TW201500156A - Breaking tool of brittle material substrate and support fixture of brittle material substrate - Google Patents

Abstract

The present invention provides a breaking tool, which can orderly carry out breaking by manual work along scribe lines formed on a surface of a substrate and breaking can be surely achieved even when the cracks along the scribe lines penetrate shallower into the interior of the substrate or the spacing between the scribe lines is narrower. The breaking tool comprises a support fixture 1, which has a groove 3 on a surface for the insertion of one end portion W' of the substrate W; and a clamping fixture 2, which clamps and holds the substrate W in such a manner that the end portion W' of the substrate W containing a scribe line to be broken projects out. The clamping fixture 2 includes a first plate 8, a second plate 9, and intermediate boards 11 located between the substrate W and the two plates 8, 9. The intermediate boards 11 are formed of an elastic material. The width L1 of the intermediate boards 11 is smaller than the width L2 of the substrate W, and left and right portions of the substrate W comprise areas L3 that are not overlapping the intermediate boards 11.

Description

Breaking tool for brittle material substrate and supporting fixture for brittle material substrate

The present invention relates to a breaking tool for a substrate such as a ceramic material. More particularly, the present invention relates to a cutting tool which is a simple method of performing a breaking operation of a slashed (grooved) brittle material substrate (hereinafter simply referred to as "substrate") in a previous step by hand.

Conventionally, there has been known a method in which a scribing mechanism such as a cutter wheel (also referred to as a scribing wheel) or a laser beam is used to form a cross line in the X direction and the Y direction orthogonal to each other on the surface of the substrate, and thereafter, from the plan An external force is applied to the surface on the opposite side of the line to bend the substrate or to bend the substrate, thereby dividing the substrate into a unit substrate. For example, Patent Document 1, Patent Document 2, and Patent Document 3 disclose.

Further, in order to separate the substrate along the scribe line, various methods have been known since the prior art.

Fig. 12 shows an example of a breaking method generally used. As shown in FIG. 12(a), the substrate W is placed on the horizontal stage 20 via the buffer sheet 21. In this case, the surface on which the scribe line S is formed on the substrate is set to the lower side. Then, as shown in FIG. 12(b), the breaking lever 22 is lowered from above the substrate W to bend the substrate W, whereby the substrate W is divided along the scribe line S (see FIG. 5 of Patent Document 1).

Fig. 13 shows another breaking method. In this method, one of the support pads 23 and 23 of the substrate W is supported by arranging the scribe line S, and the breaking lever 24 is pressed against the surface of the substrate W opposite to the surface on which the scribe line S is provided. The substrate W is bent by the substrate, and the substrate is separated along the scribe line S (see FIG. 3 of Patent Document 2).

Figure 14 shows yet another method of breaking. In this method, the substrate W is placed on the stage 25 in a state where one end portion Wa of the substrate W is to be protruded from one end edge of the stage 25 to the outside. In this case, the scribe line S to be broken is placed upward to coincide with the end edge of the stage 24. Then, the breaking lever 26 is lowered to press down the protruding portion Wa of the substrate W, and the substrate is separated along the scribe line S (see FIGS. 1 to 3 of Patent Document 3).

The above-mentioned breaking method is indispensable for the holding mechanism for holding the substrate on the platform or the breaking rod for lifting up and down in the vertical direction. Therefore, there is a need for a frame for holding the breaking rod or a driving source for lifting and lowering, and a suction mechanism or a pressing member for stably holding the substrate on the stage, whereby the apparatus becomes large and expensive. In addition, it is necessary to perform various initial settings of the operation portion such as the positioning or feed pitch of the substrate on the platform and the pressing pressure of the breaking rod when the device is initially operated, and it is not suitable for dividing a small number of substrates (that is, non-mass production standards). Other than the substrate, etc.).

Therefore, a simple tool for dividing a substrate by a manual operation as shown in Fig. 8 of Patent Document 4 has been proposed.

As shown in FIG. 15 of the present invention, the breaking tool is provided with a plurality of grooves 28 on the surface of the table 27, by inserting one end portion of the substrate W into the groove 28, and holding the upper end of the substrate W by hand. The portion is swung in the front and rear directions as indicated by the arrow in Fig. 15(b), and the substrate W is separated from the scribe line S located at a position near the groove 28.

[Background literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2013-071335

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2013-079171

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2009-227550

[Patent Document 4] Japanese Patent Special Publication No. 05-37097

Generally, if a plate having a thickness is bent, a compressive stress is applied to the inner corner side of the bent portion, and a tensile stress is applied to the outer corner side. In the breaking method shown in FIGS. 12 to 14 described above, when the substrate is bent by the breaking rod, the surface on which the scribe line is provided becomes the outer side (the convex side) to which the tensile stress is applied, and the crack of the scribe line is promoted. Infiltrate, making it easy to break.

However, in the above-mentioned breaking tool of FIG. 15, since the upper end portion of the substrate is bent by being held by bending by hand, the scribe line at the root portion of the substrate is alternately subjected to tensile stress and compressive stress. When the scribe line reaches the critical point of fracture, it is suddenly broken. Therefore, the broken surface of the substrate becomes disordered, and there is a case where a phenomenon called "split" shown in the reference numeral 29 in Fig. 16(a) or a "notch" in the symbol 30 is generated.

Further, when the substrate is tilted by holding the upper end portion of the substrate and bending, the force applied to the left and right end portions of the substrate W is uneven, and the both ends of the substrate after the disconnection are generated. (b) The phenomenon shown as symbol "31" in "symbol". Such "splits", "notches" and "bumps" will deteriorate the quality of the products after the break, resulting in defective products.

Furthermore, since the upper end portion of the substrate is held by hand to be bent, the following is a problem, that is, a large force is required at the time of breaking, and the scribe line is disconnected from the position to be aimed at, Or poor separation (non-lined partial fracture). These defects are more pronounced in a substrate having a shallower penetration of the cracked line of the scribe line or a substrate having a narrower distance between the scribe lines, for example, if the crack of the scribe line penetrates to 10% or less of the thickness of the substrate, and A substrate having a line spacing of 3 mm or less has a problem that the generation rate becomes high and it is hardly practical.

Accordingly, an object of the present invention is to solve the above problems, and to provide a breaking tool which can divide a substrate neatly by hand, and can be surely formed even if the substrate is shallowly penetrated by a crack or a substrate having a narrow distance between the scribe lines. Break.

In order to solve the above problems, the following technical methods are conceived in the present invention. That is, this hair The breaking tool of the present invention is configured to include: a supporting jig having a groove inserted into one end portion of the substrate on the surface; and a clamping jig for causing one end of the streaking line of the substrate to be broken The substrate is sandwiched and held in a state in which the front end is protruded; and the sandwiching jig includes a first plate and a second plate which are assembled in a parallel posture with a space sandwiched between the substrates, and the first plate and the second plate are adjustable The sheets are formed at intervals.

Preferably, the clamping jig is configured to include: a first plate member and a second plate member, which are equally spaced apart from each other and assembled in a parallel posture; and an intermediate plate member (for example, a plate-shaped cushioning member), Between the plates and the substrate, and comprising an elastic material.

The intermediate plate member is preferably configured such that the left and right widths are formed to be smaller than the left and right widths of the substrate.

The first plate and the second plate of the clamping jig are coupled by an adjusting screw, and the interval can be adjusted by operating the adjusting screw.

In the present invention, since the substrate can be firmly fixed by sandwiching the substrate between the first plate and the second plate sandwiching the jig along the line to be broken, even if the substrate penetrates into the inside of the substrate along the scribe line The substrate with a shallow penetration (for example, a crack depth of 10% or less of the substrate thickness) or a substrate having a narrow distance between the scribe lines (for example, a case where the distance between the scribe lines is 3 mm or less) can also eliminate the substrate from the substrate. The portion other than the scribe line is broken, or the scribe line other than the desired scribe line is broken, and the substrate is tilted by tying the end portion before the clamp is clamped, and the "leverage" principle can be applied to lighter Force breaking.

Further, according to the embodiment in which the intermediate plate including the elastic material is interposed between the first plate and the second plate and the substrate (the second embodiment), damage to the surface of the substrate can be prevented, and even if the fastening force of each adjusting screw is slightly The deviation can also be surely held by the elastic force of the intermediate plate to hold the substrate. Thereby, the entire surface of the substrate can be pressed with a substantially equal force to be tilted, so that the occurrence of the "bump" can be suppressed.

In particular, according to the embodiment in which the left and right widths of the intermediate plate are formed in a size smaller than the left and right widths of the substrate (the third embodiment), the left and right widths of the intermediate plate are formed in a size larger than the left and right widths of the substrate. It can further suppress the occurrence of "bursts". It is considered that this is because the load applied to both end portions of the substrate becomes small at the time of breaking. That is, in the case where the left and right widths of the intermediate plate are formed in a size larger than the left and right widths of the substrate, especially in the case where the intermediate plate is an elastic material, if the substrate and the intermediate plate are fastened, the intermediate plate is compressed, and the intermediate plate is compressed. The portion that is not opposed to the substrate is relatively expanded, and an excessive stress is applied to the end surface of the substrate, particularly the end portion in contact with the intermediate plate, compared with the central portion of the substrate, thereby Stress is applied in an unnatural direction to cause a "burst". On the other hand, in the embodiment in which the left and right widths of the intermediate plate are formed in a size smaller than the left and right widths of the substrate, since the end portion of the substrate is in an open state, no unnecessary portion is applied to the end portion of the substrate at the time of breaking. The stress, the crack naturally expands along the scribe line to suppress the occurrence of "bursts".

Further, by causing the scribe line of the front end portion of the substrate protruding from the front end of the jig to be clamped to the front end of the jig, the bending stress applied to the substrate when the jig is tilted can be concentrated on the scribe line. Thereby, the crack of the scribe line can be vertically infiltrated in the thickness direction of the substrate, and the occurrence of "split" or "notch" on the broken surface can be suppressed. Further, there is an effect that the crack is generated straight in the extending direction of the scribe line at the time of the disconnection, and the tendency of the crack to be inclined or twisted can be suppressed, and a unit product having a high-quality fracture surface can be obtained.

In the present invention, it is preferable that the support jig is configured such that a member forming one side wall of the groove can be formed by moving in the groove width direction and adjusted, and can be adjusted by moving in the depth direction of the groove. A member forming the bottom surface of the above groove is formed.

Thereby, the width or depth of the groove can be adjusted in accordance with the thickness of the substrate to be broken or the distance between the scribe lines, so that it can be used for the division of various substrates.

1‧‧‧Support fixture

2‧‧‧Clamping fixture

3‧‧‧ Groove

3a‧‧‧Fixed sidewall members

3b‧‧‧ movable side wall members

3c‧‧‧ movable floor member

4‧‧‧Workbench

5‧‧‧Support board

6‧‧‧First adjustment bolt

7‧‧‧Second adjustment bolt

8‧‧‧ first plate

8a‧‧‧ clamping surface

9‧‧‧Second plate

9a‧‧‧ clamping surface

10‧‧‧Adjustment screws

11‧‧‧Intermediate sheet

20‧‧‧ platform

21‧‧‧buffer sheet

22‧‧‧ broken rod

23‧‧‧Support blade

24‧‧‧ broken rod

25‧‧‧ platform

26‧‧‧ broken rod

27‧‧‧Workbench

28‧‧‧ Groove

29‧‧‧Splinter

30‧‧‧ gap

31‧‧‧ horn

A‧‧‧ breaking tool

Left and right width of L1‧‧‧ intermediate plate

The left and right width of the L2‧‧‧ substrate

L3‧‧‧ areas without intermediate plates

W‧‧‧Battery material substrate

W'‧‧‧ One end of the substrate protruding from the front end of the clamp

One end of Wa‧‧‧

S‧‧‧

S1‧‧‧ vertical line

S2, S2'‧‧‧ horizontal line

Figure 1 is a perspective view showing an embodiment (first embodiment) of the breaking tool of the present invention. Figure.

Figure 2 is a cross-sectional view of the breaking tool of Figure 1.

3(a)-(c) are explanatory views showing a step of dividing a substrate by using the breaking tool of Fig. 1.

Fig. 4 is a perspective view showing an embodiment (second embodiment) of the breaking tool of the present invention.

Figure 5 is a cross-sectional view of the breaking tool of Figure 4.

6(a)-(c) are explanatory views showing a step of dividing a substrate by using the breaking tool of Fig. 4.

Fig. 7 is a perspective view showing an embodiment (third embodiment) of the breaking tool of the present invention.

Figure 8 is a cross-sectional view of the breaking tool of Figure 7.

9(a)-(c) are explanatory views showing a step of dividing a substrate by using the breaking tool of Fig. 7.

Fig. 10 is a front view showing the clipping tool in the breaking tool of Fig. 7.

Fig. 11 is a plan view showing an example of a substrate which is separated by the breaking tool of the present invention.

Fig. 12 (a) and (b) are explanatory views showing an example of a conventional conventional breaking method.

Fig. 13 is an explanatory view showing another example of the conventional breaking method.

Fig. 14 is an explanatory view showing still another example of the conventional breaking method.

15(a) and 15(b) are explanatory views showing still another example of the conventional breaking method.

Fig. 16 (a) and (b) are explanatory views of the processing failure phenomenon occurring on the substrate breaking surface at the time of cutting.

Hereinafter, the breaking tool of the present invention will be described in detail based on Figs.

The breaking tool A of the present invention comprises: a supporting jig 1 having a linear groove 3 inserted into one end portion of the substrate W on the surface; and a clamping jig 2 for disconnecting the substrate W The end portion W' is sandwiched by the substrate W while being protruded from the front end (the lower end in Fig. 1). 1 to 3 are views relating to the sandwiching jig of the first embodiment, and Figs. 4 to 6 are drawings relating to the sandwiching jig of the second embodiment, and Figs. 7 to 10 are sandwiched between the third embodiment and the third embodiment. Enter the relevant diagram of the fixture.

The support jig 1 includes: a fixed side wall member 3a that forms one side wall of the recess 3; a movable side wall member 3b that forms another side wall; a movable bottom plate member 3c that forms a bottom surface of the recess 3; and a table 4 that holds These components.

The fixed side wall member 3a is fixed to the table 4 via the support plate 5. The movable side wall member 3b is placed on the table 4 only in a sliding manner in the groove width direction, and is formed so as to be adjustable by the first adjusting bolt 6. Further, the movable floor member 3c is disposed between the table 4 and the fixed side wall member 3a, and is held in adjustment by the second adjustment bolt 7 moving in the depth direction of the groove 3.

In the first embodiment, the sandwiching jig 2 includes a first plate member 8 and a second plate member 9 which are made of a hard material such as metal which is assembled in a parallel posture with the interval between the substrates W interposed therebetween. The first plate member 8 and the second plate member 9 include clamping faces 8a and 9a which are opposed to each other, and the clamping faces 8a and 9a are connected by the left and right adjusting screws 10 while being held in a parallel posture. The adjusting screw 10 is tightened to hold and hold the substrate W. Further, by loosening the adjusting screw 10, the substrate W positioned between the two sheets 8 and 9 can be sequentially moved downward or the substrate W can be attached or detached.

In the second embodiment, the sandwiching jig 2 includes a first plate member 8 and a second plate member 9 which are assembled in a parallel posture with a space therebetween and sandwiched therebetween, and include a hard material such as metal; and an intermediate plate member (for example, a plate) The cushioning members 11 and 11, which are respectively interposed between the plates 8 and 9 and the substrate W. The intermediate plate 11 preferably contains a material such as natural or synthetic rubber having a relatively high hardness. The first plate member 8 and the second plate member 9 include clamping faces 8a and 9a which are flat toward each other, and the substrate W is sandwiched between the sandwiching faces 8a and 9a via the intermediate sheets 11 and 11.

In the second embodiment, as shown in FIG. 4, the both ends of the intermediate plate 11 are provided with The screw insertion hole 12 is inserted into the insertion jig 2 by inserting the above-mentioned adjustment screw 10 through the insertion hole 12. In this case, the front end of the intermediate plate 11 is attached so as not to protrude from the front ends of the first plate 8 and the second plate 9. However, although not shown in the drawings, the left and right widths of the intermediate plate 11 may be exactly the size between the left and right adjustment screws 10 and 10, and only the left and right widths of the intermediate plate 11 may be interposed between the substrate W and the respective plates 8. Between 9.

In the third embodiment, the sandwiching jig 2 includes a first plate member 8 and a second plate member 9 which are assembled in a parallel posture with a space therebetween and sandwiched therebetween, and include a hard material such as metal; and intermediate plates 11 and 11 They are respectively between the plates 8, 9 and the substrate W. The intermediate plate 11 contains an elastic material such as natural or synthetic rubber having a relatively high hardness. The first plate member 8 and the second plate member 9 include clamping faces 8a and 9a which are flat toward each other, and the substrate W is sandwiched between the sandwiching faces 8a and 9a via the intermediate sheets 11 and 11. Further, the intermediate plate 11 is attached such that its front end (lower end portion in Fig. 7) does not protrude from the front ends of the first plate member 8 and the second plate member 9.

Further, the first plate member 8 and the second plate member 9 are coupled by the left and right adjusting screws 10, and the holding plate W can be held by the fastening screw 10. Further, by loosening the adjusting screw 10, the substrate W positioned between the two sheets 8 and 9 can be sequentially moved downward or the substrate W can be attached or detached.

In the third embodiment, as shown in FIG. 10, the left and right widths L1 of the intermediate plate 11 are formed to be smaller than the left and right widths L2 of the substrate W, and the left and right ends of the substrate W are sandwiched. A region L3 in which the intermediate plate 11 is not overlapped remains. The region L3 is preferably about 3 to 30% (especially 5 to 15%) of the width L2 of the substrate W. For example, in the case where the width of the substrate W is 50 mm, the length of the region L3 is preferably 1.5 to 15.0 mm (preferably 2.5 to 7.5 mm).

The outer edge of the front end of the first plate member 8 and the second plate member 9 sandwiched between the jigs 2 is cut toward the inclined surface of the grip faces 8a and 9a toward the front end, and has a tip end tapered shape. Furthermore, preferably As shown in Fig. 1, Fig. 4, and Fig. 7, the adjusting screws 10 that connect the first plate member 8 and the second plate member 9 are provided in a pair on the upper and lower sides, and a total of four are provided. Thereby, it is possible to reliably hold the parallel intervals of the two sheets 8 and 9 and to sandwich the substrate W with uniform fastening force stability, but it may be formed only by a pair of right and left.

Next, a method of dividing the substrate W using the above-described breaking tool A will be described.

As the substrate W to be divided, in the present embodiment, an alumina substrate having a size of 50 mm × 60 mm square and having a thickness of 1.0 mm was used. As shown in FIG. 11, on the surface of the substrate W, a longitudinal scribe line S1 and a horizontal scribe line S2 are processed in the preceding scribing step. Further, the interval (pitch) of each of the scribe lines in this embodiment was 2.5 mm.

In the first embodiment, as shown in Figs. 1 to 3, the substrate W is sandwiched between the first plate member 8 and the second plate member 9 of the sandwiching jig 2, and the second embodiment and the third embodiment are as shown in the second embodiment. As shown in FIGS. 4 to 10, the substrate W is sandwiched between the intermediate plate member 11 on the side of the first plate member 8 of the sandwiching jig 2 and the intermediate plate member 11 on the side of the second plate member 9. At this time, as shown in FIG. 2, FIG. 5, and FIG. 8, the one end portion W' of the substrate including the horizontal scribe line S2' to be initially cut is previously protruded from the front end of the jig 2. Further, it is preferable that the broken line S2' is set as close as possible to the state in which the first plate 8 and the second plate 9 of the jig 2 are sandwiched.

On the other hand, the width and depth of the groove 3 of the support jig 1 are adjusted in advance in accordance with the thickness of the substrate W to be broken and the size of the one end portion W'. That is, the groove width of the groove 3 is adjusted by the first adjusting bolt 6 to move the movable side wall member 3b so that the protruding one end portion W' can be inserted without shaking. Further, the groove depth is adjusted by the second adjusting bolt 7 to move the movable bottom plate member 3c to a length from the scribe line S2' to be broken to the end edge of the projecting end portion W' of the substrate (corresponding to the scribe line S2). The length of the distance).

Figure 3 shows the step of breaking the substrate W using the breaking tool (clamping jig) of Figure 1, and Figure 6 shows the step of breaking the substrate W using the breaking tool (clamping jig) of Figure 4, and Figure 9 shows the use of Figure 7. The step of breaking the substrate W by the breaking tool (clamping the jig).

As shown in Fig. 3 (a), Fig. 6 (a) and Fig. 9 (a), the upper end portion of the substrate protruding from the front end of the jig 2 is held by hand, and the end portion of the substrate W' protruded from the front end of the jig 2 is as shown in Fig. 3 (b). ), as shown in FIG. 6(b) and FIG. 9(b), inserted into the recess 3 of the support jig 1. Next, as shown in FIGS. 3(c), 6(b) and 9(b), the sandwiching jig 2 is tilted to the opposite side of the scribe line S2', and the substrate end portion W' is cut from the scribe line S2'. When the sandwiching jig 2 is tilted, since the outer edge of the front end of the first plate member 8 and the second plate member 9 is cut into an inclined surface to form a tip end tapered shape, the pinching jig 2 can be tapered. When the front end is in contact with the surface of the support jig 1, the sandwiching jig 2 is tilted with the contact portion as a fulcrum.

The one end portion W' of the substrate which is separated in this manner is taken out from the recess 3 of the support jig 1 to form a rectangular short strip substrate W1 (see Fig. 11).

Then, after the one end portion W' of the substrate is removed from the recess 3 of the supporting jig 1, the adjusting screw 10 of the jig 2 is loosened to pull the substrate W to the position where the end portion W' of the next substrate to be cut is protruded. Then, after the adjusting screw 10 is tightened to hold and hold the substrate W again, the protruding one end portion W' of the substrate is inserted into the recess 3 of the supporting jig 1 and the clamping jig 2 is tilted, and is divided. The protruding one end portion W' of the substrate is broken. By repeating the above operations in sequence, the substrate W is separated from all the lateral scribe lines S2, and the plurality of short strip substrates W1 are taken out.

Then, in a state where the vertical scribe line S1 is placed horizontally and the one end portion W' of the substrate to be broken is protruded, the short-length substrate W1 is attached to the nip jig 2. Then, the projecting one end portion W' of the substrate is inserted into the recess 3 of the supporting jig 1 in the same manner as described above, and is sequentially separated from the scribe line S1, and the unit product W2 shown in Fig. 11 is completed.

When the substrate is disconnected by the above-described breaking tool A, since the substrate W is firmly fixed by being sandwiched between the first plate member 8 and the second plate member 9 sandwiched between the jigs 2, even if it penetrates into the inside of the substrate along the scribe line A substrate having a shallow penetration of cracks (for example, a crack depth of 10% or less of the thickness of the substrate) or a substrate having a narrow distance between the scribe lines (for example, a case where the distance between the scribe lines is 3 mm or less) can also eliminate the substrate from the substrate. Part of the line other than the line, or The scribe line other than the desired scribe line is broken, and can be broken with a light force by applying the principle of "lever" which is sandwiched by the front end contact portion of the jig 2 as a fulcrum. Further, since the entire surface of the substrate W can be pressed with the first plate member 8 and the second plate member 9 with equal force, it is possible to suppress the occurrence of the "burst" described at the outset.

When the substrate is disconnected by the above-described breaking tool A, since the substrate W is firmly fixed by being sandwiched between the first plate member 8 and the second plate member 9 sandwiched between the jigs 2, even if it is a crack that penetrates into the inside of the substrate along the scribe line. The substrate with a shallow penetration (for example, a crack depth of 10% or less of the substrate thickness) or a substrate having a narrow distance between the scribe lines (for example, a case where the distance between the scribe lines is 3 mm or less) can also eliminate the substrate from the substrate. A portion other than the line is broken, or the scribe line is broken outside the desired scribe line, and is broken by a light lever by applying the principle of "lever" which is a fulcrum of the front end of the clamp 2 open.

Further, in the second embodiment, since the intermediate plate material 11 including the elastic material is interposed between the respective plate members 8, 9 and the substrate W, damage to the surface of the substrate W can be prevented, and even if the respective adjusting screws 10 are fastened The force is slightly deviated, and the substrate W can be surely held by the elastic force of the intermediate plate 11. Thereby, since the entire surface of the substrate W can be pressed and tilted with equal force, it is possible to suppress the occurrence of the "burst" described at the outset.

In particular, in the third embodiment, it is considered that the occurrence of the "bump" can be suppressed, and the left and right width L1 of the intermediate plate member 11 is formed to be smaller than the width L2 of the substrate W, and the substrate W is held. In the left and right end portions, the region L3 in which the intermediate plate 11 is not overlapped remains, so that the load applied to both end portions of the substrate at the time of breaking becomes small.

Further, since the scribe line S2 of the one end portion W' of the substrate which is protruded from the front end of the clip-in jig 2 is located as close as possible to the front end of the clip-in jig 2, the bending applied to the substrate W when the clip-in jig 2 is tilted is applied. Stress is applied to the scribe line S2 intensively. Thereby, the crack of the scribe line S2 can be vertically permeated in the thickness direction of the substrate W, and the occurrence of "splits" on the broken surface can be suppressed.

Furthermore, since the front end of the clamp 2 is attached to the position close to the scribe line S2 along the scribe line S2 Since it is disposed, the crack is generated straight along the extending direction of the scribe line, and the tendency of the crack to be inclined or smashed can be suppressed, so that the unit product W2 having the high-quality fracture surface can be obtained.

The representative embodiments of the present invention have been described above, but the present invention is not necessarily limited to the configuration of the above embodiments. For example, in the above embodiment, the groove 3 supporting the jig 1 is formed upward, but the groove 3 may be formed laterally. In addition, the present invention can be appropriately modified or changed within the scope of the invention without departing from the scope of the invention.

[Industrial availability]

The present invention is applicable to a breaking tool for breaking a substrate containing a brittle material such as glass, ceramics, sapphire or the like by hand.

1‧‧‧Support fixture

2‧‧‧Clamping fixture

3‧‧‧ Groove

3a‧‧‧Fixed sidewall members

3b‧‧‧ movable side wall members

3c‧‧‧ movable floor member

4‧‧‧Workbench

5‧‧‧Support board

6‧‧‧First adjustment bolt

7‧‧‧Second adjustment bolt

8‧‧‧ first plate

8a‧‧‧ clamping surface

9‧‧‧Second plate

9a‧‧‧ clamping surface

10‧‧‧Adjustment screws

11‧‧‧Intermediate sheet

A‧‧‧ breaking tool

W‧‧‧Battery material substrate

W'‧‧‧ One end of the substrate protruding from the front end of the clamp

Claims (6)

A breaking tool for a brittle material substrate, comprising: a supporting jig having a groove inserted into one end portion of the substrate on the surface; and a clamping jig for causing one end of the streaking line of the substrate to be broken The substrate is sandwiched and held in a state in which the front end is protruded; and the sandwiching jig includes a first plate and a second plate which are assembled in a parallel posture with a space sandwiched between the substrates, and the first plate and the second plate are adjustable The sheets are formed at intervals. The breaking tool for a brittle material substrate according to claim 1, wherein the sandwiching jig comprises the first plate and the second plate, and an intermediate plate interposed between the plates and the substrate, wherein the intermediate plate comprises elasticity The material is formed and can be formed by adjusting the interval between the first plate and the second plate. The breaking tool of the brittle material substrate of claim 2, wherein the left and right widths of the intermediate plate are formed to be smaller than the left and right widths of the substrate. The breaking tool for a brittle material substrate according to any one of claims 1 to 3, wherein the first plate and the second plate of the clamping jig are coupled by an adjusting screw, and the adjusting screw can be adjusted by operating the adjusting screw Formed by the interval. The breaking tool for a brittle material substrate according to any one of claims 1 to 3, wherein the supporting jig is formed by a member which forms a side wall of the groove, and is formed to be movable in a groove width direction, and the groove is formed. The member of the bottom surface is formed to be movable in the depth direction of the groove. A supporting fixture for a brittle material substrate for supporting one end portion of a substrate to separate the substrate along a line formed on a surface of the substrate, and having a groove inserted into one end portion of the substrate on the surface, The member forming the side wall of one of the grooves can be moved in the groove width direction to adjust the terrain The member forming the bottom surface of the groove may be formed to be moved in the depth direction of the groove.