in a softened state. It is received and held by the lamination head 83 with the film attached.

When the next ceramic green card is received and held, the stacking head 83 returns to the position where the heating platen 84 is disposed, and moves downward so as to press the next ceramic green card against the surface of the heating platen 84. . Along with the downward movement, the next ceramic green card is also heat-treated by the heating platen 84 so that the base film is peeled off by the softening of the binder, and the heating pressure is applied between the previous ceramic green card and the ceramic green layer. It can be tightened to enable multi-layer joining.

By repeating the above steps, a plurality of ceramic green cards used with the base film attached can be joined in multiple layers to form a multilayer ceramic green card. By transferring the multilayer ceramic green card from the lamination head 83 to the stack table 90, the multilayer ceramic green card can be supplied to a post-process in order to perform post-processing after cutting and firing in component units.

The heating and pressing of the above-mentioned ceramic green card was performed at a heating temperature of 60 ° C., a pressure of 40 kg / cm 2,
This can be performed in about 2 to 4 seconds. In addition, the ceramic green card is received from the mounting table 81 by the lamination head 83.
4 and transferred to the stacking head 83 by another card removing means.
Can be used for multi-layer joining.

In the apparatus for manufacturing a ceramic multilayer substrate configured as described above, since ceramic green sheets are cut into cards and handled one by one, through holes are formed or electrodes are formed by printing. In this case, the positioning means by image processing can be applied, and the processing can be performed such that the ceramic green cards are accurately positioned one by one. Further, since the ceramic green card is handled up to the multi-layer joining process with the base film, it is possible to prevent deformation such as wrinkles and twists during each process, thereby improving the product yield as a whole.

Even if the ceramic green cards are handled one by one, they are sequentially stacked and mounted on the cassette table after predetermined processing, and are sequentially taken out and transferred from the cassette table on which a plurality of stacked green sheets are mounted in the next step. As described above, since the ceramic green card is transferred and transferred from the cassette stage to the cassette stage in the entire process, the manufacturing lead time can be reduced.

As the cassette table, a plurality of ceramic green cards are arranged and stacked by aligning them with a support shaft inserted into the card positioning hole. By doing so, ceramic green cards can be handled efficiently one by one. In addition to this, since all the processes are stacked and mounted on a cassette table, and card processing is performed by taking out and transferring, it can be applied to the manufacture of different types of products, and the type can be easily changed. The equipment can be operated very efficiently.

Even when the ceramic green cards having different aspects are joined in a multilayer manner, the process of editing the ceramic green cards in advance in the order of stacking the layers and placing the card on a cassette table can be performed very efficiently.
In this multi-layer bonding, the ceramic green card is heated with a heating plate to soften the binder to bond the cards together and simultaneously peel the base film from the ceramic green card. Can be efficiently multilayer-bonded.

The method and apparatus for manufacturing a ceramic multilayer substrate can be applied not only to a dielectric component such as a laminated ceramic capacitor but also to a magnetic component. In particular, it is suitable for manufacturing high-frequency compatible components such as VCO, BPF, DPX, etc., from an alumina multilayer substrate that can be fired at a low temperature, and is also suitable for responding to high-mix low-volume production.

[0067]

As described above, according to the method and apparatus for manufacturing a ceramic multilayer substrate according to the present invention, the ceramic green cards can be handled accurately one by one, so that the product yield can be improved and the entire process can be performed. The manufacturing lead time can be shortened by transferring and sending the ceramic green card continuously from the cassette table to the cassette table. In addition, it is possible to easily cope with the production of different types and improve the equipment operation rate, and it is possible to make the entire equipment small.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing an overall apparatus for manufacturing a ceramic multilayer substrate according to the present invention.

FIG. 2 is a side view showing a ceramic green card handled in the device.

FIG. 3 is a plan view showing the ceramic green card.

FIG. 4 is an explanatory view of a cassette table provided in the apparatus of FIG. 1;

FIG. 5 is an explanatory view showing a ceramic green sheet feeding machine and a card cutting machine provided in the apparatus of FIG. 1;

FIG. 6 is an explanatory view showing a through-hole processing machine provided in the apparatus of FIG. 1;

FIG. 7 is an explanatory view showing an electrode printing machine and an electrode dryer provided in the apparatus of FIG. 1;

FIG. 8 is an explanatory diagram showing a card editing machine provided in the apparatus of FIG. 1;

FIG. 9 is an explanatory view showing a card multi-layer joining machine provided in the apparatus of FIG. 1;

[Explanation of symbols]

S Ceramic green sheet C Ceramic green card 2 Base film 3a, 3b ... Card positioning hole 10 Ceramic green sheet feeding machine 20 Card positioning hole processing machine 30 Card cutting machine 40 Through hole processing machine 50 Electrode printing machine 60 Electrode dryer 70 Card editing Machines 71, 72, 73 ... cassette table for card editing 80 Multi-layer bonding machine for cards 100, 110, 120, 130 Cassette tables 110a, 110b ... cassette shafts 101, 111, 121, 131 Card receiving means 102, 112, 122, 132 Card ejection means

────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Junichi Sudo 1-13-1 Nihonbashi, Chuo-ku, Tokyo TDK Corporation (72) Inventor Tomoyuki Sasaki 1-13-1 Nihonbashi, Chuo-ku, Tokyo TDK (56) References JP-A-6-246730 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H05K 3/46

Claims (8)

(57) [Claims] A ceramic green sheet is formed on a base film, and a through-hole processing step is performed.
In a method of manufacturing a ceramic multilayer substrate from a ceramic green sheet through various processes including an electrode printing / drying process and a multilayer bonding process, a ceramic green sheet formed on a film surface of a base film is provided with a base film. The ceramic green card of a predetermined size is cut as it is, and the ceramic green card with the base film is stacked and placed on a cassette table provided between the respective steps, with the green sheet side of the ceramic green card facing upward, and By repeating the process of taking out and transferring from the cassette table to the next process, through-hole processing, electrode printing and drying are sequentially applied to the ceramic green card with the base film to form internal electrodes, and then the base film is formed in the multilayer bonding process The ceramic glee A method of manufacturing a ceramic multilayer substrate, wherein a plurality of ceramic green cards alone are laminated by peeling off a ceramic green card. 2. Prior to the step of cutting the ceramic green sheet as a ceramic green card with a base film, a card positioning hole is formed in the sheet surface of the ceramic green sheet, and thereafter the ceramic green sheet is formed into a ceramic green card having a predetermined size. It is characterized in that the spindle that rises from the table surface of the cassette table is inserted into the card positioning hole, and the ceramic green card with the base film is aligned and stacked on the cassette table of each process with the spindle. The method for manufacturing a ceramic multilayer substrate according to claim 1. 3. In a ceramic green card multilayer bonding step, the ceramic green card is taken out by a lamination head, and the ceramic green card is heated by being pressed against a heating platen from the base film side by the lamination head. 3. The method according to claim 1, wherein the base film is peeled off from the ceramic green card and only the ceramic green card is held by the lamination head. 4. Prior to the ceramic green card multilayer bonding step, the ceramic green cards are divided into different forms and individually stacked and mounted on a plurality of cassette tables, and the ceramic green cards are stacked in a multilayer bonding order. 4. A ceramic cassette according to claim 1, wherein the ceramic green cards are taken out of an individual cassette table, and each ceramic green card is edited in a multilayer joining order, and a plurality of sheets are stacked and mounted on one cassette table. Method for manufacturing a ceramic multilayer substrate. 5. A ceramic green sheet is formed on a film surface of a base film, and a through-hole processing step is performed.
The ceramic multi-layer board manufacturing equipment that manufactures a ceramic multi-layer board from a ceramic green sheet through various steps including an electrode printing / drying step and a multi-layer bonding step. Subsequently, a card cutting machine that cuts the ceramic green sheets into ceramic green cards of a predetermined size with the base film provided is provided, and a through-hole processing machine that processes ceramic green cards with the base film one by one, electrode printing and printing. A dryer is sequentially arranged, and further, a card multi-layer joining machine for peeling off the base film from the ceramic green card and laminating a plurality of ceramic green cards alone is arranged, and means for transferring the ceramic green card between the respective machines. As Card receiving means for receiving ceramic green cards one by one with a film, a cassette table on which ceramic green cards are sequentially stacked by the card receiving means, and transferring the ceramic green cards one by one from the cassette table to the next step. And a card take-out means, each of which is provided in a set. 6. A card positioning hole forming machine for forming a card positioning hole in a sheet surface of a ceramic green sheet before disposing a card cutting machine for cutting a ceramic green sheet as a ceramic green card having a predetermined size with a base film. And a cassette base having a support shaft that is inserted into a card positioning hole of the ceramic green card to align and stack the ceramic green cards with the base film. 6. The apparatus for manufacturing a ceramic multilayer substrate according to 5. 7. A heating plate for heating a ceramic green card from a base film side, and a ceramic green card which is received from a green sheet side and pressed against a heating platen from a base film side and heats the ceramic green card. The apparatus for manufacturing a ceramic multilayer substrate according to claim 5 or 6, further comprising a card multilayer bonding machine including a laminated head for holding only the ceramic green card by peeling the base film from the processed ceramic green card. 8. A plurality of cassette tables on which ceramic green cards are divided and placed individually in different modes before disposing the card multilayer bonding machine, and cassettes in which ceramic green cards are stacked in a multilayered order. 6. A card editing machine comprising: a card taking-out means for taking out one by one from a table; and a cassette table for stacking and placing ceramic green cards in the order of taking out by the card taking-out means. 8. The apparatus for manufacturing a ceramic multilayer substrate according to any one of 7.