TW201336012A - Film forming device and substrate conveying mechanism for the film forming device - Google Patents

Abstract

To provide a long stroke conveying mechanism capable of decreasing height of an exchange chamber and height of a processing chamber, and reducing vertical size of an opening of a valve. A second section of a linear motion bearing counted from bottom to top includes two vertical rotation bodies kept in a back to back manner and installed on a base (first moving part); a subsequent section of the linear motion bearing includes two vertical rail shafts installed on the base (second moving part) in a back to back manner; the first moving part and the second moving part are mutually combined to form a cross roller guiding part, in order to convey a substrate carried on a flat panel at a distance set in a vacuum status.

Description

Film forming apparatus and substrate conveying mechanism for film forming apparatus

The present invention relates to a film forming apparatus for forming a film on a substrate in a processing chamber, and a substrate transfer mechanism for a film forming apparatus, and more particularly to a film forming apparatus for forming a film on a substrate in a vacuum, and a substrate for a film forming apparatus. mechanism.

The film forming apparatus of the present invention will be described by exemplifying an apparatus for manufacturing an organic electroluminescence device. The organic electroluminescent device manufacturing device maintains the organic electroluminescent device for the product in a vacuum and transfers the subsequent process; the organic electroluminescent device not only forms a layer of luminescent material (electroluminescent layer) but also performs electrodes In order to form a positive hole injection layer or a transport layer on the anode, an electron injection layer or a transport layer on the cathode, a multilayer structure for thinning various materials, or a substrate to be cleaned Therefore, the processing is performed through a plurality of manufacturing apparatuses. Further, for example, a plurality of manufacturing apparatuses are a vapor deposition apparatus that performs a plurality of different vapor depositions.

1 is an example of a manufacturing line of an organic electroluminescence device of a substrate transfer mechanism, and is a view showing a manufacturing line of a substrate to be processed by a long-travel feed mechanism. 100 is an organic electroluminescent device manufacturing line, and 9 is a control for the integrated control of the organic electroluminescent device manufacturing line 100. The part 3 is a substrate to be processed, 1 is a processing chamber for processing the substrate 3, and 2 is a transfer chamber for loading and unloading the substrate 3 by a long-length transfer mechanism using a long-stroke linear motion bearing mechanism. The first added characters a to d of the process chamber 1 and the transfer chamber 2 are associated with the process chamber and the post process; the second added character of the process chamber 1 and the transfer chamber 2, and the first added character of the substrate 3 u and d are the upper track (u) and the lower track (d). The substrate 3 is processed sequentially from the upstream to the downstream (from left to right in the drawing) in the process chambers 1a, 1b, 1c, 1d, and continues to the post process. Further, in this book, the direction from the upstream to the downstream is referred to as the X direction, and the direction orthogonal to the X direction on the plane is referred to as the Y direction. Further, the height direction (Z direction) is a direction orthogonal to the X direction and the Y direction.

In the interior of the substrate 3 of the organic electroluminescent device 100, which is carried in, processed, and carried out in FIG. 1, all of the cells are maintained in a vacuum state in which the degree of vacuum set by the organic electroluminescent device manufacturing apparatus 100 is high during processing; The transfer chambers 2au and 2ad of the substrate 3 to be processed and the three process chambers 1 (1a, 1b, 1c) of the processing substrate 3 are provided, and the substrates are carried out and transferred (crossed) between the processing chambers 1. The transfer chamber 2 (2bu, 2bd, 2cu, 2cd) of the linear moving long-travel conveying mechanism and the transfer chambers 2du and 2dd provided between the process chamber 1 and the secondary process (sealing process). In the present embodiment, the vapor deposition surface of the substrate is placed upward and conveyed horizontally, and the substrate is also horizontally vapor-deposited during vapor deposition.

In the organic electroluminescent device manufacturing apparatus 100 of FIG. 1, in the same processing chamber, in the processing of the second substrate 3d, The first substrate 3u after the completion of the processing is carried out, and the first substrate 3u to be processed is carried. On the other hand, in the same processing chamber, in the processing of the first substrate 3u, the second substrate 3d after the carry-out processing is completed and the second substrate 3d to be processed are carried. In this way, the processing is performed by interaction, and the method of moving out and moving in, shortens the throughput.

For example, in the processing chamber 1b, in the processing of the second substrate 3d, the delivery chamber 2cu carries out the processing of the first substrate 3u from the processing chamber 1b. Moreover, the transfer chamber 2bu carries the first substrate 3u to be processed into the process chamber 1b.

On the other hand, in the processing chamber 1b, in the processing of the first substrate 3u, the transfer chamber 2cd carries out the second substrate 3d whose processing has been completed from the processing chamber 1b. Moreover, the transfer chamber 2bd carries the second substrate 3d to be processed into the process chamber 1b.

In FIG. 1, the control unit 9 is connected to each device of the entire manufacturing line by a control line (including a wireless means) (not shown), and transmits a control signal to each device, and receives status information of the device from each device, and integrates and controls each. The whole device. For example, when the long-length transport mechanism (described later) for loading and unloading the substrate 3 is actuated, the drive system for slidingly moving the linear motion bearing mechanisms of the long-stroke transport mechanism is operated, and the corresponding gate valve is controlled. . The drive system is, for example, a ball screw mechanism or the like.

FIG. 2 is a side view for explaining a long stroke conveying mechanism for carrying out or loading the substrate 3 in the center portion of the delivery chamber 2 of FIG. 1 . Reference numeral 200 denotes a substrate transfer mechanism (hereinafter referred to as a long-length transfer mechanism), and 202 denotes a fixed base fixed to the base portion of the transfer chamber 2, 204 is a 1 pedestal 206 is a second pedestal, 208 is a flat plate on which the substrate 3 is mounted, 203 is a fixed rail shaft fixed to the upper portion of the fixed base 202, and 241 and 242 are fixed to the lower portion of the first pedestal 204. The rail (track) of the fixed rail shaft 203 is moved by the first rotor retaining portion in the X-axis direction, and 205 is the first rail shaft fixed to the upper portion of the first base 204, and 261 and 262 are fixed. The lower portion of the second pedestal 206 moves on the track (track) of the first track shaft 205 in the second rotator holding portion in the X-axis direction, and 207 is the second track fixed to the upper portion of the second pedestal 206 The shafts 281 and 282 are fixed to the lower portion of the flat plate 208 and move on the rail (track) of the second track shaft 207 in the third rotor holding portion in the X-axis direction.

(a) of FIG. 2 is a side cross-sectional view showing a state in which the flat plate 208 of the long stroke conveying mechanism 200 is positioned at the center portion (X=0) of the long stroke conveying mechanism 200. In addition, FIG. 2(b) is a side cross-sectional view showing a state in which the flat plate 208 of the long stroke conveying mechanism 200 is moved to the rightmost side in the X-axis direction. Further, Fig. 2(c) is a view of Fig. 2(a) viewed from above. In addition, in FIG. 2(c), the first rotor holding portions 241 and 242 and the second rotor holding portions 261 and 262 are omitted. Further, in FIGS. 2(b) and 2(c), only the movement in the right direction on the X-axis is shown, but the movement in the left direction is also possible.

2(c), the long-stroke conveying mechanism 200 fixes the rail shaft 203, the first rotor holding portions 241 and 242, the first susceptor 204, the first rail shaft 205, and the second pedestal 206, The second track shaft 207 and the second rotor holding portions 261 and 262 are each provided in a pair on the Y-axis side. up.

In addition, the description of the height direction of FIG. 2 will be described later.

In FIG. 2, the fixed base 202 is attached and fixed to the delivery chamber 2, and cannot be moved in the X-axis direction (left-right direction). Further, the fixed rail shaft 203 is attached and fixed to the fixed base 202, and cannot be moved in the X-axis direction.

The first rotor holding portions 241 and 242 can be moved in the X-axis direction along the fixed rail shaft 203 by a drive system (for example, conveyance screw drive, cylinder drive, belt drive, or the like) (not shown). In conjunction with this movement, the movement is fixed to the first pedestal 204 of the first rotator holding portions 241 and 242, and the components on the upper portion are also moved together (the link mechanism not shown is omitted).

Further, the second rotor retaining portions 261 and 262 are movable in the X-axis direction along the first guide rail axis by a drive system not shown. According to this movement, the movement is fixed to the second pedestals 206 of the second rotator holding portions 261 and 262, whereby the upper components also move together.

Further, the third rotor retaining portions 281 and 282 are movable in the X-axis direction along the second rail axis 207 by a drive system not shown. According to this movement, the movement is fixed to the flat plates 208 of the third rotor holding portions 281 and 282, whereby the upper components also move together. Therefore, the substrate 3 placed on the flat plate 208 moves in accordance with these movements.

The distance between the first rotor retaining portions 241 and 242 on the fixed rail shaft 203 (stroke Sx), the distance at which the second rotor retaining portions 261 and 262 can move on the first rail shaft 205, and The third rotor retaining portions 281 and 282 can move the distance on the second rail shaft 207 such that the length of each of the rail shafts is 2L, and the distance between the two ends of the pair of rotor retaining portions is Lx, and the stroke is Sx= Lx/2 is one-fourth of the length of each track axis.

Next, in FIG. 2, since the combination of the track axis and the rotor holding portion is three stages, the long stroke conveying mechanism can be moved from the center position (X=0) (can be conveyed) to a total distance of 3 Lx/2.

3 is a schematic side cross-sectional view schematically showing a part of a manufacturing line of an organic electroluminescence device using a conventional long-length transfer mechanism. In Fig. 3, the conventional processing chamber 1b and the front and rear transfer chambers 2bd and 2cd are shown. 390 is the installation surface of the process chamber 1b, 300 is a conventional long-stroke linear motion bearing mechanism, 351 is a gate valve for switching each of the transfer chamber 2bd and the process chamber 1b, 351g is an opening of the gate valve 351, and 352 is a switch Each of the process chamber 1b and the transfer chamber 2cd has a gate valve between the vacuum chambers, 352g is an opening of the gate valve 352, 301r is a transfer portion for loading or unloading the substrate in the process chamber 1b, and 320 is received at a set position. The transfer chamber 1bd is a platform for the substrate 3 before processing by the long-length transport mechanism 300, 321 is a drive portion for moving the platform 320 up and down along the Z-axis, and 322 is for guiding the platform 320 correctly on the Z-axis. Guide.

In FIG. 3, the platform 320 is driven from the delivery chamber 2bd through the opening 351g of the gate valve 351, and the substrate 3 loaded into the processing chamber 1b by the long-length transfer mechanism 300 is placed on the delivery portion 301r. The portion 321 and the guiding member 322 are lowered to the processing portion 301p of the processing chamber 1b, The treatment such as vapor deposition is performed. After the substrate 3 is processed, the stage 320 rises again and returns to the set position of the delivery unit 301r. Then, the processed substrate 3 is carried out from the delivery portion 301r of the processing chamber 1b through the opening portion 352g of the gate valve 352 to the delivery chamber 2cd at the set position described above by the long-length transfer mechanism 300.

Further, the prior art documents relating to the present invention have not been found.

The long-stroke transport mechanism does not require a rotating mechanism because it does not need to reverse the anteroposterior relationship with respect to the substrate in the transport direction, as compared with the transport method using the group-type vacuum robot. It is a transport mechanism that can be transported cheaply, efficiently, and reliably, and the generation of dust is small.

However, the above-described conventional long-stroke conveying mechanism has a high height with respect to the moving distance. Simply increasing the way of moving the linear bearing will result in a larger gate valve. In other words, in the conventional long-stroke conveying mechanism, the height direction becomes large. Further, the height of the transfer chamber accommodating the long-length transport mechanism also becomes high. Further, in order to perform horizontal loading or transporting of the substrate, the height of the processing chamber for transporting the substrate and the size of the gate valve opening in the vertical direction are also increased. As a result, the cost of the product is increased, and the cost of maintaining the vacuum state (running cost) is also increased.

The mechanism for transferring the substrate by direct roller is cheap, but it is generated on the substrate. Dirty dust is more likely to occur, and cockroaches become a problem. Further, it is difficult to carry the conveyance without causing damage to the surface of the substrate during the roller conveyance. Further, it is difficult to reliably stop and position the substrate without damaging the surface of the substrate during roller transport.

An object of the present invention is to provide a long stroke conveying mechanism that can reduce the height of the delivery chamber and the height of the processing chamber and reduce the size of the opening of the gate valve in the vertical direction in view of the above problems.

The constitution of the present invention for achieving the above object is as follows.

A film forming apparatus comprising: a film forming chamber having a film forming mechanism for forming a film on a substrate; a transfer chamber for transporting a substrate between the plurality of film forming chambers; and separating the film forming chamber A gate valve of the chamber and the transfer chamber; wherein the transport mechanism that transports the substrate by moving the substrate is configured by stacking a plurality of mobile units, and using the mobile unit and the mobile unit The pair of rails are directly or indirectly connected to the linear moving rail formed by the rotating body moving along the rail. Further, at least one of the aforementioned moving units is only provided with rails on the upper and lower sides, or only It has any one of the rotating bodies. The film forming apparatus may further include a driving mechanism that drives a moving unit of the lowermost stage of the conveying mechanism in a set direction, and the movement of the lowermost moving unit is transmitted to another moving unit by a link mechanism. The substrate on the transport mechanism moves to a set position.

According to the present invention, it is possible to provide a long stroke conveying mechanism that can reduce the height of the transfer chamber and the height of the process chamber, and reduce the size of the opening of the gate valve in the vertical direction. As a result, it is possible to provide a manufacturing apparatus and a manufacturing line which are inexpensive to manufacture, in terms of a manufacturing line in which a plurality of processing chambers which are processed in a vacuum are connected by a transfer chamber. Further, since the volume of the vacuum chamber is small, it is possible to quickly maintain the vacuum state, switch between the vacuum and the exhaust gas, and the like, and it is desired to have a low running cost and an increased processing speed.

1, 1a, 1b, 1c, 1d‧‧‧ process chamber

2, 2au, 2ad, 2bu, 2bd, 2cu, 2cd, 2du, 2dd‧‧‧ transfer room

3, 3u, 3d‧‧‧ substrate

6‧‧‧Substrate

9‧‧‧Control Department

100‧‧‧Organic electroluminescent device manufacturing line

200‧‧‧Long stroke linear moving bearing mechanism

202‧‧‧Fixed base

203, 203'‧‧‧ fixed track axle

204‧‧‧1st pedestal

205‧‧‧1st fixed orbital axis

206‧‧‧2nd base

207‧‧‧2nd fixed orbital axis

208‧‧‧ tablet

241, 242‧‧‧1st rotor retaining unit

261, 262‧‧‧2nd rotor retaining section

281, 281', 282, 282' ‧ ‧ third rotating body holding portion

300‧‧‧Long stroke linear moving bearing mechanism

301r‧‧‧Transfer Department

301p‧‧‧Processing Department

351g, 352g‧‧‧ openings

320‧‧‧ platform

321‧‧‧ Drive Department

322‧‧‧Guide

351, 352‧‧‧ gate valve

390‧‧‧Setting surface

400‧‧‧Long stroke linear moving bearing mechanism

401b‧‧‧Processing chamber

401r‧‧‧Transfer Department

402bd, 402cd‧‧‧ transfer room

451, 452‧‧‧ gate valve

451g, 452g‧‧‧ openings

500‧‧‧Long-term transport mechanism

505, 505'‧‧‧ fixed track axle

571‧‧‧Mobile parts

504, 504'‧‧‧1st pedestal

506, 506'‧‧‧2nd base

507, 507'‧‧‧ fixed track axle

541, 541', 542, 542'‧‧‧ Rotating body holding unit

561, 561', 562, 562'‧‧‧ rotating body holding unit

571,571'‧‧‧1st moving parts

581, 581'‧‧‧2nd moving parts

600‧‧‧Long-term transport mechanism

602‧‧‧ Fixed base

603‧‧‧ Fixed track axle

604‧‧‧1st pedestal

605‧‧‧1st track axle

606‧‧‧2nd pedestal

607‧‧‧2nd track axle

608‧‧‧3rd pedestal

609‧‧‧3rd track axle

610‧‧‧4th base

611‧‧‧4th track axle

612‧‧‧ tablet

621, 622‧‧‧1st rotor retaining section

623, 624‧‧‧2nd rotor retaining section

625, 626‧‧‧3rd rotor retaining section

627, 628‧‧‧4th rotor retaining unit

629, 630‧‧‧5th rotor retaining unit

700‧‧‧Long-term transport mechanism

704‧‧‧1st pedestal

705‧‧‧1st track axle

706‧‧‧2nd pedestal

707‧‧‧2nd track axle

708‧‧‧3rd pedestal

709‧‧‧3rd track axle

710‧‧‧4th base

711‧‧‧4th track axle

721, 722‧‧‧1st rotor retaining section

723, 724‧‧‧2nd rotor retaining section

725, 726‧‧‧3rd rotor retaining section

727, 728‧‧‧4th rotor retaining unit

771, 772‧‧‧1st moving parts

781, 782‧‧‧2nd moving parts

800‧‧‧Long-term transport mechanism

Fig. 1 is a view showing an example of an apparatus for manufacturing an organic electroluminescence device.

FIG. 2 is a view for explaining a conventional long-stroke conveying mechanism.

Fig. 3 is a schematic side cross-sectional view showing a part of a manufacturing line of an organic electroluminescence device using a conventional long-length transfer mechanism.

Fig. 4 is a schematic side cross-sectional view showing a part of a manufacturing line of an organic electroluminescence device using a long-length transfer mechanism according to an embodiment of the present invention.

Fig. 5 is a view for explaining an embodiment of a long stroke conveying mechanism of the present invention.

Fig. 6 is a side cross-sectional view showing an example of a conventional long stroke conveying mechanism.

Fig. 7 is a side sectional view showing an embodiment of a long stroke conveying mechanism of the present invention.

Fig. 8 is a plan view showing an embodiment of the long stroke conveying mechanism of the present invention as seen from above.

In the long-stroke conveying mechanism according to the present invention, the linear moving bearing of the second stage from the bottom to the top is attached to the same base (first moving member) by the upper and lower rotor holding portions, and the second stage; The linear motion bearing is configured such that two upper and lower rail shafts are mounted back to the base back to the base (second moving member); the first moving member and the second moving member are combined to form a plurality of linear moving guides, and are transported at a distance set in a vacuum. A substrate placed on a flat plate.

The following is an embodiment of the present invention, which will be described using a drawing or the like. The following description is intended to illustrate one embodiment of the invention and is not intended to limit the scope of the invention. Therefore, those skilled in the art to which the present invention pertains may adopt an implementation form in which certain requirements or all of the elements are equally substituted. These embodiments are also included in the scope of the present invention.

In the description of the drawings, the same reference numerals are used for the components having the common functions, and the repeated description is avoided as much as possible.

An embodiment of the present invention will be described using FIG. Fig. 4 is a schematic side cross-sectional view showing a part of a manufacturing line of the organic electroluminescent device of Fig. 1 using a long-length conveying mechanism according to an embodiment of the present invention. 400 is a long stroke linear moving bearing mechanism, 401b is a process chamber, 402bd and 402cd is a transfer chamber, 451 is a gate valve for switching each of the transfer chamber 402bd and the process chamber 401b, 451g is an opening of the gate valve 451, and 452 is a gate valve for switching each process chamber 401b and the transfer chamber 402cd to each other in the vacuum chamber. 452g is an opening of the gate valve 452, and 401r is an interface for loading or transporting the substrate in the process chamber 401b. In Fig. 4, the process chamber 401b and the front and rear transfer chambers 402bd and 402cd are shown.

4, the platform 320 is placed on the substrate 3 loaded into the process chamber 401b by the long-length transfer mechanism 400 through the opening portion 451g of the gate valve 451 from the transfer chamber 402bd, as shown in FIG. After the portion 401r, the driving portion 321 and the guide 322 are lowered to the processing portion 301p of the processing chamber 401b, and processing such as vapor deposition is performed. After the substrate 3 is processed, the stage 320 rises again and returns to the set position of the delivery unit 401r. Then, the processed substrate 3 is carried out from the delivery portion 401r of the processing chamber 401b through the opening portion 452g of the gate valve 452 to the delivery chamber 402cd by the long-length transfer mechanism 400 at the set position.

Further, in the manufacturing line 100 of the organic electroluminescence device, for example, in the manufacturing line 100 of FIG. 1, as in the above-described FIG. 4, the manufacturing line in which the constituent elements are changed is used.

An embodiment of the long stroke conveying mechanism of the present invention will be described with reference to Figs. 2 and 5 . Fig. 5 is a view for explaining an embodiment of the long stroke conveying mechanism of the present invention. 500 is a long stroke conveying mechanism, 571 is a first moving member, 504 is a first base constituting the moving member 571, 541 and 542 are rotating body holding portions on the lower side of the moving member 571, and 561 and 562 are moving members. The rotor holding portion 571 on the upper side of the 571 is a second movable member, 506 is a second base of the second movable member 581, 505 is a track shaft on the lower side of the second base 506, and 507 is on the upper side of the second base 506. Track axis. The rotor holding portions 541 and 542 on the lower side, the first base 504, and the upper rotor holding portions 561 and 562 constitute the first movable member 571. Further, the track shaft 505, the second base 506, and the upper track axis on the lower side constitute the second mover 581.

The first rotor holding portions 541 and 542 can be moved in the X-axis direction along the fixed rail shaft 203 by a drive system (for example, conveyance screw drive, cylinder drive, belt drive, or the like) (not shown). In association with this movement, the first base 504 of the first rotor holding portions 541 and 542 is fixed, and moves in the same direction, at the same speed, and equidistantly with the movement of the first rotor holding portions 541 and 542. As a result, the second rotator holding portions 561 and 562 of the first susceptor 504 are fixed, and move in the same direction, at the same speed, and equidistantly with the movement of the first rotator holding portions 541 and 542. Further, the movement of the second rotor holding portions 561 and 562 is linked to the movement of the first rotor holding portions 541 and 542 at the same time, in the same direction, at the same speed, and at equal speed. As a result, the second pedestal 506 and the orbital shaft 507 fixed to the orbital shaft 505 move simultaneously with the movement of the first rotator holding portions 541 and 542 at the same direction, at the same speed, and equidistantly. Further, the movement of the orbiting shaft 507 is fixed to the third rotor holding portions 281 and 282, and moves in the same direction, at the same speed, and equidistantly with the movement of the first rotor holding portions 541 and 542. . As a result, the plate 208 and the base fixed to the track shaft 507 are The plate 3 moves simultaneously with the movement of the first rotor holding portions 541 and 542 at the same time, in the same direction, at the same speed, and equidistantly.

In the long-stroke conveying mechanism, when the first rotor retaining portions 541 and 542 are moved in the X-axis direction along the fixed rail shaft 203 by a drive system (not shown), the upper components are also together. Movement (still, the linkage mechanism not shown is omitted).

In FIGS. 2 and 5, for simplification, description will be made under the following conditions.

(Condition 01) The substrate 3 has a length Lx in the X direction centered on the coordinate 0 of the coordinate system X, and a thickness tp.

(Condition 02) The long-travel conveying mechanisms 200 and 500 are linear moving guides for moving the substrate 3 in the directions of [+X] and [-X] and having a distance Lx or more.

(Condition 03) The moving stroke (maximum moving distance) of the substrate 3 is a distance from the width 2Lx of the susceptor to the complete exposure of the substrate 3.

(Condition 04) A portion that holds the rotating body ("ball" or "roller") of the linear motion bearing (rotor holding portions 241, 242, 261, 262, 281, 282, 541, 542, 561, and 562) A substrate 3 supporting the length Lx.

(Condition 05) The rails (track shafts 203, 205, 207, 505, and 507) have a length of 2Lx, and the bases 202, 204, 206, and 506 of the fixed rail shafts (track shafts 203, 205, 207, 505, and 507) It is also the same length. Further, the susceptors 202, 204, 206, and 506 and the flat plate 208 are, for example, metal flat plates of stainless steel or the like.

(Condition 06) The rotor holding portions 241, 242, 261, 262, 281, 282, 541, 542, 561, and 562 cannot be exposed from the rail shafts 203, 205, 207, 505, and 507 (actually, at the end portion) There are mechanical or electrical action stops).

(Condition 07) The uppermost flat plate 208 has the same length as the substrate 3.

(Condition 08) In order to obtain a necessary moving distance (moving stroke), a linear moving bearing (a base, a track shaft, and a rotating body holding portion is used as a constituent element) is added and used as one moving unit.

The following specifications are determined by the above conditions. that is,

(Specification 01) The movement stroke of the substrate 3 is ±3Lx/2.

(Specification 02) The movement amount of one set (track axis + rotor holding portion) of the linear motion bearing is ±Lx/2.

(Specification 03) From the above two items, the number of necessary linear moving bearings is three sets.

In the long-length transport mechanism 200 of the conventional method of FIG. 2,

(01a) The one-axis guide mechanism (the track shaft, the two rotor holding portions, and the susceptor) is simply superposed in three stages.

(02a) In addition to the uppermost flat plate 208, the portions connecting the rotor holding portions 241, 242, 261, and 262 are 2Lx because they are the bases 202, 204, or 206.

(03a) When moving in the X direction, the height of the portion exposed from the lowermost base (fixed base 202) is Ha'.

Further, in the long stroke conveying mechanism 500 of the present invention in Fig. 5,

(01b) The second linear motion bearing is moved from the bottom to the top, and the vertical relationship between the rotor holding portions 561 and 562 and the rail shaft 505 is reversed, and the rotor holding portions 541 and 542 and the rotor holding portions 561 and 562 are provided. Together, they are fixed to the base 504 in a configuration that is integrally moved. This portion is the first moving member 571.

(02b) In the case of Fig. 2 of the conventional embodiment, the length of the base of the fixed rotor holding portions 241, 242, 261, and 262 is 2Lx except for the uppermost flat plate 208. However, in the case of Fig. 5 of the present invention, the length of the susceptor 504 included in the first movable member 571 is one half thereof and the length is Lx.

(03c) When moving, the height of the portion exposed from the lowermost base (fixed base 202) is Hb'.

When comparing Fig. 2 with Fig. 5, simplification was carried out, and comparison was made under the following conditions.

The length D in the depth direction (Y direction) of FIGS. 2 and 5 is uniformly D=1. Further, the thicknesses of the pedestals 202, 204, 206, 208, 504, 506, and the track shafts 203, 205, 207, 505, 507 are interposed with the rotor holding portions 241, 242, 261, 262, 281, 282, The distance between the pedestals 204, 206, 504, 506 or the flat plates 208 of 541, 542, 561, 563 is the same as the thickness tm of the flat plate 208. Further, the heights of the track shafts 203, 205, 207, 505, 507 are also 2 tm. Still further, the bases 202, 204, 206, 208, 504, 506 and the plate 208 Density ρ, let ρ=1.

According to the above conditions, the sum of the masses of the pedestals 202, 204, 206 and the flat plate 208 of Fig. 2 in the conventional manner is Ma' = tm (3 × 2 × Lx + Lx) = 7 tm. Lx. 5, the sum of masses Mb' of the pedestals 202, 504, 506 and the plate 208 of FIG. 5, then Mb' = tm (3 × 2 × Lx) = 6 tm. Lx.

Therefore, the mass Mb' using the present invention can be reduced compared to the mass Ma' of the conventional method. That is, Ma'>Mb'.

Next, the height Ha' exposed in FIG. 2 is 9tm+ts. Moreover, the height Hb' exposed in FIG. 5 is 7tm+ts.

Therefore, the height Hb' of the present invention can be reduced compared to the exposure height Ha' of the conventional method. That is, Ha'>Hb'.

Next, another embodiment of the long stroke conveying mechanism of the present invention will be described with reference to Figs. 6 and 7 . Fig. 6 is a side cross-sectional view for explaining a conventional long stroke conveying mechanism. Fig. 7 is a side cross-sectional view showing an embodiment of the long stroke conveying mechanism of the present invention. 6 and 7 are views showing a state in which the long-length conveying mechanism is moved to the rightmost side.

600 is a conventional long-stroke conveying mechanism, 602 is a fixed base fixed to the base portion of the transfer chamber 2, 604 is a first pedestal, 606 is a second pedestal, 608 is a third pedestal, and 610 is 4th. The pedestal 612 is a flat plate on which the substrate 3 is mounted, 603 is a fixed rail shaft fixed to the upper portion of the fixed base 602, and 621 and 622 are rails fixed to the fixed rail shaft 603 at the lower portion of the first pedestal 604 ( The first rotor holding portion that moves in the X-axis direction, and the 605 is fixed to the upper portion of the first base 604. 1 orbital shafts 623 and 624 are second rotor holding portions that move in the X-axis direction on the rails (tracks) of the first rail shaft 605 that are fixed to the lower portion of the second base 606, and 607 is fixed to The second track shafts 625 and 626 of the upper portion of the second base 606 are fixed to the lower portion of the third base 608 and move in the third rotation in the X-axis direction on the track (track) of the second track shaft 607. The body holding portion 609 is a third track shaft fixed to the upper portion of the third base 608, and 627 and 628 are fixed to the lower portion of the fourth base 610 and on the track (track) of the third track shaft 609. The fourth rotor holding portion that moves in the X-axis direction, 611 is a fourth track shaft that is fixed to the upper portion of the fourth base 610, and 629 and 630 are fixed to the lower portion of the flat plate 612 and on the fourth track shaft 611. The fifth track holding portion in the X-axis direction is moved on the rail (track), and the substrate 3 is placed on the upper portion of the flat plate 612.

Further, 700 is the long-stroke conveying mechanism of the present invention, 704 is the first pedestal, 706 is the second pedestal, 708 is the third pedestal, 710 is the fourth pedestal, and 721 and 722 are fixed to the first base. The lower portion of the seat 704 moves on the rail (track) of the fixed rail shaft 603 in the first rotor holding portion in the X-axis direction, and the 705 is the first rail shaft fixed to the lower portion of the second base 706, 723 and 724 is a second rotator holding portion that is fixed to the upper portion of the first pedestal 704 and moves in the X-axis direction on the rail (track) of the first trajectory 705, and 707 is fixed to the second pedestal 706. The upper second track shafts 725 and 726 are fixed to the lower portion of the third base 708 and move on the rail (track) of the second track shaft 707 in the third rotor holding portion in the X-axis direction, and 709 is 3rd fixed to the lower portion of the 4th pedestal 710 The track shafts 727 and 728 are the fourth rotor holding portions that are fixed to the upper portion of the fourth base 708 and move the third track shaft 709 in the X-axis direction on the rails (tracks), and 711 is fixed to The fourth track shafts 629 and 630 of the upper portion of the fourth base 710 are fixed to the lower portion of the flat plate 612 and move on the rail (track) of the fourth track shaft 711 in the fifth rotor holding portion in the X-axis direction. . Further, 771 is a first movable member including the first base 704, the first rotor holding portions 721 and 722, and the second rotor holding portions 723 and 724, and the 772 is the third base 708 and the third rotation. The second moving members constituted by the body holding portions 725 and 726 and the fourth rotor holding portions 727 and 728.

Further, in FIGS. 6 and 7, only the movement in the + direction (the right direction in the drawing) on the X-axis is shown, but the movement in the - direction (the left direction in the drawing) is also similar.

In addition, in FIGS. 6 and 7, for simplification, description will be made under the following conditions.

(Condition 11) The gate valve 352 or 452 having the width Lx/2 is present with a linear movement guiding mechanism. Further, the gate valves 351 and 451 in the -X direction are not shown.

(Condition 12) The gate valves 352 and 452 are provided at positions where the end surface distance Lx/4 of the linear movement guide mechanism is moved in the X direction when the substrate 3 is at the position of X=0.

(Condition 13) The long-travel conveying mechanisms 600 and 700 are linear movement guiding mechanisms for allowing the substrate 3 to pass through the opening portion 352g of the gate valve 352 in both [+X] and [-X] directions (in the -X direction). Upper, opening of the gate valve 351 The portion 351g) or the opening portion 452g of the gate valve 452 (the opening portion 451g of the gate valve 451 in the -X direction) is moved by a distance Lx or more.

(Condition 14) The moving stroke (maximum moving distance) of the substrate 3 is such that the substrate 3 passes completely through the gate valve 352 or 452 (in the -X direction, the gate valve 351 or 451), from the end surface of the gate valve 352 or 452 to the end surface of the substrate 3, Move to a distance away from the position above Lx/4.

(Condition 15) The opening 352g or 452g is a large opening to the thickness tm of the substrate 3 in the vertical direction (Z direction) with respect to the passing linear movement guide mechanism and the substrate 3 (the same applies to the -X direction) .

Otherwise, the comparison conditions of FIG. 2 and FIG. 5 are the same. E.g,

(Condition 01) The substrate 3 has a length Lx in the X direction centered on the coordinate 0 of the coordinate system X, and a thickness tp.

(Condition 04) The portion (the rotor holding portions 621 to 630, 721 to 730) that holds the rotating body ("ball" or "roller") of the linear motion bearing supports the substrate 3 of the length Lx.

(Condition 05) The length of the rails (track shafts 603, 605, 607, 609, 611, 705, 707, 709, and 711) is 2Lx, and the fixed rail axis (track shafts 603, 605, 607, 609, 611, 705, The pedestals 602, 604, 606, 608, 610, 706, and 710 of 707, 709, and 711) are also of the same length.

(Condition 06) The rotor holding portions 621 to 630 and 721 to 728 cannot be exposed from the rail shafts 603, 605, 607, 609, 611, 705, 707, 709, and 711 (actually, mechanical parts are provided at the ends). Or the action of the electrical action).

(Condition 07) The uppermost flat plates 612 and 712 have the same length as the substrate 3.

(Condition 08) In order to obtain a necessary moving distance (moving stroke), a linear moving bearing (a base, a track shaft, and a rotating body holding portion is used as a constituent element) is used.

The following specifications are determined by the above conditions. that is,

(Specification 11) The movement stroke of the substrate 3 is ±5 Lx/2.

(Specification 12) The movement amount of one set (track shaft + rotor holding portion) of the linear motion bearing is ±Lx/2.

(Specification 13) From the above two items, the number of necessary linear moving bearings is five sets.

In the long-length transport mechanism 600 of the conventional method of FIG. 6,

(11a) The one-axis guide mechanism (the track shaft, the two rotor holding portions, and the susceptor) is simply superposed in five stages.

(12a) In addition to the uppermost flat plate 612, the portions connecting the rotor holding portions 621 to 628 are 2Lx because they are the bases 604, 606, 608 or 610.

(13a) When moving in the X direction, the height of the portion exposed from the lowermost base (fixed base 602) is Ha.

Further, in the long stroke conveying mechanism 700 of the present invention in Fig. 7,

(11b) The second and fourth linear moving bearings are counted from the bottom to the top, and the vertical relationship between the rotating body holding portions 723 and 724 and the orbital shaft 705 is reversed. The rotor holding portions 721 and 722 and the rotor holding portions 723 and 724 are integrally moved together in the first base 704. This portion is the first moving member 771.

(12b) In the case of Fig. 6 of the conventional embodiment, the length of the base of the fixed rotor holding portions 621 to 628 is 2Lx except for the uppermost flat plate 612. However, in the case of Fig. 7 of the present invention, the length of the base 704 included in the first movable member 771 is one half thereof and the length is Lx.

(13b) When moving, the height of the portion exposed from the lowermost base (fixed base 602) is Hb.

Comparing Fig. 6 with Fig. 7, simplification was carried out, and the same comparison as in Fig. 2 and Fig. 5 was carried out. That is, the comparison is made under the following conditions.

The length D in the depth direction (Y direction) of FIGS. 6 and 7 is uniformly D=1. Moreover, the thicknesses of the pedestals 602, 604, 606, 608, 610, 704, 706, 708, 710, and the track axes 603, 605, 607, 609, 611, 705, 707, 709, 711 are separated from the rotating body The distance between the pedestals 602, 604, 606, 608, 610, 704, 706, 708, 710 or the flat plate 612 of the holding portions 621 to 630 and 721 to 728 is the same as the thickness tm of the flat plate 612. Further, the heights of the track shafts 603, 605, 607, 609, 611, 705, 707, 709, 711 are also 2 tm. Still further, the density ρ of the pedestals 602, 604, 606, 608, 610, 704, 706, 708, 710 and the plate 612 is such that ρ=1.

According to the above conditions, the sum of the masses of the pedestals 602, 604, 606, 608, 610 and the flat plate 612 of FIG. 6 in the conventional manner is Ma=tm (11Lx). Further, the sum Mb of the masses of the pedestals 602, 704, 706, 708, 710 and the flat plate 612 of Fig. 7 is Mb = tm (9Lx).

Therefore, the mass Mb using the present invention can be reduced compared to the mass Ma of the conventional method. That is, Ma>Mb.

Next, the height Hag of the opening 352g of the gate valve of Fig. 6 is 19 tm + ts. Moreover, the height Hbg of the opening 452g of the gate valve of FIG. 7 is 17tm+ts.

Therefore, the opening height Hbg of the gate valve of the present invention can be reduced compared to the opening height Hag of the gate valve of the conventional method. That is, Hag>Hbg.

As described above, according to the embodiment of FIG. 5 or FIG. 7,

i) When the rotor holding portion of the first moving member is completely fixed back to back, an extension force and a compressive force are applied to the plate to be included. However, there is almost no bending moment, which can make the moving parts thin.

Ii) The first moving member can be regarded as one rotating body holding portion, and the number of superimposed segments of the long stroke conveying mechanism is remarkably reduced.

Iii) In terms of good balance and withstanding bending moments, it is necessary to reduce the mass from the lower section toward the upper section, either in the conventional manner or in the long-stroke conveying mechanism of the present invention. For this reason, it is necessary to change the quality and strength of each stage base. However, compared with the conventional method, the long-stroke conveying mechanism of the present invention has a small number of pedestals, and it is possible to reduce the number of parts having different qualities and strengths.

The long-stroke conveying mechanism of the embodiment of FIG. 5 or FIG. 7 is a structure in which the first moving member, the second moving member, and the like are superimposed in the vertical direction. . However, it can also be superimposed in the horizontal direction. Fig. 8 shows an embodiment of a long-stroke conveying mechanism superimposed on the same number of stages as in Fig. 5 in the horizontal direction. Fig. 8 is a plan view showing an embodiment of the long stroke conveying mechanism of the present invention as seen from above. Fig. 8 is also a view showing a state in which the long stroke conveying mechanism is moved to the rightmost side.

800 is a long stroke conveying mechanism, 571' is a first moving member, 581' is a second moving member, 504' is a first base of the moving member 571', 506' is a second base, and 203' is fixed at The fixed base shaft of the upper portion of the fixed base 202 (not visible from above) in the Z direction, 541' and 542' are fixed to one side surface of the first base 504' and fixed to the track shaft 203'. The first rotor holding portion of the movable member 571' that moves in the X-axis direction on the track, 505' is the first track shaft that is fixed to one of the side surfaces of the second base 506', and 561' and 562' are The second rotor holding portion 507' that is fixed to the side surface portion of the first base 504' and that moves on the rail of the fixed rail shaft 505' in the X-axis direction is fixed to The second orbital shafts 281' and 282' of the other side surface portion of the second pedestal 506' are fixed to the both side faces of the flat plate 208 (the substrate 3 is not visible from above) and are The track of the second track shaft 507' moves on the third rotor holding portion in the X-axis direction. Here, the first moving member 571' is configured by the rotor holding portions 541' and 542', the first base 504', and the rotor holding portions 561' and 562'. Further, the second movable member 581' is constituted by the orbital shaft 505', the second base 506', and the orbital shaft 507'.

As shown in FIG. 8, two fixed rail shafts 203' are fixed to the fixed base 202, and the inner side surfaces of the two fixed rail shafts 203' are combined. The movable member 571', the first track shaft 505', the second base 506', the second track shaft 507', the third rotor holding portions 281' and 282', and the third rotor holding portion 281' and The upper portion of the 282' is mounted and fixed to the plate 208'. The substrate 3 is placed on the flat plate 208', and the substrate 3 placed thereon is carried in and out by the long-length transport mechanism 800.

However, in the case of the long stroke conveying mechanism 800 of the embodiment of Fig. 8, a moment load and a shear load act on the moving member.

In the embodiment of Fig. 1, 4, 5, 7 or 8 described above, it is a long-length transport mechanism that transports (loads in and out) the substrate horizontally. However, it is not limited to the horizontal transfer of the substrate, and it is of course possible to carry it at a vertical or set angle. In particular, in the long stroke conveying mechanism of the embodiment of Fig. 8, the substrate is conveyed in the vertical direction. In this case, the moving load does not act on the moment load and the shear load.

That is, according to the embodiment of Fig. 8, the moving member can be thinned, and the number of superimposed segments of the long-travel conveying mechanism is remarkably reduced. Further, the quality of the base member is lighter than in the conventional method, and the mechanism can be miniaturized.

Thus, according to the embodiment of FIG. 1, 4, 5, 7 or 8 above, a long-stroke conveying mechanism capable of reducing the height of the transfer chamber and the height of the process chamber and reducing the size of the opening of the gate valve in the vertical direction can be provided. .

As a result, it is possible to provide a manufacturing apparatus and a manufacturing line which are inexpensive to manufacture, in terms of the manufacturing line of the processing chamber which is connected to the processing in the vacuum chamber. Further, since the volume of the vacuum chamber is small, it is possible to quickly maintain the vacuum, switch the vacuum, etc., and it is desired to have a low operation. This speeds up processing.

Further, in the long-stroke conveying mechanism of the embodiment of FIGS. 1, 4, 5, 7 and 8 described above, it is possible to move both the left and right in the X-axis direction, but it is only possible to move to the left or right. It is also self-evident.

3‧‧‧Substrate

202‧‧‧Fixed base

203‧‧‧ Fixed track axle

208‧‧‧ tablet

281, 282‧‧‧3rd rotor retaining section

500‧‧‧Long-term transport mechanism

505‧‧‧ Fixed track axle

504, 504'‧‧‧1st pedestal

506‧‧‧2nd pedestal

507‧‧‧ Fixed track axle

541, 542‧‧ ‧ Rotating body retention department

561, 562‧‧‧ Rotating body holding department

571‧‧‧1st moving piece

581‧‧‧2nd moving parts

Claims (5)

A film forming apparatus comprising: a film forming chamber having a film forming mechanism for forming a film on a substrate; a transfer chamber for transporting a substrate between the plurality of film forming chambers; and separating the film forming chamber A gate valve of the chamber and the transfer chamber; characterized in that the transport mechanism that transports the substrate by moving the substrate is configured by stacking a plurality of mobile units, and using the mobile unit and the mobile unit The pair of rails are directly or indirectly connected to the linear moving rail formed by the rotating body moving along the rail. Further, at least one of the aforementioned moving units is only provided with rails on the upper and lower sides, or only It has any one of the rotating bodies. The film forming apparatus according to claim 1, further comprising: a driving mechanism that drives a moving unit of the lowermost stage of the conveying mechanism in a set direction, and the movement of the lowermost moving unit is transmitted to the other by a link mechanism Move the unit to move the substrate on the transport mechanism to the set position. The film forming apparatus of claim 1 or 2, wherein the base of the moving unit is a metal flat plate. A substrate transfer device includes a transfer mechanism that transports a substrate by moving the substrate, and is configured by stacking a plurality of moving units, and using a pair of rails between the moving unit and the moving unit The linear moving rail formed by the rotating body moving along the rail is directly or indirectly connected, and further, at least one of the moving units is only provided with a rail in the upper and lower surfaces, or only has a rotating body. Any of them One. The substrate transfer apparatus according to claim 4, further comprising: a drive mechanism that drives a movement unit of a lowermost stage of the transport mechanism in a set direction; and the movement of the lowermost movement unit is transmitted to the other by a link mechanism Move the unit to move the substrate on the transport mechanism to the set position.