WO2017057785A1 - Connection connector - Google Patents

Connection connector Download PDF

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Publication number
WO2017057785A1
WO2017057785A1 PCT/KR2015/010360 KR2015010360W WO2017057785A1 WO 2017057785 A1 WO2017057785 A1 WO 2017057785A1 KR 2015010360 W KR2015010360 W KR 2015010360W WO 2017057785 A1 WO2017057785 A1 WO 2017057785A1
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WO
WIPO (PCT)
Prior art keywords
conductive
sheet
connector
disposed
electrode
Prior art date
Application number
PCT/KR2015/010360
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French (fr)
Korean (ko)
Inventor
정영배
Original Assignee
주식회사 아이에스시
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 아이에스시 filed Critical 주식회사 아이에스시
Priority to CN202211414975.XA priority Critical patent/CN115579666A/en
Priority to CN201580057907.4A priority patent/CN107110888A/en
Priority to PCT/KR2015/010360 priority patent/WO2017057785A1/en
Publication of WO2017057785A1 publication Critical patent/WO2017057785A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals

Definitions

  • the present invention relates to a connector for connection, and more particularly, to a connector for connection that can be used for a long time without deteriorating electrical characteristics even in frequent use.
  • an electrical test is performed to determine whether a device under test, such as a semiconductor device, which has been manufactured is defective. Specifically, a predetermined test signal is sent from the inspection apparatus to the device under test to determine whether the substrate is shorted.
  • a predetermined test signal is sent from the inspection apparatus to the device under test to determine whether the substrate is shorted.
  • the reason for this is that if the terminal of the device under test is in direct contact with the terminal of the inspection apparatus, the terminal of the inspection apparatus may be worn or damaged during repeated testing. This is because if the terminal of the inspection apparatus is broken, the entire inspection apparatus needs to be replaced, which causes a lot of cost. Therefore, when the connecting connector is used as an intermediate member, the device under test comes into contact with the connecting connector mounted on the inspection apparatus. Accordingly, when the connecting connector is worn or damaged by repeated contact, the entire connector is replaced by replacing only the connecting connector. The replacement cost can be saved.
  • the anisotropically conductive connector device disclosed in Unexamined-Japanese-Patent No. 10-2006-0013429 is known.
  • the anisotropically conductive connector device 10 of FIGS. 1 and 2 includes a rectangular anisotropic conductive film 10A, a sheet-shaped connector 20 integrally provided on one surface of the anisotropic conductive film 10A, and an anisotropic conductive film ( It is comprised by the support member 30 which is a rectangular plate shape which supports 10A).
  • the anisotropic conductive film 10A in this anisotropically conductive connector device 10 insulates the plurality of columnar conductive path forming portions 11 extending in the thickness direction and the conductive path forming portions 11 from each other. It is comprised by the insulating part 14, and in this example, the electrically-conductive path forming part 11 is arrange
  • the sheet-shaped connector 20 is disposed on the upper surface side of the anisotropic conductive film 10A, has a flexible insulating sheet 21, and the insulating sheet 21 has a metal extending in the thickness direction of the insulating sheet 21.
  • the some electrode structure 22 which consists of these is arrange
  • the insulating sheet 21 is provided with a plurality of connecting through holes 26 corresponding to the connecting protrusions 15 of the anisotropic conductive film 10A.
  • FIG. 3 is similar to the embodiment of FIGS. 1 and 2, but the sheet-shaped connector 20 has an insulating sheet 21 made of a mesh, a nonwoven fabric, or a porous sheet having voids communicating with both sides of the insulating sheet.
  • insulating sheet 21 made of a mesh, a nonwoven fabric, or a porous sheet having voids communicating with both sides of the insulating sheet.
  • a plurality of electrode structures 22 made of a metal extending in the thickness direction of the insulating sheet 21 are formed along the pattern corresponding to the pattern of the electrode to be connected. There is a slight difference in that they are spaced apart from each other in the plane direction.
  • connection connector has a problem in that the surface of the terminal to the electrode structure is damaged in the process of contact between the terminal of the device under test and the electrode structure.
  • the terminals of the device to be tested made of a metal material are in direct contact with the electrode structure made of a metal material, there is a problem in that surface damage occurs between each other.
  • the present invention has been made to solve the above-described problems, and more particularly, an object of the present invention is to provide a connector for connection that can be used for a long time without deteriorating electrical characteristics even in frequent use.
  • the connector for connection is arranged between the device under test and the inspection device to electrically connect the terminal of the device under test to the pad of the inspection device.
  • a plurality of conductive parts in which a plurality of conductive particles extending in a thickness direction in the elastic insulating material are arranged at positions corresponding to the terminals of the device under test;
  • An anisotropic conductive sheet provided between the respective conductive portions and including an insulating support portion which insulates the conductive portions from each other while supporting the respective conductive portions;
  • a porous sheet disposed between an upper surface and a lower surface of the anisotropic conductive sheet and inserted into the anisotropic conductive sheet and provided with a plurality of voids;
  • a sheet type connector including a plurality of electrodes disposed at positions corresponding to the conductive portions and integrally coupled to the porous sheet.
  • Each electrode is made of a metal material and is electrically connected to each conductive portion.
  • Each electrode may be positioned between an upper end of the conductive part and a lower end of the conductive part.
  • Each electrode may have a plate shape having a cross section corresponding to a horizontal cross section of each conductive portion.
  • a first conductive portion disposed above the electrode and in contact with a terminal of the device under test, the first conductive portion being made of first conductive particles;
  • It may include a second conductive portion disposed under the electrode and made of second conductive particles.
  • the first conductive particles in the first conductive portion may be disposed at a higher density per unit area than the second conductive particles in the second conductive portion.
  • the average particle diameter of the first conductive particles in the first conductive portion may be smaller than the average particle diameter of the second conductive particles in the second conductive portion.
  • the sheet connector may be disposed above the intermediate position between the upper and lower surfaces of the anisotropic conductive sheet.
  • the sheet connector may be disposed at an intermediate position between an upper surface and a lower surface of the anisotropic conductive sheet.
  • a through hole is formed at each position corresponding to the conductive portion, and a guide sheet for guiding contact of the device under test with the conductive portion may be provided.
  • the porous sheet may be made of a mesh or a nonwoven fabric, and an elastic insulating material may be filled in the pores of the porous sheet.
  • the connector for connection is arranged between the device under test and the inspection device to electrically connect the terminal of the device under test to the pad of the inspection device.
  • An anisotropic conductive sheet including a plurality of conductive portions in which a plurality of conductive particles extending in a thickness direction are arranged in an elastic insulating material at positions corresponding to the terminals of the device under test;
  • a porous sheet disposed between an upper surface and a lower surface of the anisotropic conductive sheet and inserted into the anisotropic conductive sheet;
  • a sheet-type connector which is integrally coupled to the porous sheet and is disposed at a position corresponding to the conductive portion and is formed of a plurality of metal electrodes buried in the conductive portion.
  • the metal electrode may be made of a material showing magnetic properties.
  • the connector for connection according to the present invention has an advantage in that an elastic conductive part is provided on an upper side of an electrode made of a metal material, thereby preventing damage to the terminal and the electrode of the device under test.
  • the connector for connection according to the present invention has a merit that a sheet-shaped connector in the form of a mesh is disposed inside the anisotropic conductive sheet to increase the durability of the overall anisotropic conductive sheet.
  • FIG. 1 is a view showing an example of a connector for a connection according to the prior art.
  • FIG. 2 is a partially enlarged view of FIG. 1;
  • FIG 3 is a view showing another example of a connector for a connection according to the prior art.
  • FIG. 4 is a view showing a connector for connection according to an embodiment of the present invention.
  • FIG. 5 is an example of operation of FIG.
  • 6 to 8 are views showing a connector for connection according to another embodiment of the present invention.
  • the connector 100 for a connection is disposed between the device under test 140 and the test device 150, and has a pad (terminal 141) of the device under test 140 and the test device 150 ( 151 is for electrically connecting with each other, and is comprised including the anisotropically conductive sheet 110, the sheet
  • the anisotropic conductive sheet 110 exhibits conductivity only in the thickness direction when pressed, and includes a plurality of conductive portions 111 and an insulating support portion 114.
  • the elastic insulating material is preferably a high molecular material having a crosslinked structure.
  • curable polymer material forming material that can be used to obtain such an elastic insulating material
  • specific examples thereof include polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber and acrylonitrile- Conjugated diene rubbers such as butadiene copolymer rubber and hydrogenated products thereof, block copolymer rubbers such as styrene-butadiene-diene block copolymer rubber and styrene-isoprene block copolymer, and these hydrogenated materials, chloroprene rubber, urethane rubber, poly Ester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, and the like.
  • the conductive particles 112a and 113a may be used to exhibit magnetic properties.
  • Specific examples of the conductive particles 112a and 113a include particles of metals having magnetic properties such as iron, cobalt, and nickel, particles of alloys thereof, particles containing these metals, or these particles as core particles.
  • the surface of the said core particle is made by plating the surface of particle
  • electroconductive magnetic metals, such as nickel and cobalt, were plated can be mentioned.
  • the conductive metal is coated on the surface of the core particles as the conductive particles 112a and 113a, good conductivity can be obtained. Therefore, the coverage of the conductive metal on the surface of the particles (conductive metal with respect to the surface area of the core particles). It is preferable that the ratio of the coating area of to is 40% or more, More preferably, it is 45% or more, Especially preferably, it is 47 to 95%.
  • the coating amount of the conductive metal is preferably 0.5 to 50% by mass of the core particles, more preferably 2 to 30% by mass, still more preferably 3 to 25% by mass, particularly preferably 4 to 20% by mass. %to be.
  • the coating amount is preferably 0.5 to 30% by mass of the core particles, more preferably 2 to 20% by mass, still more preferably 3 to 15% by mass.
  • the conductive part 111 is composed of the first conductive part 112 and the second conductive part 113 by the electrode 122 of the sheet-shaped connector 120 to be described later.
  • the first conductive part 112 is disposed above the electrode 122 and may be in contact with the terminal 141 of the device under test 140, and is formed of the first conductive particles 112a.
  • 113 is disposed below the electrode 122 and is formed of the second conductive particles 113a.
  • the materials of the elastic insulating material and the conductive particles in the first conductive portion 112 and the second conductive portion 113 are the same.
  • the first conductive particles 112a in the first conductive portion 112 are disposed at a higher density per unit area than the second conductive particles 113a in the second conductive portion 113, and the first conductive portion 112 An average particle diameter of the first conductive particles 112a in 112 may be smaller than an average particle diameter of the first conductive particles 112a in the second conductive portion 113. That is, the first conductive portion 112 disposed above the electrode 122 is preferably configured such that small-sized particles are arranged at a high density, which is the terminal 141 of the device under test 140 on the electrode 122. In order to be able to more surely the electrical transmission between the electrode 122 and the terminal 141 while contacting.
  • the sheet connector 120 is composed of a porous sheet 121 and an electrode 122.
  • the porous sheet 121 is disposed between the upper and lower surfaces of the anisotropic conductive sheet 110 is inserted into the anisotropic conductive sheet 110 and a plurality of voids are provided.
  • the plurality of voids are filled with an elastic insulating material to be firmly integrated with the anisotropic conductive sheet 110.
  • the material constituting the porous sheet 121 may be a mesh or a nonwoven fabric. As such a mesh or nonwoven fabric, what was formed of the organic fiber can be used suitably. Examples of such organic fibers include fluororesin fibers such as polytetrafluoroethylene fibers, aramid fibers, polyethylene fibers, polyarylate fibers, nylon fibers, polyester fibers and the like.
  • the linear thermal expansion coefficient is the same as or similar to the linear thermal expansion coefficient of the material which forms a connection object member, Specifically, the linear thermal expansion coefficient is 30 kO ⁇ -6> -5 K ⁇ 10> -6 / K, In particular, by using 10 ⁇ 10 -6 to -3 ⁇ 10 -6 / K, thermal expansion of the anisotropic conductive film is suppressed, so that even in the case of receiving a thermal history due to temperature change, a good electrical connection state to the connection object member can be obtained. It can be kept stable. Moreover, as an organic fiber, it is preferable to use the thing whose diameter is 10-200 micrometers.
  • the electrode 122 is disposed at each position corresponding to the conductive portion 111 and is integrally coupled to the porous sheet 121. Each electrode 122 penetrates the porous sheet 121 in the thickness direction and is coupled to the porous sheet 121. The electrode 122 is firmly fixed to the porous sheet 121 while the metal material fills the pores of the porous sheet 121 made of a metal material.
  • the electrode 122 has a plate shape (original plate) having a circular cross section corresponding to the conductive portion 111. The electrode 122 is disposed between the upper end and the lower end of the conductive part 111 to divide the conductive part 111 into the first conductive part 112 and the second conductive part 113.
  • the electrode 122 may be made of nickel, copper, gold, silver, palladium, iron, or the like as a metal, the whole being made of a single metal, an alloy of two or more metals, or two or more metals. It may be laminated.
  • a chemically stable and conductive metal film such as gold, silver, palladium, or the like may be formed on the surface of the electrode 122 to prevent oxidation and to obtain the electrode 122 having a low contact resistance.
  • the guide sheet 130 is disposed on the upper surface of the anisotropic conductive sheet 110, and a through hole 131 is formed at each position corresponding to the conductive portion 111, so that the device under test 140 has the conductive portion. Guide contact with 111.
  • the guide sheet 130 may be any synthetic resin material having flexibility and good moldability, but may be a polyester resin such as a thermosetting resin such as a polyimide resin or an epoxy resin, a polyethylene terephthalate resin, a polybutyrene terephthalate resin, Thermoplastic resins such as polyvinyl chloride resin, polystyrene resin, polyacrylonitrile resin, polyethylene resin, polypropylene resin, acrylic resin, polybutadiene resin, polyphenylene ether, polyphenylene sulfide, polyamide and polyoxymethylene can be used. have.
  • a polyester resin such as a thermosetting resin such as a polyimide resin or an epoxy resin, a polyethylene terephthalate resin, a polybutyrene terephthalate resin, Thermoplastic resins such as polyvinyl chloride resin, polystyrene resin, polyacrylonitrile resin, polyethylene resin, polypropylene resin, acrylic resin, polybutadiene resin,
  • connection connector 100 has the following effects.
  • connection connector 100 is mounted on the inspection apparatus 150 while the conductive portion 111 is in contact with the pad 151 of the inspection apparatus 150. Thereafter, while the device under test 140 is lowered, the terminal 141 of the device under test 140 comes into contact with the conductive portion 111 of the connector 100 for connection. Pressing the connection conductive portion 111 in the thickness direction while further lowering the device under test 140, the conductive particles 111 of the conductive portion 111 are in contact with each other and the conductive portion 111 is in contact with each other. Will make electrical conduction possible.
  • the connector 100 for a connection has the advantage that the sheet-shaped connector 120 is disposed inside the anisotropic conductive sheet 110 so as to improve the durability of the anisotropic conductive sheet 110 as a whole. That is, the sheet-shaped connector 120 made of a mesh or nonwoven fabric is disposed inside the anisotropic conductive sheet 110 made of silicone rubber, thereby improving durability of the anisotropic conductive sheet 110.
  • anisotropic conductive sheet 110 it is possible to prevent the anisotropic conductive sheet 110 from being excessively expanded in a plane direction perpendicular to the thickness direction, thereby preventing the conductive portion 111 of the anisotropic conductive sheet 110 from being damaged.
  • the electrode 122 of the sheet-shaped connector 120 is buried in the conductive portion 111, the electrode 122 does not directly contact the terminal 141 of the device under test 140, and thus the electrode 122 ) And the terminal 141 can be prevented from being damaged. That is, when the electrode 122 made of a metal material and the terminal 141 are in direct contact, the surface of the terminal 141 or the electrode 122 may be damaged, but in the present invention, the surface of the electrode 122 may be elastically deformed. Since the conductive part 111 is provided, damage to the electrode 122 and the terminal 141 can be prevented.
  • the conductive part 111 disposed above the electrode 122 may be damaged due to frequent contact with the terminal 141 of the device under test 140, there is a relatively rigid sheet-shaped connector 120 beneath it. Therefore, even when the upper side of the conductive portion 111 is damaged, there is an advantage that the electrode 122 can directly perform the function of electrical conductivity by contacting the terminal 141 of the device under test 140.
  • the sheet-shaped connector has a smaller size of the first conductive particles of the first conductive portion disposed above the electrode than the size of the second conductive particles of the second conductive portion, and the first conductive particles are smaller than the second conductive particles. It was illustrated that the arrangement is high density.
  • the size and density distribution of the first conductive particles 212a and the second conductive particles 213a of the first conductive portion 212 and the second conductive portion 213 may be reduced. It is also possible to be identical to each other. That is, in the configuration in which the sheet-shaped connector 220 is disposed inside the anisotropic conductive sheet 210, the first conductive portion 212 and the second conductive portion 213 are positioned above and below the electrode. The first and second conductive particles 212a and 213a of the first conductive portion 212 and the second conductive portion 213 may have the same size and density.
  • the sheet-type connector is disposed above the intermediate position between the top surface and the bottom surface of the anisotropic conductive sheet, but is not limited thereto and may be modified as shown in FIG. 7. It is possible.
  • connection connector 300 of FIG. 7 it is illustrated that the sheet-shaped connector 320 is disposed at an intermediate position between an upper surface and a lower surface of the anisotropic conductive sheet 310.
  • the connector 400 of FIG. 8 illustrates that the sheet-shaped connector 420 is disposed above and below the intermediate position between the upper and lower surfaces of the anisotropic conductive sheet 410, respectively.
  • the upper end of the conductive portion may be formed in a protruding shape. That is, in the embodiments of FIGS. 4 and 5, the upper end of the conductive part and the upper end of the insulating support part are illustrated at the same height, but the upper part of the conductive part may protrude upward from the upper end of the insulating support part.

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  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The present invention relates to a connection connector and, more specifically, to a connection connector which is disposed between a device to be tested and a testing apparatus and is for electrically connecting a terminal of the device to be tested and a pad of the testing apparatus. The connection connector comprises: an anisotropic conductive sheet comprising a plurality of conductive parts, in which arranged are a plurality of conductive particles extending in the thickness direction inside an elastic insulating material and on places corresponding to the terminals of the device to be tested, and insulating support parts which are provided between each conductive part, support each conductive part and insulate the conductive parts from one another; and a sheet-type connector having a porous sheet, which is disposed between the upper side and lower side of the anisotropic conductive sheet, is inserted into the anisotropic conductive sheet, and has a plurality of gaps, and a plurality of electrodes which are disposed on places corresponding to the conductive parts and are integrally coupled to the porous sheet, wherein each electrode is formed from a metal material and is electrically connected to each conductive part.

Description

접속용 커넥터Connector for connection
본 발명은 접속용 커넥터에 대한 것으로서, 더욱 상세하게는 빈번한 사용에도 전기적 특성이 저하되는 일이 없이 장기간 사용가능한 접속용 커넥터에 대한 것이다.The present invention relates to a connector for connection, and more particularly, to a connector for connection that can be used for a long time without deteriorating electrical characteristics even in frequent use.
일반적으로 제조가 완료된 반도체 디바이스와 같은 피검사 디바이스의 불량여부를 판단하기 위하여 전기적 테스트를 실시한다. 구체적으로는 검사장치로부터 소정의 테스트신호를 피검사 디바이스로 흘려보내 그 기판의 단락여부를 판정하게 된다. 이러한 검사장치와 피검사 디바이스는 서로 직접 접촉되는 것이 아니라, 소위 접속용 커넥터라는 매개장치를 이용하여 간접적으로 접촉된다.In general, an electrical test is performed to determine whether a device under test, such as a semiconductor device, which has been manufactured is defective. Specifically, a predetermined test signal is sent from the inspection apparatus to the device under test to determine whether the substrate is shorted. These inspection apparatuses and the device under test are not in direct contact with each other, but are indirectly contacted by using a so-called connection medium.
그 이유는 검사장치의 단자에 피검사 디바이스의 단자가 직접 접촉하는 경우에는 반복적인 테스트과정에서 검사장치의 단자가 마모 또는 파손이 발생하게 된다. 이와 같이 검사장치의 단자가 파손되면 전체적인 검사장치를 교체해야 하므로 전체적으로 많은 비용이 발생될 요인이 되기 때문이다. 따라서 접속용 커넥터를 매개부재로 사용하게 되면 피검사 디바이스는 검사장치에 장착된 접속용 커넥터에 접촉하게 되고 이에 따라 접속용 커넥터가 반복적인 접촉에 의하여 마모 또는 파손되면 그 접속용 커넥터만을 교체함으로서 전체적인 교체비용을 절약할 수 있게 된다.The reason for this is that if the terminal of the device under test is in direct contact with the terminal of the inspection apparatus, the terminal of the inspection apparatus may be worn or damaged during repeated testing. This is because if the terminal of the inspection apparatus is broken, the entire inspection apparatus needs to be replaced, which causes a lot of cost. Therefore, when the connecting connector is used as an intermediate member, the device under test comes into contact with the connecting connector mounted on the inspection apparatus. Accordingly, when the connecting connector is worn or damaged by repeated contact, the entire connector is replaced by replacing only the connecting connector. The replacement cost can be saved.
이러한 접속용 커넥터의 일예로서 공개특허 제10-2006-0013429호에 개시된 이방 도전성 커넥터 장치가 알려져 있다.As an example of such a connector for connection, the anisotropically conductive connector device disclosed in Unexamined-Japanese-Patent No. 10-2006-0013429 is known.
도 1 및 도 2의 이방 도전성 커넥터 장치(10)는 직사각형의 이방 도전막(10A)과, 이 이방 도전막(10A)의 일면 상에 일체적으로 설치된 시트형 커넥터(20)와, 이방 도전막(10A)을 지지하는 직사각형의 판 형상인 지지 부재(30)에 의해 구성되어 있다. 이 이방 도전성 커넥터 장치(10)에서의 이방 도전막(10A)은, 각각 두께 방향으로 신장하는 복수의 원주형의 도전로 형성부(11)와, 이들 도전로 형성부(11)를 서로 절연하는 절연부(14)에 의해 구성되어 있고, 본 예에서는 도전로 형성부(11)가 격자점 위치에 따라서 일정한 피치로 배치되어 있다. The anisotropically conductive connector device 10 of FIGS. 1 and 2 includes a rectangular anisotropic conductive film 10A, a sheet-shaped connector 20 integrally provided on one surface of the anisotropic conductive film 10A, and an anisotropic conductive film ( It is comprised by the support member 30 which is a rectangular plate shape which supports 10A). The anisotropic conductive film 10A in this anisotropically conductive connector device 10 insulates the plurality of columnar conductive path forming portions 11 extending in the thickness direction and the conductive path forming portions 11 from each other. It is comprised by the insulating part 14, and in this example, the electrically-conductive path forming part 11 is arrange | positioned by fixed pitch according to the grid point position.
시트형 커넥터(20)는 상기 이방 도전막(10A)의 상면 측에 배치되는 것으로서, 유연한 절연성 시트(21)를 갖고, 이 절연성 시트(21)에는 당해 절연성 시트(21)의 두께 방향으로 신장하는 금속으로 이루어지는 복수의 전극 구조체(22)가, 접속 대상 전극의 패턴과 대응하는 패턴을 따라서, 당해 절연성 시트(21)의 면 방향으로 서로 떨어져 배치되어 있다. 또한, 절연성 시트(21)에는 이방 도전막(10A)의 연결용 돌출부(15)에 대응하여 복수의 연결용 관통 구멍(26)이 형성되어 있다. The sheet-shaped connector 20 is disposed on the upper surface side of the anisotropic conductive film 10A, has a flexible insulating sheet 21, and the insulating sheet 21 has a metal extending in the thickness direction of the insulating sheet 21. The some electrode structure 22 which consists of these is arrange | positioned apart from each other in the surface direction of the said insulating sheet 21 along the pattern corresponding to the pattern of a connection object electrode. In addition, the insulating sheet 21 is provided with a plurality of connecting through holes 26 corresponding to the connecting protrusions 15 of the anisotropic conductive film 10A.
도 3의 실시예는 도 1 및 도 2의 실시예와 유사하지만, 시트형 커넥터(20)가 절연 시트의 양면에 연통하는 공극이 형성된 메쉬, 부직포, 또는 다공성 시트로 이루어지는 절연성 시트(21)를 갖고, 이 절연성 시트(21)에는 당해 절연성 시트(21)의 두께 방향으로 신장하는 금속으로 이루어지는 복수의 전극 구조체(22)가, 접속 대상 전극의 패턴에 대응하는 패턴을 따라서, 당해 절연성 시트(21)의 면방향으로 서로 떨어져 배치되어 있는 점에서 다소 차이가 있다. The embodiment of FIG. 3 is similar to the embodiment of FIGS. 1 and 2, but the sheet-shaped connector 20 has an insulating sheet 21 made of a mesh, a nonwoven fabric, or a porous sheet having voids communicating with both sides of the insulating sheet. In this insulating sheet 21, a plurality of electrode structures 22 made of a metal extending in the thickness direction of the insulating sheet 21 are formed along the pattern corresponding to the pattern of the electrode to be connected. There is a slight difference in that they are spaced apart from each other in the plane direction.
이러한 종래기술에 따른 접속용 커넥터는 피검사 디바이스의 단자와 전극구조체 간의 접촉과정에서 단자 내지 전극구조체의 표면이 손상을 받는 문제점이 있다. 특히, 금속소재로 이루어진 피검사 디바이스의 단자가 금속소재로 이루어진 전극구조체와 직접 접촉함에 의하여 상호간의 표면손상이 발생되는 문제점이 발생한다는 단점이 있게 된다.The connection connector according to the related art has a problem in that the surface of the terminal to the electrode structure is damaged in the process of contact between the terminal of the device under test and the electrode structure. In particular, when the terminals of the device to be tested made of a metal material are in direct contact with the electrode structure made of a metal material, there is a problem in that surface damage occurs between each other.
이와 같이 표면손상은 종국적으로는 전체적인 접속용 커넥터의 수명을 단축시키는 것은 물론 전기적 전도성 측면에서도 바람직하지 못한 결과를 유발하게 된다는 단점이 있게 된다.As such, surface damage may eventually shorten the life of the overall connector for connection and may also cause undesirable effects in terms of electrical conductivity.
본 발명은 상술한 문제점을 해결하기 위하여 창출된 것으로서, 더욱 상세하게는 빈번한 사용에도 전기적 특성이 저하되는 일이 없이 장기간 사용가능한 접속용 커넥터를 제공하는 것을 목적으로 한다.The present invention has been made to solve the above-described problems, and more particularly, an object of the present invention is to provide a connector for connection that can be used for a long time without deteriorating electrical characteristics even in frequent use.
상술한 목적을 달성하기 위한 본 발명의 접속용 커넥터는, 피검사 디바이스와 검사장치의 사이에 배치되어 상기 피검사 디바이스의 단자와 검사장치의 패드를 서로 전기적으로 접속시키기 위한 접속용 커넥터에 있어서,In the connector for connection of the present invention for achieving the above object, the connector for connection is arranged between the device under test and the inspection device to electrically connect the terminal of the device under test to the pad of the inspection device.
상기 피검사 디바이스의 단자와 대응되는 위치마다 탄성 절연물질 내에 두께방향으로 신장하는 다수의 도전성 입자가 배열되는 복수의 도전부와,A plurality of conductive parts in which a plurality of conductive particles extending in a thickness direction in the elastic insulating material are arranged at positions corresponding to the terminals of the device under test;
각각의 도전부들 사이에 마련되어 각각의 도전부들을 지지하면서 도전부들을 서로 절연시키는 절연지지부를 포함하는 이방 도전성 시트; 및An anisotropic conductive sheet provided between the respective conductive portions and including an insulating support portion which insulates the conductive portions from each other while supporting the respective conductive portions; And
상기 이방 도전성 시트의 상면과 하면의 사이에 배치되되 상기 이방 도전성 시트 내에 삽입되어 있으며 다수의 공극이 마련되는 다공성 시트와,A porous sheet disposed between an upper surface and a lower surface of the anisotropic conductive sheet and inserted into the anisotropic conductive sheet and provided with a plurality of voids;
상기 도전부와 대응되는 위치마다 배치되고 상기 다공성 시트에 일체로 결합되어 있는 복수의 전극으로 구성된 시트형 커넥터;를 포함하되,And a sheet type connector including a plurality of electrodes disposed at positions corresponding to the conductive portions and integrally coupled to the porous sheet.
각 전극은 금속소재로 이루어지고 각 도전부와 전기적으로 접속된다.Each electrode is made of a metal material and is electrically connected to each conductive portion.
상기 접속용 커넥터에서,In the connection connector,
상기 각 전극은 도전부의 상단과 도전부의 하단 사이에 위치할 수 있다.Each electrode may be positioned between an upper end of the conductive part and a lower end of the conductive part.
상기 접속용 커넥터에서,In the connection connector,
상기 각 전극은 각 도전부의 수평단면과 대응되는 단면을 가지는 판형태로 이루어질 수 있다.Each electrode may have a plate shape having a cross section corresponding to a horizontal cross section of each conductive portion.
상기 접속용 커넥터에서,In the connection connector,
상기 도전부는, The conductive portion,
상기 전극의 상측에 배치되며 피검사 디바이스의 단자와 접촉될 수 있고 제1도전성 입자로 이루어지는 제1도전부와,A first conductive portion disposed above the electrode and in contact with a terminal of the device under test, the first conductive portion being made of first conductive particles;
상기 전극의 하측에 배치되며 제2도전성 입자로 이루어지는 제2도전부를 포함할 수 있다.It may include a second conductive portion disposed under the electrode and made of second conductive particles.
상기 접속용 커넥터에서,In the connection connector,
상기 제1도전부에서의 제1도전성 입자는, 제2도전부에서의 제2도전성 입자보다 단위면적당 고밀도로 배치될 수 있다.The first conductive particles in the first conductive portion may be disposed at a higher density per unit area than the second conductive particles in the second conductive portion.
상기 접속용 커넥터에서,In the connection connector,
상기 제1도전부에서의 제1도전성 입자의 평균입경은, 상기 제2도전부에서의 제2도전성 입자의 평균입경보다 작을 수 있다.The average particle diameter of the first conductive particles in the first conductive portion may be smaller than the average particle diameter of the second conductive particles in the second conductive portion.
상기 접속용 커넥터에서,In the connection connector,
상기 시트형 커넥터는 상기 이방 도전성 시트의 상면과 하면 사이의 중간위치보다 위쪽에 배치되는 것이 가능하다.The sheet connector may be disposed above the intermediate position between the upper and lower surfaces of the anisotropic conductive sheet.
상기 접속용 커넥터에서,In the connection connector,
상기 시트형 커넥터는 상기 이방 도전성 시트의 상면과 하면 사이의 중간위치에 배치될 수 있다.The sheet connector may be disposed at an intermediate position between an upper surface and a lower surface of the anisotropic conductive sheet.
상기 접속용 커넥터에서,In the connection connector,
상기 이방 도전성 시트의 상면에는, 상기 도전부와 대응되는 위치마다 관통구멍이 형성되어 상기 피검사 디바이스가 상기 도전부에 접촉하는 것을 안내하는 가이드 시트가 마련될 수 있다.In the upper surface of the anisotropic conductive sheet, a through hole is formed at each position corresponding to the conductive portion, and a guide sheet for guiding contact of the device under test with the conductive portion may be provided.
상기 접속용 커넥터에서,In the connection connector,
상기 다공성 시트는, 메쉬 또는 부직포로 이루어지되, 상기 다공성 시트의 공극 내에는 탄성 절연물질이 채워질 수 있다.The porous sheet may be made of a mesh or a nonwoven fabric, and an elastic insulating material may be filled in the pores of the porous sheet.
상술한 목적을 달성하기 위한 본 발명의 접속용 커넥터는, 피검사 디바이스와 검사장치의 사이에 배치되어 상기 피검사 디바이스의 단자와 검사장치의 패드를 서로 전기적으로 접속시키기 위한 접속용 커넥터에 있어서,In the connector for connection of the present invention for achieving the above object, the connector for connection is arranged between the device under test and the inspection device to electrically connect the terminal of the device under test to the pad of the inspection device.
상기 피검사 디바이스의 단자와 대응되는 위치마다 탄성 절연물질 내에 두께방향으로 신장하는 다수의 도전성 입자가 배열되는 복수의 도전부를 포함하는 이방 도전성 시트; 및An anisotropic conductive sheet including a plurality of conductive portions in which a plurality of conductive particles extending in a thickness direction are arranged in an elastic insulating material at positions corresponding to the terminals of the device under test; And
상기 이방 도전성 시트의 상면과 하면의 사이에 배치되되 상기 이방 도전성 시트 내에 삽입되어 있는 다공성 시트와,A porous sheet disposed between an upper surface and a lower surface of the anisotropic conductive sheet and inserted into the anisotropic conductive sheet;
상기 다공성 시트에 일체로 결합되어 있으며 상기 도전부와 대응되는 위치마다 배치되고 도전부 내에 묻혀 있는 복수의 금속전극으로 구성된 시트형 커넥터;를 포함한다.And a sheet-type connector which is integrally coupled to the porous sheet and is disposed at a position corresponding to the conductive portion and is formed of a plurality of metal electrodes buried in the conductive portion.
상기 접속용 커넥터에서,In the connection connector,
상기 금속전극은 자성을 나타내는 소재로 이루어질 수 있다.The metal electrode may be made of a material showing magnetic properties.
본 발명에 따른 접속용 커넥터는, 금속소재로 이루어진 전극의 상측에 탄성이 있는 도전부가 마련되어 있어 피검사 디바이스의 단자 및 전극의 손상을 방지할 수 있는 장점이 있다.The connector for connection according to the present invention has an advantage in that an elastic conductive part is provided on an upper side of an electrode made of a metal material, thereby preventing damage to the terminal and the electrode of the device under test.
또한, 본 발명에 따른 접속용 커넥터는 메쉬형태의 시트형 커넥터가 이방 도전성 시트 내부에 배치되어 있어 전체적인 이방 도전성 시트의 내구성을 증진시킬 수 있는 장점이 있다.In addition, the connector for connection according to the present invention has a merit that a sheet-shaped connector in the form of a mesh is disposed inside the anisotropic conductive sheet to increase the durability of the overall anisotropic conductive sheet.
도 1은 종래기술에 따른 접속용 커넥터의 일예를 나타내는 도면.1 is a view showing an example of a connector for a connection according to the prior art.
도 2는 도 1의 일부 확대도면.2 is a partially enlarged view of FIG. 1;
도 3은 종래기술에 따른 접속용 커넥터의 다른 예를 나타내는 도면.3 is a view showing another example of a connector for a connection according to the prior art.
도 4는 본 발명의 일 실시예에 따른 접속용 커넥터를 나타내는 도면.4 is a view showing a connector for connection according to an embodiment of the present invention.
도 5는 도 4의 작동예.5 is an example of operation of FIG.
도 6 내지 도 8은 본 발명의 다른 실시예에 따른 접속용 커넥터를 나타내는 도면.6 to 8 are views showing a connector for connection according to another embodiment of the present invention.
이하, 본 발명에 따른 접속용 커넥터를 첨부된 도면을 참조하면서 상세하게 설명한다.Hereinafter, the connector for connection according to the present invention will be described in detail with reference to the accompanying drawings.
본 발명에 따른 접속용 커넥터(100)는, 피검사 디바이스(140)와 검사장치(150)의 사이에 배치되어 상기 피검사 디바이스(140)의 단자(141)와 검사장치(150)의 패드(151)를 서로 전기적으로 접속시키기 위한 것으로서, 이방 도전성 시트(110), 시트형 커넥터(120) 및 가이드 시트(130)를 포함하여 구성된다.The connector 100 for a connection according to the present invention is disposed between the device under test 140 and the test device 150, and has a pad (terminal 141) of the device under test 140 and the test device 150 ( 151 is for electrically connecting with each other, and is comprised including the anisotropically conductive sheet 110, the sheet | seat type connector 120, and the guide sheet 130. As shown in FIG.
상기 이방 도전성 시트(110)는, 가압되었을 때 두께방향으로만 도전성을 나타내는 것으로서 복수의 도전부(111)와 절연지지부(114)를 포함하여 구성된다.The anisotropic conductive sheet 110 exhibits conductivity only in the thickness direction when pressed, and includes a plurality of conductive portions 111 and an insulating support portion 114.
상기 도전부(111)는, 상기 피검사 디바이스(140)의 단자(141)와 대응되는 위치마다 탄성 절연물질 내에 두께방향으로 신장하는 다수의 도전성 입자가 배열되는 것이다. 이러한 탄성 절연물질은, 가교 구조를 갖는 고분자 물질이 바람직하다. 이러한 탄성 절연물질을 얻기 위해서 이용할 수 있는 경화성의 고분자 물질 형성 재료로서는, 여러가지 것을 사용할 수 있고, 그 구체예로서는, 폴리부타디엔 고무, 천연 고무, 폴리이소프렌 고무, 스티렌-부타디엔 공중합체 고무, 아크릴로니트릴-부타디엔 공중합체 고무 등의 공액 디엔계 고무 및 이들의 수소 첨가물, 스티렌-부타디엔-디엔 블록 공중합체 고무, 스티렌-이소프렌 블록 공중합체 등의 블록 공중합체 고무 및 이들 수소 첨가물, 클로로프렌 고무, 우레탄 고무, 폴리에스테르계 고무, 에피클로로히드린 고무, 실리콘 고무, 에틸렌-프로필렌 공중합체 고무, 에틸렌-프로필렌-디엔 공중합체 고무 등을 들 수 있다. In the conductive portion 111, a plurality of conductive particles extending in the thickness direction in the elastic insulating material are arranged at positions corresponding to the terminals 141 of the device under test 140. The elastic insulating material is preferably a high molecular material having a crosslinked structure. Various materials can be used as the curable polymer material forming material that can be used to obtain such an elastic insulating material, and specific examples thereof include polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber and acrylonitrile- Conjugated diene rubbers such as butadiene copolymer rubber and hydrogenated products thereof, block copolymer rubbers such as styrene-butadiene-diene block copolymer rubber and styrene-isoprene block copolymer, and these hydrogenated materials, chloroprene rubber, urethane rubber, poly Ester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, and the like.
이상에 있어서, 얻어지는 이방 도전성 시트(110)에 내후성이 요구되는 경우에는, 공액 디엔계 고무 이외의 것을 이용하는 것이 바람직하고, 특히 성형 가공성 및 전기 특성 측면에서, 실리콘 고무를 이용하는 것이 바람직하다. In the above, when weather resistance is requested | required of the anisotropically conductive sheet | seat 110 obtained, it is preferable to use things other than conjugated diene type rubber, and it is preferable to use a silicone rubber especially from a moldability and electrical property viewpoint.
상기 도전성 입자(112a, 113a)는 자성을 나타내는 것이 이용될 수 있다. 이러한 도전성 입자(112a, 113a)의 구체예로서는, 철, 코발트, 니켈 등의 자성을 갖는 금속의 입자 또는 이들의 합금의 입자 또는 이들 금속을 함유하는 입자, 또는 이들 입자를 코어 입자로 하여, 상기 코어 입자의 표면에 금, 은, 팔라듐, 로듐 등의 도전성이 양호한 금속의 도금을 실시한 것, 또는 비자성 금속 입자 또는 유리 비드 등의 무기 물질 입자 또는 중합체 입자를 코어 입자로 하여, 상기 코어 입자의 표면에 니켈, 코발트 등의 도전성 자성 금속의 도금을 실시한 것 등을 들 수 있다. The conductive particles 112a and 113a may be used to exhibit magnetic properties. Specific examples of the conductive particles 112a and 113a include particles of metals having magnetic properties such as iron, cobalt, and nickel, particles of alloys thereof, particles containing these metals, or these particles as core particles. The surface of the said core particle is made by plating the surface of particle | grains with metal with favorable electroconductivity, such as gold, silver, palladium, rhodium, or inorganic substance particle | grains or polymer particles, such as a nonmagnetic metal particle or glass beads, as a core particle. To which electroconductive magnetic metals, such as nickel and cobalt, were plated can be mentioned.
이 중에서는, 니켈 입자를 코어 입자로 하여, 그 표면에 도전성이 양호한 금의 도금을 실시한 것을 이용하는 것이 바람직하다. In this, it is preferable to use what made nickel particle the core particle and plated the gold with favorable electroconductivity on the surface.
코어 입자의 표면에 도전성 금속을 피복하는 수단으로서는, 특별히 한정되는 것은 아니지만, 예를 들면 화학 도금 또는 전해 도금법, 스퍼터링법, 증착법 등이 이용되고 있다. Although it does not specifically limit as a means which coat | covers a conductive metal on the surface of a core particle, For example, chemical plating, an electrolytic plating method, sputtering method, vapor deposition method, etc. are used.
도전성 입자(112a, 113a)로서, 코어 입자의 표면에 도전성 금속이 피복되어 이루어지는 것을 이용하는 경우에는, 양호한 도전성이 얻어지는 점에서, 입자 표면에서의 도전성 금속의 피복률(코어 입자의 표면적에 대한 도전성 금속의 피복 면적의 비율)이 40％ 이상인 것이 바람직하고, 더욱 바람직하게는 45％ 이상, 특히 바람직하게는 47 내지 95％이다. In the case where the conductive metal is coated on the surface of the core particles as the conductive particles 112a and 113a, good conductivity can be obtained. Therefore, the coverage of the conductive metal on the surface of the particles (conductive metal with respect to the surface area of the core particles). It is preferable that the ratio of the coating area of to is 40% or more, More preferably, it is 45% or more, Especially preferably, it is 47 to 95%.
또한, 도전성 금속의 피복량은, 코어 입자의 0.5 내지 50 질량％인 것이 바람직하고, 보다 바람직하게는 2 내지 30 질량％, 더욱 바람직하게는 3 내지 25 질량％, 특히 바람직하게는 4 내지 20 질량％이다. 피복되는 도전성 금속이 금인 경우에는, 그 피복량은 코어 입자의 0.5 내지 30 질량％인 것이 바람직하고, 보다 바람직하게는 2 내지 20 질량％, 더욱 바람직하게는 3 내지 15 질량％이다. The coating amount of the conductive metal is preferably 0.5 to 50% by mass of the core particles, more preferably 2 to 30% by mass, still more preferably 3 to 25% by mass, particularly preferably 4 to 20% by mass. %to be. When the conductive metal to be coated is gold, the coating amount is preferably 0.5 to 30% by mass of the core particles, more preferably 2 to 20% by mass, still more preferably 3 to 15% by mass.
이러한 도전부(111)는 후술하는 시트형 커넥터(120)의 전극(122)에 의하여 제1도전부(112)와 제2도전부(113)로 구성된다. 이때 제1도전부(112)는 상기 전극(122)의 상측에 배치되며 피검사 디바이스(140)의 단자(141)와 접촉될 수 있고 제1도전성 입자(112a)로 이루어지는 것이며, 제2도전부(113)는 상기 전극(122)의 하측에 배치되며 제2도전성 입자(113a)로 이루어지는 것이다. 제1도전부(112)와 제2도전부(113)에서의 탄성 절연물질 및 도전성 입자의 소재는 동일하다. 다만 상기 제1도전부(112)에서의 제1도전성 입자(112a)는, 제2도전부(113)에서의 제2도전성 입자(113a)보다 단위면적당 고밀도로 배치되고, 상기 제1도전부(112)에서의 제1도전성 입자(112a)의 평균입경은, 상기 제2도전부(113)에서의 제1도전성 입자(112a)의 평균입경보다 작을 수 있다. 즉, 전극(122)의 상측에 배치된 제1도전부(112)는 작은 크기의 입자들이 고밀도로 배치되도록 구성되는 것이 바람직한데, 이는 전극(122) 위에서 피검사 디바이스(140)의 단자(141)와 접촉되면서 전극(122)과 단자(141)간의 전기적 전달을 보다 확실하게 할 수 있도록 하기 위함이다.The conductive part 111 is composed of the first conductive part 112 and the second conductive part 113 by the electrode 122 of the sheet-shaped connector 120 to be described later. In this case, the first conductive part 112 is disposed above the electrode 122 and may be in contact with the terminal 141 of the device under test 140, and is formed of the first conductive particles 112a. 113 is disposed below the electrode 122 and is formed of the second conductive particles 113a. The materials of the elastic insulating material and the conductive particles in the first conductive portion 112 and the second conductive portion 113 are the same. However, the first conductive particles 112a in the first conductive portion 112 are disposed at a higher density per unit area than the second conductive particles 113a in the second conductive portion 113, and the first conductive portion 112 An average particle diameter of the first conductive particles 112a in 112 may be smaller than an average particle diameter of the first conductive particles 112a in the second conductive portion 113. That is, the first conductive portion 112 disposed above the electrode 122 is preferably configured such that small-sized particles are arranged at a high density, which is the terminal 141 of the device under test 140 on the electrode 122. In order to be able to more surely the electrical transmission between the electrode 122 and the terminal 141 while contacting.
상기 시트형 커넥터(120)는, 다공성 시트(121)와 전극(122)으로 구성된다.The sheet connector 120 is composed of a porous sheet 121 and an electrode 122.
상기 다공성 시트(121)는 상기 이방 도전성 시트(110)의 상면과 하면의 사이에 배치되되 상기 이방 도전성 시트(110) 내에 삽입되어 있으며 다수의 공극이 마련되는 것이다. 이러한 다수의 공극에는 탄성 절연물질이 채워져 있어 상기 이방 도전성 시트(110)와 확고하게 일체로 결합하게 한다. 이러한 다공성 시트(121)를 구성하는 재료로는 메쉬 혹은 부직포가 사용될 수 있다. 이러한 메쉬 혹은 부직포로서는, 유기 섬유에 의해 형성된 것을 적합하게 이용할 수 있다. 이러한 유기 섬유로서는, 폴리테트라플루오로에틸렌 섬유 등의 불소 수지 섬유, 아라미드 섬유, 폴리에틸렌 섬유, 폴리아릴레이트 섬유, 나일론 섬유, 폴리 에스테르 섬유 등을 들 수 있다. 또한, 유기 섬유로서, 그 선열 팽창 계수가 접속 대상 부재를 형성하는 재료의 선열 팽창 계수와 동등 혹은 근사한 것, 구체적으로는 선열 팽창 계수가 30 ㅧ 10-6 내지 -5 ㅧ 10-6/K, 특히 10 ㅧ 10-6 내지 -3 ㅧ 10-6/K인 것을 이용함으로써, 당해 이방 도전막의 열팽창이 억제되므로, 온도 변화에 의한 열이력을 받은 경우에도, 접속 대상 부재에 대한 양호한 전기적 접속 상태를 안정적으로 유지할 수 있다. 또한, 유기 섬유로서는, 그 직경이 10 내지 200 ㎛인 것을 이용하는 것이 바람직하다. The porous sheet 121 is disposed between the upper and lower surfaces of the anisotropic conductive sheet 110 is inserted into the anisotropic conductive sheet 110 and a plurality of voids are provided. The plurality of voids are filled with an elastic insulating material to be firmly integrated with the anisotropic conductive sheet 110. The material constituting the porous sheet 121 may be a mesh or a nonwoven fabric. As such a mesh or nonwoven fabric, what was formed of the organic fiber can be used suitably. Examples of such organic fibers include fluororesin fibers such as polytetrafluoroethylene fibers, aramid fibers, polyethylene fibers, polyarylate fibers, nylon fibers, polyester fibers and the like. Moreover, as an organic fiber, the linear thermal expansion coefficient is the same as or similar to the linear thermal expansion coefficient of the material which forms a connection object member, Specifically, the linear thermal expansion coefficient is 30 kO <-6> -5 K <10> -6 / K, In particular, by using 10 ㅧ 10 -6 to -3 것을 10 -6 / K, thermal expansion of the anisotropic conductive film is suppressed, so that even in the case of receiving a thermal history due to temperature change, a good electrical connection state to the connection object member can be obtained. It can be kept stable. Moreover, as an organic fiber, it is preferable to use the thing whose diameter is 10-200 micrometers.
상기 전극(122)은, 상기 도전부(111)와 대응되는 위치마다 배치되고 상기 다공성 시트(121)에 일체로 결합되어 있는 것이다. 각각의 전극(122)은 다공성 시트(121)를 두께방향으로 관통하여 다공성 시트(121)에 결합된다. 이러한 전극(122)은 금속소재로 이루어지는 다공성 시트(121)의 공극을 금속소재가 채우면서 상기 다공성 시트(121)에 견고하게 고정되어 있게 된다. 상기 전극(122)은 도전부(111)와 대응되는 원형단면을 가지는 판형태(원판)로 이루어진다. 이러한 전극(122)은 상기 도전부(111)의 상단과 하단 사이에 배치되어 도전부(111)를 제1도전부(112)와 제2도전부(113)로 구분시키게 한다. The electrode 122 is disposed at each position corresponding to the conductive portion 111 and is integrally coupled to the porous sheet 121. Each electrode 122 penetrates the porous sheet 121 in the thickness direction and is coupled to the porous sheet 121. The electrode 122 is firmly fixed to the porous sheet 121 while the metal material fills the pores of the porous sheet 121 made of a metal material. The electrode 122 has a plate shape (original plate) having a circular cross section corresponding to the conductive portion 111. The electrode 122 is disposed between the upper end and the lower end of the conductive part 111 to divide the conductive part 111 into the first conductive part 112 and the second conductive part 113.
이러한 전극(122)은 금속으로서는 니켈, 구리, 금, 은, 팔라듐, 철 등을 이용할 수 있고, 전체가 단일의 금속으로 이루어지는 것이거나, 2종 이상의 금속의 합금으로 이루어지는 것 또는 2종 이상의 금속이 적층되어 이루어지는 것이라도 좋다.The electrode 122 may be made of nickel, copper, gold, silver, palladium, iron, or the like as a metal, the whole being made of a single metal, an alloy of two or more metals, or two or more metals. It may be laminated.
또한, 전극(122)의 표면에는 산화를 방지하는 동시에, 접촉 저항이 작은 전극(122)을 얻기 위해, 금, 은, 팔라듐 등의 화학적으로 안정되고 도전성을 갖는 금속 피막이 형성되어 있어도 좋다.In addition, a chemically stable and conductive metal film such as gold, silver, palladium, or the like may be formed on the surface of the electrode 122 to prevent oxidation and to obtain the electrode 122 having a low contact resistance.
상기 가이드 시트(130)는, 이방 도전성 시트(110)의 상면에 배치되는 것으로서 상기 도전부(111)와 대응되는 위치마다 관통구멍(131)이 형성되어 상기 피검사 디바이스(140)가 상기 도전부(111)에 접촉하는 것을 안내한다.The guide sheet 130 is disposed on the upper surface of the anisotropic conductive sheet 110, and a through hole 131 is formed at each position corresponding to the conductive portion 111, so that the device under test 140 has the conductive portion. Guide contact with 111.
이러한 가이드 시트(130)는 유연성이 있으면서 성형성이 좋은 합성수지소재라면 무엇이나 가능하나, 폴리이미드 수지, 에폭시 수지 등의 열경화성 수지, 폴리에틸렌테레프탈레이트 수지, 폴리부티렌테레프탈레이트 수지 등의 폴리에스테르 수지, 폴리염화비닐 수지, 폴리스티렌 수지, 폴리아크릴니트릴 수지, 폴리에틸렌 수지, 폴리프로필렌 수지, 아크릴 수지, 폴리부타디엔 수지, 폴리페닐렌에테르, 폴리페닐렌설파이드, 폴리아미드, 폴리옥시메틸렌 등의 열가소성 수지를 이용할 수 있다.The guide sheet 130 may be any synthetic resin material having flexibility and good moldability, but may be a polyester resin such as a thermosetting resin such as a polyimide resin or an epoxy resin, a polyethylene terephthalate resin, a polybutyrene terephthalate resin, Thermoplastic resins such as polyvinyl chloride resin, polystyrene resin, polyacrylonitrile resin, polyethylene resin, polypropylene resin, acrylic resin, polybutadiene resin, polyphenylene ether, polyphenylene sulfide, polyamide and polyoxymethylene can be used. have.
상기 접속용 커넥터(100)는 다음과 같은 작용효과를 가진다.The connection connector 100 has the following effects.
먼저, 도전부(111)를 검사장치(150)의 패드(151)에 접촉시킨 상태에서 상기 접속용 커넥터(100)를 검사장치(150)에 탑재시킨다. 이후에 피검사 디바이스(140)를 하강시켜 가면서 상기 피검사 디바이스(140)의 단자(141)가 접속용 커넥터(100)의 도전부(111)에 접촉하게 한다. 상기 피검사 디바이스(140)를 추가로 하강시켜가면서 상기 접속용 도전부(111)를 두께방향으로 가압시키면 도전부(111)의 도전성 입자들(112a, 113a)이 서로 접촉되면서 도전부(111)를 전기적 도통 가능한 상태로 만들게 된다.First, the connection connector 100 is mounted on the inspection apparatus 150 while the conductive portion 111 is in contact with the pad 151 of the inspection apparatus 150. Thereafter, while the device under test 140 is lowered, the terminal 141 of the device under test 140 comes into contact with the conductive portion 111 of the connector 100 for connection. Pressing the connection conductive portion 111 in the thickness direction while further lowering the device under test 140, the conductive particles 111 of the conductive portion 111 are in contact with each other and the conductive portion 111 is in contact with each other. Will make electrical conduction possible.
이 상태에서 검사장치(150)로부터 소정의 전기적 신호를 인가시키면 상기 신호가 도전부(111) 및 전극(122)을 지나면서 피검사 디바이스(140)로 전달되어 전기적 검사가 수행된다.In this state, when a predetermined electrical signal is applied from the inspection apparatus 150, the signal is transmitted to the device under test 140 while passing through the conductive portion 111 and the electrode 122 to perform the electrical inspection.
이러한 본 발명에 따른 접속용 커넥터(100)는, 시트형 커넥터(120)가 이방 도전성 시트(110)의 내부에 배치되어 있어 이방 도전성 시트(110)의 내구성을 전체적으로 증진시킬 수 있는 장점이 있다. 즉, 메쉬, 또는 부직포로 이루어진 시트형 커넥터(120)가 실리콘 고무로 이루어진 이방 도전성 시트(110) 내부에 배치되어 있어 이방 도전성 시트(110)의 내구성을 증진시킬 수 있다.The connector 100 for a connection according to the present invention has the advantage that the sheet-shaped connector 120 is disposed inside the anisotropic conductive sheet 110 so as to improve the durability of the anisotropic conductive sheet 110 as a whole. That is, the sheet-shaped connector 120 made of a mesh or nonwoven fabric is disposed inside the anisotropic conductive sheet 110 made of silicone rubber, thereby improving durability of the anisotropic conductive sheet 110.
특히, 이방 도전성 시트(110)가 과도하게 두께방향과 직각인 면방향으로 팽창되는 것을 방지하도록 하여 이방 도전성 시트(110)의 도전부(111)가 파손되는 것을 방지할 수 있다.In particular, it is possible to prevent the anisotropic conductive sheet 110 from being excessively expanded in a plane direction perpendicular to the thickness direction, thereby preventing the conductive portion 111 of the anisotropic conductive sheet 110 from being damaged.
이와 함께 시트형 커넥터(120)의 전극(122)은 도전부(111) 내부에 파묻혀 있기 때문에 전극(122)이 직접 피검사 디바이스(140)의 단자(141)와 접촉하는 일이 없게 되어 전극(122) 및 단자(141)의 손상을 방지할 수 있게 된다. 즉, 금속소재로 이루어진 전극(122)과 단자(141)가 직접 접촉하는 경우 단자(141) 또는 전극(122)의 표면이 손상될 염려가 있으나 본 발명에서는 전극(122)의 상측에 탄성변형되는 도전부(111)가 마련되어 있기 때문에 전극(122) 및 단자(141)의 손상을 방지할 수 있다.In addition, since the electrode 122 of the sheet-shaped connector 120 is buried in the conductive portion 111, the electrode 122 does not directly contact the terminal 141 of the device under test 140, and thus the electrode 122 ) And the terminal 141 can be prevented from being damaged. That is, when the electrode 122 made of a metal material and the terminal 141 are in direct contact, the surface of the terminal 141 or the electrode 122 may be damaged, but in the present invention, the surface of the electrode 122 may be elastically deformed. Since the conductive part 111 is provided, damage to the electrode 122 and the terminal 141 can be prevented.
또한, 전극(122)의 상측에 배치된 도전부(111)도 빈번한 피검사 디바이스(140)의 단자(141)와의 접촉으로 인하여 파손될 염려가 있으나, 그 아래에 비교적 견고한 시트형 커넥터(120)가 있기 때문에 도전부(111)의 상측이 파손되는 경우라도 전극(122)이 직접 피검사 디바이스(140)의 단자(141)와 접촉함으로서 전기적 전도성의 기능을 계속 수행할 수 있다는 장점이 있다.In addition, although the conductive part 111 disposed above the electrode 122 may be damaged due to frequent contact with the terminal 141 of the device under test 140, there is a relatively rigid sheet-shaped connector 120 beneath it. Therefore, even when the upper side of the conductive portion 111 is damaged, there is an advantage that the electrode 122 can directly perform the function of electrical conductivity by contacting the terminal 141 of the device under test 140.
상술한 실시예에서는 상기 시트형 커넥터는 전극의 상측에 배치된 제1도전부의 제1도전성 입자의 크기가 제2도전부의 제2도전성 입자의 크기보다 작고, 제1도전성 입자가 제2도전성 입자에 비하여 고밀도로 배치된 것을 예시하였다.In the above-described embodiment, the sheet-shaped connector has a smaller size of the first conductive particles of the first conductive portion disposed above the electrode than the size of the second conductive particles of the second conductive portion, and the first conductive particles are smaller than the second conductive particles. It was illustrated that the arrangement is high density.
그러나 도 6의 접속용 커넥터(200)에서와 같이 제1도전부(212)와 제2도전부(213)의 제1도전성 입자(212a)와 제2도전성 입자(213a)의 크기 및 밀도분포가 서로 동일한 것도 가능하다. 즉, 이방 도전성 시트(210)의 내부에 시트형 커넥터(220)가 배치된 구성에서, 제1도전부(212) 및 제2도전부(213)가 전극의 상측 및 하측에 위치된 상태에서, 제1도전부(212) 및 제2도전부(213)의 제1, 2도전성 입자(212a, 213a)의 크기 및 밀도가 동일한 것도 가능하다.However, as in the connector 200 of FIG. 6, the size and density distribution of the first conductive particles 212a and the second conductive particles 213a of the first conductive portion 212 and the second conductive portion 213 may be reduced. It is also possible to be identical to each other. That is, in the configuration in which the sheet-shaped connector 220 is disposed inside the anisotropic conductive sheet 210, the first conductive portion 212 and the second conductive portion 213 are positioned above and below the electrode. The first and second conductive particles 212a and 213a of the first conductive portion 212 and the second conductive portion 213 may have the same size and density.
또한, 도 4 및 도 5의 실시예에서는 시트형 커넥터가 상기 이방 도전성 시트의 상면과 하면 사이의 중간위치보다 위쪽에 배치되는 것을 예시하였으나, 이에 한정되는 것은 아니며 도 7에 도시된 바와 같이 변형되는 것도 가능하다.4 and 5 illustrate that the sheet-type connector is disposed above the intermediate position between the top surface and the bottom surface of the anisotropic conductive sheet, but is not limited thereto and may be modified as shown in FIG. 7. It is possible.
예를 들어, 도 7의 접속용 커넥터(300)에서는, 상기 시트형 커넥터(320)는 상기 이방 도전성 시트(310)의 상면과 하면 사이의 중간위치에 배치되는 것이 예시되어 있다.For example, in the connection connector 300 of FIG. 7, it is illustrated that the sheet-shaped connector 320 is disposed at an intermediate position between an upper surface and a lower surface of the anisotropic conductive sheet 310.
또한, 다른 변형예로서 도 8의 접속용 커넥터(400)에서는, 시트형 커넥터(420)가 상기 이방 도전성 시트(410)의 상면과 하면 사이의 중간위치보다 위쪽 및 아래쪽에 각각 배치되는 것을 예시한다.As another modification, the connector 400 of FIG. 8 illustrates that the sheet-shaped connector 420 is disposed above and below the intermediate position between the upper and lower surfaces of the anisotropic conductive sheet 410, respectively.
또 다른 실시예로서, 도면에 도시하지 않았으나, 도전부의 상단이 돌출형으로 이루어지는 것도 가능하다. 즉, 도 4 및 5의 실시예에서는 도전부의 상단과 절연지지부의 상단이 동일 높이에 있는 것을 예시하였으나, 도전부의 상단이 절연지지부의 상단보다 상측으로 돌출되어 있는 것도 가능함은 물론이다.As another embodiment, although not shown in the drawing, the upper end of the conductive portion may be formed in a protruding shape. That is, in the embodiments of FIGS. 4 and 5, the upper end of the conductive part and the upper end of the insulating support part are illustrated at the same height, but the upper part of the conductive part may protrude upward from the upper end of the insulating support part.
이상에서 다양한 실시예를 들어 본 발명의 접속용 커넥터를 설명하였으나, 이에 한정되는 것은 아니며 본 발명의 권리범위로부터 합리적으로 해석될 수 있는 것이라면 무엇이나 본 발명의 권리범위에 속하는 것은 당연하다.Although the connector for connection of the present invention has been described above with reference to various embodiments, it is not limited thereto, and any thing that can be reasonably interpreted from the scope of the present invention is naturally within the scope of the present invention.

Claims (12)

  1. 피검사 디바이스와 검사장치의 사이에 배치되어 상기 피검사 디바이스의 단자와 검사장치의 패드를 서로 전기적으로 접속시키기 위한 접속용 커넥터에 있어서,A connector for connecting disposed between a device under test and a test apparatus to electrically connect a terminal of the device under test and a pad of the test apparatus with each other,
    상기 피검사 디바이스의 단자와 대응되는 위치마다 탄성 절연물질 내에 두께방향으로 신장하는 다수의 도전성 입자가 배열되는 복수의 도전부와,A plurality of conductive parts in which a plurality of conductive particles extending in a thickness direction in the elastic insulating material are arranged at positions corresponding to the terminals of the device under test;
    각각의 도전부들 사이에 마련되어 각각의 도전부들을 지지하면서 도전부들을 서로 절연시키는 절연지지부를 포함하는 이방 도전성 시트; 및An anisotropic conductive sheet provided between the respective conductive portions and including an insulating support portion which insulates the conductive portions from each other while supporting the respective conductive portions; And
    상기 이방 도전성 시트의 상면과 하면의 사이에 배치되되 상기 이방 도전성 시트 내에 삽입되어 있으며 다수의 공극이 마련되는 다공성 시트와,A porous sheet disposed between an upper surface and a lower surface of the anisotropic conductive sheet and inserted into the anisotropic conductive sheet and provided with a plurality of voids;
    상기 도전부와 대응되는 위치마다 배치되고 상기 다공성 시트에 일체로 결합되어 있는 복수의 전극으로 구성된 시트형 커넥터;를 포함하되,And a sheet type connector including a plurality of electrodes disposed at positions corresponding to the conductive portions and integrally coupled to the porous sheet.
    각 전극은 금속소재로 이루어지고 각 도전부와 전기적으로 접속되는 것을 특징으로 하는 접속용 커넥터.Each electrode is made of a metal material and electrically connected to each conductive portion.
  2. 제1항에 있어서,The method of claim 1,
    상기 각 전극은 도전부의 상단과 도전부의 하단 사이에 위치하는 것을 특징으로 하는 접속용 커넥터.Each electrode is positioned between an upper end of the conductive part and a lower end of the conductive part.
  3. 제1항에 있어서,The method of claim 1,
    상기 각 전극은 각 도전부의 수평단면과 대응되는 단면을 가지는 판형태로 이루어지는 것을 특징으로 하는 접속용 커넥터.And each electrode has a plate shape having a cross section corresponding to a horizontal cross section of each conductive portion.
  4. 제1항에 있어서,The method of claim 1,
    상기 도전부는, The conductive portion,
    상기 전극의 상측에 배치되며 피검사 디바이스의 단자와 접촉될 수 있고 제1도전성 입자로 이루어지는 제1도전부와,A first conductive portion disposed above the electrode and in contact with a terminal of the device under test, the first conductive portion being made of first conductive particles;
    상기 전극의 하측에 배치되며 제2도전성 입자로 이루어지는 제2도전부를 포함하는 접속용 커넥터.And a second conductive part disposed under the electrode and made of second conductive particles.
  5. 제4항에 있어서,The method of claim 4, wherein
    상기 제1도전부에서의 제1도전성 입자는, 제2도전부에서의 제2도전성 입자보다 단위면적당 고밀도로 배치되는 것을 특징으로 하는 접속용 커넥터.And the first conductive particles in the first conductive portion are disposed at a higher density per unit area than the second conductive particles in the second conductive portion.
  6. 제4항에 있어서,The method of claim 4, wherein
    상기 제1도전부에서의 제1도전성 입자의 평균입경은, 상기 제2도전부에서의 제2도전성 입자의 평균입경보다 작은 것을 특징으로 하는 접속용 커넥터.An average particle diameter of the first conductive particles in the first conductive portion is smaller than an average particle diameter of the second conductive particles in the second conductive portion.
  7. 제1항에 있어서,The method of claim 1,
    상기 시트형 커넥터는 상기 이방 도전성 시트의 상면과 하면 사이의 중간위치보다 위쪽에 배치되는 것을 특징으로 하는 접속용 커넥터.And said sheet connector is disposed above an intermediate position between an upper surface and a lower surface of said anisotropic conductive sheet.
  8. 제1항에 있어서,The method of claim 1,
    상기 시트형 커넥터는 상기 이방 도전성 시트의 상면과 하면 사이의 중간위치에 배치되는 것을 특징으로 하는 접속용 커넥터.And said sheet connector is disposed at an intermediate position between an upper surface and a lower surface of said anisotropic conductive sheet.
  9. 제1항에 있어서,The method of claim 1,
    상기 이방 도전성 시트의 상면에는, 상기 도전부와 대응되는 위치마다 관통구멍이 형성되어 상기 피검사 디바이스가 상기 도전부에 접촉하는 것을 안내하는 가이드 시트가 마련되어 있는 것을 특징으로 하는 접속용 커넥터.A connecting sheet is provided on an upper surface of the anisotropic conductive sheet so that a through hole is formed at each position corresponding to the conductive portion to guide the device under test to contact the conductive portion.
  10. 제1항에 있어서,The method of claim 1,
    상기 다공성 시트는, 메쉬 또는 부직포로 이루어지되, 상기 다공성 시트의 공극 내에는 탄성 절연물질이 채워져 있는 것을 특징으로 하는 접속용 커넥터.The porous sheet is made of a mesh or nonwoven fabric, the connector for connection, characterized in that the elastic insulating material is filled in the pores of the porous sheet.
  11. 피검사 디바이스와 검사장치의 사이에 배치되어 상기 피검사 디바이스의 단자와 검사장치의 패드를 서로 전기적으로 접속시키기 위한 접속용 커넥터에 있어서,A connector for connecting disposed between a device under test and a test apparatus to electrically connect a terminal of the device under test and a pad of the test apparatus with each other,
    상기 피검사 디바이스의 단자와 대응되는 위치마다 탄성 절연물질 내에 두께방향으로 신장하는 다수의 도전성 입자가 배열되는 복수의 도전부를 포함하는 이방 도전성 시트; 및An anisotropic conductive sheet including a plurality of conductive portions in which a plurality of conductive particles extending in a thickness direction are arranged in an elastic insulating material at positions corresponding to the terminals of the device under test; And
    상기 이방 도전성 시트의 상면과 하면의 사이에 배치되되 상기 이방 도전성 시트 내에 삽입되어 있는 다공성 시트와,A porous sheet disposed between an upper surface and a lower surface of the anisotropic conductive sheet and inserted into the anisotropic conductive sheet;
    상기 다공성 시트에 일체로 결합되어 있으며 상기 도전부와 대응되는 위치마다 배치되고 도전부 내에 묻혀 있는 복수의 금속전극으로 구성된 시트형 커넥터;를 포함하는 것을 특징으로 하는 접속용 커넥터.And a sheet-type connector which is integrally coupled to the porous sheet and is disposed at a position corresponding to the conductive portion and is formed of a plurality of metal electrodes buried in the conductive portion.
  12. 제11항에 있어서,The method of claim 11,
    상기 금속전극은 자성을 나타내는 소재로 이루어지는 것을 특징으로 하는 접속용 커넥터.And said metal electrode is made of a material showing magnetic properties.
PCT/KR2015/010360 2015-10-01 2015-10-01 Connection connector WO2017057785A1 (en)

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Cited By (1)

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KR20210002625A (en) * 2018-05-29 2021-01-08 신에츠 폴리머 가부시키가이샤 Pressure sensitive touch sensor and pressure sensitive touch sensor module

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