TWI626324B - Cover frame and vacuum processing device - Google Patents

Abstract

The invention is a mask frame and a vacuum processing device. The mask frame includes four frame members having a longitudinal direction corresponding to each of four sides of the opening portion, and an end portion of one end side of each of the frame members in the longitudinal direction and an edge of the frame member adjacent to the end portion The side portions of the opening portion in the longitudinal direction are disposed so as not to face each other in a plan view, and the four frame members are slidably disposed in the respective sliding directions inclined with respect to the respective longitudinal directions in a plan view. The opening size of the opening portion can be changed by sliding the four frame members.

Description

Cover frame and vacuum processing device

The present invention relates to a mask frame for controlling a processing range of a substrate and a vacuum processing apparatus using the mask frame.

As such a vacuum processing apparatus, as disclosed in Patent Document 1, there is provided a mask body that covers a peripheral portion of a substrate and controls a film formation range on the substrate, and a mask body that fixes the mask body. Plate vacuum processing unit.

As shown in FIG. 12, the cover body includes four strip-shaped frame members (cover main body) X1 to frame member (cover main body) X4 which are divided in accordance with each side of the opening. Specifically, the mask body includes two frame members X1 and a frame member X2 (left and right frame members in FIG. 12) facing each other, and is disposed orthogonally to the frame members X1 and X2, and is opposed to each other. Two frame elements X3 and frame elements X4 (upper and lower frame elements in Fig. 12). Further, the left and right frame members X1 and the frame members X2 are opposed to each other, and the upper and lower frame members X3 and X4 are opposed to each other.

Further, each of the frame members X1 to X4 is fixed to the cover body mounting plate in a mounted state in which the position can be individually changed. Specifically, the frame member is configured to be positionally changeable in a direction orthogonal to the longitudinal direction of the frame member by an adjusting screw provided on the cover body mounting plate.

[Prior Art Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. Hei 10-60624

In the cover body, the four frame elements X1 to X4 move in a direction orthogonal to the respective longitudinal directions. Therefore, after the opening size is changed (after changing the film formation area), each frame element is A gap G is created between the ends of the ends. Then, there is a problem that the film at the four corners of the substrate after the film formation becomes uneven.

Further, in Patent Document 1, a shield is provided at one end of one of the frame members, and a guide portion for accommodating the shield is provided at an end of the other frame member for landfill The gap G.

However, even in the above configuration, since the concave portion is formed on the upper surface of the corner portion of the frame member, there is a problem that the film at the four corners of the substrate after the film formation becomes uneven.

Therefore, the present invention has been made to solve the above problems, and a main object of the present invention is to provide a configuration in which it is not necessary to provide a special member for filling a gap at an end portion of each frame member, and it is not necessary to change the size of the opening. A gap is created between the frame members to improve the uniformity of substrate processing.

That is, the mask frame of the present invention is a mask frame having a rectangular opening portion, comprising: four frame members having respective length directions corresponding to four sides of the opening portion; and the frame members The end portion on one end side in the longitudinal direction and the side portion on the opening side in the longitudinal direction of the frame member adjacent to the end portion are opposed to each other The four frame elements are slidably disposed in respective sliding directions inclined with respect to respective longitudinal directions in a plan view, and the openings of the openings can be changed by sliding the four frame members. The size of the opening constitutes a mask frame.

In the mask frame as described above, the end side portion on the one end side in the longitudinal direction of each frame member and the side portion on the opening side in the longitudinal direction of the frame member adjacent to the end side portion are opposed to each other. Therefore, even if the opening size is changed, the positional relationship between the end side portion on the one end side in the longitudinal direction of each frame member and the side portion of the opening portion in the longitudinal direction of the frame member adjacent to the end side portion can be maintained. Therefore, it is possible to provide a configuration in which a special member for filling a gap is not provided in the frame members adjacent to each other, and even if the size of the opening is changed, a gap is not formed between the frame members in plan view. Specifically, the opening can be changed while maintaining the end side portion on the one end side in the longitudinal direction of each frame element and the side portion of the opening portion in the longitudinal direction of the frame member adjacent to the end side portion. size.

More specifically, it is preferable that the frame members adjacent to each other are set such that the sum of the inclination angle in the sliding direction of one of the frame members and the inclination angle in the sliding direction of the other frame member is 90 degrees.

According to this configuration, the positional relationship between the end side portion on the one end side in the longitudinal direction of each frame member and the side portion of the opening portion in the longitudinal direction of the frame member adjacent to the end side portion can be changed. The frame elements are slipped to change the opening size.

It is desirable that the four frame members are slidably disposed in a direction inclined by 45 degrees with respect to the respective longitudinal directions in a plan view.

According to this configuration, the aspect of the opening shape can be maintained before and after the change in the opening size. ratio.

It is desirable to include a support member that supports the four frame members, and a slide rail mechanism that allows the frame member to slip is disposed between the frame member and the support member.

According to this configuration, each frame member can be easily slipped. Further, when the end side portion on one end side in the longitudinal direction of each frame element and the side portion of the opening portion adjacent to the end side portion in the longitudinal direction are in contact with each other, one frame member is used. When moving, the other frame members can be moved in conjunction with the movement, so that the change in the opening size can be easily performed.

It is preferable that the slide rail mechanisms are respectively provided at one end side in the longitudinal direction and the other end side in the longitudinal direction of the frame member.

According to this configuration, since the slide rail mechanisms are respectively provided at one end side and the other end side in the longitudinal direction of the frame member, it is easy to maintain the posture of the frame member and to slip. In the above configuration, the longer the frame member, the more remarkable the effect. Further, when a plurality of frame members are moved in conjunction, the frame members can be stably moved.

It is desirable that the frame member is fixed to the support member by a fastening member, and any one of an insertion hole of the frame member of the fastening member or an insertion hole of the support member is inserted. The inclined long hole is formed in the sliding direction, and the sliding rail mechanism is configured by the fastening member and the insertion hole provided as the inclined elongated hole.

According to this configuration, the fastening member also serves as a slide rail mechanism, and the configuration of the mask frame can be simplified. Further, the fastening member can be fastened after the adjustment of the opening size, and the operation from the adjustment of the opening size to the fixing of the frame member can be facilitated.

It is preferable that an upper surface of the opening side portion of the frame member includes a first inclined surface that is inclined downward toward the opening side, and the end portion of the frame member includes the first portion The second inclined surface corresponding to the inclined surface.

According to this configuration, by providing the first inclined surface on each of the frame members, it is possible to eliminate unevenness in the processing of the substrate located in the vicinity of the mask frame. Further, since the end side portion of the frame member includes the second inclined surface, the gap between the adjacent frames can be reliably filled with a simple configuration.

It is preferable that the frame member is fixed to one end portion in the longitudinal direction, and is configured to be movable in the longitudinal direction to the other end side in the longitudinal direction by thermal expansion from the one end portion in the longitudinal direction.

According to this configuration, the unevenness of the processing due to the deflection of the frame member due to thermal expansion can be eliminated, and the uniformity of the treatment can be improved.

It is preferable that an insertion hole through which the fastening member can be inserted is formed on the other end side in the longitudinal direction of the frame member, and the fastening member has a head, and the insertion hole is a long hole in the longitudinal direction. The fastening member fixes the other end side in the longitudinal direction with a gap between the head and the upper surface of the frame member.

According to this configuration, if the insertion hole of the frame member is a long hole, the deflection due to thermal expansion can be eliminated, and the configuration can be simplified.

According to the present invention configured as described above, it is possible to provide a special member for filling a gap between adjacent frame members, and even if the size of the opening of the mask frame is changed, a gap is created between the frame elements, thereby increasing Uniformity of substrate processing.

2‧‧‧Processing container

3‧‧‧ Sputtering electrode

4‧‧‧ Target

5‧‧‧Substrate support

6‧‧‧Power Supply Department

7‧‧‧ Sealing member

8‧‧‧ Cover Frame

8X‧‧‧ openings

9‧‧‧Sliding rail mechanism

10a, 10b‧‧‧fixed institutions

11‧‧‧ fastening members

12‧‧‧Inner hole

13‧‧‧ nuts

21‧‧‧Gas introduction department

22‧‧‧Exhaust Department

51‧‧‧Support pins

52‧‧‧ Drive Department

81a~81d‧‧‧Frame components

81h1, 81h2, 82h‧‧‧ inserted through hole

82‧‧‧Support members

100‧‧‧Vacuum treatment unit

111‧‧‧ head

112‧‧‧ shoulder

811, 812‧‧ ‧ side of the opening

811x‧‧‧1st inclined surface

813, 814‧‧‧ end side of one end side in the longitudinal direction

813x‧‧‧2nd inclined surface

821‧‧‧鍃孔

H‧‧‧Extension

Length direction of LD‧‧‧ frame member 81a~frame member 81d

G, S‧‧‧ gap

SD‧‧‧ sliding direction

W‧‧‧Substrate

X1~X4‧‧‧Frame components

Θ1, θ2‧‧‧ tilt angle

Fig. 1 is a cross-sectional view schematically showing a configuration of a vacuum processing apparatus of the embodiment.

Fig. 2 is a plan view of the mask frame of the embodiment.

Fig. 3 is an exploded perspective view showing the mask frame of the embodiment.

4(A) to 4(B) are a cross-sectional view and a plan view showing a fixing mechanism on one end side in the longitudinal direction of the embodiment.

5(A) to 5(C) are a cross-sectional view, a plan view, and a bottom view showing a fixing mechanism on the other end side in the longitudinal direction of the embodiment.

6(A) to 6(C) are views showing the operation of each frame element when the opening size of the opening in the embodiment is adjusted.

7(A) to 7(C) are views showing the operation of each frame element at the time of thermal expansion absorption in the embodiment.

Fig. 8 is a cross-sectional view schematically showing a configuration of a vacuum processing apparatus according to a modified embodiment.

Fig. 9 is a partial perspective view and a cross-sectional view showing a mask frame according to a modified embodiment.

Fig. 10 is a plan view of a mask frame according to a modified embodiment.

Fig. 11 is a plan view showing an end portion of an adjacent frame member in a modified embodiment.

Figure 12 is a plan view of a conventional mask frame.

Hereinafter, an embodiment of a vacuum processing apparatus using the mask frame of the present invention will be described with reference to the drawings.

The vacuum processing apparatus 100 of the present embodiment is a sputtering apparatus that forms a thin film on a rectangular substrate by sputtering a target in a plasma.

Specifically, as shown in FIG. 1 , the vacuum processing apparatus 100 includes a processing container 2 that exhausts the inside to form a vacuum, and a sputtering electrode that is electrically insulated from the processing container 2 and disposed in the processing container 2 . 3. A target 4 that is electrically connected to the sputtering electrode 3 and a substrate supporting portion 5 that supports the substrate W in a state of being opposed to the target 4 .

The processing container 2 is provided with a gas introduction portion 21, and a gas for discharge is introduced from the gas introduction portion 21. Further, the discharge gas is, for example, an inert gas such as argon. Further, in the processing container 2, an exhaust portion 22 for evacuating the inside to form a vacuum is provided, and a vacuum pump (not shown) is connected to the exhaust portion 22.

The power supply unit 6 is connected to the sputtering electrode 3, and the high-frequency power is supplied by the power supply unit 6.

The substrate supporting portion 5 is configured to adjust the position of the substrate W with respect to the target 4, and in the present embodiment, includes a plurality of support pins 51 and a driving portion 52 that moves the support pins 51 up and down. Further, the substrate supporting portion 5 and the processing container 2 are shielded by a sealing member 7 such as a bellows. Furthermore, the processing container 2 and the substrate supporting portion 5 are electrically grounded.

Further, when the gas for discharge is introduced from the gas introduction portion 21, the power source is used. When the high-frequency electric power is supplied to the sputter electrode 3 in the portion 6, high-frequency discharge is generated from the sputter electrode 3. The discharge gas is ionized by the high-frequency discharge to generate a plasma. The ions in the plasma are sputtered on the target 4, and sputtered particles flying out from the target 4 are incident on the substrate W, and a thin film is formed on the substrate W. Further, in the vacuum processing apparatus 100, DC power can be supplied to the sputtering electrode 3 by the power supply unit 6, and plasma can be generated by DC discharge generated from the sputtering electrode 3.

However, as shown in FIGS. 1 and 2, the vacuum processing apparatus 100 of the present embodiment includes a mask frame 8 that covers the peripheral edge portion of the substrate W from the target 4.

The mask frame 8 has, in particular, a rectangular opening portion 8X as shown in FIG. 2, and includes four frame members 81a to 81d having a longitudinal direction corresponding to the four sides of the opening portion 8X, respectively, and A support member 82 that supports the four frame members 81a to 81d.

Further, the opening portion 8X formed by the four frame members 81a to 81d is set smaller than the rectangular substrate size. The support member 82 of the present embodiment is provided in the processing container 2, and has a rectangular frame shape having a rectangular opening portion 82X larger than the rectangular substrate size. Further, four frame members 81a to 81d are fixed to the upper surface of the support member 82.

Each of the frame members 81a to 81d has an elongated shape (rectangular shape) in a plan view, and includes a pair of side portions 811 in the longitudinal direction, side portions 812, and a pair of end sides in a direction orthogonal to the longitudinal direction. Portion 813 and end portion 814. In the present embodiment, the pair of side portions 811, the side portions 812, the pair of end portions 813, and the end portions 814 are linear in plan view. Further, the longitudinal direction of each of the frame members 81a to 81d is positive The cross-sectional shape of the intersection is a rectangle.

Further, the four frame members 81a to 81d are arranged in a rectangular ring shape so as to form the respective sides of the opening portion 8X. Specifically, the four frame elements 81a to 81d are end portions 813 (hereinafter referred to as end portions 813) on one end side in the longitudinal direction of each of the frame elements 81a to 81d, and the one end portion 813 adjacent frame members 81a to 81d are arranged such that the opening side edges 811 in the longitudinal direction face each other.

In the present embodiment, the one end side portion 813 of each of the frame members 81a to 81d and the opening side portion 811 of the adjacent frame member 81a to the frame member 81d are in contact with each other, and the gap is not opened in plan view. Configuration. Specifically, the side surface of the one end side portion 813 is in surface contact with the side surface of the opening side portion 811.

The four frame elements 81a to 81d arranged as described above are slidably provided in the respective sliding directions inclined with respect to the respective longitudinal directions in plan view. Further, by sliding the four frame elements 81a to 81d, the opening size of the opening 8X can be changed.

Specifically, in the frame members 81a to 81d adjacent to each other, the inclination angle in the sliding direction of one of the frame members (for example, 81a) and the inclination angle in the sliding direction of the other frame member (for example, 81b) And set it in a 90 degree way. In the present embodiment, the inclination angle in the sliding direction of each of the frame members 81a to 81d is set to 45 degrees.

Further, as shown in FIG. 2, the mask frame 8 includes a slide rail mechanism 9 for moving the four frame members 81a to 81d in the sliding direction. This embodiment The slide rail mechanism 9 of the state is slidable in a sliding direction inclined by 45 degrees with respect to the respective longitudinal directions in a plan view.

Specifically, the slide rail mechanism 9 is provided on one end side in the longitudinal direction and the other end side in the longitudinal direction of each of the frame elements 81a to 81d. The slide rail mechanism 9 of the present embodiment is configured by using a fixing mechanism 10a and a fixing mechanism 10b. The fixing mechanism 10a and the fixing mechanism 10b have the frame member 81a to the frame member 81d at one end side in the longitudinal direction and the other end side in the longitudinal direction. They are respectively fixed to the support member 82.

As shown in FIGS. 3 and 4(A) to 4(B), the fixing mechanism 10a on the one end side in the longitudinal direction is configured to be inserted into the frame member 81a to the frame by inserting the fastening bolt 11 as a fastening member. One end side insertion hole 81h1 on one end side in the longitudinal direction of the element 81d is screwed to the inner screw hole 12 formed in the support member 82, and is fixed to one end side of the frame element 81a to the frame element 81d in the longitudinal direction. Here, the one end side insertion hole 81h1 formed in the frame element 81a to the frame element 81d is an inclined long hole extending in the sliding direction of the frame element 81a to the frame element 81d (symbol SD in FIG. 4(B)). Further, the symbol LD in Fig. 4(B) indicates the longitudinal direction of the frame member 81a to the frame member 81d.

In the above configuration, in a state in which the fastening bolt 11 is fastened, that is, in a state in which the frame member 81a to the frame member 81d are interposed between the head portion 111 of the fastening bolt 11 and the support member 82, the frame is attached. One end side of the element 81a to the frame element 81d in the longitudinal direction is fixed. On the other hand, in a state where the fastening bolt 11 is loosened, that is, in a state where the head portion 111 of the fastening bolt 11 is separated from the frame member 81a to the frame member 81d, the frame member 81a to the frame member 81d can be opposed to the frame member 81d. The fastening bolt 11 slides in the sliding direction. Such as As described above, the slide rail mechanism 9 is constituted by the fastening bolt 11 and the one end side insertion hole 81h1. In other words, the fastening bolt 11 is a fixing portion provided on the support member 82, and the one end side insertion hole 81h1 is a sliding portion that slides with respect to the fixing portion.

As shown in FIGS. 3 and 5(A) to 5(C), the fixing mechanism 10b on the other end side in the longitudinal direction is formed by inserting the fastening bolt 11 to the length of the frame member 81a to the frame member 81d. The other end side insertion hole 81h2 on the other end side and the insertion hole 82h formed in the support member 82 are screwed to the nut 13 provided on the back surface of the support member 82 to the frame member 81a to the frame member 81d. Fix the other end side in the length direction. Here, the symbol LD in FIGS. 5(B) to 5(C) indicates the longitudinal direction of the frame element 81a to the frame element 81d, and the symbol SD indicates the sliding direction of the frame element 81a to the frame element 81d. Here, a bore 821 in which the nut 13 is housed is formed on the back surface of the support member 82. Further, the insertion hole 82h formed in the support member 82 is an inclined long hole extending in the sliding direction of the frame member 81a to the frame member 81d. Further, the pupil 821 is also provided as an inclined long hole extending in the sliding direction together with the insertion hole 82h.

In the above configuration, in a state in which the fastening bolt 11 is fastened, that is, in a state in which the frame member 81a to the frame member 81d and the support member 82 are sandwiched between the head portion 111 of the fastening bolt 11 and the nut 13 The other end side of the frame member 81a to the frame member 81d in the longitudinal direction is fixed. On the other hand, in a state where the fastening bolt 11 is loosened, that is, in a state where the head portion 111 of the fastening bolt 11 and the nut 13 are not sandwiched between the frame member 81a to the frame member 81d and the support member 82, the insertion is performed to The fastening bolt 11 in the other end side insertion hole 81h2 of the frame member 81a to the frame member 81d is slidable in the sliding direction with respect to the support member 82. As described above, the fastening bolt 11 and the other end side insertion hole 81h2 are used. The bore 821 constitutes a slide rail mechanism 9. In other words, the other end side insertion hole 81h2 and the bore 821 are fixing portions provided on the support member 82, and the fastening bolt 11 is a sliding portion that slides with respect to the fixing portion.

Further, in the present embodiment, each of the frame members 81a to 81d is configured to be fixed to one end portion in the longitudinal direction, and is movable in the longitudinal direction to the other end in the longitudinal direction by thermal expansion from the one end portion in the longitudinal direction as a starting point. side.

Specifically, as shown in FIG. 3 and FIG. 5(A) to FIG. 5(C), the other end side insertion hole 81h2 of each of the frame elements 81a to 81d is a long hole in the longitudinal direction. Further, the fastening bolt 11 of the fixing mechanism 10b on the other end side in the longitudinal direction is configured such that the lower surface of the head portion 111 and the frame member are fixed in a state in which the other end sides of the frame member 81a to the frame member 81d are fixed in the longitudinal direction. There is a gap S between the upper surfaces of the frame members 81d to 81a. In addition, even if the gap S is provided, the one end side in the longitudinal direction is fastened by the fastening bolts 11, and the other end side in the longitudinal direction is also fixed so as not to be movable in a direction orthogonal to the longitudinal direction.

Specifically, as shown in FIGS. 5(A) to 5(C), the fastening bolt 11 of the fixing mechanism 10b is a shoulder bolt, and is screwed to the nut 13, and the support member 82 is fastened to the fastening. In a state between the shoulder portion 112 of the bolt 11 and the nut 13, that is, in a state where the fastening bolt 11 is fixed to the support member 82, on the lower surface of the head portion 111 and the upper surfaces of the frame member 81a to the frame member 81d A gap S is formed therebetween.

With the above configuration, even when the frame member 81a to the frame member 81d extend in the longitudinal direction due to thermal expansion, the long hole of the frame member 81a to the frame member 81d, that is, the other end side insertion hole 81h2 can be opposed to the fastening bolt. 11 moves relatively in the length direction.

Next, the adjustment of the opening size of the opening 8X of the mask frame 8 configured as described above will be described with reference to FIGS. 6(A) to 6(C).

Fig. 6(A) is a view showing a state in which the opening size of the opening 8X is the largest.

In the state described above, the fastening bolt 11 is located at the innermost side of the insertion hole 81h1 of the frame member 81a to the frame member 81d in the fixing mechanism 10a (sliding rail mechanism 9) on the one end side in the longitudinal direction. Further, in the fixing mechanism 10b (sliding rail mechanism 9) on the other end side in the longitudinal direction, the fastening bolt 11 and the nut 13 are located at the outermost sides of the insertion hole 81h2 and the bore 821 of the support member 82. Further, one end side portion 813 of each of the frame members 81a to 81d is in contact with the opening side portion 811 of the adjacent frame member 81a to the frame member 81d.

When the opening size of the opening portion 8X is reduced from the above state, the fastening bolts 11 on the one end side and the other end side in the longitudinal direction of the frame member 81a to the frame member 81d are loosened. Further, the frame member 81a to the frame member 81d are moved to the inner side in the sliding direction. At this time, each of the frame elements 81a to 81d is moved while maintaining the contact state (FIG. 6(B)). Here, when one frame member (for example, the frame member 81a) is slipped, the adjacent end portions of the four frame members 81a to 81d are in contact with each other, and thus the remaining three frame members (for example, the frame member 81b) The frame member 81d) also slides in conjunction. Furthermore, two or more frame elements can be simultaneously operated and slipped.

The four frame members 81a to 81d are moved as described above, the position is adjusted to an optimum position, and the fastening bolts 11 are fastened and fixed.

In addition, FIG. 6(C) is a view showing a state in which the opening size of the opening 8X is the smallest.

In the state described above, in the fixing mechanism 10a (sliding rail mechanism 9) on the one end side in the longitudinal direction, the fastening bolt 11 is located at the outermost side of the insertion hole 81h1 of the frame member 81a to the frame member 81d. Further, in the fixing mechanism 10b (sliding rail mechanism 9) on the other end side in the longitudinal direction, the fastening bolt 11 and the nut 13 are located at the innermost side of the insertion hole 81h2 and the bore 821 of the support member 82. Further, one end side portion 813 of each of the frame members 81a to 81d is in contact with the opening side portion 811 of the adjacent frame member 81a to the frame member 81d.

Next, the thermal expansion absorption of each of the frame elements 81a to 81d will be described with reference to FIGS. 7(A) to 7(C).

Fig. 7(A) is a view showing a state in which thermal expansion does not occur (for example, before a film formation process).

In the above state, the fastening bolt 11 of the fixing mechanism 10b on the other end side in the longitudinal direction is located at the other end portion in the longitudinal direction of the insertion hole 81h2 of the frame member 81a to the frame member 81d.

When the frame element 81a to the frame element 81d are thermally expanded after the start of the process, the frame member 81a to the frame member 81d extend from the fixing mechanism 10a (fastening) on the one end side in the longitudinal direction of the frame member 81a to the frame member 81d. To the other end side in the length direction (Fig. 7 (B) and Fig. 7 (C)). Then, the other end side insertion hole 81h2 of the frame member 81a to the frame member 81d is moved with respect to the fastening bolt 11 fixed to the support member 82 to absorb the amount of extension H thereof. In addition, since each of the frame elements 81a to 81d is disposed as in the present embodiment, the opening size does not change even if the frame elements 81a to 81d extend in the longitudinal direction.

The absorption limit of the amount of extension H depends on the other of the frame member 81a to the frame member 81d. The length of the end side insertion hole 81h2 in the longitudinal direction (Fig. 7(C)), therefore, it is necessary to determine the length of the other end side insertion hole 81h2 based on the amount of extension H assumed in advance.

<Effects of the embodiment>

According to the vacuum processing apparatus 100 configured as described above, the one end side portion 813 of each of the frame members 81a to 81d and the opening side portion 811 of the adjacent frame member 81a to the frame member 81d are opposed to each other, and therefore even By changing the opening size, the contact relationship between the one end side portion 813 of each of the frame members 81a to 81d and the opening side portion 811 of the adjacent frame member 81a to the frame member 81d can be maintained. Therefore, it is not necessary to provide a special member for filling the gap between the frame members 81a to 81d adjacent to each other, and even if the size of the opening is changed, it is not between the frame members 81a to 81d. A gap is created in a plan view.

Since the slide rail mechanism 9 is provided between each of the frame members 81a to 81d and the support member 82, the frame members 81a to 81d can be easily slid. Further, when one frame element 81a is moved, the other frame elements 81b to 81d can be moved in conjunction with the movement, and the opening size can be easily changed. Here, since the slide rail mechanism 9 is provided at two locations in the longitudinal direction, it is easy to maintain the posture of the frame member 81a to the frame member 81d, and when the plurality of frame members 81a to 81d are moved in conjunction with each other, The frame members can be stably moved.

The sum of the inclination directions of the sliding direction of the frame members 81a to 81d adjacent to each other with respect to the respective longitudinal directions is 90 degrees, so that the one end side portion 813 of each of the frame members 81b to 81d and the adjacent frame can be made. Element 81b~frame element When the opening side edge portion 811 of 81d is in contact with each other, the opening size is changed. Here, the sliding direction is 45 degrees, and the aspect ratio of the opening shape can be maintained before and after the change in the opening size.

Further, in the present embodiment, the fastening bolts 11 of the fixing mechanism 10a and the fixing mechanism 10b also serve as the slide rail mechanism 9, so that the configuration of the mask frame 8 can be simplified. Further, the tightening bolt 11 can be tightened after the opening size is adjusted, and the operation from the adjustment of the opening size to the fixing of the frame member 81a to the frame member 81d can be easily performed.

Further, each of the frame elements 81a to 81d is configured to be fixed to one end portion in the longitudinal direction, and can be moved in the longitudinal direction to the other end side in the longitudinal direction by thermal expansion from the one end portion in the longitudinal direction, thereby eliminating the frame. The unevenness of the processing caused by the deflection of the elements 81a to 81d due to thermal expansion can improve the uniformity of the processing.

Furthermore, the present invention is not limited to the embodiment.

For example, in the above-described embodiment, each of the frame members 81a to 81d has a rectangular cross section orthogonal to the longitudinal direction. However, as shown in FIGS. 8 and 9, the frame members 81a to 81d may have openings. The upper surface of the side portion 811 includes a first inclined surface 811x that is inclined downward toward the opening 8X side, and the one end portion 813 of the frame member 81a to the frame element 81d includes a second inclination corresponding to the first inclined surface 811x. Face 813x.

Further, in the above-described embodiment, the side surface of the one end side portion 813 is a plane perpendicular to the upper surface, and the side surface of the opening side portion 811 is also a plane perpendicular to the upper surface, but the end portion 813 is a plan view. The configuration that is in contact with the opening side edge portion 811 without a gap may be, for example, a curved surface or a curved surface.

Further, in the embodiment, each of the frame members 81a to 81d is 81d. The same shape is included, but the left side opening portion 811 and the linear one end side portion 813 that faces the opening side portion are not limited to a straight shape.

In the above embodiment, the mask frame has a square shape in plan view, but may have a rectangular shape as shown in FIG.

In the above embodiment, the inclination angles of all the frame members in the sliding direction are both 45 degrees, but as shown in Fig. 11, in the frame members adjacent to each other, the inclination of the sliding direction of one of the frame members is SD. The angle θ1 is set to 60 degrees, and the inclination angle θ2 in the sliding direction SD of the other frame member is set to 30 degrees. As described above, the specific angles of θ1 and θ2 are not limited to the above embodiment as long as the relationship of θ1 + θ2 = 90 degrees is satisfied.

Further, in the above-described embodiment, the fixing mechanism 10a and the fixing mechanism 10b also serve as the slide rail mechanism 9, but these mechanisms may be provided separately. At this time, the slide rail mechanism 9 includes a fixing portion provided on one of the frame member or the support member, and is disposed on the other of the frame member or the support member and along the fixed portion a sliding portion that slides in the sliding direction.

Further, the fixing mechanism of the above-described embodiment has a configuration in which one end side in the longitudinal direction and the other end side in the longitudinal direction have different configurations, but both of them may have the same configuration.

Further, although the fixing mechanism of the above-described embodiment uses a fastening bolt, a pin having a shaft portion and a head provided through the frame member and the support member, and a shaft portion fitted to the pin may be used. A stop ring that sandwiches the frame member and the support member between the heads. Further, the fixing mechanism may also use a clamp member that is integrally clamped into the frame member and the support member.

In the above-described embodiment, a sputtering apparatus is exemplified as a vacuum processing apparatus, and it can also be applied to a vacuum processing apparatus using a plasma such as a chemical vapor deposition (CVD) apparatus. in.

The present invention is of course not limited to the embodiments described above, and various modifications can be made without departing from the spirit and scope of the invention.

Claims (9)

A mask frame having a rectangular opening portion and comprising: four frame members having respective longitudinal directions corresponding to four sides of the opening portion; and one end of the frame members on the one end side in the longitudinal direction The side portion and the side portion of the opening portion in the longitudinal direction of the frame member adjacent to the end portion are disposed to face each other, and the four frame members face the opening portion Slidably disposed in a respective sliding direction inclined with respect to the respective longitudinal directions in a plan view, the end sides of the frame members and the opening side portions of the adjacent frame members When the four frame elements are in contact with each other, the four frame elements are slid while being held in contact with each other, and by sliding the four frame elements, the opening size of the opening portion can be changed to form a mask frame. The mask frame according to claim 1, wherein the four frame members are slidably disposed in a sliding direction inclined by 45 degrees with respect to the respective longitudinal directions in a plan view. The mask frame of claim 1 or 2, comprising: a support member for supporting the frame member; and a space between the frame member and the support member A sliding rail mechanism in which the frame member slides. The mask frame according to claim 3, wherein the sliding rail mechanism is respectively disposed at one end side and the length side of the frame member in the longitudinal direction To the other end side. The mask frame of claim 3, wherein the frame member is fixed to the support member by a fastening member, and the insertion hole of the frame member of the fastening member is inserted or Any one of the insertion holes of the support member is an inclined long hole along the sliding direction, and the sliding guide mechanism is configured by the fastening member and the insertion hole provided as the inclined elongated hole . The mask frame according to the first or second aspect of the invention, wherein the upper surface of the opening side portion of the frame member includes a first inclined surface that is inclined downward toward the opening portion side. The end side portion of the frame member includes a second inclined surface corresponding to the first inclined surface. The mask frame according to claim 1 or 2, wherein the frame member is fixed to one end portion in the longitudinal direction, and is capable of being thermally expanded by using one end portion in the longitudinal direction as a starting point. It is configured to move in the longitudinal direction to the other end side in the longitudinal direction. The mask frame according to claim 7, wherein an insertion hole through which the fastening member can be inserted is formed at the other end side of the longitudinal direction of the frame member, the fastening member having a head. The insertion hole is an elongated hole along the length direction, and the fastening member is open between the head and the upper surface of the frame member The other end side in the longitudinal direction is fixed by a gap. A vacuum processing apparatus comprising the mask frame according to any one of claims 1 to 8.