JP2003229466A - Vacuum processor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum carrier capable of carrying a large diameter wafer in and out of a process chamber through the gate of the width of about a wafer diameter. <P>SOLUTION: A tip of a curved metal tape 15 is fixed to a hand 13 for mounting the wafer/an upper stage slider 23 slidable in the same direction as a linearly slidable second straight rail 17 on the straight rail 17. The curved metal tape 15 and the second straight rail 17 are driven by timing belts 31 and 35 and magnet couplings 25 and 27 from the outside of a vacuum chamber, and are respectively slid while controlling the moving speed of the second straight rail 17 to be 1/2 of the moving speed of the hand 13. Thus, the hand 13 is projected long from a carrying chamber 2 to enter the process chamber 1 while being supported by the second straight rail 17. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum processing apparatus which is used in a semiconductor manufacturing apparatus, a manufacturing apparatus such as a flat panel display or the like, and which conveys a workpiece such as a silicon wafer.

[0002]

2. Description of the Related Art In the manufacturing process of semiconductors and flat panel displays, various processes such as etching, CVD, ashing, RTP, dry cleaning, measurement, analysis and observation are performed on a workpiece such as a silicon wafer. It is necessary to perform these processes in a clean high vacuum, and in order to obtain this vacuum environment, a large-scale device is used for loading and unloading the workpiece to and from the vacuum device.

As a conventional apparatus of this type, there is one provided with a load chamber for carrying in a work piece from the outside under atmospheric pressure and an unload chamber for carrying out the work piece after the process. . FIG. 13 shows an example of this vacuum device.

In FIG. 13, a load chamber 701 and an unload chamber 702 are arranged in contact with the wall surface of a transfer chamber 703 at the center of the apparatus. The transfer chamber 703 has a polygonal plane as shown in the figure, a vacuum robot 704 is provided at the center, and process chambers 705 and 706 are arranged on the other wall surfaces. The process chambers 705 and 706 are chambers for subjecting a workpiece to a process treatment such as CVD.

Gate walls 707 and 7 having airtightness are provided on walls partitioning the transfer chamber 703, the load chamber 701, the unload chamber 702, and the process chambers 705 and 706, respectively.
08, 709, 710 are provided, and the vacuum robot 704
When the workpiece is conveyed, the gate valves 707, 70
When the transfer is completed by opening 8, 709 or 710, the gate valve is closed to keep airtightness between them. Further, airtight doors 711 and 712 are provided between the load chamber 701 and the unload chamber 702 and the outside, respectively, and the door 711 is provided when an external robot or the like (not shown) conveys a workpiece. Alternatively, when 712 is opened and the conveyance is completed, the door is closed, the exhaust is performed, and the pressure is reduced to a vacuum.
Maintain air tightness with the atmosphere.

In the vacuum apparatus of FIG. 13, the workpiece is carried into the load chamber 701 by an external robot or the like, and the door 71 is opened.
When 1 is closed, the inside of the load chamber 701 is depressurized to a vacuum, and then the gate valve 707 to the transfer chamber 703 is opened. Therefore, the vacuum robot 704 in the transfer chamber operates to store the workpiece in the load chamber 701 in the transfer chamber 703 with the first hand (not shown). Next, load room 7
01 and the transfer chamber 703 are closed, and the gate valve 709 between the first process chamber 705 and the transfer chamber 703 is opened. At the same time, the vacuum robot 704 swivels while holding the workpiece, and stands still in the direction of the gate valve 709. Next, the vacuum robot 704 accommodates the workpiece in the process chamber 705 that has completed the first step with the second hand (not shown), and holds the workpiece with the first hand before the first step. The object is conveyed into the process chamber 705. Then, the gate valve 70
9 is closed, and the workpiece is subjected to the first process treatment in the closed process chamber 705.

By the same operation, the second work is sequentially performed on the workpiece.
Process processing of process (another process room 706)
When the vacuum robot 704 holds the processed workpiece, the vacuum robot 70
4 faces the unload chamber 702, and the unload chamber 702
Is confirmed to be in a vacuum state, the gate valve 708 between the transfer chamber 703 and the unload chamber 702 is opened, and the workpiece is transferred to the unload chamber 702. Then, the gate valve 708 is closed and the unload chamber 70
The atmospheric pressure is set to 2 and the door 712 is opened, and the processed object is taken out by an external robot or the like.

Although the vacuum apparatus of FIG. 13 is suitable for mass production as described above, the operation of loading and unloading the workpiece into and from the process chamber is complicated, the apparatus becomes bulky, the cost is high, and the space is required to be wide. To do.

Further, a conventional device of this type is loaded with a workpiece from the outside under atmospheric pressure as shown in FIG.
It is also known that there is a load / unload chamber 801 for unloading a processed workpiece to the outside, and the load / unload chamber 801 is interposed between the outside and the transfer chamber 802.

In the vacuum apparatus of FIG. 14, when the workpiece is carried into the load / unload chamber 801 by an external robot and the door 803 is closed, the load / unload chamber 801 is depressurized to a vacuum. After that, the gate valve 804 to the transfer chamber 802 is opened. Then, the vacuum robot 805 in the transfer chamber is activated and the first hand (not shown)
The workpiece in the load / unload chamber 801 is transferred to the transfer chamber 8
It is accommodated in 02. Next, load / unload chamber 801
And the transfer chamber 802 are closed, and the gate valve 807 between the process chamber 806 and the transfer chamber 802 is opened. At the same time, the vacuum robot 805 turns while holding the workpiece, and the gate valve 80
Turn to 7 and stand still. Then, the vacuum robot 80
A second hand (not shown) accommodates the workpiece in the process chamber 806 that has been processed by the second hand, and conveys the held workpiece to be processed in the process chamber 806. Next, the gate valve 807 is closed, and the workpiece is processed in the closed process chamber 806.

While this process is being performed, a new work piece is set in the load / unload chamber 801, the load / unload chamber 801 is depressurized to a vacuum, the gate valve 804 is opened, and the vacuum is set. The processed workpiece held by the second hand of the robot 805 is transferred to the load / unload chamber 801, a new workpiece is stored in the transfer chamber 802 by the first hand, and the gate valve 804 is set. close.

Next, the load / unload chamber 801 is brought to atmospheric pressure, and the door 803 between the outside and the load / unload chamber 801 is opened. Then, the processed object is taken out by an external robot or the like.

The vacuum device shown in FIG. 14 which performs loading and unloading in one chamber is simpler than the vacuum device shown in FIG. 13 and is low cost and space-saving, but it has a transfer chamber and a load / unload chamber. Since the vacuum robot in the transfer chamber requires a turning mechanism, it also requires a large space.

Further, as a transfer device for a vacuum device, for example, as in Japanese Patent Laid-Open No. 5-26318, a pair of two arms connected in series by joints is formed, and a member to be transferred is supported at the tip of one arm. There is known a frog leg-type transfer device in which the rear end of the other arm is attached to the base, and the arm is bent to move the support target part. This frog leg type transfer device does not have a turning mechanism like a vacuum robot, but in the contracted state, the arms are bent, so that space is required for the left and right projections.

Besides the frog leg type conveying device, a three-link type conveying device is also widely used. This three-link type also bends the arm in the contracted state, so it requires an extra space by protruding to one side.

The need for a wide space in the width direction is nothing but the need for a wide gate valve and a transfer chamber. On the other hand, in recent years, the diameter of a workpiece such as a silicon wafer has been increased in order to improve productivity. If the diameter of the workpiece is large, the transport stroke of the transport device must be large, and a transport stroke exceeding the workpiece diameter + gate valve depth is required. For example, in order to convey a workpiece having a diameter of 30 cm to the process chamber, a conveying stroke of about 60 cm is preferable.

When the frog leg type or the three-link type is adopted to increase the conveying stroke, many difficulties such as maintaining the rigidity of the apparatus, controlling the movement of a large number of links, and suppressing dust generation appear.

[0018]

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and an object of the present invention is not to overhang in the width direction even in a contracted state, which is a space-saving vacuum transfer device. Is to provide.

[0019]

In order to achieve the above object, the present invention relates to a process chamber for performing a process treatment on a workpiece and a vacuum chamber inside which is connected to the process chamber via a gate valve. A vacuum processing apparatus having a transfer chamber accommodating a transfer device, wherein the vacuum transfer device is mounted movably along a first linear rail installed on a bottom surface of the transfer chamber. An intermediate slider, a second linear rail provided on the intermediate slider in parallel with the first linear rail, an upper slider movably mounted along the second linear rail, The workpiece mounting hand attached to the upper slider is provided, and the workpiece mounting hand enters the process chamber with the intermediate slider and the upper slider slidingly advanced. In a state, wherein the workpiece mounting hand has to fit in the conveying chamber.

Further, in the above invention, two sets of the above-mentioned vacuum transfer device are provided, and the work piece placement hand of the first vacuum transfer device and the work piece placement hand of the second vacuum transfer device are vertically arranged. The two vacuum transfer devices are driven independently of each other.

Further, the vacuum transfer device is provided with an upper slider drive means for driving the upper slider from outside the vacuum range and an intermediate slider drive means for driving the intermediate slider from outside the vacuum range. The power transmission means and the power transmission means between the inside and outside of the vacuum region of the intermediate slider drive means are magnet couplings.

Further, the upper slider and the intermediate slider are driven in synchronization.

Further, a curved metal tape is attached to the upper slider or the workpiece mounting hand, and the curved metal tape is driven in the longitudinal direction so that the workpiece mounting hand is driven to be conveyed. To do.

Further, a timing belt pulley or a ball screw can be used as a synchronous driving means for the upper slider and the intermediate slider.

Further, the synchronous driving means for the upper slider and the intermediate slider may be connected to each other by a timing belt pulley or a ball screw and a gear and driven by one actuator.

Further, the material of the curved metal tape of the vacuum transfer device is required to have durability, and therefore, it is desirable to use a cobalt nickel base alloy. In addition, the cross-sectional shape of the curved metal tape is preferably 0.08 to 0.2 mm in thickness and 16 to 25 mm in radius of curvature of the curved cross section in consideration of durability against bending and buckling strength against transport thrust. Since cracking due to fatigue fracture starts from the outer end of the tape cross section, in order to reduce the stress at the outer end, it is preferable to have straight portions at both ends of the curved cross section.

In the present invention, the process processing includes processing such as etching, CVD, ashing, RTP, dry cleaning, measurement, analysis and observation.

In addition, the second linear rail may be provided in a plurality of layers in parallel with the first linear rail. In this case, the upper slider is attached to the uppermost second linear rail.

[0029]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIGS.

FIG. 1 is an explanatory view of the structure of a vacuum processing apparatus according to the present invention seen from above, and FIG. 2 is an explanatory view showing the structure of FIG. 1 in a side cross section.

In FIGS. 1 and 2, reference numeral 1 denotes a process chamber for subjecting a workpiece (wafer in this embodiment) W to process processing such as CVD. A transfer chamber 2 is connected to the process chamber 1 via a gate valve 3.
The transfer chamber 2 is provided with a vacuum transfer device 4 that operates in vacuum and does not generate dust. A blocking door 5 for loading / unloading the workpiece is provided between the transfer chamber 2 and the outside (atmosphere).

The vacuum transfer device 4 is a device for loading the workpiece W loaded from outside the vacuum region into the process chamber 1 and unloading the processed workpiece and returning it to the transport chamber 2. When the gate valve 3 is open, a curved metal tape, which will be described in detail after the vacuum transfer device 4, is unwound to bring the workpiece into and out in an extended state. When the gate valve 3 is closed, the curved metal tape is closed. The tape is returned to the tape accommodating vacuum cylinder 8 (9) and accommodated in the transfer chamber 2.

The shut-off door 5 is opened when loading the work W from the outside and unloading the work W to the outside, and is closed at other times to shut off the transfer chamber 2 from the outside air. is there.

In FIG. 2, the vacuum transfer device 4 is 4A,
As shown by 4B, two sets are provided one above the other.
Each of these vacuum transfer devices 4A and 4B is provided with a workpiece mounting hand at its tip, and as will be described in detail later,
The workpiece mounting hand is moved in the left-right direction in the figure.

In FIG. 2, 10 is a susceptor for placing a workpiece W on it for processing, 11 is the workpiece mounting hand of the vacuum transfer device 4 and the susceptor 1.
It is a lift pin for transferring the workpiece W to and from 0.

FIG. 3 is a perspective view showing the outline of an embodiment of the vacuum transfer apparatus according to the present invention. Also in FIG.
The same reference numerals are given to the portions described in FIGS. 1 and 2. As shown in FIG. 3, the upper vacuum transfer device 4A has a workpiece placing hand 12, and the workpiece placing hand 12 has a curved metal tape serving as a conveying arm on the right side of the drawing. Is provided with a lateral projecting portion 12a for fixed connection, while the vacuum transfer device 4B on the lower side has a workpiece placing hand 13 and the workpiece placing hand 1
3 has a lateral protruding portion 13a on the left side of the drawing for fixedly connecting a curved metal tape 15 which serves as a conveying arm.

The curved metal tapes arranged on the left and right are
When the respective hands are returned from the process chamber and retracted, they are also returned to the tape storage vacuum cylinders 8 or 9 arranged on the left and right.

That is, the above-mentioned workpiece mounting hand 1
As described above, the reference numerals 2 and 13 are arranged so as to be vertically overlapped with each other. However, the curved metal tape that directly moves the hands 12 and 13 and the tape storage vacuum cylinder that stores them when the hands retract, are left and right. And are housed in the transfer chamber 2 and a narrow space below the transfer chamber 2.

The transfer mechanism of the vacuum transfer device 4 is thus vertically arranged in two stages, and the arrangement is slightly different.
Since the mechanism is basically common to the upper and lower sides, one vacuum transfer device will be mainly described below in order to avoid complication of the description.

[First Embodiment of Vacuum Transfer Apparatus] A first embodiment of the vacuum transfer apparatus will be described with reference to FIGS. 4 to 9. 4 to 9, the same parts as those in FIGS. 1 to 3 are designated by the same reference numerals.

FIG. 4 is an explanatory view for explaining the vacuum transfer device 4B on the lower side of FIG. 3, FIG. 5 is an explanatory view for explaining a cross section of the vacuum transfer device of FIG. 3, and FIG. 6 is a vacuum for FIG. FIG. 7 is a plan view showing the workpiece placing hand 13 of the transfer device, FIG. 7 is a side view of the workpiece placing hand of FIG. 6, and FIG. 8 is a bending of the curved metal tape of the vacuum transfer device of FIG. Sectional drawing which expands and shows a part,
FIG. 9 is a cross-sectional view showing a cross section of the curved metal tape.

As shown in FIG. 4, the tape accommodating vacuum cylinder 9
(8) is extended below the transfer chamber 2, and the inside thereof is in a vacuum region at the same level as the transfer chamber 2.

As shown in FIGS. 4 and 5, the second linear rail 17 (1) is provided on the bottom surface 4 a of the transfer chamber 2.
6) are arranged in a stacked state. The second linear rail 17 (16) is slidable in the direction of the process chamber 1 and can project from the bottom surface 4a of the transfer chamber.

That is, the first linear rail (18) is provided on the bottom surface 4a of the transfer chamber, and the second linear rail 17 (1) is provided.
An intermediate slider 21 (20), which is slidable by engaging with the first linear rail (18), is attached downward in 6). With this configuration, the second linear rail 17 (1)
6) is slidable on the bottom surface 4a of the transfer chamber. It should be noted that the second linear rail 17 is not limited to one step, but may be arranged in a plurality of steps so as to be slidable in the same direction.

The workpiece mounting hand 13 (12) is directed to the same process chamber 1 on the second linear rail 17 (the uppermost second linear rail when a plurality of stages are stacked). It is slidable.

That is, the second uppermost linear rail 17 (16) is formed in the same linear rail as the first linear rail 19 (18). Also, FIGS.
And as shown in FIG. 7, the workpiece mounting hand 13
The second protrusion is formed on the side protrusion 13a (12a) of (12).
The upper slider 23 (22) that is slidable by being engaged with the linear rail 17 (16) of the above is attached downward. With this configuration, the workpiece placing hand 13 (1
2) is slidable on the second linear rail 17 (16).

The tip of the curved metal tape 15 (14) is fixed to the side projection 13a (12a) of the workpiece mounting hand 13 (12). The curved metal tape 15 (14) has its rear portion rotated downward by 90 ° by the direction changing means 24 and is housed vertically in the tape housing vacuum cylinder 9 (8).

The direction changing means 24 comprises a pair of rolls 2.
4a, 24b, and these rolls 24a, 24b
Securely insert the curved metal tape 15 (14) between the
We will guide you so that you can change the direction by 0 °.

The curved metal tape 15 (14) is made of a cobalt-nickel-based alloy, and its cross section is convexly curved upward as shown in FIG. 9 and has appropriate rigidity and flexibility against bending. Then, the curved metal tape 15 (1
4) The roll 24 inside the tape of the direction changing means 24 so that it bends 90 ° without losing elasticity or permanent deformation.
A is a drum type roll as shown in FIG. In addition,
The other outer roll 24b may be a cylindrical roll, but since the curved curvature of the metal tape 15 (14) becomes small at the bent portion and becomes close to a straight line, the chamfer r with a gentle angle except for the central portion. Better to do.

As the cobalt nickel base alloy used for the curved metal tape 15 (14), in this embodiment, Ni is used.
31.4 to 33.4 wt%, Cr 19.5 to 20.5 w
t%, Mo 9.5 to 10.5 wt%, Nb 0.8 to 1.
2 wt%, Ti 0.3 to 0.7 wt%, Fe 1.1 to
2.1 wt%, C 0.03 wt% or less, Si 0.1 wt
%, Mn 0.5 wt% or less, P 0.02 wt% or less, S 0.02 wt% or less, and the balance Co Spron (registered trademark).

As for the sectional shape of the curved metal tape 15 (14), the one shown in FIG. 9 had a long service life under the condition of repeated bending. FIG. 9A shows a thickness t = 0.08 to 0.2.
mm, a radius of curvature R = 16 to 25 mm, and an arc-shaped curved metal tape. In FIG. 9B, the thickness t = 0.08-0.
It is a curved metal tape having a cross section having straight portions L on both sides of an arc having a radius of curvature of 2 mm and a radius of curvature R = 16 to 25 mm.

The rear end portion of the curved metal tape 15 (14) is fixed to the upper and lower driven magnets 25b having the guide holes penetrating therethrough. And, this upper and lower driven magnet 25
In b, the guide hole is inserted into a guide rod 26 provided in the tape accommodating vacuum cylinder 9 (8), and is vertically slidable.

Therefore, when the upper and lower driven magnets 25b are moved up and down, the curved metal tape 15 (14) moves up and down in the tape accommodating vacuum cylinder 9 (8) to change the direction.
At the tip bent horizontally by 4, the front and back (left and right in Fig. 4)
By moving in the direction, the workpiece mounting hand 13 (12) is moved back and forth on the second linear rail 17 (16).

The second linear rail 17 (16)
When a force is applied in the front-back direction on the bottom surface 4a of the transfer chamber, the intermediate slider 21 (20) slides on the first linear rail (18) of the bottom surface 4a of the transfer chamber, and thus moves in the front-back direction. The movement of the second linear rail 17 (16) is independent of the movement of the workpiece placing hand 13 (12) and does not necessarily need to be linked, but the workpiece placing hand 13 is not necessary. During the operation of (12), the second linear rail 17
The operation is performed so that the operation of (16) ends.

Further, by operating the slider within the movable range of the rail, the intermediate slider 21 (20) on the first linear rail 19 (18) is moved to the first linear rail 19 (18) on the bottom surface 4a of the transfer chamber. The second linear rail 17 (16) does not hit the stopper in the upper sliding direction.
The upper slider 23 (22) on the upper side of the second linear rail 1
It is possible to operate without hitting the stopper in the sliding direction on the straight rail 7 (16).

The sliding movement of the workpiece mounting hand 13 (12) is performed by the upper slider driving means described below. On the other hand, the sliding movement of the second linear rail 17 (16) is performed by the intermediate slider driving means described below.

The upper slider drive means is a drive motor (actuator) 28 attached to the vacuum processing apparatus frame outside the vacuum region, a timing pulley 29 attached to the output shaft of this motor 28, a relay drive timing pulley 30, and the like. Timing belt 31 wound around the timing pulleys 29 and 30, and the upper and lower driving magnets 25 fixed to the outer periphery of the timing belt 31.
a, and the power transmission means outside the vacuum region, which is constituted by a guide rod 32 provided along the tape accommodating vacuum cylinder 9 (8) through which the guide holes of the upper and lower drive magnets 25a are inserted, and the upper and lower drive magnets 25a and the vacuum. It comprises a power transmission means (magnet coupling) 25 between the inside and outside of the vacuum area, which is composed of the upper and lower driven magnets 25b in the area.

The intermediate slider driving means is a relay driven timing pulley 33 having a pitch diameter of 1/2 and integrated with the relay driving timing pulley 30 provided outside the vacuum region, and the relay driven timing pulley 33 and another one. A power transmission means outside the vacuum region, which comprises a timing belt 35 wound around a pulley 34, and the timing belt 35.
Inside the vacuum region, which includes the front and rear driving magnets 27a fixed to the outer periphery of the first and second front and rear driven magnets 27b (see FIG. 5) provided on the lower surface of the intermediate slider 21 (20) of the second linear rail 17 (16) in the vacuum region. And a power transmission means (magnet coupling) 27 between the outside. The front-rear driving magnet 27a is also fixed to the slider 39 (38) slidable along the linear rail 37 (36), like the front-rear driven magnet 27b.

As described above, the second linear rail 17
(16) and the workpiece mounting hand 13 (12) have independent motions and need not be interlocked, but in this embodiment, in order to make the device compact and inexpensive In addition, the drive source (motor) and a part of the transmission means are shared. This commonalization contributes to further downsizing and cost reduction because the drive source is controlled by a single control device.

In order to convey a work piece in the vacuum processing apparatus, it is necessary to prevent dust from being generated in the apparatus during the conveyance process.
It is necessary to prevent dust from scattering and floating in the vacuum space. For that purpose, firstly, no parts that easily generate dust are used in the vacuum processing apparatus. Therefore, in the first embodiment of the present invention described above, in the vacuum region, the hand / upper slider that is supported on the second linear rail and can be smoothly moved linearly, and the curved metal that moves the hand / upper slider. The tape, the first linear rail that supports the second linear rail / intermediate slider from below and moves smoothly in a linear manner are provided, and the hand / upper slider and the second linear rail / intermediate slider are provided with driven magnets, respectively. Outside the vacuum area, a driving magnet facing the driven magnet, a transmission part that easily generates dust that moves this driving magnet, and a driving part are provided, and power is transmitted from outside the vacuum area to the hand / upper slider and the second straight line. The rail and intermediate slider can be moved individually.

Second, which prevents dust from scattering and floating in the vacuum space
The measure is to carry out smoothly and smoothly without any impact.

The smooth and smooth operation without impact of the first embodiment of the present invention configured as described above,
This will be described below.

The motor 28 is controlled by a controller (not shown). More specifically, for example, a pulse motor is NC
Control. In order to move the hand, the intermediate slider, the curved metal tape, etc. in the vacuum region quietly and efficiently and at a high speed, the motor 28 is controlled so that the "impulse", that is, the "time differential of acceleration" is minimized. Drive while driving.

The counterclockwise rotation of the motor 28 in FIG. 4 moves the timing belt 31 counterclockwise to move the upper and lower drive magnets 25a upward, and the upper and lower drive magnets 25 of the magnet coupling 25 outside this vacuum region.
By the magnetic force of a and the vertical driven magnet 25b in the vacuum region, the vertical driven magnet 25b in the tape accommodating vacuum cylinder 9
Also moves upwards. Since there is no slip of the timing belt 31 and almost no slip of the magnet coupling 25, the vertical driven magnet 25b and the curved metal tape 15 having its rear end fixed to the magnet 25b have very little impulse as shown by h in FIG. It moves in the longitudinal direction along the velocity curve.

By the operation of the upper slider driving means,
The workpiece mounting hand 13 fixed to the tip of the curved metal tape 15 is slid along the horizontal velocity curve of h in FIG. 12 while being supported by the second linear rail 17, and the workpiece W Are transferred into the process chamber 1.

While the upper slider driving means operates as described above, the intermediate slider driving means simultaneously operates in parallel as follows.

Since the relay driving timing pulley 30 and the relay driven timing pulley 33, which rotate integrally with the movement of the timing belt 31, have the pitch diameter of 2: 1 as described above, the relay driven timing pulley 3
The moving speed of the timing belt 35 wound around the belt 3 is half the moving speed of the timing belt 31 directly connected to the motor 28. The movement of the timing belt 35 at half the speed is performed via the Mounet coupling 27.
It is transmitted from the timing belt 35 outside the vacuum region to the second linear rail 17 inside the vacuum region, and the second linear rail 17 is
The workpiece placing hand 13 moves at a speed half that of the workpiece placing hand 13 in the same direction as the workpiece placing hand 13, and supports the moving workpiece placing hand 13 from below. ing. Thereby, the workpiece mounting hand 13 can be stably moved into the process chamber 1.

The moving speed curve of the second linear rail 17 during this period is as shown in s of FIG.
It becomes 1/2 of the moving speed curve h of 3. That is, since both the workpiece mounting hand 13 and the second linear rail 17 move with very little impulse, the workpiece W is vibrated and parts such as the hand 13 and the slider 17 in the vacuum region are shocked. There is nothing to give and generate dust.

When the workpiece mounting hand 13 is retracted, the motor 28 is rotated in the opposite direction to the above-described forward movement,
The velocity curve is as shown in FIG. 12, as in the forward movement.

In the embodiment of FIGS. 4 to 9 described above, when a plurality of second linear rail / intermediate sliders are arranged in a stacked manner, a magnetic coupling for driving each intermediate slider from outside the vacuum region in its sliding direction. Intermediate slider driving means such as the above may be provided, and the second linear rail and the intermediate slider may be moved while being slightly displaced from each other by slightly differentizing the peak values of the respective speed curves.

The velocity curves of the intermediate slider and the workpiece mounting hand are not limited to those in the example of FIG. 12, and can be appropriately selected within a range in which there is no urge and a smooth movement.

The slide stroke between the workpiece mounting hand and the intermediate slider that is in contact with the workpiece mounting hand is equalized. If a plurality of intermediate sliders are used, the slide strokes between adjacent intermediate sliders are equalized, and the sum of each slide stroke is the workpiece. If it is controlled to be the transport distance of the workpiece such as the wafer placed on the placing hand, the slide strokes of the workpiece placing hand are averaged and both strokes are relatively small, It is possible to realize motion without impulse.

[Second Embodiment of Vacuum Transfer Device] FIG. 10
FIG. 6 is an explanatory diagram illustrating another embodiment of the vacuum transfer device according to the present invention.

The embodiment of FIG. 10 uses a ball screw or a gear instead of the timing belt pulley in FIG. 4 as the power transmission means outside the vacuum region of the upper stage slider drive means or the intermediate slider drive means of the vacuum transfer device. Is. 10, the same parts as those in FIG. 4 such as those in the vacuum region are designated by the same reference numerals, and detailed description thereof will be omitted.

In FIG. 10, the structure of the power transmission means outside the vacuum region of the upper slider drive means is the drive motor (actuator) 4 attached to the frame of the vacuum processing apparatus.
0, a ball screw 41 attached to the output shaft of the motor 40, and a ball nut 42 screwed to the ball screw 41 and having the upper and lower driving magnets 25a fixed to its side surface.

The structure of the power transmission means outside the vacuum region of the intermediate slider drive means is arranged in parallel with the relay driving bevel gear 43 attached to the tip of the ball screw 41 and the second linear rail 17 (16). Ball screw 44, which is screwed onto this ball screw 44, and which has front and rear driving magnets 2 on its side surfaces.
A ball nut 45 to which 7a is fixed and a relay driven bevel gear 46 which is attached to one end of the ball screw 44 and meshes with the relay driving bevel gear 43. The pitch diameter of the relay driven bevel gear 46 is twice the pitch diameter of the relay driving bevel gear 43, and the moving speed of the second linear rail 17 due to the rotation of the drive motor 40 is set on the workpiece. The moving speed of the hand 13 is 1/2.

The operation and the like in the embodiment of FIG. 10 are as follows, except that the ball screw 41, 44 is rotated to move the up-down drive magnet 25a and the front-back drive magnet 27a.
This is similar to the embodiment of FIGS.

[Third Embodiment of Vacuum Transfer Device] FIG. 11
FIG. 7 is an explanatory view illustrating a third embodiment of the vacuum transfer device according to the present invention.

In the embodiment shown in FIG. 11, the upper slider driving means and the intermediate slider driving means of the vacuum transfer device are not driven by one driving motor (actuator) as in the above-described embodiments, but are individually driven. It is driven by a motor (actuator). 11, the same parts as those in FIG. 4 are designated by the same reference numerals, and detailed description thereof will be omitted.

In FIG. 11, in addition to the drive motor (actuator) 28 of the upper slider drive means, a drive motor (actuator) 47 of the intermediate slider drive means is attached to the frame of the vacuum processing apparatus, and its output shaft has a timing pulley. 48 is attached. A timing pulley 49 is arranged instead of the relay driving timing pulley 30 shown in FIG. 4, and a timing pulley 50 is arranged instead of the relay driven timing pulley 33. These timing pulleys 49, 50 are not connected to each other, and the timing belts 31, 3 are respectively connected.
5, the timing belt 29 is simply stretched between the timing pulleys 29 and 48 on the drive motor side.

The drive motor 28 and the drive motor 47 are respectively controlled by a controller (not shown). Since the upper slider driving means and the intermediate slider driving means are not mechanically connected and are driven by individual driving motors, the moving speed of the second linear rail 17 and the workpiece mounting hand 13 are provided. The moving speed of 1 does not always control 1 to 2 as shown in FIG. For example, the workpiece mounting hand 13 starts gently after the second linear rail 17 starts slowly, and the second linear rail 17 gently stops and moves to a predetermined position and then the workpiece is placed. The placement hand 13 may be gently stopped. The drive control of the drive motor 28 and the drive motor 47 is performed by the second linear rail 17 that supports the workpiece mounting hand 13 from below during movement and holds the workpiece W.
It is possible to perform various controls as long as it does not bend and the second linear rail 17 and the workpiece mounting hand 13 are both accelerated and decelerated smoothly without an impulse.

The present invention is not limited to the above embodiment,
Various modifications are possible. For example, as the power transmission means outside the vacuum region, two drive motors as shown in FIG. 11 may respectively drive the ball screws. Instead of the bevel gear in FIG. 10, another train wheel may be used to transmit power between two ball screws whose axes do not intersect. As a drive motor, a linear motor (electromagnet type, electrostatic type,
If an elastic wave system) or an ultrasonic motor is used, the power transmission means can be configured without using a timing belt or a ball screw.

Further, by providing the electrostatic linear motor on the vacuum side, the magnet coupling can be eliminated.

Instead of the pulse motor, for example, a DC or AC servo motor or the like can be used.

The power transmission means between the inside and the outside of the vacuum region is not limited to the magnetic coupling using a permanent magnet, but an electromagnet type magnetic coupling or other electromagnetic coupling means can be used.

[0086]

As described above, according to the present invention, the intermediate slider and the upper slider in vacuum can be slid in the same direction, and when the intermediate slider and the upper slider are slid and moved forward, the slider is moved to the upper slider. Since the attached workpiece placing hand enters the process chamber and is retracted, the workpiece placing hand is accommodated in the transfer chamber, so that the following effects are obtained.

(1) It is possible to reduce the size of the vacuum transfer device in the longitudinal direction and the width direction by using the intermediate slider and the upper slider, which have a plurality of steps for a long transfer stroke.

(2) Since the number of parts that operate in a vacuum is such that dust is unlikely to occur, it is possible to suppress dust generation in a vacuum by a smooth operation without impulse.

(3) Since most of the driving means is outside the vacuum, dust prevention measures can be mitigated, special vacuum parts are not required, and the entire device can be made compact and inexpensive to manufacture. .

(4) In addition, two sets of vacuum transfer devices are provided, and the intermediate slider of the first vacuum transfer device and the workpiece mounting hand are mounted on the intermediate slider of the second vacuum transfer device and the workpiece mounting target. By stacking the placing hands vertically and driving the two sets of vacuum transfer devices independently by the upper-stage slider drive means and the intermediate slider drive means, the transfer can be performed with a shorter cycle time.

(5) If a magnet coupling is used as a power transmission means between the inside and outside of the vacuum region of the upper slider driving means or the intermediate slider driving means of the vacuum transfer device,
The vacuum environment can be completely isolated from the outside air, and the reliability of the device can be improved.

(6) If the upper slider and the intermediate slider are driven in synchronization, the drive control becomes simple.

(7) If the curved metal tape attached to the workpiece placing hand is driven without directly driving the workpiece placing hand, the workpiece is projected in the width direction during the conveying operation of the vacuum conveying device. Since the width dimension is slightly larger than the diameter of the workpiece, the vacuum transfer apparatus itself and the vacuum processing apparatus can be configured compactly, and the area occupied by the apparatus can be small.

(8) If a timing belt pulley or a ball screw is used as the upper slider driving means or the intermediate slider driving means of the vacuum transfer device, the movement of the hand and the intermediate slider can be accurately controlled without slipping the transmission system. You can

(9) The power transmission means outside the vacuum region of the upper slider drive means and the intermediate slider drive means of the vacuum transfer device is a timing belt pulley or a ball screw.
If the gears are connected to each other and driven by one actuator, only one power source and its control device will be required, which will reduce the cost and the start and stop of the hand and the intermediate slider will be synchronized with the operation of the transfer device. Becomes smooth.

(10) If a cobalt-nickel-based alloy that maintains elasticity against repeated bending for a long time is used for the curved metal tape of the vacuum transfer device, the curved metal tape has a long life and the maintenance cost of the device is reduced.

(11) If the cross section of the curved metal tape has a thickness of 0.08 to 0.2 mm and a radius of curvature of 16 to 25 mm, or if straight portions are provided at both ends of the curved cross section, the tape can be obtained. It can be expected that the bent portion of the tape smoothly bends along the guide, the assembling is easy, the feeding operation is smooth, and the life of the tape is longer.

[Brief description of drawings]

FIG. 1 is an explanatory view of the configuration of a vacuum processing apparatus according to the present invention viewed from above.

FIG. 2 is an explanatory diagram showing a side surface of the configuration of FIG.

FIG. 3 is a perspective view schematically showing an embodiment of a vacuum transfer device according to the present invention.

FIG. 4 is an explanatory diagram illustrating the vacuum transfer device of FIG.

5 is an explanatory view illustrating a cross section of the vacuum transfer device of FIG.

FIG. 6 is a plan view showing a workpiece mounting hand of the vacuum transfer apparatus of FIG.

7 is a side view showing a workpiece mounting hand of the vacuum transfer apparatus of FIG.

8 is a cross-sectional view showing a tape bending portion of the vacuum transfer device of FIG.

9 is a sectional view showing a tape section of the vacuum transfer device of FIG.

FIG. 10 is an explanatory view showing another embodiment of the vacuum transfer device according to the present invention.

FIG. 11 is an explanatory view showing another embodiment of the vacuum transfer device according to the present invention.

FIG. 12 is a velocity diagram illustrating the velocity relationship of each part of the vacuum transfer device according to the present invention.

FIG. 13 is an explanatory diagram showing a configuration of a conventional vacuum device.

FIG. 14 is an explanatory diagram showing a configuration of a conventional vacuum device.

[Explanation of symbols]

1 Process Chamber 2 Transfer Chamber 3 Gate Valve 4 Vacuum Transfer Device 4A Upper Vacuum Transfer Device 4B Lower Vacuum Transfer Device 4a Transfer Chamber Bottom 5 Shutoff Door 8 Tape Storage Vacuum Tube 9 Tape Storage Vacuum Tube 12 Workpiece Placement Hand 12a Side protrusion 13 Workpiece mounting hand 13a Side protrusion 14 Curved metal tape 15 Curved metal tape 16 Second straight rail 17 Second straight rail 18 First straight rail 19 First straight rail 20 Intermediate Slider 21 Intermediate Slider 22 Upper Slider 23 Upper Slider 24 Direction Changer 24a Roll 24b Roll 25 Power Transmission Means (Magnet Coupling) 25a between Upper and Lower Driving Magnets 25b Upper and Lower Driven Magnets 27 Power Transmission Means Between Upper and Lower Vacuum Areas ( Magnet coupling) 27a Front and rear drive magnets 27b Driven magnet 28 Drive motor 29 Timing pulley 30 Relay drive timing pulley 31 Timing belt 33 Relay driven timing pulley 34 Pulley 35 Timing belt 36 Straight rail 37 Straight rail 38 Slider 39 Slider 40 Drive motor (actuator) 41 Ball screw 42 Ball nut 43 Relay drive bevel gear 44 Ball screw 45 Ball nut 46 Relay driven bevel gear 47 Drive motor (actuator) 48 Timing pulley 49 Timing pulley 50 Timing pulley

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 4K030 CA04 CA12 GA12 KA28 KA46                 5F031 CA02 CA05 FA01 FA02 FA07                       FA12 GA42 GA48 GA49 GA50                       HA33 LA07 LA08 LA09 LA11                       LA12 LA13 LA14 MA28 MA32                       MA33 NA05 NA09 PA30

Claims (12)

[Claims] 1. A vacuum processing apparatus comprising: a process chamber for performing a process process on a workpiece; and a transfer chamber connected to the process chamber via a gate valve and having a vacuum transfer device housed therein. The vacuum transfer device includes a first linear rail installed on a bottom surface of the transfer chamber, an intermediate slider movably mounted along the first linear rail, and the first linear rail on the intermediate slider. A second linear rail provided in parallel with the linear rail; an upper slider movably attached along the second linear rail; and a workpiece mounting hand attached to the upper slider. Then, with the intermediate slider and the upper slider sliding and moving forward, the workpiece mounting hand enters the process chamber,
A vacuum processing apparatus characterized in that the workpiece mounting hand is housed in a transfer chamber in a retracted state. 2. A set of the above-mentioned vacuum transfer devices is provided, and a work piece placement hand of the first vacuum transfer device and a work piece placement hand of the second vacuum transfer device are arranged vertically. The vacuum processing apparatus according to claim 1, wherein the two sets of vacuum transfer devices are independently driven. 3. The vacuum transfer device is provided with an upper slider drive means for driving the upper slider from outside the vacuum range and an intermediate slider drive means for driving the intermediate slider from outside the vacuum range, and between the inside and outside of the vacuum range of the upper slider drive means. 3. The magnet coupling is used as the power transmission means between the power transmission means and the inside and outside of the vacuum region of the intermediate slider drive means.
The vacuum processing apparatus according to. 4. The vacuum processing apparatus according to claim 1, wherein the upper slider and the intermediate slider are driven in synchronization with each other. 5. A curved metal tape is attached to the upper slider or the workpiece mounting hand, and the workpiece mounting hand is conveyed and driven by driving the curved metal tape in the longitudinal direction. The vacuum processing apparatus according to 1 or 2. 6. The vacuum processing apparatus according to claim 4, wherein the synchronous driving means for the upper slider and the intermediate slider has a timing belt pulley. 7. The vacuum processing apparatus according to claim 4, wherein the synchronous driving means for the upper slider and the intermediate slider has a ball screw. 8. The vacuum processing apparatus according to claim 4, wherein the synchronous driving means for the upper slider and the intermediate slider are connected to each other by a timing belt pulley and driven by one actuator. 9. The vacuum processing apparatus according to claim 4, wherein the synchronous drive means for the upper slider and the intermediate slider are connected to each other by a ball screw and a gear and driven by one actuator. 10. The vacuum processing apparatus according to claim 5, wherein the curved metal tape of the vacuum transfer apparatus is made of a cobalt nickel base alloy. 11. The cross section of the curved metal tape has a thickness of 0.0.
The vacuum processing apparatus according to claim 10, which has a curved cross section with a radius of curvature of 8 to 0.2 mm and a radius of curvature of 16 to 25 mm. 12. The vacuum processing apparatus according to claim 11, wherein the curved metal tape has straight portions at both ends of the curved cross section.