TW202027971A - 雷射剝離用的積層體、組成物及套組 - Google Patents
雷射剝離用的積層體、組成物及套組 Download PDFInfo
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- TW202027971A TW202027971A TW108136790A TW108136790A TW202027971A TW 202027971 A TW202027971 A TW 202027971A TW 108136790 A TW108136790 A TW 108136790A TW 108136790 A TW108136790 A TW 108136790A TW 202027971 A TW202027971 A TW 202027971A
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- B23K26/40—Removing material taking account of the properties of the material involved
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/57—Working by transmitting the laser beam through or within the workpiece the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018195067 | 2018-10-16 | ||
| JP2018-195067 | 2018-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202027971A true TW202027971A (zh) | 2020-08-01 |
Family
ID=70284609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW108136790A TW202027971A (zh) | 2018-10-16 | 2019-10-14 | 雷射剝離用的積層體、組成物及套組 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2020080276A1 (https=) |
| TW (1) | TW202027971A (https=) |
| WO (1) | WO2020080276A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6836003B1 (ja) * | 2020-08-27 | 2021-02-24 | 信越エンジニアリング株式会社 | ワーク分離装置及びワーク分離方法 |
| WO2022210154A1 (ja) * | 2021-04-01 | 2022-10-06 | 東レ株式会社 | 積層体および半導体装置の製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6261508B2 (ja) * | 2012-09-28 | 2018-01-17 | 東京応化工業株式会社 | 積層体、積層体の分離方法、および分離層の評価方法 |
| KR101994059B1 (ko) * | 2014-07-17 | 2019-06-27 | 아사히 가세이 가부시키가이샤 | 수지 전구체 및 그것을 함유하는 수지 조성물, 폴리이미드 수지막, 수지 필름 및 그 제조 방법 |
| JP6649111B2 (ja) * | 2016-02-16 | 2020-02-19 | 東京応化工業株式会社 | 積層体、積層体の製造方法、及び基板の処理方法 |
-
2019
- 2019-10-11 JP JP2020553144A patent/JPWO2020080276A1/ja not_active Withdrawn
- 2019-10-11 WO PCT/JP2019/040182 patent/WO2020080276A1/ja not_active Ceased
- 2019-10-14 TW TW108136790A patent/TW202027971A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020080276A1 (ja) | 2020-04-23 |
| JPWO2020080276A1 (https=) | 2020-04-23 |
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