TWM337563U - Base-board taking out device - Google Patents

Description

M337563 VIII. New description: [Technical field to which the new type belongs] This creation relates to a substrate take-out device, and in particular to a substrate take-out device for taking out a stacked substrate at a time. v [Prior Art] It is known that it is necessary to prevent the supply of two or more sheets at the same time from the one of the stacked sheet members to the one piece member at the uppermost position. As shown in Fig. 19, the sheet member stacked in the above manner is, for example, a substrate s such as a printed circuit board on which electronic components such as semiconductor devices are assembled. The substrate s is formed with a plurality of holes penetrating the front surface/back surface such as a through hole TH (blackened area in the drawing) or a slit SL (hatched area in the drawing). When the substrate supply portion on which the substrate s is loaded is picked up by, for example, full vacuum suction, the substrate s placed on the uppermost position may have a strong absorbing force. For example, as shown in Figs. 20A and 20B, the blower suction mode will be described so that the substrate s stowed in the substrate cassette 5〇2 is sucked by the suction surface of the suction stage 5〇1. Further, Fig. 2A and Fig. 2A show the schematic device structure of the blower suction mode in a sectional view. A plurality of suction holes are formed in the suction surface of the suction table 5〇1. The suction holes are attracted by a blower (not shown), and when the suction surface of the suction σ 1 is disposed near the opening of the substrate cassette 502, a negative pressure is generated inside the substrate case 502. Then, the substrate s at the uppermost position is picked up from the substrate and the cassette 502 by vacuum suction by the suction surface from the suction stage 501. As shown in FIG. 20A, since the substrate s is formed with a plurality of holes penetrating through the surface/back surface through the through hole TH or the slit SL, the attraction force from the absorbing table 5015 M337563 is also applied to the second sheet. Substrate s. For example, when the uppermost position and the second substrate s are adhered to each other without the gap ′ from the uppermost position and the third substrate s is curved, the attractive force acts significantly on the second substrate s. That is, between the substrate 8 and the absorbing table 5〇1 at the uppermost position, the negative pressure is caused by the suction of the blower, and the gap between the second sheet and the third substrate is positive pressure (atmospheric pressure), so the uppermost position and The substrate s of the second sheet easily floats. Further, even when the substrate s at the uppermost position and the substrate s of the second sheet are displaced, the through holes th or the slits SL formed in the uppermost position substrate s have the same effect as the suction holes of the absorbing table 5〇1. The substrate S of the second sheet is easily floated. Therefore, as shown in Fig. 2A, the suction surface of the sorption table 501 is simultaneously vacuumed by sucking the uppermost position and the substrate of the second sheet and picking up it. A method of separating a member of the second member from the uppermost position is disclosed in the Japanese Patent Application Publication No. 2005-335843 (hereinafter referred to as Patent Document 1). As shown in Fig. 21A and Fig. 21B, the substrate take-out device exposes the adhesive member 504 to the substrate S with the adhesive member 504 exposed to the lower surface of the substrate stacked on the lift table 5〇5. Then, the upper surface of the base plate S disposed at the uppermost position of the stowage is brought into contact with the adhesive member 5〇4 (the state of Fig. 21a). Then, the elevating table 505 is lowered, and a gap is formed between the uppermost substrate s and the other substrate s (the state of Fig. 21B). Then, the sandwiching member or the like is inserted into the gap, and the substrate s is attracted from the upper portion to attract only the substrate S at the uppermost position. The substrate extracting device may not only overlap the substrate S of the uppermost position but also the substrate S of the second sheet, and may shift out only the uppermost position when the substrate of the uppermost position s and the substrate of the second M337563 are offset. Substrate_ However, the problem of the substrate take-out device disclosed in Patent Document 1 is that the adhesive force of the adhesive member 5〇4 is lowered. For example, the substrate 8 may generate foreign matter such as lint from its end portion or the like, and the foreign matter adheres to the adhesive member 504 to lower the adhesive force of the adhesive member. When such adhesive force is continuously lowered, the function of separating only the substrate 3 at the uppermost position and separating from the other substrate s cannot be achieved, so that the number of times the adhesive member 5〇4 can be continuously used is limited. Therefore, with the above substrate take-out device, it is necessary to maintain the adhesive member 504, and more specifically, when the adhesive force of the adhesive member 5〇4 is lowered, it is necessary to restore the adhesive force. Further, it is conceivable to pick up a portion of the substrate S by vacuum suction of a suction pad having a small suction area. However, in this embodiment, since it is necessary to bring the portion where the through hole TH or the slit SL is not formed into contact with the sucking jaw, it is necessary to adjust the position of the suction in accordance with the shape of the supplied substrate s. Therefore, it is necessary for each substrate to perform the operations required for this adjustment. Further, since the vacuum is sucked on one portion of the substrate 3, a concentrated stress is applied to the substrate S, which causes deformation or contamination of the substrate s. Further, depending on the shape of the substrate S, there may be no suitable portion where the through hole is not provided to be in contact with the absorbing pad. [New content] It is possible to remove only the product from the extreme. Therefore, the purpose of this creation is to provide a substrate removal device for maintenance work, and to prevent the removal of two substrates placed at the uppermost position. M337563 In order to achieve the above objectives, this creation has the following characteristics. „ is a substrate take-up device' for taking out the soil plate from the stowed substrate. The substrate take-up device is provided with a absorbing unit and a liter unit having at least an i-th absorbing portion, and 1 and 仏 仏 七 七 甘 、, The occupant only accumulates in the vicinity of the upper end of the substrate at the uppermost position. The lifting mechanism lowers the suction unit. The lifting mechanism lowers the absorbing unit to the upper end of the substrate where the ith absorbing portion is attracted to the uppermost position. The position near the part. The surface of the bottom of the substrate is sucked in the vicinity of the upper end of the substrate at the uppermost position. The lifting: the suction surface of the suction portion of the younger brother 1 is sucked near the upper surface of the uppermost substrate, so that The absorbing unit is raised. The second aspect of absorbing the gas for attracting the outside of the first absorbing portion is a plurality of suction holes formed in a lattice array or a staggered array on the first surface of the first aspect. In the third aspect, in the second aspect, the substrate has a plurality of through holes, and the total area of the suction holes formed in the suction surface of the first absorbing portion is larger than the portion formed on the absorbing surface. The total area of the through-hole of the substrate. The fourth aspect is In the second aspect, the substrate has a plurality of through holes, and all of the suction holes are formed in a partial region included in the absorbing surface of the i-th absorbing portion. The suction hole is formed in the absorbing surface of the first absorbing portion. The total area is larger than the total area of the substrate through-hole formed in the portion that is in contact with the region having the suction hole. In the fifth aspect, the suction surface of the second suction portion is divided into the second aspect. a plurality of regions in which the suction holes are formed with different hole number densities. M337563 The jth aspect is that in the above-described first aspect, the absorbing unit further includes the second _ suction f' for the uppermost The upper surface of the position substrate absorbs a region different from the region where the first portion and the first portion are attracted by the absorbing surface. The second absorbing portion moves between the substrate at the uppermost position and the other substrate in accordance with the rising operation of the elevating mechanism. When a gap is formed, the suction surface is attracted to the uppermost substrate. The seventh aspect is that the sixth aspect further includes a rocking mechanism. The rocking mechanism is the suction surface of the first suction portion. The long axis direction is the center, and the absorbing unit is shaken. • The eighth aspect In the seventh aspect, the absorbing unit further includes a rear contact and the member affixes to the vicinity of the upper end portion of the uppermost substrate by the absorbing surface of the ith absorbing portion. The second aspect of the substrate is a suction pressure control unit (four) supplied to the f 1 absorbing portion and the second absorbing portion. (1) When the pressure control unit 纟帛1 sucks the vicinity of the upper end portion of the uppermost substrate, the third suction pressure is supplied to the first suction portion' in accordance with the upward movement of the lifting mechanism, and is in the uppermost position. When a gap is formed between the substrate and the other substrate, the U 2 suction pressure is supplied to the second absorbing portion and the second absorbing portion more strongly than the first suction pressure. According to the first aspect, in the stacked substrate, Only the vicinity of the end portion of the uppermost substrate is sucked and lifted. The force for lifting the substrate is the absorbing force, so that it does not deteriorate. It is not necessary to perform maintenance necessary for a technique such as an adhesive member. Further, by sucking only the vicinity of the end portion of the uppermost substrate, it is possible to easily peel only the substrate at the uppermost position, and even if a substrate having a plurality of holes penetrating the front surface/back surface is formed, a plurality of substrates are stacked. In the M337563 board, it is also possible to prevent two sheets from being taken out, and it is possible to take out only the substrate placed at the uppermost position. According to the second aspect described above, since the plurality of suction holes are provided in the suction surface of the first and the second portions, when the substrate having the plurality of holes penetrating the front surface and the back surface is taken out, the uppermost position is applied. The attractive force of the two substrates is greater than the attractive force of the substrate acting at the uppermost position. According to the third sad case described above, since the total area of the suction holes is larger than the total area of the through holes of the substrate facing the suction surface, the effect of preventing the removal of the two sheets can be improved. - According to the fourth sadness of the above makeup, since the region where the suction hole is formed is concentrated on the portion of the suction surface, when the substrate having a small size is sucked, the region and the far substrate are sucked 'even for the size The small substrate can also be used to take out the substrate stably. According to the fifth aspect of the invention, the substrate of each of the sizes can be stably taken out in accordance with the size of the substrate to be taken out, and the area of the suction surface that is sucked by the substrate for five weeks. y According to the sixth aspect described above, after the gap is formed between the substrate at the uppermost position and the other substrate, since the substrate is sucked and fixed by the plurality of absorbing portions, the substrate can be stably held. According to the seventh aspect described above, since the absorbing unit can be shaken, the absorbing unit can be shaken in a state where the absorbing surface of the absorbing absorbing P is sucked near the upper end portion of the uppermost substrate, and the uppermost substrate can be placed. When one end is raised, a gap is easily formed between the substrate at the uppermost position and the other substrate. M337563, in the state in which the suction surface of the first absorbing portion is attracted to the vicinity of the upper end portion of the uppermost substrate, in a state in which the rear end of the substrate is in contact with the rear end abutting member, and shakes at the same time. The absorbing unit can be used to press the other end of the uppermost substrate while raising only one end, so that a gap can be more easily formed between the uppermost substrate and the other substrate. According to the ninth aspect described above, before the gap is formed between the substrate at the uppermost position and the other substrate, the pressure supplied to the second absorbing portion is lowered, and the attractive force of the substrate applied to the two gangs can be reduced. The absolute value can improve the effect of preventing the removal of 2 pieces. These and other objects, features, aspects and advantages of the present invention will become apparent from the accompanying drawings. [Embodiment] A substrate inspection apparatus equipped with a substrate taking-out device according to an embodiment of the present invention will be described with reference to Figs. 1 to 5 . Here, the front view of the figure shows the schematic structure of the base plate inspection device. Fig. 2 is a front view showing the schematic configuration of the substrate inspection apparatus. Fig. 3 is a front elevational view showing the schematic configuration of the substrate inspecting device in the state in which the cylinder is extended. Fig. 4 is a view schematically showing a pneumatic mechanism of the substrate inspection apparatus. Fig. 5 is a rear elevational view showing the structure of a mechanism for driving a rotating member to rotate the substrate inspecting device. Further, in order to clarify the positional relationship of the respective structural portions, the structures of the substrate inspection device 并未 are not all shown in Figs. 1 to 5, and will be described here. - In FIG. 1 and FIG. 2, the substrate inspection apparatus i includes an i-th inspection station 2, a second inspection station 3, an A-face inspection head 4, a B-face inspection head 5, a frame 6, and a base 11 M337563 board supply unit 7, The substrate storage unit 8, the first substrate conveyance belt 1〇, the second substrate conveyance belt u, and a control unit (not shown). Further, the base plate supply unit 7 corresponds to an example of the substrate take-out device of the present invention. An example of the object to be inspected by the substrate inspection apparatus at I is a substrate S such as a printed substrate for assembling electronic parts such as a semiconductor device, and a through surface such as a through hole TH or a slit SL is formed as described in the prior art. Multiple holes on the back. Further, the substrate 5 is, for example, a double-sided substrate which is required to inspect the appearance of both surfaces thereof. Further, the main surface of the substrate S of the object to be inspected is referred to as the A surface, and the other main surface is referred to as the β surface. The first inspection station 2 has a second rotation member 21, an A-side inspection suction table 22, an air cylinder 23, and a first! Rotating shaft 24. The first rotating member has a shape of a rectangular parallelepiped, and is rotatable in the A direction of the figure * around the first rotating shaft 24. On the four side faces of the second rotating member .21 which is parallel to the first rotating shaft 24, four A-side inspection suction stages 22a to 22d are provided via the cylinders 23a to 23d, respectively. In Figure 1, the first! The rotating shaft 24 is disposed such that φ is perpendicular to the paper surface, and the a-side inspection absorbing table 22a is disposed above the ith rotating shaft via the three cylinders 23a (only two cylinders 23a are shown in FIG. 1). Each of the cylinders 23b (only two cylinders 23b are shown in Fig. 1) is provided with an A-side inspection absorbing table 22b which is located to the left of the second rotation shaft 4, and ''two by three cylinders 23c (in Fig. 1) Only the two gas cylinders 23c) are provided, and the A-side inspection sorption table 22c is disposed below the ninth rotation axis '24, and the A-side inspection sorption tables 22a and 22c are disposed in parallel with each other. Further, via the three cylinders 23d (only two cylinders 23d are shown in Fig. 1), an A-side inspection suction table 22d is provided, which is located to the right of the second rotation shaft 24, and the 12 M337563 A surface inspection suction table 22b and 22d is configured to be parallel to each other. The second inspection station 3 is arranged in parallel with the first inspection station 2. The second inspection station 3 includes a second rotating member 31, a B-side inspection absorbing table 32, an air cylinder 33, and a second rotating shaft 34. The second rotating member 31 has a substantially rectangular parallelepiped shape similar to that of the second rotating member 21, and can be rotated in the B direction shown as a center with the second rotating shaft 34 parallel to the first rotating shaft 24. On the four side faces of the second rotating member 31 parallel to the second rotating shaft 34, four β-face inspection absorbing tables 32a to 32d are provided via the cylinders 33a to 33d, respectively. In FIG. 1, the second rotating shaft 34 is disposed perpendicular to the paper surface, and the B-side inspection absorbing table 32a is disposed via the three cylinders 33a (only two cylinders 33a are shown in FIG. 1). The second rotating shaft 34 is disposed on the second rotating shaft 34. Just above it. The B-side inspection suction table 32b is provided via the three cylinders 33b (only two cylinders 33b are shown in Fig. 1), and is located on the left side of the second rotation shaft 34, and the B surface is inspected by the suction stage. 321) and A. The face inspection suction table 22d is configured to face each other. The B-plane inspection φ sorption table 32c is provided below the second rotation shaft 34 via the three cylinders 33c (only two cylinders 33c are shown in Fig. 1), and the β-face inspection sorption tables 32a and 32c are disposed to each other. parallel. Further, the β-face inspection sorption table 32c is provided via the three cylinders 33d (only two cylinders 33d are shown in Fig. 1), which are located to the right of the second rotation shaft 34, and the B-side inspection sorption tables 32b and 32d are disposed. In parallel with each other. As shown in Figs. 1 and 2, the substantially upper frame β is composed of an inspection head beam 6A, three linear bearings 62a to 62c, a body base 63, an abutting member 64, and a bolt 65. The body base 63 is fixed to the plane by a predetermined support column and is located above the first inspection station 2 and the second inspection station 3. Linear bearings 62a~62c 13 M337563 = Track and slide blocks, shafts and bearings or sleeves, guides and guides. One combination is an example in which three linear bearings 62a to 62c are divided into a moving block R90U1, a knives 3 orbits 621a to 621c, and a sliding block Γ1ΛΓ ' 622b2' "σ 622c} iiLit 621-621c The upper side of 63 (in addition, in Fig. 2, the restraint 621 and the slide block 622 provided at the lower portion of the inspection head beam 61 are indicated by broken lines). The rails 621a to 621c are disposed so as to be spaced apart from each other by a predetermined interval and arranged as a center, and rails and cents are disposed on both sides thereof. Further, in the lower space between the rails 621a and 621b, the i-th inspection station 2' is disposed in the lower space between the lanes 62lb and 621c, and the second inspection station 3 is disposed. Further, in the main body base 63, a bolt 65 which is parallel to the rail 621b is provided in the upper portion of the rail "", and # is driven by the linear motor 651 to rotate. Here, the driving of the linear motor 651 is controlled by the above control unit. In addition, in FIGS. 1 and 2, the body bases 63 of the support rails 621a to 621c are shown as being separated from each other, but the display is only for explaining the relationship with the other structural portions, and in fact, the respective body bases 63 are inspected at least in the third step. Openings are formed in the upper space of the station 2 and the second inspection station 3, respectively, and are connected to each other and fixed. Further, a plurality of abutting members 64 (for example, three for each of the openings) are disposed on the same plane, protrude toward the opening, and are fixed to the body base 63. The inspection head beam 61 is placed between the lanes 621a to 621c fixed to the upper surface of the body base 63. Slide blocks 622a, 622b1, 622b2, and 622c are provided at the lower portion of the inspection head beam 61. In addition, the slider 622a card can be moved along the way 621a, the sliders 622bl and 622b2 can be combined to move along the 14 M337563 trajectory 621b, and the slider 622c can be combined to move along the ruling 621c. Further, the inspection head beam 61 is screwed to the bolt 65 at the upper portion of the sliders 622b1 and 622b2. Therefore, when the linear motor 651 is driven, the bolts 65 are rotated. The inspection head beam 61 is moved in the direction in which the lanes 621a to 621c are arranged side by side (the C direction shown), and is moved on the body base 63. There is a head in the head beam 61. Each of the A-face inspection head 4 and the B-face inspection head 5 includes a photographing device (not shown) such as a CCD camera, and the photographing device respectively inspects the head beam via the slits 41 and 51 (shown by broken lines in Fig. 2) facing the lower opening. Space photography under 61. The A face inspection head 4 is disposed on the inspection head beam 61 between the slide block 6A and the slide blocks 622M and 622b2. Specifically, it can be understood that when the a-surface inspection suction table of the first inspection station 2 is fixed at a position abutting against the contact member 64, the inspection head beam 移动 moves in the direction of the figure Q, and the A-side inspection is performed. The photographing device in which the head 4 is disposed on the A-face inspection head 4 can be placed on the substrate s which is inspected on the A-side inspection sorption table 22, and the other B-side inspection head 5 is disposed on the slider block 62 (10) 匕 2 The inspection head beam 61 between the human sliding blocks 622c. Specifically, the chucking table 32 is fixed to the abutting member: the head beam 61 is moved in the direction of the figure c, and the B-face inspecting head 5 is disposed in the photographing head of the inspecting head 5 (4). The position of the substrate s of the susceptor 32 is photographed. In the lower part of the first inspection station 2, the supply unit 7 is placed in the lower part of the first inspection station 2; As will be described later on the substrate conveyance belt, the substrate supply unit 7 is provided with a suction unit 7A, a rocking 15 M337563 moving mechanism η, a lifting support member 72, a lifting mechanism 73, a conveyance plate 74, and a conveyance plate. Agency 75. Further, in Fig. 1, only the conveyance plate 74 of the substrate supply unit 7 and the conveyance plate moving mechanism 75 are shown, and illustration of other constituent elements is omitted. As shown in Fig. 2, in the first substrate transfer conveyor 1G, the substrate s before the substrate inspection shake i inspection is stacked, and any substrate s is placed in the space below the suction unit 7A. Then, the absorbing unit pushes the substrate St on the carrier plate 74 by lifting the substrate st ’ placed on the uppermost portion from the substrate s stacked on the lower portion thereof under the control of the upper portion. Further, the transporting plate 74 is also configured to be movable in the direction of the figure in the direction indicated by the control of the control unit, in accordance with the driving of the transporting plate moving mechanism 75. Further, the conveyance plate 74 is conveyed by the conveyance plate moving mechanism 75, and the substrate St placed on the upper surface is conveyed to the front side of the a-side inspection suction table 22. Further, the pre-inspection substrate S supplied from the substrate supply unit 7 is placed on the second substrate conveyance belt 10, and the A side of one main surface faces downward. Further, as will be described later, when the A-side inspection suction table of the i-th inspection station 2 is lowered downward, the suction surface of the A-side inspection suction table 22 is placed on the substrate placed on the conveyance plate 74. Near St. The substrate housing portion 8 includes three substrate cassettes 81a to 81c, three lifting tables 8 2a to 82c, a turntable 83, a first carry-out conveyor 84, and a pair of second carry-out belts 85. The lifting tables 82a to 82c are provided inside the substrate cassettes 81a to 81C, respectively, and the substrate S after inspection by the substrate inspection device 1 is stacked in the substrate cassettes 81a to 81c on the lifting tables 82a to 82c. Further, the elevating tables 82a to 82c are vertically moved in accordance with the control of the control unit, and are controlled, for example, such that the position of the substrate s placed on the uppermost portion of the M16563 is constant in the vertical direction. For example, in the substrate cassettes 81a to 81c, the substrate inspection apparatus J detects the A surface and the substrate Sn which are defective in the B surface, and the substrate cassettes 81a to 8ic are disposed on the rotation plane of the rotary disk 83. The rotation and stop position of the turntable 83 in the direction of the drawing D are controlled by the control unit, and any one of the substrate cassettes 81a to 8ic is placed in a space immediately below the second inspection station 3. Further, the inspected substrate Sng accommodated in the substrate housing portion 8 is stacked in the substrate cassettes 8a to 8lc so that the surface A faces upward. For example, when the B-side inspection absorbing table 32 of the second inspection station 3 sucks the fixed substrate Sng and lowers it to the lower side to release the suction, the substrate cassette placed under the B-side inspection sorption table 32 is placed on the B-side. In the heart seven c, the substrate Sng is stacked. The first carry-out conveyor 84 is configured to be movable in the direction of j by the control of the control unit. The second carry-out belt 85 is disposed on the upper portion of the second substrate transport belt U. The control unit can control the movement in the U direction shown in the figure. For example, the first transfer conveyor belt 84 and the second carry-out conveyor belt (9) carry out the substrate SQk which has passed through the substrate inspection device and is qualified for the kneading surface and the beta surface to the second substrate conveyance belt 11. When the dialysis table 32 is sucked and the fixed substrate is lowered to the lower side, the ith carry-out conveyor 84 is directed toward the drawing, and the lower side of the absorbing table 32 is inspected. The position (that is, between the beta panel σ 32 and any one of the substrate cassettes 81 a to 81 c). After that, when the suction table 32 releases the suction of the substrate sok, the substrate s〇k carrier 1 is carried out of the conveyor belt 84. Of course: After, the first! Move the conveyor belt to the position of 17 M337563 when the first moving 2 soil moving conveyance belt 11 is near. The shape of the column (4) is arranged in a row of one of the belts 85: the substrate S〇k is moved toward the second carry-out belt 85. • The younger one is carrying out the transport belt 84 and the second carry-out belt 85. ::5°上疋日士,. _ Then, when the substrate sok is completely moved to the second carry-out transport, the second carry-out transport belt 85 is moved in the direction I shown in the figure, and the substrate is tilted on the second carry-out conveyor 85.堆积, the second substrate transport conveyor belt u or the other substrate Sok on the second substrate transport wheel f is deposited. Next, the expansion and contraction operation of the cylinders 2 3 and 3 provided in the i-th inspection station 2 and the second inspection station 3 will be described with reference to Figs. 1 to 3 . In the above manner, the 帛1 rotating member 21 is provided with gas red 23a to 23d which respectively support the A-side inspection absorbing tables 22a to 22d. The cylinders 23a to 23d are configured to be expandable and contractible in accordance with the control of the control unit, and to change the distance between the A-side inspection suction stages 22a to 22d and the first rotation shaft 24 which are respectively supported by the expansion and contraction operation. Figure! The cylinders 23a to 23d are in a compressed state, and the A-side inspection suction stages 22a to 22d are disposed in the vicinity of the side surface of the second rotation member 21, respectively. Further, Fig. 3 shows a state in which the air cylinders 23a to 23d are extended, and the A-side inspection suction stages 22a to 22d are disposed apart from the first rotating member 21. As shown in Fig. 2 and Fig. 3, the A-side inspection absorbing table 22a disposed directly above the first rotating shaft 24, and the upper surface of the outer edge portion when the cylinder 23a is extended (the opposite side of the rotating shaft 24 of the first pair 1) ) is positioned to abut against the abutment member 64. Hereinafter, the a surface to be abutted against the abutting member 64 18 M337563 k The position at which the Ό 22 is found is referred to as an a-plane inspection position. Further, as shown in Fig. 2, in the present embodiment, in order to stably position the A-side inspection absorbing table... at the A-side inspection position, the position (three positions) at which the contact member 64 is provided is set to include the cylinder 23a. The position of the suction table 22a (three positions) is checked on the a side. Further, as shown in FIG. 3, the human face inspection absorbing table 22c disposed below the i-th rotating shaft 24, when the air cylinder 23c is extended, the suction surface of the a-side inspection absorbing table 22c is placed on the carrier plate. The upper part of the substrate ^ on the 74 is nearby. Further, as shown in Fig. 3, the suction surface of the suction table 22d is inspected on the A side of the right side of the rotary shaft 24, and when the cylinder 23d is extended, the suction surface 321 is inspected in the same manner as the B surface of the cylinder 33b. ) The suction surface meets. The contact position of the suction surface of the A-side inspection sorption table 22 and the suction surface of the B-side inspection sorption table 32 is referred to as a substrate transfer position. Further, the second rotating member 31 is provided with cylinders Ma to 33d which respectively support the β-face inspection suction φ stages 32a to 32d. The cylinders Ma to 3 are configured to be expandable and contractible in accordance with the control of the above-described control unit, and the distance between the B-surface inspection suction stages 32a to 32d and the second rotation shaft 34 supported by the respective expansion units is changed by the expansion and contraction operation. 1 is a state in which the cylinders 33a to 33d are compressed, and the B-side inspection suction stages 32a to 32d are disposed in the vicinity of the side faces of the 苐2 rotating member 31, respectively. Further, Fig. 3 shows a state in which the air cylinders 33a to 33d are extended, and the B-side inspection suction stages 32a to 32d are disposed apart from the second rotating member 31. As shown in Fig. 2 and Fig. 3, the β-face inspection absorber 32a' disposed directly above the second rotating shaft 34 is extended to the upper surface M337563 of the outer edge portion when the cylinder 33a is extended (to the second rotating shaft 34 The outer side surface is positioned to abut the abutment member 64. Hereinafter, the position of the B-surface inspection sorption table 32 that is positioned to abut against the abutment member 64 is referred to as a B-face inspection position. Further, as shown in Fig. 2, in the present embodiment, in order to stably position the B-side inspection sorption table 32a at the B-face inspection position, the position (three positions) at which the abutment member 64 is provided is set to include the cylinder 33a. Support the B side to check the position of the suction table 32a (3 positions). Further, as shown in FIG. 3, the B-surface inspection sorption table 32c is disposed below the second rotation shaft 34, and when the cylinder 33c is extended, the suction surface of the B-side inspection sorption table 32c is disposed on the 丨 carry-out conveyor. The position near the upper portion of 84 or the upper portion of the opening of the substrate cassette 81. Hereinafter, the position at which the B-side inspection suction table is made is referred to as a substrate discharge position. Further, as shown in Fig. 3, the suction surface on the left side of the second rotating shaft 34 and the inspection suction table 32b are arranged, and when the air cylinder 33b is extended, the A side inspection of the cylinder 23d is similarly sucked. The suction surface of the table 22d abuts. • Next, the air pressure mechanism of the substrate inspection apparatus 1 will be described with reference to Fig. 4 . In addition, in FIG. 4, only the substrate supply unit 7 and the air pressure mechanism 'on the first inspection station 2 side are shown, but the second inspection station 3 side is also configured similarly to the first inspection station 2 side, and the following 'substrate supply unit 7' The air pressure mechanism on the side of the first inspection station 2 will be described as a representative. In addition, Fig. 4 is a view for explaining a part of the structure of the first inspection station 2, and the A side inspection suction stage 22 is shown in cross section. Further, in Fig. 4, with respect to the substrate supply portion 7, only the constituent elements of the constituent elements relating to the air compressor are shown in a block diagram. 20 M337563 In the case of the substrate inspection device i (the inspection mechanism of the inspection station 2 is provided with the blower 90, the compressor 95, the main pipe 91 & the main second pipe 91b, the air pressure switching unit 92, and the suction The piping 93 and the cylinder are arranged; the main shaft 4 is equipped with the first rotating shaft 24 to support the air pressure switching unit 92 inside the "rotating member 21. The air pressure switching unit 92 has a plurality of switching valves' controlled by the above control unit Opening and closing 'a hollow path is formed in the first rotating shaft 24 (not shown by a broken line in Fig. 4), and each of the switching valves is passed through one end portion thereof. Further, the timing is fixed at the other end of the first rotating shaft 24 The pulleys 25. The main pipe 91a is connected to the blower 9A and the two-pressure switching unit 92 via the hollow path of the first rotating shaft 24, and supplies the air blower (8) to the A-side inspection absorbing table 22a via the air pressure switching unit 92. In the same manner, the main pipe 91b is connected to the compressor and the air pressure switching unit 92 via the first rotating shaft 24, and the second pressure generated by the compressor 95 is supplied to the cylinder 23a via the air pressure switching unit 92. 23d. Check the suction surface AF of the suction tables 22a to 22d on the A side, respectively. A plurality of suction holes (only the A-side inspection suction tables 22 & and 22c are shown in Fig. 4), and a connection between the a-side inspection suction tables 22a to 22d and the switching valve of the air pressure switching portion 92 is connected. The suction pipes 93a to 93d (only the suction pipes 93a and 93c are shown in Fig. 4) are respectively expanded and contracted by the expansion and contraction of the cylinders 23 & 23d. Here, the suction pipes 93a to 93d are respectively connected to other switching valves. In addition, the air pressure (negative pressure) supplied from the suction pipes 93a to 93d to the A-side inspection suction tables 22a to 22d is opened to the outside from the suction holes formed in the a-surface inspection suction tables 22a to 22d. In other words, according to the control of the control unit, when the negative pressure is supplied to the face inspection suction 21 M337563 stages 22a to 22d via the suction pipes 93a to 93d, the suction surface can be used to generate a negative pressure in each suction hole. The AF is vacuum-sucked. Further, 'between the cylinders 23a to 23d and the switching valve of the air pressure switching unit 92,

Cylinder pipes 94a to 94d are connected (only cylinder pipes 94a and 94c are shown in Fig. 4). Further, the air pressure (positive pressure) is supplied from the compressor 95 to the cylinder pipes 94a to g4d by the control of the control unit, whereby the air cylinders 23a to 23d can be expanded and contracted. Further, since the air pressure mechanism on the side of the second inspection station 3 is also the same as that of the first inspection station 2, detailed description thereof will be omitted. Further, in the other end portion β of the second rotating shaft 34 of the second inspection station 3, there is a positive day π skin ▼ wheel 35 (see Fig. 5). Further, in the above-described embodiment, the air pressure switching unit 92 switches the air pressure of the system such as the blower 9〇 and the compressor 95, but may be provided with individual switching units. Further, the absorbing unit 70 of the substrate supply unit 7 includes a first absorbing unit 702, a second absorbing unit 703, a third absorbing unit 704, and a fourth absorbing unit 705. Further, the air compressor of the substrate supply unit 7 includes a blower 9 and a suction pressure control unit 7G7. The suction pressure control unit m supplies the air pressure (negative pressure) generated by the blower 9 to the control unit 70 in accordance with the control of the control unit. For example, the suction pressure control unit 7〇7 is configured by a plurality of electromagnetic coils or the like that control the operation of the control unit, and is controlled to be supplied to the first! The presence or absence of the suction of the absorbing portion 7〇2, the second absorbing portion 7〇3, the third absorbing portion 704, and the fourth absorbing portion m. Next, the substrate inspection device will be described with reference to Fig. 5! A mechanism for driving the i-th rotating member 21 and the second rotating member 31 to rotate. In addition, FIG. 5 shows a substrate inspection device! The rear view of one of the parts is shown in Fig. 3. The positional relationship between the first checkpoint 2 and the second checkpoint 3 shown in Fig. 3 and the direction of rotation are opposite to each other. In Fig. 5, a mechanism for driving the first rotating member 21 and the second rotating member 31 to rotate is provided with a rotary drive motor 1〇1, a timing belt 1〇3, and tension rollers 104 and 105. A pulley 102 is provided on a rotary shaft of the rotary drive motor ιοί, and the rotary drive motor 101 drives the pulley 102 to rotate by a predetermined angle in accordance with the control of the control unit. The timing belt 1〇3 is suspended by the tension pulleys 104 and 105 so as to be rotatable by the pulley 1〇2 and the timing pulleys 25 and 35. The tension pulleys 1〇4 and 1〇5 are used to control the tension of the tensioning timing belt 103. The driving force of the rotary drive motor 101 is synchronized with the timing π wheels 25 and 35 via the timing belt, and is rotated at the same rotation angle. Further, the first rotating shaft 24 and the second rotating shaft 34 of the respective fixed timing pulleys 25 and 35 are also rotated, and the first rotating member 21 and the second rotating member are rotated with the rotation of the first rotating shaft 24 and the second rotating shaft 34. 31, also rotate in the A direction and the b direction respectively. Further, in the present embodiment, the rotation instruction ..., t 31 of the control are rotated 90 each time in the two directions of the rotating member 21 and the second rotating member. . Next, the same is attached with reference to FIG. In addition, FIG. 6 illustrates the detailed structure of the substrate supply unit 7 in a cross section. The substrate is provided with a unit 7G and a rocking mechanism 71, which is a bottom view of the watch. A side view of the financial structure. Fig. 7 is a suction unit 7 structure 71, a lifting support board moving mechanism: 7 5 7 is provided with suction The unit 70, the rocker lifting mechanism 73, the conveying plate 74, and the carrying 23 M337563 are shown in Figs. 6 and 7, sucking 7nA people _*_, 7Λ1Κ outside the person 70 70 including a pair of supporting members 701a m: brother 1 The absorbing portion 7〇2, the second absorbing portion 7〇3, the third absorbing portion 7〇4, the buddy portion 7G5, and the rear end abutting member are touched. The first absorbing members 702 to 705 are respectively made of a rod. The first to fourth suction portions 7 (32, the pre-inspection substrates 3 on the substrate 1 transport conveyance belt 1G are placed in the same direction. The first suction portion) 702 is formed on the lower surface facing the stacked substrate 3 (the disk length = the side surface of the parallel hollow column; hereinafter referred to as the suction surface), and is formed with: a suction hole ha. For example, the 'suction hole' is at the first The absorbing portion 7〇2: the surface 'for a predetermined area set on the side of the supporting member 7〇la (for example, the width t is about 10 瞧 and the length is about 140 positions), and the diameter between the centers is 1.5 with the diameter 〇. The hole is formed into a matrix shape, that is, an example in which a suction hole is formed, and an area in which the suction hole ha is formed or other samples will be described later. In the hollow interior, the negative pressure of (4) force (four) portion m (see Fig. 4) is supplied, and the outside air under the first absorbing portion 702 is sucked from the suction hole 。. It is supported in the vicinity of one end portion of the support member 7〇1a and the ( (hereinafter referred to as the front end side of the absorbing unit 7), and can be oriented in the direction of the figure I with the axis (the 0-axis shown) as the center. Rotating. The second f 1 absorbing portion 702 'is independent of the absorbing unit 7 后 described later and among the four absorbing portions, only the absorbing portion is separately supported to be centered on the 〇 axis Rotating. In this manner, the second and second M337563 portions 702 can softly absorb the substrate and are not easily peeled off once the substrate being sorbed.

The second absorbing portion 703 is formed with a plurality of suction holes hb on the lower surface (the absorbing surface) facing the stacked substrate s. For example, the suction hole hb is formed below the second absorbing portion 703, and is formed at a predetermined area (for example, 'rabbit degree of about 1 〇mmx length of about 5 〇 _) set on the support member 7〇la side, with a center-to-center spacing of 2.0 mm. A hole having a diameter of 1.0 mm is formed into a matrix shape, and a predetermined area (for example, a width of about 10 mm x a length of about 80 mm) adjacent to the predetermined region on the support member 701b side is formed with a center-to-center spacing of 8·〇_. Omm holes form a matrix. Further, when the plurality of suction holes hb are formed at positions facing the substrate S, they may be formed in other aspects. Further, the negative pressure controlled by the suction pressure control unit 707 is supplied to the hollow interior of the second suction portion 703, and the external air below the second suction portion 703 is sucked from the suction hole hb. Further, the second absorbing portion 703 is provided on the other end side (hereinafter referred to as the rear end side of the absorbing unit 70) of the support members 701a and 701b with respect to the first absorbing portion 702. The third absorbing portion 704 is formed with a plurality of suction holes hb similar to those of the second absorbing portion 703 on the lower surface (the absorbing surface) facing the stacked substrate S. Further, the negative pressure controlled by the suction pressure control unit 707 is supplied to the hollow interior of the third suction portion 704, and the outside air under the third suction portion 704 is sucked from the suction hole hb. Further, the third absorbing portion 7〇4 is provided at both rear end sides of the absorbing unit 7〇 with respect to the second absorbing portion 703, and the supporting members 7〇ia and 701b. The fourth absorbing portion 705 is formed with a plurality of suction holes he on the lower surface (the surface of the suction 25 M337563) facing the stacked substrate s. For example, the suction hole hc is formed under the fourth absorbing portion 705, and is formed at a predetermined area (for example, a twist of about 1 Ommx and a length of about 8 〇mm) set at a side of the support member 7〇la, with a center-to-center spacing of 8. 0 mm. The hole having a diameter of 〇mm is formed into a matrix shape, and for another predetermined region adjacent to the predetermined region on the support member 701b side (for example, a width of about 10 mm × a length of about 50 mm), a diameter 1 is formed with a center-to-center spacing of 2 〇. The holes of Omni become matrix. Further, when the plurality of suction holes hc are formed at positions facing the substrate S, they may be formed in other forms. Further, the negative pressure controlled by the suction pressure control unit 707 is supplied to the hollow interior of the fourth suction portion 705, and the external air below the fourth suction portion 7〇5 is sucked from the suction hole he. Further, the fourth absorbing portion 7〇5 is provided at both ends of the support member 701& and 7〇1b on the other rear end side of the absorbing unit _70 with respect to the third absorbing portion 704. The rear end abutment member 706 is disposed on the rearmost end side of the absorbing unit 70, for example, on the rear end side of the fourth absorbing portion 705. The absorbing unit 70 is supported by the elevating support member 72, and can be rocked around the rotation axis provided on the end side of the month. The rotation axis is parallel to the erecting direction of the fourth absorbing portions 702 to 705, and is, for example, the imaginary axis shown. Further, a rocking mechanism 71 is provided on the rear end side of the absorbing unit 70 (for example, in the vicinity of the third absorbing portion 7〇4 and the fourth absorbing portion 705). The rocking mechanism is used to connect the rear end side of the absorbing unit 70 and the lifting support member 72. Further, inside the rocking mechanism 71, a rocking cam whose rotation angle is controlled by the above-described control portion is provided. Further, in accordance with the control of the control unit, the rocking cam is rotated to increase or decrease the distance between the rear end side of the absorbing unit 7〇 and the elevating support member 72 by 26 M337 563, and the absorbing unit 70 is shown as the center of the rotating shaft. Shake in the E direction. In addition, the mechanism for shaking the absorbing unit 7{) can also be used in other forms. For example, a cylinder or the like may be provided to drive up and down. Alternatively, a rotating mechanism such as a motor that directly rotates the absorbing unit 70 around the rotating shaft may be provided. The elevating mechanism 73 raises and lowers the elevating support member 72 in the direction indicated by the control unit in accordance with the control of the control unit. Further, the substrate supply unit 7 has a height measuring device (not shown) for detecting the substrate s to be supplied: the stowage height (the remaining amount of the substrate S), and outputs the height information to the wide portion. In this manner, the absorbing unit 7 can be placed at the substrate suction (4) position (the absorbing surfaces of the first to fourth absorbing portions 7G2 to m face and are close to each other on the first substrate transporting belt 1). The substrate placed on the uppermost position • the position of the main surface of t), and the substrate suction release position (the position shown in Fig. 6; the suction surface of the fourth suction portion 7〇2 to 705 is sucked In addition, the substrate S to be supplied is placed on the second substrate conveyance belt 1〇, and is placed at a predetermined position in the lower space of the absorbing unit 70, before the operation is performed in accordance with the flowchart described later. When the suction unit 70 is lowered toward the stacked substrate S, the suction surface of the first suction portion 702 can be brought close to the vicinity of the upper end portion in the longitudinal direction of the substrate s, and at least the second suction portion 7〇 The absorbing surface of 3 is close to a position different from the other upper region of the substrate s, that is, the predetermined position is such that the short axis direction of the substrate S and the erecting directions of the first to fourth absorbing portions 702 to 7 〇 5 are mutually The parallel position is raised and lowered between the substrate St and the position of the transfer plate 74. 27 M337563 Referring to Fig. 8', the substrate Smax having the largest size of the supply target and the substrate Smin having the smallest size are taken as an example, and the range in which the first absorbing portion 702 approaches and is attracted by the suction hole ha will be described. Further, the item 8 is an example of a range in which the first absorbing portion is attracted to the substrate Smax disposed at the above-described 疋 position and above. In Fig. 8, when the animal sucking unit 70 is lowered toward the substrate SmaX stowed at the predetermined position, the suction surface of the first suction portion 702 approaches the vicinity of the upper end portion in the longitudinal direction of the substrate Smax. Then, it is attracted to the plurality of suction holes ha of the i-th absorbing portion 702, and is a region having a width W and a length l near the upper end portion of the substrate s·. For example, in the conventional example of the above-mentioned suction hole ha, about i 〇 _, L = about 14 〇 _. On the other hand, in the above-described manner, since the plurality of suction holes ha are formed in the predetermined region on the support member 701 & side in the first absorbing portion 702, the maximum size of the substrate Smax is at the upper end. In the vicinity of the portion, the region that is biased to the right or left is the range that the i-th suction portion 7〇2 attracts, and the suction range is set to be about 2 from the side to the short-axis width of the substrate Smax. The range of /3. That is, when the substrate Smin of the smallest size is attracted by the same absorbing member 702, it is considered that the suction range of the second absorbing portion 702 exceeds the width in the short-axis direction of the substrate smin. Specifically, when the entire width in the short-axis direction of the substrate Smax is used as the suction range of the i-th absorbing portion 702, the leakage of the suction to the substrate Smin is increased, and therefore the suction pressure must be increased. In order to avoid such adjustment of the suction pressure as much as possible, it is preferable to set the suction range of the first absorbing portion 7 〇 2 to the area of the left and right sides of the substrate Smax of the largest size in the vicinity of the front end portion. 1 The absorbing surface of the absorbing portion 702 is disposed so as to abut the entire width of each of the short axis directions at the vicinity of the upper ends of the upper surfaces of the substrates Smax and Smin. Referring back to Fig. 6, the conveyance board moving mechanism 75 horizontally moves the conveyance plate 74 in the G direction shown in the figure in accordance with the control of the control unit. In this manner, when the absorbing unit 70 sucks and supports the substrate St and is disposed at the substrate absorbing release position, the transfer plate 74 is disposed at a position below the substrate St (the position indicated by a broken line in Fig. 6). Then, when the suction support of the absorbing unit to the substrate St is released, the substrate St is placed on the upper surface of the conveyance plate μ. Then, the conveyance plate 74 is moved to the front side of the A-side inspection absorbing table 22 with the substrate st placed thereon. /, two persons, the operation of the substrate supply unit 7 will be described with reference to Figs. 9 to 15 . In addition, FIG. 9 is a flowchart for showing the operation of feeding the substrate w from the substrate supply unit 7 to the A-side inspection sorption table 22 & 22 (1). FIG. 1 to FIG. 15 are schematic views, respectively. The operation of the substrate supply unit 7 is shown in the operation of the flowchart shown in Fig. 9. In Fig. 9, the control unit of the substrate inspection device 驱 is driven by the first substrate transporting belt 1 as the second The lifting support member 72 is lowered to a position where the suction surface of the most substrate St and the absorbing unit 70 is placed (step _. For example, the substrate inspection device uses the height information rotated from the height sensor, The stowage height of the substrate s of the object (the remaining amount of the substrate S): the substrate is now sucked by the substrate of the absorbing unit 7G by n 29 M337563, as shown in FIG. The control unit drives the elevating mechanism 73 to lower the elevating support member 72 in the direction E1 shown in the figure, and arranges the unit 70 in the substrate suction start position. In this manner, the first absorbing portion 702 is sucked. The surface is close to the substrate stowed in the uppermost position

St near the end of the long axis direction. At this time, it can be understood from the operation of the step described later that the rocking mechanism 71 is operated to bring the suction surface of the absorbing unit 7 to a level, and therefore the absorbing surface is close to the main state of the substrate St at the uppermost position. Further, the control unit of the substrate inspection apparatus 1 controls the driving of the blower 9Q and the operation of the suction pressure control unit 707 to supply a negative pressure to the second suction unit 7〇2. In this manner, the end portion of the substrate St at the uppermost position is attracted to the plurality of suction holes ha formed in the absorbing surface of the first absorbing portion 702 (refer to Fig. 12, the suction of the first absorbing portion 702). The front surface of the substrate is in contact with the upper end portion of the substrate St (step S51; see Fig. 8). In this manner, the suction surface and the rear end abutting member 7〇6 of the second to fourth suction portions 703 to 705 are The upper surface of the substrate St is in contact with each other. At this time, the control unit of the substrate inspection device i controls the suction pressure control unit 707 to supply the negative pressure of the i-th suction pressure to the first absorbing unit 702. The first sorption The pressure is a negative pressure that can lift the end of one of the substrates, and is a negative one that is weaker than the second suction pressure to be described later. For example, for a substrate St having a thickness of 1.6 mm, a size of 95 mm x 30 mm, and a weight of 45 g, a width of 90 mm. In the case where the end portion can be lifted up, the first suction pressure is 3 to 5 mmHg. In the figure, the first suction pressure is generated in the state of the first suction portion 7〇2. The solid arrow indicates M337563 Next, the control unit of the substrate inspection device rotates the rocker cam to become a rabbit. 0 - % π ^ 丹 U is in the state of shaking the needle direction L (in the opposite direction in Fig. 10 - α) to a predetermined angle (step S52). At this time, since the upper surface of the substrate st at the position of Z ^ ^ is in contact state, Therefore, the sucker list = 70 maintains the same horizontal state as the substrate st (the state of Fig. 1). Next, the control unit of the substrate inspection device 驱动 drives the elevating mechanism 73 to raise the elevating support member 72 (step S53). For example, As shown in Fig. n, the control unit of the substrate inspection apparatus 1 drives the elevating mechanism 73 to raise the elevating support member 72 in the direction E2 shown in the figure. As the elevating support member 72 rises, it is stowed at the front end portion of the substrate St at the uppermost position. It is lifted in a state of being sucked by the first sucking P 7 0 2 . On the other hand, the sucker unit is used to make the sucker unit shake in the downward direction (not in the F1 direction) until it becomes heavy. Since the above-described angle is set, the rear end of the substrate st is in contact with the other substrate S that is stacked. That is, only the front end of the substrate St is lifted from the other substrate S, and a gap is formed between the substrate St and the other substrate S (Fig. State of 11 Next, the control unit of the substrate inspection device 1 controls the operation of the suction pressure control unit 707 to supply a negative pressure to the second to fourth suction portions 7〇3 to 7〇5 (step S54). The end portion of the uppermost position substrate st is attracted to the plurality of suction holes hb or hc (see FIG. 7) formed on the suction surface of the brothers 4 to 705, and the fourth to fourth suction portions are used. 702 to 705 can reliably suck and fix the substrate St (the state of Fig. 12). At this time, the control unit of the substrate inspection apparatus 1 controls the suction pressure control unit 707 to supply the negative pressure of the second suction 31 M337563 waste. The second to fourth absorbing portions are two-force: the substrate can be surely sucked and fixed, and the entire substrate is lifted, and the negative pressure is stronger than the first absorbing waste. For example, in the case of a thick product u:, Y, 95mmxl3m45g^wm9: the visibility is sucked up and the whole is lifted, 帛2 sucks above. Further, in Fig. 12, the second suction pressure is generated: the sorrow is indicated by the white arrow inside the second to fourth absorbing portions 703 to 705. Here, the substrate St' has a plurality of holes of the through-hole TH or the slit SL #through surface/# face as described in the prior art. However, since a gap is formed between the substrate st at the uppermost position and the substrate s of the second sheet from the uppermost position, the substrate st and the substrate s of the second sheet are not adhered to each other, and the attraction force is only the substrate at the uppermost position. The control unit of the substrate inspection device 1 controls the operation of the suction pressure control unit 707, and changes the pressure supplied to the i-th suction unit 7〇2 from the i-th suction pressure to the second. The suction pressure (step S55). Then, the control unit of the substrate inspection f is set to rotate the rocking cam of the rocking mechanism 71 so that the suction unit π 70 is shaken to the horizontal state (step S56), the elevating mechanism 73 is further driven, and the absorbing unit 70 is disposed above. The substrate suction releasing device (step S57; state of Fig. 13). For example, as shown in Fig. 13, the control unit rotates the rocking cam to cause the absorbing unit 70 to swing in the F2 direction shown in the horizontal state. Then, the control unit further drives the elevating mechanism 73' to raise the elevating support member 72 further in the E3 direction shown in the drawing to arrange the absorbing unit 70 at the substrate suction releasing position. 32 M33 7563 In this way, the absorbing unit 70 sucks the substrate set by the absorbing unit 70, and the flat state is placed on the substrate to absorb the hood. In addition, in Fig. 13, the table is changed. ° The state of the first absorbing portion 702 is the hollow arrow 75; the control unit of the reverse inspection 7 check device 1 controls the transporting plate moving mechanism SL ΓΓ to move to the lower position of the absorbing unit 7G (step Qiu "The operation of the control unit of the substrate inspection device 1 to control the suction pressure control °" stops the supply of negative enthalpy to the first to fourth absorbing portions 7G2 to 705 (step S59; state of Fig. 14). The substrate St to which the suction unit 7 is sucked and fixed is placed on the conveyance plate 74. For example, as shown in Fig. 14, the control unit moves the conveyance plate 74 in the direction of the figure. The conveyance plate 74 is disposed at a position below the suction unit 7A. Then, by stopping the fourth suction portion 7〇2 to the service i, , and 's, the substrate St is held by the suction. It is placed on the top of the conveyance plate μ. In addition, in Fig. 14, the inside of the fourth suction portion 7G2 to 7{5) is not marked with a hollow arrow, indicating that the negative pressure is not supplied. Next, the substrate inspection device The control unit controls the transporting plate moving mechanism 75 to move the transporting plate 74 to the front and bottom of the A-side inspection absorbing table 22. The substrate supply position (step S60; the state of Fig. 15). For example, as shown in Fig. 15, the control unit moves the transport plate 74 in the G2 direction shown in the figure to move the transport plate 74 to the substrate supply position. Next, the control unit of the substrate inspection apparatus 1 operates all of the cylinders 23a to 23d and 33a to 33d in the extending direction (see FIG. 3) so that one of the suction surfaces 22a to 22d of the A surface is inspected. It is disposed near the upper side of the transporting plate 74 on which the substrate ^33 M337563 is placed. Then, the 'A-side inspection absorbing table 22 attracts the substrate 1 on the pure transporting plate 74 to the main surface of the substrate St (specifically, The B surface is fixed to the suction surface of the suction surface 22 by the straight surface (step S61). Next, the control unit of the substrate inspection device i makes all the cylinders 23a to 23d. And 33a to 33d are operated in the contraction direction (refer to _... by this operation, the a-surface inspection sorption tables 22a to 22d and the B-surface inspection sorption stations are all disposed in the first rotating member 21 and the second rotating member 31. Near the side, on the top, step S61 is vacuumed and fixed on the A side to check the suction table. The substrate s of the suction surface is picked up by the substrate supply unit 7 (step S62). The control unit of the substrate inspection device 1 determines whether or not the substrate S is continuously supplied (step S63). Then, the control unit continues to supply the substrate s. In the case of the above-described step S50, the processing is repeated, and when the supply of the substrate s is completed, the processing of the flowchart is terminated. In this manner, in the substrate supply unit γ, only the substrate St of the uppermost position is sucked and lifted. In the vicinity of the end portion, since the force for lifting the substrate St is generated by the gas suction using the negative pressure, the attraction force is not deteriorated, and maintenance necessary for the use of the adhesive member or the like in the prior art is not required. Further, by sucking only the vicinity of the end portion of the substrate St at the uppermost position, it is possible to easily peel only the substrate St at the uppermost position, and after the substrate St and the second substrate s at the uppermost position are not adhered to each other, a gap is formed. Only the substrate S1 at the uppermost position is reliably sucked and fixed by the other absorbing portions. Therefore, the substrate of the present invention is taken out t. Even if a substrate having a plurality of holes penetrating the front surface/back surface is formed, it is possible to prevent two sheets from being taken out from the stacked substrates, and it is possible to take only 34 M337563 and place it in the uppermost position. The substrate. In the present invention, only the substrate of the uppermost position is used, and the element _h of the substrate 5 is peeled off. In the above 18, only the end of the substrate in the ^ direction is sucked. For example, it is sucked and picked up at the central portion of the substrate st: 'Because the adhesion between the substrate st and the other substrate s is strong, it is easy to pick up two substrates, but it can be on the substrate St by absorbing only the end portion in the longitudinal direction. A gap is easily formed between the other substrate 5. Further, the second substrate (see FIG. 8) in which the substrate St to be picked up is attracted by the first absorbing portion 702 is compared with the total hole area of the hole of the substrate st included in the suction range, and the first suction portion of the suction range is included. The larger the total area of the suction holes ha of the portion 7〇2, the higher the effect of preventing the removal of the two sheets. For example, as shown in Fig. 16, it is considered that the substrate st and the other substrate s at the uppermost position are staggered and staggered. At this time, the suction hole _ of the second sucking portion 7〇2 and the hole of the substrate St do not coincide with each other, and the suction force of the suction hole ha attracts the suction hole ha to act on the second substrate S2 (the dotted line is shown) Former master). In other words, the effect of preventing the removal of the two sheets becomes high. When the substrate St at the uppermost position is actually buckled, the attraction force applied to the second substrate μ is required to be small, and the holes of the suction holes ha and the substrate st are mutually made. The inconsistent force / acts on the substrate St (solid arrow shown). On the other hand, the position of the position where the suction hole ha of the first absorbing portion 702 and the hole of the substrate st coincide with each other is Φ. For example, the number of holes of the suction holes ha formed in the suction range of the first absorbing portion 702 is increased as much as possible, so that the suction force applied to the substrate st is increased, and is supplied to the ith absorbing portion 7 via the control. 2 Negative pressure makes it lower (for example, the above-mentioned third suction pressure), so that the attraction of 35 M337563 applied to the substrate s is small, and it is possible to prevent two sheets from being taken out, and at the same time, only the substrate St of the uppermost position f is surely picked up. The effect becomes higher. In other words, by increasing the number of holes of the suction holes ha formed in the suction range of the second suction T 7〇2 (the j-plane of the suction holes ha becomes large), the attraction force applied to the substrate st is relatively The proportion of the attraction force applied to the second substrate S2 increases. Further, by controlling the supply and the negative pressure to the first absorbing portion 702 to be low, the absolute value of the suction force applied to the second substrate S2 can be lowered. For example, as shown in Fig. 17, it is considered that the first absorbing portion 702 in which the plurality of suction holes ha are formed and the substrate st in which the plurality of through holes are formed are overlapped. In the lower diagram of Fig. 17, the first absorbing portion 2 in which a plurality of suction holes ha are formed is indicated by a solid line, and the substrate St on which a plurality of through holes are formed is indicated by a broken line, and the suction hole ha and the through hole are repeated. The area is shown in the black area. As can be understood from Fig. 17, since the area in which the suction hole ha and the through hole are overlapped is relatively low with respect to the area of the suction hole ha, it is applied to the second substrate s2 with respect to the attraction force applied to the substrate St. The attraction is extremely low. Further, it can be understood that the ratio of the attraction force applied to the second substrate S2 to the attraction force applied to the substrate St can be made lower by increasing the number of holes of the suction holes ha. In one example of the first absorbing portion 7〇2, a suction hole ha having a diameter of 55 mm is formed in a matrix shape with a distance of 1.5 mm between the centers. However, other aspects may be used. For example, even if the suction hole having a diameter of 1. 5 mm used for the suction of the blower is normally formed, the suction holes may be formed into a matrix as much as possible within a range of the hole machining in a predetermined region set on the side of the support member 701a. Realize this creation. Further, as shown in Fig. 18A, 36 M337563 may also have the suction holes ha staggered. By forming the suction holes ha in a staggered arrangement Y, since the suction holes ha can be arranged more efficiently, it is possible to further increase the number of holes or the total area of the holes in the above-described ridge area. Further, when the suction holes ha are arranged in a staggered manner and the diameter is set to about 5 to 8 mm, the suction holes ha can be arranged more efficiently. Further, the absorbing surface of the first absorbing portion 702 may be formed of a porous crystal alloy or the like. It is conceivable that the substrate Smin of the smallest size is attracted by the same i-th absorbing portion 7〇2, and the number of the suction holes ha of the first absorbing portion 702 can be made small without touching the absorbing surface of the substrate Smin. For example, as shown in Fig. 18β, a plurality of suction holes are formed in accordance with the above-described manner for the suction surface of the first absorbing portion 7〇2 contacting the substrate Smin of the smallest size. On the other hand, for the size of the substrate S The suction surface of the second suction portion 702 that may not be in contact therewith is relatively formed with a relatively small number of suction holes hb. Further, for a substrate s having a small size such as the substrate Smin, in the case where the suction is large, The suction pressure control unit 707 can be used to distinguish the size of the substrate s to control the suction pressure. Further, it is conceivable that the first suction portion 7 〇 2 can be sucked by the same first absorbing portion 702 to attract the smallest size of the stencil-n'. The suction hole ha is divided into a plurality of groups to control the suction pressure. For example, as shown in Fig. 18C, the suction surface of the first absorbing portion in which the suction hole ha is formed is divided into three regions Arl to Ar3. The negative pressure supplied from the regions A1 to Ar3 is independently controlled by the absorbing pressure control unit m. Further, the suction pressure is supplied to each of the areas A r 丨 〜 A 『3 according to the size of the substrate S to be supplied. Can be supplied according to the size of the substrate 37 M337563 Further, in the example shown in the above description, the substrate St placed on the carrier plate 74 is transported to the rear end side of the absorbing unit 70 (that is, the side of the rear end abutting member 706). However, it is also possible to carry the conveyance in the other direction. For example, the substrate St placed on the conveyance plate 74 may be conveyed to the front end of the suction unit 7 (that is, the side of the first suction portion 7〇2). In the left-right direction of the suction unit 70, as shown in FIG. 8 and the like, the end portion close to the right side with respect to the front end of the substrate St is set in the i-th absorbing portion 702. Although the suction range is set, the suction range may be set to another position. The suction range of the first absorbing portion 702 may be in the vicinity of the front end portion where the substrates St of the respective sizes can coexist, for example, may be opposite to the substrate St. The front end is close to the end of the left side or the center of the front end of the substrate. In the above description, in addition to the i-th absorbing portion, there are also three::: two fourth, "03~7〇5)' Support the first suction 1 solid foundation; ^ St machine Also can use other aspects. =: The formula, because only the suction of the suction part of the $1 〇7 is fixed. The attraction of the U-body is not increased or the 111-plate substrate is sucked. It is known as the AI. E.g. It is necessary to sip the absorbing part. To reach, 丨, 乂, /, you can suck the fixed substrate St stably, and support: the other absorbing part of the first absorbing part 7 ° 2 can also be used, Use more than 4 absorbing parts. In addition, the other absorbing portion of the second absorbing portion 7〇2 may use a absorbing portion having a large absorbing surface (4) as a material for feeding (4) 38 M337563. In addition, in the above description, absorbing The unit 70 is lifted and lowered to form the gap between the substrate St and the second substrate S2 at the uppermost position to pick up the substrate St. However, the positional relationship between the substrate St and the second substrate S2 in the uppermost position in the height direction is relatively enlarged/reduced. Yes, you can use other aspects. For example, the stacked substrate S itself may be moved up and down, and the position of the uppermost substrate St and the second substrate S2 in the height direction may be enlarged/reduced. Further, in the above description, the substrate take-out device of the present invention is applied to a substrate inspection device having a plurality of inspection suction stations, but it can be applied to other devices. For example, it can also be applied to a substrate inspection device having a separate inspection sorption table, and can also be applied to a drawing device or other processing. Further, the substrate taken out by the substrate take-out device may not be a double-sided substrate on which both sides of the substrate are to be visually inspected. The substrate take-out device of the present invention can reduce the maintenance work of the device as much as possible, and at the same time, it is possible to prevent two pieces from being taken out in a plurality of stacked substrates, and it is possible to take out only the substrate placed on the uppermost layer, and it is suitable for the formation of the pair. A device having a substrate that penetrates a plurality of holes on the front surface or the back surface is used for processing. The above description has been described in detail, and all the above descriptions are merely examples of the present invention and are not intended to limit the scope thereof. Various modifications or changes can be made without departing from the scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view showing a schematic configuration of a substrate inspecting apparatus 1 according to an embodiment of the present invention. FIG. 2 is a plan view showing a schematic structure of the substrate inspection apparatus 1 of FIG. 1. 39 M337563 Fig. 3 is a front view showing the schematic configuration of the substrate inspection apparatus 1 in which the cylinders 23 and 33 of Fig. i are in an extended state. Fig. 4 is a side elevational view showing the schematic configuration of the air pressure mechanism of the substrate inspection apparatus 1 of the drawing. Fig. 5 is a rear elevational view showing the configuration of a mechanism for rotating the driving member in the substrate inspection apparatus 1 of Fig. i. Fig. 6 is a side view showing the schematic structure of the substrate supply unit 7 of Fig. 1 . Figure 7 is a bottom plan view of the sorption unit 7A of Figure 6. Fig. 8 shows an example in which the first absorbing portion 7〇2 attracts a range in which the bases Smax and Smin are disposed at predetermined positions. In contrast, "Fig. 9 is a flowchart" for indicating the operation of supplying the substrate s from any of the substrate supply surface inspection stages 22a to 22d. - Fig. 1A is a schematic view showing the flow chart according to Fig. 9. The first stage of the state in which the substrate supply unit 7 is operated. Fig. 11 is a schematic view showing the second stage of the state in which the substrate supply unit 7 is operated according to the flow chart shown in Fig. 9. Fig. 12 The schematic diagram shows the third stage of the state in which the substrate supply unit 7 is operated in accordance with the flow chart shown in Fig. 9. The schematic view shows the substrate supply unit 7 in accordance with the operation of the flowchart shown in Fig. g. Fig. 14 is a schematic view showing the fifth stage of the state in which the substrate supply unit 7 is operated according to the flowchart shown in Fig. 9. Fig. 15 is a schematic view showing the figure according to the figure. The sixth stage of the state in which the substrate supply unit 7 is operated by the flow chart shown in Fig. 9. M337563 Fig. 16 is a view for explaining that the substrate st and the other substrate s at the uppermost position are offset from each other and are stacked on each of the substrates st and The attraction of s. Figure 17 shows that a plurality of suctions are formed. The first absorbing portion 702 of the hole ha and the substrate st having the plurality of through holes are overlapped. Fig. 18A shows a first variation of the suction hole ha formed in the i-th absorbing portion 7〇2. Fig. 18B shows The second variation of the suction hole ha formed in the absorbing portion 7〇2 is shown in Fig. 18C. Fig. 18C shows a third variation of the suction hole formed in the ith absorbing portion 7〇2. Fig. 19 shows one of the substrates s. Fig. 2 is a cross-sectional view showing a conventional suction blower squashing structure. Fig. 21B is a cross-sectional view schematically showing the main components of the conventionally used adhesive member. 3 4 Substrate inspection device 检查1 inspection station 苐2 inspection station A surface inspection head M337563 5 B surface inspection head 6 frame 7 substrate supply unit 8 substrate storage unit 10 first substrate conveyance belt 11 second substrate conveyance belt 21 first rotation member 22, 22a to 22d A surface inspection suction table 23, 23a to 23d cylinder 24 first rotation Shaft 25, 35 timing pulley 31 second rotation 32, 32a to 32d, B-side inspection suction table 33, 33a to 33d, cylinder 34, second rotation shaft 4, 51, slit 61, inspection head beam 62a to 62c, bearing 63, body base 64, abutment member 65, bolt 62, 621a to 621c Roads 622, 622a, 622bl 622 622b2, 622c Slide block 42 M337563 651 Linear motor 70 Suction unit 71 Shake mechanism 72 Elevating support member 73 Elevating mechanism 74 Carrier plate 75 Carrier plate moving mechanisms 81a to 81c Substrate boxes 82a to 82c Elevator table 83 Turntable 84 First carry-out conveyor belt 85 Second carry-out conveyor belt 90 blowers 91a and 91b Main piping 92 Air pressure switching units 93, 93a to 93d Suction piping 94, 94a to 94d Cylinder piping 95 Compressor 101 Rotary driving motor 102 Pulley 103 Timing belts 104 and 105 Tension wheels 7 (H, 701a, 701b Supporting member 702 First absorbing portion 43 M337563 703 Second absorbing portion 704 Third absorbing portion 705 Fourth absorbing portion 706 Rear end abutting member 707 Suction pressure control unit ha " hb suction hole S substrate S2 second substrate SL slit Smax maximum substrate Smin minimum substrate Sng defective base Eligible substrate Sok St uppermost position of the substrate 44 through holes TH

Claims (1)

M337563 IX. Patent application scope: 1. A substrate extraction device for taking out a substrate from a stacked substrate, characterized in that it is provided with: Twist: The early 兀 'at least has a first absorbing portion for sucking The face is only sucked and placed near the upper end of the substrate at the uppermost position; and the lifting mechanism 'is used to raise and lower the absorbing unit; and the lifting mechanism lowers the absorbing unit to the absorbing portion The absorbing surface is located above the uppermost substrate; ^ ^ the first absorbing portion has its absorbing surface sucked near the upper end portion of the substrate at the uppermost position; and the 升 IV IV mechanism is in the above 丨The absorbing unit is raised in a state in which the absorbing surface of the absorbing portion is in the vicinity of the upper end portion of the substrate at the upper position. 2. The substrate removing device according to the first aspect of the patent application, wherein The absorbing surface of the first absorbing portion forms a plurality of suction holes for absorbing a gas in the outer layer in a lattice array. The substrate detaching device according to claim 2, wherein the base The plate has a plurality of through holes; and a total area of the suction holes formed in the suction surface of the first absorbing portion is larger than an area of the substrate through holes formed in the portion sucked by the absorbing surface. The substrate take-out device according to the second aspect of the invention, wherein the substrate has a plurality of through holes; 45 M337563 wherein the suction holes of the first absorbing portion are formed in a partial region; The total area of the suction holes of the suction surface of the first absorbing portion is greater than the total area of the substrate through-holes at the portion where the person has the suction hole. In the substrate take-out device, the suction surface of the first absorbing portion is divided into a plurality of regions, and the plurality of regions have different hole number densities (4) to form the suction holes. The substrate taking-out device of the present invention, wherein the absorbing unit further includes a second absorbing portion, and an upper surface of the uppermost substrate is affixed to a region different from a region where the first absorbing portion is sucked by the absorbing surface Further, in the second absorbing portion, when a gap is formed between the substrate at the uppermost position and the other substrate in accordance with the upward movement of the elevating mechanism, the absorbing surface is attracted to the upper surface of the uppermost substrate. The substrate take-out device of the sixth aspect of the invention, further comprising a rocking mechanism that swings the suction unit with the longitudinal direction of the suction surface of the second sucking portion as a center. The substrate take-up device of claim 7, wherein the absorbing unit further includes a rear end abutting member, and the absorbing surface of the first absorbing portion is attracted to the uppermost substrate In the vicinity of the front end portion, the substrate is abutted against the rear end of the substrate. The substrate extracting device of claim 6 is further provided with a suction pressure control portion that is controlled to be supplied to the first suction 46 M337563邛 and the suction pressure of the second absorbing portion, · The absorbing pressure control unit, attached = first suction? When the upper end portion of the base position substrate is in accordance with the upward movement of the elevating mechanism, and a gap is formed between the plate and the one of the plates, the suction pressure is supplied to the first absorbing portion and the second portion. Suction M337563 VII. Designated representative map: (1) The representative representative of the case is: (11). (2) A brief description of the components of the representative drawing: 7 substrate supply unit 10 first substrate transfer conveyor 70 suction unit 71 rocker 虏 72 lifting support member • 73 lifting mechanism 74 conveying plate 75 conveying plate moving mechanism 701 supporting member 702 first absorbing portion ' 703 second absorbing portion 704 third absorbing portion 705 fourth absorbing portion 706 rear end abutting member S substrate St uppermost position substrate 4