TW201517398A - Anisotropic conductive connector, manufacturing and device thereof - Google Patents

Abstract

Disclosed is an anisotropic conductive connector comprising: a planar elastic body which comprises a plurality of conductors in which conductive particles having magnetism to show conductivity in a thickness direction are oriented in the thickness direction and contained, and an elastic insulator formed around the plurality of conductors, the conductor and the elastic insulator being integrally made of one high molecular substance, wherein the conductor comprises an end portion having a concave-convex portion to be in partial contact with a surface of an inspection contact point of an object to be inspected, the end portion more protruding than a surface of the elastic insulator. The end portion of the conductor is formed as a sharp tip to be in contact with the inspective contact point of the object to be inspected, so that foreign materials generated at a test, e.g., tin (Sn) can be prevented from transition, thereby stably maintaining a resistance characteristic.

Description

Anisotropic conductive connector and method of manufacturing same

The present invention relates to an anisotropic conductive connector and a method of producing the same, and more particularly to an anisotropic conductive connector, and a method and apparatus therefor, wherein a foreign material (Sn) is prevented from accumulating at an end portion of a conductive portion Above, the conductive portion will contact the terminal of the object to be inspected during testing.

The semiconductor wafer, circuit board or the like to be inspected is formed with a fine pattern integrated at a high density, and undergoes a test as to whether it is normal or abnormal during the manufacturing process. The semiconductor wafer or circuit board contains contacts to be detected and having fine pitch. Likewise, the detector circuit that provides the electrical signal for testing to the object to be detected also includes a detective contact whose fine pitch corresponds to the fine pitch of the detected contact of the object to be detected.

In order to detect the electrical characteristics of the object to be inspected, an anisotropic conductive connector can be used to electrically connect between the sense contact (bump) of the object to be detected and the detective contact (pad) of the detector circuit.

FIG. 1 illustrates a conventional anisotropic conductive connector 10. Conventional heterosexuality The electrical connector 10 includes flat elastomers 12, 14 having a plurality of conductors 12 and an elastomeric insulator 14 formed around the plurality of conductors 12. The plurality of conductors 12 contain conductive particles having magnetic properties and oriented in the thickness direction so that conductivity can occur in the thickness direction.

The conductor 12 has a planar end portion having a detecting surface that will contact the detecting contact (bump) of the object to be inspected. At the time of testing, the end portion of the conductor 12 is pressed many times and contacts a detection joint such as a bump. During this pressing and contact process, foreign material (for example, tin (Sn)) is transferred to the surface of the end portion, and thus the contact resistance is increased, thereby shortening the life of the connector.

The present invention has been conceived to solve the aforementioned problems, and an aspect of the present invention is to provide an anisotropic conductive connector having a conductor which can reduce the accumulation of foreign materials transferred during testing.

Another aspect of the present invention is to provide an anisotropic conductive connector that reduces the electrical resistance of a conductor between a sense contact electrically connected to an object to be detected and a detective contact of the detector circuit.

Another aspect of the present invention is to provide a method and apparatus for fabricating an anisotropic conductive connector having a conductor that reduces accumulation of foreign material transferred during testing.

The foregoing and/or other aspects of the present invention are achieved by providing an anisotropic conductive connector comprising: a planar elastomer comprising a plurality of conductors and an elastomeric insulator formed around the plurality of conductors The plurality of conductors contain conductive particles having magnetic properties, the conductive particles exhibiting conductivity in a thickness direction and oriented in a thickness direction, and the conductor and the elastic insulator are subjected to a high score The sub-substance is integrally formed, wherein the conductor includes an end portion having a concavo-convex portion to be partially in contact with a surface of the detecting contact of the object to be inspected, and the end portion is more protruded than a surface of the elastic insulator.

An insulating film having an opening which is disposed on both sides of the planar elastic body is formed at a position corresponding to both end portions of the plurality of conductors.

The end portion may include a plurality of concavo-convex portions coated with a conductive material.

The plurality of concave and convex portions may include at least one of a central concave circular tip, a polygonal tip, a conical tip, and a tip rounded conical shape.

The conductor may include a lower electrical conductor disposed at the lower side.

The lower electrical conductor may include a protrusion in a portion of the conductor to be contacted.

The lower electrical conductor may include protrusions and grooves in the portion of the conductor to be contacted.

The lower electrical conductor may include a plurality of concave and convex portions in a portion of the conductor to be contacted.

The foregoing and/or other aspects of the present invention are achieved by providing a method of fabricating an anisotropic conductive connector, the method comprising: arranging the first non-magnetic forming substrate and the second non-magnetic forming substrate to face each other, Thereby leaving a predetermined space therebetween, wherein the first ferromagnetic body is disposed in the first non-magnetic forming substrate in a predetermined pattern, and the second ferromagnetic body is disposed in the second non-magnetic forming substrate in a position corresponding to the predetermined pattern Wherein at least one of the first ferromagnetic body facing each other and the opposite end portion of the second ferromagnetic body is recessed from the surface of the forming substrate, and includes a convex-concave portion; the liquid high-molecular substance in which the conductive particles having magnetic properties are distributed Between the first forming substrate facing the other and the second forming substrate; respectively arranging the magnets on the outside of the first forming substrate and the outside of the second forming substrate, and applying the magnet Magnetic force, such that magnetically conductive particles can be oriented in a thickness direction between the first ferromagnet and the second ferromagnet; and in a state in which magnetically conductive particles are oriented in a thickness direction, the liquid polymer material is hardened so as to A conductor including a tip portion having a plurality of concavo-convex portions corresponding to the plurality of concavo-convex portions is formed between the first ferromagnet and the second ferromagnet.

By providing a device for manufacturing an anisotropic conductive connector In the foregoing and/or other aspects of the present invention, the apparatus includes: a first non-magnetic forming substrate, a first ferromagnetic body disposed in the first non-magnetic forming substrate in a predetermined pattern; and a second non-magnetic forming substrate, a ferromagnetic body disposed in the second non-magnetic forming substrate at a position corresponding to the predetermined pattern; and a pair of magnets disposed at an outer portion of the first forming substrate and an outer portion of the second forming substrate, respectively A forming substrate and a second forming substrate are configured to face each other to leave a predetermined space, and at least one of the first ferromagnetic body facing each other and the opposite end portion of the second ferromagnetic body is recessed from a surface of the forming substrate, and A convex-concave portion is included, and a liquid high-molecular substance in which magnetic conductive particles are distributed is disposed between the first forming substrate and the second forming substrate facing each other, and the magnet applies a magnetic force so that the conductive particles having magnetic properties can be A ferromagnetic body and a second ferromagnetic body are oriented in a thickness direction, and in a state in which magnetic conductive particles are oriented in a thickness direction, hard The liquid high molecular substance is formed to form a conductor including a terminal portion having a plurality of concave and convex portions corresponding to the plurality of convex and concave portions between the first ferromagnetic body and the second ferromagnetic body.

The foregoing and/or other aspects of the present invention are achieved by providing an anisotropic conductive connector for electrically connecting a sensing contact of an object to be inspected with a detector contact of a detector circuit, the The square conductive connector includes: including a plurality of conductors And a planar elastomer surrounding an elastic insulator formed of a plurality of conductors, the plurality of conductors containing conductive particles having magnetic properties, the conductive particles exhibiting conductivity in a thickness direction and oriented in a thickness direction, a conductor and an elasticity The insulator is integrally formed of a high molecular material, wherein the conductor includes a lower electrical conductor disposed at a lower side, and wherein the lower electrical conductor includes an end portion having at least one protrusion or groove of the conductor to be contacted.

In the anisotropic conductive connector according to the present invention, the end portion of the conductor is formed as a sharp tip, so that the accumulation of the foreign material can be reduced even if the pressing and the contact process are performed a plurality of times, thereby not increasing but maintaining the contact resistance for a long period of time. Therefore, the anisotropic conductive connector according to the present invention not only improves the reliability of detection but also prolongs its life.

Also, the number of times the detection process is suspended and the detecting device is disassembled and cleaned (this is due to the accumulation of foreign materials on the end portion of the conductor) is reduced, thereby reducing the production cost.

Also, the conductive structure is disposed between the conductor and the detective contact of the detector circuit, and thus the resistance in the conductive path of the detective signal is reduced.

3‧‧‧Detective circuit board

4‧‧‧ cushion

10‧‧‧ anisotropic conductive connector

12‧‧‧Conductor

13‧‧‧End of the plane

14‧‧‧Elastic insulator

100‧‧‧ anisotropic conductive connector

110‧‧‧Electrical outer skin

120‧‧‧ conductor

130, 150‧‧‧ end part

132, 134‧‧‧ concave part

140‧‧‧Insulator

160‧‧‧First insulating film

180‧‧‧Second insulation film

190‧‧‧Lower conductor

192‧‧ ‧ prominence

194‧‧‧ Groove

200‧‧‧First forming substrate

210‧‧‧First Ferromagnetic

212, 214‧‧‧ end part

300‧‧‧Second forming substrate

310‧‧‧Second ferromagnet

400, 500‧‧‧ electromagnets

L‧‧‧Liquid polymer materials

P‧‧‧ conductive particles

S110, S120, S130, S140‧‧ steps

1 is a partial cross-sectional view of a conventional anisotropic conductive connector.

2 to 8 are views respectively showing an anisotropic conductive connector having a conductor according to first to seventh exemplary embodiments.

9 through 12 are views of a process for fabricating an anisotropic conductive connector, in accordance with an exemplary embodiment.

FIG. 13 is a flow chart illustrating a method of fabricating an anisotropic conductive connector, in accordance with an exemplary embodiment.

Figure 14 is a photograph showing a comparison of the cumulative state of foreign material (Sn) between the anisotropic conductive connector of the present invention and a conventional anisotropic conductive connector.

15 to 17 are views respectively showing an anisotropic conductive connector having a conductor according to eighth to tenth exemplary embodiments.

Hereinafter, an illustration of the present invention will be described in more detail with reference to the accompanying drawings. Sexual embodiment. For the sake of clear description, things that are not described are omitted. Throughout the text, like numerals refer to like or like elements.

2 is a diagram showing an anisotropic conductive connector according to a first exemplary embodiment 100 view. The anisotropic conductive connector 100 includes a planar elastomer 120, 140 having a plurality of conductors 120 and an elastic insulator 140 formed around the plurality of conductors 120; a first insulating film 160 disposed at one side of the planar elastomer; a second insulating film 180 at the other side of the planar elastomer.

As shown in FIG. 2, the conductor 120 includes a semiconductor to be in contact with the semiconductor to be inspected. The first end portion 130 of the terminal (bump) of the or similar member, and the second end portion 150 of the pad (not shown) to be contacted with the detecting circuit substrate. The first end portion 130 includes a plurality of concavo-convex portions 132 and a concavo-convex portion 134 that are to partially contact the surface of the detecting joint of the object to be inspected.

The plurality of concave and convex portions 132 and the concave and convex portions 134 are shaped like a four-pointed shape A four point crown is formed by cutting a V shape from a plane of a cylindrical end portion in the length and width directions. That is, with four cylinders The apex 134 where the surface surfaces meet may contact the surface of the detection joint of the object to be inspected.

As shown in FIG. 9, the uneven portion 132 and the uneven portion 134 are formed by the end portion shapes 212, 214 of the first ferromagnetic body 210 disposed in the first forming substrate 200 when formed. That is, the concavo-convex portion 132 and the concavo-convex portion 134 may be formed by the corresponding convex-concave portion 212 and the convex-concave portion 214 of the first ferromagnetic body 210.

For example, the concavo-convex portion 132 and the concavo-convex portion 134 may include a conductive outer skin layer 110 plated with gold, silver, copper, palladium, rhodium, or the like having high conductivity. The conductive skin layer 110 can be applied by a wet or dry plating method.

In the conductor 120, magnetically-conductive particles P for exhibiting conductivity in the thickness direction are oriented in the thickness direction. The conductive particles P must have magnetic properties to be oriented by a strong magnetic force in a liquid high molecular substance (described later).

The conductive particles P of the conductor 120 may, for example, comprise particles of iron, cobalt, nickel or a metal-like particle or alloy thereof.

Further, the conductive particles P may include particles containing iron, cobalt, nickel or the like, or particles each containing the above-mentioned particles regarded as core particles and plated with gold, silver, copper, palladium, rhodium or the like having high conductivity. .

Further, the conductive particles P may each contain inorganic or polymeric particles, such as non-magnetic metal particles or glass beads, which are regarded as core particles and plated with a conductive magnetic metal such as nickel, cobalt or the like.

The insulator 140 is made of a polymer material to be hardened by heat. The insulator 140 insulates the plurality of conductors 120 from each other. The strong magnetic force is applied to the side where the conductor 120 is formed in a state where the conductive particles P are distributed in the liquid high molecular substance at the time of formation of the liquid high molecular substance, and thereby the conductive particles P are collected onto the conductor 120, and the insulator 140 It can be insulated.

Can be used to obtain a polymer substance constituting the conductor 120 and the insulator 140 The thermosetting polymer material forming material may, for example, comprise polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, and the like. Conjugated diene rubber and hydride thereof; styrene-butadiene-diene block copolymer rubber, styrene-isoprene block copolymer, and similar block copolymer rubber and hydride thereof; chlorine Butadiene, urethane rubber, polyester rubber, epichlorohydrin rubber, ruthenium rubber, ethylene-propylene copolymer rubber, and ethylene-propylene-diene copolymer rubber. Among them, ruthenium rubber can be used in consideration of durability, workability, and electrical properties. As the ruthenium rubber, the liquid ruthenium liquid ruthenium rubber can be crosslinked or condensed. The liquid ruthenium rubber may, for example, comprise dimethyl ruthenium rubber, methyl vinyl ruthenium rubber, methyl phenyl vinyl ruthenium rubber or the like. Further, the ruthenium rubber may have a molecular weight Mw of 10,000 to 40,000 (i.e., a weight average molecular weight converted for standard polystyrene). Further, the obtained conductor 120 has good heat resistance, and thus the molecular weight distribution index (that is, the ratio of the weight average molecular weight Mw converted for the standard polystyrene to the number average molecular weight Mn converted for the standard polystyrene Mw/ Mn) may be equal to or less than 2.

According to an exemplary embodiment, the uneven portion 132 and the uneven portion 134 are formed only In the first end portion 130 of the conductor 120 of the anisotropic conductive connector 100, but is not limited thereto. Alternatively, the uneven portion may be formed in the second end portion 150 as needed. Similarly to this case, the concavo-convex portion of the second end portion 150 can be easily formed by processing the end portion of the second ferromagnetic body 310 of the second forming substrate 300 so as to correspond to the desired concavo-convex portion when it is formed. .

FIG. 3 illustrates an anisotropic conductive connector 100 in accordance with a second exemplary embodiment.

As illustrated in FIG. 3, the first end portion 130 of the conductor 120 includes a concavo-convex portion 132, a concavo-convex portion 134 that is to partially contact the surface of the detecting contact of the object to be inspected. The concavo-convex portion 132, the concavo-convex portion 134 according to the second exemplary embodiment is shaped by forming a conical groove on the surface of the cylindrical end portion.

The concavo-convex portion 132, the concavo-convex portion 134 according to the second exemplary embodiment is shaped like a funnel, and has an outer edge that contacts the surface of the detecting joint of the object to be detected. The end portion 212 and the end portion 214 of the first ferromagnetic body 210 disposed in the first forming substrate 200 can be easily formed by having a conical shape when formed as shown in FIG. The uneven portion 132, the uneven portion 134 according to the second exemplary embodiment.

Likewise, the uneven portion 132 and the uneven portion 134 according to the second exemplary embodiment may include a conductive outer skin layer 110 plated with gold, silver, copper, palladium, rhodium, or the like having high conductivity.

FIG. 4 illustrates an anisotropic conductive connector 100 in accordance with a third exemplary embodiment.

As illustrated in FIG. 4, the first end portion 130 of the conductor 120 includes a concavo-convex portion 132, a concavo-convex portion 134 that is to partially contact the surface of the detecting contact of the object to be inspected. The concavo-convex portion 132 and the concavo-convex portion 134 according to the third exemplary embodiment are formed by cutting the V-shaped shape twice from the top surface of the truncated quadrangular pyramid in the length and width directions.

The concavo-convex portion 132, the concavo-convex portion 134 according to the third exemplary embodiment includes nine quadrangular pyramids such that nine vertices of the quadrangular pyramid shape can contact the surface of the detecting joint of the object to be detected. The end portion 212 and the end portion 214 of the first ferromagnetic body 210 disposed in the first forming substrate 200 may be processed to be in FIG. 9 It is shown that it has nine quadrangular pyramidal grooves when formed, and the uneven portion 132 and the uneven portion 134 according to the third exemplary embodiment are easily formed.

Similarly, the uneven portion 132 and the uneven portion according to the third exemplary embodiment The sub-section 134 may comprise a conductive outer skin layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high electrical conductivity.

FIG. 5 illustrates an anisotropic conductive connector according to a fourth exemplary embodiment 100.

As depicted in Figure 5, the first end portion 130 of the conductor 120 contains The concave and convex portion 132, the uneven portion 134 of the surface of the detecting joint of the object to be detected is partially contacted. The concavo-convex portion 132, the concavo-convex portion 134 according to the fourth exemplary embodiment is formed by cutting the V-shape seven times from the plane of the cylindrical end portion in the length and width directions. Of course, the number of quadrangular pyramids can be varied as needed.

The uneven portion 132, the uneven portion 134 according to the fourth exemplary embodiment A plurality of quadrangular pyramids are included such that the apex of the quadrangular pyramid can contact the surface of the detection joint of the object to be inspected. The end portion 212 and the end portion 214 of the first ferromagnetic body 210 disposed in the first forming substrate 200 may be processed to have a plurality of quadrangular pyramidal grooves when formed as shown in FIG. The uneven portion 132 and the uneven portion 134 according to the fourth exemplary embodiment are easily formed.

Similarly, the uneven portion 132 and the uneven portion according to the fourth exemplary embodiment The sub-section 134 may comprise a conductive outer skin layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high electrical conductivity.

FIG. 6 illustrates an anisotropic conductive connector according to a fifth exemplary embodiment 100.

As depicted in Figure 6, the first end portion 130 of the conductor 120 contains The concave and convex portion 132, the uneven portion 134 of the surface of the detecting joint of the object to be detected is partially contacted. The concavo-convex portion 132 and the concavo-convex portion 134 according to the fifth exemplary embodiment are formed by cutting the V-shape once from the top surface of the frustoconical shape in the length and width directions.

The uneven portion 132 and the uneven portion 134 according to the fifth exemplary embodiment The four polygonal pyramids are included such that the four vertices can contact the surface of the detection joint of the object to be inspected. The end portion 212 and the end portion 214 of the first ferromagnetic body 210 disposed in the first forming substrate 200 may be processed to have a tapered bottom portion of the conical groove when it is formed as shown in FIG. The uneven portion 132 and the uneven portion 134 according to the fifth exemplary embodiment are easily formed by intersecting the ridges.

Similarly, the uneven portion 132 and the uneven portion according to the fifth exemplary embodiment The sub-section 134 may comprise a conductive outer skin layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high electrical conductivity.

FIG. 7 illustrates an anisotropic conductive connector according to a sixth exemplary embodiment 100.

As depicted in Figure 7, the first end portion 130 of the conductor 120 contains The concave and convex portion 132, the uneven portion 134 of the surface of the detecting joint of the object to be detected is partially contacted. The uneven portion 132 and the uneven portion 134 according to the sixth exemplary embodiment are shaped like a conical shape.

The uneven portion 132, the uneven portion 134 according to the sixth exemplary embodiment A conical shape is included such that a vertex can contact the surface of the detection joint of the object to be inspected. The end portion 212 and the end portion 214 of the first ferromagnetic body 210 disposed in the first forming substrate 200 can be processed to have a conical groove when formed as shown in FIG. 9, and can be easily formed according to Concave convex portion of the sixth exemplary embodiment 132, concave and convex portion 134.

Similarly, the uneven portion 132 and the uneven portion according to the sixth exemplary embodiment The sub-section 134 may comprise a conductive outer skin layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high electrical conductivity.

FIG. 8 illustrates an anisotropic conductive connector 100 in accordance with a seventh exemplary embodiment.

As illustrated in Fig. 8, the first end portion 130 of the conductor 120 includes a concavo-convex portion 132, a concavo-convex portion 134 that is to be partially in contact with the surface of the detecting joint of the object to be inspected. The concavo-convex portion 132, the concavo-convex portion 134 according to the seventh exemplary embodiment is formed by rounding a conical sharp tip portion.

The concavo-convex portion 132, the concavo-convex portion 134 according to the seventh exemplary embodiment includes a conical shape having a rounded tip portion such that a relatively large contact can come into contact with a surface of the detecting contact of the object to be detected. The end portion 212 and the end portion 214 of the first ferromagnetic body 210 disposed in the first forming substrate 200 can be processed to have a rounded shape of a conical groove when it is formed as shown in FIG. At the bottom, the uneven portion 132, the uneven portion 134 according to the seventh exemplary embodiment is easily formed.

Also, the uneven portion 132, the uneven portion 134 according to the seventh exemplary embodiment may include a conductive outer skin layer 110 plated with gold, silver, copper, palladium, iridium, or the like having high conductivity.

Hereinafter, a device for manufacturing the aforementioned anisotropic conductive connector 100 including the first end having the uneven portion 132, the uneven portion 134 according to the first to seventh exemplary embodiments will be described with reference to FIG. section.

As illustrated in FIG. 9, the apparatus for manufacturing the anisotropic conductive connector 100 according to the present invention may include the first ferromagnetic body 210 being disposed therein in a predetermined pattern. a non-magnetic first forming substrate 200; a second ferromagnetic body 310 corresponding to the non-magnetic second forming substrate 300 positioned therein in a predetermined pattern; and respectively disposed on the outer portions of the first forming substrate 200 and the second forming substrate 300 A pair of electromagnets 400 and an electromagnet 500.

The first forming substrate 200 and the second forming substrate 300 are configured to be in advance The spaced apart portions face each other, and at least one of the first ferromagnetic body 210 facing each other and the opposite end portions of the second ferromagnetic body 310 includes a convex and concave portion.

Hereinafter, the fabrication of the conductor 120 including the conductor 120 will be described with reference to FIGS. 9 to 13 . In the method of the anisotropic conductive connector 100, the conductor has a first end portion 130 having a concavo-convex portion 132, a concavo-convex portion 134 according to an exemplary embodiment.

First, as shown in FIG. 9, the non-magnetic first forming substrate 200 is The non-magnetic second forming substrates 300 are placed to face each other, thereby leaving a predetermined space (step S110 illustrated in FIG. 13 ) in which the first ferromagnetic body 210 is disposed in the non-magnetic first forming substrate 200 in a predetermined pattern, And the second ferromagnet 310 is disposed in the non-magnetic second forming substrate 300 corresponding to the aforementioned pattern. At this time, at least one of the first ferromagnetic body facing each other and the opposite end portions of the second ferromagnetic body are treated to have the convex-concave portion 214 and the convex-concave portion 212.

Then, a liquid high score in which the conductive particles P having magnetic properties are distributed The sub-substance L is disposed between the first forming substrate and the second forming substrate facing each other (step S120 illustrated in FIG. 13).

Next, the electromagnet 400 and the electromagnet 500 are respectively disposed in the first shape At the outer portion of the substrate 200 and at the outer portion of the second forming substrate 300, a magnetic force is applied to the first forming substrate 200 and the second forming substrate 300, whereby the first ferromagnetic body 210 is Orientation in thickness between second ferromagnetic bodies 310 Conductive particles P (step S130 depicted in Fig. 13).

Finally, the shape of the conductive particles P having magnetic properties is oriented in the thickness direction. In the state, the liquid polymer substance is hardened. Next, the first forming substrate 200 and the second forming substrate 300 are removed to form a conductor 120 having a first end portion 130 as illustrated in FIG. 11 and a planar elastomer including an insulator 140 surrounding the conductor 120, The first end portion has a concavo-convex portion corresponding to the convex-concave portion 214 and the convex-concave portion 212 (step S140 illustrated in Fig. 13). Then, a conductive outer skin layer 110 plated with gold, silver, copper, palladium, rhodium, or the like having high conductivity is formed on the first end portion 130 by a wet or dry plating method. The conductive outer skin layer 110 may be formed after attaching the first insulating film and the second insulating film (described later).

Also, as shown in FIG. 12, an opening 170 and an opening 190 are formed. The first insulating film 160 and the second insulating film 180 are attached at positions corresponding to the opposite ends 130 and the ends 150 such that both the ends 130 and the ends 150 of the conductors 120 can be exposed to both surfaces of the planar elastic bodies 120, 140.

According to an exemplary embodiment, the first end portion 130 is inserted into the first In the opening 170 of the edge film 160, this operation is preferable when the terminal of the object to be detected is a bump. Therefore, if the terminals of the object to be inspected are shaped like columns, holes, pads, and leads, the end portions can be formed to correspond to the shape of the terminals.

As described above, in accordance with an exemplary embodiment, the first end of the conductor 120 The protrusion 132 of the end portion 130 will contact the surface of the detective contact of the item to be inspected, and thus the possibility of transferring foreign material such as tin (Sn) is low.

14 is a photograph showing a conventional conductor 12 having a planar end portion 13 and a tin (Sn) transfer after 100,000 tests of the conductor 120 of the present invention, wherein the conductor 120 of the present invention has a bump according to an exemplary embodiment. Partial end Part 130. As shown in Fig. 14, in the conventional conductor, tin (Sn) is transferred and accumulated more.

FIG. 15 illustrates an anisotropic conductive connector 100 in accordance with an eighth exemplary embodiment, wherein the lower electrical conductor 190 is disposed at a lower side of the conductor 120.

The lower conductor 190 is used to electrically connect the gasket 4 of the circuit board 3 to the connector 120. The lower electrical conductor 190 can include a protrusion 192 in the portion that will contact the conductor 120. Therefore, when the conductive particles contained in the conductor 120 contact the lower conductor 190, the protrusion 192 allows more conductive particles to contact the lower conductor 190, thereby lowering the electric resistance. On the other hand, the conventional anisotropic conductive connector 10 illustrated in Figure 1 has a relatively high electrical resistance because less conductive particles contact a relatively small cross-sectional area of the conductor. The lower conductor 190 may be made of gold, silver, copper, palladium, rhodium, or a similar highly conductive metal.

16 illustrates an anisotropic conductive connector 100 in which a lower electrical conductor 190 between a pad 4 for electrically connecting to the detector circuit board 3 and the connector 120 is disposed on the conductor 120, in accordance with a ninth exemplary embodiment. At the lower side. The lower electrical conductor 190 can include protrusions 192 and recesses 194 in the portion that will contact the conductor 120. Therefore, when the conductive particles contained in the conductor 120 contact the lower conductor 190, the protrusion 192 and the groove 194 allow more conductive particles to contact the lower conductor 190.

17 illustrates an anisotropic conductive connector 100 in which a lower electrical conductor 190 between a pad 4 for electrically connecting to the detector circuit board 3 and the connector 120 is disposed on the conductor 120, in accordance with the tenth exemplary embodiment. At the lower side. The lower electrical conductor 190 can include a plurality of protrusions 192 and recesses 194 in the portion that will contact the conductor 120. Therefore, when the conductive particles contained in the conductor 120 contact the lower conductor 190, the protrusion 192 and the recess 194 allow more conductive particles to contact the lower conductor 190. While several illustrative embodiments have been shown and described, it will be understood by those skilled in the art The scope of the invention is defined by the scope of the patent and its equivalents.

100‧‧‧ anisotropic conductive connector

110‧‧‧Electrical outer skin

120‧‧‧ conductor

130, 150‧‧‧ end part

132‧‧‧ concave part

134‧‧‧ concave and convex parts

140‧‧‧Insulator

160‧‧‧First insulating film

180‧‧‧Second insulation film

Claims (11)

An anisotropic conductive connector comprising: a planar elastomer comprising a plurality of conductors and an elastic insulator formed around the plurality of conductors, the plurality of conductors comprising conductive particles having magnetic properties, the magnetically conductive The particles exhibit conductivity in a thickness direction and are oriented in the thickness direction, and the conductor and the elastic insulator are integrally formed of a high molecular substance, wherein the conductor includes an end portion having a plurality of concave and convex portions, The concave and convex portion is to partially contact the surface of the detecting joint of the object to be inspected, and the end portion is more protruded than the surface of the elastic insulator. The anisotropic conductive connector of claim 1, wherein an insulating film having an opening is formed at a position corresponding to both end portions of the plurality of conductors, the insulating film being disposed in the planar elasticity On both sides of the body. The anisotropic conductive connector of claim 1, wherein the end portion comprises the plurality of concavo-convex portions coated with a conductive material. The anisotropic conductive connector of claim 1, wherein the plurality of concave and convex portions comprise at least one of a central concave circular tip, a polygonal tip, a conical tip, and a tip rounded conical shape. The anisotropic conductive connector of claim 1, wherein the conductor comprises a lower electrical conductor disposed at a lower side. The anisotropic conductive connector of claim 5, wherein the lower electrical conductor comprises a protrusion in a portion to be contacted with the conductor. The anisotropic conductive connector of claim 5, wherein the lower electrical conductor comprises a protrusion and a recess in a portion to be contacted with the conductor. An anisotropic conductive connector as described in claim 5, wherein The lower electrical conductor includes a plurality of concavo-convex portions in a portion to be contacted with the conductor. A method of manufacturing an anisotropic conductive connector, the method comprising: arranging a first non-magnetic forming substrate and a second non-magnetic forming substrate to face each other to leave a predetermined space therebetween, wherein the first ferromagnetic body is predetermined a pattern is disposed in the first non-magnetic forming substrate, and a second ferromagnet is disposed in the second non-magnetic forming substrate at a position corresponding to the predetermined pattern, wherein the first ferromagnetic body facing each other and At least one of the opposite end portions of the second ferromagnet is recessed from the surface of the forming substrate, and includes a convex-concave portion; the liquid high-molecular substance in which the conductive particles having magnetic properties are distributed is disposed to face each other Between the first forming substrate and the second forming substrate; respectively disposing a magnet at an outer portion of the first forming substrate and an outer portion of the second forming substrate, and applying a magnetic force of the magnet to have the The magnetic conductive particles may be oriented in a thickness direction between the first ferromagnet and the second ferromagnet; and in the thickness direction In the state of the conductive particles having the magnetic properties, the liquid high molecular substance is hardened to form a conductor including a terminal portion between the first ferromagnet and the second ferromagnet, the end portion having Corresponding to the plurality of concave and convex portions of the plurality of convex and concave portions. An apparatus for manufacturing an anisotropic conductive connector, the apparatus comprising: a first non-magnetic forming substrate, a first ferromagnetic body disposed in the first non-magnetic forming substrate in a predetermined pattern; and a second non-magnetic forming substrate a second ferromagnetic body disposed in the second non-magnetic forming substrate at a position corresponding to the predetermined pattern; and a pair of magnets respectively disposed at an outer portion of the first forming substrate and The second forming substrate is externally formed, wherein the first forming substrate and the second forming substrate are configured to face each other, thereby leaving a predetermined space, and the first ferromagnetic body and the second facing each other At least one of the opposite end portions of the ferromagnetic body is recessed from the surface on which the substrate is formed, and includes a convex-concave portion, and wherein the liquid high-molecular substance in which the magnetic conductive particles are distributed is disposed in the first surface facing each other Between forming a substrate and the second forming substrate, the magnet applies a magnetic force such that the conductive particles having the magnetic properties may be oriented in a thickness direction between the first ferromagnetic body and the second ferromagnetic body, Hardening the liquid high molecular substance in a state in which the conductive particles having the magnetic properties are oriented in the thickness direction to form an end portion including the end portion between the first ferromagnet and the second ferromagnet a conductor having a plurality of concavo-convex portions corresponding to the plurality of convex and concave portions. An anisotropic conductive connector for electrically connecting a detecting contact of an object to be detected and a detecting contact of the detecting circuit, the anisotropic conductive connector comprising: a planar elastic body comprising a plurality of a conductor and an elastic insulator formed around the plurality of conductors, wherein the plurality of conductors contain conductive particles having magnetic properties, the conductive particles exhibiting conductivity in a thickness direction and being oriented in the thickness direction, The conductor and the elastic insulator are integrally formed of a high molecular material, wherein the conductor includes a lower electrical conductor disposed at a lower side, and wherein the lower electrical conductor includes at least one protrusion having a contact to be contacted or The end portion of the groove.