TW201418358A - Thermosetting epoxy resin composition, adhesive film for forming insulating layer and multilayer printed wiring board - Google Patents

Thermosetting epoxy resin composition, adhesive film for forming insulating layer and multilayer printed wiring board Download PDF

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TW201418358A
TW201418358A TW102131035A TW102131035A TW201418358A TW 201418358 A TW201418358 A TW 201418358A TW 102131035 A TW102131035 A TW 102131035A TW 102131035 A TW102131035 A TW 102131035A TW 201418358 A TW201418358 A TW 201418358A
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epoxy resin
resin composition
insulating layer
printed wiring
wiring board
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TWI677528B (en
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Kenji Kawai
Yuki Yamamoto
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Ajinomoto Kk
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/24Impregnating materials with prepolymers which can be polymerised in situ, e.g. manufacture of prepregs
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/01Use of inorganic substances as compounding ingredients characterized by their specific function
    • C08K3/013Fillers, pigments or reinforcing additives
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/04Oxygen-containing compounds
    • C08K5/10Esters; Ether-esters
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0366Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement reinforced, e.g. by fibres, fabrics
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0373Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2363/00Characterised by the use of epoxy resins; Derivatives of epoxy resins

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Epoxy Resins (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Reinforced Plastic Materials (AREA)
  • Laminated Bodies (AREA)
  • Adhesives Or Adhesive Processes (AREA)

Abstract

The present invention provides an epoxy resin composition with low dielectric loss tangent, and capable of forming a coarsening surface with excellent adhesion to a conductor layer and forming an insulation layer having the properties of even more multiple lamination and high densification excellent in layer build-up with balance corresponding to a multilayered printed wiring board. The thermosetting epoxy resin composition of the present invention is to make, when the nonvolatile ingredient in the resin composition at least containing epoxy resin (A) and naphthalene-containing active ester compound (B) is 100 mass%, the content of the abovementioned naphthalene-containing active ester compound (B) is 0.1~30 mass%.

Description

熱硬化性環氧樹脂組成物、絕緣層形成用接著薄膜及多層印刷配線板 Thermosetting epoxy resin composition, adhesive film for forming an insulating layer, and multilayer printed wiring board

本發明係關於介電正切為低的值,且粗糙度低,適於形成具有可提高剝離強度之粗化面之絕緣層的熱硬化性環氧樹脂組成物及其硬化物、及含有具有粗糙度低、可提高剝離強度之粗化面之硬化物層作為絕緣層之多層印刷配線板。 The present invention relates to a thermosetting epoxy resin composition and a cured product thereof, which are low in dielectric tangent and low in roughness, and which are suitable for forming an insulating layer having a roughened surface capable of improving peel strength, and have roughness A multilayer printed wiring board having a low degree and a cured layer of a roughened surface which can improve the peel strength as an insulating layer.

隨著電子機器之小型化、高性能化,可對應於所使用之多層印刷配線板之增層中之多層化、高密度化的導體形成方法已知有使絕緣層表面經粗化處理後,以無電解鍍敷形成導體層之添加(additive)法,以無電解鍍敷或電解鍍敷形成導體層之半添加法,於該等方法之情況下,絕緣層表面與鍍敷導體層之間之密著性主要藉由使絕緣層表面經粗化處理而成為發揮固定效果之具有微細凹凸之面予以確保。 With the miniaturization and high performance of the electronic device, it is known that the surface of the insulating layer is subjected to roughening treatment in accordance with the method of forming a multilayered and high-density conductor in the build-up layer of the multilayer printed wiring board to be used. A semi-additive method of forming a conductor layer by electroless plating or electrolytic plating by an additive method of forming a conductor layer by electroless plating, and in the case of such methods, between the surface of the insulating layer and the plated conductor layer The adhesion is mainly ensured by roughening the surface of the insulating layer to form a surface having fine concavities and convexities which exhibits a fixing effect.

藉由絕緣層表面所形成之凹凸之固定效果於表面粗糙度愈大則愈大,粗糙度愈大時愈能提高絕緣層與 鍍敷導體層之密著性。然而,絕緣層表面之粗糙度較大時,藉由蝕刻部分地去除粗化面上所形成之薄膜導體層以形成特定配線圖型時,由於絕緣層表面中應去除部位中之進入凹部的導體層部分係難以去除之狀態,故需要蝕刻處理變得需要較長時間,同時因其影響,而侵蝕到應殘留之配線圖型部分而損傷微細配線,造成斷線之危險性變高。因此,為對應於配線之微細化、高密度化,絕緣層之表面狀態被要求為儘可能之微細凹凸且可充分地確保與藉鍍敷形成之薄膜導體層之密著性之粗化面。 The fixing effect of the irregularities formed on the surface of the insulating layer is larger as the surface roughness is larger, and the greater the roughness, the more the insulating layer is improved. The adhesion of the plated conductor layer. However, when the roughness of the surface of the insulating layer is large, the thin film conductor layer formed on the roughened surface is partially removed by etching to form a specific wiring pattern, and the conductor entering the concave portion in the surface of the insulating layer should be removed. Since the layer portion is in a state in which it is difficult to remove, it takes a long time for the etching process to be performed, and at the same time, due to the influence, the wiring pattern portion to be left is eroded to damage the fine wiring, and the risk of disconnection becomes high. Therefore, in order to reduce the thickness and increase the density of the wiring, the surface state of the insulating layer is required to be as fine as possible as possible, and the rough surface of the adhesion to the thin film conductor layer formed by plating can be sufficiently ensured.

又,絕緣層亦被要求線熱膨脹率較低以與絕緣層表面上形成之由配線圖型所成之導體層之間不產生線熱膨脹係數差。絕緣層之線熱膨脹率高時,與導體層之線熱膨脹率之差變大,容易產生於絕緣層與導體層之間發生龜裂等之問題。 Further, the insulating layer is also required to have a low coefficient of thermal expansion of the line so as not to cause a difference in linear thermal expansion coefficient between the conductor layer formed by the wiring pattern formed on the surface of the insulating layer. When the linear thermal expansion coefficient of the insulating layer is high, the difference in thermal expansion coefficient from the conductor layer becomes large, and it is likely to cause a problem such as cracking between the insulating layer and the conductor layer.

過去,作為形成如上述之多層印刷配線板之內層電路基板的絕緣層之熱硬化性樹脂組成物所使用之硬化劑已知有「活性酯化合物」,作為此「活性酯化合物」,主要係使用「含二環戊二烯二酚構造之活性酯化合物」。然而,近幾年來之多層印刷配線板之增層中之更多層化、高密度化之進展顯著,亦有許多可形成可對應於該狀況之絕緣層的環氧樹脂組成物之提案。 In the past, an "active ester compound" is known as a hardener used as a thermosetting resin composition for forming an insulating layer of an inner layer circuit board of the multilayer printed wiring board as described above, and as the "active ester compound", mainly The "active ester compound containing a dicyclopentadiene diphenol structure" is used. However, in recent years, the progress of more stratification and high density in the build-up of multilayer printed wiring boards has been remarkable, and there are many proposals for forming an epoxy resin composition which can correspond to the insulating layer of this condition.

專利文獻1中記載藉由使用使酚醛清漆樹脂中之酚性羥基芳酯化而得之活性酯化合物作為熱硬化性環氧樹脂組成物之硬化劑,可獲得形成展現低介電特性之絕 緣層的硬化物。 Patent Document 1 discloses that an active ester compound obtained by arylating a phenolic hydroxy group in a novolak resin can be used as a hardener for a thermosetting epoxy resin composition, and formation of a low dielectric property can be obtained. The hardened layer of the edge layer.

專利文獻2中,作為可形成儘管硬化物表面經粗化處理之粗化面的粗糙度比較小,但該粗化面對於鍍敷導體亦顯示高的密著性、且線熱膨脹率較小之絕緣層的環氧樹脂組成物,記載含有(A)環氧樹脂、(B)活性酯化合物、(C)具有三嗪構造之酚樹脂、(D)馬來醯亞胺化合物、及(E)苯氧樹脂之環氧樹脂組成物。 In Patent Document 2, as the roughness of the roughened surface on which the surface of the cured product is roughened is relatively small, the roughened surface exhibits high adhesion to the plated conductor and the linear thermal expansion coefficient is small. The epoxy resin composition of the insulating layer contains (A) an epoxy resin, (B) an active ester compound, (C) a phenol resin having a triazine structure, (D) a maleimide compound, and (E) Epoxy resin composition of phenoxy resin.

又,專利文獻3中,作為可賦予展現低介電率、低介電正切,並且兼具優異之耐熱性與難燃性之硬化物的熱硬化性環氧樹脂組成物,記載含有以聚伸芳氧構造作為主骨架,且於該構造之芳香核上具有芳基羰基之活性酯樹脂的環氧樹脂組成物。 Further, in Patent Document 3, a thermosetting epoxy resin composition capable of imparting a cured product exhibiting a low dielectric constant and a low dielectric tangent and having excellent heat resistance and flame retardancy is described as containing a polycondensation. An aryloxy structure is a main skeleton, and an epoxy resin composition of an active ester resin having an arylcarbonyl group on an aromatic core of the structure.

如上述,已有許多適於形成內層電路基板之絕緣層的環氧樹脂組成物之提案,但對於可形成低介電正切,並且與導體層之密著性優異之微細粗化面、可形成均衡良好地具備可對應於由多層印刷配線板之增層之更多層化、高密度化之特性的絕緣層之環氧樹脂組成物之期望日益高漲。 As described above, there are many proposals for an epoxy resin composition suitable for forming an insulating layer of an inner layer circuit board, but a fine roughened surface which can form a low dielectric tangent and is excellent in adhesion to a conductor layer can be used. There is an increasing expectation that an epoxy resin composition having an insulating layer which is well-balanced and capable of being more stratified and densified by the build-up of a multilayer printed wiring board is formed.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]特開平07-082348號公報 [Patent Document 1] Japanese Patent Publication No. 07-082348

[專利文獻2]特開2010-090238號公報 [Patent Document 2] JP-A-2010-090238

[專利文獻3]特開2012-012534號公報 [Patent Document 3] JP-A-2012-012534

本發明之目的係提供一種顯示低介電正切且可形成與導體層之密著性、蝕刻性優異之具有微細凹凸之粗化面且可形成均衡良好地具備可對應於多層印刷配線板之增層中之更多層化、高密度化之特性的絕緣層之熱硬化性環氧樹脂組成物,與具有以其硬化物所形成之絕緣層之印刷配線板及由該印刷配線板構成之多層印刷配線板。 An object of the present invention is to provide a roughened surface having fine concavities and convexities which exhibits low dielectric tangentiality and excellent adhesion to a conductor layer, and which can be formed in a well-balanced manner and can be increased in accordance with a multilayer printed wiring board. A thermosetting epoxy resin composition of an insulating layer having more stratification and higher density in a layer, a printed wiring board having an insulating layer formed of the cured product, and a multilayer formed of the printed wiring board Printed wiring board.

且,本發明之目的係提供於支撐薄膜上形成由上述熱硬化性環氧樹脂組成物所成之樹脂組成物層的絕緣層形成用接著薄膜,及使上述熱硬化性環氧樹脂組成物含浸於薄片狀補強基材中而成之絕緣層形成用預浸體。 Further, an object of the present invention is to provide a film for forming an insulating layer formed of a resin composition layer composed of the above-mentioned thermosetting epoxy resin composition on a support film, and impregnating the thermosetting epoxy resin composition A prepreg for forming an insulating layer formed in a sheet-like reinforcing substrate.

本發明人等針對熱硬化性環氧樹脂組成物中使用之硬化劑或調配樹脂類積極檢討之結果,發現作為調配於環氧樹脂組成物中之樹脂成分而已知之各種樹脂中,將「含萘構造之活性酯化合物」以特定量調配於樹脂組成物中時將成為可解決上述課題之手段,因而完成以下之發明。 As a result of a review of the curing agent or the blending resin used in the thermosetting epoxy resin composition, the present inventors have found that various kinds of resins known as resin components blended in the epoxy resin composition are "naphthalene-containing". When the active ester compound of the structure is blended in a resin composition in a specific amount, it will become a means for solving the above problems, and the following invention is completed.

[1]一種熱硬化性環氧樹脂組成物,其係至少含有環氧樹脂(A)與含萘構造之活性酯化合物(B)之熱硬化 性環氧樹脂組成物,其中使前述熱硬化性環氧樹脂組成物中之不揮發成分為100質量%時,前述含萘構造之活性酯化合物(B)的含量為0.1~30質量%。 [1] A thermosetting epoxy resin composition comprising at least an epoxy resin (A) and a thermosetting of an active ester compound (B) containing a naphthalene structure In the epoxy resin composition, when the non-volatile component in the thermosetting epoxy resin composition is 100% by mass, the content of the active ester compound (B) containing the naphthalene structure is 0.1 to 30% by mass.

[2]如[1]所記載之熱硬化性環氧樹脂組成物,其中前述含萘構造之活性酯化合物(B)係具有聚氧化萘構造與芳基羰氧基之活性酯化合物。 [2] The thermosetting epoxy resin composition according to [1], wherein the active ester compound (B) having a naphthalene structure has an active ester compound of a polyoxynaphthalene structure and an arylcarbonyloxy group.

[3]如[1]或[2]所記載之熱硬化性環氧樹脂組成物,其中前述含萘構造之活性酯化合物(B)係於聚氧化萘構造之萘核上已鍵結芳基羰氧基之活性酯化合物。 [3] The thermosetting epoxy resin composition according to [1] or [2] wherein the active ester compound (B) having a naphthalene structure is bonded to an aryl group on a naphthalene nucleus of a polyoxynaphthalene structure. An active ester compound of a carbonyloxy group.

[4]如[1]~[3]中任一項所記載之熱硬化性環氧樹脂組成物,其中前述環氧樹脂(A)含有液狀之環氧樹脂。 [4] The thermosetting epoxy resin composition according to any one of [1] to [3] wherein the epoxy resin (A) contains a liquid epoxy resin.

[5]如[1]~[4]中任一項所記載之熱硬化性環氧樹脂組成物,其係進而含有無機填充材。 [5] The thermosetting epoxy resin composition according to any one of [1] to [4] further comprising an inorganic filler.

[6]如[1]~[5]中任一項所記載之熱硬化性環氧樹脂組成物,其係進而含有熱可塑性樹脂。 [6] The thermosetting epoxy resin composition according to any one of [1] to [5] further comprising a thermoplastic resin.

[7]如[1]~[6]中任一項所記載之熱硬化性環氧樹脂組成物,其係藉由鍍敷而形成導體層之多層印刷配線板之絕緣層用樹脂組成物。 [7] The thermosetting epoxy resin composition according to any one of [1] to [6], which is a resin composition for an insulating layer of a multilayer printed wiring board in which a conductor layer is formed by plating.

[8]一種絕緣層形成用接著薄膜,其係於支撐薄膜上設置有由如請[1]~[7]中任一項所記載之熱硬化性環氧樹脂組成物所成之樹脂組成物層而成者。 [8] A resin composition comprising a thermosetting epoxy resin composition according to any one of [1] to [7], wherein the resin film is formed on the support film. Layered.

[9]一種絕緣層形成用預浸體,其係將如[1]~[7]中任一項所記載之熱硬化性環氧樹脂組成物含浸於薄片狀纖維 基材中而成者。 [9] A prepreg for forming an insulating layer, which is characterized in that the thermosetting epoxy resin composition according to any one of [1] to [7] is impregnated into a flaky fiber. It is made of a substrate.

[10]一種印刷配線板用絕緣體,其係由如[8]所記載之絕緣層形成用接著薄膜之樹脂組成物層或如[9]所記載之絕緣層形成用預浸體之任一者之硬化物所成者。 [10] An insulator for a printed wiring board, which is the resin composition layer of the adhesive film for forming an insulating layer according to [8], or the prepreg for forming an insulating layer according to [9] The hardened material is formed.

[11]一種印刷配線板用絕緣體,其係於由如[10]所記載之印刷配線板用絕緣體所成之絕緣層上設置有經圖型加工之導體層而成者。 [11] An insulator for a printed wiring board, which is obtained by providing a patterned conductor layer on an insulating layer made of an insulator for a printed wiring board according to [10].

[12]如[10]或[11]所記載之印刷配線板用絕緣體,其中前述絕緣層之表面粗糙度Ra係10~200nm,Rq係15~250nm,前述絕緣層與前述導體層之剝離強度係0.35kgf/cm以上。 [12] The insulator for a printed wiring board according to [10], wherein the insulating layer has a surface roughness Ra of 10 to 200 nm, Rq of 15 to 250 nm, and a peeling strength between the insulating layer and the conductor layer. It is 0.35 kgf/cm or more.

[13]一種多層印刷配線板,其係如[11]或[12]所記載之印刷配線板用絕緣體複數層合而成者。 [13] A multilayer printed wiring board obtained by laminating an insulator for a printed wiring board according to [11] or [12].

[14]一種半導體裝置,其係包含如[13]所記載之多層印刷配線板。 [14] A semiconductor device comprising the multilayer printed wiring board according to [13].

前述熱硬化性環氧樹脂組成物係介電正切低、可形成與導體層之密著性優異之粗化面,且可形成成為均衡良好地具備可對應於由多層印刷配線板之增層之更多層化、高密度化之特性的絕緣層之硬化物層之熱硬化性環氧樹脂組成物。 The thermosetting epoxy resin composition has a low dielectric tangent and can form a roughened surface excellent in adhesion to a conductor layer, and can be formed to have a well-balanced layer which can be added to a multilayer printed wiring board. A thermosetting epoxy resin composition of a cured layer of an insulating layer having more stratification and higher density.

且,使上述熱硬化性環氧樹脂組成物硬化而成之硬化物,於藉由其表面之粗化處理,形成表面粗糙度Ra為 10~200nm,Rq為15~250nm之微細凹凸時,由於亦成為與導體層之密著性優異之粗化面,故作為多層印刷配線板中之絕緣層形成材料尤其有用。 Further, the cured product obtained by curing the thermosetting epoxy resin composition is subjected to roughening treatment to form a surface roughness Ra. In the case of fine concavities and convexities of 15 to 250 nm and Rq of 15 to 250 nm, the Rq is a roughened surface excellent in adhesion to the conductor layer, and thus is particularly useful as an insulating layer forming material in a multilayer printed wiring board.

以下,分別針對本發明之熱硬化性環氧樹脂組成物、絕緣層形成用接著薄膜、絕緣層形成用預浸體、印刷配線板用絕緣體及多層印刷配線板進一步詳述。 In the following, the thermosetting epoxy resin composition, the insulating layer forming adhesive film, the insulating layer forming prepreg, the printed wiring board insulator, and the multilayer printed wiring board of the present invention are further described in detail.

本發明之熱硬化性環氧樹脂組成物含有環氧樹脂(A)與含萘構造之活性酯化合物(B)作為必要成分,此外,可視需要含有無機填充材、熱可塑性樹脂、環氧樹脂用硬化劑、硬化促進劑、及於形成多層印刷配線板中之絕緣層之樹脂組成物中所使用之添加物。 The thermosetting epoxy resin composition of the present invention contains an epoxy resin (A) and an active ester compound (B) having a naphthalene structure as essential components, and may contain an inorganic filler, a thermoplastic resin, or an epoxy resin as needed. A hardener, a hardening accelerator, and an additive used in a resin composition for forming an insulating layer in a multilayer printed wiring board.

〈環氧樹脂(A)〉 <Epoxy Resin (A)>

本發明之熱硬化性環氧樹脂組成物中使用之環氧樹脂(A)為形成多層印刷配線板中之絕緣層的樹脂組成物中通常使用之環氧樹脂,可由以下列舉之例中適當選擇使用。 The epoxy resin (A) used in the thermosetting epoxy resin composition of the present invention is an epoxy resin generally used in a resin composition for forming an insulating layer in a multilayer printed wiring board, and can be appropriately selected from the following examples. use.

亦即,環氧樹脂(A)列舉為例如雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚AF型環氧樹脂、酚酚醛清漆型環氧樹脂、第三丁基-兒茶酚型環氧樹脂、萘酚型環氧樹脂、萘型環氧樹脂、萘醚型環氧樹脂、縮水甘油胺型環氧樹脂、縮水甘油酯型環氧樹 脂、甲酚酚醛清漆型環氧樹脂、聯苯型環氧樹脂、蒽型環氧樹脂、線狀脂肪族環氧樹脂、具有丁二烯構造之環氧樹脂、脂環式環氧樹脂、雜環式環氧樹脂、含有螺環之環氧樹脂、環己烷二甲醇型環氧樹脂、三羥甲基型環氧樹脂、鹵化環氧樹脂等。 That is, the epoxy resin (A) is exemplified by, for example, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol AF type epoxy resin, phenol novolak type epoxy resin. Resin, t-butyl-catechol epoxy resin, naphthol epoxy resin, naphthalene epoxy resin, naphthalene ether epoxy resin, glycidylamine epoxy resin, glycidyl ester epoxy resin Grease, cresol novolak type epoxy resin, biphenyl type epoxy resin, bismuth type epoxy resin, linear aliphatic epoxy resin, epoxy resin with butadiene structure, alicyclic epoxy resin, miscellaneous Ring epoxy resin, epoxy resin containing spiro ring, cyclohexane dimethanol type epoxy resin, trimethylol type epoxy resin, halogenated epoxy resin, and the like.

環氧樹脂(A)亦可併用2種以上。環氧樹脂(A)以環氧樹脂(A)之不揮發成分作為100質量%時,較好為至少50質量%以上含有1分子中具有2個以上環氧基之環氧樹脂之樣態。且再者,環氧樹脂(A)較佳之樣態為含有1分子中具有2個以上之環氧基,且在溫度20℃為液狀之芳香族系環氧樹脂(液狀環氧樹脂),更好之樣態為含有該液狀環氧樹脂及1分子中具有3個以上環氧基,且在溫度20℃為固體狀之芳香族系環氧樹脂(固體狀環氧樹脂)。 Two or more types of epoxy resins (A) may be used in combination. When the epoxy resin (A) is 100% by mass of the nonvolatile component of the epoxy resin (A), it is preferably at least 50% by mass or more of an epoxy resin having two or more epoxy groups in one molecule. Further, the epoxy resin (A) is preferably an aromatic epoxy resin (liquid epoxy resin) having two or more epoxy groups in one molecule and liquid at a temperature of 20 ° C. More preferably, it is an aromatic epoxy resin (solid epoxy resin) containing the liquid epoxy resin and having three or more epoxy groups in one molecule and being solid at a temperature of 20 ° C.

又,本發明中,所謂芳香族系環氧樹脂意指其分子內具有芳香環骨架之環氧樹脂。且所謂環氧當量(g/eq)意指每1個環氧基之分子量。藉由使用液狀環氧樹脂與固體狀環氧樹脂作為環氧樹脂,於以接著薄膜之形態使用環氧樹脂組成物時,可形成顯示充分可撓性且作業性優異之薄膜,並且提高環氧樹脂組成物之硬化物之斷裂強度,且提高多層印刷配線板之耐久性。 Further, in the present invention, the aromatic epoxy resin means an epoxy resin having an aromatic ring skeleton in its molecule. The so-called epoxy equivalent (g/eq) means the molecular weight per one epoxy group. By using a liquid epoxy resin and a solid epoxy resin as an epoxy resin, when an epoxy resin composition is used in the form of a film, a film exhibiting sufficient flexibility and excellent workability can be formed, and the ring can be improved. The breaking strength of the cured product of the oxyresin composition and the durability of the multilayer printed wiring board.

另外,併用液狀環氧樹脂與固體狀環氧樹脂作為環氧樹脂時,其等之調配比例(液狀環氧樹脂:固體狀環氧樹脂)以質量比計,較好為1:0.1~1:2之範圍。 藉由以該範圍內使用液狀環氧樹脂,以接著薄膜之形態使用時,可獲得充分之可撓性,提高作業性,且亦可獲得層合時之充分流動性。且,藉由在該範圍內使用固體狀環氧樹脂,於降低環氧樹脂組成物之黏著性,且以接著薄膜之形態使用時,可提高真空層合時之脫氣性。且,真空層合時之保護膜或支撐膜之剝離性良好,亦可提高硬化後之耐熱性。 Further, when a liquid epoxy resin and a solid epoxy resin are used together as an epoxy resin, the blending ratio (liquid epoxy resin: solid epoxy resin) is preferably 1:0.1 in terms of a mass ratio. The range of 1:2. When the liquid epoxy resin is used in this range and used in the form of a film, sufficient flexibility can be obtained, workability can be improved, and sufficient fluidity at the time of lamination can be obtained. Further, by using a solid epoxy resin in this range, when the adhesiveness of the epoxy resin composition is lowered and the film is used in the form of a film, the degassing property at the time of vacuum lamination can be improved. Further, the peeling property of the protective film or the support film at the time of vacuum lamination is good, and the heat resistance after hardening can also be improved.

本發明之環氧樹脂組成物中,以環氧樹脂組成物之不揮發成分作為100質量%時,環氧樹脂(A)之含量較好為10~50質量%,更好為20~40質量%,又更好為20~35質量%。藉由使環氧樹脂(A)之含量在該範圍內,有提高環氧樹脂組成物之硬化性之傾向。 In the epoxy resin composition of the present invention, when the nonvolatile content of the epoxy resin composition is 100% by mass, the content of the epoxy resin (A) is preferably from 10 to 50% by mass, more preferably from 20 to 40% by mass. %, and more preferably 20 to 35 mass%. When the content of the epoxy resin (A) is within this range, the curing property of the epoxy resin composition tends to be improved.

〈含萘構造之活性酯化合物(B)〉 <Active ester compound containing naphthalene structure (B)>

本發明之熱硬化性環氧樹脂組成物中之「含萘構造之活性酯化合物(B)」(萘型活性酯化合物)具有作為環氧樹脂之硬化劑之功能,並且認為在粗化處理樹脂硬化物表面時,亦有助於形成與導體層之密著性良好之微細凹凸。 The "active naphthalene-containing active ester compound (B)" (naphthalene-type active ester compound) in the thermosetting epoxy resin composition of the present invention has a function as a hardener of an epoxy resin, and is considered to be a resin for roughening treatment. When the surface of the cured material is cured, it also contributes to the formation of fine irregularities having good adhesion to the conductor layer.

含萘構造之活性酯化合物(B)若具有萘構造與芳基羰氧基,則無特別限制,但較好為具有聚氧化萘構造與芳基羰氧基之活性酯化合物,更好為聚氧化萘構造之萘核上鍵結芳基羰氧基之活性酯化合物。至於聚氧化萘構造亦可為經碳數1~4之烷基取代之聚氧化萘構造。如上述 之活性酯化合物可藉由使具有核取代羥基之萘構造之化合物與於萘核或苯核上具有羧基之羧酸化合物之縮合反應而製造。該活性酯化合物為例如專利文獻3中所記載之「以聚伸芳氧基構造作為主骨架,以芳基羧酸予以酯化之活性酯化合物」中所包含之化合物。 The active ester compound (B) having a naphthalene structure is not particularly limited as long as it has a naphthalene structure and an arylcarbonyloxy group, but is preferably an active ester compound having a polyoxynaphthalene structure and an arylcarbonyloxy group. An active ester compound of an arylcarbonyloxy group bonded to a naphthalene core of an oxidized naphthalene structure. The polyoxynaphthalene structure may also be a polyoxynaphthalene structure substituted with an alkyl group having 1 to 4 carbon atoms. As above The active ester compound can be produced by a condensation reaction of a compound having a naphthalene structure having a core-substituted hydroxy group with a carboxylic acid compound having a carboxyl group on a naphthalene nucleus or a benzene nucleus. The active ester compound is, for example, a compound contained in "an active ester compound which is esterified with an aryl carboxylic acid as a main skeleton and has a poly(aryleneoxy structure) as described in Patent Document 3).

含萘構造之活性酯化合物(B)具體列舉為以下述通式(1)表示之化合物。 The active ester compound (B) having a naphthalene structure is specifically exemplified by the compound represented by the following formula (1).

[式(1)中,R1各獨立為氫原子或碳數1~4之烷基,較好為氫原子,R2各獨立為氫原子或以下述通式(2)表示之1價基,X各獨立為氫原子、苯甲醯基或萘羰基,較好為苯甲醯基,n及m各獨立為0~5之整數,n或m之任一者為1以上之整數]。 In the formula (1), R 1 is each independently a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, preferably a hydrogen atom, and each of R 2 is independently a hydrogen atom or a monovalent group represented by the following formula (2). X is independently a hydrogen atom, a benzamidine group or a naphthylcarbonyl group, preferably a benzamidine group, and n and m are each independently an integer of 0 to 5, and either n or m is an integer of 1 or more].

[式(2)中,R1係與上述相同,X係與上述相同,p為1或2之整數,又,上述通式(1)及通式(2)中之X中之至少一者為苯甲醯基或萘羰基]。 [In the formula (2), R 1 is the same as above, X is the same as above, p is an integer of 1 or 2, and further, at least one of X in the above formula (1) and formula (2) Is benzylidene or naphthalenecarbonyl].

本發明之熱硬化性環氧樹脂組成物中,於將熱硬化性環氧樹脂組成物之不揮發成分作為100質量%時,含萘構造之活性酯化合物(B)之含量為0.1~30質量%。據此,可形成顯示低介電正切並且具有與導體層之密著性、蝕刻性優異之微細凹凸之粗化面。含萘構造之活性酯化合物(B)之含量之更佳範圍為3~30質量%,又更好為5~28質量%。 In the thermosetting epoxy resin composition of the present invention, when the non-volatile component of the thermosetting epoxy resin composition is 100% by mass, the content of the active ester compound (B) having a naphthalene structure is 0.1 to 30 mass. %. According to this, it is possible to form a roughened surface of fine concavities and convexities which exhibit low dielectric tangential and have excellent adhesion to the conductor layer and etching property. The content of the active ester compound (B) having a naphthalene structure is more preferably from 3 to 30% by mass, still more preferably from 5 to 28% by mass.

〈無機填充材〉 <Inorganic Filler>

藉由使本發明之熱硬化性環氧樹脂組成物進一步含有無機填充材,可降低線熱膨脹率或降低介電正切。無機填充材列舉為例如二氧化矽、氧化鋁、硫酸鋇、滑石、黏土、雲母粉、氫氧化鋁、氫氧化鎂、碳酸鈣、碳酸鎂、氧化鎂、氮化硼、硼酸鋁、鈦酸鋇、鈦酸鍶、鈦酸鈣、鈦酸鎂、鈦酸鉍、氧化鈦、鋯酸鋇、鋯酸鈣等。其中,以無定形二氧化矽、粉碎二氧化矽、熔融二氧化矽、結晶二氧化矽、合成二氧化矽、中空二氧化矽、球狀二氧化矽等之二氧化矽較佳,就進一步降低絕緣層之表面粗糙度而言,更好為熔融二氧化矽、球狀二氧化矽,又更好為球狀熔融二氧化矽。該等可使用1種或組合2種以上使用。市售之球狀熔融二氧化矽之例列舉為ADMATECHS(股)製之 「SOC2」、「SOC1」等。 By further containing the inorganic filler in the thermosetting epoxy resin composition of the present invention, the linear thermal expansion coefficient or the dielectric tangent can be lowered. The inorganic filler is exemplified by, for example, cerium oxide, aluminum oxide, barium sulfate, talc, clay, mica powder, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, magnesium oxide, boron nitride, aluminum borate, barium titanate. , barium titanate, calcium titanate, magnesium titanate, barium titanate, titanium oxide, barium zirconate, calcium zirconate and the like. Among them, cerium oxide such as amorphous cerium oxide, pulverized cerium oxide, molten cerium oxide, crystalline cerium oxide, synthetic cerium oxide, hollow cerium oxide, spherical cerium oxide or the like is preferably further reduced. In terms of surface roughness of the insulating layer, it is more preferably molten cerium oxide, spherical cerium oxide, and more preferably spherical molten cerium oxide. These may be used alone or in combination of two or more. Commercially available spheroidal molten cerium oxide is exemplified by ADMATECHS (share) "SOC2", "SOC1", etc.

無機填充材之平均粒徑並無特別限制,但就使絕緣層表面成為低粗糙度,可進行微細配線形成之觀點而言,較好為5μm以下,更好為3μm以下,又更好為2μm以下,再更好為1μm以下,又再更好為0.8μm以下,最好為0.6μm以下,又最好為0.4μm以下。另一方面,將樹脂組成物作成樹脂漆料時,就防止漆料之黏度上升、作業性降低之觀點而言,較好為0.01μm以上,更好為0.03μm以上,又更好為0.05μm以上,再更好為0.07μm以上,又再更好為0.1μm以上。上述無機填充材之平均粒徑可利用基於Mie散射理論之雷射繞射.散射法測定。具體而言可藉由雷射繞射散射式粒度分佈測定裝置,以體積基準作成無機填充材之粒度分佈,以其中值徑作為平均粒徑而測定。測定樣品可較好使用利用超音波使無機填充材分散於水中而成者。雷射繞射散射式粒度分佈測定裝置可使用堀場製作所(股)製之LA-950等。無機填充材較好為以胺基矽烷系偶合劑、脲基系烷系偶合劑、環氧基矽烷系偶合劑、巰基矽烷系偶合劑、矽烷系偶合劑、乙烯基矽烷系偶合劑、苯乙烯基矽烷系偶合劑、丙烯酸酯矽烷系偶合劑、異氰酸酯矽烷系偶合劑、硫醚矽烷系偶合劑、有機矽氮烷化合物、鈦酸酯系偶合劑等之表面處理劑予以表面處理而提高其耐濕性、分散性者。該等可使用1種或組合2種以上使用。 The average particle diameter of the inorganic filler is not particularly limited, but the surface of the insulating layer is low in roughness, and from the viewpoint of formation of fine wiring, it is preferably 5 μm or less, more preferably 3 μm or less, and still more preferably 2 μm. Further, it is more preferably 1 μm or less, still more preferably 0.8 μm or less, more preferably 0.6 μm or less, still more preferably 0.4 μm or less. On the other hand, when the resin composition is used as a resin paint, it is preferably 0.01 μm or more, more preferably 0.03 μm or more, and more preferably 0.05 μm from the viewpoint of preventing the viscosity of the paint from rising and the workability from being lowered. The above is more preferably 0.07 μm or more, and still more preferably 0.1 μm or more. The average particle diameter of the above inorganic filler can be measured by a laser diffraction and scattering method based on the Mie scattering theory. Specifically, the particle size distribution of the inorganic filler can be determined on a volume basis by a laser diffraction scattering type particle size distribution measuring apparatus, and the median diameter can be measured as an average particle diameter. The measurement sample can preferably be obtained by dispersing an inorganic filler in water by using ultrasonic waves. As the laser diffraction scattering type particle size distribution measuring apparatus, LA-950 or the like manufactured by Horiba, Ltd. can be used. The inorganic filler is preferably an amine decane coupling agent, a urea based alkyl coupling agent, an epoxy decane coupling agent, a mercapto decane coupling agent, a decane coupling agent, a vinyl decane coupling agent, or styrene. A surface treatment agent such as a quinone coupling agent, an acrylate decane coupling agent, an isocyanate decane coupling agent, a thioether decane coupling agent, an organic decazane compound, or a titanate coupling agent is surface-treated to improve the resistance thereof. Wet and dispersible. These may be used alone or in combination of two or more.

調配無機填充材時,其含量雖隨著熱硬化性 環氧樹脂組成物所要求之特性而異,但無機填充材之含量以熱硬化性環氧樹脂組成物中之不揮發成分作為100質量%時,較好為30~90質量%,更好為40~80質量%,又更好為50~70質量%。無機填充材之含量過少時,會有硬化物之線熱膨脹率變高之傾向,含量過多時會有調製接著薄膜時難以薄膜化,使硬化物變脆之傾向。 When the inorganic filler is blended, the content is thermosetting. The content of the inorganic filler is different, and the content of the inorganic filler is preferably from 30 to 90% by mass, more preferably from 30 to 90% by mass, based on the nonvolatile content of the thermosetting epoxy resin composition. 40 to 80% by mass, and more preferably 50 to 70% by mass. When the content of the inorganic filler is too small, the linear thermal expansion coefficient of the cured product tends to be high, and when the content is too large, it tends to be difficult to form a film when the film is attached, and the cured product tends to be brittle.

〈熱可塑性樹脂〉 <Thermoplastic resin>

本發明之熱硬化性環氧樹脂組成物藉由進一步含有熱可塑性樹脂,可提高硬化物之機械強度,進而亦可提高以接著薄膜之形態使用時之薄膜成型能。熱可塑性樹脂可列舉出苯氧樹脂、聚乙烯乙縮醛樹脂、聚醯亞胺樹脂、聚醯胺醯亞胺樹脂、聚醚醯亞胺樹脂、聚碸樹脂、聚醚碸樹脂、聚苯醚樹脂、聚碳酸酯樹脂、聚醚醚酮樹脂、聚酯樹脂,最好為苯氧樹脂、聚乙烯乙縮醛樹脂。該等熱可塑性樹脂可分別單獨使用,亦可組合2種以上使用。熱可塑性樹脂之重量平均分子量較好為8000~200000之範圍,更好為12000~100000之範圍。又本發明中之重量平均分子量係以凝膠滲透層析(GPC)法(聚苯乙烯換算)測定。以GPC法測定之重量平均分子量具體而言可使用島津製作所(股)製之LC-9A/RID-6A作為測定裝置,使用昭和電工(股)製之Shodex K-800P/K-804L/K-804L作為管柱,使用氯仿等作為移動相,以管柱溫度40℃進行測定,使用標準聚苯乙烯之校正線算出。 The thermosetting epoxy resin composition of the present invention can further improve the mechanical strength of the cured product by further containing a thermoplastic resin, and can further improve the film forming ability when used in the form of a film. Examples of the thermoplastic resin include phenoxy resin, polyvinyl acetal resin, polyimide resin, polyamidoximine resin, polyether oxime resin, polyfluorene resin, polyether oxime resin, and polyphenylene ether. The resin, the polycarbonate resin, the polyetheretherketone resin, and the polyester resin are preferably a phenoxy resin or a polyethylene acetal resin. These thermoplastic resins may be used alone or in combination of two or more. The weight average molecular weight of the thermoplastic resin is preferably in the range of 8,000 to 200,000, more preferably in the range of 12,000 to 100,000. Further, the weight average molecular weight in the present invention is measured by a gel permeation chromatography (GPC) method (in terms of polystyrene). For the weight average molecular weight measured by the GPC method, LC-9A/RID-6A manufactured by Shimadzu Corporation can be used as a measuring device, and Shodex K-800P/K-804L/K-made by Showa Denko Co., Ltd. can be used. 804L was used as a column, and chloroform or the like was used as a mobile phase, and the column temperature was measured at 40 ° C, and was calculated using a calibration line of standard polystyrene.

調配熱可塑性樹脂時,其調配量以熱硬化性環氧樹脂組成物中之不揮發成分作為100質量%時,較好為0.1~10質量%,更好為0.5~5質量%。在該範圍內時,可發揮薄膜成型能或機械強度提高之效果,進而可降低熔融黏度上升或濕式粗化步驟後之絕緣層表面之粗糙度。 When the amount of the non-volatile component in the thermosetting epoxy resin composition is 100% by mass, the amount is preferably 0.1 to 10% by mass, more preferably 0.5 to 5% by mass. When it is in this range, the film forming ability or the mechanical strength can be improved, and the roughness of the surface of the insulating layer after the increase in the melt viscosity or the wet roughening step can be reduced.

〈環氧樹脂用硬化劑〉 <hardener for epoxy resin>

本發明之熱硬化性環氧樹脂組成物亦可進一步使用一般之環氧樹脂用硬化劑。可使用之環氧樹脂用硬化劑之例列舉為TD2090、TD2131[DIC(股),商品名]、MEH-7600、MEH-7851、MEH-8000H[明和化成(股),商品名)、NHN、CBN、GPH-65、GPH-103[日本化藥(股),商品名]、SN170、SN180、SN190、SN475、SN485、SN495、SN375、SN395[新日鐵化學(股),商品名]、LA7052、LA7054、LA3018、LA1356[DIC(股),商品名]等酚系硬化劑、F-a、P-d[四國化成(股),商品名]、HFB2006M[昭和高分子(股),商品名]等之苯并噁嗪系硬化劑、甲基六氫鄰苯二甲酸酐、甲基納迪克酸酐(methylnadic anhydride)、氫化甲基納迪克酸酐等酸酐系硬化劑、PT30、PT60、BA230S75[日本LONZA(股),商品名]等之氰酸酯系硬化劑等。 Further, a thermosetting epoxy resin composition of the present invention may further use a general hardener for an epoxy resin. Examples of hardeners for epoxy resins that can be used are TD2090, TD2131 [DIC (trade name), trade name], MEH-7600, MEH-7851, MEH-8000H [Minghe Chemical Co., Ltd., trade name), NHN, CBN, GPH-65, GPH-103 [Nippon Chemical Co., Ltd., trade name], SN170, SN180, SN190, SN475, SN485, SN495, SN375, SN395 [Nippon Steel Chemical Co., Ltd., trade name], LA7052 , such as phenolic curing agent such as LA7054, LA3018, LA1356 [DIC (share), trade name], Fa, Pd [Four countries into the company, trade name], HFB2006M [Showa polymer (share), trade name] Benzoxazine-based hardener, methylhexahydrophthalic anhydride, methylnadic anhydride, hydrogenated methylnadic anhydride, acid anhydride hardener, PT30, PT60, BA230S75 [Japan LONZA (shares) ), a cyanate-based curing agent such as a trade name].

〈硬化促進劑〉 <hardening accelerator>

本發明之熱硬化性環氧樹脂組成物藉由進一步含有硬 化促進劑,可有效地調整硬化時間及硬化溫度。硬化促進劑列舉為例如TPP、TPP-K、TPP-S、TPTP-S[北興化學工業(股),商品名]等有機膦化合物、Curezol 2MZ、2E4MZ、Cl1Z、Cl1Z-CN、Cl1Z-CNS、Cl1Z-A、2MZ-OK、2MA-OK、2PHZ[四國化成工業(股),商品名]等咪唑化合物、Novacure[旭化成工業(股),商品名]、Fujicure[富士化成工業(股),商品名]等之胺加成物化合物、1,8-二氮雜雙環[5,4,0]十一碳烯-7,4-二甲胺基吡啶、苄基二甲基胺、2,4,6-參(二甲胺基甲基)酚、4-二甲胺基吡啶等胺化合物、鈷、銅、鋅、鐵、鎳、錳、錫等有機金屬錯合物或有機金屬鹽等。硬化促進劑亦可併用2種以上。調配硬化促進劑時,以環氧樹脂組成物中所含之環氧樹脂之總量作為100質量%(不揮發成分)時,較好在0.05~1質量%之範圍內使用。 The thermosetting epoxy resin composition of the present invention further comprises a hard The accelerator can effectively adjust the hardening time and the hardening temperature. The hardening accelerator is exemplified by an organic phosphine compound such as TPP, TPP-K, TPP-S, TPTP-S [Beixing Chemical Industry Co., Ltd., trade name], Curezol 2MZ, 2E4MZ, Cl1Z, Cl1Z-CN, Cl1Z-CNS, Imidazole compounds such as Cl1Z-A, 2MZ-OK, 2MA-OK, 2PHZ [Four Nations Chemical Industry Co., Ltd., trade name], Novacure [Asahi Kasei Industrial Co., Ltd., trade name], Fujicure [Fuji Chemical Industry Co., Ltd., Amine adduct compound of the trade name], 1,8-diazabicyclo[5,4,0]undecene-7,4-dimethylaminopyridine, benzyldimethylamine, 2, An amine compound such as 4,6-gin(dimethylaminomethyl)phenol or 4-dimethylaminopyridine, or an organic metal complex such as cobalt, copper, zinc, iron, nickel, manganese or tin, or an organic metal salt . Two or more types of hardening accelerators may be used in combination. When the total amount of the epoxy resin contained in the epoxy resin composition is 100% by mass (nonvolatile content), it is preferably used in the range of 0.05 to 1% by mass.

本發明之熱硬化性環氧樹脂組成物亦可在發揮本發明效果之範圍內,任意含有上述以外之其他各種樹脂添加物。樹脂添加物可列舉為例如矽粉、尼龍粉、氟粉、橡膠粒子等有機填充劑、Orben、Benton等增黏劑、聚矽氧系、氟系、高分子系消泡劑或平流劑、咪唑系、噻唑系、三唑系、矽烷偶合劑等密著性賦予劑、酞菁藍、酞菁綠、碘綠、雙偶氮黃、碳黑等著色劑、氫氧化金屬物、含磷化合物等難燃劑等。 The thermosetting epoxy resin composition of the present invention may optionally contain various other resin additives other than the above, within the range in which the effects of the present invention are exerted. Examples of the resin additive include organic fillers such as strontium powder, nylon powder, fluorine powder, and rubber particles, tackifiers such as Orben and Benton, polyfluorene-based, fluorine-based, polymeric antifoaming agents or admixtures, and imidazole. Titanium, thiazole, triazole, decane coupling agent and other adhesion imparting agents, phthalocyanine blue, phthalocyanine green, iodine green, disazo yellow, carbon black and other colorants, metal hydroxides, phosphorus compounds, etc. Flame retardant, etc.

本發明之熱硬化性環氧樹脂組成物可適當地混合上述成分,且可視需要以三軸輥、球磨機、珠粒研磨 機、砂磨機等混練手段、或者超級混練機、行星式混練機等攪拌手段混練或混合而調製。且,藉由進一步添加有機溶劑而調製為樹脂漆料。 The thermosetting epoxy resin composition of the present invention may be suitably mixed with the above components, and may be triaxially rolled, ball milled, or bead-polished as needed. Mixing means such as a machine or a sand mill, or a mixing means such as a super-kneading machine or a planetary kneading machine, or mixing and mixing. Further, a resin paint was prepared by further adding an organic solvent.

本發明之熱硬化性環氧樹脂組成物由於介電正切低,可形成與導體層之密著性優異之粗化面,故可較好地使用作為用於藉鍍敷形成導體層之樹脂組成物(藉鍍敷形成導體層之多層印刷配線板之絕緣層用樹脂組成物),且進而較好地作為多層印刷配線板之增層用樹脂組成物。 Since the thermosetting epoxy resin composition of the present invention has a low dielectric tangent and can form a roughened surface excellent in adhesion to a conductor layer, it can be preferably used as a resin composition for forming a conductor layer by plating. The material (a resin composition for an insulating layer of a multilayer printed wiring board on which a conductor layer is formed by plating) is further preferably used as a resin composition for layering of a multilayer printed wiring board.

本發明之熱硬化性環氧樹脂組成物為特別適用作為多層印刷配線板之絕緣層形成材料之組成,可使用於阻焊劑、底部填充材、晶粒黏合材、半導體密封材、埋孔樹脂、零件埋入樹脂等之需要樹脂組成物之用途的廣範圍中。且,本發明之樹脂組成物之形態並無特別限制,但可應用於接著薄膜、預浸體等薄片狀層合材料、電路基板(層合板用途、多層印刷配線板用途等)。本發明之樹脂組成物亦可藉漆料狀態塗佈於電路基板上形成絕緣層,但工業上一般係以接著薄膜、預浸體等薄片狀層合材料之形態用於絕緣層形成中。 The thermosetting epoxy resin composition of the present invention is particularly suitable for use as a component of an insulating layer forming material of a multilayer printed wiring board, and can be used for a solder resist, an underfill material, a die bonding material, a semiconductor sealing material, a buried resin, The parts are embedded in a wide range of applications requiring a resin composition such as a resin. In addition, the form of the resin composition of the present invention is not particularly limited, but can be applied to a sheet-like laminate such as a film or a prepreg, or a circuit board (for laminate use, multilayer printed wiring board use, etc.). The resin composition of the present invention may be applied to a circuit board by a paint to form an insulating layer. However, it is generally used in the formation of an insulating layer in the form of a sheet-like laminate such as a film or a prepreg.

〈薄片狀層合材料〉 <Sheet laminate] (絕緣層形成用接著薄膜) (Continuous film for forming an insulating layer)

本發明之絕緣層形成用接著薄膜之特徵為於支撐薄膜上設置由熱硬化性環氧樹脂組成物所成之樹脂組成物層。 絕緣層形成用接著薄膜可使用本技藝習知之方法,例如使樹脂組成物溶解於有機溶劑中調至樹脂漆料,使用模嘴塗佈器等將該樹脂漆料塗佈於支撐體上,再藉由加熱、或者吹熱風等使有機溶劑乾燥形成樹脂組成物層而製造。 The adhesive film for forming an insulating layer of the present invention is characterized in that a resin composition layer made of a thermosetting epoxy resin composition is provided on the support film. The adhesive film for forming an insulating layer can be applied to a support by using a method known in the art, for example, dissolving a resin composition in an organic solvent to a resin paint, and applying the resin paint to a support using a die coater or the like. It is produced by drying an organic solvent by heating or blowing hot air to form a resin composition layer.

有機溶劑可列舉為例如丙酮、甲基乙基酮、環己酮等酮類、乙酸乙酯、乙酸丁酯、溶纖素乙酸酯、丙二醇單甲醚乙酸酯、卡必醇乙酸酯等乙酸酯類,溶纖素、丁基卡必醇等卡必醇類、甲苯、二甲苯等芳香族烴類、二甲基甲醯胺、二甲基乙醯胺、N-甲基吡咯烷酮等醯胺系溶劑等。有機溶劑亦可組合2種以上使用。 The organic solvent may, for example, be a ketone such as acetone, methyl ethyl ketone or cyclohexanone, ethyl acetate, butyl acetate, fibrin acetate, propylene glycol monomethyl ether acetate or carbitol acetate. Acetate, carbaryl alcohol such as cellosolve or butyl carbitol, aromatic hydrocarbons such as toluene and xylene, dimethylformamide, dimethylacetamide, N-methylpyrrolidone, etc. A guanamine solvent or the like. The organic solvent may be used in combination of two or more kinds.

乾燥條件並無特別限制,但較好對樹脂組成物層乾燥至有機溶劑含量為10質量%以下,較好為5質量%以下。漆料中之有機溶劑量亦隨著有機溶劑之沸點而異,例如藉由使含30~60質量%之有機溶劑之漆料在50~150℃乾燥3~10分鐘左右,可形成樹脂組成物層。 The drying conditions are not particularly limited, but the resin composition layer is preferably dried to an organic solvent content of 10% by mass or less, preferably 5% by mass or less. The amount of the organic solvent in the paint varies depending on the boiling point of the organic solvent. For example, the resin composition can be formed by drying the paint containing 30 to 60% by mass of the organic solvent at 50 to 150 ° C for about 3 to 10 minutes. Floor.

絕緣層形成用接著薄膜中形成之樹脂組成物層厚度較好為層合體之厚度以上。電路基板所具有之導體層之厚度通常為5~70μm之範圍,故樹脂組成物層較好具有10~100μm之厚度。就薄膜化之觀點而言,更好為15~80μm。 The thickness of the resin composition layer formed in the adhesive film for forming an insulating layer is preferably equal to or greater than the thickness of the laminate. The thickness of the conductor layer of the circuit board is usually in the range of 5 to 70 μm, so the resin composition layer preferably has a thickness of 10 to 100 μm. From the viewpoint of film formation, it is preferably from 15 to 80 μm.

作為支撐體之例,可列舉為聚乙烯、聚丙烯、聚氯化乙稀等聚烯烴之薄膜、聚對苯二甲酸乙二酯(以下有時簡稱為「PET」)、聚萘二甲酸乙二酯等聚酯薄膜、聚碳酸酯薄膜、聚醯亞胺薄膜等各種塑膠膜。且亦 可使用脫模紙或銅箔、鋁箔等金屬箔等。其中,就廣用性方面而言,較好為塑膠膜,更好為聚對苯二甲酸乙二酯膜。亦可對支撐體及後述之保護膜施以表面改質(MAD)處理、電暈處理等表面處理。另外,亦可藉聚矽氧樹脂系脫模劑、醇酸樹脂系脫模劑、氟樹脂脫模劑等脫模劑施以脫膜處理。 Examples of the support include a film of a polyolefin such as polyethylene, polypropylene, or polyvinyl chloride, polyethylene terephthalate (hereinafter sometimes abbreviated as "PET"), and polyethylene naphthalate B. Various plastic films such as polyester film such as diester, polycarbonate film, and polyimide film. And also A release paper, a metal foil such as a copper foil or an aluminum foil, or the like can be used. Among them, in terms of versatility, it is preferably a plastic film, more preferably a polyethylene terephthalate film. Surface treatment such as surface modification (MAD) treatment or corona treatment may be applied to the support and the protective film described later. Further, the release treatment may be carried out by a release agent such as a polyoxymethylene resin release agent, an alkyd resin release agent, or a fluororesin release agent.

支撐體之厚度並無特別限制,較好為10~150μm,更好為25~50μm。 The thickness of the support is not particularly limited, and is preferably from 10 to 150 μm, more preferably from 25 to 50 μm.

樹脂組成物層之未密著支撐體之面上可進一步根據支撐體層合保護膜。保護膜之厚度並無特別限制,但為例如1~40μm。藉由層合保護膜,可防止污物等對樹脂組成物層表面之附著。 The surface of the resin composition layer which is not adhered to the support may be further laminated with a protective film according to the support. The thickness of the protective film is not particularly limited, but is, for example, 1 to 40 μm. By laminating the protective film, adhesion of dirt or the like to the surface of the resin composition layer can be prevented.

具有上述構成之絕緣層形成用接著薄膜亦可捲成輥狀而儲存。 The adhesive film for forming an insulating layer having the above configuration may be wound into a roll and stored.

(絕緣層形成用預浸體) (Prepreg for forming an insulating layer)

本發明之絕緣層形成用預浸體之特徵為將熱硬化性環氧樹脂組成物含浸在薄片狀纖維基材中。亦即,可藉由利用熱熔融法或溶劑法將本發明之熱硬化性環氧樹脂組成物含浸於薄片狀補強基材中,經加熱並半硬化而製造。薄片狀補強基材可使用例如玻璃布或芳醯胺纖維等常用之纖維所成之預浸體用纖維。而且本發明之絕緣層形成用預浸體較好為設置於支撐體上之構成。 The prepreg for forming an insulating layer of the present invention is characterized in that the thermosetting epoxy resin composition is impregnated into the sheet-like fibrous base material. That is, the thermosetting epoxy resin composition of the present invention can be impregnated into a sheet-like reinforcing substrate by a hot melt method or a solvent method, and heated and semi-cured. As the flaky reinforcing substrate, a fiber for prepreg made of a conventional fiber such as glass cloth or linalin fiber can be used. Further, the prepreg for forming an insulating layer of the present invention is preferably provided on the support.

熱熔融法係不使樹脂組成物溶解於有機溶劑 中,而暫時塗覆於支撐體上,且將其層合於薄片狀補強基材上,或者以模嘴塗佈器將樹脂組成物直接塗佈於薄片狀補強基材上,製造預浸體之方法。且溶劑法與上述絕緣層形成用接著薄膜之製造方法相同,係使樹脂溶解於有機溶劑中調製樹脂漆料,且將薄片狀補強基材浸漬於該漆料中,使樹脂漆料含浸於薄片狀補強基材中,隨後乾燥之方法。另外,本發明之絕緣層形成用預浸體亦可自薄片狀補強基材之兩面以加熱、加壓條件下連續熱層合絕緣層形成用接著薄膜而調製。亦可與上述絕緣層形成用接著薄膜同樣地使用支撐體或保護膜。 The hot melt method does not dissolve the resin composition in the organic solvent Preparing a prepreg by temporarily applying it to a support and laminating it to a sheet-like reinforcing substrate, or directly applying a resin composition to a sheet-like reinforcing substrate by a die coater. The method. Further, the solvent method is the same as the method for producing the adhesive film for forming an insulating layer, and the resin is dissolved in an organic solvent to prepare a resin paint, and the flaky reinforcing substrate is immersed in the paint to impregnate the resin paint. Reinforce the substrate and then dry it. Further, the prepreg for forming an insulating layer of the present invention may be prepared by continuously and thermally laminating the underlying film for forming an insulating layer from both sides of the sheet-like reinforcing substrate under heat and pressure. A support or a protective film may be used similarly to the above-described adhesive film for forming an insulating layer.

如上述,由前述絕緣層形成用接著薄膜之樹脂組成物層之硬化物所成之印刷配線板用絕緣體及由前述絕緣層形成用預浸體之硬化物所成之印刷配線板用絕緣體適合作為多層印刷配線板用之絕緣層。另外,更宜在由該印刷配線板用絕緣體所成之絕緣層上設置經圖型加工之導體層(電路)。又,較好為層合複數個設有該導體層(電路)之印刷配線板用絕緣體而成之多層印刷配線板。 As described above, the insulator for a printed wiring board formed of the cured product of the resin composition layer for the insulating layer forming film and the insulator for the printed wiring board formed of the cured product of the insulating layer forming prepreg are suitable as the insulator. An insulating layer for a multilayer printed wiring board. Further, it is more preferable to provide a patterned conductor layer (circuit) on the insulating layer formed of the insulator for the printed wiring board. Moreover, it is preferable to laminate a plurality of multilayer printed wiring boards in which a plurality of insulators for printed wiring boards having the conductor layers (circuits) are laminated.

〈使用薄片狀層合材料之多層印刷配線板〉 <Multilayer Printed Wiring Board Using Sheet Laminates>

接著,說明使用如上述製造之薄片狀層合材料製造多層印刷配線板之方法之一例。 Next, an example of a method of manufacturing a multilayer printed wiring board using the sheet-like laminate produced as described above will be described.

首先,使用真空層合機將薄片狀層合材料層合(laminate)於電路基板之單面或兩面上。電路基板所用之基板列舉為例如玻璃環氧基板、金屬基板、聚酯基 板、聚醯亞胺基板、BT樹脂基板、熱硬化型聚苯醚基板等。又,此處所謂電路基板係指於如上述之基板之單面或兩面上形成經圖型加工之導體層(電路)者。且交互層合導體層與絕緣層而成之多層印刷配線板中,該多層印刷配線板之最外層之單面或兩面為經圖型加工而成之導體層(電路)者亦包含於此處所稱之電路基板中。又導體層表面亦可藉由黑化處理、銅蝕刻等施以預先粗化處理。 First, a sheet laminate is laminated on one or both sides of a circuit board using a vacuum laminator. The substrate used for the circuit substrate is exemplified by, for example, a glass epoxy substrate, a metal substrate, and a polyester base. A plate, a polyimide substrate, a BT resin substrate, a thermosetting polyphenylene ether substrate, or the like. Here, the term "circuit substrate" as used herein refers to a conductor layer (circuit) formed by patterning on one or both sides of a substrate as described above. In the multilayer printed wiring board in which the conductor layer and the insulating layer are alternately laminated, the one or both sides of the outermost layer of the multilayer printed wiring board are patterned and processed into a conductor layer (circuit). It is called in the circuit board. Further, the surface of the conductor layer may be subjected to pre-roughening treatment by blackening treatment, copper etching or the like.

上述層合中,薄片狀層合材料具有保護薄膜時,去除該保護薄膜後,可視需要預加熱薄片狀層合材料及電路基板,邊加壓及加熱薄片狀層合材料邊層合於電路基板上。本發明之薄片狀層合材料中,較好利用真空層合法在減壓下層合於電路基板上之方法。層合條件並無特別限制,但較好在例如壓著溫度(層合溫度)較好設為70~140℃,壓著壓力(層合壓力)較好設為1~11kgf/cm2(9.8×104~107.9×104N/m2),壓著時間(層合時間)較好設為5~180秒,空氣壓設為20mmHg(26.7hPa)以下之減壓條件下進行層合。又,層合方法可為批式亦可為使用輥之連續式。真空層合可使用市售之真空層合機進行。市售之真空層合機可列舉為例如Nichigo Morton(股)製造之真空塗佈機、名機製作所(股)製造之真空加壓式層合機、日立工業(股)製造之滾筒式乾式塗佈機、日立AIC(股)製造之真空層合機等。 In the above lamination, when the sheet-like laminate material has a protective film, after the protective film is removed, the sheet-like laminate material and the circuit substrate may be preheated as needed, and the laminate is laminated on the circuit substrate while pressing and heating the sheet-like laminate material. on. In the sheet-like laminate of the present invention, a method of laminating on a circuit board under reduced pressure by vacuum lamination is preferred. The lamination conditions are not particularly limited, but it is preferably, for example, a pressing temperature (laminating temperature) of 70 to 140 ° C, and a pressing pressure (laminating pressure) of preferably 1 to 11 kgf/cm 2 (9.8). ×10 4 to 107.9 × 10 4 N/m 2 ), the pressing time (lamination time) is preferably 5 to 180 seconds, and the air pressure is set to 20 mmHg (26.7 hPa) or less under reduced pressure. Further, the lamination method may be a batch type or a continuous type using a roll. Vacuum lamination can be carried out using a commercially available vacuum laminator. Commercially available vacuum laminating machines include, for example, a vacuum coater manufactured by Nichigo Morton Co., Ltd., a vacuum press laminator manufactured by a famous machine manufacturer, and a drum type dry coating manufactured by Hitachi Industrial Co., Ltd. Cloth machine, vacuum laminator manufactured by Hitachi AIC Co., Ltd., etc.

將薄片狀層合材料層合於電路基板上後,於冷卻至室溫附近後,剝離支撐體時可藉由剝離、使樹脂組 成物熱硬化形成硬化物,而於電路基板上形成絕緣層。熱硬化之條件只要依據樹脂組成物中之樹脂成分種類、含量等適當選擇即可,但較好在150℃~220℃下20分鐘~180分鐘,更好在160℃~210℃下30分鐘~120分鐘之範圍內選擇。形成絕緣層後,於硬化前未剝離支撐體時,亦可視需要在此時進行剝離。 After laminating the sheet-like laminate material on the circuit board, after cooling to room temperature, the resin can be peeled off by peeling off the support. The resultant is thermally hardened to form a cured product, and an insulating layer is formed on the circuit substrate. The conditions of the heat hardening may be appropriately selected depending on the kind and content of the resin component in the resin composition, but it is preferably from 20 minutes to 180 minutes at 150 ° C to 220 ° C, and more preferably from 30 ° C to 210 ° C for 30 minutes. Choose within 120 minutes. After the insulating layer is formed, when the support is not peeled off before the hardening, the peeling may be performed at this time as needed.

另外,亦可使用真空加壓機將薄片狀層合材料層合於電路基板之單面或兩面上。在減壓下進行加熱及加壓之層合步驟可使用一般真空熱壓機進行。例如,可藉由自支撐體層側加壓經加熱之SUS板等金屬板而進行。加壓條件係設為減壓度通常為1×10-2MPa以下,較好為1×10-3MPa以下之減壓條件。加熱及加壓亦可藉1階段進行,但就控制樹脂滲出之觀點而言以分成2階段以上之條件進行較佳。例如,較好以第一階段之加壓係將溫度設為70~150℃,壓力設為1~15kgf/cm2之範圍,第2階段之加壓係將溫度為150~200℃,壓力設為1~40kgf/cm2之範圍下進行。各階段之時間較好進行30~120分鐘。藉由使該樹脂組成物層熱硬化而可於電路基板上形成絕緣層。市售之真空熱加壓機列舉為例如MNPC-V-750-5-200(名機製作所(股)製造)、VH1-1603(北川精機(股)製造)等。 Alternatively, the sheet laminate may be laminated on one or both sides of the circuit board using a vacuum press. The laminating step of heating and pressurizing under reduced pressure can be carried out using a general vacuum hot press. For example, it can be performed by pressurizing a metal plate such as a heated SUS plate from the side of the support layer. The pressurization condition is a pressure reduction condition of usually 1 × 10 -2 MPa or less, preferably 1 × 10 -3 MPa or less. Heating and pressurization may be carried out in one stage, but it is preferable to carry out the conditions of dividing into two or more stages from the viewpoint of controlling resin bleeding. For example, it is preferred that the temperature in the first stage is 70 to 150 ° C, the pressure is in the range of 1 to 15 kgf / cm 2 , and the pressure in the second stage is 150 to 200 ° C. It is carried out in the range of 1 to 40 kgf/cm 2 . The time of each stage is preferably 30 to 120 minutes. An insulating layer can be formed on the circuit substrate by thermally curing the resin composition layer. Commercially available vacuum heat presses are exemplified by, for example, MNPC-V-750-5-200 (manufactured by Nago Seiki Co., Ltd.), VH1-1603 (manufactured by Kitagawa Seiki Co., Ltd.), and the like.

絕緣層之介電正切較好為0.009以下,更好為0.006以下。介電正切愈低愈好,尤其雖無下限值,但設為0.001以上、0.003以上等。 The dielectric tangent of the insulating layer is preferably 0.009 or less, more preferably 0.006 or less. The lower the dielectric tangent, the better, especially if there is no lower limit, it is 0.001 or more, 0.003 or more, and the like.

接著,對電路基板上形成之絕緣層進行開孔加工形成通孔、貫穿孔。穿孔加工可藉由例如鑽孔機、雷射、電漿等習知方法,且視需要組合該等之方法進行,但最常用之方法為利用二氧化碳雷射、YAG雷射等雷射進行穿孔加工。穿孔加工前未剝離支撐體時則在此時剝離。 Next, the insulating layer formed on the circuit substrate is subjected to a hole forming process to form a through hole and a through hole. The punching process can be performed by a conventional method such as a drill, a laser, a plasma, and the like, and the most common method is to perform punching using a laser such as a carbon dioxide laser or a YAG laser. . When the support is not peeled off before the piercing process, it is peeled off at this time.

接著,對絕緣層表面進行粗化處理。乾式粗化處理時列舉為電漿處理等,濕式粗化處理時列舉為依序進行以膨潤液之膨潤處理、以氧化劑之粗化處理及以中和液之中和處理的方法。濕式粗化處理者,就可邊於絕緣層表面形成凹凸之錨定物(anchor),邊去除貫穿孔內之膠渣(smear)方面係較佳。利用膨潤液之膨潤處理係藉由使絕緣層在50~80℃浸漬於膨潤液中5~20分鐘(較好在55~70℃下8~15分鐘)進行。膨潤液之例列舉為鹼溶液、界面活性劑溶液等,較好為鹼溶液,該鹼溶液列舉為例如氫氧化鈉溶液、氫氧化鉀溶液等。市售之膨潤劑可列舉出例如日本ATOTECH(股)製造之Swelling Dip Securiganth P、Swelling Dip Securiganth SBU等。利用氧化劑之粗化處理係使絕緣層在60~80℃下浸漬於氧化劑溶液中10~30分鐘(較好在70~80℃下15~25分鐘)而進行。至於氧化劑可列舉出例如使過錳酸鉀或過錳酸鈉溶解於氫氧化鈉之水溶液中之鹼性過錳酸溶液、重鉻酸鹽、臭氧、過氧化氫/硫酸、硝酸等。且,鹼性過錳酸溶液中之過錳酸鹽濃度較好為5~10重量%。市售之氧化劑列舉為例如日本ATOTECH(股)製造之Concentrate.Compact CP、Dozing Solution Securiganth P等鹼性過錳酸溶液。利用中和液之中和處理係在30~50℃浸漬於中和液中3~10分鐘(較好於35~45℃下3~8分鐘)而進行。至於中和液較好為酸性水溶液,市售品列舉為例如日本ATOTECH(股)製造之Reduction Solution Securiganth P。 Next, the surface of the insulating layer is roughened. The dry roughening treatment is exemplified by a plasma treatment or the like, and the wet roughening treatment is a method in which a swelling treatment of a swelling liquid, a roughening treatment with an oxidizing agent, and a neutralization treatment with a neutralizing liquid are sequentially performed. In the wet roughening treatment, it is preferable to form an anchor of the unevenness on the surface of the insulating layer, and to remove the smear in the through hole. The swelling treatment by the swelling liquid is carried out by immersing the insulating layer in the swelling liquid at 50 to 80 ° C for 5 to 20 minutes (preferably at 55 to 70 ° C for 8 to 15 minutes). Examples of the swelling liquid are exemplified by an alkali solution, a surfactant solution, etc., and an alkali solution is preferred. The alkali solution is exemplified by, for example, a sodium hydroxide solution, a potassium hydroxide solution or the like. Commercially available swelling agents include, for example, Swelling Dip Securiganth P, Swelling Dip Securiganth SBU, and the like manufactured by ATOTECH Co., Ltd., Japan. The roughening treatment using an oxidizing agent is performed by immersing the insulating layer in an oxidizing agent solution at 60 to 80 ° C for 10 to 30 minutes (preferably at 70 to 80 ° C for 15 to 25 minutes). The oxidizing agent may, for example, be an alkaline permanganic acid solution, dichromate, ozone, hydrogen peroxide/sulfuric acid, nitric acid or the like in which potassium permanganate or sodium permanganate is dissolved in an aqueous solution of sodium hydroxide. Further, the permanganate concentration in the alkaline permanganic acid solution is preferably from 5 to 10% by weight. Commercially available oxidizing agents are listed, for example, as Concentrate manufactured by ATOTECH Co., Ltd. of Japan. Compact CP, Dozing Solution Securiganth P and other alkaline permanganic acid solutions. The neutralization solution and the treatment system are immersed in the neutralization solution at 30 to 50 ° C for 3 to 10 minutes (preferably at 35 to 45 ° C for 3 to 8 minutes). The neutralizing liquid is preferably an acidic aqueous solution, and the commercial product is exemplified by Reduction Solution Securiganth P manufactured by ATOTECH Co., Ltd., Japan.

絕緣層表面經粗化處理之粗化面的粗糙度,就形成微細配線之觀點而言,Ra值較好為200nm以下,更好為150nm以下,又更好為100nm以下。且為確保粗化面之錨定效果較好為10nm以上。又,所謂Ra值係表示表面粗糙度之數值的一種,且係稱為算術平均粗糙度者,具體而言係在測定區域內測定距平均線的表面之變化高度的絕對值並予以算術平均者。例如,可使用Veeco Instruments公司製造之WYKONT 3300,利用VSI接觸模式,以50倍透鏡,測定範圍為121μm×92μm所得之數值求出。 The roughness of the roughened surface on which the surface of the insulating layer is roughened is preferably 200 nm or less, more preferably 150 nm or less, and still more preferably 100 nm or less from the viewpoint of forming fine wiring. And to ensure the anchoring effect of the roughened surface is preferably 10 nm or more. Further, the Ra value is a type of numerical value of the surface roughness, and is called an arithmetic mean roughness. Specifically, the absolute value of the height of the change from the surface of the average line is measured in the measurement region and the arithmetic average is performed. . For example, WYKONT 3300 manufactured by Veeco Instruments Co., Ltd. can be used, and the VSI contact mode can be used to obtain a value obtained by measuring a range of 121 μm × 92 μm with a 50-fold lens.

另外,均方根粗糙度(Rq值)由於係反映絕緣層表面之局部狀態,故發現可藉由Rq值之掌握確認成為緻密且平滑之絕緣層表面,使剝離強度穩定化。為了成為緻密且平滑之絕緣層表面,Rq值較好為250nm以下,更好為200nm以下,又更好為150nm以下,再更好為100nm以下。另就使剝離強度穩定化之觀點而言,較好為15nm以上,更好為30nm以上。又,所謂Rq值係表示表面粗糙度之數值的一種,係稱為均方根粗糙度者,具體而言係以在測定區域內測定距平均線的表面之變化高度的絕 對值並作為均方根予以表示者。 Further, since the root mean square roughness (Rq value) reflects the local state of the surface of the insulating layer, it has been found that the surface of the insulating layer which is dense and smooth can be confirmed by the Rq value, and the peel strength is stabilized. In order to form a dense and smooth insulating layer surface, the Rq value is preferably 250 nm or less, more preferably 200 nm or less, still more preferably 150 nm or less, still more preferably 100 nm or less. Further, from the viewpoint of stabilizing the peel strength, it is preferably 15 nm or more, more preferably 30 nm or more. Further, the Rq value indicates one of the numerical values of the surface roughness, and is called a root mean square roughness, specifically, the height of the change from the surface of the average line in the measurement region. The value is expressed as a root mean square.

接著,藉由乾式鍍敷或濕式鍍敷在絕緣層上形成導體層。乾式鍍敷可使用蒸鍍、濺鍍、離子電鍍等習知方法。濕式鍍敷舉例有組合無電解鍍敷與電解鍍敷形成導體層之方法、形成與導體層相反圖型之鍍敷阻劑,且僅以無電解鍍敷形成導體層之方法等。至於隨後之圖型形成方法可使用例如本技藝者習知之減去(subtractive)法、半添加法等,且可藉由重複複數次之上述一連串步驟,多段地層合增層而製造多層印刷配線板。 Next, a conductor layer is formed on the insulating layer by dry plating or wet plating. Dry plating can be carried out by a conventional method such as vapor deposition, sputtering, or ion plating. The wet plating is exemplified by a method of forming a conductor layer by electroless plating and electrolytic plating, a plating resist which forms a pattern opposite to the conductor layer, and a method of forming a conductor layer only by electroless plating. As for the subsequent pattern forming method, for example, a subtractive method, a semi-additive method, or the like which is conventionally known to those skilled in the art can be used, and a multilayer printed wiring board can be manufactured by repeating the above-described series of steps in a plurality of stages. .

絕緣層與導體層之剝離強度為了使絕緣層與導體層充分密著,較好為0.35kgf/cm以上,更好為0.4kgf/cm以上。剝離強度之上限值越高越好,雖未特別限制,但一般為1.5kgf/cm以下、1.2kgf/cm以下、1.0kgf/cm以下、0.8kgf/cm以下等。本發明之印刷配線板用絕緣體之絕緣層由於粗糙度低,絕緣層與導體層之剝離強度高,故可較好地使用作為多層印刷配線板之增層。 The peeling strength between the insulating layer and the conductor layer is preferably 0.35 kgf/cm or more, more preferably 0.4 kgf/cm or more, in order to sufficiently adhere the insulating layer to the conductor layer. The upper limit of the peel strength is preferably as high as possible, and is not particularly limited, but is generally 1.5 kgf/cm or less, 1.2 kgf/cm or less, 1.0 kgf/cm or less, and 0.8 kgf/cm or less. Since the insulating layer of the insulator for a printed wiring board of the present invention has a low roughness and a high peeling strength between the insulating layer and the conductor layer, it can be preferably used as a build-up layer of a multilayer printed wiring board.

〈半導體裝置〉 <Semiconductor device>

藉由使用本發明之多層印刷配線板可製造半導體裝置。亦即,本發明之半導體裝置包含本發明之多層印刷配線板。可藉由在本發明之多層印刷配線板之導通部位,安裝半導體晶片而製造半導體裝置。所謂「導通部位」係「多層印刷配線板中傳導電訊號之部位」,其位置可為表面,亦可為經埋入之位置均可。且,半導體晶片若為以半 導體為材料之電性電路元件則無特別限制。 A semiconductor device can be manufactured by using the multilayer printed wiring board of the present invention. That is, the semiconductor device of the present invention comprises the multilayer printed wiring board of the present invention. A semiconductor device can be manufactured by mounting a semiconductor wafer on a conductive portion of the multilayer printed wiring board of the present invention. The "conduction portion" is a "portion of a conductive signal in a multilayer printed wiring board", and the position may be a surface or a buried position. And, if the semiconductor wafer is half The electrical circuit component in which the conductor is a material is not particularly limited.

製造本發明之半導體裝置時之半導體晶片之安裝方法若為使半導體晶片有效發揮功能,則無特別限制,具體列舉為金屬線黏合安裝方法、覆晶安裝方法、利用作成突塊之增層(BBUL)之安裝方法、利用異向性導電膜(ACF)之安裝方法、利用非導電性膜(NCF)之安裝方法等。 The method of mounting the semiconductor wafer in the manufacture of the semiconductor device of the present invention is not particularly limited as long as the semiconductor wafer is effectively functioned, and specifically, a metal wire bonding method, a flip chip mounting method, and a buildup using a bump (BBUL) The mounting method, the mounting method using an anisotropic conductive film (ACF), the mounting method using a non-conductive film (NCF), and the like.

[實施例] [Examples]

以下使用實施例及比較例更詳細說明本發明,但本發明並不因該等實施例等而受到限制。又,以下之記載中,「份」及「%」意指「質量份」及「質量%」。 Hereinafter, the present invention will be described in more detail by way of examples and comparative examples, but the invention is not limited by the examples and the like. In the following description, "parts" and "%" mean "parts by mass" and "% by mass".

測定方法.評價方法 test methods. Evaluation method

〈層合體之剝離強度(peel strength)之測定、算術平均粗糙鍍(Ra)、均方根粗糙度(Rq)之測定〉 <Measurement of peel strength of the laminate, arithmetic mean rough plating (Ra), and measurement of root mean square roughness (Rq)>

(1)層合板之底層處理 (1) Underlayer treatment of laminate

將形成有內層電路之玻璃布基材環氧樹脂兩面貼銅層合板(銅箔厚度18μm,殘銅率60%,基板厚0.3mm,松下電工(股)製之R5715ES)之兩面浸漬於Merck(股)製造之CZ8100中,進行銅箔表面之粗化處理。 The glass cloth substrate with the inner layer circuit formed on both sides of the copper-clad laminate (copper foil thickness 18 μm, residual copper ratio 60%, substrate thickness 0.3 mm, Matsushita Electric Co., Ltd. R5715ES) was immersed in Merck on both sides. In the CZ8100 manufactured by the company, the surface of the copper foil is roughened.

(2)接著薄膜之層合 (2) followed by lamination of the film

使用批式真空加壓層合機MVLP-500[名機製作所(股)製,商品名],將下述各實施例及各比較例中作成之接著薄膜層合於上述層合板之兩面。層合係藉由在30秒減壓使氣壓成為13hPa以下,隨後之30秒以100℃、壓力0.74MPa壓著而進行。 Using a batch vacuum pressure laminator MVLP-500 [manufactured by Nago Seiki Co., Ltd., trade name], the following films prepared in the following examples and comparative examples were laminated on both surfaces of the laminate. The laminating system was carried out by depressurizing at 30 seconds to bring the gas pressure to 13 hPa or less, followed by pressing at 100 ° C and a pressure of 0.74 MPa for 30 seconds.

(3)樹脂組成物之硬化 (3) Hardening of resin composition

自經層合之接著薄膜剝離PET膜,以170℃、30分鐘之硬化條件使樹脂組成物硬化作成絕緣層。 The PET film was peeled off from the film which was laminated, and the resin composition was cured at 170 ° C for 30 minutes to form an insulating layer.

(4)粗化處理 (4) roughening treatment

將形成有絕緣層之上述層合板在60℃下浸漬於膨潤液的日本ATOTECH(股)之含有二乙二醇單丁醚之Swelling Dip Securiganth P中10分鐘,接著於80℃浸漬於作為粗化液之日本ATOTECH(股)製造之Concentrate .Compact P(KMnO4:60g/L,NaOH:40g/L之水溶液)中20分鐘,最後在40℃下浸漬於作為中和液之日本ATOTECH(股)製之Reduction Solution Securiganth P中5分鐘。將該粗化處理後之層合板作為樣品A。 The above-mentioned laminate in which the insulating layer was formed was immersed in Swelling Dip Securiganth P containing diethylene glycol monobutyl ether in Japan ATOTECH Co., Ltd. at 60 ° C for 10 minutes, and then immersed at 80 ° C for coarsening. Concentrate manufactured by Japan ATOTECH Co., Ltd. In a Compact P (KMnO 4 : 60 g/L, NaOH: 40 g/L aqueous solution), it was immersed in a Reduction Solution Securiganth P manufactured by Atotech Co., Ltd., Japan as a neutralizing solution for 5 minutes at 40 ° C for 5 minutes. The roughened laminate was used as sample A.

(5)利用半添加工法之導體層形成 (5) Formation of a conductor layer by a semi-additive method

為了在絕緣層表面上形成電路,而將樣品A之層合板浸漬於含PdCl2之無電解鍍敷用溶液中,接著浸漬於無電解銅鍍敷液中。在150℃加熱30分鐘進行退火後,形成蝕 刻阻劑圖型,且藉由蝕刻形成圖型後,進行硫酸銅電解鍍敷,以30μm厚形成導體層。接著,在180℃進行退火處理60分鐘。將該層合板作為樣品B。 In order to form a circuit on the surface of the insulating layer, the laminate of Sample A was immersed in a solution for electroless plating containing PdCl 2 and then immersed in an electroless copper plating solution. After annealing at 150 ° C for 30 minutes and annealing, an etching resist pattern was formed, and after patterning by etching, copper sulfate electrolytic plating was performed to form a conductor layer with a thickness of 30 μm. Next, annealing treatment was performed at 180 ° C for 60 minutes. This laminate was used as sample B.

(6)算術平均粗糙度(Ra值)、均方根粗糙度(Rq值)之測定 (6) Determination of arithmetic mean roughness (Ra value) and root mean square roughness (Rq value)

針對樣品A,由使用非接觸型表面粗糙度計(Veeco Instruments公司製之WYKONT3300),藉由VSI接觸模式,以50倍透鏡,測定範圍設為121μm×92μm所得之數值求出Ra、Rq值。接著,將藉由求出各10點之平均值而得之數值作為測定值。 For the sample A, Ra and Rq values were determined from a value obtained by using a non-contact surface roughness meter (WYKONT 3300 manufactured by Veeco Instruments Co., Ltd.) in a VSI contact mode with a 50-fold lens and a measurement range of 121 μm × 92 μm. Next, a numerical value obtained by obtaining an average value of each of 10 points was used as a measured value.

(7)導體層之剝離強度(peel strength)之測定 (7) Determination of peel strength of the conductor layer

對樣品B之導體層之一部分作成圍出寬10mm、長100mm之範圍之切口,以剝離治具(TSI股份有限公司,AUTOCOM型試驗機AC-50C-SL)夾住短條狀導體層之一端,在室溫下,測定以50mm/分鐘之速度朝垂直方向剝離35mm時之荷重(kgf/cm)。 A portion of the conductor layer of the sample B was formed to have a slit having a width of 10 mm and a length of 100 mm, and the stripping fixture (TSI Co., Ltd., AUTOCOM type testing machine AC-50C-SL) was clamped to one end of the short strip conductor layer. The load (kgf/cm) at a time of peeling 35 mm in the vertical direction at a speed of 50 mm/min was measured at room temperature.

〈介電正切之測定〉 <Measurement of dielectric tangent>

使下述各實施例及各比較例所得之接著薄膜在190℃熱硬化90分鐘,剝離PET膜獲得薄片狀之硬化物。將該硬化物切斷成寬2mm、長80mm之試驗片,使用關東應用電子開發(股)製之空洞共振器攝動法介電率測定裝置 CP521及Agilent Technology(股)製之網路分析儀(network analyzer)E8362B,以空洞共振法,以測定頻率5.8GHz進行介電正切(tanδ)之測定。針對2片試驗片進行測定,算出平均值。 The adhesive film obtained in each of the following Examples and Comparative Examples was thermally cured at 190 ° C for 90 minutes, and the PET film was peeled off to obtain a flaky cured product. The cured product was cut into a test piece having a width of 2 mm and a length of 80 mm, and a cavity resonator perturbation dielectric constant measuring device manufactured by Kanto Applied Electronics Co., Ltd. was used. CP521 and Agilent Technology's network analyzer E8362B were measured by a cavity resonance method at a measurement frequency of 5.8 GHz for tangent tanδ (tan δ). The measurement was performed on two test pieces, and the average value was calculated.

實施例1 Example 1

邊在甲基乙基酮(以下簡稱為「MEK」)15份、環己銅15份中攪拌液狀雙酚A型環氧樹脂(環氧當量180,三菱化學(股)製之「828US」)15份、聯苯型環氧樹脂(環氧當量291,日本化藥(股)製之「NC3000H」)15份,邊加熱溶解。隨後,混合萘型活性酯化合物[DIC(股)製之「EXB9411-65BK」,活性酯當量272,固體成分65%之甲苯溶液]43份、硬化促進劑[廣榮化學工業(股)製,「4-二甲胺基吡啶」]0.15份、球形二氧化矽[平均粒徑0.5μm,經苯基胺基矽烷處理之「SO-C2」,ADMATECHS(股)製,每單位質量之碳量0.18%]100份、苯氧樹脂(YL6954BH30,固體成分30質量%之MEK溶液,重量平均分子量40000)15份,以高速旋轉混練機均勻分散,製作樹脂漆料。接著,以使乾燥後之樹脂厚度成為40μm之方式以模嘴塗佈器將該樹脂漆料塗佈於聚對苯二甲酸乙二酯(厚度38μm,以下簡稱為「PET」)薄膜上,在80~120℃(平均100℃)乾燥6分鐘,獲得薄片狀之接著薄膜。 A liquid bisphenol A type epoxy resin (epoxy equivalent weight 180, "828US" manufactured by Mitsubishi Chemical Corporation) was stirred in 15 parts of methyl ethyl ketone (hereinafter referred to as "MEK") and 15 parts of cyclohexyl copper. 15 parts of a biphenyl type epoxy resin (epoxy equivalent 291, "NC3000H" manufactured by Nippon Kayaku Co., Ltd.) was dissolved in 15 parts. Subsequently, a naphthalene type active ester compound [EXB9411-65BK, which is manufactured by DIC Co., Ltd., an active ester equivalent of 272, a toluene solution of 65% solid content], and a hardening accelerator [Golden Chemical Industry Co., Ltd., "4-dimethylaminopyridine" 0.15 parts, spherical cerium oxide [average particle size 0.5 μm, "SO-C2" treated with phenylamino decane, ADMATECHS (manufactured by ADMATECHS), carbon amount per unit mass 0.18%] 100 parts, 15 parts of a phenoxy resin (YL6954BH30, a MEK solution having a solid content of 30% by mass, a weight average molecular weight of 40,000), and uniformly dispersed by a high-speed rotary kneader to prepare a resin paint. Next, the resin paint was applied onto a film of polyethylene terephthalate (thickness: 38 μm, hereinafter abbreviated as "PET") by a die coater so that the thickness of the resin after drying became 40 μm. It was dried at 80 to 120 ° C (average 100 ° C) for 6 minutes to obtain a sheet-like adhesive film.

實施例2 Example 2

除了將實施例1之萘型活性酯化合物[DIC(股)製之「EXB9411-65BK」,活性酯當量272,固體成分65%之甲苯溶液]43份變更為80份以外,餘與實施例1完全相同,製作樹脂漆料。接著與實施例1同樣獲得接著薄膜。 Except that the 43 parts of the naphthalene type active ester compound of Example 1 [EXB9411-65BK, active ester equivalent 272, solid content 65% toluene solution] were changed to 80 parts, the same as Example 1 It is exactly the same, making resin paint. Next, a film was obtained in the same manner as in Example 1.

實施例3 Example 3

除了將實施例1之萘型活性酯化合物[DIC(股)製之「EXB9411-65BK」,活性酯當量272,固體成分65%之甲苯溶液]43份變更為20份以外,餘與實施例1完全相同,製作樹脂漆料。接著與實施例1同樣獲得接著薄膜。 Except that the 43 parts of the naphthalene type active ester compound of Example 1 [EXB9411-65BK, active ester equivalent 272, solid content 65% toluene solution] were changed to 20 parts, the same as Example 1 It is exactly the same, making resin paint. Next, a film was obtained in the same manner as in Example 1.

實施例4 Example 4

除了將實施例1之聯苯型環氧樹脂[環氧當量291,日本化藥(股)製之「NC3000H」]15份變更為萘酚型環氧樹脂[環氧當量332,新日鐵化學(股)製之「ESN475V」]15份,且添加氰酸酯樹脂(LONZA公司製「BA230S75」,固體成分75%之甲基乙基酮溶液)15份與硬化觸媒[環烷酸鋅礦油精溶液(金屬含量8%)之3%環己酮稀釋液]0.03份以外,餘與實施例3完全相同,製作樹脂漆料。接著與實施例1同樣獲得接著薄膜。 In addition, 15 parts of the biphenyl type epoxy resin of the first embodiment (epoxy equivalent 291, "NC3000H" manufactured by Nippon Kayaku Co., Ltd.] was changed to a naphthol type epoxy resin [epoxy equivalent 332, Nippon Steel Chemical Co., Ltd. 15 parts of "ESN475V" made by (share), and added cyanate resin ("BA230S75" manufactured by LONZA Co., Ltd., 75% methyl ethyl ketone solution of solid content) 15 parts and hardening catalyst [zinc naphthenate A resin paint was prepared in the same manner as in Example 3 except that the olein solution (metal content: 8%) of 3% cyclohexanone diluted solution] was 0.03 parts. Next, a film was obtained in the same manner as in Example 1.

比較例1 Comparative example 1

除了將實施例1之萘型活性酯化合物[DIC(股)製之 「EXB9411-65BK」,活性酯當量272,固體成分65%之甲苯溶液]43份變更為活性酯化合物[DIC(股)製之「HPC8000-65T」,活性酯當量223,固體成分65%之甲苯溶液]35份,且將球形二氧化矽[平均粒徑0.5μm,經苯基胺基矽烷處理之「SO-C2」,ADMATECHS(股)製,每單位質量之碳量0.18%]100份變更為90份,將硬化促進劑[廣榮化學工業(股)製,「4-二甲胺基吡啶」]0.15份變更為0.1份以外,餘與實施例1完全相同,製作樹脂漆料。接著與實施例1同樣獲得接著薄膜。 In addition to the naphthalene type active ester compound of Example 1 [DIC] 43 parts of "EXB9411-65BK", active ester equivalent 272, solid solution 65% toluene solution] was changed to active ester compound [HPC8000-65T by DIC, active ester equivalent 223, solid content 65% toluene Solution] 35 parts, and spherical cerium oxide [average particle size 0.5 μm, "SO-C2" treated with phenylamino decane, ADMATECHS (share), carbon content per unit mass of 0.18%] 100 parts change A resin paint was prepared in the same manner as in Example 1 except that 0.15 parts of a hardening accelerator [manufactured by Kwong Wing Chemical Industry Co., Ltd., "4-dimethylaminopyridine") was changed to 0.1 part. Next, a film was obtained in the same manner as in Example 1.

比較例2 Comparative example 2

除了將實施例1之萘型活性酯化合物[DIC(股)製之「EXB9411-65BK」,活性酯當量272,固體成分65%之甲苯溶液]43份變更為95份以外,餘與實施例1完全相同,製作樹脂漆料。接著與實施例1同樣獲得接著薄膜。 Except that the 43 parts of the naphthalene type active ester compound of Example 1 [EXB9411-65BK, active ester equivalent 272, solid content 65% toluene solution] were changed to 95 parts, the same as Example 1 It is exactly the same, making resin paint. Next, a film was obtained in the same manner as in Example 1.

使用實施例及比較例中製造之接著薄膜之評價樣品的導體層之剝離強度、粗化處理後之表面粗糙度(Ra值)及(Rq值)、評價樣品之介電正切之各測定結果示於表1。 The peeling strength of the conductor layer, the surface roughness (Ra value) after the roughening treatment, and the (Rq value) of the evaluation sample of the adhesive film produced in the examples and the comparative examples, and the measurement results of the dielectric tangent of the evaluation sample were shown. In Table 1.

如表1所示,將實施例1之環氧樹脂組成物中之含萘構造之活性酯化合物變更為本發明範圍外之活性酯化合物之比較例1的環氧樹脂組成物之硬化物,經粗化處理後之Ra、Rq之數值儘管顯示遠比實施例1之環氧樹脂組成物之硬化物之表面上形成之粗化面的Ra、Rq之數值大之數值,但與導體層之密著性(剝離強度)比實施例1者小,且介電正切之數值變大。 As shown in Table 1, the cured ester compound containing the naphthalene structure in the epoxy resin composition of Example 1 was changed to the cured product of the epoxy resin composition of Comparative Example 1 of the active ester compound outside the scope of the present invention. The values of Ra and Rq after the roughening treatment are large compared with the values of Ra and Rq of the roughened surface formed on the surface of the cured product of the epoxy resin composition of Example 1, but are dense with the conductor layer. The properties (peel strength) were smaller than those of Example 1, and the value of dielectric tangent became large.

另外,比較例2之環氧樹脂組成物由於含萘構造之活性酯化合物之調配量多到超過本發明之範圍,故與導體層之密著性(剝離強度)比實施例1者更小。 Further, in the epoxy resin composition of Comparative Example 2, since the compounding amount of the active ester compound having a naphthalene structure was more than the range of the present invention, the adhesion (peeling strength) to the conductor layer was smaller than that of the first embodiment.

由以上之實施例及比較例之結果可了解,本發明之環氧樹脂組成物係可形成由平衡良好地具備可對應於多層印刷配線板之增層之更多層化、高密度化之特性的硬化物所成之絕緣層的環氧樹脂組成物。 As is apparent from the results of the above examples and comparative examples, the epoxy resin composition of the present invention can be formed to have more stratified and high-density characteristics which are compatible with the buildup of the multilayer printed wiring board. The epoxy resin composition of the insulating layer formed by the cured material.

Claims (14)

一種熱硬化性環氧樹脂組成物,其係至少含有環氧樹脂(A)與含萘構造之活性酯化合物(B)之熱硬化性環氧樹脂組成物,其中使前述熱硬化性環氧樹脂組成物中之不揮發成分為100質量%時,前述含萘構造之活性酯化合物(B)的含量為0.1~30質量%。 A thermosetting epoxy resin composition comprising at least an epoxy resin (A) and a thermosetting epoxy resin composition containing an active ester compound (B) having a naphthalene structure, wherein the thermosetting epoxy resin is used When the nonvolatile content in the composition is 100% by mass, the content of the active ester compound (B) having a naphthalene structure is 0.1 to 30% by mass. 如請求項1之熱硬化性環氧樹脂組成物,其中前述含萘構造之活性酯化合物(B)係具有聚氧化萘構造與芳基羰氧基之活性酯化合物。 The thermosetting epoxy resin composition according to claim 1, wherein the active ester compound (B) having a naphthalene structure has an active ester compound of a polyoxynaphthalene structure and an arylcarbonyloxy group. 如請求項1之熱硬化性環氧樹脂組成物,其中前述含萘構造之活性酯化合物(B)係於聚氧化萘構造之萘核上已鍵結芳基羰氧基之活性酯化合物。 The thermosetting epoxy resin composition according to claim 1, wherein the active ester compound (B) having a naphthalene structure is an active ester compound in which an arylcarbonyloxy group has been bonded to a naphthalene nucleus of a polyoxynaphthalene structure. 如請求項1之熱硬化性環氧樹脂組成物,其中前述環氧樹脂(A)含有液狀之環氧樹脂。 The thermosetting epoxy resin composition according to claim 1, wherein the epoxy resin (A) contains a liquid epoxy resin. 如請求項1之熱硬化性環氧樹脂組成物,其係進而含有無機填充材。 The thermosetting epoxy resin composition of claim 1, which further comprises an inorganic filler. 如請求項1之熱硬化性環氧樹脂組成物,其係進而含有熱可塑性樹脂。 The thermosetting epoxy resin composition of claim 1, which further comprises a thermoplastic resin. 如請求項1之熱硬化性環氧樹脂組成物,其係藉由鍍敷而形成導體層之多層印刷配線板之絕緣層用樹脂組成物。 The thermosetting epoxy resin composition of claim 1, which is a resin composition for an insulating layer of a multilayer printed wiring board in which a conductor layer is formed by plating. 一種絕緣層形成用接著薄膜,其係於支撐薄膜上設置有由如請求項1~7中任一項之熱硬化性環氧樹脂組成 物所成之樹脂組成物層而成者。 An adhesive film for forming an insulating layer, which is provided on a support film and is provided with a thermosetting epoxy resin according to any one of claims 1 to 7. The resin composition layer formed by the object. 一種絕緣層形成用預浸體,其係將如請求項1~7中任一項之熱硬化性環氧樹脂組成物含浸於薄片狀纖維基材中而成者。 A prepreg for forming an insulating layer, which is obtained by impregnating a thermosetting epoxy resin composition according to any one of claims 1 to 7 into a sheet-like fibrous base material. 一種印刷配線板用絕緣體,其係由如請求項8之絕緣層形成用接著薄膜之樹脂組成物層或如請求項9之絕緣層形成用預浸體之任一者之硬化物所成者。 An insulator for a printed wiring board, which is obtained by the resin composition layer of the adhesive film for forming an insulating layer of claim 8 or the cured product for forming a prepreg for insulating layer according to claim 9. 一種印刷配線板用絕緣體,其係於由如請求項10之印刷配線板用絕緣體所成之絕緣層上設置有經圖型加工之導體層而成者。 An insulator for a printed wiring board, which is obtained by providing a patterned conductor layer on an insulating layer made of an insulator for a printed wiring board according to claim 10. 如請求項10或11之印刷配線板用絕緣體,其中前述絕緣層之表面粗糙度Ra係10~200nm,Rq係15~250nm,前述絕緣層與前述導體層之剝離強度係0.35kgf/cm以上。 The insulator for a printed wiring board according to claim 10, wherein the insulating layer has a surface roughness Ra of 10 to 200 nm, Rq of 15 to 250 nm, and a peel strength of the insulating layer and the conductor layer of 0.35 kgf/cm or more. 一種多層印刷配線板,其係如請求項11或12之印刷配線板用絕緣體複數層合而成者。 A multilayer printed wiring board obtained by laminating a plurality of insulators for a printed wiring board according to claim 11 or 12. 一種半導體裝置,其係包含如請求項13之多層印刷配線板者。 A semiconductor device comprising the multilayer printed wiring board of claim 13.
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