TW201500452A - Curable resin composition - Google Patents

Curable resin composition Download PDF

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TW201500452A
TW201500452A TW103109641A TW103109641A TW201500452A TW 201500452 A TW201500452 A TW 201500452A TW 103109641 A TW103109641 A TW 103109641A TW 103109641 A TW103109641 A TW 103109641A TW 201500452 A TW201500452 A TW 201500452A
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resin composition
curable resin
resin
mass
epoxy resin
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TWI624508B (en
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Shiro Tatsumi
Yoshio Nishimura
Miki Matsuyama
Kenji Kawai
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Ajinomoto Kk
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L71/00Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers
    • C08L71/08Polyethers derived from hydroxy compounds or from their metallic derivatives
    • C08L71/10Polyethers derived from hydroxy compounds or from their metallic derivatives from phenols
    • C08L71/12Polyphenylene oxides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/02Polycondensates containing more than one epoxy group per molecule
    • C08G59/04Polycondensates containing more than one epoxy group per molecule of polyhydroxy compounds with epihalohydrins or precursors thereof
    • C08G59/06Polycondensates containing more than one epoxy group per molecule of polyhydroxy compounds with epihalohydrins or precursors thereof of polyhydric phenols
    • C08G59/08Polycondensates containing more than one epoxy group per molecule of polyhydroxy compounds with epihalohydrins or precursors thereof of polyhydric phenols from phenol-aldehyde condensates
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/4007Curing agents not provided for by the groups C08G59/42 - C08G59/66
    • C08G59/4014Nitrogen containing compounds
    • C08G59/4028Isocyanates; Thioisocyanates
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • C08G59/4284Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof together with other curing agents
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G65/00Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
    • C08G65/34Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives
    • C08G65/48Polymers modified by chemical after-treatment
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0326Organic insulating material consisting of one material containing O
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/002Physical properties
    • C08K2201/005Additives being defined by their particle size in general

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)

Abstract

To provide a curable resin composition with not only excellent elongation rate at break, low arithmetic average coarseness on the surface of insulation layer and low root-mean-square coarseness in the wet coarsening step, but also capable of forming thereon the plating conductor layer having adequate peeling strength and low linear thermal expansion coefficient. The curable resin composition containing (A) a phenoxy resin containing anthracene structure, (B) an expoxy resin, and (C) a curing agent. Also, in the occasion in that the total of aforementioned (A) phenoxy resin, (B) expoxy resin, and (C) curing agent is 100 mass%, the curable resin composition is characterized in that the aforementioned (A) phenoxy resin is 1-15 mass% and the epoxy equivalent of the aforementioned (A) phenoxy resin is above 5000.

Description

硬化性樹脂組成物 Curable resin composition

本發明係關於硬化性的樹脂組成物。進而本發明係關於含有該硬化性樹脂組成物的絕緣層用硬化性樹脂組成物、薄片狀層合材料、多層印刷配線板、半導體裝置。 The present invention relates to a curable resin composition. Further, the present invention relates to a curable resin composition for an insulating layer containing the curable resin composition, a sheet-like laminate, a multilayer printed wiring board, and a semiconductor device.

近年隨電子機器的小型化、高性能化進展,多層印刷配線板中,增層被複層化,追求配線的微細化及高密度化。 In recent years, in the multilayer printed wiring board, the build-up of the multilayered printed wiring board has been stratified, and the wiring has been made finer and higher in density.

對於此,採取種種方式。例如專利文獻1揭示使用特定構造之高分子環氧樹脂作為印刷配線板用之樹脂組成物,改善耐熱性、低吸水性、電的特性、成形性、可撓性、耐衝撃性及接著性(請求項及段落編號0003等)。但,專利文獻1並未揭示將具有蒽構造的苯氧基樹脂、環氧樹脂及硬化劑以特定比率組合、及使用具有特定環氧當量之苯氧基樹脂。又,專利文獻2雖揭示具有蒽構造的環氧樹脂,但並未揭示將苯氧基樹脂、環氧樹脂及硬化劑以特定比率組合、及使用具有特定環氧當量的苯氧基 樹脂。 For this, there are various ways. For example, Patent Document 1 discloses that a polymer epoxy resin having a specific structure is used as a resin composition for a printed wiring board, and heat resistance, low water absorbability, electrical properties, moldability, flexibility, impact resistance, and adhesion are improved ( Request item and paragraph number 0003, etc.). However, Patent Document 1 does not disclose that a phenoxy resin having an oxime structure, an epoxy resin, and a curing agent are combined at a specific ratio, and a phenoxy resin having a specific epoxy equivalent is used. Further, although Patent Document 2 discloses an epoxy resin having a fluorene structure, it is not disclosed that a phenoxy resin, an epoxy resin, and a curing agent are combined at a specific ratio, and a phenoxy group having a specific epoxy equivalent is used. Resin.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開2003-252951號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2003-252951

[專利文獻2]日本特開2005-255813號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2005-255813

本發明所欲解決之課題在於提供不僅具有特定強度(斷裂延伸率),濕式粗化步驟中,絕緣層表面的算術平均粗度低,方均根粗度亦低(低粗度),且於其上可形成具有充分的剝撕強度的鍍敷導體層,且線熱膨脹係數亦低的硬化性樹脂組成物。 The problem to be solved by the present invention is to provide not only a specific strength (elongation at break) but also a low average arithmetic mean roughness of the surface of the insulating layer and a low root mean square roughness (low thickness) in the wet roughening step, and A plated conductor layer having sufficient peeling strength and a curable resin composition having a low coefficient of thermal expansion of the wire can be formed.

本發明者們為了解決上述課題努力研究的結果,發現同時含有具有特定量且特定環氧當量的(A)具有蒽構造的苯氧基樹脂、(B)環氧樹脂及(C)硬化劑的樹脂組成物及其熱硬化物,可達成上述的優異的強度、低粗度、高的剝撕強度及低的線熱膨脹係數,而完成本發明。 In order to solve the above problems, the inventors of the present invention have found that (A) a phenoxy resin having a fluorene structure, (B) an epoxy resin, and (C) a curing agent having a specific amount and a specific epoxy equivalent are contained. The resin composition and the thermosetting product thereof can achieve the above-described excellent strength, low thickness, high peeling strength, and low coefficient of linear thermal expansion, and the present invention has been completed.

亦即,本發明為包含以下的態樣者。 That is, the present invention is intended to include the following aspects.

〔1〕一種硬化性樹脂組成物,其係含有(A)具有蒽構造的苯氧基樹脂、(B)環氧樹脂、及(C)硬化劑的硬化性樹脂組成物,其特徵係以前述(A)苯氧基樹脂、(B)環氧樹脂、及(C)硬化劑之合計作為100質量%的場合,前述(A)苯氧基樹脂為1~15質量%,且前述(A)苯氧基樹脂的環氧當量為5000以上。 [1] A curable resin composition comprising (A) a phenoxy resin having a fluorene structure, (B) an epoxy resin, and (C) a curing agent, which is characterized by the aforementioned When the total of the (A) phenoxy resin, the (B) epoxy resin, and the (C) curing agent is 100% by mass, the (A) phenoxy resin is 1 to 15% by mass, and the above (A) The phenoxy resin has an epoxy equivalent of 5,000 or more.

〔2〕如〔1〕記載之硬化性樹脂組成物,其中,前述(A)苯氧基樹脂的重量平均分子量為8000~100000。 [2] The curable resin composition according to [1], wherein the (A) phenoxy resin has a weight average molecular weight of 8,000 to 100,000.

〔3〕如〔1〕或〔2〕記載之硬化性樹脂組成物,其中,前述(A)苯氧基樹脂進一步具有無取代或取代的聯苯基構造。 [3] The curable resin composition according to [1] or [2], wherein the (A) phenoxy resin further has an unsubstituted or substituted biphenyl structure.

〔4〕如〔1〕~〔3〕中任1項記載之硬化性樹脂組成物,其中,前述(B)環氧樹脂係由雙酚型環氧樹脂、結晶性2官能環氧樹脂、二環戊二烯型環氧樹脂、萘型環氧樹脂、聯苯基型環氧樹脂及此等環氧樹脂的混合物所構成群所選出。 [4] The curable resin composition according to any one of [1], wherein the (B) epoxy resin is a bisphenol type epoxy resin, a crystalline bifunctional epoxy resin, or the like. A mixture of a cyclopentadiene type epoxy resin, a naphthalene type epoxy resin, a biphenyl type epoxy resin, and a mixture of such epoxy resins is selected.

〔5〕如〔1〕~〔4〕中任1項記載之硬化性樹脂組成物,其中,前述(C)硬化劑係由酚硬化劑、氰酸酯酯硬化劑、活性酯硬化劑及此等硬化劑的混合物所構成群所選出。 The curable resin composition of any one of the above-mentioned (C), wherein the (C) curing agent is a phenol curing agent, a cyanate ester curing agent, an active ester curing agent, and the like. A mixture of hardeners is selected as the group.

〔6〕如〔1〕~〔5〕中任1項記載之硬化性樹脂組成物,其中,前述(C)硬化劑為氰酸酯酯硬化劑或活性酯硬化劑。 [6] The curable resin composition according to any one of [1], wherein the (C) curing agent is a cyanate ester curing agent or an active ester curing agent.

〔7〕如〔1〕~〔6〕中任1項記載之硬化性樹脂組成 物,其中,以前述硬化性樹脂組成物中的不揮發成分作為100質量%的場合,前述(A)苯氧基樹脂的含量為0.3~10質量%,前述(B)環氧樹脂的含量為5~30質量%,前述(C)硬化劑的含量為3~20質量%。 [7] The curable resin composition as described in any one of [1] to [6] In the case where the non-volatile component in the curable resin composition is 100% by mass, the content of the (A) phenoxy resin is 0.3 to 10% by mass, and the content of the (B) epoxy resin is 5 to 30% by mass, and the content of the (C) hardener is 3 to 20% by mass.

〔8〕如〔1〕~〔7〕中任1項記載之硬化性樹脂組成物,其中,進一步,含有(D)無機充填材。 [8] The curable resin composition according to any one of [1] to [7], further comprising (D) an inorganic filler.

〔9〕如〔8〕記載之硬化性樹脂組成物,其中,前述(D)無機充填材的平均粒徑為0.01~5μm。 [9] The curable resin composition according to [8], wherein the (D) inorganic filler has an average particle diameter of 0.01 to 5 μm.

〔10〕如〔8〕或〔9〕記載之硬化性樹脂組成物,其中,以前述硬化性樹脂組成物中的不揮發成分作為100質量%的場合,前述(D)無機充填材的含量為30~90質量%。 [10] The curable resin composition according to [8] or [9], wherein the content of the (D) inorganic filler is (100% by mass) of the non-volatile component in the curable resin composition. 30 to 90% by mass.

〔11〕如〔8〕~〔10〕中任1項記載之硬化性樹脂組成物,其中,前述(D)無機充填材為二氧化矽。 [11] The curable resin composition according to any one of [8], wherein the (D) inorganic filler is cerium oxide.

〔12〕一種多層印刷配線板的絕緣層用硬化性樹脂組成物,其特徵係含有〔1〕~〔11〕之中任1項記載之硬化性樹脂組成物。 [12] A curable resin composition for an insulating layer of a multilayer printed wiring board, which comprises the curable resin composition according to any one of [1] to [11].

〔13〕一種多層印刷配線板的增層用硬化性樹脂組成物,其特徵係含有〔1〕~〔11〕之中任1項記載之硬化性樹脂組成物。 [13] A curable resin composition for a build-up of a multilayer printed wiring board, characterized in that the curable resin composition according to any one of [1] to [11] is contained.

〔14〕一種薄片狀層合材料,其特徵係含有〔1〕~〔13〕之中任1項記載之硬化性樹脂組成物。 [14] A flaky laminate comprising the curable resin composition according to any one of [1] to [13].

〔15〕一種多層印刷配線板,其特徵係含有將〔1〕~〔13〕之中任1項記載之硬化性樹脂組成物或〔14〕記載 之薄片狀層合材料熱硬化而得到的絕緣層。 [15] A multilayer printed wiring board comprising the curable resin composition according to any one of [1] to [13] or [14]. The insulating layer obtained by thermally curing the sheet-like laminate material.

〔16〕一種半導體裝置,其特徵係含有〔15〕記載之多層印刷配線板。 [16] A semiconductor device characterized by comprising the multilayer printed wiring board according to [15].

又,本發明較佳為包含以下的態樣者。 Further, the present invention preferably includes the following aspects.

[I]含有(A)具有25000~40000的重量平均分子量,且具有蒽構造及四甲基聯苯基構造的苯氧基樹脂、(B)雙酚型環氧樹脂、結晶性2官能環氧樹脂、二環戊二烯型環氧樹脂、萘型環氧樹脂、聯苯基型環氧樹脂及此等環氧樹脂的混合物所構成群所選出的環氧樹脂、(C)含有由氰酸酯酯硬化劑及活性酯硬化劑所選出的1種以上的硬化劑、及(D)具有0.01~5μm平均粒徑的二氧化矽之無機充填材的硬化性樹脂組成物,其特徵係以前述(A)苯氧基樹脂、(B)環氧樹脂、及(C)硬化劑之合計作為100質量%的場合,前述(A)苯氧基樹脂為1~15質量%,前述(A)苯氧基樹脂的環氧當量為9000~15000。 [I] contains (A) a phenoxy resin having a weight average molecular weight of 25,000 to 40,000, and having a fluorene structure and a tetramethylbiphenyl structure, (B) a bisphenol type epoxy resin, a crystalline 2 functional epoxy An epoxy resin selected from the group consisting of a resin, a dicyclopentadiene type epoxy resin, a naphthalene type epoxy resin, a biphenyl type epoxy resin, and a mixture of such epoxy resins, and (C) containing cyanic acid One or more kinds of curing agents selected from the ester ester curing agent and the active ester curing agent, and (D) a curable resin composition of an inorganic filler having ceria having an average particle diameter of 0.01 to 5 μm, which is characterized by When the total of (A) phenoxy resin, (B) epoxy resin, and (C) hardener is 100% by mass, the (A) phenoxy resin is 1 to 15% by mass, and the above (A) benzene The epoxy resin has an epoxy equivalent of 9000 to 15,000.

將本發明的硬化性樹脂組成物進行熱硬化而製作的多層印刷配線板的絕緣層,具有優異的強度(斷裂延伸率),同時濕式粗化步驟中,不僅絕緣層表面的算術 平均粗度低、方均根粗度亦低,且於其上可形成具有充分的剝撕強度的鍍敷導體層、且線熱膨脹係數亦低。 The insulating layer of the multilayer printed wiring board produced by thermally curing the curable resin composition of the present invention has excellent strength (elongation at break), and at the same time, not only the arithmetic of the surface of the insulating layer in the wet roughening step The average roughness is low, the root mean square roughness is also low, and a plated conductor layer having sufficient peeling strength can be formed thereon, and the coefficient of linear thermal expansion is also low.

尤其,在本發明,藉由使用成分(A)的具有特定蒽構造的苯氧基樹脂,可達成上述低粗度及高剝撕強度。又,通常含較多的無機充填材之環氧樹脂組成物,在薄膜之樹脂流動差,有層合之導體間產生孔洞的場合,進而剝撕強度易降低,但如本發明般藉由使用成分(A),可使剝撕強度提升。 In particular, in the present invention, the above-described low thickness and high peeling strength can be attained by using the phenoxy resin having a specific fluorene structure of the component (A). Further, in general, an epoxy resin composition containing a large amount of inorganic filler is used in the case where the resin of the film is poor in flow and pores are formed between the laminated conductors, and the peeling strength is easily lowered. Ingredient (A) can increase the peeling strength.

[實施發明之最佳形態] [Best Mode for Carrying Out the Invention] [硬化性樹脂組成物] [Curable resin composition]

本發明的態樣的一個之硬化性樹脂組成物係含有(A)具有蒽構造的苯氧基樹脂、(B)環氧樹脂、及(C)硬化劑的硬化性樹脂組成物,且以前述(A)苯氧基樹脂、(B)環氧樹脂、及(C)硬化劑之合計作為100質量%的場合,前述(A)苯氧基樹脂為1~15質量%,且前述(A)苯氧基樹脂的環氧當量為5000以上為其特徵的硬化性樹脂組成物。以下對本發明的硬化性樹脂組成物進行詳細說明。 The curable resin composition of one aspect of the present invention contains (A) a phenoxy resin having a fluorene structure, (B) an epoxy resin, and (C) a curing resin composition of a curing agent, and When the total of the (A) phenoxy resin, the (B) epoxy resin, and the (C) curing agent is 100% by mass, the (A) phenoxy resin is 1 to 15% by mass, and the above (A) The phenoxy resin has a curable resin composition characterized by an epoxy equivalent of 5,000 or more. Hereinafter, the curable resin composition of the present invention will be described in detail.

(A)具有蒽構造的苯氧基樹脂 (A) Phenoxy resin having a ruthenium structure

本發明可使用的具有蒽構造的苯氧基樹脂方面,若為 具有至少1種以上的蒽構造,例如以下所示之蒽構造的苯氧基樹脂,則全部的苯氧基樹脂皆可使用。 The phenoxy resin having a fluorene structure which can be used in the present invention is A phenoxy resin having at least one type of ruthenium structure, for example, a ruthenium structure shown below, can be used.

蒽構造: 蒽 Construction:

上述式(1)中,R1可互為相同或相異,為氫原子、鹵素元素及C1~10的烴基所成的群所選出的基,n為0~8之整數。在此鹵素元素可為氟、氯、溴、碘等。 In the above formula (1), R 1 may be the same or different from each other, and is a group selected from a group consisting of a hydrogen atom, a halogen element, and a hydrocarbon group of C 1 to 10 , and n is an integer of 0 to 8. Here, the halogen element may be fluorine, chlorine, bromine, iodine or the like.

又,(A)具有蒽構造的苯氧基樹脂以具有至少1種以上的蒽構造、與至少1種以上的蒽構造以外的任意的構造的苯氧基樹脂較佳。具體上以具有取代或無取代的聯苯基構造及/或雙酚苯乙酮構造的苯氧基樹脂較佳。取代或無取代的聯苯基構造如以下所示。 Further, (A) the phenoxy resin having a fluorene structure is preferably a phenoxy resin having at least one type of fluorene structure and at least one type of quinone resin other than the fluorene structure. Specifically, a phenoxy resin having a substituted or unsubstituted biphenyl structure and/or a bisphenol acetophenone structure is preferred. The substituted or unsubstituted biphenyl structure is as follows.

取代或無取代的聯苯基構造 Substituted or unsubstituted biphenyl structure

上述式(2)中,R2及R3可互為相同或相異,為氫原子、鹵素元素及C1~10的烴基所成的群所選出的基,m為 0~4之整數。在此鹵素元素可為氟、氯、溴、碘等。 In the above formula (2), R 2 and R 3 may be the same or different from each other, and are a group selected from a group consisting of a hydrogen atom, a halogen element and a hydrocarbon group of C 1 to 10 , and m is an integer of 0 to 4. Here, the halogen element may be fluorine, chlorine, bromine, iodine or the like.

雙酚苯乙酮構造(日本特開2003-252951做為參考) Bisphenol acetophenone structure (Japanese Patent Laid-Open No. 2003-252951)

(式(3)中,R4可互為相同或相異,為氫原子、C1~10的烴基及鹵素元素所成的群所選出的基,R5為氫原子、C1~10的烴基及鹵素元素所成的群所選出的基,R6為氫原子或C1~10的烴基,m為0~5之整數)。 (In the formula (3), R 4 may be the same or different from each other, and is a group selected from a hydrogen atom, a hydrocarbon group of C 1 to 10 , and a group of halogen elements, and R 5 is a hydrogen atom, and C 1 to 10 A group selected from the group consisting of a hydrocarbon group and a halogen element, and R 6 is a hydrogen atom or a hydrocarbon group of C 1 to 10 , and m is an integer of 0 to 5).

較佳態樣方面,式(1)中,R1可互為相同或相異,為氫原子或C1~8的烴基、更較佳為氫原子或C1~6的烷基、再較佳為氫原子或甲基,尤佳為氫原子,n可互為相同或相異,為0~6、更較佳為0~4之整數。 In a preferred aspect, in the formula (1), R 1 may be the same or different from each other, and is a hydrogen atom or a C 1-8 hydrocarbon group, more preferably a hydrogen atom or a C 1 to 6 alkyl group. Preferably, it is a hydrogen atom or a methyl group, and particularly preferably a hydrogen atom, and n may be the same or different from each other, and is an integer of 0 to 6, more preferably 0 to 4.

較佳態樣方面,式(2)中,R2及R3可互為相同或相異,為氫原子或C1~8的烴基、更較佳為氫原子或C1~6的烷基、再較佳為氫原子或甲基、尤佳為四甲基聯苯基構造,m為0~3、更較佳為1~2之整數。 In a preferred embodiment, in the formula (2), R 2 and R 3 may be the same or different from each other, and are a hydrogen atom or a C 1-8 hydrocarbon group, more preferably a hydrogen atom or a C 1-6 alkyl group. Further, it is preferably a hydrogen atom or a methyl group, more preferably a tetramethylbiphenyl structure, and m is an integer of from 0 to 3, more preferably from 1 to 2.

較佳態樣方面,式(3)中,R4可互為相同或相異,為氫原子或C1~8的烴基、更較佳為氫原子或C1~6的烷基、再較佳為氫原子或甲基、尤佳為氫原子,R5為氫原子 或C1~8的烴基、更較佳為氫原子或C1~6的烷基、再較佳為氫原子或甲基、尤佳為氫原子,R6為氫原子或C1~8的烴基、更較佳為氫原子或C1~6的烷基、再較佳為氫原子或甲基、尤佳為甲基,m為0~3、更較佳為1~2之整數。 In a preferred aspect, in the formula (3), R 4 may be the same or different from each other, and is a hydrogen atom or a C 1-8 hydrocarbon group, more preferably a hydrogen atom or a C 1 to 6 alkyl group. Preferably, it is a hydrogen atom or a methyl group, particularly preferably a hydrogen atom, and R 5 is a hydrogen atom or a C 1-8 hydrocarbon group, more preferably a hydrogen atom or a C 1-6 alkyl group, still more preferably a hydrogen atom or a group. More preferably, the group is a hydrogen atom, and R 6 is a hydrogen atom or a C 1-8 hydrocarbon group, more preferably a hydrogen atom or a C 1-6 alkyl group, still more preferably a hydrogen atom or a methyl group, and particularly preferably A. The base, m is an integer from 0 to 3, more preferably from 1 to 2.

具有蒽構造的苯氧基樹脂之製造方法的一例,可藉由取代或無取代的聯苯基型環氧樹脂的環氧基與二羥基蒽衍生物之羥基進行反應來製造。具體上,取代或無取代的聯苯基型環氧樹脂的環氧基數與二羥基蒽衍生物之羥基數之比以1.5:1~0.8:1為佳、1.3:1~0.9:1更佳、1.1:1~1:1再較佳。 An example of a method for producing a phenoxy resin having a fluorene structure can be produced by reacting an epoxy group of a substituted or unsubstituted biphenyl type epoxy resin with a hydroxyl group of a dihydroxyanthracene derivative. Specifically, the ratio of the number of epoxy groups of the substituted or unsubstituted biphenyl type epoxy resin to the number of hydroxyl groups of the dihydroxyanthracene derivative is preferably 1.5:1 to 0.8:1, more preferably 1.3:1 to 0.9:1. , 1.1:1~1:1 is better.

具有蒽構造的苯氧基樹脂的含量,以(A)苯氧基樹脂、與後述(B)環氧樹脂、與後述(C)硬化劑之合計作為100質量%的場合,(A)苯氧基樹脂為1~15質量%、較佳為2~13質量%,更較佳為5~10質量%。苯氧基樹脂的含量為1質量%以上,則成為低的算術平均粗度及低的方均根粗度,又,若在15質量%以下,則充分維持交聯部位,故仍成為低的算術平均粗度及低的方均根粗度,且,可維持低的線熱膨脹係數。 When the content of the phenoxy resin having a fluorene structure is 100% by mass based on the total of the (A) phenoxy resin, the epoxy resin (B) described later, and the curing agent (C) described later, (A) phenoxy The base resin is from 1 to 15% by mass, preferably from 2 to 13% by mass, more preferably from 5 to 10% by mass. When the content of the phenoxy resin is 1% by mass or more, the arithmetic mean roughness and the low root mean square roughness are low, and when the content is 15% by mass or less, the crosslinking portion is sufficiently maintained, so that the arithmetic mean is low. The thickness and the low root mean square roughness, and the low coefficient of linear thermal expansion can be maintained.

又,(A)苯氧基樹脂與後述(B)環氧樹脂之合計作為100質量%的場合,(A)苯氧基樹脂較佳為2~30質量%,更較佳為4~20質量%。 Further, when the total of the (A) phenoxy resin and the epoxy resin (B) described later is 100% by mass, the (A) phenoxy resin is preferably 2 to 30% by mass, more preferably 4 to 20% by mass. %.

具有蒽構造的苯氧基樹脂的環氧當量(含1當量的環氧基之樹脂的質量),例如以5000(g/當量)以上、較佳為5000~30000(g/當量)、更較佳為7000~ 20000(g/當量)、再較佳為9000~15000(g/當量)。具有蒽構造的苯氧基樹脂的環氧當量為5000以上,則具有優異的斷裂延伸率,又,在30000以下則充分維持交聯部位,故成為低的算術平均粗度及低的方均根粗度,且,可維持低的線熱膨脹係數。又,環氧當量可依據JIS K7236(2001)測定。 The epoxy equivalent of the phenoxy resin having a fluorene structure (the mass of the epoxy group-containing resin) is, for example, 5,000 (g/eq) or more, preferably 5,000 to 30,000 (g/equivalent), more preferably Good for 7000~ 20000 (g / equivalent), more preferably 9000 ~ 15000 (g / equivalent). When the epoxy equivalent of the phenoxy resin having a fluorene structure is 5,000 or more, the elongation at break is excellent, and the crosslinking portion is sufficiently maintained at 30,000 or less, so that the arithmetic mean roughness and the low root mean square roughness are low. And, a low coefficient of linear thermal expansion can be maintained. Further, the epoxy equivalent can be measured in accordance with JIS K7236 (2001).

具有蒽構造的苯氧基樹脂的重量平均分子量,例如為8000~100000、較佳為15000~80000、更較佳為20000~60000、再較佳為25000~40000。苯氧基樹脂的重量平均分子量為8000以上,則具有優異的斷裂延伸率,又,100000以下,則與樹脂組成物的相溶性提升,可成為低的算術平均粗度及低的方均根粗度。該苯氧基樹脂的重量平均分子量可藉由膠體滲透層析(GPC)法測定。具體上,熱可塑性樹脂的聚苯乙烯換算的重量平均分子量,測定裝置使用(股)島津製作所製LC-9A/RID-6A,管柱使用昭和電工(股)製Shodex K-800P/K-804L/K-804L,移動相使用氯仿等,以管柱溫度40℃進行測定,可使用標準聚苯乙烯之檢量線算出。 The weight average molecular weight of the phenoxy resin having a fluorene structure is, for example, 8,000 to 100,000, preferably 15,000 to 80,000, more preferably 20,000 to 60,000, still more preferably 25,000 to 40,000. When the weight average molecular weight of the phenoxy resin is 8,000 or more, the elongation at break is excellent, and when it is 100,000 or less, the compatibility with the resin composition is improved, and the arithmetic mean roughness and the low root mean square roughness can be obtained. The weight average molecular weight of the phenoxy resin can be determined by a colloidal permeation chromatography (GPC) method. Specifically, the polystyrene-equivalent weight average molecular weight of the thermoplastic resin is used in the measurement apparatus using LC-9A/RID-6A manufactured by Shimadzu Corporation, and the column is Shodex K-800P/K-804L manufactured by Showa Denko Co., Ltd. /K-804L, the mobile phase is measured at a column temperature of 40 ° C using chloroform or the like, and can be calculated using a calibration curve of standard polystyrene.

上述硬化性樹脂組成物中的不揮發成分作為100質量%的場合,(A)具有蒽構造的苯氧基樹脂的含量較佳為0.3~10質量%,更較佳為0.5~7質量%、再較佳為0.7~5質量%。 When the non-volatile component in the curable resin composition is 100% by mass, the content of the phenoxy resin having a fluorene structure (A) is preferably from 0.3 to 10% by mass, more preferably from 0.5 to 7% by mass, More preferably, it is 0.7 to 5% by mass.

(B)環氧樹脂 (B) Epoxy resin

(B)成分的環氧樹脂為與(A)成分的苯氧基樹脂相異的環氧樹脂。(B)成分的環氧樹脂,較佳為具有與(A)成分的苯氧基樹脂相異的環氧當量者。(B)成分的環氧樹脂的環氧當量(含1當量的環氧基的樹脂的質量)較佳為50~3000(g/當量)、更較佳為100~2000(g/當量)、再較佳為150~1000(g/當量)、尤佳為200~500(g/當量)。藉由此,由硬化性樹脂組成物所得到的絕緣層的交聯密度變得足夠,有利於低粗度化。又,環氧當量可依據JIS K7236(2001)測定。 The epoxy resin of the component (B) is an epoxy resin different from the phenoxy resin of the component (A). The epoxy resin of the component (B) preferably has an epoxy equivalent different from the phenoxy resin of the component (A). The epoxy equivalent of the epoxy resin of the component (B) (the mass of the epoxy group-containing resin) is preferably 50 to 3000 (g/eq), more preferably 100 to 2000 (g/equivalent), It is more preferably 150 to 1000 (g/eq), and particularly preferably 200 to 500 (g/equivalent). Thereby, the crosslinking density of the insulating layer obtained from the curable resin composition becomes sufficient, which contributes to low thickness. Further, the epoxy equivalent can be measured in accordance with JIS K7236 (2001).

又,較佳為環氧樹脂為1分子中具有2個以上的環氧基之環氧樹脂。 Further, the epoxy resin is preferably an epoxy resin having two or more epoxy groups in one molecule.

具體的(B)成分的環氧樹脂,可舉例如雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚AF型環氧樹脂般雙酚型環氧樹脂、二環戊二烯型環氧樹脂、酚酚醛清漆型環氧樹脂、tert-丁基-兒茶酚型環氧樹脂、萘酚型環氧樹脂、萘型環氧樹脂、伸萘基醚型環氧樹脂、縮水甘油基胺型環氧樹脂、縮水甘油基酯型環氧樹脂、甲酚酚醛清漆型環氧樹脂、聯苯基型環氧樹脂、蒽型環氧樹脂、線狀脂肪族環氧樹脂、具有丁二烯構造的環氧樹脂、脂環式環氧樹脂、雜環式環氧樹脂、含螺環環氧樹脂、環己烷二甲醇型環氧樹脂、三羥甲基型環氧樹脂、鹵素化環氧樹脂、結晶性2官能環氧樹脂等。更較佳為(B)環氧樹脂係由雙酚型環氧樹脂、結晶性2官能環氧樹脂、二環戊二烯型環氧樹脂、萘型環氧樹脂、聯苯基型 環氧樹脂及此等環氧樹脂的混合物所構成群所選出的。此等亦可1種或2種以上組合使用。 Specific examples of the epoxy resin of the component (B) include bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, and bisphenol AF epoxy resin bisphenol ring. Oxygen resin, dicyclopentadiene type epoxy resin, phenol novolak type epoxy resin, tert-butyl-catechol type epoxy resin, naphthol type epoxy resin, naphthalene type epoxy resin, naphthyl group Ether type epoxy resin, glycidylamine type epoxy resin, glycidyl ester type epoxy resin, cresol novolac type epoxy resin, biphenyl type epoxy resin, fluorene type epoxy resin, linear fat Group epoxy resin, epoxy resin with butadiene structure, alicyclic epoxy resin, heterocyclic epoxy resin, screw-containing epoxy resin, cyclohexane dimethanol epoxy resin, trimethylol Type epoxy resin, halogenated epoxy resin, crystalline bifunctional epoxy resin, and the like. More preferably, (B) epoxy resin is a bisphenol type epoxy resin, a crystalline bifunctional epoxy resin, a dicyclopentadiene type epoxy resin, a naphthalene type epoxy resin, a biphenyl type Epoxy resin and a mixture of such epoxy resins are selected from the group consisting of. These may be used alone or in combination of two or more.

此等環氧樹脂中,以耐熱性提升觀點來看,雙酚A型環氧樹脂、雙酚F型環氧樹脂、結晶性2官能環氧樹脂、二環戊二烯型環氧樹脂、萘型環氧樹脂及此等2種以上的混合物為較佳。具體上,例如雙酚A型與F型的混合環氧樹脂(新日鐵化學(股)製「ZX1059」)、雙酚A型環氧樹脂(三菱化學(股)製「EPIKOTE828EL」、「YL980」、「jER1009」)、雙酚F型環氧樹脂(三菱化學(股)製「jER806H」、「YL983U」)、萘型2官能環氧樹脂(DIC(股)製「HP4032」、「HP4032D」、「HP4032SS」、「EXA4032SS」)、萘型4官能環氧樹脂(DIC(股)製「HP4700」、「HP4710」)、萘酚型環氧樹脂(新日鐵化學(股)製「ESN-475V」)、具有丁二烯構造的環氧樹脂(Daicel化學工業(股)製「PB-3600」)、具有聯苯基構造的環氧樹脂(日本化藥(股)製「NC3000H」、「NC3000L」、「NC3100」)、四甲基聯苯基型環氧樹脂(三菱化學(股)製「YX4000」、「YX4000H」、「YX4000HK」、「YL6121」)、蒽型環氧樹脂(三菱化學(股)製「YX8800」)、伸萘基醚型環氧樹脂(DIC(股)製「EXA-7310」、「EXA-7311」、「EXA-7311L」、「EXA7311-G3」)、縮水甘油基酯型環氧樹脂(Nagasechemtex(股)製「EX711」、「EX721」、(股)Printec製「R540」)、二環戊二烯型環氧樹 脂(DIC(股)製「HP-7200H」)等。 Among these epoxy resins, bisphenol A type epoxy resin, bisphenol F type epoxy resin, crystalline bifunctional epoxy resin, dicyclopentadiene type epoxy resin, naphthalene, from the viewpoint of heat resistance improvement A type epoxy resin and a mixture of two or more kinds thereof are preferred. Specifically, for example, a mixed epoxy resin of bisphenol A type and F type ("ZX1059" manufactured by Nippon Steel Chemical Co., Ltd.), and a bisphenol A type epoxy resin ("EPIKOTE828EL" manufactured by Mitsubishi Chemical Corporation", "YL980" ""jER1009"), bisphenol F type epoxy resin ("JER806H" and "YL983U" manufactured by Mitsubishi Chemical Corporation), and naphthalene type 2-functional epoxy resin (HP4032" and "HP4032D" manufactured by DIC Corporation , "HP4032SS", "EXA4032SS"), naphthalene type 4-functional epoxy resin ("HP4700", "HP4710" made by DIC), and naphthol type epoxy resin ("Nippon Steel Chemical Co., Ltd." 475V"), epoxy resin having a butadiene structure ("PB-3600" manufactured by Daicel Chemical Industry Co., Ltd.), epoxy resin having a biphenyl structure ("NC3000H" manufactured by Nippon Kayaku Co., Ltd.," NC3000L", "NC3100"), tetramethylbiphenyl type epoxy resin ("XX4000", "YX4000H", "YX4000HK", "YL6121" manufactured by Mitsubishi Chemical Corporation), 蒽-type epoxy resin (Mitsubishi Chemical) "YX8800" (manufactured by the company), a naphthyl ether epoxy resin (EXA-7310, "EXA-7311", "EXA-7311L", "EXA7311-G3") made from DIC) Ester type epoxy tree Fat ("Ag711", "EX721", "R540" made by Printec, Nagasechemtex), dicyclopentadiene type epoxy tree Fat ("HP-7200H" made by DIC).

又,HP4032SS之主成分的構造式如下。 Moreover, the structural formula of the main component of HP4032SS is as follows.

又,YX4000HK的構造式如下。 Also, the structure of the YX4000HK is as follows.

(式中,Gr為縮水甘油基)。 (wherein Gr is a glycidyl group).

又,HP-7200H的構造式如下。 Also, the structural formula of the HP-7200H is as follows.

(式中,n為1~20之整數)。 (where n is an integer from 1 to 20).

又,NC3000L之構造式如下。 Also, the structure of the NC3000L is as follows.

(式中,n為1~20之整數)。 (where n is an integer from 1 to 20).

(B)環氧樹脂的含量,在前述(A)苯氧基樹脂與前述(B)環氧樹脂與前述(C)硬化劑之合計作為100質量%的場合,較佳為30~80質量%、更較佳為35~75質量%,再較佳為40~70質量%。 (B) The content of the epoxy resin is preferably 30 to 80% by mass in the case where the total of the (A) phenoxy resin and the (B) epoxy resin and the (C) curing agent are 100% by mass. More preferably, it is 35 to 75 mass%, and more preferably 40 to 70 mass%.

本發明的硬化性樹脂組成物中的(B)環氧樹脂的含量並未特別限定,但由使兼具絕緣層的低粗度化與高剝撕強度的觀點來看,該硬化性樹脂組成物中的不揮發成分作為100質量%的場合,以5~30質量%為佳、7~25質量%更佳、10~20質量%再較佳。 The content of the (B) epoxy resin in the curable resin composition of the present invention is not particularly limited, but the curable resin is composed of a low-thickness and high peeling strength of the insulating layer. When the nonvolatile content in the product is 100% by mass, it is preferably 5 to 30% by mass, more preferably 7 to 25% by mass, even more preferably 10 to 20% by mass.

(C)硬化劑 (C) hardener

本發明所使用的硬化劑為可使上述苯氧基樹脂及環氧樹脂交聯後硬化者,則不特別限定,以含由酚硬化劑(酚樹脂)、氰酸酯酯硬化劑(氰酸酯酯樹脂)、活性酯硬化劑(活性酯樹脂)所選出的1種以上較佳。此等酚硬化劑、氰酸酯酯硬化劑及活性酯硬化劑可有意義地使絕緣層的表面粗度降低。 The curing agent used in the present invention is not particularly limited as long as it can be cured by crosslinking the phenoxy resin and the epoxy resin, and contains a phenol curing agent (phenol resin) and a cyanate ester curing agent (cyanic acid). One or more selected from the group consisting of an ester ester resin and an active ester curing agent (active ester resin) are preferred. These phenolic hardeners, cyanate ester hardeners, and active ester hardeners can meaningfully reduce the surface roughness of the insulating layer.

酚樹脂,並不特別限制,以聯苯基型酚樹脂、萘型酚樹脂、酚酚醛清漆樹脂、伸萘基醚型酚樹脂、含三嗪骨架酚樹脂較佳。具體上,可舉例如聯苯基型酚樹脂的MEH-7700、MEH-7810、MEH-7851(明和化成(股)製)、萘型酚樹脂的NHN、CBN、GPH(日本化藥(股)製)、SN-170、SN-180、SN-190、SN-475、SN- 485、SN-495、SN-375、SN-395(新日鐵化學(股)製)、EXB9500(DIC(股)製)、酚酚醛清漆樹脂的TD2090(DIC(股)製)、伸萘基醚型酚樹脂的EXB-6000(DIC(股)製)、含三嗪骨架酚樹脂的LA-3018、LA-7052、LA-7054、LA-1356(DIC(股)製)等。此等可1種或2種以上併用。 The phenol resin is not particularly limited, and a biphenyl type phenol resin, a naphthalene type phenol resin, a phenol novolac resin, a stretch naphthyl ether type phenol resin, and a triazine skeleton phenol resin are preferable. Specifically, for example, MEH-7700, MEH-7810, MEH-7851 (manufactured by Megumi Kasei Co., Ltd.), naphthol type phenol resin, NHN, CBN, and GPH of a biphenyl type phenol resin (Nippon Chemical Co., Ltd.) System), SN-170, SN-180, SN-190, SN-475, SN- 485, SN-495, SN-375, SN-395 (Nippon Steel Chemical Co., Ltd.), EXB9500 (DIC), phenolic novolac resin TD2090 (made by DIC), naphthyl EXB-6000 (manufactured by DIC Co., Ltd.) of an ether type phenol resin, LA-3018, LA-7052, LA-7054, LA-1356 (manufactured by DIC Co., Ltd.) containing a triazine skeleton phenol resin. These may be used alone or in combination of two or more.

又,SN-485的構造式如以下式(4)。 Further, the structural formula of SN-485 is as shown in the following formula (4).

(n為1~20之整數)。 (n is an integer from 1 to 20).

又,LA-7054的構造式如以下式(5)。 Further, the structural formula of LA-7054 is as shown in the following formula (5).

(n為1~20之整數)。 (n is an integer from 1 to 20).

氰酸酯酯樹脂,並不特別限制,可舉例如酚醛清漆型氰酸酯酯樹脂、二環戊二烯型氰酸酯酯樹脂、雙酚型氰酸酯酯樹脂、及此等經部份三嗪化的預聚物等。具體上,可舉例如下式(6)所表示之酚酚醛清漆型多官能氰酸酯酯樹脂(LONZA日本(股)製、PT30S:數平均分子量380、PT60:數平均分子量560)、下式(7)所表示 之雙酚A型氰酸酯酯樹脂之一部分或全部經三嗪化而成為三聚物的預聚物的雙酚A型氰酸酯酯樹脂(LONZA日本(股)製、BA230S75)、下式(8)所表示之二環戊二烯型氰酸酯酯樹脂(LONZA日本(股)製、DT-4000、DT-7000)等。具體上,數平均分子量,測定裝置使用(股)島津製作所製LC-9A/RID-6A,管柱使用昭和電工(股)製Shodex K-800P/K-804L/K-804L,移動相使用氯仿等,在管柱溫度40℃測定,可使用標準聚苯乙烯之檢量線算出。此等亦可1種或2種以上組合使用。 The cyanate ester resin is not particularly limited, and examples thereof include a novolac type cyanate ester resin, a dicyclopentadiene type cyanate ester resin, a bisphenol type cyanate ester resin, and the like. Triazineated prepolymers and the like. Specifically, a phenol novolac type polyfunctional cyanate ester resin (manufactured by LONZA Japan Co., Ltd., PT30S: number average molecular weight 380, PT60: number average molecular weight 560) represented by the following formula (6), and the following formula ( 7) expressed A bisphenol A type cyanate ester resin (LONZA Nippon Co., Ltd., BA230S75) in which a part or all of the bisphenol A type cyanate ester resin is triazine-formed to form a prepolymer of a trimer, and the following formula (8) A dicyclopentadiene type cyanate ester resin (manufactured by LONZA Japan Co., Ltd., DT-4000, DT-7000) or the like. Specifically, the number average molecular weight is used for the measurement device using LC-9A/RID-6A manufactured by Shimadzu Corporation, the column is Shodex K-800P/K-804L/K-804L manufactured by Showa Denko Co., Ltd., and the mobile phase is chloroform. Etc., measured at a column temperature of 40 ° C, can be calculated using a standard polystyrene calibration line. These may be used alone or in combination of two or more.

[式中,n係平均值為任意的數(較佳為0~20、更較佳為1~10)]。 [In the formula, the average value of the n system is an arbitrary number (preferably 0 to 20, more preferably 1 to 10)].

(式中,n係平均值為0~5的數)。 (In the formula, the average value of n is 0 to 5).

本發明可使用的活性酯樹脂為1分子中具有1個以上活性酯基的樹脂化合物。在此,「活性酯基」係指與環氧樹脂反應之酯基。活性酯樹脂以可與環氧樹脂反應,且1分子中具有2個以上活性酯基的樹脂化合物為較佳。一般由酚酯、硫代酚酯、N-羥基胺酯及雜環羥基化合物酯所成群中選出的1分子中具有2個以上反應活性高的酯基的樹脂化合物,宜用作為活性酯樹脂。活性酯樹脂可1種或2種以上併用。 The active ester resin which can be used in the present invention is a resin compound having one or more active ester groups in one molecule. Here, the "active ester group" means an ester group which reacts with an epoxy resin. The active ester resin is preferably a resin compound which can react with an epoxy resin and has two or more active ester groups in one molecule. A resin compound having two or more reactive ester groups in one molecule selected from the group consisting of phenol esters, thiophenol esters, N-hydroxylamine esters and heterocyclic hydroxy ester esters, preferably used as an active ester resin . The active ester resin may be used singly or in combination of two or more kinds.

由耐熱性提升的觀點,以羧酸化合物及/或硫代羧酸化合物與羥基化合物及/或硫醇化合物進行縮合反應者所得到的活性酯樹脂更較佳。以使酚化合物、萘酚化合物及硫醇化合物所選出的1種或2種以上與羧酸化合物反應者所得到的活性酯樹脂再較佳。以使羧酸化合物與具有酚性羥基的芳香族化合物反應者所得到的1分子中具有2個以上的活性酯基之芳香族樹脂化合物又更佳。1分子中具有至少2個以上的羧酸化合物與具有酚性羥基的芳香族化合物進行反應者所得到的芳香族樹脂化合物,且該芳香族樹脂化合物的1分子中具有2個以上的活性酯基之 芳香族樹脂化合物尤佳。活性酯樹脂可為直鏈狀或多分支狀。又,1分子中具有至少2個以上的羧酸之化合物為含脂肪族鏈的化合物,則可使與樹脂組成物的相溶性提高,為具有芳香族環之化合物,則可使耐熱性提高。 From the viewpoint of improvement in heat resistance, an active ester resin obtained by subjecting a carboxylic acid compound and/or a thiocarboxylic acid compound to a condensation reaction with a hydroxy compound and/or a thiol compound is more preferable. The active ester resin obtained by reacting one or two or more selected from a phenol compound, a naphthol compound, and a thiol compound with a carboxylic acid compound is more preferable. Further, an aromatic resin compound having two or more active ester groups in one molecule obtained by reacting a carboxylic acid compound with an aromatic compound having a phenolic hydroxyl group is more preferable. An aromatic resin compound obtained by reacting at least two or more carboxylic acid compounds with an aromatic compound having a phenolic hydroxyl group in one molecule, and having two or more active ester groups in one molecule of the aromatic resin compound It An aromatic resin compound is particularly preferred. The active ester resin may be linear or multi-branched. In addition, when a compound having at least two or more carboxylic acids in one molecule is an aliphatic chain-containing compound, compatibility with a resin composition can be improved, and a compound having an aromatic ring can improve heat resistance.

上述羧酸化合物方面,具體上可舉例如安息香酸、乙酸、琥珀酸、馬來酸、衣康酸、苯二甲酸、異苯二甲酸、對苯二甲酸、均苯四甲酸等。其中,由耐熱性的觀點,以琥珀酸、馬來酸、衣康酸、苯二甲酸、異苯二甲酸、對苯二甲酸為佳,異苯二甲酸、對苯二甲酸更較佳。硫代羧酸化合物方面,具體上如硫代乙酸、硫代安息香酸等。 Specific examples of the carboxylic acid compound include benzoic acid, acetic acid, succinic acid, maleic acid, itaconic acid, phthalic acid, isophthalic acid, terephthalic acid, and pyromellitic acid. Among them, succinic acid, maleic acid, itaconic acid, phthalic acid, isophthalic acid, and terephthalic acid are preferred from the viewpoint of heat resistance, and isophthalic acid and terephthalic acid are more preferable. The thiocarboxylic acid compound is specifically thioacetic acid, thiobenzoic acid or the like.

上述酚化合物或萘酚化合物方面,具體上,如對苯二酚、間苯二酚、雙酚A、雙酚F、雙酚S、酸式酚酞、甲基化雙酚A、甲基化雙酚F、甲基化雙酚S、酚、o-甲酚、m-甲酚、p-甲酚、兒茶酚、α-萘酚、β-萘酚、1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、間苯三酚、苯三醇、二環戊二烯二酚、酚酚醛清漆等。其中,由耐熱性提升、溶解性提升的觀點,以雙酚A、雙酚F、雙酚S、甲基化雙酚A、甲基化雙酚F、甲基化雙酚S、兒茶酚、α-萘酚、β-萘酚、1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、間苯三酚、苯三醇、二環戊二烯二酚、酚酚醛清漆為佳,兒茶酚、1,5-二羥基萘、1,6-二羥基萘、2,6- 二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、間苯三酚、苯三醇、二環戊二烯二酚、酚酚醛清漆更佳,1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、二環戊二烯二酚、酚酚醛清漆再佳,1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二環戊二烯二酚、酚酚醛清漆又再佳,1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二環戊二烯二酚特別佳,二環戊二烯二酚尤佳。硫醇化合物方面,具體上,如苯二硫醇、三嗪二硫醇等。 In the above phenol compound or naphthol compound, specifically, for example, hydroquinone, resorcin, bisphenol A, bisphenol F, bisphenol S, acid phenolphthalein, methylated bisphenol A, methylated double Phenol F, methylated bisphenol S, phenol, o-cresol, m-cresol, p-cresol, catechol, α-naphthol, β-naphthol, 1,5-dihydroxynaphthalene, 1 ,6-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone, phloroglucinol, benzenetriol, dicyclopentadiene Diphenol, phenol novolac, etc. Among them, from the viewpoints of improvement in heat resistance and improvement in solubility, bisphenol A, bisphenol F, bisphenol S, methylated bisphenol A, methylated bisphenol F, methylated bisphenol S, catechol , α-naphthol, β-naphthol, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, four Hydroxybenzophenone, phloroglucinol, benzenetriol, dicyclopentadiene diphenol, phenol novolac, catechol, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 2 ,6- Dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone, phloroglucinol, benzenetriol, dicyclopentadiene diphenol, phenol novolac lacquer, preferably 1, 5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone, dicyclopentadiene diphenol , phenol novolac varnish is better, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dicyclopentadiene diphenol, phenol novolac varnish is better, 1,5- Dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dicyclopentadiene diol are particularly preferred, and dicyclopentadiene diol is particularly preferred. The thiol compound is specifically, for example, benzenedithiol, triazinedithiol or the like.

活性酯樹脂方面,具體上,以含二環戊二烯二酚構造的活性酯樹脂、含萘構造的活性酯樹脂、含酚酚醛清漆之乙醯基化物的活性酯樹脂、含酚酚醛清漆之苯甲醯基化物的活性酯樹脂為佳,其中,以含萘構造的活性酯樹脂、含二環戊二烯二酚構造的活性酯樹脂更較佳。市售品方面,含二環戊二烯二酚構造的活性酯樹脂,可舉例如EXB9451、EXB9460、EXB9460S、HPC-8000-65T(DIC(股)製),含萘構造的活性酯樹脂可舉例如EXB9416-70BK(DIC(股)製),含酚酚醛清漆之乙醯基化物的活性酯樹脂可舉例如DC808(三菱化學(股)製),含酚酚醛清漆之苯甲醯基化物的活性酯樹脂可舉例如YLH1026(三菱化學(股)製)等。 In terms of the active ester resin, specifically, an active ester resin having a structure composed of a dicyclopentadiene diphenol, an active ester resin containing a naphthalene structure, an active ester resin containing an acetal of a phenol novolac, and a phenol novolac The active ester resin of benzamidine is preferred, and an active ester resin having a naphthalene structure or an active ester resin having a dicyclopentadiene diphenol structure is more preferred. In the case of a commercially available product, an active ester resin containing a dicyclopentadiene diphenol structure may, for example, be EXB9451, EXB9460, EXB9460S, HPC-8000-65T (manufactured by DIC), and an active ester resin containing a naphthalene structure may be exemplified. For example, EXB9416-70BK (manufactured by DIC Co., Ltd.), an active ester resin containing a phenolic novolac-based acetal varnish, for example, DC808 (manufactured by Mitsubishi Chemical Corporation), and a benzamidine-based phenol phenolic aldehyde The ester resin may, for example, be YLH1026 (manufactured by Mitsubishi Chemical Corporation).

尤佳的活性酯樹脂為包含以下的一般式(9) (式中,m為0或1,n係平均值為0.25~1.5、較佳為0.4~1.2)所表示之二環戊二烯二酚構造,且末端各自具有X-基及XO-基(在此X為可具有取代基的苯基或萘基)之樹脂化合物。該活性酯樹脂的重量平均分子量,較佳為1500~4000,更較佳為2000~3000。 A particularly preferred active ester resin is the general formula (9) (wherein m is 0 or 1, n is an average value of 0.25 to 1.5, preferably 0.4 to 1.2), and the dicyclopentadiene diphenol is represented by a structure, and each of the terminals has an X-group and an XO-group ( Here, X is a resin compound of a phenyl group or a naphthyl group which may have a substituent. The weight average molecular weight of the active ester resin is preferably from 1,500 to 4,000, more preferably from 2,000 to 3,000.

更較佳的活性酯樹脂為具有以下的式(10)所表示之二環戊二烯二酚構造,且末端各自具有X-基及XO-基(在此X為可具有取代基的萘基),重量平均分子量為約2700的活性酯樹脂之HPC-8000-65T。 A more preferred active ester resin is a dicyclopentadiene diphenol structure represented by the following formula (10), and each of the terminals has an X-group and an XO- group (wherein X is a naphthyl group which may have a substituent) ) HPC-8000-65T, an active ester resin having a weight average molecular weight of about 2,700.

(式中,m為0或1,n係平均值為0.4~1.2) (where m is 0 or 1, and the average value of n is 0.4 to 1.2)

本發明的硬化性樹脂組成物中的(C)硬化劑的含量並未特別限定,但由使兼具絕緣層的低粗度化與高剝撕強度的觀點來看,該硬化性樹脂組成物中的不揮發成分作為100質量%的場合,以3~20質量%為佳、5~18質量%更佳、7~15質量%再較佳。 The content of the (C) curing agent in the curable resin composition of the present invention is not particularly limited, but the curable resin composition is obtained from the viewpoint of reducing the thickness of the insulating layer and the high peeling strength. When the nonvolatile content is 100% by mass, it is preferably 3 to 20% by mass, more preferably 5 to 18% by mass, and still more preferably 7 to 15% by mass.

又,環氧樹脂全體的環氧基數作為1的場合,硬化劑的反應基數以0.2~2為佳、0.3~1.5更佳、0.4~1再較佳。在此,「環氧樹脂全體的環氧基數」係指將硬化性樹脂組成物中存在的各環氧樹脂的固形分質量除以環氧當量的值作為全部環氧樹脂合計值。又,「反應基」係指可與環氧基反應的官能基,「反應基數」係指將 樹脂組成物中存在的硬化劑的固形分質量除以反應基當量的值作為全部合計值。 When the number of epoxy groups in the entire epoxy resin is 1, the number of reactive groups of the curing agent is preferably 0.2 to 2, more preferably 0.3 to 1.5, and still more preferably 0.4 to 1. Here, the "number of epoxy groups in the entire epoxy resin" means a value obtained by dividing the solid content of each epoxy resin present in the curable resin composition by the epoxy equivalent as the total epoxy resin value. Further, "reactive group" means a functional group reactive with an epoxy group, and "reaction group number" means The solid content mass of the hardener present in the resin composition divided by the value of the reactive group equivalent is taken as the total value.

(D)無機充填材 (D) Inorganic filling materials

本發明可使用的無機充填材,可舉例如二氧化矽、氧化鋁、雲母、mica、矽酸鹽、硫酸鋇、氫氧化鎂、氧化鈦等,以二氧化矽、氧化鋁為佳,尤其無定形二氧化矽、熔融二氧化矽、結晶二氧化矽、合成二氧化矽、中空二氧化矽、球狀二氧化矽等的二氧化矽為佳、球狀二氧化矽、熔融二氧化矽更較佳。由對含硬化性樹脂組成物之本發明的薄片狀層合材料的無機充填材的充填性提升的觀點,以球狀熔融二氧化矽再較佳。可使用1種或2種以上的無機充填材。市售球狀熔融二氧化矽,可舉例如(股)Admatechs製「SOC2」、「SOC1」。 The inorganic filler which can be used in the present invention may, for example, be cerium oxide, aluminum oxide, mica, mica, ceric acid salt, barium sulfate, magnesium hydroxide, titanium oxide or the like, preferably cerium oxide or aluminum oxide, especially Preferably, cerium oxide such as cerium oxide, molten cerium oxide, crystalline cerium oxide, synthetic cerium oxide, hollow cerium oxide, spherical cerium oxide, etc., spherical cerium oxide, and molten cerium oxide are more preferable. good. From the viewpoint of improving the filling property of the inorganic filler of the sheet-like laminate of the present invention containing a curable resin composition, it is more preferable to melt the cerium oxide in a spherical shape. One type or two or more types of inorganic fillers can be used. Commercially available spherical molten cerium oxide, for example, "SOC2" and "SOC1" manufactured by Admatechs.

無機充填材的平均粒徑雖不特別限定,由在絕緣層上進行微細配線形成觀點來看,5μm以下為佳、3μm以下更佳、1μm以下再佳,0.8μm以下又再佳,0.6μm以下尤佳。另一方面,硬化性樹脂組成物作成清漆的場合,由防止清漆的黏度上昇、操作性降低觀點來看,0.01μm以上為佳、0.03μm以上更佳、0.07μm以上再佳,0.1μm以上再較佳。上述無機充填材的平均粒徑,可根據米式(Mie)散射理論以雷射繞射.散射法測定。具體上可藉由雷射繞射散射式粒度分佈測定裝置,將無機充填材的粒度分佈以體積基準製作,將其中位直徑作為平均粒徑進 行測定。測定樣本宜使用將無機充填材以超音波分散於水中者。雷射繞射散射式粒度分佈測定裝置方面,可使用(股)堀場製作所製LA-950等。 The average particle diameter of the inorganic filler is not particularly limited, and is preferably 5 μm or less, more preferably 3 μm or less, more preferably 1 μm or less, and more preferably 0.8 μm or less, and 0.6 μm or less from the viewpoint of forming fine wiring on the insulating layer. Especially good. On the other hand, when the curable resin composition is used as a varnish, it is preferably 0.01 μm or more, more preferably 0.03 μm or more, more preferably 0.07 μm or more, and more preferably 0.1 μm or more from the viewpoint of preventing the viscosity of the varnish from increasing and improving the workability. Preferably. The average particle size of the above inorganic filler can be laser diffraction according to the Mie scattering theory. Determined by scattering method. Specifically, the particle size distribution of the inorganic filler can be made on a volume basis by a laser diffraction scattering particle size distribution measuring device, and the median diameter is taken as the average particle diameter. Line measurement. It is preferable to use a sample in which the inorganic filler is dispersed in water by ultrasonic waves. For the laser diffraction scattering type particle size distribution measuring apparatus, LA-950 or the like manufactured by Horiba Co., Ltd. can be used.

無機充填材的含量雖未特別限定,由防止薄片狀層合材料的薄片形態之可撓性降低觀點來看,硬化性樹脂組成物中的不揮發成分作為100質量%的場合,無機充填材的量以30~90質量%為佳、40~85質量%更佳、50~85質量%再較佳。特別在本發明中,即使含無機充填材50質量%以上的硬化性樹脂組成物,亦可使剝撕強度提升。 The content of the inorganic filler is not particularly limited, and the inorganic filler is used when the non-volatile component in the curable resin composition is 100% by mass from the viewpoint of preventing the flexibility of the sheet form of the sheet-like laminate. The amount is preferably from 30 to 90% by mass, more preferably from 40 to 85% by mass, even more preferably from 50 to 85% by mass. In particular, in the present invention, even if the curable resin composition containing 50% by mass or more of the inorganic filler is used, the peeling strength can be improved.

無機充填材,為了耐濕性提升、分散性提升,以經偶合劑等進行表面處理(塗佈)者較佳。表面處理劑(偶合劑)方面,以環氧基矽烷系偶合劑、胺基矽烷系偶合劑、巰基矽烷系偶合劑、矽烷系偶合劑、有機矽氮烷化合物、鈦酸酯系偶合劑所選出的1種以上較佳。此等中,胺基矽烷系偶合劑,耐濕性、分散性、硬化物之特性等優異,而以苯基胺基矽烷系偶合劑更較佳。市售品方面,可舉例如信越化學工業(股)製「KBM403」(3-環氧丙氧基丙基三甲氧基矽烷)、信越化學工業(股)製「KBM803」(3-巰基丙基三甲氧基矽烷)、信越化學工業(股)製「KBE903」(3-胺基丙基三乙氧基矽烷)、信越化學工業(股)製「KBM573」(N-苯基-3-胺基丙基三甲氧基矽烷)、信越化學工業(股)製「KBM103」(苯基三甲氧基矽烷)、信越化學工業(股)製「SZ- 31」(六甲基二矽氮烷)等。 The inorganic filler is preferably subjected to surface treatment (coating) by a coupling agent or the like in order to improve moisture resistance and improve dispersibility. The surface treatment agent (coupling agent) is selected from an epoxy decane coupling agent, an amino decane coupling agent, a mercapto decane coupling agent, a decane coupling agent, an organic decazane compound, and a titanate coupling agent. One or more of them are preferred. Among these, the amino decane coupling agent is excellent in moisture resistance, dispersibility, and properties of a cured product, and a phenylamino decane coupling agent is more preferable. For example, "KBM403" (3-glycidoxypropyltrimethoxydecane) manufactured by Shin-Etsu Chemical Co., Ltd., and "KBM803" (3-mercaptopropyl) manufactured by Shin-Etsu Chemical Co., Ltd. "Methoxy decane", "KBE903" (3-aminopropyltriethoxy decane) manufactured by Shin-Etsu Chemical Co., Ltd., "KBM573" (N-phenyl-3-amino group) manufactured by Shin-Etsu Chemical Co., Ltd. "propyl trimethoxy decane", "SKM103" (phenyl trimethoxy decane) manufactured by Shin-Etsu Chemical Co., Ltd., and "SZ-" manufactured by Shin-Etsu Chemical Co., Ltd. 31" (hexamethyldioxane) and the like.

[其他成分] [Other ingredients]

本發明的硬化性樹脂組成物,除上述的成分外,其他成分可適當搭配硬化促進劑;熱可塑性樹脂;乙烯基苄基化合物、丙烯酸化合物、馬來醯亞胺化合物、嵌段異氰酸酯化合物般熱硬化性樹脂;磷系化合物、氫氧化金屬物等的難燃劑;矽粉末、尼龍粉末、氟粉末、橡膠粒子等的有機充填劑;有機溶劑;Orben、Penton等的增黏劑;矽酮系、氟系、高分子系的消泡劑;咪唑系、噻唑系、三唑系、矽烷偶合劑等的密著性賦予劑;酞菁.藍、酞菁.綠、Iodine.綠、Disazo Yellow、碳黑等的著色劑;添加劑等。 The curable resin composition of the present invention may be appropriately blended with a curing accelerator, a thermoplastic resin, a vinyl benzyl compound, an acrylic compound, a maleimide compound, or a blocked isocyanate compound, in addition to the above components. Curable resin; flame retardant such as phosphorus compound or metal hydroxide; organic filler such as barium powder, nylon powder, fluorine powder, rubber particles; organic solvent; tackifier of Orben, Penton, etc. A fluorine-based or polymer-based antifoaming agent; an adhesion imparting agent such as an imidazole-based, a thiazole-based, a triazole-based or a decane coupling agent; and a phthalocyanine. Blue, turnip. Green, Iodine. Green, Disazo Yellow, carbon black and other coloring agents; additives, etc.

硬化促進劑方面,為以上述硬化劑可促進上述環氧樹脂的交聯及硬化者,則何種硬化促進劑皆可使用,例如胺化合物、胍化合物、咪唑化合物、鏻化合物及金屬系硬化促進劑等。此等亦可1種或2種以上組合使用。 In the case of the hardening accelerator, if the above-mentioned curing agent can promote crosslinking and hardening of the above epoxy resin, any curing accelerator can be used, for example, an amine compound, a cerium compound, an imidazole compound, a cerium compound, and a metal-based hardening accelerator. Agents, etc. These may be used alone or in combination of two or more.

本發明可使用的胺化合物方面,雖不特別限定,可舉例如三乙基胺、三丁基胺等之三烷基胺、4-二甲基胺基吡啶(DMAP)、苄基二甲基胺、2,4,6,-參(二甲基胺基甲基)酚、1,8-二氮雜雙環(5,4,0)-十一烯(以下縮寫為DBU)。等之胺化合物等。此等亦可1種或2種以上組合使用。此等亦可1種或2種以上組合使用。 The amine compound which can be used in the invention is not particularly limited, and examples thereof include a trialkylamine such as triethylamine or tributylamine, 4-dimethylaminopyridine (DMAP), and benzyldimethyl group. Amine, 2,4,6,-paraxyl (dimethylaminomethyl)phenol, 1,8-diazabicyclo(5,4,0)-undecene (hereinafter abbreviated as DBU). Ethamamine compounds and the like. These may be used alone or in combination of two or more. These may be used alone or in combination of two or more.

本發明可使用的咪唑化合物方面,可為以下的一般式(11) (式中,R7~R10各自相同或相異,為氫原子、鹵素原子、氰基、硝基、甲醯基、C1~20烷基、C2~20烯基、C2~20炔基、C3~20烯丙基、C4~20烷基二烯基、C4~20聚烯基、C6~20芳基、C6~20烷基芳基、C6~20芳基烷基、C4~20環烷基、C4~20環烯基、(C5~10環烷基)C1~10烷基、可具有C1~10烴基的矽烷基、源自環氧樹脂的羥基乙基)所表示之化合物亦可。 The imidazole compound which can be used in the present invention may be the following general formula (11) (Wherein, R 7 ~ R 10 are each the same or different, is a hydrogen atom, a halogen atom, cyano, nitro, methyl acyl, C 1 ~ 20 alkyl group, C 2 ~ 20 alkylene group, C 2 ~ 20 alkynyl group, C 3 ~ 20 allyl, C 4 ~ 20 alkyldienyl group, C 4 ~ 20 polyalkenyl group, C 6 ~ 20 aryl group, C 6 ~ 20 aryl group, C 6 ~ 20 aryl An alkyl group, a C 4-20 cycloalkyl group, a C 4-20 cycloalkenyl group, a (C 5-10 cycloalkyl) C 1-10 alkyl group, a decyl group which may have a C 1-10 hydrocarbon group, derived from a ring The compound represented by the hydroxyethyl group of the oxygen resin may also be used.

更具體上,咪唑化合物可為1-苄基-2-苯基咪唑、2-乙基-4-甲基咪唑、1-氰基乙基-2-乙基-4-甲基咪唑、1-氰基乙基-2-十一基咪唑、1-氰基乙基-2-苯基咪唑、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]-乙基-S-三嗪、2,4-二胺基-6-[2’-十一基咪唑基-(1’)]-乙基-S-三嗪、2,4-二胺基-6-[2’-乙基-4’-甲基咪唑基-(1’)]-乙基-S-三嗪、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]-乙基-S-三嗪異三聚氰酸加成物、2-苯基咪唑異三聚氰酸加成物、2-苯基-4,5-二羥基甲基咪唑、2-苯基-4-甲基-5-羥基甲基咪唑、2-苯基-4-甲基咪唑、咪唑化合物與環氧樹脂之加成體及2,4-二胺基-6-乙烯基-S-三嗪所成的群所選出的化合物。此等亦可1種或2種以上組合使用。 More specifically, the imidazole compound may be 1-benzyl-2-phenylimidazole, 2-ethyl-4-methylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1- Cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-phenylimidazole, 2,4-diamino-6-[2'-methylimidazolyl-(1')]- Ethyl-S-triazine, 2,4-diamino-6-[2'-undecidamidazolyl-(1')]-ethyl-S-triazine, 2,4-diamino- 6-[2'-ethyl-4'-methylimidazolyl-(1')]-ethyl-S-triazine, 2,4-diamino-6-[2'-methylimidazolyl- (1')]-Ethyl-S-triazine iso-cyanuric acid adduct, 2-phenylimidazolium isocyanurate adduct, 2-phenyl-4,5-dihydroxymethylimidazole , 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2-phenyl-4-methylimidazole, an adduct of an imidazole compound and an epoxy resin, and 2,4-diamino-6- A selected compound of the group formed by vinyl-S-triazine. These may be used alone or in combination of two or more.

本發明可使用的金屬系硬化促進劑,雖不特別限定,可舉例如鈷、銅、鋅、鐵、鎳、錳、錫等的金屬之有機金屬錯合物或有機金屬鹽。有機金屬錯合物的具體例,可舉例如鈷(II)乙醯丙酮(Co(II)Ac)、鈷(III)乙醯丙酮(Co(III)Ac)等的有機鈷錯合物、銅(II)乙醯丙酮等的有機銅錯合物、鋅(II)乙醯丙酮等的有機鋅錯合物、鐵(III)乙醯丙酮等的有機鐵錯合物、鎳(II)乙醯丙酮等的有機鎳錯合物、錳(II)乙醯丙酮等的有機錳錯合物等。有機金屬鹽方面,可舉例如辛基酸鋅、辛基酸錫、萘酸鋅、萘酸鈷、硬脂酸錫、硬脂酸鋅等。此等亦可1種或2種以上組合使用。 The metal-based hardening accelerator which can be used in the present invention is not particularly limited, and examples thereof include organometallic complexes or organic metal salts of metals such as cobalt, copper, zinc, iron, nickel, manganese, and tin. Specific examples of the organometallic complex include organic cobalt complexes such as cobalt (II) acetamidineacetone (Co(II)Ac), cobalt (III) acetamidineacetone (Co(III)Ac), and copper. (II) an organic copper complex such as acetonitrile acetone, an organic zinc complex such as zinc (II) acetamidine, an organic iron complex such as iron (III) acetamidine, or nickel (II) acetamidine. An organic nickel complex such as acetone or an organic manganese complex such as manganese (II)acetonitrile or the like. Examples of the organic metal salt include zinc octoate, tin octylate, zinc naphthalate, cobalt naphthalate, tin stearate, and zinc stearate. These may be used alone or in combination of two or more.

硬化促進劑的含量以硬化性樹脂組成物中的不揮發成分的合計作為100質量%的場合,在0.005~3質量%的範圍使用為佳、0.01~1質量%的範圍使用更較佳。 When the content of the hardening accelerator is 100% by mass based on the total of the nonvolatile components in the curable resin composition, it is preferably used in the range of 0.005 to 3% by mass, and more preferably 0.01 to 1% by mass.

熱可塑性樹脂方面,不阻礙本發明的效果程度中,可舉例如(A)具有蒽構造的苯氧基樹脂以外的苯氧基樹脂、聚乙烯基縮醛樹脂、聚醯亞胺樹脂、聚醯胺醯亞胺樹脂、聚醚碸樹脂、環烯烴聚合物及聚碸樹脂等,以聚乙烯基縮醛樹脂較佳。此等亦可1種或2種以上組合使用。 In the thermoplastic resin, for example, (A) a phenoxy resin other than a phenoxy resin having a fluorene structure, a polyvinyl acetal resin, a polyimine resin, and a polyfluorene may be mentioned as long as it does not inhibit the effects of the present invention. Amino acetal resin, a polyether oxime resin, a cycloolefin polymer, a polyfluorene resin, etc. are preferable, and a polyvinyl acetal resin is preferable. These may be used alone or in combination of two or more.

熱可塑性樹脂的聚苯乙烯換算的重量平均分子量以8000~70000的範圍為佳、10000~60000的範圍更佳、20000~60000的範圍再較佳。熱可塑性樹脂的聚苯乙烯換算的重量平均分子量,與(A)苯氧基樹脂的重量平 均分子量的測定方法同樣可以膠體滲透層析(GPC)法測定。 The polystyrene-equivalent weight average molecular weight of the thermoplastic resin is preferably in the range of 8,000 to 70,000, more preferably in the range of 10,000 to 60,000, and still more preferably in the range of 20,000 to 60,000. The polystyrene-equivalent weight average molecular weight of the thermoplastic resin is equal to the weight of the (A) phenoxy resin The method for determining the average molecular weight can also be measured by a colloidal permeation chromatography (GPC) method.

有機溶劑,可舉例如丙酮、甲基乙基酮、環己酮等的酮類、乙酸乙基酯、乙酸丁基酯、溶纖劑乙酸酯、丙二醇單甲基醚乙酸酯、卡必醇乙酸酯等的乙酸酯類、溶纖劑、丁基卡必醇等的卡必醇類、溶煤石油精、甲苯、二甲苯等的芳香族烴類、二甲基甲醯胺、二甲基乙醯胺、N-甲基吡咯烷酮等的醯胺系溶劑等。有機溶劑可組合2種以上使用。 Examples of the organic solvent include ketones such as acetone, methyl ethyl ketone, and cyclohexanone, ethyl acetate, butyl acetate, cellosolve acetate, propylene glycol monomethyl ether acetate, and carbene. An acetate such as an alcohol acetate, a cellosolve, a carbitol such as butyl carbitol, a petroleum-soluble petroleum spirit, an aromatic hydrocarbon such as toluene or xylene, dimethylformamide or the like. A guanamine-based solvent such as methyl acetamide or N-methylpyrrolidone. Two or more types of organic solvents can be used in combination.

[硬化性樹脂組成物之調製] [Modulation of Curable Resin Composition]

本發明的硬化性樹脂組成物可藉由將上述成分適宜混合,又,因應必要以三本輥、球磨機、玻珠研磨機、混砂機等的混練手段、或者高速旋轉混合機、快速混合機、行星式拌和機等的攪拌手段進行混練或混合來調製。又,進而可藉由添加上述的有機溶劑作成樹脂清漆來調製。 The curable resin composition of the present invention can be suitably mixed by the above-mentioned components, and if necessary, a kneading means such as a three-roller, a ball mill, a bead mill, a sand mixer, or a high-speed rotary mixer or a quick mixer. The stirring means such as a planetary mixer is mixed or mixed to prepare. Further, it can be prepared by adding the above organic solvent as a resin varnish.

本發明的硬化性樹脂組成物中,不僅絕緣層表面的算術平均粗度低,方均根粗度亦低,且於其上可形成具有充分的剝撕強度的鍍敷導體層,故多層印刷配線板之製造中,可宜用作為多層印刷配線板的絕緣層用硬化性樹脂組成物。更且可宜用作為以鍍敷形成導體層用的硬化性樹脂組成物(以鍍敷形成導體層的多層印刷配線板的絕緣層用樹脂組成物),更宜用作為多層印刷配線板的增層用硬化性樹脂組成物。 In the curable resin composition of the present invention, not only the arithmetic mean roughness of the surface of the insulating layer is low, but also the square root thickness is low, and a plated conductor layer having sufficient peeling strength can be formed thereon, so that the multilayer printed wiring board is formed. In the production, a curable resin composition for an insulating layer as a multilayer printed wiring board can be suitably used. Further, it is more preferably used as a curable resin composition for forming a conductor layer by plating (a resin composition for an insulating layer of a multilayer printed wiring board on which a conductor layer is formed by plating), and is more preferably used as a multilayer printed wiring board. The layer is made of a curable resin composition.

本發明的硬化性樹脂組成物之形態方面,不特別限定,可適用接著薄膜、預浸體等的薄片狀層合材料、電路基板(層合板用途、多層印刷配線板用途等。本發明的硬化性樹脂組成物亦可以清漆狀態塗佈於電路基板後形成絕緣層,但工業上一般以接著薄膜、預浸體等的薄片狀層合材料的形態使用較佳。硬化性樹脂組成物之軟化點,由薄片狀層合材料的層合性的觀點,以40~150℃較佳。 The form of the curable resin composition of the present invention is not particularly limited, and a sheet-like laminate such as a film or a prepreg or a circuit board (for laminate use, multilayer printed wiring board use, etc.) can be applied. The resin composition may be applied to the circuit board in a varnish state to form an insulating layer. However, it is generally used in the form of a sheet-like laminate which is followed by a film or a prepreg, and the softening point of the curable resin composition. From the viewpoint of the lamination property of the sheet-like laminate, it is preferably from 40 to 150 °C.

[多層印刷配線板] [Multilayer printed wiring board]

本發明的硬化性樹脂組成物可用作為多層印刷配線板的絕緣層用硬化性樹脂組成物。本發明可使用的多層印刷配線板為包含將本發明的硬化性樹脂組成物或薄片狀層合材料熱硬化而得到的絕緣層之多層印刷配線板。 The curable resin composition of the present invention can be used as a curable resin composition for an insulating layer of a multilayer printed wiring board. The multilayer printed wiring board which can be used in the present invention is a multilayer printed wiring board including an insulating layer obtained by thermally curing the curable resin composition or the sheet-like laminate of the present invention.

在此,熱硬化的條件雖可因應硬化性樹脂組成物中的環氧樹脂的種類、含量等適宜選擇,例如硬化溫度為90~220℃、較佳為160℃~210℃,硬化時間為10分鐘~180分鐘、較佳以20~120分鐘加熱進行。又,亦可分2階段進行熱硬化。 Here, the conditions of the thermosetting may be appropriately selected depending on the type and content of the epoxy resin in the curable resin composition, for example, the curing temperature is 90 to 220 ° C, preferably 160 ° C to 210 ° C, and the hardening time is 10 The heating is carried out in minutes to 180 minutes, preferably in 20 to 120 minutes. Further, it is also possible to perform thermal hardening in two stages.

在此絕緣層的線熱膨脹係數(CTE)(JIS K7197)以25~150℃之平均的線熱膨脹係數進行測定,以成為20ppm/℃以下為佳、19ppm/℃以下更較佳。下限值雖未特別限定,一般成為4ppm/℃。藉由此,防止絕緣層(增層)與導體層(配線)之變形,可得到信賴性高的多層印 刷配線板。 The linear thermal expansion coefficient (CTE) (JIS K7197) of the insulating layer is measured by an average linear thermal expansion coefficient of 25 to 150 ° C, preferably 20 ppm / ° C or less, more preferably 19 ppm / ° C or less. The lower limit is not particularly limited and is generally 4 ppm/° C. Thereby, deformation of the insulating layer (addition layer) and the conductor layer (wiring) can be prevented, and a multi-layer printing with high reliability can be obtained. Brush the wiring board.

絕緣層表面可進行粗化處理。乾式的粗化處理,可舉例如電漿處理等。濕式的粗化處理,例如可藉由使用種種的處理液進行。例如依序進行以膨潤液之膨潤處理、以氧化劑之粗化處理及以中和液之中和處理的方法。因此,處理液可為此等膨潤液、氧化劑、中和液的套組。 The surface of the insulating layer can be roughened. The dry roughening treatment may, for example, be plasma treatment or the like. The wet roughening treatment can be carried out, for example, by using various treatment liquids. For example, a method of swelling with a swelling liquid, a roughening treatment with an oxidizing agent, and a neutralization treatment with a neutralizing liquid are sequentially performed. Therefore, the treatment liquid can be a set of such a swelling liquid, an oxidizing agent, and a neutralizing liquid.

濕式的粗化處理者因可一次處理大面積或複數枚,在生產性高觀點上較佳。 The wet roughening processor is preferable in terms of high productivity because it can process a large area or a plurality of pieces at a time.

以膨潤液之膨潤處理,藉由使絕緣層在50~80℃、5~20分鐘(較佳為55~70℃、8~15分鐘),浸漬於膨潤液進行。膨潤液,可舉例如鹼溶液、界面活性劑溶液等,較佳為鹼溶液。該鹼溶液,可舉例如氫氧化鈉溶液、氫氧化鉀溶液等。市售膨潤液,可舉例如Atotech日本(股)製的Swelling Dip Securiganth P)、Swelling Dip Securiganth SBU等。 The swelling treatment of the swelling liquid is carried out by immersing the insulating layer at 50 to 80 ° C for 5 to 20 minutes (preferably 55 to 70 ° C for 8 to 15 minutes). The swelling liquid may, for example, be an alkali solution or a surfactant solution, and is preferably an alkali solution. The alkali solution may, for example, be a sodium hydroxide solution or a potassium hydroxide solution. Commercially available swelling liquids include, for example, Swelling Dip Securiganth P) manufactured by Atotech Japan Co., Ltd., Swelling Dip Securiganth SBU, and the like.

以氧化劑之粗化處理,藉由使絕緣層在60~80℃、10~30分鐘(較佳為70~80℃、15~25分鐘),浸漬於氧化劑溶液進行。氧化劑,可舉例如於氫氧化鈉之水溶液溶解有過錳酸鉀或過錳酸鈉的鹼性過錳酸溶液、重鉻酸鹽、臭氧、過氧化氫/硫酸、硝酸等。又,鹼性過錳酸溶液中之過錳酸鹽的濃度成為5~10質量%較佳。市售氧化劑,可舉例如Atotech日本(股)製的concentrates Compact CP、Dosing Solution security Gans P等的鹼性過錳酸溶液。 The oxidizing agent is subjected to roughening treatment, and the insulating layer is immersed in an oxidizing agent solution at 60 to 80 ° C for 10 to 30 minutes (preferably 70 to 80 ° C for 15 to 25 minutes). The oxidizing agent may, for example, be an alkaline permanganic acid solution in which potassium permanganate or sodium permanganate is dissolved in an aqueous solution of sodium hydroxide, dichromate, ozone, hydrogen peroxide/sulfuric acid, nitric acid or the like. Further, the concentration of the permanganate in the alkaline permanganic acid solution is preferably 5 to 10% by mass. The commercially available oxidizing agent may, for example, be an alkaline permanganic acid solution such as concentrates Compact CP or Dosing Solution security Gans P manufactured by Atotech Japan Co., Ltd.

以中和液之中和處理,藉由在30~50℃、3~10分鐘(較佳為35~45℃、3~8分鐘),浸漬於中和液進行。中和液方面,以酸性的水溶液為佳,市售品方面,可舉例如Atotech日本(股)製的reduction Solutions Shin security Gantt P。 The mixture is neutralized by a neutralizing solution, and immersed in a neutralizing solution at 30 to 50 ° C for 3 to 10 minutes (preferably 35 to 45 ° C for 3 to 8 minutes). In the case of the neutralizing liquid, an acidic aqueous solution is preferred, and in the case of a commercial product, for example, a reduction solution Shin security Gantt P manufactured by Atotech Japan Co., Ltd. may be mentioned.

粗化處理後可使絕緣層在50~120℃進行10~60分鐘(較佳為60~100℃、20~40分鐘)乾燥。 After the roughening treatment, the insulating layer may be dried at 50 to 120 ° C for 10 to 60 minutes (preferably 60 to 100 ° C, 20 to 40 minutes).

粗化處理後的絕緣層表面的表面粗度,為了微細配線形成提升,以算術平均粗度(Ra)為350nm以下為佳、300nm以下更佳、250nm以下再佳、100nm以下尤佳。算術平均粗度(Ra)的下限值雖無限制,一般為10nm以上、40nm以上、70nm以上等。方均根粗度(Rq)以500nm以下為佳、450nm以下更佳、350nm以下再佳,150nm以下尤佳。方均根粗度(Rq)的下限值雖無限制,一般為20nm以上、50nm以上、90nm以上等。又,方均根粗度(Rq)為反映絕緣層表面的局部狀態,藉由把握Rq,可確認成為更緻密且平滑的絕緣層表面,剝撕強度安定化。此相當為將硬化性樹脂組成物熱硬化,經粗化處理後的絕緣層的表面粗度。 The surface roughness of the surface of the insulating layer after the roughening treatment is preferably 30 nm or less in arithmetic mean roughness (Ra), more preferably 300 nm or less, more preferably 250 nm or less, or more preferably 100 nm or less in order to improve the fine wiring. The lower limit of the arithmetic mean roughness (Ra) is not limited, but is generally 10 nm or more, 40 nm or more, 70 nm or more. The root mean square roughness (Rq) is preferably 500 nm or less, more preferably 450 nm or less, more preferably 350 nm or less, and particularly preferably 150 nm or less. The lower limit of the square root roughness (Rq) is not limited, but is generally 20 nm or more, 50 nm or more, 90 nm or more. Further, the root mean square roughness (Rq) is a partial state of the surface of the insulating layer, and by grasping Rq, it is confirmed that the surface of the insulating layer is denser and smoother, and the peeling strength is stabilized. This is equivalent to the surface roughness of the insulating layer after the heat-hardening of the curable resin composition and the roughening treatment.

剝撕強度,為了使絕緣層與與其相鄰的層,例如與導體層充分密著,以0.45kgf/cm(4.41N/cm)以上為佳、0.50kgf/cm(4.90N/cm)以上更較佳。剝撕強度的上限值愈高愈好,並無特別限制,一般為1.5kgf/cm(14.7N/cm)以下、1.2kgf/cm(11.8N/cm)以下、 1.0kgf/cm(9.81N/cm)以下、0.8kgf/cm(7.85N/cm)以下等。 The peeling strength is preferably 0.45 kgf/cm (4.41 N/cm) or more, and 0.50 kgf/cm (4.90 N/cm) or more in order to make the insulating layer and the layer adjacent thereto, for example, sufficiently adhered to the conductor layer. Preferably. The upper limit of the peeling strength is preferably as high as possible, and is not particularly limited, and is generally 1.5 kgf/cm (14.7 N/cm) or less and 1.2 kgf/cm (11.8 N/cm) or less. 1.0 kgf/cm (9.81 N/cm) or less, 0.8 kgf/cm (7.85 N/cm) or less.

斷裂點延伸,係將硬化性樹脂組成物熱硬化得到的硬化物之拉伸強度依據JIS K7127進行測定。具體上可製作由該硬化物切出成啞鈴狀的試驗片,剝離PET薄膜,使用Orientec公司製拉伸試驗機RTC-1250A進行測定。斷裂點延伸以1.5%以上為佳、1.6%以上更佳、1.7%以上再較佳。 The tensile strength of the cured product obtained by thermally hardening the curable resin composition was measured in accordance with JIS K7127. Specifically, a test piece cut out of the cured product into a dumbbell shape was prepared, and the PET film was peeled off and measured using a tensile tester RTC-1250A manufactured by Orientec. The elongation at break is preferably 1.5% or more, more preferably 1.6% or more, and still more preferably 1.7% or more.

[薄片狀層合材料] [Sheet laminate]

本發明所使用的薄片狀層合材料為使上述硬化性樹脂組成物進行層形成的硬化前的薄片狀材料。該薄片狀層合材料可藉由該業者習知方法,例如調製於上述的有機溶劑溶解有樹脂組成物的樹脂清漆,將該樹脂清漆使用模式塗佈機等,於支持體塗佈,再以加熱、或者熱風吹拂等使有機溶劑乾燥,於支持體上形成樹脂組成物層(薄片狀層合材料),製造附支持體薄片狀層合材料。又,將樹脂清漆於玻璃絲網等的薄片狀補強基材以熱熔法或溶劑法含浸、乾燥,亦可將薄片狀層合材料作成預浸體。又,亦有將附支持體薄片狀層合材料稱為接著薄膜場合。 The sheet-like laminate used in the present invention is a sheet-like material before curing in which the curable resin composition is layered. The sheet-like laminate can be applied to a resin varnish in which the resin composition is dissolved in the above organic solvent by a conventional method of the above, and the resin varnish can be applied to the support using a pattern coater or the like. The organic solvent is dried by heating or hot air blowing, and a resin composition layer (sheet-like laminate) is formed on the support to produce a support sheet-like laminate. Further, the resin varnish may be impregnated and dried by a hot melt method or a solvent method on a sheet-like reinforcing substrate such as a glass mesh, or the sheet-like laminate may be used as a prepreg. Further, there is also a case where the support sheet-like laminate is referred to as a film.

乾燥條件不特別限定,以使樹脂組成物層之有機溶劑的含量成為10質量%以下、較佳為5質量%以下之方式乾燥。清漆中的有機溶劑量雖因有機溶劑的沸點而異,例如藉由將含30~60質量%之有機溶劑的清漆在 50~150℃、3~10分鐘左右乾燥,可形成樹脂組成物層。 The drying conditions are not particularly limited, and the content of the organic solvent of the resin composition layer is 10% by mass or less, preferably 5% by mass or less. The amount of the organic solvent in the varnish varies depending on the boiling point of the organic solvent, for example, by using a varnish containing 30 to 60% by mass of an organic solvent. It is dried at 50 to 150 ° C for about 3 to 10 minutes to form a resin composition layer.

得到的薄片狀層合材料的厚度雖不特別限定,例如1~150μm的範圍為佳、2~100μm的範圍更佳、3~50μm的範圍再佳、5~30μm的範圍尤佳。 The thickness of the obtained sheet-like laminate is not particularly limited, and is preferably in the range of preferably 1 to 150 μm, more preferably in the range of 2 to 100 μm, more preferably in the range of 3 to 50 μm, and particularly preferably in the range of 5 to 30 μm.

該薄片狀層合材料,樹脂組成物層成為複數層亦可、樹脂組成物層的一面可具有支持體、另一面可具有保護薄膜。 In the sheet-like laminate, the resin composition layer may be a plurality of layers, and one side of the resin composition layer may have a support, and the other surface may have a protective film.

[支持體] [Support]

本發明可使用的支持體方面,可舉例如塑膠薄膜或金屬箔。具體上塑膠薄膜方面,可舉例如聚乙烯對苯二甲酸酯(以下有簡稱「PET」之情形。)、聚乙烯對萘二甲酸酯等的聚酯、聚碳酸酯、聚乙烯、聚丙烯、丙烯酸、環狀聚烯烴、三乙醯基纖維素、聚醚硫化物、聚醚酮、聚醯亞胺等。其中,以聚乙烯對苯二甲酸酯薄膜、聚乙烯對萘二甲酸酯薄膜為佳,尤其以便宜且易取得的聚乙烯對苯二甲酸酯薄膜較佳。 The support which can be used in the present invention may, for example, be a plastic film or a metal foil. Specific examples of the plastic film include polyethylene terephthalate (hereinafter referred to as "PET"), polyester such as polyethylene-naphthalate, polycarbonate, polyethylene, and poly. Propylene, acrylic acid, cyclic polyolefin, triethylenesulfonyl cellulose, polyether sulfide, polyether ketone, polyimine, and the like. Among them, a polyethylene terephthalate film or a polyethylene p-naphthalate film is preferable, and a polyethylene terephthalate film which is inexpensive and easily available is preferable.

金屬箔方面,可舉例如銅箔、鋁箔等。 Examples of the metal foil include copper foil, aluminum foil, and the like.

廣用性的點,以塑膠薄膜為佳,使用塑膠薄膜場合,為使剝離性提升,以使用與含硬化性樹脂組成物之層相接面為經脫膜處理的支持體較佳。脫膜處理使用的脫膜劑方面,若含硬化性樹脂組成物之層可由支持體剝離,則不特別限制,例如矽系脫膜劑、醇酸樹脂系脫膜劑、聚烯烴樹脂、胺基甲酸乙酯樹脂、氟樹脂等。又,經 脫膜處理的支持體,可使用市售附脫膜層之塑膠薄膜,較佳者可舉例如具有以醇酸樹脂系脫膜劑為主成分之脫膜層的PET薄膜之SK-1、AL-5、AL-7(Lintec(股)製)等。又,塑膠薄膜可施以消光處理或電暈處理,亦可於該處理面上形成脫膜層。另一方面,金屬箔亦可以蝕刻溶液除去,亦可不除去將該金屬箔用作為導體層。 In the case of a plastic film, in the case of a plastic film, in order to improve the peeling property, it is preferable to use a support which is a release film in contact with a layer containing a curable resin composition. In the release agent used for the release treatment, the layer containing the curable resin composition is not particularly limited, and is, for example, a bismuth release agent, an alkyd resin release agent, a polyolefin resin, and an amine group. Ethyl formate resin, fluororesin, and the like. Again As the support for the release treatment, a commercially available plastic film having a release layer may be used, and for example, SK-1, AL having a PET film having a release layer containing an alkyd resin release agent as a main component may be preferably used. -5, AL-7 (Lintec system) and the like. Further, the plastic film may be subjected to a matting treatment or a corona treatment, and a release layer may be formed on the treated surface. On the other hand, the metal foil may be removed by an etching solution, or the metal foil may be used as a conductor layer.

支持體的厚度不特別限定,以10~150μm的範圍為佳、20~50μm的範圍更佳、25~45μm的範圍再佳。 The thickness of the support is not particularly limited, and is preferably in the range of 10 to 150 μm, more preferably in the range of 20 to 50 μm, and more preferably in the range of 25 to 45 μm.

本發明可使用的保護薄膜,可以防止在含硬化性樹脂組成物之層附著塵埃等的目的設置。該保護薄膜方面,可使用與支持體同樣的塑膠薄膜。又保護薄膜亦可施以消光處理、電暈處理等的表面處理,亦可施以與上述同樣的脫膜處理。保護薄膜的厚度以3~30μm為佳、5~20μm更較佳。 The protective film which can be used in the present invention can be prevented from being attached to the layer containing the curable resin composition for the purpose of adhering dust or the like. For the protective film, the same plastic film as the support can be used. Further, the protective film may be subjected to a surface treatment such as matting treatment or corona treatment, or the same release treatment as described above may be applied. The thickness of the protective film is preferably 3 to 30 μm, more preferably 5 to 20 μm.

[使用薄片狀層合材料的多層印刷配線板] [Multilayer Printed Wiring Board Using Sheet Laminate]

接著說明使用上述般製造的薄片狀層合材料製造多層印刷配線板之方法的一例。 Next, an example of a method of producing a multilayer printed wiring board using the above-described sheet-like laminate material will be described.

首先,將薄片狀層合材料使用真空層合機,在電路基板的單面或雙面進行層合。電路基板使用的基板,可舉例如玻璃環氧基板、金屬基板、聚酯基板、聚醯亞胺基板、BT樹脂基板、熱硬化型聚伸苯基醚基板等。又,在此電路基板係指在上述般基板的單面或雙面形成有經圖型加工的導體層(電路)者。又由導體層與絕緣層交互層合而成 的多層印刷配線板中,該多層印刷配線板的最外層的單面或雙面成為經圖型加工的導體層(電路)者亦包含於在此之電路基板。又導體層表面亦可以黑化處理、銅蝕刻等預先施以粗化處理。 First, the sheet-like laminate is laminated on one side or both sides of a circuit board using a vacuum laminator. Examples of the substrate used for the circuit board include a glass epoxy substrate, a metal substrate, a polyester substrate, a polyimide substrate, a BT resin substrate, and a thermosetting polyphenylene ether substrate. In addition, the circuit board means a conductor layer (circuit) formed by patterning on one surface or both surfaces of the above-described substrate. And the conductor layer and the insulating layer are alternately laminated In the multilayer printed wiring board, the one or both sides of the outermost layer of the multilayer printed wiring board are also included in the patterned circuit board. Further, the surface of the conductor layer may be subjected to a roughening treatment in advance, such as blackening treatment or copper etching.

上述層合體中,薄片狀層合材料具有保護薄膜之場合,除去該保護薄膜後,因應必要將薄片狀層合材料及電路基板預熱,將薄片狀層合材料邊加壓及加熱邊層合於電路基板。本發明的薄片狀層合材料中,宜使用以真空層合法在減壓下層合於電路基板之方法。層合條件,雖未特別限定,例如空氣壓20mmHg(26.7hPa)以下、10~120秒鐘左右減壓,之後壓著溫度(層合溫度)較佳為70~140℃、壓著壓力(層合壓力)較佳為0.1~1.5MPa、更較佳為0.5~1.2MPa,壓著時間(層合時間)較佳為5~180秒。又,層合方法可為批次式或以輥之連續式亦可。真空層合可使用市售的真空層合機進行。市售的真空層合機,可舉例如Nichigo-Morton(股)製vacuum applicator、(股)名機製作所製真空加壓式層合機、(股)Hitachi Industries Co.,Ltd.製輥式乾塗佈機、Hitachi AIC Inc.(股)製真空層合機等。 In the laminate, when the sheet-like laminate has a protective film, after removing the protective film, the sheet-like laminate and the circuit substrate are preheated, and the sheet-like laminate is pressed and heated while laminating. On the circuit board. In the sheet-like laminate of the present invention, a method of laminating to a circuit board under reduced pressure by vacuum lamination is preferably used. The lamination conditions are not particularly limited. For example, the air pressure is 20 mmHg (26.7 hPa) or less, and the pressure is reduced for about 10 to 120 seconds. Thereafter, the pressing temperature (laminating temperature) is preferably 70 to 140 ° C, and the pressing pressure (layer) The pressing pressure is preferably 0.1 to 1.5 MPa, more preferably 0.5 to 1.2 MPa, and the pressing time (lamination time) is preferably 5 to 180 seconds. Further, the lamination method may be a batch type or a continuous type of rolls. Vacuum lamination can be carried out using a commercially available vacuum laminator. The commercially available vacuum laminating machine may, for example, be a vacuum applicator manufactured by Nichigo-Morton Co., Ltd., a vacuum press laminator manufactured by Nippon Machine Co., Ltd., or a roll dryer manufactured by Hitachi Industries Co., Ltd. A coater, a vacuum laminator made by Hitachi AIC Inc., and the like.

之後,冷卻至室溫(25℃)附近後,將支持體剝離之場合,進行剝離,藉由使樹脂組成物熱硬化形成硬化物,可於電路基板上形成絕緣層。熱硬化的條件可因應樹脂組成物中的樹脂成分的種類、含量等適宜選擇,例如硬化溫度為100~220℃、較佳為160℃~210℃,硬化時間為20分 鐘~180分鐘、較佳為以30~120分鐘加熱進行。又,亦可分2階段進行熱硬化。形成絕緣層後,硬化前未將支持體剝離場合,可因應必要在此進行剝離。 Thereafter, after cooling to the vicinity of room temperature (25 ° C), the support is peeled off, and the resin composition is thermally cured to form a cured product, whereby an insulating layer can be formed on the circuit board. The conditions of the heat curing can be appropriately selected depending on the kind and content of the resin component in the resin composition, for example, the curing temperature is 100 to 220 ° C, preferably 160 ° C to 210 ° C, and the hardening time is 20 minutes. The clock is heated for 180 minutes, preferably 30 to 120 minutes. Further, it is also possible to perform thermal hardening in two stages. After the insulating layer is formed, if the support is not peeled off before the hardening, the peeling may be performed here as necessary.

又,亦可使薄片狀層合材料使用真空加壓機於電路基板的單面或雙面上層合。減壓下、進行加熱及加壓的層合步驟,可使用一般真空熱加壓機進行。例如可藉由將經加熱的SUS板等的金屬板由支持體側進行加壓進行。加壓條件為70~250℃、較佳為100~230℃之溫度,減壓度通常為0.01MPa以下、較佳為0.001MPa以下的減壓下,加壓壓力為0.5~4MPa的範圍、加壓時間以30~150分鐘進行較佳。加熱及加壓可以1階段進行,由控制樹脂的滲出觀點,以分2階段以上進行較佳。例如第1階段之加壓,在溫度為70~150℃、加壓壓力為0.1~1.5MPa的範圍,第2階段之加壓,在溫度為150~200℃、壓力為0.5~4MPa的範圍進行較佳。各階段之時間以20~120分鐘進行較佳。藉由如此使樹脂組成物層熱硬化,可於電路基板上形成絕緣層。市售真空熱加壓機,可舉例如MNPC-V-750-5-200((股)名機製作所製)、VH1-1603(北川精機(股)製)等。 Further, the sheet-like laminate may be laminated on one surface or both surfaces of the circuit board using a vacuum presser. The laminating step of heating and pressurizing under reduced pressure can be carried out using a general vacuum heat press. For example, the metal plate such as a heated SUS plate can be pressurized by the support side. The pressurization condition is 70 to 250 ° C, preferably 100 to 230 ° C, and the degree of pressure reduction is usually 0.01 MPa or less, preferably 0.001 MPa or less, and the pressure is 0.5 to 4 MPa. The pressing time is preferably 30 to 150 minutes. The heating and the pressurization can be carried out in one step, and it is preferable to carry out two or more stages from the viewpoint of controlling the bleeding of the resin. For example, in the first stage, the pressure is 70 to 150 ° C, the pressure is 0.1 to 1.5 MPa, and the second stage is pressurized at a temperature of 150 to 200 ° C and a pressure of 0.5 to 4 MPa. Preferably. The time of each stage is preferably 20 to 120 minutes. By thermally hardening the resin composition layer in this manner, an insulating layer can be formed on the circuit board. For example, MNPC-V-750-5-200 (manufactured by Nippon Seiki Co., Ltd.), VH1-1603 (made by Kitagawa Seiki Co., Ltd.), and the like can be used.

接著,可於電路基板上形成的絕緣層進行開孔加工,形成介層洞、貫穿孔。開孔加工,例如可以鑽孔器、雷射、電漿等的習知方法,且可因應必要組合此等方法進行,而碳酸氣體雷射、YAG雷射等的雷射之開孔加工為最一般的方法。開孔加工前未將支持體剝離的場合, 在此進行剝離。 Next, the insulating layer formed on the circuit board is subjected to a hole drilling process to form a via hole and a through hole. Open hole processing, for example, a conventional method such as a drill, a laser, a plasma, etc., and may be performed in combination with such a method, and a laser of a carbon dioxide gas laser, a YAG laser, or the like is processed as the most The general method. Where the support is not peeled off before the hole processing, Stripping is performed here.

接著,絕緣層表面進行上述的粗化處理,再以乾式鍍敷或濕式鍍敷可於絕緣層上形成導體層。乾式鍍敷方面,可使用蒸鍍、濺鍍、離子披覆等的習知方法。濕式鍍敷方面,可舉例如組合無電解鍍敷與電解鍍敷,形成導體層之方法、形成與導體層逆圖型的鍍敷阻劑且僅以無電解鍍敷形成導體層之方法等。之後的圖型形成的方法,例如可使用該業者習知Subtractive Method、semi-additive Method等,藉由重複數次上述一連串步驟,成為多段層合增層的多層印刷配線板。本發明中,因低粗度、高剝撕強度,宜用作為多層印刷配線板的增層。 Next, the surface of the insulating layer is subjected to the above-described roughening treatment, and a conductor layer is formed on the insulating layer by dry plating or wet plating. For dry plating, a conventional method such as vapor deposition, sputtering, or ion coating can be used. Examples of the wet plating include a method in which electroless plating and electrolytic plating are combined, a method of forming a conductor layer, a plating resist which forms a reverse pattern with a conductor layer, and a method of forming a conductor layer only by electroless plating. . The method of pattern formation thereafter can be, for example, a multilayer printed wiring board of a multi-stage laminated build-up layer by repeating the above-described series of steps several times using the conventional Subtractive Method, semi-additive method, or the like. In the present invention, it is preferable to use as a build-up layer of a multilayer printed wiring board because of low thickness and high peeling strength.

[半導體裝置] [semiconductor device]

藉由使用上述般製造的多層印刷配線板,可製造半導體裝置。於本發明可使用的多層印刷配線板的導通處,藉由將半導體晶片實裝,可製造半導體裝置。「導通處」係指「多層印刷配線板中之傳遞電信號處」,該場所可為表面或被包埋處。又,若導通,可為導體層的一部份或其以外的連接件等的導電部分。「半導體晶片」係以半導體為材料之電路元件,則不特別限定。 A semiconductor device can be manufactured by using the multilayer printed wiring board manufactured as described above. In the conduction of the multilayer printed wiring board which can be used in the present invention, a semiconductor device can be manufactured by mounting a semiconductor wafer. “Conduit” means “where the electrical signal is transmitted in a multilayer printed wiring board”, which may be a surface or embedded. Further, if it is turned on, it may be a conductive portion such as a part of the conductor layer or a connector other than the conductor layer. The "semiconductor wafer" is a circuit element made of a semiconductor, and is not particularly limited.

製造本發明的半導體裝置時的半導體晶片的實裝方法,若半導體晶片可有效運作,則不特別限定,具體上,可舉例如線料接合實裝方法、覆晶實裝方法、無凸塊增層(BBUL)之實裝方法、異方向性導電薄膜 (ACF)之實裝方法、非導電性薄膜(NCF)之實裝方法等。 The method for mounting a semiconductor wafer in the manufacture of the semiconductor device of the present invention is not particularly limited as long as the semiconductor wafer can be effectively operated. Specifically, for example, a wire bonding mounting method, a flip chip mounting method, and no bump increase Layer (BBUL) mounting method, anisotropic conductive film (ACF) mounting method, non-conductive film (NCF) mounting method, etc.

[實施例] [Examples]

以下將本發明以實施例更具體說明,但本發明不限於此等實施例。又,以下的記載中的「份」在不特別限定下係指「質量份」,「%」在不特別限定下係指「質量%」。 Hereinafter, the invention will be more specifically described by way of examples, but the invention is not limited to the examples. In addition, the "part" in the following description means "parts by mass", and "%" means "mass%" unless otherwise specified.

<測定方法.評估方法> <Measurement method. Evaluation method>

首先說明各種測定方法.評估方法。 First, explain the various measurement methods. evaluation method.

[剝撕強度、算術平均粗度(Ra值)、方均根粗度(Rq值)測定用樣本之調製] [Modulation of peeling strength, arithmetic mean roughness (Ra value), and square root mean roughness (Rq value)] (1)層合板的底層處理 (1) Underlayer treatment of laminates

將玻璃布基材環氧樹脂兩面貼銅層合板(銅箔的厚度18μm、基板厚度0.3mm、松下電工(股)製R5715ES)的兩面以MEC(股)製CZ8100進行1μm蝕刻,進行銅表面的粗化處理。 The glass cloth substrate epoxy resin was coated on both sides of a copper laminate (18 μm thick copper foil, 0.3 mm thick substrate, R5715ES manufactured by Matsushita Electric Works Co., Ltd.), and 1 μm was etched by CZ8100 manufactured by MEC Co., Ltd. to perform copper surface etching. Coarse processing.

(2)接著薄膜的層合 (2) subsequent lamination of the film

將在實施例及比較例製作的接著薄膜使用批次式真空加壓層合機MVLP-500(名機製作所製),層合於經上述粗化處理的環氧樹脂兩面貼銅層合板的兩面。層合藉由 30秒鐘減壓後,使氣壓為13hPa以下,之後以30秒鐘、100℃、壓力0.74MPa進行壓著以進行。 The adhesive film produced in the examples and the comparative examples was laminated on both sides of the double-sided copper-clad laminate of the epoxy resin subjected to the above-mentioned roughening treatment using a batch type vacuum pressure laminator MVLP-500 (manufactured by Nago Seisakusho Co., Ltd.). . Lamination After depressurization for 30 seconds, the gas pressure was 13 hPa or less, and then pressing was carried out for 30 seconds, 100 ° C, and a pressure of 0.74 MPa.

(3)樹脂組成物之硬化 (3) Hardening of resin composition

由經層合的接著薄膜使支持體之聚乙烯對苯二甲酸酯(PET)薄膜剝離後,以100℃、30分鐘,接著180℃、30分鐘的硬化條件使樹脂組成物硬化,形成絕緣層。 After peeling off the polyethylene terephthalate (PET) film of the support by the laminated adhesive film, the resin composition was cured at 100 ° C for 30 minutes, followed by hardening conditions of 180 ° C for 30 minutes to form an insulation. Floor.

(4)粗化處理 (4) roughening treatment

使形成絕緣層的層合板於膨潤液,亦即Atotech日本(股)的含二乙二醇單丁基醚之Swelling Dip Securiganth P(二醇醚類、氫氧化鈉之水溶液),60℃浸漬5分鐘(實施例1、比較例14、5)或10分鐘(實施例2、3、比較例2、3)。接著於作為粗化液之Atotech日本(股)的concentrates Compact P(KMnO4:60g/L、NaOH:40g/L之水溶液),80℃浸漬15分鐘(實施例1、比較例1、4、5)、20分鐘(實施例2、3、比較例2、3)。最後作為中和液於Atotech日本(股)的reduction Solutions Shin security GanttP(硫酸的水溶液),40℃浸漬5分鐘。80℃、進行30分鐘乾燥後,將該基板作為評估基板A。 The laminate forming the insulating layer is immersed in a swelling liquid, that is, Atotech Japan's diethylene glycol monobutyl ether-containing Swelling Dip Securiganth P (glycol ether, aqueous sodium hydroxide solution), impregnated at 60 ° C. Minutes (Example 1, Comparative Examples 14, 5) or 10 minutes (Examples 2, 3, Comparative Examples 2, 3). Subsequently, it was immersed in a concentration of Atotech Japan's concentrates Compact P (KMnO 4 : 60 g / L, NaOH: 40 g / L) as a roughening solution at 80 ° C for 15 minutes (Example 1, Comparative Examples 1, 4, 5) ), 20 minutes (Examples 2, 3, Comparative Examples 2, 3). Finally, as a neutralizing solution, Atotech Japan's reduction solution Shin security GanttP (aqueous solution of sulfuric acid) was immersed at 40 ° C for 5 minutes. After drying at 80 ° C for 30 minutes, the substrate was used as the evaluation substrate A.

(5)semi-additive工法之鍍敷 (5) Plating of semi-additive method

使評估基板A進行鍍敷,形成導體層。具體上,將評 估基板A於含PdCl2之無電解鍍敷用溶液,40℃浸漬5分鐘,接著於無電解銅鍍敷液,25℃浸漬20分鐘。在150℃進行30分鐘加熱,進行退火處理後,形成蝕刻阻劑,蝕刻之圖型形成後,進行硫酸銅電解鍍敷,以30μm的厚度形成導體層。接著使退火處理在190℃進行60分鐘。以該基板作為評估基板B。 The evaluation substrate A is plated to form a conductor layer. Specifically, the substrate A was evaluated in a solution for electroless plating containing PdCl 2 , immersed at 40 ° C for 5 minutes, and then immersed in an electroless copper plating solution at 25 ° C for 20 minutes. After heating at 150 ° C for 30 minutes and annealing treatment, an etching resist was formed, and after the pattern of etching was formed, copper sulfate electrolytic plating was performed to form a conductor layer with a thickness of 30 μm. The annealing treatment was then carried out at 190 ° C for 60 minutes. This substrate was used as the evaluation substrate B.

[粗化後的算術平均粗度(Ra值)、方均根粗度(Rq值)的測定] [Measurement of arithmetic mean roughness (Ra value) and root mean square roughness (Rq value) after roughening]

將評估基板A使用非接觸型表面粗度計(Veeco Instruments公司製WYKO NT3300),藉由VSI接觸模式、50倍透鏡,由使測定範圍以121μm×92μm而得到的數值求出Ra值、Rq值。藉由求出各自10點的平均值進行測定。 The evaluation substrate A was subjected to a non-contact surface roughness meter (WYKO NT3300 manufactured by Veeco Instruments Co., Ltd.), and the Ra value and the Rq value were determined from the values obtained by measuring the measurement range at 121 μm × 92 μm by a VSI contact mode and a 50-fold lens. . The measurement was performed by obtaining an average value of 10 points.

[鍍敷導體層的剝撕強度的測定] [Determination of peeling strength of plated conductor layer]

於評估基板B之導體層,設置寬10mm、長度100mm的部分的切痕,將此一端剝離且以夾具(股份公司T.S.E科母型試驗機AC-50C-SL)夾住,測定在室溫(25℃)中,以50mm/分鐘的速度,在垂直方向剝撕35mm時的荷重(kgf/cm(N/cm))。 For the evaluation of the conductor layer of the substrate B, a cut of a portion having a width of 10 mm and a length of 100 mm was set, and the one end was peeled off and clamped by a jig (stock company TSE type tester AC-50C-SL), and measured at room temperature ( In 25 ° C), the load (kgf / cm (N / cm)) when peeling 35 mm in the vertical direction at a speed of 50 mm / minute.

[線熱膨脹係數(CTE)的測定] [Determination of linear thermal expansion coefficient (CTE)]

藉由使實施例及比較例中得到的接著薄膜在200℃進 行90分鐘加熱,使熱硬化,由支持體之PET薄膜剝離,得到薄片狀的硬化物。將該硬化物切斷成寬5mm、長度15mm、厚度30mm的試驗片,使用熱機械分析裝置Thermo Plus TMA8310((股)Rigaku製),以拉伸加重法進行熱機械分析。將試驗片裝設於前述裝置後,以荷重1g、昇溫速度5℃/分鐘的測定條件,連續進行2次測定。算出第2次的測定中之25℃~150℃的平均線熱膨脹係數(ppm)。 By bringing the film obtained in the examples and the comparative examples at 200 ° C The film was heated for 90 minutes to be thermally hardened, and peeled off from the PET film of the support to obtain a flaky cured product. The cured product was cut into a test piece having a width of 5 mm, a length of 15 mm, and a thickness of 30 mm, and subjected to thermomechanical analysis by a tensile weighting method using a thermomechanical analyzer Thermo Plus TMA8310 (manufactured by Rigaku Co., Ltd.). After the test piece was placed in the above apparatus, the measurement was carried out twice in succession under the measurement conditions of a load of 1 g and a temperature increase rate of 5 ° C /min. The average linear thermal expansion coefficient (ppm) at 25 ° C to 150 ° C in the second measurement was calculated.

[斷裂延伸率的測定] [Measurement of elongation at break]

將實施例及比較例中得到的接著薄膜在200℃進行90分鐘加熱,使熱硬化,將該硬化物切為啞鈴狀,使PET薄膜剝離,得到試驗片。使該試驗片依據JIS K7127,使用Orientec公司製拉伸試驗機RTC-1250A,進行拉伸強度測定,求出23℃中之斷裂延伸率。 The adhesive film obtained in the examples and the comparative examples was heated at 200 ° C for 90 minutes to be thermally cured, and the cured product was cut into a dumbbell shape to peel off the PET film to obtain a test piece. The test piece was subjected to tensile strength measurement using a tensile tester RTC-1250A manufactured by Orientec Co., Ltd. in accordance with JIS K7127, and the elongation at break at 23 ° C was determined.

<合成例1> <Synthesis Example 1> 具有蒽構造及四甲基聯苯基構造的苯氧基樹脂之合成 Synthesis of phenoxy resin with oxime structure and tetramethylbiphenyl structure

反應容器中,加入四甲基聯苯基型環氧樹脂(三菱化學(股)製YX4000、環氧當量185)191g、9,10-二羥基蒽(酚性羥基當量210)210g、及環己酮150g,進行攪拌使溶解。接著,滴下四甲基銨氯化物溶液0.5g,氮環境下、180℃使進行5小時反應。反應完畢後,使用濾布進行過濾,藉由以溶劑稀釋得到苯氧基樹脂A。 In the reaction vessel, tetramethylbiphenyl type epoxy resin (YX4000 manufactured by Mitsubishi Chemical Corporation, epoxy equivalent 185) 191 g, 9,10-dihydroxyanthracene (phenolic hydroxyl equivalent 210) 210 g, and cyclohexane were added. 150 g of the ketone was stirred to dissolve. Next, 0.5 g of a tetramethylammonium chloride solution was dropped, and the reaction was carried out for 5 hours at 180 ° C in a nitrogen atmosphere. After completion of the reaction, filtration was carried out using a filter cloth, and phenoxy resin A was obtained by dilution with a solvent.

.環氧當量:11000 . Epoxy equivalent: 11000

.重量平均分子量:35000 . Weight average molecular weight: 35000

.固形分30質量%之MEK與環己酮的1:1溶液 . Solid solution of 30% by mass of 1:1 solution of MEK and cyclohexanone

又,苯氧基樹脂A具有以下的構造。 Further, the phenoxy resin A has the following structure.

<合成例2> <Synthesis Example 2> 具有四甲基聯苯基構造及雙酚苯乙酮構造的苯氧基樹脂之合成 Synthesis of phenoxy resin with tetramethylbiphenyl structure and bisphenol acetophenone structure

反應容器中,加入四甲基聯苯基型環氧樹脂(三菱化學(股)製「YX4000」、環氧當量185)100g、雙酚苯乙酮(酚性羥基當量145)80g、及環己酮150g,進行攪拌使溶解。 In the reaction vessel, tetramethylbiphenyl type epoxy resin ("YX4000" manufactured by Mitsubishi Chemical Corporation, epoxy equivalent 185) 100 g, bisphenol acetophenone (phenolic hydroxyl equivalent 145) 80 g, and cyclohexane were added. 150 g of the ketone was stirred to dissolve.

接著,滴下四甲基銨氯化物溶液0.5g,氮環境下、180℃使進行5小時反應。反應完畢後,使用濾布進行過濾,藉由以溶劑稀釋得到苯氧基樹脂B。又,因苯氧基樹脂B具有蒽構造,為本發明的參考例。 Next, 0.5 g of a tetramethylammonium chloride solution was dropped, and the reaction was carried out for 5 hours at 180 ° C in a nitrogen atmosphere. After completion of the reaction, filtration was carried out using a filter cloth, and phenoxy resin B was obtained by dilution with a solvent. Further, the phenoxy resin B has a fluorene structure and is a reference example of the present invention.

.環氧當量:13000 . Epoxy equivalent: 13000

.重量平均分子量:38000 . Weight average molecular weight: 38000

.作為固形分30質量%之MEK與環己酮的1:1溶 液。 . 1:1 dissolution of MEK and cyclohexanone as a solid fraction of 30% by mass liquid.

又,苯氧基樹脂B具有以下的構造。 Further, the phenoxy resin B has the following structure.

<實施例1> <Example 1>

使雙酚型環氧樹脂(新日鐵化學(股)製「ZX1059」、雙酚A型與雙酚F型的1:1混合品、環氧當量169)10份、結晶性2官能環氧樹脂(三菱化學(股)製「YX4000HK」、環氧當量約185)10份、二環戊二烯型環氧樹脂(DIC(股)製「HP-7200H」、環氧當量275)20份於溶煤石油精35份一邊攪拌一邊使加熱溶解。冷卻至室溫(25℃)後,於其中混合苯氧基樹脂A:12份、含三嗪骨架酚系硬化劑(DIC(股)製「LA-7054」羥基當量125的固形分60%之MEK溶液)12份、萘型硬化劑(新日鐵化學(股)製「SN-485」羥基當量215的固形分60%之MEK溶液)15份、硬化促進劑(4-二甲基胺基吡啶(DMAP)、固形分2質量%之MEK溶液)3份、難燃劑(三光(股)製「HCA-HQ」、10-(2,5-二羥基苯基)-10-氫-9-噁-10-磷雜菲-10-氧化物、平均粒徑2μm)2份、以苯基胺基矽烷系偶合劑(信越化學工業(股)製、「KBM573」)表面處理的球形二氧化矽(平均粒徑0.24μm 、(股)Admatechs製「SOC1」、每單位面積的碳量0.36mg/m2)150份,以高速旋轉混合機均勻分散,製作樹脂清漆。接著,於附脫膜處理的聚乙烯對苯二甲酸酯薄膜(Lintec(股)製「AL5」、厚度38μm)的脫膜面上,以乾燥後的樹脂組成物層的厚度成為30μm之方式,使樹脂清漆均勻塗佈,在80~120℃(平均100℃)進行4分鐘乾燥,製作接著薄膜。 A bisphenol type epoxy resin (ZX1059 manufactured by Nippon Steel Chemical Co., Ltd.), a 1:1 mixture of bisphenol A type and bisphenol F type, and an epoxy equivalent of 169) 10 parts, a crystalline 2-functional epoxy Resin (Mitsubishi Chemical Co., Ltd. "YX4000HK", epoxy equivalent: 185) 10 parts, dicyclopentadiene type epoxy resin ("HP-7200H" manufactured by DIC Co., Ltd., epoxy equivalent 275) 20 parts 35 parts of the coal-soluble petroleum spirit was dissolved while heating while stirring. After cooling to room temperature (25 ° C), phenoxy resin A was mixed therein: 12 parts, and a triazine-based phenol-based hardener (TC-7, a solid content of "LA-7054" having a hydroxyl equivalent of 125% by DIC) was mixed. MEK solution) 12 parts, naphthalene type hardener ("SK-485", 70% of MEK solution of hydroxyl equivalent of 215, of Nippon Steel Chemical Co., Ltd.) 15 parts, hardening accelerator (4-dimethylamino group) Pyridine (DMAP), 2% by mass of MEK solution) 3 parts, flame retardant ("HCA-HQ", 10-(2,5-dihydroxyphenyl)-10-hydrogen-9, manufactured by Sanguang Co., Ltd.) - Oxa-10-phosphaphenanthrene-10-oxide, average particle size 2 μm) 2 parts, phenylamino decane-based coupling agent (manufactured by Shin-Etsu Chemical Co., Ltd., "KBM573") 150 parts of 矽 (average particle diameter: 0.24 μm, "SOC1" manufactured by Admatechs, 0.36 mg/m 2 per unit area) was uniformly dispersed in a high-speed rotary mixer to prepare a resin varnish. Then, the thickness of the resin composition layer after drying was 30 μm on the release surface of the polyethylene terephthalate film ("AL5" manufactured by Lintec Co., Ltd., thickness: 38 μm). The resin varnish was uniformly applied, and dried at 80 to 120 ° C (average 100 ° C) for 4 minutes to prepare a film.

<實施例2> <Example 2>

使液狀萘型環氧樹脂(環氧當量144、DIC(股)製「HP4032SS」)5份、結晶性2官能環氧樹脂(三菱化學(股)製「YX4000HK」、環氧當量約185)5份、聯苯基型環氧樹脂(日本化藥(股)製「NC3000L」、環氧當量269)12份於溶煤石油精30份一邊攪拌一邊使加熱溶解。冷卻至室溫(25℃)後,於其中混合苯氧基樹脂A:5份、雙酚A二氰酸酯的預聚物(LONZA日本(股)製「BA230S75」、氰酸酯當量約232、不揮發分75質量%之MEK溶液)20份、酚酚醛清漆型多官能氰酸酯酯樹脂(LONZA日本(股)製「PT30S」、氰酸酯當量約133、不揮發分85質量%之MEK溶液)6份、硬化促進劑(4-二甲基胺基吡啶、固形分2質量%之MEK溶液)1份、硬化促進劑(東京化成(股)製、鈷(III)乙醯丙酮(Co(III)Ac))、固形分1質量%之MEK溶液)3份、橡膠粒子(GANZ化成(股)製、StafyloidAC3816N)2份 、難燃劑(三光(股)製「HCA-HQ」、10-(2,5-二羥基苯基)-10-氫-9-噁-10-磷雜菲-10-氧化物、平均粒徑2μm)2份、以苯基胺基矽烷系偶合劑(信越化學工業(股)製、「KBM573」)表面處理的球形二氧化矽(平均粒徑0.5μm、(股)Admatechs製「SOC2」、每單位面積的碳量0.39mg/m2)100份,以高速旋轉混合機均勻分散,製作樹脂清漆。接著,與實施例1同樣地製作接著薄膜。 5 parts of a liquid naphthalene type epoxy resin (epoxy equivalent 144, "HP4032SS" manufactured by DIC Co., Ltd.), a crystalline bifunctional epoxy resin ("YX4000HK" manufactured by Mitsubishi Chemical Corporation, and an epoxy equivalent of about 185) 12 parts of biphenyl type epoxy resin ("NC3000L" manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent 269) 12 parts were dissolved in 30 parts of coal-soluble petroleum spirit while stirring. After cooling to room temperature (25 ° C), phenoxy resin A was mixed therein: 5 parts of a prepolymer of bisphenol A dicyanate ("BA230S75" manufactured by LONZA Japan Co., Ltd., cyanate equivalent: about 232 20 parts by mass of a MEK solution having a nonvolatile content of 75% by mass, a phenol novolac type polyfunctional cyanate ester resin ("PT30S" manufactured by LONZA Japan Co., Ltd., a cyanate equivalent of about 133, and a nonvolatile content of 85% by mass) MEK solution) 6 parts, hardening accelerator (4-dimethylaminopyridine, solid content 2% by mass of MEK solution) 1 part, hardening accelerator (Tokyo Chemical Co., Ltd., cobalt (III) acetonitrile ( Co(III)Ac)), 3 parts by mass of MEK solution in solid content) 3 parts, 2 parts of rubber particles (manufactured by GANZ Chemical Co., Ltd., Stafyloid AC3816N), and a flame retardant (HCA-HQ, manufactured by Sanguang Co., Ltd.) 10-(2,5-dihydroxyphenyl)-10-hydro-9-oxo-10-phosphaphenanthrene-10-oxide, average particle size 2 μm) 2 parts, phenylamino decane coupling agent ( Shin-Etsu Chemical Co., Ltd., "KBM573"), spherical cerium oxide (average particle size: 0.5 μm, "SOC2" manufactured by Admatechs, carbon content per unit area: 0.39 mg/m 2 ) 100 parts, The resin varnish was prepared by uniformly dispersing in a high-speed rotary mixer. Next, a film of the following film was produced in the same manner as in Example 1.

<實施例3> <Example 3>

使雙酚型環氧樹脂(新日鐵化學(股)製「ZX1059」、雙酚A型與雙酚F型的1:1混合品、環氧當量169)10份、聯苯基型環氧樹脂(日本化藥(股)製「NC3000L」、環氧當量269)12份於溶煤石油精30份一邊攪拌一邊使加熱溶解。冷卻至室溫後,於其中混合苯氧基樹脂A:17份、活性酯化合物(DIC(股)製「HPC8000-65T」、重量平均分子量為約2700、活性基當量約223的不揮發分65質量%之甲苯溶液)34份、硬化促進劑(4-二甲基胺基吡啶、固形分2質量%之MEK溶液)6份、難燃劑(三光(股)製「HCA-HQ」、10-(2,5-二羥基苯基)-10-氫-9-噁-10-磷雜菲-10-氧化物、平均粒徑2μm)2份、以苯基胺基矽烷系偶合劑(信越化學工業(股)製、「KBM573」)表面處理的球形二氧化矽(平均粒徑0.5μm、(股)Admatcchs製「SOC2」、每單位面積的碳量0.39mg/m2)150份,以高速旋轉混合機均勻分 散,製作樹脂清漆。接著,與實施例1同樣地製作接著薄膜。 Bisphenol type epoxy resin (ZX1059 made by Nippon Steel Chemical Co., Ltd.), 1:1 mixture of bisphenol A type and bisphenol F type, epoxy equivalent 169) 10 parts, biphenyl type epoxy 12 parts of resin (Nippon Chemical Co., Ltd. "NC3000L", epoxy equivalent 269) was dissolved in 30 parts of coal-soluble petroleum spirit while stirring. After cooling to room temperature, phenoxy resin A was mixed therein: 17 parts, an active ester compound ("HPC8000-65T" manufactured by DIC), a weight average molecular weight of about 2700, and an active group equivalent of about 223. 34 parts by mass of toluene solution), 6 parts of hardening accelerator (4-dimethylaminopyridine, solid content of 2% by mass of MEK solution), flame retardant ("HCO-HQ" manufactured by Sanguang Co., Ltd., 10 -(2,5-dihydroxyphenyl)-10-hydro-9-oxo-10-phosphaphenanthrene-10-oxide, average particle size 2 μm) 2 parts, phenylamino decane-based coupling agent (Shin-Etsu 150 parts of spherical ceria (average particle size 0.5 μm, "SOC2" manufactured by Admatcchs, 0.39 mg/m 2 per unit area) surface-treated by Chemical Industry Co., Ltd., "KBM573") The high-speed rotary mixer is uniformly dispersed to produce a resin varnish. Next, a film of the following film was produced in the same manner as in Example 1.

<比較例1> <Comparative Example 1>

除將實施例1之苯氧基樹脂A:12份變更為雙酚A型苯氧基樹脂(三菱化學(股)製「E1256B40」、固形分40質量%之MEK溶液、環氧當量8000、重量平均分子量約50000)10份以外與實施例1完全同樣地製作接著薄膜。 In addition, the phenoxy resin A of Example 1 was changed to 12 parts by weight to a bisphenol A type phenoxy resin ("E1256B40" manufactured by Mitsubishi Chemical Corporation, a MEK solution having a solid content of 40% by mass, an epoxy equivalent of 8000, and a weight. A film was produced in the same manner as in Example 1 except that the average molecular weight was about 50,000).

<比較例2> <Comparative Example 2>

除將實施例2的苯氧基樹脂A:5份變更為合成例2的苯氧基樹脂B:5份以外與實施例2完全同樣地製作接著薄膜。 An adhesive film was produced in the same manner as in Example 2 except that the phenoxy resin A of Example 2 was changed to 5 parts of the phenoxy resin B of Synthesis Example 2: 5 parts.

<比較例3> <Comparative Example 3>

除將實施例3的苯氧基樹脂A:17份變更為合成例2的苯氧基樹脂B:17份以外,與實施例3完全同樣地製作接著薄膜。 An adhesive film was produced in the same manner as in Example 3 except that the phenoxy resin A of Example 3 was changed to 17 parts of the phenoxy resin B of Synthesis Example 2.

結果如表1及表2所示。 The results are shown in Tables 1 and 2.

<比較例4> <Comparative Example 4>

除將實施例1之苯氧基樹脂A:12份變更為蒽型環氧樹脂(三菱化學(股)製「YX8800」、環氧當量181) 3.6份以外與實施例1完全同樣地製作接著薄膜。又,「YX8800」之構造式如下。 In addition, the phenoxy resin A of Example 1 was changed from 12 parts to a fluorene type epoxy resin ("YX8800" manufactured by Mitsubishi Chemical Corporation, epoxy equivalent 181). A film was produced in the same manner as in Example 1 except for 3.6 parts. Also, the structure of "YX8800" is as follows.

<比較例5> <Comparative Example 5>

除將實施例1之苯氧基樹脂A:12份變更為43份以外,與實施例1完全同樣地製作接著薄膜。又,在比較例5,以(A)苯氧基樹脂、(B)環氧樹脂、及(C)硬化劑之合計作為100質量%的場合,前述(A)苯氧基樹脂為18.8質量%,故在本發明的範圍外。 A film was produced in the same manner as in Example 1 except that the phenoxy resin A of Example 1 was changed from 12 parts to 43 parts. Further, in Comparative Example 5, when the total of (A) phenoxy resin, (B) epoxy resin, and (C) curing agent is 100% by mass, the (A) phenoxy resin is 18.8% by mass. Therefore, it is outside the scope of the present invention.

結果如表1及表2所示。 The results are shown in Tables 1 and 2.

由表1及2的結果,在使用本發明的硬化性樹脂組成物的實施例1~3,具有低粗度、充分的剝撕強度、低的線熱膨脹係數、充分的斷裂延伸率。另一方面,在比較例1~5,因未使用本發明的硬化性樹脂組成物,有產生算術平均粗度、方均根粗度變大之場合,剝撕強度變小之場合,線熱膨脹係數變大之場合,斷裂延伸降低之場合等。 As a result of Tables 1 and 2, in Examples 1 to 3 using the curable resin composition of the present invention, it has a low thickness, a sufficient peeling strength, a low coefficient of linear thermal expansion, and a sufficient elongation at break. On the other hand, in Comparative Examples 1 to 5, when the curable resin composition of the present invention is not used, there is a case where the arithmetic mean roughness and the square root thickness become large, and when the peeling strength is small, the linear thermal expansion coefficient becomes In the case of large, the occasion where the fracture extension is lowered.

Claims (17)

一種硬化性樹脂組成物,其係含有(A)具有蒽構造的苯氧基樹脂、(B)環氧樹脂、及(C)硬化劑的硬化性樹脂組成物,其特徵係以前述(A)苯氧基樹脂、(B)環氧樹脂、及(C)硬化劑之合計作為100質量%的場合,前述(A)苯氧基樹脂為1~15質量%,且前述(A)苯氧基樹脂的環氧當量為5000以上。 A curable resin composition comprising (A) a phenoxy resin having a fluorene structure, (B) an epoxy resin, and (C) a curing agent, which is characterized by the aforementioned (A) When the total of the phenoxy resin, the (B) epoxy resin, and the (C) curing agent is 100% by mass, the (A) phenoxy resin is 1 to 15% by mass, and the (A) phenoxy group. The epoxy equivalent of the resin is 5,000 or more. 如請求項1記載之硬化性樹脂組成物,其中,前述(A)苯氧基樹脂的重量平均分子量為8000~100000。 The curable resin composition according to claim 1, wherein the (A) phenoxy resin has a weight average molecular weight of 8,000 to 100,000. 如請求項1記載之硬化性樹脂組成物,其中,前述(A)苯氧基樹脂進一步具有無取代或取代的聯苯基構造。 The curable resin composition according to claim 1, wherein the (A) phenoxy resin further has an unsubstituted or substituted biphenyl structure. 如請求項1記載之硬化性樹脂組成物,其中,前述(B)環氧樹脂係由雙酚型環氧樹脂、結晶性2官能環氧樹脂、二環戊二烯型環氧樹脂、萘型環氧樹脂、聯苯基型環氧樹脂及此等環氧樹脂的混合物所構成群所選出。 The curable resin composition according to claim 1, wherein the epoxy resin (B) is a bisphenol epoxy resin, a crystalline bifunctional epoxy resin, a dicyclopentadiene epoxy resin, or a naphthalene type. An epoxy resin, a biphenyl type epoxy resin, and a mixture of such epoxy resins are selected as a group. 如請求項1記載之硬化性樹脂組成物,其中,前述(C)硬化劑係由酚硬化劑、氰酸酯酯硬化劑、活性酯硬化劑及此等硬化劑的混合物所構成群所選出。 The curable resin composition according to claim 1, wherein the (C) curing agent is selected from the group consisting of a phenol curing agent, a cyanate ester curing agent, an active ester curing agent, and a mixture of such curing agents. 如請求項1記載之硬化性樹脂組成物,其中,前述(C)硬化劑為氰酸酯酯硬化劑或活性酯硬化劑。 The curable resin composition according to claim 1, wherein the (C) curing agent is a cyanate ester curing agent or an active ester curing agent. 如請求項1記載之硬化性樹脂組成物,其中,以前述硬化性樹脂組成物中的不揮發成分作為100質量%的場合,前述(A)苯氧基樹脂的含量為0.3~10質量%,前 述(B)環氧樹脂的含量為5~30質量%,前述(C)硬化劑的含量為3~20質量%。 In the case where the non-volatile component in the curable resin composition is 100% by mass, the content of the (A) phenoxy resin is 0.3 to 10% by mass, before The content of the (B) epoxy resin is 5 to 30% by mass, and the content of the (C) curing agent is 3 to 20% by mass. 如請求項1記載之硬化性樹脂組成物,其中,進一步,含有(D)無機充填材。 The curable resin composition according to claim 1, further comprising (D) an inorganic filler. 如請求項8記載之硬化性樹脂組成物,其中,前述(D)無機充填材的平均粒徑為0.01~5μm。 The curable resin composition according to claim 8, wherein the (D) inorganic filler has an average particle diameter of 0.01 to 5 μm. 如請求項8記載之硬化性樹脂組成物,其中,以前述硬化性樹脂組成物中的不揮發成分作為100質量%的場合,前述(D)無機充填材的含量為30~90質量%。 In the case where the non-volatile component in the curable resin composition is 100% by mass, the content of the (D) inorganic filler is 30 to 90% by mass. 如請求項8記載之硬化性樹脂組成物,其中,前述(D)無機充填材為二氧化矽。 The curable resin composition according to claim 8, wherein the (D) inorganic filler is cerium oxide. 一種多層印刷配線板的絕緣層用硬化性樹脂組成物,其特徵係含有請求項1~11之中任1項記載之硬化性樹脂組成物。 A curable resin composition for an insulating layer of a multilayer printed wiring board, which comprises the curable resin composition according to any one of claims 1 to 11. 一種多層印刷配線板的增層用硬化性樹脂組成物,其特徵係含有請求項1~11之中任1項記載之硬化性樹脂組成物。 A curable resin composition for a build-up of a multilayer printed wiring board, characterized in that the curable resin composition according to any one of claims 1 to 11 is contained. 一種薄片狀層合材料,其特徵係含有請求項1~11之中任1項記載之硬化性樹脂組成物。 A sheet-like laminate comprising the curable resin composition according to any one of claims 1 to 11. 一種多層印刷配線板,其特徵係含有將請求項1~11之中任1項記載之硬化性樹脂組成物熱硬化而得到的絕緣層。 A multilayer printed wiring board comprising the insulating layer obtained by thermally curing the curable resin composition according to any one of claims 1 to 11. 一種多層印刷配線板,其特徵係含有將請求項14記載之薄片狀層合材料熱硬化而得到的絕緣層。 A multilayer printed wiring board characterized by comprising an insulating layer obtained by thermally curing the sheet-like laminate described in claim 14. 一種半導體裝置,其特徵係含有請求項16記載之多層印刷配線板。 A semiconductor device characterized by comprising the multilayer printed wiring board of claim 16.
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KR20140121783A (en) 2014-10-16

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