TW201800592A - Mask frame and vacuum processing device - Google Patents

Abstract

To provide a mask frame having no gap between each frame element, without a special member for filling the gap in frame elements adjoining to each other, even a size of an opening of the mask frame is changed. The mask frame with a rectangular opening includes four frame elements having a longer direction corresponding to four edges of the opening respectively. An edge end of one end side in the longer direction in each flame element, and a side edge of the opening along the longer direction in the adjoining frame elements to the edge end are arranged facing each other without the gap in a plain view. The four frame elements are provided so as to be slidable in each inclined slide direction to each longer direction in a plain view, and an opening size of the opening can be changed by sliding the four frame elements.

Description

Mask frame and vacuum processing device

The invention relates to a mask frame for controlling a processing range of a substrate and a vacuum processing device using the mask frame.

As such a vacuum processing apparatus, as shown in Patent Document 1, there are a cover body including a cover portion that covers a peripheral portion of the substrate and controls a film formation range on the substrate, and a cover body fixing the cover body Plate vacuum processing device.

As shown in FIG. 12, the mask body includes four band-shaped frame elements (mask main body) X1 to frame elements (mask main body) X4 divided in correspondence with each side of the opening portion. Specifically, the cover body includes two frame elements X1, frame elements X2 (left and right frame elements in FIG. 12) facing each other, and orthogonally arranged and opposed to the frame elements X1, frame elements X2. Two frame elements X3 and X4 (the upper and lower frame elements in FIG. 12). In addition, both end portions of the left and right frame elements X1 and X2 facing each other are disposed facing the upper and lower frame elements X3 and X4 facing each other.

In addition, each of the frame elements X1 to X4 is fixed to the cover body mounting plate in a mounted state in which positions can be individually changed. Specifically, the frame element is configured such that its position can be changed in a direction orthogonal to the longitudinal direction of the frame element by an adjusting screw provided on the cover body mounting plate. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 10-60624

[Problems to be Solved by the Invention] In the cover body, the four frame elements X1 to X4 are moved in a direction orthogonal to their respective longitudinal directions. Therefore, after changing the opening size (change the film formation area) After), a gap G is generated between the ends of each frame element. As a result, there is a problem that the film at the four corners of the substrate after film formation becomes uneven.

In addition, in Patent Document 1, a protective plate is provided at an end portion of one of the frame members, and a guide section portion capable of accommodating the protective plate is provided at an end portion of the other frame member for landfilling. The gap G.

However, even with the above-mentioned configuration, since the recessed portions are formed on the upper surfaces of the corners of the frame element, there is a problem that the films at the four corners of the substrate after film formation become uneven.

Therefore, the present invention has been made in order to solve the above-mentioned problems, and its main problem is to have a configuration in which a special member for filling a gap does not need to be provided at an end portion of each frame element, and even if the opening size is changed, A gap is generated between the frame elements, thereby improving the uniformity of substrate processing. [Means to solve the problem]

That is, the mask frame of the present invention is a mask frame having a rectangular opening portion, which is characterized by including: four frame elements having a length direction corresponding to each of the four sides of the opening portion; and each of the frame elements An end portion on one end side in the longitudinal direction and an opening portion side edge portion of the frame element adjacent to the end edge portion in the longitudinal direction are disposed opposite to each other, and the four frame elements are opposed to each other in a plan view. Each of the sliding directions is inclined in the longitudinal direction, and the four frame elements are slid to change the opening size of the opening portion to form a cover frame.

In the case of the curtain frame as described above, the end edge portion of the one end side in the longitudinal direction of each frame element and the opening edge side portion of the frame element adjacent to the end edge portion in the longitudinal direction are arranged to face each other. Therefore, even if the size of the opening is changed, the positional relationship between the end edge portion of one end side in the longitudinal direction of each frame element and the opening edge side portion of the frame element adjacent to the end edge portion in the longitudinal direction can be maintained. Therefore, it is possible to adopt a configuration in which it is not necessary to provide a special member for burying a gap in mutually adjacent frame elements, and even if the opening size is changed, a gap does not occur between the frame elements in a plan view. Specifically, it is possible to change the opening while maintaining the state where the end edge portion of one end side of each frame element in the longitudinal direction and the opening edge side portion of the frame element adjacent to the end edge portion in the longitudinal direction are in contact with or close to each other. size.

More specifically, it is desirable to set the frame elements adjacent to each other such that the sum of the inclination angle in the sliding direction of one frame element and the inclination angle in the sliding direction of the other frame element is 90 degrees. According to the above configuration, the positional relationship between the end portion of the one end side in the longitudinal direction of each frame element and the opening portion side edge portion of the frame element adjacent to the end edge portion in the longitudinal direction can be maintained without changing 4 Each frame element slides to change the size of the opening.

It is desirable that the four frame elements are slidably disposed in a direction inclined by 45 degrees with respect to a respective length direction in a plan view. With this configuration, the aspect ratio of the opening shape can be maintained before and after the change in the opening size.

It is desirable to include a support member that supports the four frame members, and a slide rail mechanism that can slide the frame member is provided between the frame member and the support member. With this configuration, each frame element can be easily moved. In addition, in the case where the end edge portion of one end side in the longitudinal direction of each frame element and the opening edge side portion of the frame element adjacent to the end edge portion in the longitudinal direction are in contact with each other, if one frame element is made By moving, other frame elements can be moved in conjunction with the movement, so that the size of the opening can be easily changed.

It is desirable that the slide rail mechanism is provided on one end side in the longitudinal direction and the other end side in the longitudinal direction of the frame element, respectively. According to the above configuration, since the slide rail mechanism is provided on one end side and the other end side in the longitudinal direction of the frame element, it is easy to perform sliding while maintaining the posture of the frame element. In the configuration, the longer the frame element is, the more remarkable the effect becomes. In addition, when a plurality of frame elements are moved in conjunction with each other, the frame elements can be stably moved.

It is desirable that the frame member is fixed to the support member by a fastening member, and either of the insertion hole of the frame member inserted into the fastening member or the insertion hole of the support member. One is an inclined long hole in the sliding direction, and the slide rail mechanism is configured by the fastening member and an insertion hole provided as the inclined long hole. With the above-mentioned configuration, the fastening member doubles as a slide rail mechanism, and the configuration of the curtain frame can be simplified. In addition, as long as the fastening member is fastened after the adjustment of the opening size, the operation from the adjustment of the opening size to the fixing of the frame element can be facilitated.

Preferably, the upper surface of the opening portion side edge portion of the frame element includes a first inclined surface having a downward slope toward the opening portion side, and the end edge portion of the frame element includes the first inclined surface and the first inclined surface. A second inclined surface corresponding to the inclined surface. With the above-mentioned configuration, by providing the first inclined surface on each frame element, it is possible to eliminate unevenness in the processing of the substrate located near the mask frame. In addition, since the edge portion of the frame element includes the second inclined surface, the gap between adjacent frames can be reliably filled with a simple configuration.

It is desirable that the frame element is configured to fix one end portion in the longitudinal direction and be able to move in the longitudinal direction to the other end side in the longitudinal direction by thermal expansion using the one end portion in the longitudinal direction as a starting point. With this configuration, it is possible to eliminate processing unevenness caused by deflection of the frame element due to thermal expansion, and to improve processing uniformity.

It is desirable that an insertion hole through which a fastening member can be inserted is formed on the other end side in the length direction of the frame element, and the fastening member has a head, and the insertion hole is a long hole in the length direction. The fastening member opens a gap between the head and the upper surface of the frame member to fix the other end side in the length direction.

According to the above-mentioned configuration, as long as the insertion hole of the frame element is an elongated hole, deflection due to thermal expansion can be eliminated, and the configuration can be simplified. [Effect of the invention]

According to the present invention configured as described above, it is possible to adopt a configuration in which it is not necessary to provide a special member for filling a gap in mutually adjacent frame elements, and even if the size of the opening portion of the curtain frame is changed, A gap is generated between the frame elements, thereby improving the uniformity of substrate processing.

Hereinafter, an embodiment of a vacuum processing apparatus using a mask frame of the present invention will be described with reference to the drawings.

The vacuum processing apparatus 100 according to the present embodiment is a sputtering apparatus that forms a thin film on a rectangular substrate by sputtering a target using ions in a plasma.

Specifically, as shown in FIG. 1, the vacuum processing apparatus 100 includes a processing container 2 that evacuates the inside to form a vacuum, and a sputtering electrode that is electrically insulated from the processing container 2 and disposed in the processing container 2. 3. A target material 4 which is electrically connected to the sputtering electrode 3, and a substrate support portion 5 which supports the substrate W in a state facing the target material 4.

A gas introduction section 21 is provided in the processing container 2, and a discharge gas is introduced from the gas introduction section 21. The discharge gas is, for example, an inert gas such as argon. An exhaust unit 22 is provided in the processing container 2 to exhaust the inside to form a vacuum. A vacuum pump (not shown) is connected to the exhaust unit 22.

A power source section 6 is connected to the sputtering electrode 3, and high-frequency power is supplied by the power source section 6.

The substrate supporting portion 5 is configured to adjust the position of the substrate W relative to the target 4. In this embodiment, the substrate supporting portion 5 includes a plurality of supporting pins 51 and a driving portion 52 that moves the supporting pins 51 up and down. In addition, the space between the substrate support portion 5 and the processing container 2 is shielded by a seal member 7 such as a bellows. In addition, the processing container 2 and the substrate support portion 5 are electrically grounded.

When a discharge gas is introduced from the gas introduction portion 21 and high-frequency power is supplied to the sputtering electrode 3 through the power supply portion 6, a high-frequency discharge is generated from the sputtering electrode 3. The discharge gas is ionized by the high-frequency discharge to generate a plasma. The target 4 is sputtered by the ions in the plasma, and the sputtered particles flying out from the target 4 are incidentally deposited on the substrate W to form a thin film on the substrate W. In addition, the vacuum processing apparatus 100 may supply a DC power to the sputtering electrode 3 by the power supply unit 6 and generate a plasma by a DC discharge generated from the sputtering electrode 3.

However, as shown in FIGS. 1 and 2, the vacuum processing apparatus 100 of this embodiment includes a mask frame 8 that covers the peripheral edge portion of the substrate W from the target 4.

The mask frame 8 has a rectangular opening portion 8X, as shown in FIG. 2, and includes four frame elements 81 a to 81 d corresponding to the four sides of the opening portion 8X and having longitudinal directions, and A support member 82 that supports the four frame elements 81a to 81d.

In addition, the opening portion 8X formed by the four frame elements 81a to 81d is set smaller than the rectangular substrate size. The support member 82 according to the present embodiment is provided in the processing container 2 and has a rectangular frame shape having a rectangular opening portion 82X that is larger than a rectangular substrate size. The four frame elements 81 a to 81 d are fixed to the upper surface of the support member 82.

Each of the frame elements 81a to 81d is elongated (rectangular) in a plan view, and includes a pair of side portions 811, 812 in the longitudinal direction, and a pair of end edges in a direction orthogonal to the longitudinal direction.部 813 ， 端 边 部 814。 813, the end portion 814. In this embodiment, the pair of side portions 811, 812, and the pair of end portions 813 and 814 are linear in a plan view. The cross-sectional shape of each of the frame elements 81a to 81d orthogonal to the longitudinal direction is rectangular.

The four frame elements 81a to 81d are arranged in a rectangular ring shape so as to form each side of the opening portion 8X. Specifically, the four frame elements 81a to 81d are the end edge portions 813 (hereinafter, referred to as one end edge portions 813) of one end side of each of the frame elements 81a to 81d in the longitudinal direction, and the one end edge portions. 813 adjacent frame elements 81a to 81d are arranged such that the opening side edges 811 in the longitudinal direction face each other.

In this embodiment, one end edge portion 813 of each of the frame elements 81a to 81d and the adjacent opening side edge portions 811 of the adjacent frame elements 81a to 81d are in contact with each other without opening a gap in a plan view. Configuration. Specifically, the side surface of the one end side portion 813 is in surface contact with the side surface of the opening side portion 811.

The four frame elements 81a to 81d arranged as described above are slidably provided in respective sliding directions that are inclined with respect to the respective longitudinal directions in a plan view. In addition, the opening size of the opening portion 8X can be changed by sliding the four frame elements 81a to 81d.

Specifically, among the frame elements 81a to 81d adjacent to each other, the inclination angle in the sliding direction of one of the frame elements (for example, 81a) and the inclination angle in the sliding direction of the other frame element (for example, 81b). The sum is set at 90 degrees. In this embodiment, the inclination angle in the sliding direction of each of the frame elements 81a to 81d is set to 45 degrees.

As shown in FIG. 2, the mask frame 8 includes a slide rail mechanism 9 for moving the four frame elements 81 a to 81 d in the sliding direction, respectively. The slide rail mechanism 9 of this embodiment can slide in a sliding direction that is inclined by 45 degrees with respect to the respective longitudinal directions in a plan view.

Specifically, the slide rail mechanism 9 is provided on one end side in the longitudinal direction and the other end side in the longitudinal direction of each of the frame elements 81 a to 81 d. The slide rail mechanism 9 according to the present embodiment is configured using a fixing mechanism 10a and a fixing mechanism 10b that have each of the frame elements 81a to 81d at one end side in the longitudinal direction and the other end side in the longitudinal direction. They are respectively fixed to the support members 82.

As shown in FIGS. 3 and 4, the fixing mechanism 10 a on one end side in the longitudinal direction is configured by inserting a fastening bolt 11 as a fastening member to one end formed on one end side in the longitudinal direction of the frame element 81 a to the frame element 81 d. The side insertion hole 81h1 is screwed into the inner screw hole 12 formed in the support member 82 to fix one end side of the frame elements 81a to 81d in the longitudinal direction. Here, one end side insertion hole 81h1 formed in the frame elements 81a to 81d is an inclined long hole extending in the sliding direction (symbol SD in FIG. 4) of the frame elements 81a to 81d. In addition, the symbol LD in FIG. 4 indicates the longitudinal direction of the frame elements 81a to 81d.

In the above-mentioned configuration, the frame member 81 a to the frame member 81 d are sandwiched between the head member 111 of the fastening bolt 11 and the support member 82 in a state where the fastening bolt 11 is fastened, that is, the frame member 81 a to a frame member 81 d are sandwiched. One end of the element 81a to the frame element 81d in the longitudinal direction is fixed. On the other hand, in a state where the fastening bolts 11 are loosened, that is, in a state where the head portion 111 of the fastening bolts 11 is separated from the frame elements 81a to 81d, the frame elements 81a to 81d may be opposite to each other. The fastening bolt 11 slides in the sliding direction. As described above, the slide rail mechanism 9 is configured by the fastening bolt 11 and the one-end-side insertion hole 81h1. That is, the fastening bolt 11 becomes a fixed part provided in the support member 82, and the one end side insertion hole 81h1 becomes a sliding part which slides with respect to the said fixed part.

As shown in FIGS. 3 and 5, the fixing mechanism 10 b on the other end side in the longitudinal direction is configured by inserting the fastening bolt 11 to the other end side on the other end side in the longitudinal direction formed on the frame elements 81 a to 81 d. The through hole 81h2 and the insertion hole 82h formed in the support member 82 are screwed to the nut 12 provided on the back surface of the support member 82 to fix the other end sides of the frame elements 81a to 81d in the longitudinal direction. Here, the symbol LD in FIG. 5 indicates the longitudinal direction of the frame elements 81a to 81d, and the symbol SD indicates the sliding direction of the frame elements 81a to 81d. Here, a counterbore 821 is formed on the back surface of the support member 82 to receive the nut 13. The insertion hole 82h formed in the support member 82 is an inclined long hole extending in the sliding direction of the frame elements 81a to 81d. In addition, the countersunk hole 821 is also an inclined long hole extending in the sliding direction together with the insertion hole 82h.

In the above configuration, in a state where the fastening bolt 11 is tightened, that is, a state in which the frame element 81 a to the frame element 81 d and the support member 82 are sandwiched between the head 111 of the fastening bolt 11 and the nut 13. The other end sides of the frame elements 81a to 81d in the longitudinal direction are fixed. On the other hand, in a state where the fastening bolt 11 is loosened, that is, in a state where the head 111 and the nut 13 of the fastening bolt 11 do not sandwich the frame elements 81a to 81d and the support member 82, they are inserted into The fastening bolts 11 in the other end side insertion holes 81h2 of the frame elements 81 a to 81 d can be slid in the sliding direction with respect to the support member 82. As described above, the slide rail mechanism 9 is configured by the fastening bolt 11 and the other end side insertion hole 81h2 and the countersunk hole 821. That is, the other end side insertion hole 81h2 and the countersunk hole 821 are fixed portions provided on the support member 82, and the fastening bolts 11 are sliding portions that slide relative to the fixed portions.

In addition, in this embodiment, each of the frame elements 81a to 81d is configured to fix one end portion in the longitudinal direction, and can move in the longitudinal direction to the other end in the longitudinal direction by thermal expansion using the one end portion in the longitudinal direction as a starting point. side.

Specifically, as shown in FIGS. 3 and 5, the other end side insertion holes 81 h 2 of each of the frame elements 81 a to 81 d are long holes in the longitudinal direction. Further, the fastening bolts 11 of the fixing mechanism 10b on the other end side in the longitudinal direction are configured such that the lower surface of the head portion 111 and the frame element are fixed in a state where the other end sides in the longitudinal direction of the frame elements 81a to 81d are fixed. There is a gap S between the upper surfaces of 81a to 81d. Furthermore, even if there is a gap S, since one end side in the longitudinal direction is fastened by the fastening bolt 11, the other end side in the longitudinal direction is fixed so as not to be able to move in a direction orthogonal to the longitudinal direction.

Specifically, as shown in FIG. 5, the fastening bolt 11 of the fixing mechanism 10 b is a shoulder bolt, which is screwed to the nut 13 and is fastened to the shoulder 112 and the nut 13 of the shoulder bolt 11 by the support member 82. A gap S is formed between the lower surface of the head 111 and the upper surfaces of the frame elements 81 a to 81 d in a state between them, that is, in a state where the fastening bolt 11 is fixed to the support member 82.

With this configuration, even when the frame elements 81a to 81d are extended in the longitudinal direction due to thermal expansion, the other end side insertion holes 81h2, which are long holes of the frame elements 81a to 81d, can be used as fastening bolts 11 Relative movement in the length direction.

Next, adjustment of the opening size of the opening portion 8X of the mask frame 8 configured as described above will be described with reference to FIGS. 6 (A) to 6 (C). FIG. 6A is a diagram showing a case where the opening size of the opening portion 8X is the largest. In this state, in the fixing mechanism 10 a (the slide rail mechanism 9) on one end side in the longitudinal direction, the fastening bolt 11 is located at the innermost side of the insertion hole 81 h 1 of the frame element 81 a to the frame element 81 d. Further, in the fixing mechanism 10 b (the slide rail mechanism 9) on the other end side in the longitudinal direction, the fastening bolts 11 and the nuts 13 are located at the outermost sides of the insertion holes 81 h 2 and the countersinks 821 of the support member 82. In addition, one end edge portion 813 of each of the frame elements 81a to 81d is in contact with the opening side edge portion 811 of the adjacent frame element 81a to 81d.

When the opening size of the opening portion 8X is reduced from the state described above, the fastening bolts 11 at one end side and the other end side in the longitudinal direction of the frame elements 81a to 81d are loosened. Then, the frame elements 81a to 81d are moved to the inside in the sliding direction. At this time, each of the frame elements 81 a to 81 d is moved while maintaining the contact state (FIG. 6 (B)). Here, when one frame element (for example, frame element 81a) is slid, the adjacent end portions of the four frame elements 81a to 81d are in contact with each other, so the remaining three frame elements (for example, frame element 81b) ~ The frame element 81d) also slides in linkage. Furthermore, two or more frame elements may be operated simultaneously to cause them to slide.

As described above, the four frame elements 81a to 81d are moved, the positions are adjusted to the optimal positions, and the fastening bolts 11 are fastened and fixed.

6 (C) is a diagram showing a case where the opening size of the opening portion 8X is the smallest. In this state, in the fixing mechanism 10 a (sliding rail mechanism 9) on one end side in the longitudinal direction, the fastening bolt 11 is located at the outermost side of the insertion hole 81 h 1 of the frame element 81 a to the frame element 81 d. Further, in the fixing mechanism 10 b (the slide rail mechanism 9) on the other end side in the longitudinal direction, the fastening bolt 11 and the nut 13 are located at the innermost side of the insertion hole 81 h 2 and the countersink 821 of the support member 82. In addition, one end edge portion 813 of each of the frame elements 81a to 81d is in contact with the opening side edge portion 811 of the adjacent frame element 81a to 81d.

Next, the thermal expansion absorption of each of the frame elements 81a to 81d will be described with reference to FIGS. 7 (A) to 7 (C). FIG. 7 (A) is a diagram showing a state where thermal expansion does not occur (for example, before a film forming process). In this state, the fastening bolts 11 of the fixing mechanism 10b on the other end side in the longitudinal direction are located at the other end portions in the longitudinal direction of the insertion holes 81h2 of the frame elements 81a to 81d.

In addition, if the frame elements 81a to 81d undergo thermal expansion after the process is started, the frame elements 81a to 81d extend from the fixing mechanism 10a (fastening place) on one end side in the longitudinal direction of the frame elements 81a to 81d. To the other end side in the length direction (Fig. 7 (B) and Fig. 7 (C)). Then, the other end side insertion holes 81h2 of the frame elements 81a to 81d are moved relative to the fastening bolt 11 fixed to the support member 82 to absorb the extension amount H thereof. In addition, since the frame elements 81a to 81d are arranged as in this embodiment, even if each of the frame elements 81a to 81d extends in the longitudinal direction, the opening size does not change. The absorption limit of the extension amount H depends on the length in the longitudinal direction of the other end side insertion hole 81h2 of the frame element 81a to the frame element 81d (FIG. 7 (C)). The length of one end side insertion hole 81h2.

<Effects of the Present Embodiment> According to the vacuum processing apparatus 100 configured as described above, one end portion 813 of each of the frame elements 81a to 81d and the opening side edge portion 811 of the adjacent frame elements 81a to 81d are They are arranged facing each other, so that even if the opening size is changed, the contact relationship between one end edge portion 813 of each of the frame elements 81a to 81d and the adjacent opening element side edge portion 811 of the frame element 81a to 81d can be maintained. Therefore, it is possible to adopt a configuration in which a special member for filling a gap does not need to be provided on the adjacent frame elements 81a to 81d, and even if the opening size is changed, it will not be between the frame elements 81a to 81d. A gap is generated when looking down.

Since the slide rail mechanism 9 is provided between each of the frame elements 81a to 81d and the support member 82, each of the frame elements 81a to 81d can be easily slid. In addition, when one frame element 81a is moved, the other frame elements 81b to 81d can be moved in conjunction with the movement, and the opening size can be easily changed. Here, since the slide rail mechanism 9 is provided at two locations in the longitudinal direction, it is easy to slide while maintaining the posture of the frame elements 81a to 81d. When a plurality of frame elements 81a to 81d are moved in conjunction with each other, These frame elements can be stably moved.

The sum of the inclination angles of the sliding directions of the adjacent frame elements 81a to 81d with respect to the respective longitudinal directions is 90 degrees. Therefore, one end portion 813 of each of the frame elements 81b to 81d and the adjacent frame can be made In the state where the opening portion side portion 811 of the element 81b to the frame element 81d is in contact, the opening size is changed. Here, the sliding direction is 45 degrees, and the aspect ratio of the opening shape can be maintained before and after the opening size is changed.

Further, in this embodiment, since the fastening bolts 11 of the fixing mechanism 10a and the fixing mechanism 10b also serve as the slide rail mechanism 9, the structure of the curtain frame 8 can be simplified. In addition, as long as the fastening bolt 11 is tightened after adjusting the opening size, operations from adjustment of the opening size to fixing of the frame elements 81a to 81d can be easily performed.

In addition, each of the frame elements 81a to 81d is configured to fix one end portion in the longitudinal direction and can move from the one end portion in the longitudinal direction to the other end side in the longitudinal direction by thermal expansion, thereby eliminating the frame. The non-uniformity of the processing due to the deflection due to the thermal expansion of the elements 81a to 81d can improve the uniformity of the processing.

The present invention is not limited to the embodiments described above. For example, in the embodiment described above, each of the frame elements 81a to 81d has a rectangular cross section orthogonal to the longitudinal direction. However, as shown in FIGS. 8 and 9, the openings of the frame elements 81a to 81d may be formed. The upper surface of the side portion 811 includes a first inclined surface 811x having a downward slope toward the opening 8X side, and one end portion 813 of the frame elements 81a to 81d includes a second inclination corresponding to the first inclined surface 811x. Face 813x.

Furthermore, in the above-mentioned embodiment, the side surface of the one end side portion 813 is a plane perpendicular to the upper surface, and the side surface of the opening side side portion 811 is also a plane perpendicular to the upper surface. The configuration that is in contact with the opening side portion 811 without a gap may be, for example, a curved surface or a curved surface.

In addition, in the above-mentioned embodiment, each of the frame elements 81a to 81d has the same shape, but as long as it includes a linear opening side edge portion 811 and a linear end edge portion facing the opening side edge portion. 813, the remaining two sides are not limited to straight lines.

In the above embodiment, the mask frame is square in plan view, but may be rectangular as shown in FIG. 10.

In the embodiment described above, the inclination angle in the sliding direction of all the frame elements is 45 degrees, but as shown in FIG. 11, in the adjacent frame elements, the inclination in the sliding direction SD of one of the frame elements is also possible. The angle θ1 is set to 60 degrees, and the inclination angle θ2 in the sliding direction SD of the other frame element is set to 30 degrees. As described above, as long as the relationship of θ1 + θ2 = 90 degrees is satisfied, the specific angles of θ1 and θ2 are not limited to the embodiment described above.

Moreover, in the said embodiment, although the fixed mechanism 10a and the fixed mechanism 10b also doubled as the slide rail mechanism 9, you may provide these mechanisms separately. At this time, the slide rail mechanism 9 includes a fixing portion provided on one of the frame member or the supporting member, and a fixing portion provided on the other of the frame member or the supporting member and along the fixing member. A sliding portion that slides in the sliding direction.

In addition, the fixing mechanism of the embodiment has a different configuration on one end side in the longitudinal direction and on the other end side in the longitudinal direction, but they may have the same configuration.

Furthermore, although the fixing mechanism of the above embodiment uses fastening bolts, a pin having a shaft portion and a head portion provided to penetrate the frame element and the supporting member, and a shaft portion fitted to the pin and connected to the shaft portion may be used. The stop ring is sandwiched between the head and the frame member and the support member. In addition, the fixing mechanism may use a clamp member that is fixed by sandwiching the frame element and the support member integrally.

In the above-mentioned embodiment, a sputtering device has been described as an example of a vacuum processing device. In addition, it can also be applied to a vacuum processing device using a plasma, such as a chemical vapor deposition (CVD) device. in.

It is needless to say that the present invention is not limited to the above-mentioned embodiment, and various modifications can be made without departing from the spirit thereof.

2‧‧‧handling container
3‧‧‧Sputtering electrode
4‧‧‧ target
5‧‧‧ substrate support
6‧‧‧Power Supply Department
7‧‧‧sealing member
8‧‧‧ curtain frame
8X‧‧‧ opening
9‧‧‧ sliding guide mechanism
10a, 10b‧‧‧Fixed institutions
11‧‧‧ Fastening member
12‧‧‧internal screw hole
13‧‧‧ Nut
21‧‧‧Gas introduction department
22‧‧‧Exhaust
51‧‧‧ support pin
52‧‧‧Driver
81a ～ 81d‧‧‧‧Frame element
81h1, 81h2, 82h‧‧‧Plug-in holes
82‧‧‧ support member
100‧‧‧Vacuum processing equipment
111‧‧‧ head
112‧‧‧Shoulder
811, 812‧‧‧‧ opening side
811x‧‧‧1st inclined surface
813, 814‧‧‧‧Ends on one end side in the longitudinal direction
813x‧‧‧ 2nd inclined surface
821‧‧‧ 鍃 hole
H‧‧‧Extension
LD‧‧‧Frame elements 81a to 81d
G, S‧‧‧ Clearance
SD‧‧‧ Sliding direction
W‧‧‧ substrate
X1 ～ X4‧‧‧Frame elements θ1, θ2‧‧‧ inclination angle

FIG. 1 is a cross-sectional view schematically showing the configuration of a vacuum processing apparatus according to this embodiment. Fig. 2 is a plan view of a mask frame according to the embodiment. Fig. 3 is an exploded perspective view of a mask frame according to the embodiment. 4 is a cross-sectional view and a plan view showing a fixing mechanism on one end side in the longitudinal direction of the embodiment. 5 is a cross-sectional view, a plan view, and a bottom view showing a fixing mechanism on the other end side in the longitudinal direction of the embodiment. 6 (A) to 6 (C) are diagrams showing the operation of each frame element when the opening size of the opening portion of the embodiment is adjusted. 7 (A) to 7 (C) are diagrams showing the operation of each frame element when the thermal expansion is absorbed in the embodiment. 8 is a cross-sectional view schematically showing a configuration of a vacuum processing apparatus according to a modified embodiment. 9 is a partial perspective view and a cross-sectional view of a mask frame according to a modified embodiment. 10 is a plan view of a mask frame according to a modified embodiment. 11 is a plan view showing an end portion of an adjacent frame element according to a modified embodiment. FIG. 12 is a plan view of a conventional mask frame.

8‧‧‧ curtain frame

8X‧‧‧ opening

9‧‧‧ sliding guide mechanism

10a, 10b‧‧‧Fixed institutions

81a ~ 81d‧‧‧Frame Element

82‧‧‧ support member

811, 812‧‧‧‧ opening side

813, 814‧‧‧‧Ends on one end side in the longitudinal direction

Claims (9)

A curtain frame has a rectangular opening portion and includes: 4 frame elements having length directions corresponding to four sides of the opening portion; and an end on one end side of the length direction in each frame element. Among the side portions and the frame elements adjacent to the end side portions, the side portions of the openings in the longitudinal direction are opposite to each other, and the four frame elements are opposed to each other in a plan view. The lengthwise slanting direction is slidably provided in each of the sliding directions, and the four frame elements can be slid to change the opening size of the opening portion to form a mask frame. The mask frame according to item 1 of the scope of patent application, wherein the four frame elements are slidably disposed in a sliding direction inclined by 45 degrees with respect to the respective length direction in a plan view. The mask frame according to item 1 or item 2 of the scope of patent application, which includes: a supporting member for supporting the frame element; and a space between the frame element and the supporting member is provided. The sliding guide mechanism for sliding the frame element is described. The mask frame according to item 3 of the patent application scope, wherein the slide rail mechanism is provided on one end side in the length direction and the other end side in the length direction of the frame element, respectively. The mask frame according to item 3 or 4 of the scope of patent application, wherein the frame member is fixed to the support member by a fastening member, and the frame member is inserted through the frame member of the fastening member. Either the insertion hole or the insertion hole of the support member is an inclined long hole in the sliding direction, and the fastening member and the insertion hole provided as the inclined long hole constitute an The sliding guide mechanism is described. The mask frame according to any one of claims 1 to 5, wherein an upper surface of the opening portion side edge portion of the frame element includes a surface having a downward slope toward the opening portion side. The first inclined surface, the end edge portion of the frame element includes a second inclined surface corresponding to the first inclined surface. The mask frame according to any one of claims 1 to 6, wherein the frame element fixes the one end portion in the longitudinal direction and can start from the one end portion in the longitudinal direction. It is configured by thermal expansion to move in the longitudinal direction to the other end side in the longitudinal direction. The mask frame according to item 7 of the scope of patent application, wherein an insertion hole through which a fastening member can be inserted is formed at the other end side of the frame member in the length direction, the fastening member has a head portion, The insertion hole is a long hole along the length direction, and the fastening member is provided with a gap between the head and the upper surface of the frame member to fix the other end side in the length direction. A vacuum processing device includes a mask frame according to any one of claims 1 to 8 of the scope of patent application.