CN109072403B

CN109072403B - Mask frame and vacuum processing apparatus

Info

Publication number: CN109072403B
Application number: CN201780019206.0A
Authority: CN
Inventors: 李东伟
Original assignee: Nissin Electric Co Ltd
Current assignee: Nissin Electric Co Ltd
Priority date: 2016-03-25
Filing date: 2017-03-08
Publication date: 2021-04-20
Anticipated expiration: 2037-03-08
Also published as: TW201800592A; JP6876244B2; CN109072403A; TWI626324B; WO2017163878A1; JP2017172028A

Abstract

The invention provides a mask frame and a vacuum processing device, which are provided with the following structures: there is no need to provide a special member for filling a gap in the frame elements adjacent to each other, and even if the size of the opening of the mask frame is changed, a gap is not generated between the frame elements. The mask frame of the present invention is a mask frame having a rectangular opening, and includes 4 frame elements having a longitudinal direction corresponding to each of four sides of the opening, wherein an end edge portion at one end side in the longitudinal direction of each frame element and an opening portion side portion in the longitudinal direction of a frame element adjacent to the end edge portion are arranged to face each other without a gap in a plan view, the 4 frame elements are slidably provided in respective sliding directions inclined with respect to the respective longitudinal directions in a plan view, and the opening size of the opening can be changed by sliding the 4 frame elements.

Description

Mask frame and vacuum processing apparatus

Technical Field

The present invention relates to a mask frame for controlling a processing range of a substrate and a vacuum processing apparatus using the same.

Background

As such a vacuum processing apparatus, as shown in patent document 1, there is a vacuum processing apparatus including a mask body for masking a peripheral edge portion of a substrate to control a film formation range on the substrate, and a mask body attachment plate for fixing the mask body.

As shown in fig. 12, the mask body includes 4 strip-shaped frame elements (mask main bodies) X1 to X4 divided corresponding to each side of the opening. Specifically, the mask body includes 2 frame elements X1 and X2 (left and right frame elements in fig. 12) facing each other, and 2 frame elements X3 and X4 (upper and lower frame elements in fig. 12) arranged orthogonally to the frame elements X1 and X2 and facing each other. Both ends of the left and right frame elements X1 and X2 facing each other are disposed opposite to the upper and lower frame elements X3 and X4 facing each other.

Each of the frame elements X1 to X4 is fixed to the mask body attachment plate in an individually position-changeable attachment state. Specifically, the frame member is configured to be positionally changeable in a direction orthogonal to the longitudinal direction of the frame member by an adjustment screw provided on the mask body attachment plate.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open No. Hei 10-60624

Disclosure of Invention

Problems to be solved by the invention

In the mask body, since the 4 frame elements X1 to X4 move in the direction perpendicular to the longitudinal direction of each frame element, a gap G is generated between the end portions of the frame elements after the opening size is changed (after the film formation region is changed). This causes a problem that the film is not uniform at the four corners of the substrate after the film is formed.

In the patent document 1, a guard plate is provided at an end of one of the frame elements, and a guide step portion capable of accommodating the guard plate is provided at an end of the other frame element so as to fill the gap G.

However, even in the above configuration, since the recessed portion is formed on the upper surface of the corner portion of the frame element, there is a problem that the film at the four corners of the substrate after film formation becomes uneven.

Therefore, the present invention has been made to solve the above problems, and a main object of the present invention is to provide a configuration including: it is not necessary to provide a special member for filling the gap at the end of each frame element, and even if the opening size is changed, the gap is not generated between the frame elements, thereby improving the uniformity of the substrate processing.

Means for solving the problems

That is, the mask frame of the present invention is a mask frame having a rectangular opening, and includes: 4 frame elements having a length direction corresponding to each of four sides of the opening portion; and an end edge portion at one end side in the longitudinal direction of each frame element and an opening portion side portion in the longitudinal direction of a frame element adjacent to the end edge portion are arranged to face each other, the 4 frame elements are provided slidably in respective sliding directions inclined with respect to the respective longitudinal directions in a plan view, and the opening size of the opening portion is changeable by sliding the 4 frame elements to constitute a mask frame.

In the mask frame described above, the edge portion on the one end side in the longitudinal direction of each frame element and the opening portion side portion in the longitudinal direction of the frame element adjacent to the edge portion are disposed so as to face each other, and therefore, even if the opening size is changed, the positional relationship between the end portion on the one end side in the longitudinal direction of each frame element and the opening portion side portion in the longitudinal direction of the frame element adjacent to the end portion can be maintained. Therefore, the following configuration is possible: there is no need to provide a special member for filling the gap in the adjacent frame elements, and even if the opening size is changed, no gap is generated between the frame elements in a plan view. Specifically, the opening size can be changed while maintaining the state in which the edge side portion at one end side in the longitudinal direction of each frame element and the opening side portion along the longitudinal direction of the frame element adjacent to the edge side portion are in contact with or close to each other.

In more detail, it is desirable that, among the frame elements adjacent to each other, the sum of the inclination angle in the sliding direction of one of the frame elements and the inclination angle in the sliding direction of the other frame element is set to 90 degrees.

With this configuration, the opening size can be changed by sliding the 4 frame elements without changing the positional relationship between the end side portion on the one end side in the longitudinal direction of each frame element and the opening side portion in the longitudinal direction of the frame element adjacent to the end side portion.

It is desirable that the 4 frame members are slidably provided in a direction inclined by 45 degrees with respect to the respective longitudinal directions in a plan view.

With this configuration, the aspect ratio of the opening shape can be maintained before and after the change of the opening size.

It is desirable to include a support member that supports the 4 frame elements, and to provide a slide rail mechanism between the frame elements and the support member, which allows the frame elements to slide.

With this configuration, the frame elements can be easily slid. In the case of the configuration in which the edge side portion on one end side in the longitudinal direction of each frame element and the opening side portion along the longitudinal direction of the frame element adjacent to the edge side portion are in contact with each other, if 1 frame element is moved, the other frame elements can be moved in conjunction with the movement, and the opening size can be easily changed.

Preferably, the slide rail mechanisms are provided on one longitudinal end side and the other longitudinal end side of the frame member, respectively.

In the above configuration, the slide rail mechanisms are provided on the one end side and the other end side in the longitudinal direction of the frame member, respectively, and therefore, the frame member can be easily slid while maintaining its posture. In the above constitution, the longer the frame member is, the more remarkable the effect is. Also, when the plurality of frame elements are moved in conjunction, the frame elements can be moved stably.

It is desirable that the frame element is fixed to the support member by a fastening member, either an insertion hole of the frame element or an insertion hole of the support member through which the fastening member is inserted is an inclined long hole in the sliding direction, and the slide rail mechanism is configured by the fastening member and the insertion hole provided as the inclined long hole.

With this configuration, the fastening member also serves as a slide rail mechanism, and the structure of the mask frame can be simplified. Further, the fastening member may be fastened after the adjustment of the opening size, and the operation from the adjustment of the opening size to the fixing of the frame element may be facilitated.

It is desirable that an upper surface of the opening portion side edge portion of the frame member includes a 1 st inclined surface having a downward inclination toward the opening portion side, and the end edge portion of the frame member includes a 2 nd inclined surface corresponding to the 1 st inclined surface.

In the above configuration, by providing the 1 st inclined surface on each frame member, it is possible to eliminate unevenness in processing of the substrate located in the vicinity of the mask frame. Further, since the end edge portion of the frame member includes the 2 nd inclined surface, the gap between the adjacent frames can be filled up reliably with a simple configuration.

Preferably, the frame element is configured to be capable of fixing one end portion in the longitudinal direction and moving to the other end side in the longitudinal direction by thermal expansion with the one end portion in the longitudinal direction as a starting point.

With this configuration, the frame member can be prevented from being deformed due to thermal expansion, thereby improving the uniformity of the process.

It is desirable that an insertion hole through which a fastening member is inserted is formed in the other end side in the longitudinal direction of the frame element, the fastening member has a head portion, the insertion hole is an elongated hole extending in the longitudinal direction, and the fastening member fixes the other end side in the longitudinal direction with a gap between the head portion and the upper surface of the frame element.

In the above configuration, by forming the insertion hole of the frame element as a long hole, the flexure due to thermal expansion can be eliminated, and the configuration can be simplified.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present invention configured as described above, the following configuration can be provided: it is not necessary to provide a special member for filling a gap in the frame elements adjacent to each other, and even if the size of the opening of the mask frame is changed, a gap is not generated between the frame elements, thereby improving the uniformity of substrate processing.

Drawings

Fig. 1 is a sectional view schematically showing the structure of a vacuum processing apparatus according to the present embodiment.

Fig. 2 is a plan view of the mask frame of the embodiment.

Fig. 3 is an exploded partial perspective view of the mask frame of the embodiment.

Fig. 4(a) to 4(B) are a cross-sectional view and a plan view showing a fixing mechanism at one end side in the longitudinal direction of the embodiment.

Fig. 5(a) to 5(C) are sectional, plan, and bottom views showing the fixing mechanism on the other end side in the longitudinal direction of the above embodiment.

Fig. 6(a) to 6(C) are views showing the operation of each frame element when the opening size of the opening portion of the above embodiment is adjusted.

Fig. 7(a) to 7(C) are views showing the operation of each frame element during thermal expansion absorption according to the above embodiment.

Fig. 8 is a cross-sectional view schematically showing the structure of a vacuum processing apparatus according to a modified embodiment.

Fig. 9 is a partial perspective view and a sectional view of a mask frame according to a modified embodiment.

Fig. 10 is a plan view of a mask frame of a modified embodiment.

Fig. 11 is a plan view showing end portions of adjoining frame elements of a modified embodiment.

Fig. 12 is a top view of a conventional mask frame.

Description of the symbols

2: processing container

3: sputtering electrode

4: target material

5: substrate support part

6: power supply unit

7: sealing member

8: mask frame

8X: opening part

9: sliding guide rail mechanism

10a, 10 b: fixing mechanism

11: fastening bolt

12: internal screw hole

13: nut

21: gas introduction part

22: exhaust part

51: support pin

52: driving part

81a to 81 d: frame element

81h1, 81h2, 82 h: plug-in hole

82: supporting member

100: vacuum processing apparatus

111: head part

112: shoulder part

811. 812: side part of opening part

811 x: inclined plane of No. 1

813. 814: an end edge part at one end side in the length direction

813 x: 2 nd inclined plane

821: countersink

H: amount of elongation

LD: longitudinal directions of frame members 81a to 81d

G. S: gap

SD: direction of sliding

W: substrate

X1-X4: frame element

θ 1, θ 2: inclination angle

Detailed Description

Hereinafter, an embodiment of a vacuum processing apparatus using a mask frame according to the present invention will be described with reference to the drawings.

The vacuum processing apparatus 100 of the present embodiment is a sputtering apparatus that sputters a target (target) with ions in plasma to form a thin film on a rectangular substrate.

Specifically, as shown in fig. 1, the vacuum processing apparatus 100 includes a processing chamber 2 for evacuating the inside thereof to form a vacuum, a sputtering electrode 3 provided in the processing chamber 2 so as to be electrically insulated from the processing chamber 2, a target 4 attached so as to be electrically connected to the sputtering electrode 3, and a substrate support portion 5 for supporting a substrate W in a state facing the target 4.

The processing chamber 2 is provided with a gas introduction portion 21, and a discharge gas is introduced from the gas introduction portion 21. The discharge gas is, for example, an inert gas such as argon. An exhaust unit 22 for evacuating the inside of the processing container 2 to form a vacuum is provided, and a vacuum pump, not shown, is connected to the exhaust unit 22.

The sputtering electrode 3 is connected to a power supply unit 6, and high-frequency power is supplied from the power supply unit 6.

The substrate support portion 5 is configured to be capable of adjusting the position of the substrate W with respect to the target 4, and in the present embodiment, includes a plurality of support pins 51 and a drive portion 52 for moving the support pins 51 up and down. Further, the space between the substrate support portion 5 and the processing container 2 is shielded by a seal (seal) member 7 such as a bellows (bellows). Further, the processing container 2 and the substrate support portion 5 are electrically grounded.

When a discharge gas is introduced from the gas introduction portion 21 and a high-frequency power is supplied to the sputtering electrode 3 by the power supply portion 6, a high-frequency discharge is generated from the sputtering electrode 3. The high-frequency discharge ionizes a discharge gas to generate plasma. The ions in the plasma sputter the target 4, and sputter particles ejected from the target 4 are incident on the substrate W and deposited thereon, thereby forming a thin film on the substrate W. Further, the vacuum processing apparatus 100 may supply a dc power to the sputtering electrode 3 by the power supply unit 6, and generate plasma by a dc discharge generated from the sputtering electrode 3.

However, as shown in fig. 1 and 2, the vacuum processing apparatus 100 of the present embodiment includes a mask frame 8 for masking the peripheral edge portion of the substrate W from the target 4.

As shown in fig. 2 in particular, the mask frame 8 has a rectangular opening 8X, and includes 4 frame elements 81a to 81d each having a longitudinal direction corresponding to each of four sides of the opening 8X, and a support member 82 supporting the 4 frame elements 81a to 81 d.

Further, the opening 8X formed by the 4 frame members 81a to 81d is set smaller than the rectangular substrate size. The support member 82 of the present embodiment is provided in the processing container 2, and has a rectangular frame shape having a rectangular opening 82X larger than the size of a rectangular substrate. And, 4 frame elements 81a to 81d are fixed to the upper surface of the support member 82.

Each of the frame elements 81a to 81d has an elongated shape (rectangular shape) in plan view, and includes a pair of

side portions

811 and 812 extending in the longitudinal direction, and a pair of

end portions

813 and 814 extending in the direction orthogonal to the longitudinal direction. In the present embodiment, the pair of

side portions

811 and 812, and the pair of

end portions

813 and 814 are all linear in plan view. The frame elements 81a to 81d have a rectangular cross-sectional shape perpendicular to the longitudinal direction.

These 4 frame elements 81a to 81d are arranged in a rectangular ring shape so as to form each side of the opening 8X. Specifically, the 4 frame elements 81a to 81d are arranged such that an end portion 813 (hereinafter, referred to as an end portion 813) at one end side in the longitudinal direction of each of the frame elements 81a to 81d and an opening portion side portion 811 in the longitudinal direction of the frame element 81a to 81d adjacent to the end portion 813 face each other.

In the present embodiment, the one end side portion 813 of each of the frame elements 81a to 81d and the opening portion side portion 811 of the adjacent frame element 81a to 81d are disposed without a gap in a plan view by being in contact with each other. Specifically, the side surface of the one end side portion 813 is in surface contact with the side surface of the opening portion side portion 811.

The 4 frame members 81a to 81d arranged as described above are slidably provided in respective sliding directions inclined with respect to the respective longitudinal directions in a plan view. The opening size of the opening 8X can be changed by sliding the 4 frame elements 81a to 81 d.

Specifically, among the frame elements 81a to 81d adjacent to each other, the sum of the inclination angle in the sliding direction of one of the frame elements (for example, 81a) and the inclination angle in the sliding direction of the other frame element (for example, 81b) is set to 90 degrees. In the present embodiment, the inclination angle in the sliding direction of each of the frame elements 81a to 81d is set to 45 degrees.

As shown in fig. 2, the mask frame 8 includes a slide rail mechanism 9 for moving the 4 frame members 81a to 81d in the sliding direction. The slide rail mechanism 9 of the present embodiment is slidable in a sliding direction inclined at 45 degrees with respect to the longitudinal direction thereof in a plan view.

Specifically, the slide rail mechanisms 9 are provided on one end side in the longitudinal direction and the other end side in the longitudinal direction of each of the frame elements 81a to 81d, respectively. The slide rail mechanism 9 of the present embodiment is configured by using a fixing mechanism 10a and a fixing mechanism 10b, and the fixing mechanism 10a and the fixing mechanism 10b fix the frame elements 81a to 81d to the support member 82 at one end side in the longitudinal direction and the other end side in the longitudinal direction, respectively.

As shown in fig. 3 and 4(a) to 4(B), the fixing mechanism 10a on the one longitudinal end side is configured to fix the one longitudinal end sides of the frame elements 81a to 81d by inserting fastening bolts 11 as fastening members into one longitudinal end insertion holes 81h1 formed in the frame elements 81a to 81d and screwing the fastening bolts into internal screw holes 12 formed in the support member 82. Here, the one-end-side insertion hole 81h1 formed in the frame members 81a to 81d is provided as an inclined long hole extending in the sliding direction (symbol SD in fig. 4 (B)) of the frame members 81a to 81 d. In fig. 4(B), reference symbol LD denotes the longitudinal direction of the frame elements 81a to 81 d.

In the above configuration, the frame elements 81a to 81d are fixed at one longitudinal end sides thereof in a state where the fastening bolt 11 is fastened, that is, in a state where the frame elements 81a to 81d are sandwiched between the head 111 of the fastening bolt 11 and the support member 82. On the other hand, in a state where the fastening bolt 11 is loosened, that is, in a state where the head 111 of the fastening bolt 11 is separated from the frame elements 81a to 81d, the frame elements 81a to 81d are slidable in the sliding direction with respect to the fastening bolt 11. As described above, the slide rail mechanism 9 is configured by the fastening bolt 11 and the one-end-side insertion hole 81h 1. That is, the fastening bolt 11 serves as a fixed portion provided on the support member 82, and the one end side insertion hole 81h1 serves as a sliding portion that slides with respect to the fixed portion.

As shown in fig. 3 and 5(a) to 5(C), the fixing mechanism 10b on the other longitudinal end side is configured to fix the other longitudinal end sides of the frame elements 81a to 81d by inserting the fastening bolt 11 through the other longitudinal end side insertion hole 81h2 formed in the other longitudinal end sides of the frame elements 81a to 81d and the insertion hole 82h formed in the support member 82 and screwing the fastening bolt to the nut 13 provided on the back surface of the support member 82. Here, reference symbol LD in fig. 5(B) to 5(C) represents the longitudinal direction of the frame elements 81a to 81d, and reference symbol SD represents the sliding direction of the frame elements 81a to 81 d. Here, a counter bore 821 for accommodating the nut 13 is formed in the back surface of the support member 82. The insertion hole 82h formed in the support member 82 is an inclined long hole extending in the sliding direction of the frame elements 81a to 81 d. The spot-facing 821 is also formed as an inclined long hole extending in the sliding direction together with the insertion hole 82 h.

In the above configuration, the other end sides in the longitudinal direction of the frame elements 81a to 81d are fixed in a state where the fastening bolt 11 is fastened, that is, in a state where the frame elements 81a to 81d and the support member 82 are sandwiched between the head 111 of the fastening bolt 11 and the nut 13. On the other hand, in a state where the fastening bolt 11 is loosened, that is, in a state where the head 111 and the nut 13 of the fastening bolt 11 do not sandwich the frame elements 81a to 81d and the support member 82, the fastening bolt 11 inserted into the other-end-side insertion hole 81h2 of the frame elements 81a to 81d is slidable in the sliding direction with respect to the support member 82. As described above, the slide rail mechanism 9 is configured by the fastening bolt 11, the other end side insertion hole 81h2, and the spot facing 821. That is, the other end side insertion hole 81h2 and the spot facing 821 serve as a fixed portion provided in the support member 82, and the fastening bolt 11 serves as a sliding portion that slides with respect to the fixed portion.

In the present embodiment, each of the frame elements 81a to 81d is configured to fix one end portion in the longitudinal direction and to be movable to the other end side in the longitudinal direction by thermal expansion with the one end portion in the longitudinal direction as a starting point.

Specifically, as shown in fig. 3 and 5(a) to 5(C), the other-end side insertion holes 81h2 of the frame elements 81a to 81d are long holes extending in the longitudinal direction. The fastening bolt 11 of the fixing mechanism 10b on the other longitudinal end side is configured to have a gap S between the lower surface of the head 111 and the upper surfaces of the frame elements 81a to 81d in a state where the other longitudinal end sides of the frame elements 81a to 81d are fixed. Further, even if the gap S is provided, one end side in the longitudinal direction is fastened by the fastening bolt 11, and therefore, the other end side in the longitudinal direction is fixed so as not to move in the direction orthogonal to the longitudinal direction.

Specifically, as shown in fig. 5(a) to 5(C), the fastening bolt 11 of the fixing mechanism 10b is a shoulder bolt, and is screwed to the nut 13, and a gap S is formed between the lower surface of the head 111 and the upper surfaces of the frame elements 81a to 81d in a state where the support member 82 is fastened between the shoulder 112 of the fastening bolt 11 and the nut 13, that is, in a state where the fastening bolt 11 is fixed to the support member 82.

With this configuration, even when the frame members 81a to 81d extend in the longitudinal direction due to thermal expansion, the other-end side insertion holes 81h2, which are the long holes of the frame members 81a to 81d, can move relative to the fastening bolts 11 in the longitudinal direction.

Next, adjustment of the opening size of the opening 8X of the mask frame 8 configured as described above will be described with reference to fig. 6(a) to 6 (C).

Fig. 6(a) is a diagram showing a case where the opening size of the opening 8X is the maximum.

In this state, the fastening bolt 11 is positioned on the innermost side of the insertion hole 81h1 of the frame elements 81a to 81d in the fixing mechanism 10a (slide rail mechanism 9) on the one end side in the longitudinal direction. In the fixing mechanism 10b (slide rail mechanism 9) on the other end side in the longitudinal direction, the fastening bolt 11 and the nut 13 are positioned on the outermost side of the insertion hole 81h2 and the spot-facing 821 of the support member 82. Further, one end side portion 813 of each of the frame members 81a to 81d is in contact with the opening portion side portion 811 of the adjacent frame member 81a to 81 d.

When the opening size of the opening portion 8X is reduced from the above state, the fastening bolts 11 on the one end side and the other end side in the longitudinal direction of the frame members 81a to 81d are loosened. And, the frame members 81a to 81d are moved to the inside in the sliding direction. At this time, the frame members 81a to 81d move while maintaining a contact state (fig. 6B). Here, when 1 frame member (for example, the frame member 81a) is slid, the adjoining ends of the 4 frame members 81a to 81d are in contact with each other, so that the remaining 3 frame members (for example, the frame members 81b to 81d) are also slid in conjunction. Furthermore, more than 2 frame elements can be operated simultaneously to make them slide.

The 4 frame members 81a to 81d are moved as described above, the positions are adjusted to the optimum positions, and the fastening bolts 11 are fastened and fixed.

Fig. 6(C) is a view showing a case where the opening size of the opening 8X is the smallest.

In this state, the fastening bolt 11 is positioned on the outermost side of the insertion hole 81h1 of the frame elements 81a to 81d in the fixing mechanism 10a (slide rail mechanism 9) on the one end side in the longitudinal direction. In the fixing mechanism 10b (slide rail mechanism 9) on the other end side in the longitudinal direction, the fastening bolt 11 and the nut 13 are positioned on the innermost side of the insertion hole 81h2 and the spot-facing 821 of the support member 82. Further, one end side portion 813 of each of the frame members 81a to 81d is in contact with the opening portion side portion 811 of the adjacent frame member 81a to 81 d.

Next, the thermal expansion absorption of the frame elements 81a to 81d will be described with reference to fig. 7(a) to 7 (C).

Fig. 7 a is a diagram showing a state in which thermal expansion does not occur (for example, before a film formation process).

In this state, the fastening bolt 11 of the fixing mechanism 10b on the other longitudinal end side is positioned at the other longitudinal end of the insertion hole 81h2 of the frame members 81a to 81 d.

When the frame members 81a to 81d thermally expand after the start of the treatment, the frame members 81a to 81d extend to the other end side in the longitudinal direction from the fixing mechanism 10a (fastening portion) on one end side in the longitudinal direction of the frame members 81a to 81d (fig. 7B and 7C). Then, the other end side insertion holes 81H2 of the frame elements 81a to 81d move relative to the fastening bolts 11 fixed to the support member 82 to absorb the extension amount H thereof. Further, since the frame elements 81a to 81d are arranged as in the present embodiment, the opening size does not change even if the frame elements 81a to 81d extend in the longitudinal direction.

The absorption limit of the extension amount H depends on the length in the longitudinal direction of the other-end side insertion hole 81H2 of the frame elements 81a to 81d (fig. 7C), and therefore the length of the other-end side insertion hole 81H2 needs to be determined based on the extension amount H assumed in advance.

< effects of the present embodiment >

According to the vacuum processing apparatus 100 configured as described above, the one end side portion 813 of each of the frame members 81a to 81d is disposed to face the opening portion side portion 811 of the adjacent frame member 81a to 81d, and therefore, even if the opening size is changed, the contact relationship between the one end side portion 813 of each of the frame members 81a to 81d and the opening portion side portion 811 of the adjacent frame member 81a to 81d can be maintained. Therefore, the following configuration is possible: no special member for filling the gap is required to be provided on the frame elements 81a to 81d adjacent to each other, and even if the opening size is changed, no gap is generated between the frame elements 81a to 81d in a plan view.

Since the slide rail mechanism 9 is provided between each of the frame elements 81a to 81d and the support member 82, each of the frame elements 81a to 81d can be easily slid. When 1 frame element 81a is moved, the other frame elements 81b to 81d can be moved in conjunction with the movement, and the opening size can be easily changed. Here, since the slide rail mechanisms 9 are provided at two locations in the longitudinal direction, the sliding movement is easily performed while keeping the postures of the frame elements 81a to 81d, and when the plurality of frame elements 81a to 81d are moved in conjunction, the frame elements can be moved stably.

Since the sum of the inclination angles of the sliding directions of the frame elements 81a to 81d adjacent to each other with respect to the longitudinal directions thereof is 90 degrees, the opening size can be changed in a state where the one end side portion 813 of each of the frame elements 81b to 81d is in contact with the opening portion side portion 811 of the adjacent frame element 81b to 81 d. Here, the sliding direction is 45 degrees, and the aspect ratio of the opening shape can be maintained before and after the change of the opening size.

In the present embodiment, the fastening bolts 11 of the fixing

mechanisms

10a and 10b also serve as the slide rail mechanism 9, and thus the structure of the mask frame 8 can be simplified. Further, the fastening bolt 11 may be fastened after the opening size is adjusted, and the operation from the adjustment of the opening size to the fixing of the frame elements 81a to 81d can be easily performed.

Further, since each of the frame elements 81a to 81d is configured to fix one end portion in the longitudinal direction and to be movable to the other end side in the longitudinal direction by thermal expansion with the one end portion in the longitudinal direction as a starting point, it is possible to eliminate unevenness of processing caused by flexure due to thermal expansion of the frame elements 81a to 81d, and it is possible to improve uniformity of processing.

The present invention is not limited to the above embodiments.

For example, in the above-described embodiment, the cross section of each of the frame elements 81a to 81d orthogonal to the longitudinal direction is rectangular, but as shown in fig. 8 and 9, the upper surface of the opening portion side portion 811 of the frame elements 81a to 81d may include a 1 st inclined surface 811X having a downward inclination toward the opening portion 8X side, and one end side portion 813 of the frame elements 81a to 81d may include a 2 nd inclined surface 813X corresponding to the 1 st inclined surface 811X.

In the above embodiment, the side surface of the one end side portion 813 is a plane perpendicular to the upper surface, and the side surface of the opening portion side portion 811 is also a plane perpendicular to the upper surface, but may be, for example, a curved surface or a curved surface as long as the one end side portion 813 is in contact with the opening portion side portion 811 without a gap in a plan view.

In the above embodiment, the frame elements 81a to 81d have the same shape, but the remaining two sides are not limited to the linear shape as long as the frame elements include the linear opening side portion 811 and the linear one end side portion 813 facing the opening side portion.

In the above embodiment, the mask frame has a square shape in plan view, but may have a rectangular shape as shown in fig. 10.

In the embodiment, the inclination angles in the sliding direction of all the frame members are 45 degrees, but as shown in fig. 11, in the mutually adjacent frame members, the inclination angle θ 1 in the sliding direction SD of one of the frame members is set to 60 degrees, and the inclination angle θ 2 in the sliding direction SD of the other frame member is set to 30 degrees. As described above, as long as the relationship of θ 1+ θ 2 being 90 degrees is satisfied, the specific angles of θ 1 and θ 2 are not limited to the above embodiment.

In the above embodiment, the fixing mechanism 10a and the fixing mechanism 10b are configured to be the slide rail mechanism 9 as well, but these mechanisms may be provided separately. At this time, the slide rail mechanism 9 includes a fixed portion provided on one of the frame element or the support member, and a sliding portion provided on the other of the frame element or the support member and sliding in a sliding direction with respect to the fixed portion.

The fixing mechanism of the above embodiment has a different configuration at one end side in the longitudinal direction and the other end side in the longitudinal direction, but both may have the same configuration.

Further, although the fixing mechanism of the above-described embodiment uses a fastening bolt, a pin having a shaft portion and a head portion provided so as to penetrate the frame element and the support member, and a stopper ring fitted to the shaft portion of the pin and sandwiching the frame element and the support member with the head portion may be used. Further, the fixing mechanism may use a clamp (clamp) member that integrally clamps and fixes the frame element and the support member.

In the above embodiment, the vacuum processing apparatus is exemplified by a sputtering apparatus, and the present invention is also applicable to a vacuum processing apparatus using plasma, such as a Chemical Vapor Deposition (CVD) apparatus.

The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the invention.

Claims

1. A mask frame has a rectangular opening portion

The method comprises the following steps: 4 frame elements having a length direction corresponding to each of four sides of the opening portion; and is

An end edge portion on one end side in the longitudinal direction of each of the frame elements and an opening portion side portion in the longitudinal direction of the frame element adjacent to the end edge portion are disposed so as to face each other,

the 4 frame members are slidably provided in respective sliding directions inclined with respect to the respective longitudinal directions in a plan view,

the mask frame is constituted by changing the opening size of the opening by sliding the 4 frame members,

and the mask frame further comprises a support member supporting the frame element, wherein the frame element is fixed to the support member by a fastening member,

a sliding guide mechanism capable of sliding the frame element is arranged between the frame element and the support member,

either one of an insertion hole of the frame element inserted through the fastening member or an insertion hole of the support member is an inclined long hole in the sliding direction,

the slide rail mechanism is configured by the fastening member and the insertion hole formed as the inclined long hole.

2. The mask frame according to claim 1, wherein the 4 frame elements are slidably disposed in a sliding direction inclined by 45 degrees with respect to the respective length directions in a plan view.

3. The mask frame according to claim 1 or 2, wherein the slide rail mechanisms are provided at the one end side in the length direction and the other end side in the length direction of the frame member, respectively.

4. The mask frame according to claim 1 or 2, wherein

The upper surface of the opening portion side edge portion of the frame member includes a 1 st inclined surface having a downward inclination toward the opening portion side,

the end edge portion of the frame member includes a 2 nd inclined surface corresponding to the 1 st inclined surface.

5. The mask frame according to claim 1 or 2, wherein the frame member is configured in such a manner that the one longitudinal end portion is fixed and can be moved to the other longitudinal end side in the longitudinal direction by thermal expansion with the one longitudinal end portion as a starting point.

6. The mask frame of claim 5, wherein

An insertion hole through which a fastening member is inserted is formed at the other end side in the longitudinal direction of the frame element,

the fastening member has a head portion that is,

the insertion hole is a long hole along the length direction,

the fastening member fixes the other end side in the longitudinal direction with a gap between the head portion and the upper surface of the frame element.

7. A vacuum processing apparatus comprising the mask frame according to any one of claims 1 to 6.