TW201300195A - Apparatus for rotation and revolution of polishing plate and polishing plate operating method using the same - Google Patents

Abstract

An apparatus for rotation and revolution of a polishing plate may enhance a polishing rate of a glass substrate since the polishing plate may rotate and revolve simultaneously.

Description

Device for polishing and revolving of polishing plate and polishing plate using same Method of operation

The application is based on 35 USC 119(a), the priority of which is the Korean Patent No. 10-2011-0058532 filed on June 16, 2011, to the Korean Patent Office, the disclosure of which is incorporated herein by reference. .

The present invention relates to a device for rotating and revolving a polishing plate and a polishing plate using the same, and particularly to a polishing plate rotation and revolving device for enhancing the polishing rate of a glass substrate by rotating and rotating the polishing plate and Use its polishing plate method of operation.

In general, for a glass substrate applied to a liquid crystal display, it is very important to maintain a certain degree of flatness in order to accurately represent an image. Therefore, unevenness or undulation of the details on the surface of the glass substrate should be removed by a polishing process.

The polishing process of the glass substrate can be divided into a so-called "Oscar" method in which each glass substrate is polished one by one, and a so-called "inline" method in which a series of glass substrates are continuously polished. The polishing process can also be divided into "single surface polishing" which polishes only one side of the glass substrate and "both surface polishing" which is polished on both sides of the glass substrate.

Referring to Figure 1, there is shown a conventional glass substrate polishing apparatus in which the polishing apparatus 10 is provided with the glass substrate G held by the carrier 4 on the lower plate 2. A higher plate 8 (or polishing plate) provided with the polishing pad 6 is brought into contact with the glass substrate G, and while the polishing plate 8 is rotated, a polishing liquid is supplied between the polishing plate 8 and the glass substrate G, and the polishing is further performed. Glass substrate G. To this end, the polishing apparatus 10 uses a plurality of grooves 8a formed in the polishing plate 8 and a hose 3 disposed above the polishing plate 8 and separated from the polishing plate 8, to provide a polishing liquid by free fall.

The polishing plate 8 is rotated by transmitting the rotational force of the autonomous shaft 7. However, since only the polishing plate 8 is rotated, there is a limit in increasing the polishing rate of the glass substrate G.

SUMMARY OF THE INVENTION The present invention has been made in an effort to solve the problems of the prior art, and it is therefore an object of the present invention to provide a device for allowing a polishing plate (or spindle) to rotate and revolve, and a polishing plate operating method using the same.

Another object of the present invention is to provide an apparatus which can increase the polishing rate of a glass substrate and a polishing apparatus using the same.

In one aspect, the present invention provides an apparatus for spinning and revolving a polishing plate, comprising: a cylindrical member (20) having a hollow region formed along a length direction and an outer ring gear formed on an outer circumferential surface (26); a main shaft (50) disposed along the length direction in the hollow region and supported by the cylindrical member (20) to rotate at an eccentricity of a central axis of the cylindrical member, and a shaft gear (51) Arranging on the outer edge of the main shaft (50), the main shaft (50) is connected with a polishing plate; and a ring gear (60) having an internal gear (61) formed on the inner circumferential surface thereof and an outer gear (62) formed On the outer circumferential surface, the internal gear (61) The set is engaged with the shaft gear (51). When a driving force is transmitted to the cylindrical member (20), the cylindrical member (20) is caused to rotate, and the main shaft (50) revolves in an eccentric manner to the hollow portion, and the shaft gear (51) Rotation occurs in the case of meshing with the internal gear (61).

At this time, in the case where the driving force is transmitted to the external gear (62) and the ring gear (60) is rotated, the shaft gear (51) rotates.

The ring gear (60) can be rotated by using a driving force transmitted from a rotation motor, and the cylindrical member (20) can be rotated by using a driving force transmitted from a revolving motor.

In addition, a plurality of gears (71), (72), (73), (74), and (75) may be mounted between the ring gear (60) and the rotation motor to allow transmission of the driving force of the rotation motor, and the gear is made The reduction ratio is adjustable.

In addition, a plurality of gears (22), (23), and (24) may be mounted between the outer ring gear (26) and the revolving motor to allow transmission of the driving force of the revolving motor, and the gear reduction ratio is adjustable.

Meanwhile, in another aspect, the present invention also provides a polishing plate operation method using a device for rotating and revolving a polishing plate, wherein a polishing plate for polishing a glass substrate is rotated by forcing a spindle (50) connected to the polishing plate and Revolution, while at the same time rotating and revolving.

The apparatus for use in the above method may include: a cylindrical member (20) having a hollow portion formed along the length direction and an outer ring gear (26) formed on the outer circumferential surface; a main shaft (50) along The length direction is disposed in the hollow region and is rotated by the central member of the cylindrical member by the support of the cylindrical member (20), and the shaft gear (51) is disposed outside the main shaft (50) a spindle (50) is coupled to a polishing plate; and a ring gear (60) having an internal gear (61) formed on an inner circumferential surface thereof and an external gear (62) formed on an outer circumferential surface thereof. A gear (61) is provided to be meshed with the shaft gear (51). When the cylindrical member (20) is rotated by a driving force, the main shaft (50) revolves in an eccentric manner to the hollow portion, and the shaft gear (51) is engaged with the internal gear (61). A revolution occurs. Further, in the case where a driving force is transmitted to the external gear (62), the ring gear is caused to rotate, (60) and the shaft gear (51) is rotated.

The driving force of the rotation can be transmitted from a rotation motor, and the driving force of the revolution can be transmitted from a revolution motor, a plurality of gears (71), (72), (73), (74) and (75) Provided between the ring gear (60) and the rotation motor to allow transmission of the driving force of the rotation motor, and the gear reduction ratio is adjustable, and the plurality of gears (22), (23) and (24) It is disposed between the outer ring gear (26) and the revolving motor to allow transmission of the driving force of the anti-rotation motor, and the gear reduction ratio is adjustable.

The apparatus for rotating and revolving the polishing plate according to the present invention and the polishing plate operating method using the same have the following effects.

First, the polishing plate (or spindle) can rotate and revolve at the same time.

Furthermore, the polishing rate of the glass substrate can be increased by allowing the polishing plate (or spindle) to simultaneously rotate and revolve.

Hereinafter, the preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings. In the previous description, it should be understood that in the specification The nouns used and the scope of the accompanying patents are not to be construed as limited to the meaning of the general and dictionary, but the inventor allows the proper definition of the term as the best explanation based on the technical meaning and concept of the corresponding principles of the present invention. Therefore, the descriptions of the present invention are intended to be illustrative only, and are not intended to limit the scope of the present invention, and it should be understood that other equivalent modifications may be made without departing from the spirit and scope of the invention.

2 is a perspective view illustrating an apparatus for rotating and revolving a polishing plate in accordance with a preferred embodiment of the present invention.

Referring to Fig. 2, the apparatus 100 includes a revolving unit for revolving the main shaft 50, and a rotation unit for rotating the main shaft 50.

At the same time, the main shaft 50 is coupled to the polishing plate 8 (see Fig. 1) (not shown in Fig. 2). Therefore, in the present invention, if the spindle 50 is rotated, the polishing plate 8 also rotates. In addition, if the spindle is 50 revolutions, the polishing plate 8 also revolves. Furthermore, if the spindle 50 rotates and revolves at the same time, the polishing plate 8 also rotates and revolves at the same time. Therefore, in the present invention, the rotation of the spindle 50 represents the rotation of the polishing plate 8, and the revolution of the spindle 50 represents the revolution of the polishing plate 8.

The revolution unit includes a cylindrical member 20, a revolving motor 21 for providing a driving force to allow the cylindrical member 20 to rotate, and a plurality of gears 22, 23, 24 for transmitting the driving force from the revolving motor 21 to the cylindrical member 20. . The revolution unit allows the main shaft 50 to be disposed through the cylindrical member 20 and revolves based on the center of the cylindrical member 20.

As shown in FIG. 4, the cylindrical member 20 includes a hollow portion 25 formed along its length direction, an outer ring gear 26 disposed at an outer edge thereof, and a bearing 27 for supporting the main shaft 50. The cylindrical member 20 is fixed in the frame 30.

The hollow region 25 is formed through the cylindrical member 20 and along the longitudinal direction of the cylindrical member 20, and the outer ring gear 26 receives the driving force from the revolving motor 21 to rotate.

The bearing 27 supports the main shaft 50 provided through the hollow portion 25 so that the main shaft 50 can rotate. The main shaft 50 is eccentrically disposed a predetermined distance d from the center of the cylindrical member 20. Therefore, if the cylindrical member 20 is rotated, the main shaft 50 revolves while drawing a circle having an eccentric distance d as a radius.

The revolution motor 21 transmits the driving force to the outer ring gear 26 through the plurality of gears 22, 23, and 24. The plurality of gears 22, 23 and 24 preferably have different numbers of teeth to reduce the rotational speed (R.P.M) of the revolution motor 21. Figure 3 shows that the three gears 22, 23 and 24 are in meshing engagement, and a plurality of different combinations of gears can be replaced to achieve the desired reduction ratio.

The rotation unit allows the spindle 50 to rotate based on the central axis of the spindle 50. As shown in FIG. 5, the rotation unit includes a main shaft 50 having a shaft gear 51 disposed thereon, the ring gear 60 and the shaft gear 51 meshing with each other, a rotation motor 70, and a plurality of gears 71, 72, 73, 74 and 75, which is used to transmit the driving force of the rotation motor 70 to the ring gear 60.

The main shaft 50 is disposed along the cylindrical member 20 in the hollow region 25. The main shaft 50 is eccentrically disposed a predetermined distance d from the center of the cylindrical member 20. The main shaft 50 is supported by the bearing 27 and is capable of rotating.

The shaft gear 51 is mounted on the outer edge of the main shaft 50, and a polishing plate 8 (see Fig. 1) (not shown in Fig. 5) is attached to the lower end of the main shaft 50.

The ring gear 60 is attached to the upper side of the cylindrical member 20. The ring gear 60 includes an internal gear 61 formed on an inner circumferential surface thereof and an external gear formed on an outer circumferential surface thereof 62. The internal gear 61 is interengaged with the shaft gear 51, and the external gear 62 is interengaged with the gear 75.

The ring gear 60 and the cylindrical member 20 are respectively rotated. In other words, the ring gear 60 is rotated by the driving force of the rotation motor 70, and the cylindrical member 20 is rotated by the driving force of the revolving motor 21.

The ring gear 60 has an inner diameter (inner circumferential diameter of the ring gear 60) that allows the spindle 50 to simultaneously rotate and revolve. In other words, the main shaft 50 is mounted at an eccentric position of the center of the cylindrical member 20, and a circle having an eccentric distance d is drawn while revolving. At this time, the ring gear 60 has an inner diameter which allows the main shaft 50 to remain engaged with the internal gear 61 when revolving as described above, and therefore, the main shaft 50 can be rotated and revolved at the same time.

The rotation motor 70 transmits the driving force to the external gear 62 through a plurality of gears 71, 72, 73, 74, and 75. The plurality of gears 71, 72, 73, 74 and 75 preferably have different numbers of teeth to reduce the rotational speed (R.P.M) of the spinning motor 70. Although FIG. 5 shows that the five gears 71, 72, 73, 74, and 75 are in meshing engagement, a plurality of different combinations of gears can be replaced to achieve the desired reduction ratio.

Now, the operation of the apparatus 100 in accordance with a preferred embodiment of the present invention will be described. This procedure also refers to the method of operation of the polishing plate. Meanwhile, in the present operation method, the glass substrate G (see FIG. 1) is positioned on the upper surface of a lower plate 2 by using the carrier 4 (see FIG. 1), and is provided between the polishing plate 8 and the glass substrate G. The polishing liquid and the like are all known in the art and will not be described in detail herein.

First, if the rotation motor 70 is operated, the driving force of the rotation motor 70 is transmitted to the external gear 62 through the plurality of gears 71, 72, 73, 74, and 75, The ring gear 60 rotates correspondingly. If the ring gear 60 rotates, the shaft gear 51 meshed with the internal gear 61 rotates, and thus the spindle 50 also rotates. As shown in Fig. 5, if the ring gear 60 rotates in the counterclockwise direction (the direction of the arrow is counterclockwise as viewed from above), the main shaft 50 also rotates in the counterclockwise direction (arrow direction).

Meanwhile, if the revolving motor 21 is operated, the driving force of the revolving motor 70 is transmitted to the outer ring gear 26 through the plurality of gears 22, 23, and 24, and thus the cylindrical member 20 also rotates.

If the cylindrical member 20 is rotated, the main shaft 50 will revolve around the center of the cylindrical member 20 and draw a circle having a radius eccentricity d. At this time, in order to obtain the desired reduction ratio, the gears 22, 23, and 24 can be replaced to change the reduction ratio.

As shown in Fig. 3, if the cylindrical member 20 is rotated in a clockwise direction (the direction of the arrow is clockwise as viewed from above), the spindle 50 is also "revolved" in a clockwise direction (as viewed from above).

Since the main shaft 51 remains engaged with the internal gear 61 when the revolving is performed, the rotation continues to be performed during the revolution.

As described above, according to the apparatus 100 of the present invention, since the revolving motor 21 and the rotation motor 70 are simultaneously operated, the polishing plate 8 can be rotated and revolved at the same time, so that the polishing rate can be improved. For example, the apparatus 100 of the present invention can increase the polishing rate of the glass substrate G by more than 0.3 micrometers per minute (μm/min).

Meanwhile, even though it has been explained that the revolving motor 21 and the rotation motor 70 are simultaneously operated so that the main shaft 50 (i.e., the polishing plate 8) can be rotated and revolved at the same time, in the apparatus 100 according to the present invention, the polishing plate 8 can also be used only by the revolving motor 21 When the self-rotating motor 70 is turned off, it is rotated and revolved at the same time. Even rotation The motor 70 is closed, and when the main shaft 50 revolves, the main shaft 50 can be rotated since the shaft gear 51 and the internal gear 61 remain engaged.

Further, it is also possible to close the revolving motor 21 by operating only the rotation motor 70 so that the polishing plate 8 rotates only. This is apparent to those of ordinary skill in the art and is therefore not described in detail herein.

20‧‧‧Cylindrical components

21‧‧‧ revolution motor

22‧‧‧ Gears

23‧‧‧ Gears

24‧‧‧ Gears

25‧‧‧ hollow area

26‧‧‧Outer ring gear

30‧‧‧Frame

50‧‧‧ spindle

51‧‧‧ shaft gear

60‧‧‧ ring gear

61‧‧‧Internal gear

62‧‧‧External gear

70‧‧‧Rotary motor

71‧‧‧ Gears

72‧‧‧ Gears

73‧‧‧ Gears

74‧‧‧ Gears

75‧‧‧ Gears

100‧‧‧Device for polishing plate rotation and revolution

G‧‧‧glass substrate

D‧‧‧eccentricity

2‧‧‧lower board

3‧‧‧Hose

4‧‧‧ Carrier

6‧‧‧ polishing pad

7‧‧‧ Spindle

8‧‧‧high board

8a‧‧‧ slot

10‧‧‧ polishing device

G‧‧‧glass substrate

27‧‧‧ bearing

BRIEF DESCRIPTION OF THE DRAWINGS Other objects and aspects of the present invention will become more apparent from the following description of the embodiments of the present invention. FIG. 1 is a side view of a conventional glass substrate polishing apparatus. FIG. 2 is a preferred embodiment of the present invention. 3 is a perspective view of the apparatus for rotating and revolving the polishing plate; FIG. 3 is a perspective view of the revolving unit of FIG. 2; FIG. 4 is a cross-sectional view of the cylindrical member and the main shaft of FIG. 2; It is a perspective view of the rotation unit in Fig. 2.

21‧‧‧ revolution motor

30‧‧‧Frame

50‧‧‧ spindle

70‧‧‧Rotary motor

100‧‧‧Device for polishing plate rotation and revolution

Claims (8)

A device for rotating and revolving a polishing plate, comprising: a cylindrical member (20) having a hollow region formed along a length direction and an outer ring gear (26) formed on an outer circumferential surface; a spindle (50), disposed along the length direction in the hollow region and supported by the cylindrical member (20) to rotate at an eccentricity of a central axis of the cylindrical member, and a shaft gear (51) is disposed on the main shaft (50) The outer edge, the main shaft (50) is connected with a polishing plate; and a ring gear (60) having an inner gear (61) formed on the inner circumferential surface thereof and an outer gear (62) formed on the outer circumferential surface thereof The internal gear (61) is provided to be meshed with the shaft gear (51), wherein when a driving force is transmitted to the cylindrical member (20), the cylindrical member (20) is rotated, the main shaft ( 50) revolving in the hollow region in an eccentric manner, and generating a revolution in the case where the shaft gear (51) is engaged with the internal gear (61). The apparatus for rotating and revolving a polishing plate according to claim 1, wherein a ring gear (60) is rotated when a driving force is transmitted to the external gear (62), and The shaft gear (51) is rotated. The apparatus for rotating and revolving a polishing plate according to claim 2, wherein the ring gear (60) is rotated by using a driving force from an output of a rotation motor, and the cylindrical member (20) Rotate by using the driving force from the output of one revolution motor. A device for rotating and revolving a polishing plate according to item 3 of the patent application, wherein a plurality of gears (71), (72), (73), (74) and (75) The gear is disposed between the ring gear (60) and the rotation motor to allow transmission of the driving force of the rotation motor, and the gear reduction ratio is adjustable. The apparatus for rotating and revolving a polishing plate according to claim 3, wherein a plurality of gears (22), (23) and (24) are disposed on the outer ring gear (26) and the revolving motor In order to allow the transmission of the driving force of the revolution motor, the gear reduction ratio is adjustable. A polishing plate operation method using a device for polishing and revolving a polishing plate, wherein the polishing plate for polishing a glass substrate is rotated and revolved by forcing a main shaft (50) connected to the polishing plate. At the same time, rotate and revolve. A polishing plate operation method using a device for rotating and revolving a polishing plate according to claim 6, wherein the device comprises: a cylindrical member (20) having a hollow region formed along a length direction and Forming an outer ring gear (26) on the outer circumferential surface; a main shaft (50) disposed along the length direction in the hollow region and supported by the cylindrical member (20) on the central axis of the cylindrical member The eccentricity rotates, and a shaft gear (51) is disposed at an outer edge of the main shaft (50), the main shaft (50) is coupled with a polishing plate, and a ring gear (60) having an internal gear (61) formed at an inner circumference thereof An outer gear (62) is formed on an outer circumferential surface thereof, and the inner gear (61) is provided to be meshed with the shaft gear (51), wherein the cylindrical member (20) is rotated by a driving force The main shaft (50) revolves in the hollow region in an eccentric manner, and generates a revolution when the shaft gear (51) is engaged with the internal gear (61). Wherein, in the case where a driving force is transmitted to the external gear (62), the ring gear (60) is rotated and the shaft gear (51) is rotated. The method for operating a polishing plate using a device for rotating and revolving a polishing plate according to claim 7, wherein the driving force of the rotation is transmitted from a rotation motor, and the driving force of the revolution is transmitted from a one-turn motor, and wherein a plurality of gears (71), (72), (73), (74), and (75) are disposed between the ring gear (60) and the rotation motor to allow the rotation The transmission of the motor driving force makes the gear reduction ratio adjustable, and a plurality of gears (22), (23) and (24) are disposed between the outer ring gear (26) and the revolving motor to allow the The revolution of the motor drive force is transmitted, and the gear reduction ratio is adjustable.