TW201400203A - 清洗裝置及清洗方法 - Google Patents

清洗裝置及清洗方法 Download PDF

Info

Publication number
TW201400203A
TW201400203A TW102117914A TW102117914A TW201400203A TW 201400203 A TW201400203 A TW 201400203A TW 102117914 A TW102117914 A TW 102117914A TW 102117914 A TW102117914 A TW 102117914A TW 201400203 A TW201400203 A TW 201400203A
Authority
TW
Taiwan
Prior art keywords
cleaning
cleaning liquid
lip surface
unit
lip
Prior art date
Application number
TW102117914A
Other languages
English (en)
Chinese (zh)
Other versions
TWI559994B (ja
Inventor
Nobuo Horiuchi
Original Assignee
Toray Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Eng Co Ltd filed Critical Toray Eng Co Ltd
Publication of TW201400203A publication Critical patent/TW201400203A/zh
Application granted granted Critical
Publication of TWI559994B publication Critical patent/TWI559994B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/06—Cleaning involving contact with liquid using perforated drums in which the article or material is placed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application
    • B06B2201/71—Cleaning in a tank

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Coating Apparatus (AREA)
  • Liquid Crystal (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
TW102117914A 2012-06-20 2013-05-21 清洗裝置及清洗方法 TW201400203A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012139074A JP5701822B2 (ja) 2012-06-20 2012-06-20 洗浄装置および洗浄方法

Publications (2)

Publication Number Publication Date
TW201400203A true TW201400203A (zh) 2014-01-01
TWI559994B TWI559994B (ja) 2016-12-01

Family

ID=49889971

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102117914A TW201400203A (zh) 2012-06-20 2013-05-21 清洗裝置及清洗方法

Country Status (4)

Country Link
JP (1) JP5701822B2 (ja)
KR (1) KR101429483B1 (ja)
CN (1) CN103506238B (ja)
TW (1) TW201400203A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114643165A (zh) * 2020-12-21 2022-06-21 株式会社斯库林集团 喷嘴清洗装置以及涂敷装置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI126348B (fi) 2015-07-16 2016-10-14 Boildec Oy Menetelmä ja välineet soodakattilan seisokkiin
JP6664952B2 (ja) * 2015-12-17 2020-03-13 東レエンジニアリング株式会社 塗布器洗浄装置及び塗布装置
CN105921431B (zh) * 2016-05-04 2018-02-06 京东方科技集团股份有限公司 一种转印板清洗设备及其清洗方法
CN107716181B (zh) * 2017-10-18 2023-03-28 苏州耀玮彤机械有限公司 一种用于压铸型显示器面壳的烤漆输送防堵装置
JP6763843B2 (ja) * 2017-10-25 2020-09-30 株式会社カイジョー 超音波洗浄装置及び超音波洗浄システム
IT201800002124A1 (it) * 2018-01-29 2019-07-29 Corob Spa Dispositivo pulitore e relativo metodo
WO2019145988A1 (en) * 2018-01-29 2019-08-01 Corob S.P.A. Cleaning device and corresponding method
CA3097022C (en) * 2018-05-11 2022-12-06 Honda Motor Co., Ltd. Coating nozzle cleaning method and device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735655Y1 (ja) * 1970-08-05 1972-10-28
JPS61257279A (ja) * 1985-04-11 1986-11-14 大塚　公明 噴流式超音波洗浄機
US6015467A (en) * 1996-03-08 2000-01-18 Tokyo Ohka Kogyo Co., Ltd. Method of removing coating from edge of substrate
JP2002500097A (ja) * 1998-01-09 2002-01-08 エフエイスター、リミティド 押出しヘッドを洗浄、プライミングするためのシステムおよび方法
JP2000005683A (ja) * 1998-06-22 2000-01-11 Toppan Printing Co Ltd スロット型塗布ヘッドクリーニング装置およびクリーニング方法
JP4451175B2 (ja) * 2004-03-19 2010-04-14 大日本スクリーン製造株式会社 ノズル洗浄装置および基板処理装置
JP4489480B2 (ja) * 2004-03-25 2010-06-23 東京応化工業株式会社 スリットノズル洗浄装置
KR101206776B1 (ko) * 2006-06-09 2012-11-30 주식회사 케이씨텍 기판 코팅 장치의 프라이밍 롤러 세정 유닛 및 세정 방법과 상기 세정 유닛을 포함하는 기판 코팅 장치
JP2008039654A (ja) * 2006-08-09 2008-02-21 Axiom Co Ltd 超音波を利用した振動センサ
JP2009166014A (ja) * 2008-01-21 2009-07-30 Hitachi High-Technologies Corp ヘッドクリーニング装置、フラットパネルディスプレイの製造装置、フラットパネルディスプレイ、太陽電池の製造装置、太陽電池及びヘッドクリーニング方法
JP2009220056A (ja) * 2008-03-18 2009-10-01 Toray Ind Inc スリットノズルの清掃方法及び清掃装置並びに、ディスプレイ用部材の製造方法及び製造装置
CN101829661A (zh) * 2010-04-20 2010-09-15 姚建梁 一种高效节水型超声波清洗装置
CN202087472U (zh) * 2011-05-10 2011-12-28 深圳市华星光电技术有限公司 狭缝涂布机喷嘴的清洗装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114643165A (zh) * 2020-12-21 2022-06-21 株式会社斯库林集团 喷嘴清洗装置以及涂敷装置

Also Published As

Publication number Publication date
JP2014000553A (ja) 2014-01-09
KR101429483B1 (ko) 2014-08-12
JP5701822B2 (ja) 2015-04-15
CN103506238A (zh) 2014-01-15
KR20130142867A (ko) 2013-12-30
TWI559994B (ja) 2016-12-01
CN103506238B (zh) 2017-05-24

Similar Documents

Publication Publication Date Title
TW201400203A (zh) 清洗裝置及清洗方法
JP4705517B2 (ja) 基板洗浄方法、基板洗浄装置、プログラム、および記録媒体
JP3948960B2 (ja) 超音波洗浄装置
KR20160014133A (ko) 대면적 초음파 정밀 세정장치
TWI565526B (zh) Nozzle cleaning method and coating device
WO2018146836A1 (ja) 層流超音波洗浄装置
JP2016210018A (ja) 洗浄装置及び液滴吐出装置
JP2015107562A (ja) インクジェットヘッド洗浄方法
JP2009113004A (ja) 洗浄方法および洗浄装置
JP4669926B2 (ja) 超音波洗浄装置
JP2003037093A (ja) 超音波振動装置及びそれを備えた超音波洗浄装置
JP2006281012A (ja) 基板洗浄装置、基板洗浄方法、及び基板の製造方法
KR101017104B1 (ko) 초음파 노즐 및 이를 포함하는 기판 세정 장치
KR100242942B1 (ko) 다중 발진 초음파 세정장치
JP3103774B2 (ja) 超音波洗浄方法およびその洗浄装置
WO2018146837A1 (ja) 層流超音波洗浄装置
JP4144201B2 (ja) ウエット洗浄処理装置
JP2002159922A (ja) 超音波洗浄装置
JP2004148231A (ja) 超音波洗浄機
JP2019171797A (ja) 洗浄方法、これに用いる洗浄部材、洗浄ユニットおよび洗浄システム
JP2016022438A (ja) 超音波バリ取り・洗浄装置
JP2008166426A (ja) 洗浄方法及び洗浄装置
JPS59150584A (ja) 半導体ウエハの超音波洗浄方法
JP3839527B2 (ja) 超音波処理方法および超音波処理装置
JP2006198525A (ja) 基板洗浄装置