JPH0740296A - Method and jig for dividing ceramic board - Google Patents

Method and jig for dividing ceramic board

Info

Publication number
JPH0740296A
JPH0740296A JP21335293A JP21335293A JPH0740296A JP H0740296 A JPH0740296 A JP H0740296A JP 21335293 A JP21335293 A JP 21335293A JP 21335293 A JP21335293 A JP 21335293A JP H0740296 A JPH0740296 A JP H0740296A
Authority
JP
Japan
Prior art keywords
dividing
ceramic substrate
groove
dividing groove
opposite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21335293A
Other languages
Japanese (ja)
Inventor
Takeshi Shigekane
武志 重兼
Kinuo Sugimoto
絹夫 杉本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel and Sumikin Electronics Devices Inc
Original Assignee
Sumitomo Metal Ceramics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Ceramics Inc filed Critical Sumitomo Metal Ceramics Inc
Priority to JP21335293A priority Critical patent/JPH0740296A/en
Publication of JPH0740296A publication Critical patent/JPH0740296A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0044Mechanical working of the substrate, e.g. drilling or punching

Landscapes

  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)

Abstract

PURPOSE:To reduce the rate at which a ceramic board breaks into shell-like chips by setting a fulcrum in a position facing a dividing groove on that side of the ceramic board which is opposite to the side where the dividing groove is formed, so that the fulcrum points in the direction of extension of the dividing groove and outside the side opposite to the groove. CONSTITUTION:To divide a ceramic board into chips using a dividing jig, the board 1 is first inserted into the slits 3a, 4a of right and left holding members 4,3 to hold the board 1 in place. Next, with the right holding member 4 held in position, a force in the direction of the arrow is exerted on one side end of the left holding member 3 to rotate the left holding member 3 about the rotating shaft 6 of a rotary plate 5, thereby exerting the board 1 with bending moment and dividing the board 1 into right and left chips 1b, 1a along a dividing groove 2. Since the fulcrum in this case points in the direction of extension of the dividing groove 2 and locates outside that side of the board 1 which is opposite to the side where the dividing groove is formed, the board is prevented from breaking into shell-like chips.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、セラミック基板の分割
方法と分割用治具に係り、より詳細には、分割溝の反対
面にグレーズが施されているグレーズ基板や、分割溝を
有するガラスセラミック等のセラミック基板を、該分割
溝に沿って分割してチップ片とするためのセラミック基
板の分割方法と分割用治具に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic substrate dividing method and a dividing jig, and more particularly to a glaze substrate having a surface opposite to the dividing groove and a glass having the dividing groove. The present invention relates to a method for dividing a ceramic substrate such as a ceramic substrate such as a ceramic substrate along a dividing groove into chip pieces and a dividing jig.

【0002】[0002]

【従来の技術】従来、一面に分割溝が形成されたセラミ
ック基板を、該分割溝に沿って分割するための分割用治
具としては、図5(a)に示すように、セラミック基板
101の分割溝102を境にして一方側101aを治具
103で上下から保持・固定した状態で、セラミック基
板101の他方側101bの端部を作用点として矢印方
向に曲げモーメントを作用させ、セラミック基板101
の分割溝102が形成された面と反対面上の分割溝対向
部位104を支点として、セラミック基板101を分割
溝102に沿って分割するようにした構成のものが知ら
れている(特開昭61−99305号公報参照)。
2. Description of the Related Art Conventionally, as a dividing jig for dividing a ceramic substrate having a dividing groove formed on one surface along the dividing groove, as shown in FIG. With one side 101a being held and fixed from above and below by the jig 103 with the dividing groove 102 as a boundary, a bending moment is applied in the direction of the arrow with the end portion of the other side 101b of the ceramic substrate 101 acting as an action point, and the ceramic substrate 101
There is known a structure in which the ceramic substrate 101 is divided along the dividing groove 102 with the dividing groove facing portion 104 on the surface opposite to the surface on which the dividing groove 102 is formed as a fulcrum (Japanese Patent Application Laid-Open No. Sho. 61-99305 gazette).

【0003】そして、この分割用治具を用いたセラミッ
ク基板の分割方法によれば、治具103の先端がセラミ
ック基板101の分割溝102に沿っているので、分割
面がギザギザになったり、斜めになったりすることを低
減できるという利点を有している。
According to the method for dividing a ceramic substrate using this dividing jig, since the tip of the jig 103 is along the dividing groove 102 of the ceramic substrate 101, the dividing surface is notched or slanted. It has an advantage that it can be reduced.

【0004】[0004]

【発明が解決しようとする課題】しかし、上述したセラ
ミック基板の分割方法と分割用治具の場合、次のような
問題がある。すなわち、 曲げモーメントの支点が、セラミック基板の分割溝
が形成された面と反対面上の分割溝対向部位とされてい
るので、図5(b)に示すようにセラミック基板101
を分割した際に、分割溝102が形成された面と反対面
の分割後の破断面が接触するために、分割後のチップ片
には貝殻状チッピング105が発生することが多くな
る。 セラミック基板の分割時にチッピングが発生する
と、グレーズ基板は分割溝が形成された面と反対面に、
またガラスセラミック基板は分割溝側と反対面に回路形
成を行うので、分割後に回路形成を行う場合及び回路形
成後に分割する場合のいずれであっても、パターン欠損
によるオープン不良や抵抗値の上昇による抵抗値不良が
生じる。 特に、一般的には回路形成後に分割を行うので、チ
ッピングが発生すると、付加価値が付いたセラミック基
板が不良となって、チッピングの発生が1%程度であっ
ても、それによる損失が大きくなる。等の問題がある。
However, the above-mentioned ceramic substrate dividing method and dividing jig have the following problems. That is, since the fulcrum of the bending moment is located on the surface of the ceramic substrate opposite to the surface on which the dividing groove is formed, it faces the dividing groove, so that the ceramic substrate 101 as shown in FIG.
Since the fracture surface after division of the surface opposite to the surface in which the division groove 102 is formed comes into contact when the is divided, shell chipping 105 often occurs in the chip piece after division. If chipping occurs when the ceramic substrate is divided, the glaze substrate will be on the opposite side of the surface where the dividing groove is formed.
In addition, since the glass ceramic substrate is formed with the circuit on the side opposite to the dividing groove side, whether the circuit is formed after the division or is divided after the circuit is formed, an open defect due to a pattern defect or an increase in the resistance value is caused. Poor resistance value occurs. In particular, since the chip is generally divided after the circuit is formed, if chipping occurs, the ceramic substrate with added value becomes defective, and even if the occurrence of chipping is about 1%, the loss due to it becomes large. . There is a problem such as.

【0005】本発明は、このような問題に対処して創案
したものであって、その目的とする処は、グレーズ基板
やガラスセラミック基板等のセラミック基板を分割した
ときに破断面に生じ得るチッピングの発生率を大幅に低
減したセラミック基板の分割方法と分割用治具を提供す
ることにある。
The present invention was devised to address such a problem, and its purpose is to provide a chipping that may occur on a fracture surface when a ceramic substrate such as a glaze substrate or a glass ceramic substrate is divided. An object of the present invention is to provide a method of dividing a ceramic substrate and a jig for dividing the occurrence rate of which is significantly reduced.

【0006】[0006]

【課題を解決するための手段】そして、上記目的を達成
するための手段としての本発明のセラミック基板の分割
方法は、セラミック基板の分割溝が形成されている分割
溝形成面の分割溝を挟む左右部位を同じ向きの支点また
は作用点とし、該分割溝形成面の反対面の分割溝対向部
位を、該左右部位の支点または作用点と反対向きの支点
または作用点として、該セラミック基板を分割溝に沿っ
て分割するセラミック基板の分割方法において、上記分
割溝対向部位の支点または作用点の位置を、該分割溝の
溝深さ延長方向で、かつ上記反対面の外方に偏移した位
置とした構成としている。
The method for dividing a ceramic substrate according to the present invention as means for achieving the above object sandwiches the dividing groove of the dividing groove forming surface in which the dividing groove of the ceramic substrate is formed. The left and right parts are used as fulcrums or points of action in the same direction, and the ceramic substrate is divided using the part facing the dividing groove on the opposite side of the dividing groove forming surface as the fulcrum or point of action opposite to the fulcrum or points of action of the left and right parts. In a method of dividing a ceramic substrate along a groove, a position of a fulcrum or an action point of the dividing groove facing portion is shifted in a groove depth extension direction of the dividing groove and outward of the opposite surface. And it has a configuration.

【0007】また、本発明のセラミック基板の分割用治
具は、一面に分割溝の形成されたセラミック基板を、該
分割溝を挟んで左右方向より保持・固定する左右保持部
材と、該左右保持部材に保持・固定されたセラミック基
板を回動させる回動板を有し、該回動板は、該セラミッ
ク基板の分割溝の溝深さ延長方向で、かつ該セラミック
基板の分割溝形成面の反対面の外方に偏移した位置に回
転軸を備え、該回転軸を中心にして該セラミック基板に
曲げモーメントをかける構成としている。
Further, the jig for dividing a ceramic substrate of the present invention is a left and right holding member for holding and fixing a ceramic substrate having a dividing groove formed on one surface in the left and right direction with the dividing groove interposed therebetween, and the left and right holding members. A rotating plate for rotating the ceramic substrate held and fixed to the member is provided, and the rotating plate is in the groove depth extension direction of the dividing groove of the ceramic substrate and on the dividing groove forming surface of the ceramic substrate. A rotary shaft is provided at a position shifted outward on the opposite surface, and a bending moment is applied to the ceramic substrate about the rotary shaft.

【0008】[0008]

【作用】本発明のセラミック基板の分割方法は、セラミ
ック基板の分割溝形成面の反対面の分割溝対向部位の支
点または作用点の位置を、分割溝の溝深さ延長方向で、
かつ反対面の外方に偏移した位置としているので、分割
時に分割された各チップ片の破断面が互いに離間する方
向に移動するように作用する。
According to the method of dividing a ceramic substrate of the present invention, the position of the fulcrum or the point of action of the division groove facing portion on the surface opposite to the division groove forming surface of the ceramic substrate is set in the groove depth extension direction of the division groove.
Moreover, since the position is shifted outward from the opposite surface, the fracture surfaces of the respective chip pieces divided at the time of division act so as to move in the directions away from each other.

【0009】また、本発明のセラミック基板の分割用治
具は、セラミック基板の分割溝の溝深さ延長方向で、か
つセラミック基板の分割溝形成面の反対面の外方に偏移
した位置に回転軸を備えた回動板を有して、この回動板
にて上記回転軸を中心にして左右保持部材で固定・保持
されたセラミック基板に曲げモーメントをかけるので、
分割時に分割された各チップ片を固定・保持している左
右保持部材が互いに離間する方向に移動して、各チップ
片の破断面を離間させるように作用する。
Also, the jig for dividing a ceramic substrate of the present invention is located at a position displaced in the groove depth extension direction of the dividing groove of the ceramic substrate and outward of the surface opposite to the dividing groove forming surface of the ceramic substrate. Since the rotary plate having the rotary shaft is provided, and the rotary plate applies a bending moment to the ceramic substrate fixed and held by the left and right holding members about the rotary shaft,
At the time of division, the left and right holding members, which fix and hold the divided chip pieces, move in a direction in which they are separated from each other, and act to separate the fracture surfaces of the chip pieces.

【0010】[0010]

【実施例】以下、図面を参照しながら、本発明を具体化
した実施例について説明する。ここで、図1は、本発明
のセラミック基板の分割用治具を使用した一実施例を示
す説明図である。
Embodiments of the present invention will be described below with reference to the drawings. Here, FIG. 1 is an explanatory view showing an embodiment using a jig for dividing a ceramic substrate of the present invention.

【0011】本実施例のセラミック基板の分割用治具
は、グレーズ基板やガラスセラミック基板等のセラミッ
ク基板を分割溝に沿って分割してチップ片とするための
治具であって、概略すると、セラミック基板1を分割溝
2を挟んで左右方向より保持・固定する左右保持部材
3、4と、左右保持部材3、4に保持・固定されたセラ
ミック基板1を回動させる回転軸6を備えた回動板5を
有する構成よりなる。
The jig for dividing a ceramic substrate of this embodiment is a jig for dividing a ceramic substrate such as a glaze substrate or a glass ceramic substrate along a dividing groove into chip pieces. The ceramic substrate 1 is provided with left and right holding members 3 and 4 which hold and fix the ceramic substrate 1 in the left-right direction across the dividing groove 2, and a rotary shaft 6 which rotates the ceramic substrate 1 held and fixed by the left and right holding members 3 and 4. The rotary plate 5 is included.

【0012】セラミック基板1は、分割溝2の反対面に
グレーズが施されているグレーズ基板や、分割溝2を有
するガラスセラミック等であって、一面に分割溝2が形
成されている。ここで、分割溝2には、所謂、セラミッ
ク基板1を分割するためのスナップラインを含む。
The ceramic substrate 1 is a glaze substrate in which the opposite surface of the dividing groove 2 is glazed, a glass ceramic having the dividing groove 2 or the like, and the dividing groove 2 is formed on one surface. Here, the dividing groove 2 includes a so-called snap line for dividing the ceramic substrate 1.

【0013】左右保持部材3、4は、内部にセラミック
基板1を挿入するスリット3a,4aを有し、スリット
3a,4aの幅および高さは分割するセラミック基板1
の幅及び厚さに応じて適宜選択される。また、左右保持
部材3、4は、セラミック基板1の上面を押える上側部
材およびその下面を押える下側部材とこれらの上側部材
及び下側部材を固定する固定手段とで構成し、種々の厚
さのセラミック基板1を保持・固定できるようにするこ
ともできる。
The left and right holding members 3, 4 have slits 3a, 4a into which the ceramic substrate 1 is inserted, and the width and height of the slits 3a, 4a are divided.
It is appropriately selected according to the width and thickness of the. The left and right holding members 3 and 4 are composed of an upper member that presses the upper surface of the ceramic substrate 1 and a lower member that presses the lower surface of the ceramic substrate 1, and fixing means that fix these upper member and lower member, and have various thicknesses. The ceramic substrate 1 can be held and fixed.

【0014】回動板5は、セラミック基板1の分割溝形
成面と反対面側に位置する左保持部材3の外面に固定さ
れる左固定板5aと、セラミック基板1の分割溝形成面
と反対面側に位置する右保持部材4の外面に固定される
右固定板5bとからなり、これら左固定板5aと右固定
板5bとが、セラミック基板1の分割溝2の溝深さ延長
方向で、かつセラミック基板1の分割溝形成面の反対面
の外方に偏移した位置となる回動軸6にて回動自在に軸
支されている。ここで、該偏移距離xは、分割溝2の形
状、溝深さ等に応じて、任意距離に変更することができ
る。
The rotating plate 5 is opposite to the dividing groove forming surface of the ceramic substrate 1 and the left fixing plate 5a fixed to the outer surface of the left holding member 3 located on the surface opposite to the dividing groove forming surface of the ceramic substrate 1. A right fixing plate 5b fixed to the outer surface of the right holding member 4 located on the surface side, and the left fixing plate 5a and the right fixing plate 5b are extended in the groove depth extension direction of the dividing groove 2 of the ceramic substrate 1. Further, the ceramic substrate 1 is rotatably supported by a rotary shaft 6 which is located at a position displaced outward from the surface opposite to the division groove forming surface of the ceramic substrate 1. Here, the shift distance x can be changed to an arbitrary distance according to the shape of the dividing groove 2, the groove depth, and the like.

【0015】そして、本実施例のセラミック基板の分割
用治具を使用してセラミック基板1を分割溝2に沿って
分割してチップ片とするには、まず、図1(a)に示す
ように左右保持部材3、4のスリット3a,4a内にセ
ラミック基板1を挿入して、セラミック基板1を分割溝
2を挟んで左右方向から保持・固定する。
In order to divide the ceramic substrate 1 along the dividing grooves 2 into chip pieces by using the jig for dividing a ceramic substrate of this embodiment, first, as shown in FIG. The ceramic substrate 1 is inserted into the slits 3a and 4a of the left and right holding members 3 and 4, and the ceramic substrate 1 is held and fixed in the left and right direction with the dividing groove 2 interposed therebetween.

【0016】その後、左右保持部材3、4の内の右保持
部材4を固定した状態で、左保持部材3の側端部に矢示
方向の力を作用させて、回動板5の回動軸6を中心とし
て図1(b)に示すように左保持部材3を回動させるこ
とにより、回動板5の回動軸6が支点となってセラミッ
ク基板1に曲げモーメントがかかり、セラミック基板1
は分割溝2に沿って左チップ片1aと右チップ片1bと
に分割される。
Thereafter, with the right holding member 4 among the left and right holding members 3 and 4 fixed, a force in the direction of the arrow is applied to the side end portion of the left holding member 3 to turn the turning plate 5. By rotating the left holding member 3 around the shaft 6 as shown in FIG. 1B, a bending moment is applied to the ceramic substrate 1 with the rotating shaft 6 of the rotating plate 5 as a fulcrum, and the ceramic substrate 1 is rotated. 1
Is divided into a left chip piece 1a and a right chip piece 1b along the dividing groove 2.

【0017】ここで、セラミック基板1の分割溝2の溝
深さ延長方向で、かつセラミック基板1の分割溝形成面
の反対面の外方に偏移した位置が支点となるので、左保
持部材3と右保持部材4とで保持・固定される左チップ
片1aと右チップ片1bとは、分割時に破断面(分割
面)が互いに離間する方向に移動するため、分割溝2が
形成された面と反対面の分割溝対向部位の角部が当接す
ることがないように作用する。これにより、分割された
各チップ片1a、1bに分割時の当接による貝殻状チッ
ピングが発生することがなくなり、歩留り率が向上する
ことになる。
Here, since the position shifted in the groove depth extension direction of the dividing groove 2 of the ceramic substrate 1 and outward of the surface opposite to the dividing groove forming surface of the ceramic substrate 1 serves as a fulcrum, the left holding member. The left chip piece 1a and the right chip piece 1b held and fixed by the right holding member 4 and the right holding member 4 move in the directions in which the fracture surfaces (division surfaces) separate from each other during division, so that the division groove 2 is formed. It acts so that the corners of the divided groove facing portion on the surface opposite to the surface do not come into contact with each other. As a result, shell-like chipping due to abutting at the time of division does not occur on each of the divided chip pieces 1a and 1b, and the yield rate is improved.

【0018】次に、本実施例の効果を確認するために、
図2〜図3に示す分割用治具を使用してグレーズ基板と
ガラスセラミック基板について、分割した場合のチッピ
ングの発生率を調べた。この分割用治具は、回動軸11
に平板12を固定し、平板12には長孔13、13を穿
設して、この長孔13、13に沿って左保持部材14を
上下動可能で、任意の位置で固定可能に取付け、一方右
保持部材15は左保持部材14の位置に合わせて上下動
可能で、任意の位置で固定可能に配設し、セラミック基
板1の分割溝形成面と反対面の分割溝対向部位に位置す
るF点と回動軸11の回動中心点Eとの距離を調整でき
るようにしたものである。
Next, in order to confirm the effect of this embodiment,
The rate of chipping in the case of dividing the glaze substrate and the glass ceramic substrate was examined using the dividing jig shown in FIGS. This dividing jig has a rotating shaft 11
The flat plate 12 is fixed to the flat plate 12, the long holes 13 are formed in the flat plate 12, and the left holding member 14 can be vertically moved along the long holes 13 and 13 so that the left holding member 14 can be fixed at any position. On the other hand, the right holding member 15 is vertically movable in accordance with the position of the left holding member 14, is fixedly disposed at an arbitrary position, and is located at a division groove facing portion of the ceramic substrate 1 opposite to the division groove forming surface. The distance between the point F and the rotation center point E of the rotation shaft 11 can be adjusted.

【0019】ここで、グレーズ基板としては、試片のサ
イズおよび厚さが、270mm×56mm×1.0mm
で、分割溝の深さがレーザで基板厚の35〜38%を入
れたものを用いた(35%より浅いとブレイク性が困難
になり、38%を超えると工程内で割れる可能性がある
が、これはレーザのビーム径、クサビ型モード、レーザ
ピッチは分割性を左右するので、深さがこれに限定され
るものではない)。なお、基板の長手方向と平行に4本
の分割溝を入れて、1ユニットの分割幅を14.0mm
とした。また、ガラスセラミック基板としては、図4
(a)に示すように、試片のサイズ及び厚さが、65m
m×50mm×1.0mmで、分割溝の深さが金型成形
で0.15mmとして、1ユニットの長手方向の分割幅
を13.0mm、短手方向の分割幅を10.0mmとし
たものを用い、分割用治具は図4(b)に示すように長
手方向を分割するときに使用した。
Here, as the glaze substrate, the size and thickness of the sample are 270 mm × 56 mm × 1.0 mm.
Then, the depth of the dividing groove is set to be 35 to 38% of the substrate thickness by using a laser (when the depth is less than 35%, the breakability becomes difficult, and when it exceeds 38%, there is a possibility of cracking in the process. However, this is not limited to the depth because the beam diameter of the laser, the wedge mode, and the laser pitch influence the splittability.) In addition, the division width of one unit is 14.0 mm by inserting four division grooves in parallel with the longitudinal direction of the substrate.
And Further, as a glass ceramic substrate, as shown in FIG.
As shown in (a), the size and thickness of the sample is 65m.
m × 50 mm × 1.0 mm, the depth of the dividing groove is 0.15 mm in the die molding, and the dividing width of one unit in the longitudinal direction is 13.0 mm and the dividing width in the lateral direction is 10.0 mm. The dividing jig was used when dividing in the longitudinal direction as shown in FIG.

【0020】そして、上記分割用治具の点E−F間の距
離を、0、3、6、10、15、20mmで変化させ、
分割長さの累積(50m)に対する奥行0.1mm以上
のチッピングの発生個数および奥行0.2mm以上のチ
ッピングの発生個数をそれぞれカウントするとともに、
分割溝に沿って割れない分割不良の割合(%)を算出し
た。そして、これらの結果を表1(グレーズ基板)、表
2(ガラスセラミック基板)に示している。
The distance between the points E and F of the dividing jig is changed to 0, 3, 6, 10, 15, 20 mm,
The number of chippings with a depth of 0.1 mm or more and the number of chippings with a depth of 0.2 mm or more are counted for the cumulative division length (50 m).
The ratio (%) of division defects that did not break along the division groove was calculated. The results are shown in Table 1 (glaze substrate) and Table 2 (glass ceramic substrate).

【0021】[0021]

【表1】 [Table 1]

【0022】[0022]

【表2】 [Table 2]

【0023】以上の結果より、E−F間の距離が0mm
のとき、すなわち、従来の分割用治具(図5の治具と同
じ)の場合には、分割溝に沿って割ることはできるが、
奥行0.1mm以上のチッピングが多数発生するのに対
して、E−F間の距離が3〜10mmのときには、パタ
ーン欠損になる可能性のある奥行0.2mm以上のチッ
ピングが発生せず、そのうち6〜10mmのときには
0.1〜0.2mmのチッピングが激減して、分割後の
品質が著しく向上することが確認できた。
From the above results, the distance between E and F is 0 mm.
In the case of, that is, in the case of the conventional dividing jig (same as the jig of FIG. 5), it is possible to divide along the dividing groove,
While a large number of chippings with a depth of 0.1 mm or more occur, when the distance between E and F is 3 to 10 mm, chipping with a depth of 0.2 mm or more that may result in a pattern defect does not occur. It was confirmed that when the length was 6 to 10 mm, the chipping of 0.1 to 0.2 mm was drastically reduced, and the quality after division was significantly improved.

【0024】なお、本発明は、上述した実施例に限定さ
れるものではなく、本発明の要旨を変更しない範囲内で
変形実施できる構成を含むものである。因みに、前述し
た実施例では、右保持部材を固定し、左保持部材を回動
させるようにしたもので説明したが、左保持部材を固定
し、右保持部材を回動させるようにしてもよく、また回
動板の回動軸を支点として左右保持部材をいずれも回動
させるようにしてもよく、さらに左右保持部材の両側部
を支点として回動板の回動軸を作用点としてもよいこと
は勿論である。
It should be noted that the present invention is not limited to the above-described embodiment, but includes a configuration that can be modified and implemented within a range that does not change the gist of the present invention. Incidentally, in the above-described embodiment, the right holding member is fixed and the left holding member is rotated. However, the left holding member may be fixed and the right holding member may be rotated. Also, both the left and right holding members may be rotated with the rotation axis of the rotation plate as a fulcrum, and the rotation axis of the rotation plate may be used as an action point with both sides of the left and right holding members as fulcrums. Of course.

【0025】[0025]

【発明の効果】以上の説明より明らかなように、本発明
のセラミック基板の分割方法と分割用治具によれば、セ
ラミック基板の分割溝形成面の反対面の分割溝対向部位
の支点または作用点の位置を、分割溝の溝深さ延長方向
で、かつ反対面の外方に偏移した位置となるようにして
いるので、分割時に分割された各チップ片の破断面が互
いに離間する方向に移動して当接しないため、貝殻状の
チッピングの発生が極めて少なくなり、歩留りが向上
し、信頼性が向上するという効果を有する。
As is apparent from the above description, according to the ceramic substrate dividing method and the dividing jig of the present invention, the fulcrum or function of the dividing groove facing portion of the ceramic substrate opposite to the dividing groove forming surface. Since the positions of the points are in the groove depth extension direction of the dividing groove and at positions displaced outward of the opposite surface, the fracture surfaces of the chip pieces divided at the time of division are separated from each other. Since it does not move and come into contact with, the occurrence of shell-like chipping is extremely reduced, yields are improved, and reliability is improved.

【0026】従って、本発明によれば、グレーズ基板や
ガラスセラミック基板等のセラミック基板を分割したと
きに破断面に生じ得るチッピングの発生率を大幅に低減
したセラミック基板の分割方法と分割用治具を提供する
ことができる。
Therefore, according to the present invention, the method of dividing a ceramic substrate and the jig for dividing the ceramic substrate, which greatly reduce the occurrence rate of chipping that may occur on the fracture surface when the ceramic substrate such as the glaze substrate or the glass ceramic substrate is divided. Can be provided.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明に係るセラミック基板の分割用治具を
使用した一実施例を示す説明図である。
FIG. 1 is an explanatory view showing an embodiment using a jig for dividing a ceramic substrate according to the present invention.

【図2】 セラミック基板の分割試験に使用した支点変
更可能な分割用治具の平面図である。
FIG. 2 is a plan view of a dividing jig used for a dividing test of a ceramic substrate and capable of changing a fulcrum.

【図3】 図2の正面図である。FIG. 3 is a front view of FIG. 2.

【図4】 試片の説明図である。FIG. 4 is an explanatory diagram of a test piece.

【図5】 従来の分割用治具を使用したセラミック基板
の分割方法を示す説明図である。
FIG. 5 is an explanatory diagram showing a method of dividing a ceramic substrate using a conventional dividing jig.

【符号の説明】[Explanation of symbols]

1・・・セラミック基板、 1a、1b・・・チップ
片、2・・・分割溝、3、14・・・左保持部材、4、
15・・・右保持部材、5・・・回動板、6、11・・
・回動軸、12・・・平板、13・・・長孔、101・
・・セラミック基板、102・・・分割溝、101a・
・・分割溝を境にしたセラミック基板の一方側、101
b・・・分割溝を境にしたセラミック基板の他方側、1
03・・・治具、104・・・分割溝対向部位、105
・・・貝殻状チッピング
1 ... Ceramic substrate, 1a, 1b ... Chip piece, 2 ... Dividing groove, 3, 14 ... Left holding member, 4,
15 ... Right holding member, 5 ... Rotating plate, 6, 11 ...
・ Rotating shaft, 12 ... Flat plate, 13 ... Long hole, 101 ...
..Ceramic substrates, 102 ... Dividing grooves, 101a
..One side of ceramic substrate with dividing groove as a boundary, 101
b: the other side of the ceramic substrate with the dividing groove as a boundary, 1
03 ... Jig, 104 ... Division groove facing part, 105
... Shell-shaped chipping

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 セラミック基板の分割溝が形成されてい
る分割溝形成面の分割溝を挟む左右部位を同じ向きの支
点または作用点とし、該分割溝形成面の反対面の分割溝
対向部位を、該左右部位の支点または作用点と反対向き
の支点または作用点として、該セラミック基板を分割溝
に沿って分割するセラミック基板の分割方法において、
上記分割溝対向部位の支点または作用点の位置を、該分
割溝の溝深さ延長方向で、かつ上記反対面の外方に偏移
した位置としていることを特徴とするセラミック基板の
分割方法。
1. A split groove forming surface of a ceramic substrate on which a split groove is formed has left and right portions sandwiching the split groove as fulcrums or points of action in the same direction, and a split groove facing portion on the opposite surface of the split groove forming surface. In the method for dividing the ceramic substrate, the ceramic substrate is divided along the dividing grooves as fulcrums or points of action opposite to the fulcrums or points of action of the left and right parts,
A method of dividing a ceramic substrate, wherein a position of a fulcrum or an action point of the divided groove facing portion is a position displaced in a groove depth extension direction of the divided groove and outward of the opposite surface.
【請求項2】 一面に分割溝の形成されたセラミック基
板を、該分割溝を挟んで左右方向より保持・固定する左
右保持部材と、該左右保持部材に保持・固定されたセラ
ミック基板を回動させる回動板を有し、該回動板は、該
セラミック基板の分割溝の溝深さ延長方向で、かつ該セ
ラミック基板の分割溝形成面の反対面の外方に偏移した
位置に回転軸を備え、該回転軸を中心にして該セラミッ
ク基板に曲げモーメントをかけることを特徴とするセラ
ミック基板の分割用治具。
2. A left / right holding member for holding / fixing a ceramic substrate having a dividing groove formed on one surface in the left / right direction with the dividing groove interposed therebetween, and a ceramic substrate held / fixed by the left / right holding member. A rotating plate for rotating the rotating plate in the groove depth extending direction of the dividing groove of the ceramic substrate and at a position displaced outward from the surface opposite to the dividing groove forming surface of the ceramic substrate. A jig for dividing a ceramic substrate, comprising a shaft, and applying a bending moment to the ceramic substrate about the rotation axis.
JP21335293A 1993-08-04 1993-08-04 Method and jig for dividing ceramic board Pending JPH0740296A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21335293A JPH0740296A (en) 1993-08-04 1993-08-04 Method and jig for dividing ceramic board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21335293A JPH0740296A (en) 1993-08-04 1993-08-04 Method and jig for dividing ceramic board

Publications (1)

Publication Number Publication Date
JPH0740296A true JPH0740296A (en) 1995-02-10

Family

ID=16637747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21335293A Pending JPH0740296A (en) 1993-08-04 1993-08-04 Method and jig for dividing ceramic board

Country Status (1)

Country Link
JP (1) JPH0740296A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11192616A (en) * 1997-12-30 1999-07-21 Sony Corp Dividing apparatus
US6852553B2 (en) 2000-02-15 2005-02-08 Renesas Technology Corp. Semiconductor device fabrication method and semiconductor device fabrication apparatus
US7303932B2 (en) 2003-10-30 2007-12-04 Nichia Corporation Support body for semiconductor element, method for manufacturing the same and semiconductor device
KR100937807B1 (en) * 2008-07-04 2010-01-20 한국타이어 주식회사 Cutting device for thermoplastic composites of fuel cell bipolar plate
CN102473513A (en) * 2009-07-10 2012-05-23 丰田自动车株式会社 Device for cleaving magnet and method for cleaving magnet
JP2012256738A (en) * 2011-06-09 2012-12-27 Mitsubishi Electric Corp Manufacturing method of photovoltaic device
CN104249412A (en) * 2013-06-28 2014-12-31 三星钻石工业股份有限公司 Brittle material base board parting tool and brittle material base board supporting fixture
US9331557B2 (en) 2011-03-31 2016-05-03 Toyota Jidosha Kabushiki Kaisha Cleavage method, rotor manufacturing method, and cleavage apparatus
EP3410473A1 (en) * 2017-05-30 2018-12-05 Infineon Technologies AG Apparatus and method for dividing substrates
WO2023136103A1 (en) * 2022-01-11 2023-07-20 三菱電機株式会社 Board dividing jig

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11192616A (en) * 1997-12-30 1999-07-21 Sony Corp Dividing apparatus
US6852553B2 (en) 2000-02-15 2005-02-08 Renesas Technology Corp. Semiconductor device fabrication method and semiconductor device fabrication apparatus
US6946306B2 (en) 2000-02-15 2005-09-20 Renesas Technology Corp. Method of manufacturing a semiconductor device and a fabrication apparatus for a semiconductor device
US7303932B2 (en) 2003-10-30 2007-12-04 Nichia Corporation Support body for semiconductor element, method for manufacturing the same and semiconductor device
US7795624B2 (en) 2003-10-30 2010-09-14 Nichia Corporation Support body for semiconductor element, method for manufacturing the same and semiconductor device
KR100937807B1 (en) * 2008-07-04 2010-01-20 한국타이어 주식회사 Cutting device for thermoplastic composites of fuel cell bipolar plate
CN102473513A (en) * 2009-07-10 2012-05-23 丰田自动车株式会社 Device for cleaving magnet and method for cleaving magnet
US8967441B2 (en) 2009-07-10 2015-03-03 Toyota Jidosha Kabushiki Kaisha Magnet splitting device and magnet splitting method
US9331557B2 (en) 2011-03-31 2016-05-03 Toyota Jidosha Kabushiki Kaisha Cleavage method, rotor manufacturing method, and cleavage apparatus
JP2012256738A (en) * 2011-06-09 2012-12-27 Mitsubishi Electric Corp Manufacturing method of photovoltaic device
CN104249412A (en) * 2013-06-28 2014-12-31 三星钻石工业股份有限公司 Brittle material base board parting tool and brittle material base board supporting fixture
EP3410473A1 (en) * 2017-05-30 2018-12-05 Infineon Technologies AG Apparatus and method for dividing substrates
CN108987307A (en) * 2017-05-30 2018-12-11 英飞凌科技股份有限公司 For separating the device and method of substrate
CN108987307B (en) * 2017-05-30 2023-12-01 英飞凌科技股份有限公司 Apparatus and method for separating substrates
WO2023136103A1 (en) * 2022-01-11 2023-07-20 三菱電機株式会社 Board dividing jig

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