JP7012157B2 - Adhesive members and vacuum processing equipment - Google Patents

Description

The present invention relates to a technique for a protective member used in a vacuum processing device such as a sputtering device.

Conventionally, in this type of vacuum processing apparatus, a plate-shaped protective member is provided in order to prevent the film forming material or the like from adhering to the wall surface or the like in the vacuum chamber when performing vacuum processing such as sputtering.
This adhesion-proof member is provided in the vicinity of a substrate in a discharge space for performing plasma processing, such as a sputtering device.

In this case, the adhesive member is attached to, for example, a frame-shaped holding member in a vacuum chamber in a direction parallel to the substrate.
Conventionally, such a protective member is attached to a holding member by using a large number of bolts.

However, there are various problems in the adhesive member attached to the holding member.
That is, the film-forming material adheres to the adhesion-proof member at the time of film formation such as sputtering. At that time, the film-forming material also adheres to the surface of the bolt and causes particles to be generated. For this reason, a cap is attached to each bolt to prevent the film forming material from adhering to each bolt, but the film forming material adhering to the cap also causes the generation of particles.

Further, since the adhesive member is attached to the holding member from the discharge space side by using a large number of bolts, there is friction with the holding member due to the elongation of the adhesive member due to heat during discharge. It is generated, which causes particles to be generated.

Japanese Unexamined Patent Publication No. 4-78132 Japanese Unexamined Patent Publication No. 10-060624 Japanese Unexamined Patent Publication No. 2004-315948 International Publication No. 2006-0673836

The present invention has been made in consideration of such problems of the prior art, and an object of the present invention is to suppress particles generated from an adhesive member arranged in a discharge space during vacuum processing. Is to provide technology that can be used.

The present invention made in order to achieve the above object is an anti-adhesion member for preventing the adhesion of a substance generated during vacuum processing into a vacuum chamber, and is a frame-shaped anti-adhesion main body member and the above-mentioned anti-adhesion. The protective main body member includes a holding member for holding the main body member, the anti-adhesion main body member has a plurality of plate-shaped constituent members provided around the object to be processed, and the plurality of constituent members are discharged in the vacuum chamber. A protective member provided with hooking portions for hooking and mounting on a plurality of hook portions provided on the holding member on a surface opposite to a surface facing the space.
In the present invention, each component of the anti-adhesion body member is formed in an elongated shape, and the hooking portion of each component is such that each component is held by the holding member. A fixing hook portion that is hooked on a fixing hook provided on the hook portion of the holding member so as not to move in the longitudinal direction, and a fixing hook portion provided on the hook portion of the holding member in a state where each component member can be moved in the longitudinal direction. It has a moving hook portion that is hooked on the moving hook, the fixing hook portion is provided in the central portion of each of the constituent members, and the moving hook portion is provided with respect to the fixing hook portion. It is also effective when it is provided on both ends of the.
The present invention is also effective when a wall portion for shielding plasma extending toward the surface facing the discharge space of the vacuum chamber is provided on the peripheral edge of each constituent member of the protective main body member.
In the present invention, even when a mounting portion for the holding member is provided on the peripheral edge portion of each constituent member of the protective body member so as to extend outward with respect to the wall portion for shielding the plasma. It is effective.
Further, the present invention includes a vacuum chamber and an anti-adhesion member provided in the vacuum chamber to prevent substances generated during vacuum processing from adhering to the vacuum chamber, and the anti-adhesion member is a frame. It has a shape-shaped protective body member and a holding member that holds the protective body member, and the protective body member has a plurality of plate-shaped constituent members provided around the object to be processed, and the above-mentioned The plurality of constituent members are provided with hooking portions for hooking and mounting on the plurality of hook portions provided on the holding member on the surface opposite to the surface facing the discharge space in the vacuum chamber. It is a vacuum processing apparatus configured to perform a predetermined vacuum processing on an object to be processed arranged in the vicinity of the adhesive member.
The present invention is also effective when it has the vacuum chamber in which the sputtering target is arranged and is configured to perform sputtering on the object to be processed arranged in the vicinity of the adhesion-proof member.

In the present invention, in the plurality of plate-shaped constituent members of the anti-adhesion main body member, hooks are hooked on a plurality of hook portions provided on the holding member on the surface opposite to the surface facing the discharge space in the vacuum chamber. Since the hooking portions are provided for mounting the protective body members, it is not necessary to use a large number of bolts with covers as in the prior art to hold the protective body member to the holding member.

As a result, according to the present invention, the uneven portion of the surface of the adhesive member on the discharge space side can be reduced to reduce the surface area of the adhesive member. It is possible to suppress the generation of particles due to peeling from the surface.

In the present invention, each component of the anti-adhesion body member is formed in an elongated shape, and each component is held in the longitudinal direction in a state where the anti-adhesion body member is held by the holding member. It is hooked on the fixing hook provided on the hook portion of the holding member so as not to move, and on the moving hook provided on the hook portion of the holding member in a state where each constituent member can be moved in the longitudinal direction. It has a moving hook portion, and a fixing hook portion is provided in the central portion of each of the constituent members, and a moving hook portion is provided on both ends of the constituent member with respect to the fixing hook portion. In some cases, when a plurality of constituent members are stretched due to heat during vacuum processing such as sputtering, the moving hook portion of the anticorrosion main body member is hooked on the moving hook of the holding member and the plurality of constituent members are in a state of being hooked. Can be moved in the longitudinal direction of each.

As a result, according to the present invention, when a plurality of constituent members are each stretched by the heat generated during the vacuum treatment, they are evenly stretched toward both ends with respect to the central portion of each constituent member, so that the vacuum treatment is performed. It is possible to suppress the warp and distortion of the adhesive member at the time of.

Further, in the present invention, when a wall portion for shielding plasma extending toward the surface facing the discharge space of the vacuum chamber is provided on the peripheral edge of each constituent member of the protective body member, the protective member is provided. Since the amount of a substance such as a film forming material adhering to the surface on the discharge space side can be reduced, it is possible to further suppress the generation of particles due to the separation of the substance from the surface of the adhesive member.

Further, in the present invention, when a mounting portion for the holding member is provided on the peripheral edge portion of each constituent member of the protective main body member so as to extend outward from the wall portion for plasma shielding, the mounting portion. Even when the anti-adhesion body member is attached to the holding member using screws, the substance generated during vacuum processing is blocked by the plasma shielding wall provided on the anti-adhesion body member, and the anti-adhesion body member is shielded. Since it is possible to prevent the substance from adhering to the mounting portion, it is possible to further suppress the generation of particles due to the peeling of the substance from the surface of the adhesive member.

Schematic configuration diagram showing the internal configuration of a sputtering apparatus which is an example of the vacuum processing apparatus according to the present invention. (A) (b): Schematic configuration diagram showing an example of an anti-adhesion main body member of an anti-adhesion member according to the present invention, FIG. 2 (a) is a front view seen from the discharge space side, and FIG. 2 (b) is a front view. , Front view seen from the opposite side of the discharge space side (A) (b): Schematic configuration diagram showing an example of the protective main body member, FIG. 3 (a) is a front view seen from the discharge space side, and FIG. 3 (b) is FIG. 3 (a). A-A line cross section A front view showing an example of a holding member used in the present invention, as viewed from the discharge space side. (A): Explanatory drawing which shows the structure of the fixing hook part in the 1st and 2nd constituent members of a protective body member, and the fixing hook in the 1st and 2nd frame part of a holding member, (b): the protective body. Explanatory drawing which shows the structure of the hook for movement in the 1st and 2nd constituent members of a member, and the hook for movement in the 1st and 2nd frame portions of a holding member. (A)-(d): Cross-sectional view showing the configuration and operation of the main parts when the first and second constituent members of the anti-adhesion main body member are held by the first and second frame portions of the holding member. (A): Explanatory drawing showing the configuration of the fixing hook portion in the third and fourth constituent members of the anti-adhesion main body member and the fixing hook in the third and fourth frame portions of the holding member, (b): the anti-adhesion main body. Explanatory drawing which shows the structure of the hook for movement in the 3rd and 4th constituent members of a member, and the hook for movement in 3rd and 4th frame portions of a holding member. (A) to (d): Cross-sectional view showing the configuration and operation of the main parts when the third and fourth constituent members of the anti-adhesion main body member are held by the third and fourth frame portions of the holding member. It is a front view which shows the example of the adhesive member which concerns on this invention, and is seen from the discharge space side. BB line perspective sectional view of FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic configuration diagram showing an internal configuration of a sputtering apparatus which is an example of the vacuum processing apparatus according to the present invention.

2 (a) and 2 (b) are schematic configuration views showing an example of an anti-adhesion main body member of an anti-adhesion member according to the present invention, and FIG. 2 (a) is a front view and FIG. 2 (a) seen from the discharge space side. b) is a front view seen from the opposite side of the discharge space side.

3 (a) is a schematic configuration diagram showing an example of the protective main body member, FIG. 3 (a) is a front view seen from the discharge space side, and FIG. 3 (b) is FIG. 3 (a). ) Is a cross-sectional view taken along the line AA.

As shown in FIG. 1, the adhesion main body member 10 of this example constitutes the adhesion member 30 used in the sputtering apparatus 40 which is a vacuum processing apparatus, and is the substrate 8 (processing object) in the vacuum chamber 6. It is arranged in the vicinity while being held by the holding member 20 described later.

Here, in this example, the substrate 8 and the sputtering target (hereinafter referred to as “target”) 7 are arranged so as to face each other in a substantially vertical direction, and the adhesive body member 10 discharges between the substrate 8 and the target 7. It is provided so as to face the space 9.

In the sputtering apparatus 40 having such a configuration, a sputtering gas is introduced between the substrate 8 and the target 7, and a negative voltage is applied to the target 7 to generate plasma discharge.
As a result, the negatively charged target 7 is sputtered by the ions in the plasma, and the sputtered particles ejected from the surface of the target 7 form a film on the substrate 8.

FIG. 2A shows the front side surface of the protective body member 10, and FIG. 2B shows the back side surface of the protective body member 10.
As shown in FIGS. 2A and 2B, the adhesive body member 10 of this example has, for example, straight plate-shaped first to fourth constituent members 1 to 4, and has a rectangular frame shape having an opening 10a. Is formed in.

The adhesive body member 10 of this example is made of, for example, aluminum (Al), stainless steel, or titanium (Ti), and is usually arranged in a vertical direction.
Here, the adhesive body member 10 is arranged on the left and right sides between the first constituent member 1 and the second constituent member 2 arranged on the upper and lower sides and extending in the horizontal direction, and the first constituent member 1 and the second constituent member 2. It has a third constituent member 3 and a fourth constituent member 4 extending in the vertical direction.

Hereinafter, the longitudinal direction of the first constituent member 1 and the second constituent member 2 of the adhesive body member 10 is appropriately referred to as "X-axis direction", and the longitudinal direction of the third constituent member 3 and the fourth constituent member 4 is appropriately referred to as "Z". Axial direction ".

The first to fourth constituent members 1 to 4 are arranged with a slight gap between both ends of adjacent members in consideration of expansion due to heat during vacuum processing.
Of the first to fourth constituent members 1 to 4, the first constituent member 1 and the second constituent member 2, and the third constituent member 3 and the fourth constituent member 4 are straight lines passing through the center point of the protective main body member 10. It is formed and arranged in a line-symmetrical shape with respect to.

Then, the first to fourth constituent members 1 to 4 are hooked on and held by the holding member 20 by a mechanism described later.
It should be noted that each peripheral edge portion of the first to fourth constituent members 1 to 4 extends vertically, for example, toward the discharge space 9 side (surface side) shown in FIG. 1 of the first to fourth constituent members 1 to 4. The plasma shielding wall (wall portion for plasma shielding) 1c, 2c, 3c, and 4c formed as described above is provided.

On the back surface of the first to fourth constituent members 1 to 4 of this example, hooking portions 1A, 2A, 3A, 4A for hooking and holding the first to fourth constituent members 1 to 4, respectively, on the holding member 20. Is provided.

Here, the hooking portions 1A and 2A of the first and second constituent members 1 and 2 have a fixing hooking portion 1a and a moving hooking portion 1b, which will be described later, respectively, and these fixing hooking portions 1a and the moving hooking portion 1a are provided. 1b is provided, for example, in a straight line along the longitudinal direction (X-axis direction) of the first and second constituent members 1 and 2.

On the other hand, the hooking portions 3A and 4A of the third and fourth constituent members 3 and 4 have a fixing hooking portion 1a, an upward moving hooking portion 1b _a , and a lower moving hooking portion 1b _b , which will be described later, respectively. The fixing hooking portion 1a, the upward moving hooking portion 1b _a , and the lower moving hooking portion 1b _b are provided in the longitudinal direction (Z-axis direction) of the third and fourth constituent members 3 and 4. For example, they are arranged in a straight line along the line.

In the present invention, the fixing hooking portions 1a are provided at the central portions of the first and second constituent members 1 and 2, respectively, and both ends of the first and second constituent members 1 and 2 are provided with respect to the fixing hooking portions 1a. It is preferable to provide a hooking portion 1b for movement on the portion side.

Further, in the present invention, the fixing hooking portion 1a is provided at the central portion of the third and fourth constituent members 3 and 4, respectively, and the third and fourth constituent members 3 and 4 are provided with respect to the fixing hooking portion 1a. It is preferable to provide _{a hooking portion 1b a for moving upward and a hooking portion 1b b for} moving downward on both end sides of the above.

In the case of the present invention, the first to fourth constituent members are not particularly limited, but from the viewpoint of preventing the adhesive member 30 from warping and reducing the amount of movement of each end with respect to the fixed position. A plurality of movements so as to be line-symmetric with respect to a straight line (not shown) orthogonal to the longitudinal direction of the first to fourth constituent members 1 to 4, respectively, with respect to the fixing hook portion 1a provided in the central portion of 1 to 4. It is preferable to provide the hooking portion 1b _{(the hooking portion 1b a for moving upward and the hooking portion 1b b for} moving downward).

In this example, one fixing hooking portion 1a is provided at the central portion of the first to fourth constituent members 1 to 4, respectively, and the first to fourth constituent members 1 to 4 are provided with respect to the fixing hooking portion 1a. A plurality of (two each in this example) moving hooking portions 1b (upper side moving hooking portion 1b _a , lower side moving hooking portion 1b _b ) are provided at positions symmetrical to each other on both ends. ..

The fixing hooking portion 1a and the moving hooking portion 1b (upper side moving hooking portion 1b _a , lower side moving hooking portion 1b _b ) provided on the first to fourth constituent members 1 to 4 are, for example, long. It is formed in a rectangular parallelepiped shape and has the same width and length.

On the other hand, on the peripheral edges of the first to fourth constituent members 1 to 4, a plurality of attaching portions 5 for attaching the first to fourth constituent members 1 to 4 to the holding member 20 by using, for example, bolts are respectively plasma. It is provided so as to extend (project) outward from the shielding walls 1c to 4c.

FIG. 4 is a front view showing an example of the holding member used in the present invention, and is viewed from the discharge space side.
In this example, the holding member 20 is fixed in the sputtering device 40 shown in FIG. 1, and the first to fourth constituent members 1 to 4 of the adhesive body member 10 are attached to the discharge space 9 side of the holding member 20.

As shown in FIG. 4, the holding member 20 of this example is formed in a rectangular frame shape.
The holding member 20 is integrally formed by using a plate material having high rigidity, has an outer diameter slightly larger than the outer diameter of the above-mentioned protective main body member 10, and is slightly larger than the opening 10a of the protective main body member 10. An opening 20a having an inner diameter is provided.

The holding member 20 is composed of first to fourth frame portions 11 to 14 corresponding to the first to fourth constituent members 1 to 4 of the adhesive body member 10. That is, the first frame portion 11 and the second frame portion 12 extending in the horizontal direction are provided above and below the holding member 20, and vertically between the first frame portion 11 and the second frame portion 12 to the left and right of the holding member 20. An extending third frame portion 13 and a fourth frame portion 14 are provided.

Hereinafter, the longitudinal direction of the first frame portion 11 and the second frame portion 12 of the holding member 20 is appropriately referred to as "X-axis direction", and the longitudinal direction of the third frame portion 13 and the fourth frame portion 14 is appropriately referred to as "Z-axis direction". ".

On the surface of the holding member 20 on the discharge space 9 side, that is, the front side surface of the first to fourth frame portions 11 to 14, the hooking portions of the first to fourth constituent members 1 to 4 of the adhesive body member 10 are hooked. The first to fourth hook portions 11A to 14A corresponding to 1A to 4A are provided.
In this example, the first hook portion 11A is provided on the upper first frame portion 11 of the holding member 20, and the second hook portion 12A is provided on the lower second frame portion 12.

On the other hand, the third frame portion 13 on the left side when viewed from the discharge space 9 side shown in FIG. 1 of the holding member 20 is provided with the third hook portion 13A, and the fourth frame portion on the right side when viewed from the discharge space 9 side. A fourth hook portion 14A is provided on the 14.

The first to fourth hook portions 11A to 14A of the holding member 20 have a fixing hook 11a and a moving hook 11b, which will be described later, respectively, and these fixing hook 11a and the moving hook 11b are the first holding member 20. -The fourth frame portions 11 to 14 are provided side by side in a straight line, for example, along the longitudinal direction.

In the present invention, the fixing hooks 11a are provided at the central portions of the first to fourth frame portions 11 to 14 of the holding member 20, and the first to fourth frame portions 11 to 14 are provided with respect to the fixing hooks 11a. It is preferable to provide moving hooks 11b on both end sides of the above.

In the case of the present invention, there is no particular limitation, but from the viewpoint of preventing the adhesive member 30 from warping, the fixing hook 11a provided in the central portion of the first to fourth frame portions 11 to 14 described above is used. On the other hand, it is preferable to provide a plurality of moving hooks 11b so as to be line-symmetrical with respect to the longitudinal direction of the first to fourth frame portions 11 to 14, respectively.

In this example, one fixing hook 11a is provided at the central portion of the first to fourth frame portions 11 to 14, respectively, and both ends of the first to fourth frame portions 11 to 14 with respect to the fixing hook 11a. A plurality of (two in this example) moving hooks 11b are provided at positions on the side that are line-symmetrical.

These fixing hooks 11a and moving hooks 11b are the above-mentioned fixing hooking portion 1a and moving hooking portion 1b (upper side moving hooking portion 1b _a , lower side moving hooking portion 1b _b ). It is provided at each position corresponding to.

FIG. 5A is an explanatory view showing the configuration of the fixing hook portion in the first and second constituent members of the anti-adhesion main body member and the fixing hook in the first and second frame portions of the holding member, FIG. 5 (a). b) is an explanatory diagram showing the configuration of the moving hook portion in the first and second constituent members of the anti-adhesion main body member and the moving hook portion in the first and second frame portions of the holding member.

6 (a) to 6 (d) are cross-sectional views showing the configuration and operation of the main parts when the first and second constituent members of the protective body member are held by the first and second frame portions of the holding member. be.

As shown in FIGS. 4 and 5 (a) and 5 (b), in this example, the fixing hook 11a and the moving hook 11b in the first and second frame portions 11 and 12 of the holding member 20 are the holding member 20 . It is arranged in the fixing hook recess 21a and the moving hook recess 21b provided in the first and second frame portions 11 and 12, respectively.

The lengths of the fixing hook recesses 21a and the moving hook recesses 21b in the X-axis direction of the first and second frame portions 11 and 12 of the holding member 20 are all from the length of the upper portion. It is formed so that the length of the lower portion is longer.

The fixing hook 11a and the moving hook 11b are both arranged in the lower portion of the fixing hook recess 21a and the moving hook recess 21b.
The fixing hooks 11a of the first and second frame portions 11 and 12 are formed in, for example, a rectangular parallelepiped shape, and the height thereof decreases above the fixing hooks 11a toward the bottom side of, for example, the fixing hook recesses 21a. A planar support surface 11a ₁ is formed so as to be inclined (see FIG. 6A).

Further, the moving hooks 11b of the first and second frame portions 11 and 12 are formed in a rectangular parallelepiped shape, for example, and project upward from the upper portion thereof, for example, to a portion away from the bottom of the moving hook recesses 21b. A hook protrusion 11b ₁ is formed (see FIG. 6B).
A flat support portion 11b ₂ is formed between the hook protrusion 11b ₁ of the moving hook 11b and the bottom of the moving hook recess 21b.

In this example, the fixing hooking portion 1a and the moving hooking portion 1b in the first and second constituent members 1 and 2 of the protective body member 10 are used when the protective body member 10 is held by the holding member 20. In the first and second frame portions 11 and 12 of the holding member 20, both are configured to be arranged in the upper portion of the fixing hook recess 21a and the moving hook recess 21b (FIG. 5 (a). ) (B).

Here, as shown in FIG. 5A, the fixing hooking portions 1a of the first and second constituent members 1 and 2 of the adhesive body member 10 are held by the length (d1) in the X-axis direction. The upper portion of the fixing hook recesses 21a of the first and second constituent members 1 and 2 of the member 20 having a length (d) or less in the X-axis direction and being inserted (press-fitted) into the fixing hook recesses 21a, respectively. ) It is set to be possible (d1 ≦ d).

As a result, the fixing hook portions 1a of the first and second constituent members 1 and 2 of the adhesive body member 10 are placed in the fixing hook recesses 21a of the first and second frame portions 11 and 12 of the holding member 20. When they are arranged, they are in close contact with the wall portions 21ah on both sides of the fixing hook recess 21a in the X-axis direction, so that they cannot move in the X-axis direction in the fixing hook recess 21a. become.

Here, the fixing hooks 1a of the first and second constituent members 1 and 2 of the adhesive body member 10 are provided on the lower portion thereof with the support surface of the fixing hooks 11a of the first and second frame portions 11 and 12. A planar contact surface 1a ₁ that can be in close contact with 11a ₁ is provided (see FIG. 6A).

On the other hand, as shown in FIG. 5B, the moving hooking portions 1b of the first and second constituent members 1 and 2 of the above-mentioned protective body member 10 have a length (d2) in the X-axis direction. The length (D) of the upper portion of the moving hook recess 21b in the first and second frame portions 11 and 12 of the holding member 20 is set to be smaller than the length (D) in the X-axis direction (d2 <D). ).

As a result, the moving hooking portions 1b of the first and second constituent members 1 and 2 of the adhesive body member 10 are placed in the moving hook recesses 21b of the first and second frame portions 11 and 12 of the holding member 20. When arranged, a gap 21h is formed between both ends of each moving hook portion 1b in the X-axis direction and the wall portions 21b on both sides above the moving hook recess 21b, so that the moving hook can be used. The recess 21b does not come into contact with the wall portions 21b on both sides in the X-axis direction, and can move in the X-axis direction in the recess 21b for the moving hook.

Here, the moving hook portions 1b of the first and second constituent members 1 and 2 of the anti-adhesion main body member 10 have hook protrusions of the moving hooks 11b of the first and second frame portions 11 and 12 in the lower portion thereof. A protruding portion 1b ₁ capable of engaging with the portion 11b ₁ is provided (see FIG. 6 (b)).

The moving hooks 1b of the first and second constituent members 1 and 2 of the adhesive body member 10 are hooks 11b for moving the first and second frame portions 11 and 12 of the holding member 20, as will be described later. It is configured so that it can be moved in the X-axis direction even when it is hooked on.

In such a configuration, when the first and second constituent members 1 and 2 of the adhesive body member 10 are held by the first and second frame portions 11 and 12 of the holding member 20, the following operations are performed.
First, for example, as shown in FIG. 6A, the back side surface of the protective body member 10 and the front side surface of the holding member 20 are opposed to each other, and as shown in FIG. The fixing hooks 1a on the back side surfaces of the first and second constituent members 1 and 2 are inserted into the fixing hook recesses 21a on the front side surfaces of the first and second frame portions 11 and 12 of the holding member 20. Each contact surface 1a ₁ is brought into contact with the support surface 11a ₁ of the fixing hook 11a and hooked.

Here, the contact surface 1a ₁ of the hooking portions 1a for fixing the first and second constituent members 1 and 2 of the adhesive body member 10 is fixed to the first and second frame portions 11 and 12 of the holding member 20. The hook 11a is supported in close contact with the inclined support surface 11a ₁ .

In this case, as described above, the first and second constituent members 1 and 2 of the anti-adhesion main body member 10 arranged in the fixing hook recesses 21a of the first and second frame portions 11 and 12 of the holding member 20, respectively. As shown in FIG. 5A, the fixing hook portion 1a of 2 is in close contact with the wall portions 21ah on both sides of the fixing hook recess 21a in the X-axis direction, so that the fixing hook recess 21a is in close contact with the fixing hook recess 21a. Within 21a, they cannot move in the X-axis direction.

Further, at the same time as the above-mentioned operation, as shown in FIG. 6 (b), the back side surface of the anti-adhesion main body member 10 and the front side surface of the holding member 20 are opposed to each other, and as shown in FIG. 6 (d), the anti-adhesion is performed. The moving hook portions 1b on the back side surfaces of the first and second constituent members 1 and 2 of the main body member 10 are hooked recesses 21b for moving on the front side surfaces of the first and second frame portions 11 and 12 of the holding member 20. It is inserted inside, and each moving hook portion 1b is hooked on the moving hook 11b.

In this case, the protruding portion 1b ₁ of each of the moving hooking portions 1b of the first and second constituent members 1 and 2 of the adhesive body member 10 is for moving the first and second frame portions 11 and 12 of the holding member 20. The hook 11b is inserted between the bottom of the moving hook recess 21b, and the protruding portion 1b ₁ of the moving hook portion 1b of the adhesive body member 10 and the hook protrusion 11b of the moving hook 11b of the holding member 20. Make it mesh with ₁ (see FIGS. 9 and 10 described later).

In this state, the tip of the protruding portion 1b ₁ of the moving hooking portion 1b of the first and second constituent members 1 and 2 of the adhesive body member 10 is the first and second frame portions 11 of the holding member 20. , 12 may or may not be in contact with the support portion 11b ₂ of the moving hook 11b.
By the above steps, the steps of holding the first and second constituent members 1 and 2 of the adhesive body member 10 to the first and second frame portions 11 and 12 of the holding member 20 are completed.

FIG. 7A is an explanatory view showing the configuration of the fixing hook portion in the third and fourth constituent members of the anti-adhesion main body member and the fixing hook in the third and fourth frame portions of the holding member, FIG. 7 (a). b) is an explanatory diagram showing the configuration of the moving hook portion in the third and fourth constituent members of the anti-adhesion main body member and the moving hook portion in the third and fourth frame portions of the holding member.

8 (a) to 8 (d) are cross-sectional views showing the configuration and operation of the main parts when the third and fourth constituent members of the anticorrosion main body member are held by the third and fourth frame portions of the holding member. be.
FIG. 9 is a front view showing an example of the adhesive member according to the present invention, which is viewed from the discharge space side, and FIG. 10 is a perspective sectional view taken along line BB of FIG.

As shown in FIGS. 4 and 7 (a) and 7 (b), in this example, the fixing hook 11a and the moving hook 11b in the third and fourth frame portions 13 and 14 of the holding member 20 are the holding member 20 . It is arranged in the fixing hook recess 21a and the moving hook recess 21b provided in the third and fourth frame portions 13 and 14, respectively.

In the case of this example, the fixing hooks 11a provided on the third and fourth frame portions 13 and 14 of the holding member 20 are the fixing hooks 11a provided on the first and second frame portions 11 and 12 of the holding member 20. It has the same basic configuration as 11a.

The fixing hook recesses 21a and the moving hook recesses 21b of the third and fourth frame portions 13 and 14 are about the lengths of the holding member 20 in the X-axis direction of the third and fourth frame portions 13 and 14, respectively. , Both are formed so that the length of the lower portion is longer than the length of the upper portion.

The fixing hook 11a and the moving hook 11b are both arranged in the lower portion of the fixing hook recess 21a and the moving hook recess 21b.
The fixing hooks 11a of the third and fourth frame portions 13 and 14 are formed in, for example, a rectangular parallelepiped shape, and the height thereof becomes lower in the upper portion thereof, for example, toward the bottom side of the fixing hook recesses 21a. A planar support surface 11a ₁ is formed so as to be inclined (see FIG. 8A).

Further, the moving hooks 11b of the third and fourth frame portions 13 and 14 are formed in a rectangular parallelepiped shape, for example, and project upward from the upper portion thereof, for example, to a portion away from the bottom of the moving hook recesses 21b. A hook protrusion 11b ₁ is formed (see FIG. 8B).
A flat support portion 11b ₂ is formed between the hook protrusion 11b ₁ of the moving hook 11b and the bottom of the moving hook recess 21b.

In this example, the fixing hooking portion 1a, the upper side moving hooking portion 1b _a , and the lower side hooking portion 1b _b in the third and fourth constituent members 3 and 4 of the anticorrosion main body member 10 are the anticorrosion main body member 10. When the holding member 20 is held, both of the third and fourth frame portions 13 and 14 of the holding member 20 are arranged on the Z-axis upper side portion of the fixing hook recess 21a and the moving hook recess 21b. (See FIGS. 7 (a) and 7 (b) and FIG. 9).

Here, as shown in FIG. 7A, the fixing hooking portions 1a of the third and fourth constituent members 3 and 4 of the adhesive body member 10 are held by the length (d1) in the X-axis direction. The upper portion of the fixing hook recesses 21a in the third and fourth frame portions 13 and 14 of the member 20 having a length (d) or less in the X-axis direction and being inserted (press-fitted) into the fixing hook recesses 21a, respectively. ) It is set to have a possible length (d1 ≦ d).

As a result, the fixing hook portions 1a of the third and fourth constituent members 3 and 4 of the adhesive body member 10 are placed in the fixing hook recesses 21a of the third and fourth frame portions 13 and 14 of the holding member 20. When they are arranged, they come into close contact with the wall portions 21ah on both sides of the fixing hook recess 21a in the X-axis direction, so that they cannot move in the X-axis direction in the fixing hook recess 21a. Become.

Here, the fixing hooks 1a of the third and fourth constituent members 3 and 4 of the adhesive body member 10 are located below the fixing hooks 11a of the third and fourth frame portions 13 and 14 of the holding member 20. A flat contact surface 1a ₁ that can be brought into close contact with the support surface 11a ₁ of the above is provided (see FIG. 8A).

In this example, the contact surface 1a ₁ of the fixing hooking portions 1a of the third and fourth constituent members 3 and 4 of the adhesive body member 10 is the third and fourth frame portions 13 and 14 of the holding member 20. When supported in close contact with the support surface 11a ₁ of the fixing hook 11a, the total load of the third and fourth constituent members 3 and 4 of the adhesive body member 10 is the third and fourth frames of the holding member 20. It is configured to be supported by the fixing hooks 11a of the portions 13 and 14, respectively.

On the other hand, the hooking portion 1b a for moving upward and the hooking portion 1b _b for moving downward of the third and fourth constituent members 3 and 4 of the protective main body member 10 of this example are as shown in FIG. 7 ( _b ). , The length (d2) in the X-axis direction is equal to or less than the length (d) in the X-axis direction at the upper portion of the moving hook recess 21b in the third and fourth frame portions 13 and 14 of the holding member 20. The length is set so that it can be inserted (press-fitted) into the moving hook recess 21b (d2 ≦ d).

Therefore, in the case of this example, the hooking portion 1b _{a for moving upward and the hooking portion 1b b for} moving downward of the third and fourth constituent members 3 and 4 of the adhesive body member 10 are the third and third and 4 holding members 20. When the fourth frame portions 13 and 14 are arranged in the moving hook recesses 21b, they come into contact with the wall portions 21b on both sides of the moving hook recesses 21b in the X-axis direction in close contact with each other. It becomes impossible to move in the X-axis direction in the moving hook recess 21b.

On the other hand, in this example, when heat is applied during vacuum processing such as sputtering, the fixing hook portion 1a located at the center of the third and fourth constituent members 3 and 4 of the adhesive body member 10 is Z. Although it hardly extends in the axial direction and has no effect, the third and fourth constituent members 3 and 4 of the adhesive body member 10 extend in the Z-axis direction, so the following configuration is adopted in consideration of this. Has been done.

First, when the upper and lower moving hook portions 1b _a and 1b _b of the adhesive main body member 10 are hooked on the moving hook 11b of the holding member 20, as shown in FIG. 8 (d), the adhesive is attached. The hooks 1b _a for moving the upper and lower sides of the third and fourth constituent members 3 and 4 of the main body member 10 and the protruding portions 1b ₁ of 1 _{bb b} are the third and fourth frame portions 13 and 14 of the holding member 20. The moving hook 11b of the moving hook 11b is inserted between the bottom of the moving hook recess 21b, and the upper and lower moving hook portions 1b _a , the protruding portion 1b ₁ of 1b _b , and the moving hook 11b of the holding member 20 are inserted. The hook protrusion 11b ₁ of the above meshes with the hook protrusion 11b 1.

In such a state, when heat during vacuum processing is applied to the third and fourth constituent members 3 and 4 of the adhesive body member 10, the upper side with respect to the central portion of the third and fourth constituent members 3 and 4. Part extends upward on the Z-axis, whereby the hooking portion _{1 ba} for moving upward also extends upward on the Z-axis.

As a result, the tip of the protruding portion 1b ₁ of the hooking portion 1b _a for moving upward on the anti-adhesion main body member 10 is separated from the supporting portion 11b ₂ of the moving hook 11b of the holding member 20, and the distance between them is widened.

Therefore, in this example, the tip of the protruding portion 1b ₁ of the hooking portion 1b _a for moving upward is the support portion 11b of the hook 11b for moving the holding member 20 in a state where heat is not applied to the adhesive body member 10. Either a configuration in which the _two are in contact with each other or a configuration in which the two are separated from each other can be adopted.

However, when heat is applied to the adhesive body member 10, the protruding portion 1b ₁ of the hooking portion 1b _a for moving upward is disengaged from the hook protrusion 11b ₁ of the hook 11b for moving the holding member 20. Appropriately set the shape and dimensions of the protruding portion 1b ₁ of the hooking portion 1b _a for moving upward side of the protective body member 10 and the hook protruding portion 11b ₁ of the hook 11b for moving the holding member 20. Is preferable.

On the other hand, when heat is applied to the adhesive body member 10, the portion on the lower side with respect to the central portion of the third and fourth constituent members 3 and 4 extends downward on the Z axis, thereby downward. The side movement hook portion 1b _b also extends downward on the Z axis, so that the tip portion thereof moves downward on the Z axis.

Therefore, in this example, when heat is applied to the adhesive body member 10, the tip of the protruding portion 1b ₁ of the lower moving hook portion 1b _b is the supporting portion 11b ₂ of the moving hook 11b of the holding member 20. The tip of the protruding portion 1b ₁ of the lower side moving hook portion 1b _b is the moving hook of the holding member 20 in a state where heat is not applied to the adhesive body member 10 so as not to come into contact with and press it. The protruding portion 1b ₁ of the lower moving hook portion 1b _b of the adhesive body member 10 and the hook protrusion of the moving hook 11b of the holding member 20 so as to be separated from the support portion 11b ₂ of the 11b by a predetermined distance. It is preferable to appropriately set the shapes and dimensions of 11b ₁ and the support portion 11b ₂ .

In such a configuration, when the third and fourth constituent members 3 and 4 of the adhesive body member 10 are held by the third and fourth frame portions 13 and 14 of the holding member 20, the following operations are performed.
First, for example, as shown in FIG. 8A, the back side surface of the protective body member 10 and the front side surface of the holding member 20 are opposed to each other, and as shown in FIG. The fixing hooks 1a on the back side surfaces of the third and fourth constituent members 3 and 4 are inserted into the fixing hook recesses 21a on the front side surfaces of the third and fourth frame portions 13 and 14 of the holding member 20. Each contact surface 1a ₁ is brought into contact with the support surface 11a ₁ of the fixing hook 11a and hooked.

Here, the contact surface 1a ₁ of each fixing hook portion 1a of the third and fourth constituent members 3 and 4 of the anti-adhesion main body member 10 fixes the third and fourth frame portions 13 and 14 of the holding member 20. The hook 11a is supported in close contact with the inclined support surface 11a ₁ .

In this case, as described above, the third and fourth constituent members 3 of the adhesive body member 10 arranged in the fixing hook recesses 21a of the third and fourth frame portions 13 and 14 of the holding member 20, respectively. As shown in FIG. 7A, the fixing hook portion 1a of 4 is in close contact with the wall portions 21ah on both sides of the fixing hook recess 21a in the X-axis direction, so that the fixing hook recess 21a is in close contact with the fixing hook recess 21a. It is in a state where it cannot move in the X-axis direction in 21a.

Further, at the same time as the above-mentioned operation, as shown in FIG. 8 (b), the back side surface of the anti-adhesion main body member 10 and the front side surface of the holding member 20 are opposed to each other, and as shown in FIG. 8 (d), anti-adhesion is performed. The hooking portions 1b _a and 1b _b for moving the upper and lower sides of the back side surfaces of the third and fourth constituent members 3 and 4 of the main body member 10 are the tables of the third and fourth frame portions 13 and 14 of the holding member 20. It is inserted into the moving hook recess 21b on the side surface, and the upper and lower moving hook portions 1b _a and 1b _b are hooked on the moving hook 11b, respectively.

In this case, the hooking portions 1b _a for moving the upper and lower sides of the third and fourth constituent members 3 and 4 of the protective body member 10 and the protruding portions 1b ₁ of 1b _b are the third and fourth members of the holding member 20. The moving hooks 11b of the frame portions 13 and 14 enter between the bottom of the moving hook recesses 21b, respectively, and the upper and lower moving hooking portions 1b _a and 1b _b of the adhesive body member 10 are projected portions 1b. ₁ engages with the hook protrusion 11b ₁ of the moving hook 11b of the holding member 20.

By the above steps, the steps of holding the third and fourth constituent members 3 and 4 of the adhesive body member 10 to the third and fourth frame portions 13 and 14 of the holding member 20 are completed.
After that, in the mounting portion 5 of the anti-adhesion main body member 10, the anti-adhesion main body member 10 is firmly fixed and held to the holding member 20 by, for example, fastening a screw (not shown).
As a result, as shown in FIG. 9, the adhesive member 30 of the present embodiment is obtained.

In the present embodiment described above, it is held on the surface of the first to fourth constituent members 1 to 4 of the anticorrosion main body member 10 on the surface opposite to the surface facing the discharge space 9 in the vacuum chamber 6. Since the first to fourth hook portions 1A to 4A for hooking and mounting the first to fourth hook portions 11A to 14A provided on the member 20 are provided, respectively, the adhesive body member 10 is held by the holding member. It is not necessary to use a large number of covered bolts to hold the 20 as in the prior art.

As a result, according to the present embodiment, the uneven portion of the surface of the adhesive member 30 on the discharge space 9 side can be reduced to reduce the surface area thereof, so that the film-forming material or the like adhered during the vacuum treatment can be reduced. It is possible to suppress the generation of particles due to peeling from the surface of the adhesive member 30.

In the present embodiment, the first to fourth constituent members 1 to 4 of the adhesive body member 10 are formed in an elongated shape, and the first to fourth hooking portions 1A to the first to fourth constituent members 1 to 4 are formed in an elongated shape. 4A is a state in which the adhesive body member 10 is held by the holding member 20, and the first to fourth hook portions 11A to the holding member 20 are held so that the first to fourth constituent members 1 to 4 do not move in the longitudinal direction. The first to fourth hook portions 11A to the holding member 20 in a state where the fixing hook portion 1a hooked on the fixing hook 11a provided on the 14A and the first to fourth constituent members 1 to 4 can be moved in the longitudinal direction. It has a moving hooking portion 1b (upper side moving hooking portion 1b _a , lower side moving hooking portion 1b _b ) to be hooked on the moving hook 11b provided on the 14A, and the fixing hooking portions 1a are first to first. 4 In addition to being provided in the central portion of the constituent members 1 to 4, the moving hooking portion 1b (upper side moving hooking portion 1b _a , lower side moving hooking portion 1b _b ) is first to 1st to the fixing hooking portion 1a. Since it is provided on both ends of the fourth constituent members 1 to 4, when the first to fourth constituent members 1 to 4 are stretched due to heat during vacuum processing such as sputtering, the adhesive body member 10 The moving hooking portion 1b (upper side moving hooking portion 1b _a , lower side moving hooking portion 1b _b ) is hooked on the moving hook 11b of the holding member 20, and the first to fourth constituent members 1 to 4 are hooked. Can be moved in the longitudinal direction of each.

As a result, according to the present embodiment, when the first to fourth constituent members 1 to 4 are each stretched by the heat generated during the vacuum treatment, the center of the first to fourth constituent members 1 to 4, respectively. Since it extends evenly to both ends with respect to the portion, it is possible to suppress warpage and distortion of the adhesive member 30 during vacuum processing.

Further, in the present embodiment, a wall portion 1c for plasma shielding extending toward the surface of the vacuum chamber 6 facing the discharge space 9 on the peripheral edge portions of the first to fourth constituent members 1 to 4 of the anticorrosion main body member 10. Since ~ 4c is provided, the amount of a substance such as a film forming material adhering to the surface of the adhesive member 30 on the discharge space 9 side can be reduced, so that the substance can be reduced from the surface of the adhesive member 30. It is possible to further suppress the generation of particles due to the peeling of the plasma.

Further, in the present embodiment, a mounting portion 5 for the holding member 20 is provided on the peripheral edge portion of each constituent member of the protective body member 10 so as to extend outward from the plasma shielding walls 1c to 4c. Therefore, even when the adhesive body member 10 is attached to the holding member 20 by using a screw in the attachment portion 5, the substances generated during the vacuum treatment are the plasma shielding walls 1c to 4c provided on the adhesive body member 10. Since it is possible to prevent the adhesive body member 10 from adhering to the mounting portion 5, it is possible to further suppress the generation of particles due to the separation of the substance from the surface of the adhesive member 30.

The present invention is not limited to the above embodiment, and various modifications can be made. For example, the shape and number of the fixing hooking portion 1a of the adhesive body member 10, the moving hooking portion 1b, the upward moving hooking portion 1b _a , and the lower moving hooking portion 1b _b are described above. It is not limited to the form of, and can be changed as appropriate.

Further, the shape of the fixing hook 11a of the holding member 20 and the shape and number of the moving hooks 11b are not limited to those of the above-described embodiment, and can be appropriately changed.
Further, although the above embodiment has been described by taking the case of being applied to a sputtering apparatus as an example, the present invention is not limited to this, and can be applied to various vacuum processing apparatus.

1 ... First component 1A ... Hooking part 1a ... Fixing hooking part 1b ... Moving hooking part 1b _a ... Upper side moving hooking part 1b _b ... Lower side moving hooking part 1c ... Plasma shielding wall (for plasma shielding) Wall part)
2 ... 2nd component 2A ... Hooking part 2c ... Plasma shielding wall 3 ... 3rd component 3A ... Hooking part 3c ... Plasma shielding wall 4 ... 4th component 4A ... Hooking part 4c ... Plasma shielding wall 5 ... ... Mounting part 6 ... Vacuum tank 7 ... Sputtering target 8 ... Substrate (processed object)
10 ... Anti-bonding body member 11 ... First frame portion 11a ... Fixing hook 11b ... Moving hook 11A ... First hook portion 12 ... Second frame portion 12A ... Second hook portion 13 ... Third frame portion 13A ... Third Hook portion 14 ... 4th frame portion 14A ... 4th hook portion 20 ... Holding member 21a ... Fixed hook recess 21b ... Moving hook recess 30 ... Detachable member 40 ... Sputtering device (vacuum processing device)

Claims (5)

An anti-adhesive member that prevents substances generated during vacuum processing from adhering to the vacuum chamber.
Frame-shaped protective body member and
A holding member for holding the adhesive body member is provided.
The anti-adhesion main body member has a plurality of plate-shaped constituent members provided around the object to be treated, and the plurality of constituent members are on a surface opposite to a surface facing the discharge space in the vacuum chamber. , A hooking portion for hooking and mounting on a plurality of hook portions provided on the holding member is provided .
A protective member provided with a wall portion for plasma shielding extending toward a surface facing the discharge space of the vacuum chamber on the peripheral edge of each constituent member of the protective main body member. Each component of the anti-adhesion body member is formed in an elongated shape, and the hooking portion of each component moves in the longitudinal direction while the anti-adhesion body member is held by the holding member. A fixing hook portion that is hooked on the fixing hook provided on the hook portion of the holding member so as not to be prevented, and a moving hook provided on the hook portion of the holding member in a state where each component member can be moved in the longitudinal direction. The moving hooking portion is provided at the center of each of the constituent members, and the moving hooking portion is provided on both ends of the constituent member with respect to the fixing hooking portion. The anti-adhesion member according to claim 1. The first or second aspect of the present invention, wherein a mounting portion for the holding member is provided on the peripheral edge of each component of the anti-adhesion main body member so as to extend outward with respect to the wall portion for shielding the plasma. Adhesive member. With a vacuum tank,
A protective member provided in the vacuum chamber to prevent substances generated during vacuum processing from adhering to the vacuum chamber is provided.
The anti-adhesion member has a frame-shaped anti-adhesion main body member and a holding member for holding the anti-adhesion main body member.
The anti-adhesion main body member has a plurality of plate-shaped constituent members provided around the object to be treated, and has a plurality of plate-shaped constituent members.
The plurality of constituent members are provided with hooking portions for hooking and mounting on the plurality of hook portions provided on the holding member on the surface opposite to the surface facing the discharge space in the vacuum chamber.
A wall portion for plasma shielding extending toward the surface facing the discharge space of the vacuum chamber is provided on the peripheral edge of each component of the anti-adhesion main body member.
A vacuum processing apparatus configured to perform a predetermined vacuum treatment on a processing object arranged in the vicinity of the adhesion-proof member. The vacuum processing apparatus according to claim 4 , further comprising the vacuum chamber in which the sputtering target is arranged, and configured to perform sputtering on an object to be processed arranged in the vicinity of the adhesive member.

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