WO2017163878A1 - Mask frame and vacuum processing device - Google Patents

Mask frame and vacuum processing device Download PDF

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Publication number
WO2017163878A1
WO2017163878A1 PCT/JP2017/009243 JP2017009243W WO2017163878A1 WO 2017163878 A1 WO2017163878 A1 WO 2017163878A1 JP 2017009243 W JP2017009243 W JP 2017009243W WO 2017163878 A1 WO2017163878 A1 WO 2017163878A1
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WO
WIPO (PCT)
Prior art keywords
frame
longitudinal direction
frame element
end side
opening
Prior art date
Application number
PCT/JP2017/009243
Other languages
French (fr)
Japanese (ja)
Inventor
李　東偉
Original Assignee
日新電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新電機株式会社 filed Critical 日新電機株式会社
Priority to CN201780019206.0A priority Critical patent/CN109072403B/en
Publication of WO2017163878A1 publication Critical patent/WO2017163878A1/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks

Definitions

  • the present invention relates to a mask frame for controlling a processing range for a substrate and a vacuum processing apparatus using the mask frame.
  • Patent Document 1 a mask body that masks a peripheral portion of a substrate to control a film forming range on the substrate, a mask body mounting plate to which the mask body is fixed, There is something with.
  • this mask body is composed of four strip-shaped frame elements (mask element bodies) X1 to X4 divided corresponding to the sides of the opening.
  • the mask body includes two frame elements X1 and X2 (left and right frame elements in FIG. 12) that face each other, and two frame elements X3 that are arranged orthogonal to these frame elements X1 and X2 and face each other. , X4 (upper and lower frame elements in FIG. 12). Further, both end portions of the left and right frame elements X1 and X2 facing each other are disposed so as to abut on the upper and lower frame elements X3 and X4 facing each other.
  • the frame elements X1 to X4 are fixed to the mask body mounting plate in a mounting state in which the position can be individually changed.
  • the frame element is configured such that the position of the frame element can be changed in a direction orthogonal to the longitudinal direction of the frame element by an adjustment screw provided on the mask body mounting plate.
  • the four frame elements X1 to X4 move in the direction orthogonal to the respective longitudinal directions. Therefore, after changing the opening size (after changing the film formation region), between the end portions of the frame elements. A gap G is generated. If it does so, there exists a problem that the film
  • an adhesion preventing plate is provided at an end of one frame element, and a guide step portion that can receive the adhesion preventing plate is provided at an end of the other frame element. It is configured to fill G.
  • the present invention has been made to solve the above-described problems, and even if the opening size is changed without providing a special member for filling the gap at the end of each frame element, the frame elements can be arranged between the frame elements.
  • the main problem is to improve the uniformity of substrate processing as a configuration in which no gap is generated.
  • the mask frame according to the present invention is a mask frame having a rectangular opening, and includes four frame elements having longitudinal directions corresponding to the four sides of the opening, and the longitudinal direction of each frame element.
  • An end side on one end side and an opening side side along the longitudinal direction of the frame element adjacent to the end side are arranged to face each other, and the four frame elements are respectively in plan view. It is provided so as to be slidable in respective sliding directions inclined with respect to the longitudinal direction, and the opening size of the opening can be changed by sliding the four frame elements.
  • the end portion on one end side in the longitudinal direction of each frame element and the opening side portion along the longitudinal direction of the frame element adjacent to the end side portion are arranged to face each other. Therefore, even if the opening size is changed, the positional relationship between the edge part on one end side in the longitudinal direction of each frame element and the side part on the opening part along the longitudinal direction of the frame element adjacent to the edge part. Can be maintained. Therefore, even if the opening size is changed without providing a special member for filling the gap between adjacent frame elements, the gap between the frame elements does not occur in plan view. Specifically, while maintaining the state in which the end portion on one end side in the longitudinal direction of each frame element is in contact with or close to the opening side portion along the longitudinal direction of the frame element adjacent to the end portion. The opening size can be changed.
  • the frame elements adjacent to each other are set so that the sum of the inclination angle of one frame element in the sliding direction and the inclination angle of the other frame element in the sliding direction is 90 degrees. . If this configuration, without changing the positional relationship between the end side portion of each frame element in the longitudinal direction on one end side and the opening side portion along the longitudinal direction of the frame element adjacent to the end side portion, The opening size can be changed by sliding the four frame elements.
  • the four frame elements are preferably provided so as to be slidable in directions inclined by 45 degrees with respect to the respective longitudinal directions in plan view. With this configuration, the aspect ratio of the opening shape can be maintained before and after the opening size is changed.
  • a support member that supports the four frame elements is provided, and a slide guide mechanism that allows the frame element to slide is provided between the frame element and the support member.
  • a slide guide mechanism that allows the frame element to slide is provided between the frame element and the support member.
  • the slide guide mechanism is preferably provided on one end side in the longitudinal direction and the other end side in the longitudinal direction of the frame element.
  • the slide guide mechanisms are provided on one end side and the other end side in the longitudinal direction of the frame element, respectively, so that the slide movement with the posture of the frame element maintained is facilitated.
  • the effect of this configuration becomes more prominent as the frame element becomes longer. Further, when a plurality of frame elements are moved in conjunction with each other, they can be moved stably.
  • the frame element is fixed to the support member by a fastening member, and either the insertion hole of the frame element through which the fastening member is inserted or the insertion hole of the support member extends along the slide direction.
  • the slide guide mechanism is configured by the insertion member formed as the inclined long hole and the fastening member and the inclined long hole. If it is this structure, a fastening member will serve as a slide guide mechanism, and the structure of a mask frame can be simplified. Further, it is only necessary to fasten the fastening member after adjusting the opening size, and the operations from the adjustment of the opening size to the fixing of the frame element can be facilitated.
  • the opening side of the frame element has a first inclined surface whose upper surface has a downward slope toward the opening, and the end side of the frame element has the first inclined surface. It is desirable to have the 2nd inclined surface corresponding to. With this configuration, by providing the first inclined surface on each frame element, it is possible to eliminate non-uniform processing on the substrate located near the mask frame. Moreover, since the edge part of a frame element has a 2nd inclined surface, the clearance gap between adjacent frames can be filled with a simple structure reliably.
  • the frame element is configured such that one end in the longitudinal direction is fixed and movement by thermal expansion is possible along the longitudinal direction from the one end in the longitudinal direction to the other end in the longitudinal direction. desirable. If it is this structure, the nonuniformity of the process by the bending which a flame
  • An insertion hole through which a fastening member is inserted is formed on the other longitudinal end side of the frame element, the fastening member has a head, and the insertion hole is a long hole along the longitudinal direction,
  • the fastening member is preferably a member that fixes the other end in the longitudinal direction with a gap between the head and the upper surface of the frame element.
  • the gap between the frame elements is not changed.
  • the uniformity of substrate processing can be improved.
  • the vacuum processing apparatus 100 of the present embodiment is a sputtering apparatus that forms a thin film on a rectangular substrate by sputtering a target with ions in plasma.
  • the vacuum processing apparatus 100 includes a processing container 2 whose inside is evacuated to a vacuum, and a sputtering electrode that is electrically insulated from the processing container 2 in the processing container 2. 3, a target 4 that is electrically connected to the sputter electrode 3, and a substrate support 5 that supports the substrate W in a state of facing the target 4.
  • the soot treatment container 2 is provided with a gas introduction part 21 from which a discharge gas is introduced.
  • the discharge gas is an inert gas such as argon gas.
  • the processing container 2 is provided with an exhaust part 22 for exhausting the inside to a vacuum, and a vacuum pump (not shown) is connected to the exhaust part 22.
  • a power source 6 is connected to the sputter electrode 3, and high frequency power is supplied from the power source 6.
  • the substrate support unit 5 is configured to be able to adjust the position of the substrate W with respect to the target 4.
  • the substrate support unit 5 includes a plurality of support pins 51 and a drive unit 52 that moves the support pins 51 up and down. Yes.
  • the substrate support 5 and the processing container 2 are shielded by a seal member 7 such as a bellows.
  • the processing container 2 and the substrate support part 5 are electrically grounded.
  • the vacuum processing apparatus 100 may supply DC power to the sputtering electrode 3 from the power supply unit 6 and generate plasma by DC discharge generated from the sputtering electrode 3.
  • the vacuum processing apparatus 100 of this embodiment includes a mask frame 8 that masks the peripheral edge of the substrate W from the target 4 as shown in FIGS. 1 and 2.
  • the mask frame 8 has a rectangular opening 8X, and four frame elements 81a to 81d having longitudinal directions corresponding to the four sides of the opening 8X, And a support member 82 that supports the four frame elements 81a to 81d.
  • the opening 8X formed by the four frame elements 81a to 81d is set smaller than the rectangular substrate size.
  • the support member 82 according to the present embodiment is provided in the processing container 2 and has a rectangular frame shape having a rectangular opening 82X larger than the rectangular substrate size.
  • the four frame elements 81a to 81d are fixed to the upper surface of the support member 82.
  • Each of the frame elements 81a to 81d has a long shape (rectangular shape) in plan view, and a pair of side portions 811 and 812 along the longitudinal direction and a pair of sides along the direction orthogonal to the longitudinal direction. And end sides 813 and 814.
  • the pair of side portions 811 and 812 and the pair of end sides 813 and 814 are both linear in a plan view.
  • the cross-sectional shape orthogonal to the longitudinal direction of each frame element 81a to 81d is a rectangular shape.
  • the four frame elements 81a to 81d are arranged in a rectangular ring shape so as to form each side of the opening 8X. Specifically, the four frame elements 81a to 81d are adjacent to one end side 813 (hereinafter referred to as one end side 813) on one end side in the longitudinal direction of each frame element 81a to 81d and the one end side 813.
  • the opening side edges 811 along the longitudinal direction of the frame elements 81a to 81d are arranged so as to face each other.
  • one end side 813 of each frame element 81a to 81d and the opening side part 811 of the adjacent frame elements 81a to 81d are in contact with each other, so that they are arranged without a gap in plan view. ing. Specifically, the side surface of the one end side portion 813 and the side surface of the opening side portion 811 are in surface contact.
  • the four frame elements 81a to 81d arranged in this way are provided so as to be slidable in the respective sliding directions inclined with respect to the respective longitudinal directions in plan view.
  • the opening size of the opening 8X can be changed by sliding the four frame elements 81a to 81d.
  • the sum of the inclination angle in the sliding direction of one frame element (for example, 81a) and the inclination angle in the sliding direction of the other frame element (for example, 81b) is 90.
  • the inclination angle of each frame element 81a to 81d in the sliding direction is 45 degrees.
  • the mask frame 8 has a slide guide mechanism 9 for moving each of the four frame elements 81a to 81d along the slide direction.
  • the slide guide mechanism 9 of the present embodiment is slidable in a sliding direction inclined by 45 degrees with respect to each longitudinal direction in plan view.
  • the slide guide mechanism 9 is provided on each of one end in the longitudinal direction and the other end in the longitudinal direction of each of the frame elements 81a to 81d.
  • the slide guide mechanism 9 of the present embodiment is configured using fixing mechanisms 10a and 10b that fix the frame elements 81a to 81d to the support member 82 at one end in the longitudinal direction and the other end in the longitudinal direction.
  • the fixing mechanism 10a on one end side in the longitudinal direction inserts a fastening bolt 11 as a fastening member into one end side insertion hole 81h1 formed on one end side in the longitudinal direction of the frame elements 81a to 81d.
  • the frame elements 81a to 81d are configured to be fixed at one end in the longitudinal direction by being screwed into the female screw hole 12 formed in the support member 82.
  • the one end side insertion holes 81h1 formed in the frame elements 81a to 81d are inclined long holes extending along the sliding direction (reference numeral SD in FIG. 4) of the frame elements 81a to 81d.
  • the symbol LD in FIG. 4 indicates the longitudinal direction of the frame elements 81a to 81d.
  • the slide guide mechanism 9 is comprised by the fastening bolt 11 and the one end side insertion hole 81h1. That is, the fastening bolt 11 is a fixed portion provided in the support member 82, and the one end side insertion hole 81h1 is a slide portion that slides relative to the fixed portion.
  • the fixing mechanism 10b on the other end side in the longitudinal direction is formed in the other end side insertion hole 81h2 formed on the other end side in the longitudinal direction of the frame elements 81a to 81d and the support member 82, as shown in FIGS.
  • the fastening bolts 11 are inserted into the insertion holes 82h and screwed into the nuts 12 provided on the back surface of the support member 82, whereby the other longitudinal ends of the frame elements 81a to 81d are fixed.
  • the symbol LD in FIG. 5 indicates the longitudinal direction of the frame elements 81a to 81d
  • the symbol SD indicates the sliding direction of the frame elements 81a to 81d.
  • a counterbore hole 821 for accommodating the nut 13 is formed on the back surface of the support member 82.
  • the insertion hole 82h formed in the support member 82 is an inclined long hole extending along the sliding direction of the frame elements 81a to 81d.
  • the counterbore hole 821 is also an inclined elongated hole extending along the sliding direction together with the insertion hole 82h.
  • the longitudinal direction of the frame elements 81a to 81d in a state where the fastening bolt 11 is tightened that is, in a state where the frame elements 81a to 81d and the support member 82 are sandwiched between the head 111 and the nut 13 of the fastening bolt 11.
  • the other end in the direction is fixed.
  • the fastening bolt 11 is loose, that is, in the state where the head 111 and the nut 13 of the fastening bolt 11 do not sandwich the frame elements 81a to 81d and the support member 82, the other end side insertion holes of the frame elements 81a to 81d.
  • the fastening bolt 11 inserted through 81 h 2 can slide in the sliding direction with respect to the support member 82.
  • the slide guide mechanism 9 is configured by the fastening bolt 11, the other end side insertion hole 81 h 2, and the counterbore hole 821. That is, the other end side insertion hole 81h2 and the counterbore hole 821 serve as a fixing portion provided in the support member 82, and the fastening bolt 11 serves as a sliding portion that slides relative to the fixing portion.
  • each frame element 81a to 81d is fixed at one end in the longitudinal direction, and can be moved by thermal expansion along the longitudinal direction from the one end in the longitudinal direction to the other end in the longitudinal direction. It is comprised so that it may become.
  • the other end side insertion holes 81h2 of the frame elements 81a to 81d are long holes along the longitudinal direction.
  • the fastening bolt 11 of the fixing mechanism 10b on the other end in the longitudinal direction is between the lower surface of the head 111 and the upper surfaces of the frame elements 81a to 81d in a state where the other end in the longitudinal direction of the frame elements 81a to 81d is fixed. It is comprised so that it may have the clearance gap S. In addition, even if it has the clearance gap S, since the longitudinal direction one end side is fastened with the fastening volt
  • the fastening bolt 11 of the fixing mechanism 10 b is a stepped bolt, and is screwed into the nut 13 to be supported between the stepped portion 112 of the stepped bolt 11 and the nut 13.
  • a gap S is formed between the lower surface of the head 111 and the upper surfaces of the frame elements 81a to 81d.
  • the other end side insertion hole 81h2 that is a long hole of the frame elements 81a to 81d is disposed in the longitudinal direction with respect to the fastening bolt 11. It can move relative.
  • FIG. 6A is a diagram illustrating a case where the opening size of the opening 8X is the maximum.
  • the fastening bolt 11 is located on the innermost side of the insertion hole 81h1 of the frame elements 81a to 81d.
  • the fixing mechanism 10b is located on the other end side in the longitudinal direction, the fastening bolt 11 and the nut 13 are located on the outermost side of the insertion hole 81h2 and the counterbore hole 821 of the support member 82.
  • one end side 813 of each frame element 81a to 81d is in contact with the opening side edge 811 of the adjacent frame element 81a to 81d.
  • the fastening bolts 11 on one end side and the other end side in the longitudinal direction of the frame elements 81a to 81d are loosened. Then, the frame elements 81a to 81d are moved inward along the sliding direction. At this time, the frame elements 81a to 81d move while maintaining the contacted state (FIG. 6B).
  • one frame element for example, the frame element 81a
  • adjacent ends of the four frame elements 81a to 81d are in contact with each other, so that the remaining three frame elements (for example, the frame element 81b) are in contact with each other.
  • -81d) also slides in conjunction with each other. Two or more frame elements can be simultaneously operated and slid.
  • FIG. 6C is a diagram showing a case where the opening size of the opening 8X is the smallest.
  • the fastening bolt 11 is located on the outermost side of the insertion hole 81h1 of the frame elements 81a to 81d.
  • the fixing mechanism 10b (slide guide mechanism 9) on the other end side in the longitudinal direction, the fastening bolt 11 and the nut 13 are located on the innermost side of the insertion hole 81h2 and the counterbore hole 821 of the support member 82.
  • one end side 813 of each frame element 81a to 81d is in contact with the opening side edge 811 of the adjacent frame element 81a to 81d.
  • FIG. 7A is a diagram illustrating a state where thermal expansion has not occurred (for example, before film formation).
  • the fastening bolt 11 of the fixing mechanism 10b at the other end in the longitudinal direction is located at the other end in the longitudinal direction of the insertion hole 81h2 of the frame elements 81a to 81d.
  • the frame elements 81a to 81d when the frame elements 81a to 81d are thermally expanded after the processing is started, the frame elements 81a to 81d extend to the other end in the longitudinal direction starting from the fixing mechanism 10a (fastening location) on the one end in the longitudinal direction of the frame elements 81a to 81d. (FIGS. 7B and 7C). Then, the other end side insertion holes 81h2 of the frame elements 81a to 81d move with respect to the fastening bolts 11 fixed to the support member 82, and the extension amount H is absorbed. Since each frame element 81a to 81d is arranged as in this embodiment, the opening size does not change even if each frame element 81a to 81d extends in the longitudinal direction.
  • the absorption limit of the extension amount H is determined by the length along the longitudinal direction of the other end side insertion hole 81h2 of the frame elements 81a to 81d (FIG. 7C), based on the expected extension amount H, It is necessary to determine the length of the other end side insertion hole 81h2.
  • the one end side portion 813 of each frame element 81a to 81d and the opening side portion 811 of the adjacent frame elements 81a to 81d are arranged to face each other. Even if the opening size is changed, the contact relationship between the one end side 813 of each of the frame elements 81a to 81d and the opening side side 811 of the adjacent frame elements 81a to 81d can be maintained. Therefore, even if the opening size is changed without providing a special member for filling the gap between the adjacent frame elements 81a to 81d, no gap is generated between the frame elements 81a to 81d in a plan view. can do.
  • the slide guide mechanism 9 is provided between the frame elements 81a to 81d and the support member 82, the slide movement of the frame elements 81a to 81d can be facilitated.
  • the other frame elements 81b to 81d can be moved in conjunction with the movement, and the opening size can be easily changed.
  • the slide guide mechanism 9 is provided at two locations in the longitudinal direction, the slide movement with the posture of the frame elements 81a to 81d being easy is facilitated, and the plurality of frame elements 81a to 81d are moved in conjunction with each other. Sometimes they can be moved stably.
  • the opening size can be changed in a state where the side portion 811 is in contact with the portion.
  • the sliding direction is 45 degrees, and the aspect ratio of the opening shape can be maintained before and after the opening size is changed.
  • the fastening bolts 11 of the fixing mechanisms 10a and 10b also serve as the slide guide mechanism 9. Therefore, the configuration of the mask frame 8 can be simplified. Further, it is only necessary to fasten the fastening bolt 11 after adjusting the opening size, and the operations from adjusting the opening size to fixing the frame elements 81a to 81d can be facilitated.
  • each frame element 81a to 81d is configured such that one end portion in the longitudinal direction is fixed and movement by thermal expansion is possible along the longitudinal direction from the one end portion in the longitudinal direction to the other end in the longitudinal direction. Therefore, the non-uniformity of processing due to the bending caused by the thermal expansion of the frame elements 81a to 81d can be eliminated, and the uniformity of the processing can be improved.
  • the present invention is not limited to the above embodiment.
  • the cross section orthogonal to the longitudinal direction of each frame element 81a to 81d is rectangular, but as shown in FIGS. 8 and 9, the opening side of the frame elements 81a to 81d is used.
  • the side 811 has a first inclined surface 811x whose upper surface has a downward slope toward the opening 8X, and one end side 813 of the frame elements 81a to 81d corresponds to the first inclined surface 811x. It may have the second inclined surface 813x.
  • the side surface of the one end side portion 813 is a plane perpendicular to the upper surface, and the side surface of the opening side portion 811 is also a plane perpendicular to the upper surface, but the one end side portion 813 is open in plan view.
  • a curved surface or a curved surface may be used as long as it is configured to contact the side portion 811 with no gap.
  • the frame elements 81a to 81d have the same shape.
  • the linear opening side portion 811 and the linear one end side portion 813 facing the opening side portion are provided. If it has, the remaining two sides are not limited to a linear shape.
  • the mask frame has a square shape in plan view, but may have a rectangular shape as shown in FIG.
  • the inclination angle of all the frame elements in the sliding direction is 45 degrees.
  • the inclination angle ⁇ 1 of one frame element in the sliding direction SD is The inclination angle ⁇ 2 of the other frame element in the sliding direction SD may be 30 degrees.
  • the specific angles of ⁇ 1 and ⁇ 2 are not limited to the above embodiment.
  • the fixing mechanisms 10a and 10b serve as the slide guide mechanism 9, but they may be provided separately.
  • the slide guide mechanism 9 is provided in one of the frame element or the support member and the other of the frame element or the support member, and slides along the slide direction with respect to the fixed part. And a slide portion.
  • the fixing mechanism of the above embodiment has a different configuration on one end side in the longitudinal direction and the other end side in the longitudinal direction, but both may have the same configuration.
  • the fixing mechanism of the embodiment uses a fastening bolt
  • the pin having a shaft portion and a head portion that are provided through the frame element and the support member and the shaft portion of the pin are fitted. Then, a retaining ring that sandwiches the frame element and the support member with the head may be used.
  • the fixing mechanism may use a clamp member that sandwiches and fixes the frame element and the support member integrally.
  • the sputtering apparatus has been described as an example of the vacuum processing apparatus.
  • the present invention can also be applied to a vacuum processing apparatus using plasma such as a CVD apparatus.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
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Abstract

The purpose of the invention is to provide a mask frame configured so that, without providing a special member for filling in gaps between the various frame elements, gaps do not occur between mutually adjacent frame elements even if the size of the opening of the mask frame is changed. The mask frame, which has a rectangular opening, is provided with four frame elements, which have longitudinal directions that correspond respectively to the four sides of the opening. The mask frame is configured so that: the end edge at one end of the longitudinal direction of each frame element is disposed facing the opening side edge, which runs along the longitudinal direction of the frame element that is adjacent to said end edge, without a gap in top view; the four frame elements are provided so as to be slidable in respective sliding directions that are inclined with respect to the respective longitudinal directions in top view; and the size of the opening can be changed by sliding the four frame elements.

Description

マスクフレーム及び真空処理装置Mask frame and vacuum processing apparatus
  本発明は、基板への処理範囲を制御するマスクフレーム及び当該マスクフレームを用いた真空処理装置に関するものである。 The present invention relates to a mask frame for controlling a processing range for a substrate and a vacuum processing apparatus using the mask frame.
  この種の真空処理装置としては、特許文献１に示すように、基板の周縁部をマスキングして基板上の成膜範囲を制御するマスク体と、このマスク体が固定されるマスク体取付板とを備えたものがある。 As this type of vacuum processing apparatus, as shown in Patent Document 1, a mask body that masks a peripheral portion of a substrate to control a film forming range on the substrate, a mask body mounting plate to which the mask body is fixed, There is something with.
  このマスク体は、図１２に示すように、開口部の各辺に対応して分割された帯状の４個のフレーム要素（マスク素体）Ｘ１～Ｘ４から構成されている。具体的にマスク体は、互いに対向する２つのフレーム要素Ｘ１、Ｘ２（図１２では左右のフレーム要素）と、それらのフレーム要素Ｘ１、Ｘ２に直交して配置されて互いに対向する２つのフレーム要素Ｘ３、Ｘ４（図１２では上下のフレーム要素）とを有している。また、互いに対向する左右のフレーム要素Ｘ１、Ｘ２の両端部それぞれが、互いに対向する上下のフレーム要素Ｘ３、Ｘ４に突き合わされて配置されている。 As shown in FIG. 12, this mask body is composed of four strip-shaped frame elements (mask element bodies) X1 to X4 divided corresponding to the sides of the opening. Specifically, the mask body includes two frame elements X1 and X2 (left and right frame elements in FIG. 12) that face each other, and two frame elements X3 that are arranged orthogonal to these frame elements X1 and X2 and face each other. , X4 (upper and lower frame elements in FIG. 12). Further, both end portions of the left and right frame elements X1 and X2 facing each other are disposed so as to abut on the upper and lower frame elements X3 and X4 facing each other.
  そして、各フレーム要素Ｘ１～Ｘ４は、個々に位置変更が可能な取付状態でマスク体取付板に固定されている。具体的にフレーム要素は、マスク体取付板に設けられた調整ねじによって、フレーム要素の長手方向に直交する方向に位置変更が可能となるように構成されている。 The frame elements X1 to X4 are fixed to the mask body mounting plate in a mounting state in which the position can be individually changed. Specifically, the frame element is configured such that the position of the frame element can be changed in a direction orthogonal to the longitudinal direction of the frame element by an adjustment screw provided on the mask body mounting plate.
特開平１０－６０６２４号公報Japanese Patent Laid-Open No. 10-60624
  上述したマスク体では、４つのフレーム要素Ｘ１～Ｘ４がそれぞれの長手方向に直交する方向に移動するため、開口サイズの変更後（成膜領域の変更後）において、各フレーム要素の端部間に隙間Ｇが生じてしまう。そうすると、成膜後の基板の四隅の膜が不均一になってしまうという問題がある。 In the mask body described above, the four frame elements X1 to X4 move in the direction orthogonal to the respective longitudinal directions. Therefore, after changing the opening size (after changing the film formation region), between the end portions of the frame elements. A gap G is generated. If it does so, there exists a problem that the film | membrane of the four corners of the board | substrate after film-forming will become non-uniform | heterogenous.
  また、上記の特許文献１では、一方のフレーム要素の端部に防着板を設け、他方のフレーム要素の端部に前記防着板を受け入れることができるガイド用段部を設けて、前記隙間Ｇを埋めるように構成している。 Further, in the above-mentioned Patent Document 1, an adhesion preventing plate is provided at an end of one frame element, and a guide step portion that can receive the adhesion preventing plate is provided at an end of the other frame element. It is configured to fill G.
  しかしながら、この構成であっても、フレーム要素の角部上面に凹部が形成されてしまうことから、成膜後の基板の四隅の膜が不均一になってしまうという問題がある。 However, even with this configuration, since the concave portions are formed on the upper surfaces of the corner portions of the frame element, there is a problem that the films at the four corners of the substrate after film formation become non-uniform.
  そこで本発明は、上記問題点を解決すべくなされたものであり、各フレーム要素の端部に隙間を埋めるための特別な部材を設けることなく、開口サイズを変更しても各フレーム要素間に隙間が生じない構成として、基板処理の均一性を向上することをその主たる課題とするものである。 Therefore, the present invention has been made to solve the above-described problems, and even if the opening size is changed without providing a special member for filling the gap at the end of each frame element, the frame elements can be arranged between the frame elements. The main problem is to improve the uniformity of substrate processing as a configuration in which no gap is generated.
  すなわち本発明に係るマスクフレームは、矩形状の開口部を有するマスクフレームであって、前記開口部の４辺それぞれに対応した長手方向を有する４つのフレーム要素を備え、前記各フレーム要素の長手方向一端側の端辺部と、当該端辺部に隣接するフレーム要素の長手方向に沿った開口部側辺部とが対向して配置されており、前記４つのフレーム要素が、平面視においてそれぞれの長手方向に対して傾斜したそれぞれのスライド方向にスライド移動可能に設けられており、前記４つのフレーム要素をスライド移動させることにより前記開口部の開口サイズが変更可能に構成されていることを特徴とする。 That is, the mask frame according to the present invention is a mask frame having a rectangular opening, and includes four frame elements having longitudinal directions corresponding to the four sides of the opening, and the longitudinal direction of each frame element. An end side on one end side and an opening side side along the longitudinal direction of the frame element adjacent to the end side are arranged to face each other, and the four frame elements are respectively in plan view. It is provided so as to be slidable in respective sliding directions inclined with respect to the longitudinal direction, and the opening size of the opening can be changed by sliding the four frame elements. To do.
  このようなマスクフレームであれば、各フレーム要素の長手方向一端側の端辺部と、当該端辺部に隣接するフレーム要素の長手方向に沿った開口部側辺部とが対向して配置されているので、開口サイズを変更しても、各フレーム要素の長手方向一端側の端辺部と、当該端辺部に隣接するフレーム要素の長手方向に沿った開口部側辺部との位置関係を維持することができる。したがって、互いに隣接するフレーム要素に隙間を埋めるための特別な部材を設けることなく、開口サイズを変更しても、各フレーム要素の間に平面視において隙間が生じない構成とすることができる。具体的には、各フレーム要素の長手方向一端側の端辺部と、当該端辺部に隣接するフレーム要素の長手方向に沿った開口部側辺部とが接触又は近接した状態を維持しつつ、開口サイズを変更することができる。 In the case of such a mask frame, the end portion on one end side in the longitudinal direction of each frame element and the opening side portion along the longitudinal direction of the frame element adjacent to the end side portion are arranged to face each other. Therefore, even if the opening size is changed, the positional relationship between the edge part on one end side in the longitudinal direction of each frame element and the side part on the opening part along the longitudinal direction of the frame element adjacent to the edge part. Can be maintained. Therefore, even if the opening size is changed without providing a special member for filling the gap between adjacent frame elements, the gap between the frame elements does not occur in plan view. Specifically, while maintaining the state in which the end portion on one end side in the longitudinal direction of each frame element is in contact with or close to the opening side portion along the longitudinal direction of the frame element adjacent to the end portion. The opening size can be changed.
  より詳細には、互いに隣接するフレーム要素において、一方のフレーム要素のスライド方向の傾斜角度と、他方のフレーム要素のスライド方向の傾斜角度との和が９０度となるように設定されることが望ましい。
  この構成であれば、各フレーム要素の長手方向一端側の端辺部と、当該端辺部に隣接するフレーム要素の長手方向に沿った開口部側辺部との位置関係を変化させることなく、４つのフレーム要素をスライド移動させることで開口サイズを変更することができる。 More specifically, it is desirable that the frame elements adjacent to each other are set so that the sum of the inclination angle of one frame element in the sliding direction and the inclination angle of the other frame element in the sliding direction is 90 degrees. .
If this configuration, without changing the positional relationship between the end side portion of each frame element in the longitudinal direction on one end side and the opening side portion along the longitudinal direction of the frame element adjacent to the end side portion, The opening size can be changed by sliding the four frame elements.
  前記４つのフレーム要素が、平面視においてそれぞれの長手方向に対して４５度傾斜した方向にスライド移動可能に設けられていることが望ましい。
  この構成であれば、開口サイズの変更前後において開口形状の縦横比を維持することができる。 The four frame elements are preferably provided so as to be slidable in directions inclined by 45 degrees with respect to the respective longitudinal directions in plan view.
With this configuration, the aspect ratio of the opening shape can be maintained before and after the opening size is changed.
  前記４つのフレーム要素を支持する支持部材を備え、前記フレーム要素及び前記支持部材の間に前記フレーム要素のスライド移動を可能にするスライドガイド機構が設けられていることが望ましい。
  この構成であれば、各フレーム要素のスライド移動を容易にすることができる。また、各フレーム要素の長手方向一端側の端辺部と、当該端辺部に隣接するフレーム要素の長手方向に沿った開口部側辺部とが接触する構成の場合には、１つのフレーム要素を移動させると、その移動に連動して、その他のフレーム要素を移動させることができ、開口サイズの変更を容易にすることができる。 It is desirable that a support member that supports the four frame elements is provided, and a slide guide mechanism that allows the frame element to slide is provided between the frame element and the support member.
With this configuration, the sliding movement of each frame element can be facilitated. In addition, in the case of a configuration in which the end side portion on one end side in the longitudinal direction of each frame element and the opening side portion along the longitudinal direction of the frame element adjacent to the end side portion are in contact, one frame element When is moved, the other frame elements can be moved in conjunction with the movement, and the opening size can be easily changed.
  前記スライドガイド機構は、前記フレーム要素の長手方向一端側及び長手方向他端側にそれぞれ設けられていることが望ましい。
  この構成であれば、スライドガイド機構がフレーム要素の長手方向一端側及び他端側にそれぞれ設けられているので、フレーム要素の姿勢を保ったままのスライド移動が容易となる。この構成はフレーム要素が長くなるほど、その効果が顕著となる。また、複数のフレーム要素を連動して移動させるときに、それらを安定して移動させることができる。 The slide guide mechanism is preferably provided on one end side in the longitudinal direction and the other end side in the longitudinal direction of the frame element.
With this configuration, the slide guide mechanisms are provided on one end side and the other end side in the longitudinal direction of the frame element, respectively, so that the slide movement with the posture of the frame element maintained is facilitated. The effect of this configuration becomes more prominent as the frame element becomes longer. Further, when a plurality of frame elements are moved in conjunction with each other, they can be moved stably.
  前記フレーム要素は、締結部材により前記支持部材に固定されるものであり、前記締結部材が挿通される前記フレーム要素の挿通孔又は前記支持部材の挿通孔の何れか一方が、前記スライド方向に沿った傾斜長孔であり、前記締結部材及び前記傾斜長孔とされた挿通孔により前記スライドガイド機構が構成されることが望ましい。
  この構成であれば、締結部材がスライドガイド機構を兼ねることになり、マスクフレームの構成を簡単にすることができる。また、開口サイズの調整後に締結部材を締結させるだけで良く、開口サイズの調整からフレーム要素の固定までの作業を容易にすることができる。 The frame element is fixed to the support member by a fastening member, and either the insertion hole of the frame element through which the fastening member is inserted or the insertion hole of the support member extends along the slide direction. It is desirable that the slide guide mechanism is configured by the insertion member formed as the inclined long hole and the fastening member and the inclined long hole.
If it is this structure, a fastening member will serve as a slide guide mechanism, and the structure of a mask frame can be simplified. Further, it is only necessary to fasten the fastening member after adjusting the opening size, and the operations from the adjustment of the opening size to the fixing of the frame element can be facilitated.
  前記フレーム要素の前記開口部側辺部は、その上面が開口部側に向かって下り勾配を有する第１傾斜面を有しており、前記フレーム要素の前記端辺部は、前記第１傾斜面に対応した第２傾斜面を有していることが望ましい。
  この構成であれば、各フレーム要素に第１傾斜面を設けることによって、マスクフレーム近傍に位置する基板への処理の不均一を解消することができる。また、フレーム要素の端辺部が第２傾斜面を有するので、隣接するフレーム間の隙間を簡単な構成により確実に埋めることができる。 The opening side of the frame element has a first inclined surface whose upper surface has a downward slope toward the opening, and the end side of the frame element has the first inclined surface. It is desirable to have the 2nd inclined surface corresponding to.
With this configuration, by providing the first inclined surface on each frame element, it is possible to eliminate non-uniform processing on the substrate located near the mask frame. Moreover, since the edge part of a frame element has a 2nd inclined surface, the clearance gap between adjacent frames can be filled with a simple structure reliably.
  前記フレーム要素は、長手方向一端部が固定されるとともに、当該長手方向一端部を起点として長手方向他端側に長手方向に沿って熱膨張による移動が可能となるように構成されていることが望ましい。
  この構成であれば、フレーム要素が熱膨張により生じる撓みによる処理の不均一を解消することができ、処理の均一性を向上させることができる。 The frame element is configured such that one end in the longitudinal direction is fixed and movement by thermal expansion is possible along the longitudinal direction from the one end in the longitudinal direction to the other end in the longitudinal direction. desirable.
If it is this structure, the nonuniformity of the process by the bending which a flame | frame element produces by thermal expansion can be eliminated, and the uniformity of a process can be improved.
  前記フレーム要素の長手方向他端側に締結部材が挿通される挿通孔が形成されており、前記締結部材が頭部を有するものであり、前記挿通孔が長手方向に沿った長孔であり、前記締結部材は、前記頭部と前記フレーム要素の上面との間に隙間を空けて前記長手方向他端側を固定するものであることが望ましい。 An insertion hole through which a fastening member is inserted is formed on the other longitudinal end side of the frame element, the fastening member has a head, and the insertion hole is a long hole along the longitudinal direction, The fastening member is preferably a member that fixes the other end in the longitudinal direction with a gap between the head and the upper surface of the frame element.
  この構成であれば、フレーム要素の挿入孔を長孔にするだけで、熱膨張による撓みを解消することができ、その構成を簡単にすることができる。 で あ れ ば With this configuration, it is possible to eliminate bending due to thermal expansion simply by making the insertion hole of the frame element a long hole, and the configuration can be simplified.
  このように構成した本発明によれば、互いに隣接するフレーム要素に隙間を埋めるための特別な部材を設けることなく、マスクフレームの開口部のサイズを変更しても、各フレーム要素の間に隙間が生じない構成として、基板処理の均一性を向上することができる。 According to the present invention configured as described above, even if the size of the opening of the mask frame is changed without providing a special member for filling the gap between adjacent frame elements, the gap between the frame elements is not changed. As a configuration in which no occurrence occurs, the uniformity of substrate processing can be improved.
本実施形態の真空処理装置の構成を模式的に示す断面図である。It is sectional drawing which shows the structure of the vacuum processing apparatus of this embodiment typically. 同実施形態のマスクフレームの平面図である。It is a top view of the mask frame of the embodiment. 同実施形態のマスクフレームの分解部分斜視図である。It is a disassembled partial perspective view of the mask frame of the same embodiment. 同実施形態の長手方向一端側の固定機構を示す断面図及び平面図である。It is sectional drawing and a top view which show the fixing mechanism of the longitudinal direction one end side of the embodiment. 同実施形態の長手方向他端側の固定機構を示す断面図、平面図及び底面図である。It is sectional drawing, the top view, and bottom view which show the fixing mechanism of the longitudinal direction other end side of the embodiment. 同実施形態の開口部の開口サイズ調整時の各フレーム要素の動きを示す図である。It is a figure which shows the motion of each frame element at the time of opening size adjustment of the opening part of the embodiment. 同実施形態の熱膨張吸収時の各フレーム要素の動きを示す図である。It is a figure which shows the motion of each frame element at the time of thermal expansion absorption of the embodiment. 変形実施形態の真空処理装置の構成を模式的に示す断面図である。It is sectional drawing which shows typically the structure of the vacuum processing apparatus of deformation | transformation embodiment. 変形実施形態のマスクフレームの部分斜視図及び断面図である。It is the fragmentary perspective view and sectional drawing of the mask frame of deformation | transformation embodiment. 変形実施形態のマスクフレームの平面図である。It is a top view of the mask frame of modification embodiment. 変形実施形態の隣接するフレーム要素の端部を示す平面図である。It is a top view which shows the edge part of the adjacent frame element of deformation | transformation embodiment. 従来のマスクフレームの平面図である。It is a top view of the conventional mask frame.
  以下に、本発明に係るマスクフレームを用いた真空処理装置の一実施形態について、図面を参照して説明する。 Hereinafter, an embodiment of a vacuum processing apparatus using a mask frame according to the present invention will be described with reference to the drawings.
  本実施形態の真空処理装置１００は、プラズマ中のイオンによってターゲットをスパッタして矩形状の基板に薄膜を形成するスパッタリング装置である。 The vacuum processing apparatus 100 of the present embodiment is a sputtering apparatus that forms a thin film on a rectangular substrate by sputtering a target with ions in plasma.
  具体的にこの真空処理装置１００は、図１に示すように、内部が真空に排気される処理容器２と、この処理容器２内に処理容器２から電気的に絶縁して設けられたスパッタ電極３と、このスパッタ電極３に電気的に接続して取り付けられたターゲット４と、このターゲット４に対向した状態で基板Ｗを支持する基板支持部５とを備えている。 Specifically, as shown in FIG. 1, the vacuum processing apparatus 100 includes a processing container 2 whose inside is evacuated to a vacuum, and a sputtering electrode that is electrically insulated from the processing container 2 in the processing container 2. 3, a target 4 that is electrically connected to the sputter electrode 3, and a substrate support 5 that supports the substrate W in a state of facing the target 4.
  処理容器２には、ガス導入部２１が設けられており、このガス導入部２１から、放電用ガスが導入される。なお、放電用ガスは、例えばアルゴンガス等の不活性ガスである。また、処理容器２には、内部を真空に排気するための排気部２２が設けられており、この排気部２２には、図示しない真空ポンプが接続されている。 The soot treatment container 2 is provided with a gas introduction part 21 from which a discharge gas is introduced. The discharge gas is an inert gas such as argon gas. Further, the processing container 2 is provided with an exhaust part 22 for exhausting the inside to a vacuum, and a vacuum pump (not shown) is connected to the exhaust part 22.
  スパッタ電極３には、電源部６が接続されており、当該電源部６により高周波電力が供給される。 A power source 6 is connected to the sputter electrode 3, and high frequency power is supplied from the power source 6.
  基板支持部５は、ターゲット４に対する基板Ｗの位置を調整できるように構成されており、本実施形態では、複数の支持ピン５１と、当該支持ピン５１を上下移動させる駆動部５２とを備えている。なお、基板支持部５と処理容器２との間は、ベローズ等のシール部材７によって遮蔽されている。なお、処理容器２及び基板支持部５は、電気的に接地されている。 The substrate support unit 5 is configured to be able to adjust the position of the substrate W with respect to the target 4. In the present embodiment, the substrate support unit 5 includes a plurality of support pins 51 and a drive unit 52 that moves the support pins 51 up and down. Yes. The substrate support 5 and the processing container 2 are shielded by a seal member 7 such as a bellows. The processing container 2 and the substrate support part 5 are electrically grounded.
  そして、前記ガス導入部２１から放電用ガスを導入し、電源部６によりスパッタ電極３に高周波電力を供給すると、当該スパッタ電極３から高周波放電が生じる。この高周波放電によって放電用ガスが電離されてプラズマが生成される。このプラズマ中のイオンがターゲット４をスパッタし、ターゲット４から飛び出したスパッタ粒子が基板Ｗに入射堆積して、基板Ｗ上に薄膜が形成される。なお、真空処理装置１００は、電源部６によりスパッタ電極３に直流電力を供給し、当該スパッタ電極３から生じる直流放電によって、プラズマを生成するものであっても良い。 When a discharge gas is introduced from the gas introduction part 21 and high-frequency power is supplied to the sputter electrode 3 by the power supply part 6, high-frequency discharge is generated from the sputter electrode 3. This high frequency discharge ionizes the discharge gas and generates plasma. The ions in the plasma sputter the target 4, and sputtered particles that have jumped out of the target 4 are incident and deposited on the substrate W to form a thin film on the substrate W. Note that the vacuum processing apparatus 100 may supply DC power to the sputtering electrode 3 from the power supply unit 6 and generate plasma by DC discharge generated from the sputtering electrode 3.
  しかして本実施形態の真空処理装置１００は、図１及び図２に示すように、基板Ｗの周縁部をターゲット４からマスキングするマスクフレーム８を備えている。 However, the vacuum processing apparatus 100 of this embodiment includes a mask frame 8 that masks the peripheral edge of the substrate W from the target 4 as shown in FIGS. 1 and 2.
  このマスクフレーム８は、特に図２に示すように、矩形状の開口部８Ｘを有するものであり、当該開口部８Ｘの４辺それぞれに対応した長手方向を有する４つのフレーム要素８１ａ～８１ｄと、当該４つのフレーム要素８１ａ～８１ｄを支持する支持部材８２とを備えている。 As shown in FIG. 2 in particular, the mask frame 8 has a rectangular opening 8X, and four frame elements 81a to 81d having longitudinal directions corresponding to the four sides of the opening 8X, And a support member 82 that supports the four frame elements 81a to 81d.
  なお、４つのフレーム要素８１ａ～８１ｄにより形成される開口部８Ｘは、矩形状の基板サイズよりも小さく設定されている。本実施形態の支持部材８２は、処理容器２に設けられており、矩形状の基板サイズよりも大きい矩形状の開口部８２Ｘを有する矩形枠状をなすものである。そして、この支持部材８２の上面に４つのフレーム要素８１ａ～８１ｄが固定される。 Note that the opening 8X formed by the four frame elements 81a to 81d is set smaller than the rectangular substrate size. The support member 82 according to the present embodiment is provided in the processing container 2 and has a rectangular frame shape having a rectangular opening 82X larger than the rectangular substrate size. The four frame elements 81a to 81d are fixed to the upper surface of the support member 82.
  各フレーム要素８１ａ～８１ｄは、平面視において長尺状（矩形状）をなすものであり、長手方向に沿った一対の側辺部８１１、８１２と、長手方向に直交する方向に沿った一対の端辺部８１３、８１４とを有する。本実施形態では、一対の側辺部８１１、８１２及び一対の端辺部８１３、８１４はともに、平面視において直線状をなしている。また、各フレーム要素８１ａ～８１ｄの長手方向に直交する断面形状は、矩形状である。 Each of the frame elements 81a to 81d has a long shape (rectangular shape) in plan view, and a pair of side portions 811 and 812 along the longitudinal direction and a pair of sides along the direction orthogonal to the longitudinal direction. And end sides 813 and 814. In the present embodiment, the pair of side portions 811 and 812 and the pair of end sides 813 and 814 are both linear in a plan view. The cross-sectional shape orthogonal to the longitudinal direction of each frame element 81a to 81d is a rectangular shape.
  そして、これら４つのフレーム要素８１ａ～８１ｄは、開口部８Ｘの各辺を形成するように矩形環状に配置されている。具体的には、４つのフレーム要素８１ａ～８１ｄは、各フレーム要素８１ａ～８１ｄの長手方向一端側の端辺部８１３（以下、一端辺部８１３という。）と、当該一端辺部８１３に隣接するフレーム要素８１ａ～８１ｄの長手方向に沿った開口部側辺部８１１とが互いに対向するように配置されている。 The four frame elements 81a to 81d are arranged in a rectangular ring shape so as to form each side of the opening 8X. Specifically, the four frame elements 81a to 81d are adjacent to one end side 813 (hereinafter referred to as one end side 813) on one end side in the longitudinal direction of each frame element 81a to 81d and the one end side 813. The opening side edges 811 along the longitudinal direction of the frame elements 81a to 81d are arranged so as to face each other.
  本実施形態では、各フレーム要素８１ａ～８１ｄの一端辺部８１３と、隣接するフレーム要素８１ａ～８１ｄの開口部側辺部８１１とが互いに接触することによって、平面視において隙間を空けずに配置されている。具体的には、前記一端辺部８１３の側面と、開口部側辺部８１１の側面とが面接触している。 In the present embodiment, one end side 813 of each frame element 81a to 81d and the opening side part 811 of the adjacent frame elements 81a to 81d are in contact with each other, so that they are arranged without a gap in plan view. ing. Specifically, the side surface of the one end side portion 813 and the side surface of the opening side portion 811 are in surface contact.
  このように配置される４つのフレーム要素８１ａ～８１ｄは、平面視においてそれぞれの長手方向に対して傾斜したそれぞれのスライド方向にスライド移動可能に設けられている。そして、４つのフレーム要素８１ａ～８１ｄをスライド移動させることにより開口部８Ｘの開口サイズが変更可能に構成されている。 The four frame elements 81a to 81d arranged in this way are provided so as to be slidable in the respective sliding directions inclined with respect to the respective longitudinal directions in plan view. The opening size of the opening 8X can be changed by sliding the four frame elements 81a to 81d.
  具体的には、互いに隣接するフレーム要素８１ａ～８１ｄにおいて、一方のフレーム要素（例えば８１ａ）のスライド方向の傾斜角度と、他方のフレーム要素（例えば８１ｂ）のスライド方向の傾斜角度との和が９０度となるように設定される。本実施形態では、各フレーム要素８１ａ～８１ｄのスライド方向の傾斜角度は４５度としてある。 Specifically, in the frame elements 81a to 81d adjacent to each other, the sum of the inclination angle in the sliding direction of one frame element (for example, 81a) and the inclination angle in the sliding direction of the other frame element (for example, 81b) is 90. Set to be degrees. In the present embodiment, the inclination angle of each frame element 81a to 81d in the sliding direction is 45 degrees.
  そして、マスクフレーム８は、図２に示すように、４つのフレーム要素８１ａ～８１ｄそれぞれをスライド方向に沿って移動させるためのスライドガイド機構９を有している。本実施形態のスライドガイド機構９は、平面視においてそれぞれの長手方向に対して４５度傾斜したスライド方向にスライド可能にするものである。 As shown in FIG. 2, the mask frame 8 has a slide guide mechanism 9 for moving each of the four frame elements 81a to 81d along the slide direction. The slide guide mechanism 9 of the present embodiment is slidable in a sliding direction inclined by 45 degrees with respect to each longitudinal direction in plan view.
  具体的にスライドガイド機構９は、各フレーム要素８１ａ～８１ｄの長手方向一端側及び長手方向他端側のそれぞれに設けられている。本実施形態のスライドガイド機構９は、各フレーム要素８１ａ～８１ｄをその長手方向一端側及び長手方向他端側それぞれにおいて支持部材８２に固定する固定機構１０ａ、１０ｂを用いて構成されている。 Specifically, the slide guide mechanism 9 is provided on each of one end in the longitudinal direction and the other end in the longitudinal direction of each of the frame elements 81a to 81d. The slide guide mechanism 9 of the present embodiment is configured using fixing mechanisms 10a and 10b that fix the frame elements 81a to 81d to the support member 82 at one end in the longitudinal direction and the other end in the longitudinal direction.
  長手方向一端側の固定機構１０ａは、図３及び図４に示すように、フレーム要素８１ａ～８１ｄの長手方向一端側に形成された一端側挿通孔８１ｈ１に締結部材である締結ボルト１１を挿通して、支持部材８２に形成された雌ねじ孔１２に螺合させることによって、フレーム要素８１ａ～８１ｄの長手方向一端側が固定されるように構成されている。ここで、フレーム要素８１ａ～８１ｄに形成された一端側挿通孔８１ｈ１は、フレーム要素８１ａ～８１ｄのスライド方向（図４において符号ＳＤ）に沿って延びる傾斜長孔としてある。なお、図４における符号ＬＤは、フレーム要素８１ａ～８１ｄの長手方向を示している。 As shown in FIGS. 3 and 4, the fixing mechanism 10a on one end side in the longitudinal direction inserts a fastening bolt 11 as a fastening member into one end side insertion hole 81h1 formed on one end side in the longitudinal direction of the frame elements 81a to 81d. The frame elements 81a to 81d are configured to be fixed at one end in the longitudinal direction by being screwed into the female screw hole 12 formed in the support member 82. Here, the one end side insertion holes 81h1 formed in the frame elements 81a to 81d are inclined long holes extending along the sliding direction (reference numeral SD in FIG. 4) of the frame elements 81a to 81d. Note that the symbol LD in FIG. 4 indicates the longitudinal direction of the frame elements 81a to 81d.
  この構成において、締結ボルト１１を締め付けた状態、つまり締結ボルト１１の頭部１１１と支持部材８２との間でフレーム要素８１ａ～８１ｄが挟持された状態で、フレーム要素８１ａ～８１ｄの長手方向一端側が固定される。一方で、締結ボルト１１が緩んだ状態、つまり、締結ボルト１１の頭部１１１がフレーム要素８１ａ～８１ｄから離間した状態において、フレーム要素８１ａ～８１ｄが締結ボルト１１に対してスライド方向にスライド移動可能となる。このように、締結ボルト１１と一端側挿通孔８１ｈ１とによりスライドガイド機構９が構成される。つまり、締結ボルト１１が支持部材８２に設けられた固定部となり、一端側挿入孔８１ｈ１が前記固定部に対してスライド移動するスライド部となる。 In this configuration, when the fastening bolt 11 is tightened, that is, when the frame elements 81a to 81d are sandwiched between the head 111 of the fastening bolt 11 and the support member 82, one end in the longitudinal direction of the frame elements 81a to 81d is Fixed. On the other hand, when the fastening bolt 11 is loose, that is, when the head 111 of the fastening bolt 11 is separated from the frame elements 81a to 81d, the frame elements 81a to 81d can slide in the sliding direction with respect to the fastening bolt 11. It becomes. Thus, the slide guide mechanism 9 is comprised by the fastening bolt 11 and the one end side insertion hole 81h1. That is, the fastening bolt 11 is a fixed portion provided in the support member 82, and the one end side insertion hole 81h1 is a slide portion that slides relative to the fixed portion.
  長手方向他端側の固定機構１０ｂは、図３及び図５に示すように、フレーム要素８１ａ～８１ｄの長手方向他端側に形成された他端側挿通孔８１ｈ２及び支持部材８２に形成された挿通孔８２ｈに締結ボルト１１を挿通して、支持部材８２の裏面に設けられたナット１２に螺合させることによって、フレーム要素８１ａ～８１ｄの長手方向他端側が固定されるように構成されている。ここで、図５における符号ＬＤは、フレーム要素８１ａ～８１ｄの長手方向を示しており、符号ＳＤは、フレーム要素８１ａ～８１ｄのスライド方向を示している。ここで、支持部材８２の裏面には、ナット１３を収容する座繰り穴８２１が形成されている。そして、支持部材８２に形成された挿通孔８２ｈは、フレーム要素８１ａ～８１ｄのスライド方向に沿って延びる傾斜長孔としてある。なお、座繰り穴８２１も挿通孔８２ｈと併せてスライド方向に沿って伸びる傾斜長穴としてある。 The fixing mechanism 10b on the other end side in the longitudinal direction is formed in the other end side insertion hole 81h2 formed on the other end side in the longitudinal direction of the frame elements 81a to 81d and the support member 82, as shown in FIGS. The fastening bolts 11 are inserted into the insertion holes 82h and screwed into the nuts 12 provided on the back surface of the support member 82, whereby the other longitudinal ends of the frame elements 81a to 81d are fixed. . Here, the symbol LD in FIG. 5 indicates the longitudinal direction of the frame elements 81a to 81d, and the symbol SD indicates the sliding direction of the frame elements 81a to 81d. Here, a counterbore hole 821 for accommodating the nut 13 is formed on the back surface of the support member 82. The insertion hole 82h formed in the support member 82 is an inclined long hole extending along the sliding direction of the frame elements 81a to 81d. The counterbore hole 821 is also an inclined elongated hole extending along the sliding direction together with the insertion hole 82h.
  この構成において、締結ボルト１１を締め付けた状態、つまり締結ボルト１１の頭部１１１とナット１３との間でフレーム要素８１ａ～８１ｄ及び支持部材８２が挟持された状態で、フレーム要素８１ａ～８１ｄの長手方向他端側が固定される。一方で、締結ボルト１１が緩んだ状態、つまり、締結ボルト１１の頭部１１１及びナット１３がフレーム要素８１ａ～８１ｄ及び支持部材８２を挟持しない状態で、フレーム要素８１ａ～８１ｄの他端側挿通孔８１ｈ２に挿通された締結ボルト１１が、支持部材８２に対してスライド方向にスライド移動可能となる。このように、締結ボルト１１と他端側挿通孔８１ｈ２及び座繰り穴８２１とによりスライドガイド機構９が構成される。つまり、他端側挿通孔８１ｈ２及び座繰り穴８２１が支持部材８２に設けられた固定部となり、締結ボルト１１が前記固定部に対してスライド移動するスライド部となる。 In this configuration, the longitudinal direction of the frame elements 81a to 81d in a state where the fastening bolt 11 is tightened, that is, in a state where the frame elements 81a to 81d and the support member 82 are sandwiched between the head 111 and the nut 13 of the fastening bolt 11. The other end in the direction is fixed. On the other hand, in the state where the fastening bolt 11 is loose, that is, in the state where the head 111 and the nut 13 of the fastening bolt 11 do not sandwich the frame elements 81a to 81d and the support member 82, the other end side insertion holes of the frame elements 81a to 81d. The fastening bolt 11 inserted through 81 h 2 can slide in the sliding direction with respect to the support member 82. As described above, the slide guide mechanism 9 is configured by the fastening bolt 11, the other end side insertion hole 81 h 2, and the counterbore hole 821. That is, the other end side insertion hole 81h2 and the counterbore hole 821 serve as a fixing portion provided in the support member 82, and the fastening bolt 11 serves as a sliding portion that slides relative to the fixing portion.
  さらに本実施形態では、各フレーム要素８１ａ～８１ｄは、長手方向一端部が固定されるとともに、当該長手方向一端部を起点として長手方向他端側に長手方向に沿って熱膨張による移動が可能となるように構成されている。 Furthermore, in this embodiment, each frame element 81a to 81d is fixed at one end in the longitudinal direction, and can be moved by thermal expansion along the longitudinal direction from the one end in the longitudinal direction to the other end in the longitudinal direction. It is comprised so that it may become.
  具体的には、図３及び図５に示すように、各フレーム要素８１ａ～８１ｄの他端側挿通孔８１ｈ２が長手方向に沿った長孔としてある。そして、長手方向他端側における固定機構１０ｂの締結ボルト１１は、フレーム要素８１ａ～８１ｄの長手方向他端側を固定した状態で、頭部１１１の下面とフレーム要素８１ａ～８１ｄの上面との間に隙間Ｓを有するように構成されている。なお、隙間Ｓを有していても、長手方向一端側が締結ボルト１１で締結されていることから、長手方向他端側では、長手方向に直交する方向への移動ができないように固定されている。 More specifically, as shown in FIGS. 3 and 5, the other end side insertion holes 81h2 of the frame elements 81a to 81d are long holes along the longitudinal direction. The fastening bolt 11 of the fixing mechanism 10b on the other end in the longitudinal direction is between the lower surface of the head 111 and the upper surfaces of the frame elements 81a to 81d in a state where the other end in the longitudinal direction of the frame elements 81a to 81d is fixed. It is comprised so that it may have the clearance gap S. In addition, even if it has the clearance gap S, since the longitudinal direction one end side is fastened with the fastening volt | bolt 11, it fixes so that the movement to the direction orthogonal to a longitudinal direction cannot be performed at the other longitudinal direction end side. .
  詳細には、図５に示すように、固定機構１０ｂの締結ボルト１１は段付きボルトであり、ナット１３に螺合して、当該段付きボルト１１の段部１１２とナット１３との間で支持部材８２を締め付けた状態、つまり、締結ボルト１１が支持部材８２に固定された状態において、頭部１１１の下面とフレーム要素８１ａ～８１ｄの上面との間に隙間Ｓが形成される。 Specifically, as shown in FIG. 5, the fastening bolt 11 of the fixing mechanism 10 b is a stepped bolt, and is screwed into the nut 13 to be supported between the stepped portion 112 of the stepped bolt 11 and the nut 13. In a state where the member 82 is tightened, that is, in a state where the fastening bolt 11 is fixed to the support member 82, a gap S is formed between the lower surface of the head 111 and the upper surfaces of the frame elements 81a to 81d.
  この構成により、フレーム要素８１ａ～８１ｄが熱膨張により長手方向に伸びた場合であっても、フレーム要素８１ａ～８１ｄの長孔である他端側挿通孔８１ｈ２が締結ボルト１１に対して長手方向に相対移動することができる。 With this configuration, even when the frame elements 81a to 81d extend in the longitudinal direction due to thermal expansion, the other end side insertion hole 81h2 that is a long hole of the frame elements 81a to 81d is disposed in the longitudinal direction with respect to the fastening bolt 11. It can move relative.
  次に、このように構成したマスクフレーム８の開口部８Ｘの開口サイズの調整について、図６を参照して説明する。
  図６（Ａ）は、開口部８Ｘの開口サイズが最大の場合を示す図である。
  この状態において、長手方向一端側の固定機構１０ａ（スライドガイド機構９）では、フレーム要素８１ａ～８１ｄの挿通孔８１ｈ１の最も内側に締結ボルト１１が位置している。また、長手方向他端側の固定機構１０ｂ（スライドガイド機構９）において、支持部材８２の挿通孔８１ｈ２及び座繰り穴８２１の最も外側に締結ボルト１１及びナット１３が位置している。さらに、各フレーム要素８１ａ～８１ｄの一端辺部８１３は、隣接するフレーム要素８１ａ～８１ｄの開口部側辺部８１１に接触している。 Next, adjustment of the opening size of the opening 8X of the mask frame 8 configured as described above will be described with reference to FIG.
FIG. 6A is a diagram illustrating a case where the opening size of the opening 8X is the maximum.
In this state, in the fixing mechanism 10a (slide guide mechanism 9) on one end side in the longitudinal direction, the fastening bolt 11 is located on the innermost side of the insertion hole 81h1 of the frame elements 81a to 81d. Further, in the fixing mechanism 10b (slide guide mechanism 9) on the other end side in the longitudinal direction, the fastening bolt 11 and the nut 13 are located on the outermost side of the insertion hole 81h2 and the counterbore hole 821 of the support member 82. Further, one end side 813 of each frame element 81a to 81d is in contact with the opening side edge 811 of the adjacent frame element 81a to 81d.
  この状態から、開口部８Ｘの開口サイズを小さくする場合には、フレーム要素８１ａ～８１ｄの長手方向一端側及び他端側の締結ボルト１１を緩める。そして、フレーム要素８１ａ～８１ｄをスライド方向に沿って内側に移動させる。このとき、各フレーム要素８１ａ～８１ｄは、接触した状態を維持したまま移動する（図６（Ｂ））。ここで、１つのフレーム要素（例えばフレーム要素８１ａ）をスライド移動させると、４つのフレーム要素８１ａ～８１ｄの隣接する端部同士が接触しているので、残りの３つのフレーム要素（例えばフレーム要素８１ｂ～８１ｄ）も連動してスライド移動することになる。なお、２つ以上のフレーム要素を同時に操作してスライド移動させることもできる。 か ら In order to reduce the opening size of the opening 8X from this state, the fastening bolts 11 on one end side and the other end side in the longitudinal direction of the frame elements 81a to 81d are loosened. Then, the frame elements 81a to 81d are moved inward along the sliding direction. At this time, the frame elements 81a to 81d move while maintaining the contacted state (FIG. 6B). Here, when one frame element (for example, the frame element 81a) is slid, adjacent ends of the four frame elements 81a to 81d are in contact with each other, so that the remaining three frame elements (for example, the frame element 81b) are in contact with each other. -81d) also slides in conjunction with each other. Two or more frame elements can be simultaneously operated and slid.
  このようにして４つのフレーム要素８１ａ～８１ｄを移動させて、最適な位置に位置調整して、締結ボルト１１を締め付けて固定する。 In this way, the four frame elements 81a to 81d are moved and adjusted to the optimum positions, and the fastening bolts 11 are fastened and fixed.
  なお、図６（Ｃ）は、開口部８Ｘの開口サイズが最小の場合を示す図である。
  この状態において、長手方向一端側の固定機構１０ａ（スライドガイド機構９）では、フレーム要素８１ａ～８１ｄの挿通孔８１ｈ１の最も外側に締結ボルト１１が位置している。また、長手方向他端側の固定機構１０ｂ（スライドガイド機構９）において、支持部材８２の挿通孔８１ｈ２及び座繰り穴８２１の最も内側に締結ボルト１１及びナット１３が位置している。さらに、各フレーム要素８１ａ～８１ｄの一端辺部８１３は、隣接するフレーム要素８１ａ～８１ｄの開口部側辺部８１１に接触している。 FIG. 6C is a diagram showing a case where the opening size of the opening 8X is the smallest.
In this state, in the fixing mechanism 10a (slide guide mechanism 9) on one end side in the longitudinal direction, the fastening bolt 11 is located on the outermost side of the insertion hole 81h1 of the frame elements 81a to 81d. Further, in the fixing mechanism 10b (slide guide mechanism 9) on the other end side in the longitudinal direction, the fastening bolt 11 and the nut 13 are located on the innermost side of the insertion hole 81h2 and the counterbore hole 821 of the support member 82. Further, one end side 813 of each frame element 81a to 81d is in contact with the opening side edge 811 of the adjacent frame element 81a to 81d.
  次に、各フレーム要素８１ａ～８１ｄの熱膨張吸収について、図７を参照して説明する。
  図７（Ａ）は、熱膨張が生じていない状態（例えば成膜処理前）を示す図である。
  この状態において、長手方向他端側の固定機構１０ｂの締結ボルト１１は、フレーム要素８１ａ～８１ｄの挿通孔８１ｈ２の長手方向他端部に位置している。 Next, thermal expansion absorption of each of the frame elements 81a to 81d will be described with reference to FIG.
FIG. 7A is a diagram illustrating a state where thermal expansion has not occurred (for example, before film formation).
In this state, the fastening bolt 11 of the fixing mechanism 10b at the other end in the longitudinal direction is located at the other end in the longitudinal direction of the insertion hole 81h2 of the frame elements 81a to 81d.
  そして、処理開始後にフレーム要素８１ａ～８１ｄが熱膨張すると、フレーム要素８１ａ～８１ｄの長手方向一端側の固定機構１０ａ（締結箇所）を起点として、長手方向他端側にフレーム要素８１ａ～８１ｄが伸びる（図７（Ｂ）及び（Ｃ））。そうすると、支持部材８２に固定された締結ボルト１１に対してフレーム要素８１ａ～８１ｄの他端側挿通孔８１ｈ２が移動して、その伸び量Ｈを吸収する。なお、本実施形態のように各フレーム要素８１ａ～８１ｄが配置されているので、各フレーム要素８１ａ～８１ｄが長手方向に伸びても開口サイズが変化することはない。
  伸び量Ｈの吸収限界は、フレーム要素８１ａ～８１ｄの他端側挿通孔８１ｈ２の長手方向に沿った長さによって決まるため（図７（Ｃ））、予め想定される伸び量Ｈに基づいて、他端側挿通孔８１ｈ２の長さを決める必要がある。 Then, when the frame elements 81a to 81d are thermally expanded after the processing is started, the frame elements 81a to 81d extend to the other end in the longitudinal direction starting from the fixing mechanism 10a (fastening location) on the one end in the longitudinal direction of the frame elements 81a to 81d. (FIGS. 7B and 7C). Then, the other end side insertion holes 81h2 of the frame elements 81a to 81d move with respect to the fastening bolts 11 fixed to the support member 82, and the extension amount H is absorbed. Since each frame element 81a to 81d is arranged as in this embodiment, the opening size does not change even if each frame element 81a to 81d extends in the longitudinal direction.
Since the absorption limit of the extension amount H is determined by the length along the longitudinal direction of the other end side insertion hole 81h2 of the frame elements 81a to 81d (FIG. 7C), based on the expected extension amount H, It is necessary to determine the length of the other end side insertion hole 81h2.
  ＜本実施形態の効果＞
  このように構成した真空処理装置１００によれば、各フレーム要素８１ａ～８１ｄの一端辺部８１３と、隣接するフレーム要素８１ａ～８１ｄの開口部側辺部８１１とが対向して配置されているので、開口サイズを変更しても、各フレーム要素８１ａ～８１ｄの一端辺部８１３と、隣接するフレーム要素８１ａ～８１ｄの開口部側辺部８１１との接触関係を維持することができる。したがって、互いに隣接するフレーム要素８１ａ～８１ｄに隙間を埋めるための特別な部材を設けることなく、開口サイズを変更しても、各フレーム要素８１ａ～８１ｄの間に平面視において隙間が生じない構成とすることができる。 <Effect of this embodiment>
According to the vacuum processing apparatus 100 configured as described above, the one end side portion 813 of each frame element 81a to 81d and the opening side portion 811 of the adjacent frame elements 81a to 81d are arranged to face each other. Even if the opening size is changed, the contact relationship between the one end side 813 of each of the frame elements 81a to 81d and the opening side side 811 of the adjacent frame elements 81a to 81d can be maintained. Therefore, even if the opening size is changed without providing a special member for filling the gap between the adjacent frame elements 81a to 81d, no gap is generated between the frame elements 81a to 81d in a plan view. can do.
  各フレーム要素８１ａ～８１ｄ及び支持部材８２の間にスライドガイド機構９が設けられているので、各フレーム要素８１ａ～８１ｄのスライド移動を容易にすることができる。また、１つのフレーム要素８１ａを移動させると、その移動に連動して、その他のフレーム要素８１ｂ～８１ｄを移動させることができ、開口サイズの変更を容易にすることができる。ここで、スライドガイド機構９が長手方向２箇所に設けられているので、フレーム要素８１ａ～８１ｄの姿勢を保ったままのスライド移動が容易となり、複数のフレーム要素８１ａ～８１ｄを連動して移動させるときに、それらを安定して移動させることができる。 ス ラ イ ド Since the slide guide mechanism 9 is provided between the frame elements 81a to 81d and the support member 82, the slide movement of the frame elements 81a to 81d can be facilitated. In addition, when one frame element 81a is moved, the other frame elements 81b to 81d can be moved in conjunction with the movement, and the opening size can be easily changed. Here, since the slide guide mechanism 9 is provided at two locations in the longitudinal direction, the slide movement with the posture of the frame elements 81a to 81d being easy is facilitated, and the plurality of frame elements 81a to 81d are moved in conjunction with each other. Sometimes they can be moved stably.
  互いに隣接するフレーム要素８１ａ～８１ｄにおけるそれぞれの長手方向に対するスライド方向の傾斜角度の和が９０度であるため、各フレーム要素８１ｂ～８１ｄの一端辺部８１３と、隣接するフレーム要素８１ｂ～８１ｄの開口部側辺部８１１とを接触させた状態で、開口サイズを変更することができる。ここで、スライド方向が４５度であり、開口サイズの変更前後において開口形状の縦横比を維持することができる。 Since the sum of the inclination angles in the sliding direction with respect to the respective longitudinal directions of the frame elements 81a to 81d adjacent to each other is 90 degrees, one end side 813 of each frame element 81b to 81d and the opening of the adjacent frame element 81b to 81d The opening size can be changed in a state where the side portion 811 is in contact with the portion. Here, the sliding direction is 45 degrees, and the aspect ratio of the opening shape can be maintained before and after the opening size is changed.
  また、本実施形態では、固定機構１０ａ、１０ｂの締結ボルト１１がスライドガイド機構９を兼ねているので、マスクフレーム８の構成を簡単にすることができる。また、開口サイズの調整後に締結ボルト１１を締結させるだけで良く、開口サイズの調整からフレーム要素８１ａ～８１ｄの固定までの作業を容易にすることができる。 In the present embodiment, the fastening bolts 11 of the fixing mechanisms 10a and 10b also serve as the slide guide mechanism 9. Therefore, the configuration of the mask frame 8 can be simplified. Further, it is only necessary to fasten the fastening bolt 11 after adjusting the opening size, and the operations from adjusting the opening size to fixing the frame elements 81a to 81d can be facilitated.
  さらに、各フレーム要素８１ａ～８１ｄは、長手方向一端部が固定されるとともに、当該長手方向一端部を起点として長手方向他端側に長手方向に沿って熱膨張による移動が可能となるように構成されているので、フレーム要素８１ａ～８１ｄが熱膨張により生じる撓みによる処理の不均一を解消することができ、処理の均一性を向上させることができる。 Further, each frame element 81a to 81d is configured such that one end portion in the longitudinal direction is fixed and movement by thermal expansion is possible along the longitudinal direction from the one end portion in the longitudinal direction to the other end in the longitudinal direction. Therefore, the non-uniformity of processing due to the bending caused by the thermal expansion of the frame elements 81a to 81d can be eliminated, and the uniformity of the processing can be improved.
  なお、本発明は前記実施形態に限られるものではない。
  例えば、前記実施形態では、各フレーム要素８１ａ～８１ｄの長手方向に直交する断面が矩形状をなすものであったが、図８及び図９に示すように、フレーム要素８１ａ～８１ｄの開口部側辺部８１１が、その上面が開口部８Ｘ側に向かって下り勾配を有する第１傾斜面８１１ｘを有しており、フレーム要素８１ａ～８１ｄの一端辺部８１３が、第１傾斜面８１１ｘに対応した第２傾斜面８１３ｘを有しているものであっても良い。 The present invention is not limited to the above embodiment.
For example, in the above-described embodiment, the cross section orthogonal to the longitudinal direction of each frame element 81a to 81d is rectangular, but as shown in FIGS. 8 and 9, the opening side of the frame elements 81a to 81d is used. The side 811 has a first inclined surface 811x whose upper surface has a downward slope toward the opening 8X, and one end side 813 of the frame elements 81a to 81d corresponds to the first inclined surface 811x. It may have the second inclined surface 813x.
  また、前記実施形態では、一端辺部８１３の側面が上面に垂直な平面であり、開口部側辺部８１１の側面も上面に垂直な平面であったが、一端辺部８１３が平面視において開口部側辺部８１１に隙間無く接触する構成であれば、例えば湾曲した面又は屈曲した面であっても良い。 In the above embodiment, the side surface of the one end side portion 813 is a plane perpendicular to the upper surface, and the side surface of the opening side portion 811 is also a plane perpendicular to the upper surface, but the one end side portion 813 is open in plan view. For example, a curved surface or a curved surface may be used as long as it is configured to contact the side portion 811 with no gap.
  さらに、前記実施形態では、各フレーム要素８１ａ～８１ｄが同一形状をなすものであったが、直線状の開口側辺部８１１及び当該開口部側辺部に対向する直線状の一端辺部８１３を有するものであれば、残りの２辺は直線形状に限られない。 Furthermore, in the above-described embodiment, the frame elements 81a to 81d have the same shape. However, the linear opening side portion 811 and the linear one end side portion 813 facing the opening side portion are provided. If it has, the remaining two sides are not limited to a linear shape.
  前記実施形態では、マスクフレームは平面視における正方形状をなすものであったが、図１０に示すように、長方形状をなすものであっても良い。 In the above embodiment, the mask frame has a square shape in plan view, but may have a rectangular shape as shown in FIG.
  前記実施形態では、全てのフレーム要素のスライド方向の傾斜角度は４５度であったが、図１１に示すように、互いに隣接するフレーム要素において、一方のフレーム要素のスライド方向ＳＤの傾斜角度θ１が６０度とし、他方のフレーム要素のスライド方向ＳＤの傾斜角度θ２が３０度としても良い。このように、θ１＋θ２＝９０度の関係を満たすものであれば、θ１、θ２の具体的角度は、前記実施形態に限られない。 In the embodiment, the inclination angle of all the frame elements in the sliding direction is 45 degrees. However, as shown in FIG. 11, in the frame elements adjacent to each other, the inclination angle θ1 of one frame element in the sliding direction SD is The inclination angle θ2 of the other frame element in the sliding direction SD may be 30 degrees. Thus, as long as the relationship of θ1 + θ2 = 90 degrees is satisfied, the specific angles of θ1 and θ2 are not limited to the above embodiment.
  その上、前記実施形態では、固定機構１０ａ、１０ｂがスライドガイド機構９を兼ねる構成であったが、それらを別々に設けても良い。この場合、スライドガイド機構９は、フレーム要素又は支持部材の一方に設けられた固定部と、前記フレーム要素又は前記支持部材の他方に設けられ、前記固定部に対してスライド方向に沿ってスライドするスライド部とを有する。 In addition, in the above-described embodiment, the fixing mechanisms 10a and 10b serve as the slide guide mechanism 9, but they may be provided separately. In this case, the slide guide mechanism 9 is provided in one of the frame element or the support member and the other of the frame element or the support member, and slides along the slide direction with respect to the fixed part. And a slide portion.
  加えて、前記実施形態の固定機構は、長手方向一端側と長手方向他端側とで異なる構成であったが、両者を同一の構成としても良い。 In addition, the fixing mechanism of the above embodiment has a different configuration on one end side in the longitudinal direction and the other end side in the longitudinal direction, but both may have the same configuration.
  さらに加えて、前記実施形態の固定機構は締結ボルトを用いたものであったが、フレーム要素及び支持部材を貫通して設けられる軸部及び頭部を有するピンと、当該ピンの軸部に嵌合して前記頭部との間でフレーム要素及び支持部材を挟持する止め輪とを用いたものであっても良い。その他、固定機構が、フレーム要素及び支持部材を一体的に挟み込んで固定するクランプ部材を用いたものであっても良い。 In addition, although the fixing mechanism of the embodiment uses a fastening bolt, the pin having a shaft portion and a head portion that are provided through the frame element and the support member and the shaft portion of the pin are fitted. Then, a retaining ring that sandwiches the frame element and the support member with the head may be used. In addition, the fixing mechanism may use a clamp member that sandwiches and fixes the frame element and the support member integrally.
  前記実施形態では、真空処理装置としてスパッタリング装置を例に挙げて説明したが、その他、ＣＶＤ装置等のプラズマを用いた真空処理装置等にも適用可能である。 In the above embodiment, the sputtering apparatus has been described as an example of the vacuum processing apparatus. However, the present invention can also be applied to a vacuum processing apparatus using plasma such as a CVD apparatus.
  その他、本発明は前記実施形態に限られず、その趣旨を逸脱しない範囲で種々の変形が可能であるのは言うまでもない。 In addition, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
１００・・・真空処理装置
８・・・マスクフレーム
８Ｘ・・・開口部
８１ａ～８１ｄ・・・フレーム要素
８１１・・・開口部側辺部
８１３・・・長手方向一端側の端辺部
８２・・・支持部材
９・・・スライドガイド機構
１１・・・締結部材
８１ｈ１、８１ｈ２・・・挿通孔
１１１・・・頭部
Ｓ・・・隙間
８１１ｘ・・・第１傾斜面
８１３ｘ・・・第２傾斜面 DESCRIPTION OF SYMBOLS 100 ... Vacuum processing apparatus 8 ... Mask frame 8X ... Opening part 81a-81d ... Frame element 811 ... Opening part side part 813 ... End part 82 * of the longitudinal direction one end side .... Support member 9 ... Slide guide mechanism 11 ... Fastening member 81h1, 81h2 ... Insertion hole 111 ... Head S ... Gap 811x ... First inclined surface 813x ... Second Inclined surface

Claims (9)

  1.   矩形状の開口部を有するマスクフレームであって、
      前記開口部の４辺それぞれに対応した長手方向を有する４つのフレーム要素を備え、
      前記各フレーム要素における長手方向一端側の端辺部と、当該端辺部に隣接するフレーム要素における長手方向に沿った開口部側辺部とが対向して配置されており、
      前記４つのフレーム要素が、平面視においてそれぞれの長手方向に対して傾斜したそれぞれのスライド方向にスライド移動可能に設けられており、
      前記４つのフレーム要素をスライド移動させることにより前記開口部の開口サイズが変更可能に構成されているマスクフレーム。     A mask frame having a rectangular opening,
    Comprising four frame elements having a longitudinal direction corresponding to each of the four sides of the opening,
    An end side portion on one end side in the longitudinal direction of each frame element and an opening side portion along the longitudinal direction of the frame element adjacent to the end side portion are arranged to face each other.
    The four frame elements are provided so as to be slidable in respective sliding directions inclined with respect to the respective longitudinal directions in plan view,
    A mask frame configured such that the opening size of the opening can be changed by sliding the four frame elements.
  2.   前記４つのフレーム要素が、平面視においてそれぞれの長手方向に対して４５度傾斜したスライド方向にスライド移動可能に設けられている請求項１記載のマスクフレーム。 The mask frame according to claim 1, wherein the four frame elements are provided so as to be slidable in a sliding direction inclined by 45 degrees with respect to each longitudinal direction in plan view.
  3.   前記フレーム要素を支持する支持部材を備え、
      前記フレーム要素及び前記支持部材の間に前記フレーム要素のスライド移動を可能にするスライドガイド機構が設けられている請求項１又は２記載のマスクフレーム。     A support member for supporting the frame element;
    The mask frame according to claim 1, wherein a slide guide mechanism is provided between the frame element and the support member to allow the frame element to slide.
  4.   前記スライドガイド機構は、前記フレーム要素の長手方向一端側及び長手方向他端側にそれぞれ設けられている請求項３記載のマスクフレーム。 The mask frame according to claim 3, wherein the slide guide mechanism is provided on one end side in the longitudinal direction and the other end side in the longitudinal direction of the frame element.
  5.   前記フレーム要素は、締結部材により前記支持部材に固定されるものであり、
      前記締結部材が挿通される前記フレーム要素の挿通孔又は前記支持部材の挿通孔の何れか一方が、前記スライド方向に沿った傾斜長孔であり、
      前記締結部材及び前記傾斜長孔とされた挿通孔により前記スライドガイド機構が構成される請求項３又は４記載のマスクフレーム。     The frame element is fixed to the support member by a fastening member,
    Either one of the insertion hole of the frame element through which the fastening member is inserted or the insertion hole of the support member is an inclined long hole along the sliding direction,
    The mask frame according to claim 3 or 4, wherein the slide guide mechanism is configured by the fastening member and the insertion hole formed as the inclined long hole.
  6.   前記フレーム要素の前記開口部側辺部は、その上面が開口部側に向かって下り勾配を有する第１傾斜面を有しており、
      前記フレーム要素の前記端辺部は、前記第１傾斜面に対応した第２傾斜面を有している請求項１乃至５の何れか一項に記載のマスクフレーム。     The opening side of the frame element has a first inclined surface whose upper surface has a downward slope toward the opening,
    The mask frame according to any one of claims 1 to 5, wherein the end side portion of the frame element has a second inclined surface corresponding to the first inclined surface.
  7.   前記フレーム要素は、長手方向一端部が固定されるとともに、当該長手方向一端部を起点として長手方向他端側に長手方向に沿って熱膨張による移動が可能となるように構成されている請求項１乃至６の何れか一項に記載のマスクフレーム。 The frame element is configured such that one end portion in the longitudinal direction is fixed and movement by thermal expansion is possible along the longitudinal direction from the one end portion in the longitudinal direction to the other end side in the longitudinal direction. The mask frame according to any one of 1 to 6.
  8.   前記フレーム要素の長手方向他端側に締結部材が挿通される挿通孔が形成されており、
      前記締結部材が頭部を有するものであり、
      前記挿通孔が長手方向に沿った長孔であり、
      前記締結部材は、前記頭部と前記フレーム要素の上面との間に隙間を空けて前記長手方向他端側を固定するものである請求項７記載のマスクフレーム。     An insertion hole through which a fastening member is inserted is formed on the other longitudinal end side of the frame element,
    The fastening member has a head;
    The insertion hole is a long hole along the longitudinal direction;
    The mask frame according to claim 7, wherein the fastening member fixes the other end in the longitudinal direction with a gap between the head and the upper surface of the frame element.
  9.   前記１乃至８の何れか一項に記載のマスクフレームを有する真空処理装置。 A vacuum processing apparatus having the mask frame according to any one of 1 to 8 above.
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JP6876244B2 (en) 2021-05-26
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JP2017172028A (en) 2017-09-28
CN109072403B (en) 2021-04-20

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