JP2869159B2 - Screws for fixing the protection plate - Google Patents
Screws for fixing the protection plateInfo
- Publication number
- JP2869159B2 JP2869159B2 JP19278990A JP19278990A JP2869159B2 JP 2869159 B2 JP2869159 B2 JP 2869159B2 JP 19278990 A JP19278990 A JP 19278990A JP 19278990 A JP19278990 A JP 19278990A JP 2869159 B2 JP2869159 B2 JP 2869159B2
- Authority
- JP
- Japan
- Prior art keywords
- screw
- fixing
- plate
- deposit
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Description
【発明の詳細な説明】 〔概要〕 本発明は，スパッタ装置やCVD装置等の堆積物防着板
の固定用ネジの構造に関し， 確実な取り付けが行なえることを目的とし， 成膜用の半導体製造装置のチャンバ内壁に取り付けれ
られる防着板固定用ネジの構造において，ネジ部の頭部
の上に，該頭部より更に大きな径のつまみが一体構造に
て形成されてなるように構成する。DETAILED DESCRIPTION OF THE INVENTION [Overview] The present invention relates to a structure of a screw for fixing a deposit-preventing plate of a sputtering apparatus, a CVD apparatus, or the like. In the structure of the screw for fixing the anti-adhesion plate to be attached to the inner wall of the chamber of the manufacturing apparatus, a knob having a larger diameter than the head is integrally formed on the head of the screw part.
本発明は，スパッタ装置やCVD装置等の堆積物防着板
の固定用ネジの構造に関する。The present invention relates to a structure of a screw for fixing a deposit-preventing plate such as a sputtering device or a CVD device.
近年の半導体製造装置のチャンバ内における堆積物防
着板の固定用ネジには，着脱の容易さと，取り付け手番
の短縮が要求されている。2. Description of the Related Art In recent years, screws for fixing a deposit-preventing plate in a chamber of a semiconductor manufacturing apparatus are required to be easily attached and detached and shortened in mounting steps.
そのため，従来取外しに時間を要した防着板固定用ネ
ジの構造を改良する必要があった。Therefore, it is necessary to improve the structure of the screw for fixing the anti-adhesion plate, which has conventionally required time to remove.
第３図は従来例の説明図である。 FIG. 3 is an explanatory view of a conventional example.
図において,13はネジ,14はネジキャップ,15は防着板,
16はチャンバ,17は堆積物である。In the figure, 13 is a screw, 14 is a screw cap, 15 is an adhesion plate,
16 is a chamber and 17 is a deposit.
従来のスパッタ装置やCVD装置等の半導体製造装置に
おいては，装置を稼働して，金属膜等をスパッタした
り，ポリSi膜等をCVD成長した場合に，基板７上に堆積
物としての金属膜，或いはポリSi膜等が形成されるが，
同時に，基板とターゲット，或いはガス拡散板間のチャ
ンバの部分にも堆積物が付着する。そのために，この部
分に防着板を取り付けて，チャンバに直接付着するのを
防止するとともに，防着板を取外して，堆積物の除去を
し易くする。しかし，何度もスパッタ等の堆積を繰り返
していると，段々に堆積物厚く堆積されて，堆積物が繋
がってしまい，ネジを回して，ネジを取り外すことが大
変に困難と成ってくる。In a conventional semiconductor manufacturing apparatus such as a sputtering apparatus or a CVD apparatus, when the apparatus is operated to sputter a metal film or the like or to grow a poly-Si film or the like by CVD, a metal film as a deposit is formed on the substrate 7. Or a poly-Si film is formed,
At the same time, the deposit also adheres to the portion of the chamber between the substrate and the target or the gas diffusion plate. For this purpose, an attachment plate is attached to this portion to prevent direct attachment to the chamber, and the attachment plate is removed to facilitate removal of deposits. However, if the deposition such as sputtering is repeated many times, the deposit is gradually thickened, and the deposit is connected, and it becomes very difficult to turn the screw and remove the screw.
そのため，第３図に示すように，チャンバに堆積物が
付かないための防着板の取り付け方法において，取り付
け手番を短縮するためにネジの頭部に傘状の径の広いつ
まみを被せる構造のネジキャップ14を使用していたが，
ネジ13の加工精度や形状，或いは，ネジキャップ14の取
り付け時の不確実性のために，使用中に，振動等により
落下するなどの問題が生じていた。Therefore, as shown in Fig. 3, in the method of attaching a deposition-preventing plate to prevent deposits from adhering to the chamber, a structure in which an umbrella-shaped knob with a large umbrella shape is put on the head of the screw to reduce the number of attachment steps Used screw cap 14
Due to the processing accuracy and shape of the screw 13 or the uncertainty when the screw cap 14 is attached, a problem such as dropping due to vibration or the like during use has occurred.
従って，ネジに対するネジキャップの取り付けに手間
がかかること，及び，使用中にネジキャップが落下して
しまうといった問題があり，安定使用が出来なかった。Therefore, there is a problem that it takes time to attach the screw cap to the screw, and the screw cap drops during use, so that stable use was not possible.
本発明は，以上の点に鑑み，これらの欠点を解消し
て，防着板取り付けネジが，安定して，確実に，容易に
取り付けが行なえることを目的として提供されるもので
ある。SUMMARY OF THE INVENTION In view of the above, the present invention has been made to solve the above drawbacks and to provide a fixing plate mounting screw that can be stably, reliably and easily mounted.
第１図は本発明の原理説明図である。 FIG. 1 is a diagram illustrating the principle of the present invention.
図において,1はネジ部,2は頭部,3はつまみ,4はネジで
ある。In the figure, 1 is a screw portion, 2 is a head, 3 is a knob, and 4 is a screw.
本発明では，上記の問題点を解決するために，規格品
と同等のネジ部１を有する防着板固定用ネジ４の頭部２
に，更に大きな径のつまみ３を一体構造により作成し
て，ネジ４の上部に付着する堆積物12と，防着板に付着
する堆積物12を分断して，ネジ４の取外しを容易にす
る。また，つまみ３の部分を大きくして，掴みやすく，
しかも，ネジ４の着脱時の作業性を大きく向上させてい
る。In the present invention, in order to solve the above-mentioned problem, the head 2 of the screw 4 for fixing the attachment-preventing plate having the screw portion 1 equivalent to the standard product is used.
In addition, the knob 3 having a larger diameter is formed by an integral structure to separate the deposit 12 attached to the upper part of the screw 4 from the deposit 12 attached to the anti-adhesion plate, thereby facilitating the removal of the screw 4. . In addition, we make knob 3 part big and are easy to grasp,
In addition, workability when attaching and detaching the screw 4 is greatly improved.
即ち，本発明の目的は，成膜用の半導体製造装置のチ
ャンバ内壁に取り付けられる防着板固定用ネジの構造に
おいて，ネジ部１の頭部２の上に，該頭部２より更に大
きな径のつまみ３が一体構造にて形成されてなることに
より達成される。That is, an object of the present invention is to provide a structure of a screw for fixing a deposition-preventing plate attached to the inner wall of a chamber of a semiconductor manufacturing apparatus for film formation. Is achieved by forming the knob 3 of an integral structure.
本発明では，上記のように，ネジの頭部の上に，更に
大きなつまみの部分を一体構造として形成する構造とな
り，使用中に外れる心配がなくなり，しかもおおきなつ
まみによってネジの着脱が容易にでき，手番短縮が可能
となる。In the present invention, as described above, a larger knob portion is formed as an integral structure on the head of the screw, so that there is no fear of detachment during use, and the screw can be easily attached and detached by the large knob. , It is possible to shorten the turn.
第２図は本発明の一実施例の装置への取り付け部の説
明図である。FIG. 2 is an explanatory view of a mounting portion to an apparatus according to one embodiment of the present invention.
図において,4はネジ,5は防着板,6はチャンバ,7は基
板,8は基板ホルダ,9はターゲット,10はガス導入口,11は
排気口,12は堆積物である。In the figure, 4 is a screw, 5 is an anti-adhesion plate, 6 is a chamber, 7 is a substrate, 8 is a substrate holder, 9 is a target, 10 is a gas inlet, 11 is an exhaust port, and 12 is sediment.
第２図（ａ）に示すスパッタ装置のチャンバ６の内壁
に，本発明のネジ４を使用して，防着板５を取り付け
る。An adhesion-preventing plate 5 is attached to the inner wall of the chamber 6 of the sputtering apparatus shown in FIG.
装置を稼働して,Alをスパッタした場合，基板７上に
堆積物としてのAl膜が形成されるが，同時に，基板７と
ターゲット９間のチャンバ６の部分にも堆積物12が付着
する。そのために，この部分に防着板を取り付けて，チ
ャンバ６に直接付着するのを防止するとともに，堆積物
12の除去をし易くしてある。When the apparatus is operated and Al is sputtered, an Al film as a deposit is formed on the substrate 7, but at the same time, the deposit 12 adheres to the portion of the chamber 6 between the substrate 7 and the target 9. For this purpose, an anti-adhesion plate is attached to this part to prevent direct adhesion to the chamber 6 and to prevent deposits
12 are easily removed.
本発明のネジでは，ネジ４の頭部２に大きな径のつま
み３がついているので，堆積物12が繋がって，ネジ４を
取り外すことが困難となることはなく，堆積物は図に示
すように，ネジ４の下に僅かしか進入せず，ネジ４の着
脱が非常に容易に行なえる。In the screw of the present invention, since the head 2 of the screw 4 is provided with the knob 3 having a large diameter, the sediment 12 is not connected, so that it is not difficult to remove the screw 4. In addition, the screw 4 only slightly enters below the screw 4, and the attachment and detachment of the screw 4 can be performed very easily.
以上説明したように，本発明によれば，ネジは通常の
規格化されたネジと同様に防着板に取り付けられ，且
つ，防着板とネジの上部に付着した堆積物を，構造的に
分断しているので，ネジの取外しが容易となり，一体成
形となっているので，従来例のような，振動によるつま
みの落下も起こらない。そして，つまみの部分が大口径
化されているので，着脱時の作業性も向上している。As described above, according to the present invention, the screw is attached to the shield plate in the same manner as a normal standardized screw, and the deposit attached to the shield plate and the screw is removed structurally. Since the screws are separated, the screws can be easily removed and are integrally molded, so that the knobs do not drop due to vibration as in the conventional example. And since the knob part has a large diameter, the workability at the time of attachment / detachment is also improved.
第１図は本発明の原理説明図， 第２図は本発明の一実施例の説明図。 第３図は従来例の説明図 である。 図において， １はネジ部,2は頭部， ３はつまみ,4はネジ， ５は防着板,6はチャンバ， ７は基板,8は基板ホルダ， ９はターゲット,10はガス導入口， 11は排気口,12は堆積物 である FIG. 1 is a diagram illustrating the principle of the present invention, and FIG. 2 is a diagram illustrating an embodiment of the present invention. FIG. 3 is an explanatory view of a conventional example. In the figure, 1 is a screw portion, 2 is a head, 3 is a knob, 4 is a screw, 5 is a deposition prevention plate, 6 is a chamber, 7 is a substrate, 8 is a substrate holder, 9 is a target, 10 is a gas inlet, 11 is the exhaust port, 12 is sediment
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) H01L 21/28 - 21/288 H01L 21/44 - 21/445 H01L 21/205 H01L 21/31 H01L 21/365 C23C 16/00 - 16/56 C23C 14/00 - 14/58 H01L 21/469 H01L 21/86 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) H01L 21/28-21/288 H01L 21/44-21/445 H01L 21/205 H01L 21/31 H01L 21 / 365 C23C 16/00-16/56 C23C 14/00-14/58 H01L 21/469 H01L 21/86
Claims (1)
取り付けられる防着板固定用ネジの構造において， ネジ部（１）の頭部（２）の上に，該頭部（２）より更
に大きな径のつまみ（３）が一体構造にて形成されてな
ることを特徴とする防着板固定用ネジ。In a structure of a screw for fixing a deposition-preventing plate to be attached to an inner wall of a chamber of a semiconductor manufacturing apparatus for film formation, a head (2) of a screw part (1) is mounted on the head (2). A screw for fixing a deposition-preventing plate, wherein a knob (3) having a larger diameter is formed in an integral structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19278990A JP2869159B2 (en) | 1990-07-19 | 1990-07-19 | Screws for fixing the protection plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19278990A JP2869159B2 (en) | 1990-07-19 | 1990-07-19 | Screws for fixing the protection plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0478132A JPH0478132A (en) | 1992-03-12 |
| JP2869159B2 true JP2869159B2 (en) | 1999-03-10 |
Family
ID=16297025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19278990A Expired - Fee Related JP2869159B2 (en) | 1990-07-19 | 1990-07-19 | Screws for fixing the protection plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2869159B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102412175B1 (en) | 2018-06-20 | 2022-06-22 | 가부시키가이샤 알박 | Adhesion prevention member and vacuum processing device |
| CN112334591B (en) | 2018-12-27 | 2023-07-18 | 株式会社爱发科 | Anti-adhesion member and vacuum processing apparatus |
-
1990
- 1990-07-19 JP JP19278990A patent/JP2869159B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0478132A (en) | 1992-03-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |