WO2015030357A1

WO2015030357A1 - Anisotropic conductive connector, manufacturing method and device thereof

Info

Publication number: WO2015030357A1
Application number: PCT/KR2014/005491
Authority: WO
Inventors: Woe-suk YANG
Original assignee: Leeno Industrial Inc.
Priority date: 2013-08-27
Filing date: 2014-06-20
Publication date: 2015-03-05
Also published as: TWI542086B; TW201517398A

Abstract

Disclosed is an anisotropic conductive connector comprising: a planar elastic body which comprises a plurality of conductors in which conductive particles having magnetism to show conductivity in a thickness direction are oriented in the thickness direction and contained, and an elastic insulator formed around the plurality of conductors, the conductor and the elastic insulator being integrally formed by one high molecular substance, wherein the conductor comprises an end portion having a concave-convex portion to be in partial contact with a surface of an inspection contact point of an object to be inspected, the end portion more protruding than a surface of the elastic insulator. The end portion of the conductor is formed as a sharp tip to be in contact with the inspective contact point of the object to be inspected, so that foreign materials generated at a test, e.g., tin (Sn) can be prevented from transition, thereby stably maintaining a resistance characteristic.

Description

ANISOTROPIC CONDUCTIVE CONNECTOR, MANUFACTURING METHOD AND DEVICE THEREOF

The present invention relates to an anisotropic conductive connector and a Manufacturing method thereof, and more particularly to an anisotropic conductive connector, and a Manufacturing method and device thereof, in which foreign materials (Sn) are prevented from being accumulated on an end portion of a conductive portion to be in contact with a terminal of an object to be inspected at a test.

A semiconductor chip, a circuit board or the like object to be inspected is formed with a fine pattern integrated in high density, and undergoes a test about whether it is normal or abnormal during a manufacturing process. The semiconductor chip or the circuit board includes the contact points to be inspected and having a fine pitch. Likewise, an inspective circuit that provides an electric signal for a test to the object to be inspected also includes inspective contact points having a fine pitch corresponding to that of the inspection contact points of the object to be inspected.

To inspect electric features of the object to be inspected, an anisotropic conductive connector may be used for electric connection between the inspection contact point (bump) of the object to be inspected and the inspective contact point (pad) of the inspective circuit.

FIG. 1 shows a conventional anisotropic conductive connector 10. The conventional anisotropic conductive connector 10 includes a plate-shaped

elastic body

12, 14 having a plurality of conductors 12 and an elastic insulator 14 formed around the plurality of conductors 12. The plurality of conductors 12 contains conductive particles having magnetic properties and oriented in a thickness direction so that conductivity can appear in the thickness direction.

The conductor 12 has a planar end portion having an inspective surface to be contact with the inspection contact point (bump) of the object to be inspected. The end portion of the conductor 12 very many times presses and contacts the inspection contact point such as the bump at the test. During such a pressing and contacting process, a foreign material, for example, tin (Sn) is transitioned to the surface of the end portion and thus increases contact resistance, thereby shortening the life of the connector.

The present invention is conceived to solve the foregoing problem, and an aspect of the invention is to provide an anisotropic conductive connector having a conductor which can reduce accumulation of foreign materials transitioned at a test.

Another aspect of the present invention is to provide an anisotropic conductive connector which can lower resistance of a conductor for electric connection between an inspection contact point of an object to be inspected and an inspective contact point of an inspective circuit.

Another aspect of the present invention is to provide a method and device for manufacturing an anisotropic conductive connector having a conductor which can reduce accumulation of foreign materials transitioned at a test.

The foregoing and/or other aspects of the present invention are achieved by providing an anisotropic conductive connector comprising: a planar elastic body which comprises a plurality of conductors in which conductive particles having magnetism to show conductivity in a thickness direction are oriented in the thickness direction and contained, and an elastic insulator formed around the plurality of conductors, the conductor and the elastic insulator being integrally formed by one high molecular substance, wherein the conductor comprises an end portion having a concave-convex portion to be in partial contact with a surface of an inspection contact point of an object to be inspected, the end portion more protruding than a surface of the elastic insulator.

Insulating films formed with openings at positions corresponding to both end portions of the plurality of conductors may be arranged on both sides of the planar elastic body

The end portion may comprise a plurality of concave-convex portions coated with a conductive material.

The plurality of concave-convex portions may comprise at least one of a centrally recessed circular tip, a polygonal tip, a cone tip, and a rounded-tip cone.

The conductor may comprise a lower conductive body arranged at a lower side.

The lower conductive body may comprise a protrusion in a portion to be in contact with the conductor.

The lower conductive body may comprise a protrusion and a groove in a portion to be in contact with the conductor.

The lower conductive body may comprise a plurality of concave-convex portions in a portion to be in contact with the conductor.

The foregoing and/or other aspects of the present invention are achieved by providing a method of manufacturing an anisotropic conductive connector, the method comprising: arranging a first non-magnetic forming substrate in which a first ferromagnetic body is arranged in a predetermined pattern and a second non-magnetic forming substrate in which a second ferromagnetic body is arranged at a position corresponding to the predetermined pattern, to face each other leaving a predetermined space therebetween, wherein at least one of opposite end portions of the first and second ferromagnetic bodies facing each other is recessed from a surface of the forming substrate and comprises a convex-concave portion; arranging a liquid high molecular substance in which conductive particles having magnetism are distributed, in between the first forming substrate and the second forming substrate facing each other; arranging magnets at an outside of the first forming substrate and an outside of the second forming substrate, respectively, and applying magnetic force of the magnets so that the conductive particles having the magnetism can be oriented in the thickness direction in between the first ferromagnetic body and the second ferromagnetic body; and hardening the liquid high molecular substance in the state that the conductive particles having the magnetism are oriented in the thickness direction so as to form the conductor comprising an end portion having a plurality of concave-convex portions corresponding to the plurality of convex-concave portions between the first ferromagnetic body and the second the ferromagnetic body.

The foregoing and/or other aspects of the present invention are achieved by providing a device for manufacturing an anisotropic conductive connector, the device comprising: a first non-magnetic forming substrate in which a first ferromagnetic body is arranged in a predetermined pattern; a second non-magnetic forming substrate in which a second ferromagnetic body is arranged at a position corresponding to the predetermined pattern; and a pair of magnets which are respectively arranged at an outside of the first forming substrate and an outside of the second forming substrate, wherein the first forming substrate and the second forming substrate are arranged to face each other leaving a predetermined space, and at least one of opposite end portions of the first and second ferromagnetic bodies facing each other is recessed from a surface of the forming substrate and comprises a convex-concave portion, and wherein a liquid high molecular substance in which conductive particles having magnetism are distributed is arranged in between the first forming substrate and the second forming substrate facing each other, the magnets applies magnetic force so that the conductive particles having the magnetism can be oriented in the thickness direction in between the first ferromagnetic body and the second ferromagnetic body, the liquid high molecular substance is hardened in the state that the conductive particles having the magnetism are oriented in the thickness direction so as to form the conductor comprising an end portion having a plurality of concave-convex portions corresponding to the plurality of convex-concave portions between the first ferromagnetic body and the second the ferromagnetic body.

The foregoing and/or other aspects of the present invention are achieved by providing an anisotropic conductive connector for electric connection between an inspection contact point of an object to be inspected and an inspective contact point of an inspective circuit, the anisotropic conductive connector comprising: a planar elastic body which comprises a plurality of conductors in which conductive particles having magnetism to show conductivity in a thickness direction are oriented in the thickness direction and contained, and an elastic insulator formed around the plurality of conductors, the conductor and the elastic insulator being integrally formed by one high molecular substance, wherein the conductor comprises a lower conductive body arranged at a lower side, and wherein the lower conductive body comprises an end portion having at least one protrusion or groove to be in contact with the conductor.

In the anisotropic conductive connector according to the present invention, the end portion of the conductor is formed as a sharp tip, so that accumulation of foreign materials can be reduced even though pressing and contacting processes are performed many times, thereby not increasing but maintaining contact resistance for a long time. Therefore, the anisotropic conductive connector according to the present invention not only improves reliability of inspection but also prolongs its life.

Also, the number of times of suspending an inspection process and disassembling and cleaning an inspection device due to the accumulation of the foreign materials on the end portion of the conductor is decreased, thereby reducing production costs.

Also, a conductive structure is arranged between the conductor and an inspective contact point of an inspective circuit and thus lowers resistance in a conductive path of an inspective signal.

FIG. 1 is a partial cross-section view of a conventional anisotropic conductive connector,

FIGs. 2 to 8 are views respectively showing anisotropic conductive connectors with conductors according to first to seventh exemplary embodiments,

FIGs. 9 to 12 are views of processes for manufacturing the anisotropic conductive connectors according to an exemplary embodiment,

FIG. 13 is a flowchart showing a method of manufacturing the anisotropic conductive connector according to an exemplary embodiment,

FIG. 14 is a photograph showing comparison in an accumulation state of a foreign material (Sn) between the inventive and conventional anisotropic conductive connectors, and

FIGs. 15 to 17 are views respectively showing anisotropic conductive connectors with conductors according to eighth to tenth exemplary embodiments.

Hereinafter, exemplary embodiments of the present invention will be described in more detail with reference to accompanying drawings. For clear description, matters unrelated to the description will be omitted. Also, like numerals refer to the same or like elements throughout.

FIG. 2 is a view showing an anisotropic conductive connector 100 according to a first exemplary embodiment. The anisotropic conductive connector 100 includes a planar

elastic body

120, 140 having a plurality of conductors 120 and an elastic insulator 140 formed around the plurality of conductors 120, a first insulating film 160 arranged at one side of the planar elastic body, and a second insulating film 180 arranged at the other side of the planar elastic body.

As shown in FIG. 2, the conductor 120 includes a first end portion 130 to be in contact with a terminal (bump) of a semiconductor or the like object to be inspected, and a second end portion 150 to be in contact with a pad (not shown) of an inspective circuit substrate. The first end portion 130 includes a plurality of concave-

convex portions

132 and 134 to be in partial contact with the surface of the inspection contact point of the object to be inspected.

The plurality of concave-

convex portions

132 and, 134 is shaped like a four-point crown, which is formed by cutting a v-shape from a plane of a cylindrical end portion in length and breadth directions. That is, the vertex 134 meeting four cylindrical surfaces can contact the surface of the inspection contact point of the object to be inspected.

As shown in FIG. 9, the concave-

convex portion

132, 134 is formed by an

end portion shape

212, 214 of the first ferromagnetic body 210 arranged in a first forming substrate 200 when it is formed. That is, the concave-

convex portion

132, 134 may be formed by a corresponding convex-

concave portion

212, 214 of the first ferromagnetic body 210.

For example, the concave-

convex portion

132, 134 may include a conductive sheath layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high conductivity. The conductive sheath layer 110 may be coated by a wet or dry plating method.

In the conductor 120, conductive particles P having magnetism to show conductivity in a thickness direction are oriented in the thickness direction. The conductive particles P have to have magnetism so as to be oriented by strong magnetic force within a liquid high molecular substance (to be described later).

The conductive particles P of the conductor 120 may for example include particles of iron, cobalt, nickel or the like metal or particles of alloy thereof.

Also, the conductive particles P may include particles containing iron, cobalt, nickel or the like metal, or particles each including the above particle regarded as a core particle and plated with gold, silver, copper, palladium, rhodium, etc. having high conductivity.

Also, the conductive particles P may each include an inorganic or polymer particle such as a non-magnetic metal particle or a glass bead, regarded as the core particle, and plated with a conductive magnetic metal such as nickel, cobalt, etc.

The insulator 140 is made of a high molecular substance to be hardened by heat. The insulator 140 insulates the plurality of conductors 120 from one another. The insulator 140 can have insulation by applying strong magnetic force to a side where the conductor 120 is formed in the state that the conductive particles P are distributed within the liquid high molecular substance when it is formed, and by thus concentrating the conductive particles P on to the conductor 120.

A thermosetting high molecular substance forming material, which can be used for obtaining a high molecular substance constituting the conductor 120 and the insulator 140 may for example include poly butadiene rubber, natural rubber, poly isoprene rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, and the like conjugated diene rubber and hydrogenation thereof;, styrene-butadiene-diene block copolymer rubber, styrene-isoprene block copolymer, and the like block copolymer rubber and hydrogenation thereof; chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicon rubber, ethylene-propylene copolymer rubber and ethylene-propylene-diene copolymer rubber, etc. Among them, silicon rubber may be used in consideration of durability, forming processability, and electric properties. As the silicon rubber, liquid silicon liquid silicon rubber may be cross-linked or condensed. The liquid silicon rubber may for example include dimethyl silicon crude rubber, methyl vinyl silicon crude rubber, methyl phenyl vinyl silicon crude rubber, etc. Also, silicon rubber may have molecular weight Mw (i.e., weight average molecular weight converted for standard polystyrene) of 10,000 to 40,000. Also, the obtained conductor 120 has good heat resistance, and therefore a molecular-weight distribution index (i.e., a ratio Mw/Mn of weight average molecular weight Mw converted for standard polystyrene and number-average molecular weight Mn converted for standard polystyrene) may be equal to or lower than 2.

According to an exemplary embodiment, the concave-

convex portion

132, 134 is formed in only the first end portion 130 of the conductor 120 of the anisotropic conductive connector 100, but not limited thereto. Alternatively, the concave-convex portion may be formed in the second end portion 150 as necessary. Like this, the concave-convex portion of the second end portion 150 may be easily formed by processing an end portion of a second ferromagnetic body 310 of a second forming substrate 300 to correspond to a desired concave-convex portion when it is formed.

FIG. 3 shows an anisotropic conductive connector 100 according to a second exemplary embodiment.

As shown in FIG. 3, the first end portion 130 of the conductor 120 includes a concave-

convex portion

132, 134 to be in partial contact with the surface of the inspection contact point of the object to be inspected. The concave-

convex portion

132, 134 according to the second exemplary embodiment is shaped by forming a cone groove on the surface of the cylindrical end portion.

The concave-

convex portion

132, 134 according to the second exemplary embodiment is shaped like a funnel and has an outer edge to be in contact with the surface of the inspection contact point of the object to be inspected. The concave-

convex portion

132, 134 according to the second exemplary embodiment may be easily formed by processing an

end portion

212, 214 of the first ferromagnetic body 210 arranged in the first forming substrate 200 to have a cone shape when it is formed as shown in FIG. 9.

Likewise, the concave-

convex portion

132, 134 according to the second exemplary embodiment may include the conductive sheath layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high conductivity.

FIG. 4 shows an anisotropic conductive connector 100 according to a third exemplary embodiment.

As shown in FIG. 4, the first end portion 130 of the conductor 120 includes the concave-

convex portion

132, 134 according to the third exemplary embodiment is formed by cutting a V-shape two times from a top surface of a cut-headed quadrangular pyramid in length and breadth directions.

The concave-

convex portion

132, 134 according to the third exemplary embodiment includes nine quadrangular pyramids so that nine vertexes of the quadrangular pyramids can be in contact with the surface of the inspection contact point of the object to be inspected. The concave-

convex portion

132, 134 according to the third exemplary embodiment may be easily formed by processing an

end portion

212, 214 of the first ferromagnetic body 210 arranged in the first forming substrate 200 to have nine quadrangular pyramid grooves when it is formed as shown in FIG. 9.

Likewise, the concave-

convex portion

132, 134 according to the third exemplary embodiment may include the conductive sheath layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high conductivity.

FIG. 5 shows an anisotropic conductive connector 100 according to a fourth exemplary embodiment.

As shown in FIG. 5, the first end portion 130 of the conductor 120 includes the concave-

convex portion

132, 134 according to the fourth exemplary embodiment is formed by cutting a V-shape seven times from a plane of a cylindrical end portion in length and breadth directions. Of course, the number of quadrangular pyramids may be varied as necessary.

The concave-

convex portion

132, 134 according to the fourth exemplary embodiment includes a plurality of quadrangular pyramids so that the vertexes of the quadrangular pyramids can be in contact with the surface of the inspection contact point of the object to be inspected. The concave-

convex portion

132, 134 according to the fourth exemplary embodiment may be easily formed by processing an

end portion

212, 214 of the first ferromagnetic body 210 arranged in the first forming substrate 200 to have a plurality of quadrangular pyramid grooves when it is formed as shown in FIG. 9.

Likewise, the concave-

convex portion

132, 134 according to the fourth exemplary embodiment may include the conductive sheath layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high conductivity.

FIG. 6 shows an anisotropic conductive connector 100 according to a fifth exemplary embodiment.

As shown in FIG. 6, the first end portion 130 of the conductor 120 includes the concave-

convex portion

132, 134 according to the fifth exemplary embodiment is formed by cutting a V-shape once from a top surface of a cut-headed cone in length and breadth directions.

The concave-

convex portion

132, 134 according to the fifth exemplary embodiment includes four polygonal pyramids so that four vertexes can be in contact with the surface of the inspection contact point of the object to be inspected. The concave-

convex portion

132, 134 according to the fifth exemplary embodiment may be easily formed by processing an

end portion

212, 214 of the first ferromagnetic body 210 arranged in the first forming substrate 200 to have a cross ridge on a cut-bottom of a cone groove when it is formed as shown in FIG. 9.

Likewise, the concave-

convex portion

132, 134 according to the fifth exemplary embodiment may include the conductive sheath layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high conductivity.

FIG. 7 shows an anisotropic conductive connector 100 according to a sixth exemplary embodiment.

As shown in FIG. 7, the first end portion 130 of the conductor 120 includes the concave-

convex portion

132, 134 according to the sixth exemplary embodiment is shaped like a cone.

The concave-

convex portion

132, 134 according to the sixth exemplary embodiment includes one cone so that one vertex can be in contact with the surface of the inspection contact point of the object to be inspected. The concave-

convex portion

132, 134 according to the sixth exemplary embodiment may be easily formed by processing an

end portion

212, 214 of the first ferromagnetic body 210 arranged in the first forming substrate 200 to have a cone groove when it is formed as shown in FIG. 9.

Likewise, the concave-

convex portion

132, 134 according to the sixth exemplary embodiment may include the conductive sheath layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high conductivity.

FIG. 8 shows an anisotropic conductive connector 100 according to a seventh exemplary embodiment.

As shown in FIG. 8, the first end portion 130 of the conductor 120 includes the concave-

convex portion

132, 134 according to the seventh exemplary embodiment is formed by rounding a sharp tip portion of a cone.

The concave-

convex portion

132, 134 according to the seventh exemplary embodiment includes one cone having a rounded tip portion so that a relatively large contact point can be in contact with the surface of the inspection contact point of the object to be inspected. The concave-

convex portion

132, 134 according to the seventh exemplary embodiment may be easily formed by processing an

end portion

212, 214 of the first ferromagnetic body 210 arranged in the first forming substrate 200 to have a rounded bottom of a cone groove when it is formed as shown in FIG. 9.

Likewise, the concave-

convex portion

132, 134 according to the seventh exemplary embodiment may include the conductive sheath layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high conductivity.

Below, a device for manufacturing the foregoing anisotropic conductive connector 100 including the first end portion having the concave-

convex portion

132, 134 according to the first to seventh exemplary embodiment will be described with reference to FIG. 9.

As shown in FIG. 9, the device for manufacturing the anisotropic conductive connector 100 according to the present invention may include the non-magnetic first forming substrate 200 in which the first ferromagnetic body 210 is arranged in a predetermined pattern, a non-magnetic second forming substrate 300 in which the second ferromagnetic body 310 is positioned corresponding to the predetermined pattern, and a pair of

electromagnets

400, 500 respectively arranged on the outsides of the first forming substrate 200 and the second forming substrate 300.

The first forming substrate 200 and the second forming substrate 300 are arranged to face each other at a predetermined space, and at least one of the opposite end portions of the first ferromagnetic body 210 and the second ferromagnetic body 310 facing each other includes the convex-concave portion.

Below, a method of manufacturing the anisotropic conductive connector 100 including the conductor 120 having the first end portion 130 with the concave-

convex portion

132, 134 according to an exemplary embodiment will be described with reference to FIGs. 9 to 13.

First, as shown in FIG. 9, the non-magnetic first forming substrate 200 in which the first ferromagnetic body 210 is arranged in a predetermined pattern and the non-magnetic second forming substrate 300 in which the second ferromagnetic body 310 is arranged corresponding to the foregoing pattern are placed to face each other leaving a predetermined space (step S110 shown in Fig. 13). At this time, at least one of the opposite end portions of the first ferromagnetic body and the second ferromagnetic body facing each other is processed to have the convex-

concave portion

214, 212.

Next, a liquid high molecular substance L in which the conductive particles P having magnetism are distributed is arranged in between the first forming substrate and the second forming substrate facing each other (step S120 shown in Fig. 13.

Then, the

electromagnets

400 and 500 are respectively arranged at the outside of the first forming substrate 200 and the outside of the second forming substrate 300 to apply magnetic force to the first forming substrate 200 and the second forming substrate 300, thereby orienting the conductive particles P in the thickness between the first ferromagnetic body 210 and the second ferromagnetic body 310 as shown in FIG. 10 (step S130 shown in Fig. 13).

Lastly, in the state that the conductive particles P having the magnetism are oriented in the thickness direction, the liquid high molecular substance is hardened. Then, the first forming substrate 200 and the second forming substrate 300 are removed to form the conductor 120 having the first end portion 130 with the concave-convex portion corresponding to the convex-

concave portion

214, 212 as shown in FIG. 11, and the planar elastic body including the insulator 140 surrounding the conductor 120(step S140 shown in Fig. 13). Next, the conductive sheath layer 110 plated with gold, silver, copper, palladium, rhodium, etc. having high conductivity is formed on the first end portion 130 by the wet or dry plating method. The conductive sheath layer 110 may be formed after attaching first and second insulating films (to be described later).

Also, as shown in FIG. 12, the first and second insulating

films

160 and 180 formed with

openings

170 and 190 are attached at positions corresponding to

opposite ends

130 and 150 so that both ends 130 and 150 of the conductor 120 can be exposed to both surfaces of the planar

elastic body

120, 140.

According to an exemplary embodiment, the first end portion 130 is inserted in the opening 170 of the first insulating film 160, which is preferable when the terminal of the object to be inspected is a bump. Accordingly, if the terminal of the object to be inspected is shaped like a post, a hole, a pad and a lead, the end portion may be formed corresponding to the shape of the terminal.

As described above, according to an exemplary embodiment, the protrusion 132 of the first end portion 130 of the conductor 120 to be in contact with the surface of the inspective contact point of the object to be inspected, and therefore there is low probability of transitioning the foreign materials such as tin (Sn).

FIG. 14 is a photograph showing the transition of tin (Sn) after testing 100,000 times for a conventional conductor 12 having a planar end portion 13 and an inventive conductor 120 having the end portion 130 with the concave-convex portion according to an exemplary embodiment. As shown in FIG. 14, tin (Sn) is much transitioned and accumulated in the conventional conductor.

FIG. 15 shows an anisotropic conductive connector 100 according to the eighth exemplary embodiment, in which a lower conductive body 190 is arranged at a lower side of a conductor 120.

The lower conductive body 190 serves to electrically connect a pad 4 of an inspective circuit board 3 with the connector 120. The lower conductive body 190 may include a protrusion 192 in a portion to be in contact with the conductor 120. In result, the protrusion 192 allows more conductive particles to be in contact with the lower conductive body 190 when the conductive particles included in the conductor 120 contact the lower conductive body 190, thereby lowering the resistance. On the other hand, the conventional anisotropic conductive connector 10 shown in FIG. 1 has relatively high resistance because less conductive particles are in contact with the relatively small cross-section area of the conductor. The lower conductive body 190 may be made of gold, silver, copper, palladium, rhodium, or the like high conductive metal.

FIG. 16 shows an anisotropic conductive connector 100 according to the ninth exemplary embodiment, in which a lower conductive body 190 for electric connection between a pad 4 of an inspective circuit board 3 and the connector 120 is arranged at a lower side of a conductor 120. The lower conductive body 190 may include a protrusion 192 and a groove 194 in a portion to be in contact with the conductor 120. In result, the protrusion 192 and the groove 194 allow more conductive particles to be in contact with the lower conductive body 190 when the conductive particles included in the conductor 120 contact the lower conductive body 190.

FIG. 17 shows an anisotropic conductive connector 100 according to the tenth exemplary embodiment, in which a lower conductive body 190 for electric connection between a pad 4 of an inspective circuit board 3 and the connector 120 is arranged at a lower side of a conductor 120. The lower conductive body 190 may include a plurality of protrusions 192 and a groove 194 in a portion to be in contact with the conductor 120. In result, the protrusions 192 and the groove 194 allow more conductive particles to be in contact with the lower conductive body 190 when the conductive particles included in the conductor 120 contact the lower conductive body 190.Although a few exemplary embodiments have been shown and described, it will be appreciated by those skilled in the art that changes may be made in these exemplary embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An anisotropic conductive connector comprising:

a planar elastic body which comprises a plurality of conductors in which conductive particles having magnetism to show conductivity in a thickness direction are oriented in the thickness direction and contained, and an elastic insulator formed around the plurality of conductors, the conductor and the elastic insulator being integrally formed by one high molecular substance,

wherein the conductor comprises an end portion having a plurality of concave-convex portion to be in partial contact with a surface of an inspection contact point of an object to be inspected, the end portion more protruding than a surface of the elastic insulator.

The anisotropic conductive connector according to claim 1, wherein insulating films formed with openings at positions corresponding to both end portions of the plurality of conductors are arranged on both sides of the planar elastic body.

The anisotropic conductive connector according to claim 1, wherein the end portion comprises the plurality of concave-convex portions coated with a conductive material.

The anisotropic conductive connector according to claim 1, wherein the plurality of concave-convex portions comprises at least one of a centrally recessed circular tip, a polygonal tip, a cone tip, and a rounded-tip cone.

The anisotropic conductive connector according to claim 1, wherein the conductor comprises a lower conductive body arranged at a lower side.

The anisotropic conductive connector according to claim 5, wherein the lower conductive body comprises a protrusion in a portion to be in contact with the conductor.

The anisotropic conductive connector according to claim 5, wherein the lower conductive body comprises a protrusion and a groove in a portion to be in contact with the conductor.

The anisotropic conductive connector according to claim 5, wherein the lower conductive body comprises a plurality of concave-convex portions in a portion to be in contact with the conductor.

A method of manufacturing an anisotropic conductive connector, the method comprising:

arranging a first non-magnetic forming substrate in which a first ferromagnetic body is arranged in a predetermined pattern and a second non-magnetic forming substrate in which a second ferromagnetic body is arranged at a position corresponding to the predetermined pattern, to face each other leaving a predetermined space therebetween, wherein at least one of opposite end portions of the first and second ferromagnetic bodies facing each other is recessed from a surface of the forming substrate and comprises a convex-concave portion;

arranging a liquid high molecular substance in which conductive particles having magnetism are distributed, in between the first forming substrate and the second forming substrate facing each other;

arranging magnets at an outside of the first forming substrate and an outside of the second forming substrate, respectively, and applying magnetic force of the magnets so that the conductive particles having the magnetism can be oriented in the thickness direction in between the first ferromagnetic body and the second ferromagnetic body; and

hardening the liquid high molecular substance in the state that the conductive particles having the magnetism are oriented in the thickness direction so as to form the conductor comprising an end portion having a plurality of concave-convex portions corresponding to the plurality of convex-concave portions between the first ferromagnetic body and the second the ferromagnetic body.

A device for manufacturing an anisotropic conductive connector, the device comprising:

a first non-magnetic forming substrate in which a first ferromagnetic body is arranged in a predetermined pattern;

a second non-magnetic forming substrate in which a second ferromagnetic body is arranged at a position corresponding to the predetermined pattern; and

a pair of magnets which are respectively arranged at an outside of the first forming substrate and an outside of the second forming substrate,

wherein the first forming substrate and the second forming substrate are arranged to face each other leaving a predetermined space, and at least one of opposite end portions of the first and second ferromagnetic bodies facing each other is recessed from a surface of the forming substrate and comprises a convex-concave portion, and

wherein a liquid high molecular substance in which conductive particles having magnetism are distributed is arranged in between the first forming substrate and the second forming substrate facing each other, the magnets applies magnetic force so that the conductive particles having the magnetism can be oriented in the thickness direction in between the first ferromagnetic body and the second ferromagnetic body, the liquid high molecular substance is hardened in the state that the conductive particles having the magnetism are oriented in the thickness direction so as to form the conductor comprising an end portion having a plurality of concave-convex portions corresponding to the plurality of convex-concave portions between the first ferromagnetic body and the second the ferromagnetic body.

An anisotropic conductive connector for electric connection between an inspection contact point of an object to be inspected and an inspective contact point of an inspective circuit, the anisotropic conductive connector comprising:

wherein the conductor comprises a lower conductive body arranged at a lower side, and

wherein the lower conductive body comprises an end portion having at least one protrusion or groove to be in contact with the conductor.