JP2001179600A - Dresser - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dresser capable of dressing an entire polishing surface of a surface plate uniformly and evenly. SOLUTION: This dresser 1 comprises a substrate 2 and six rotors 3. The substrate 2 has an outline matching to a carrier of a double polishing device, and a gear part 20 engageable with a sun gear and an internal gear. Six holes 21 are drilled in the substrate 2. The rotors 3 are rotatably engaged with the holes 21. Each rotor 3 is formed with a shaft part 30 and a pair of disk parts 31, 32, the disk parts 31, 32 are mounted to both ends of the shaft part 30, and pellets 4 for dressing the surface plate are adhered to the surfaces of the pair of disk parts 31, 32.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dresser for dressing a surface plate of a polishing apparatus.

[0002]

2. Description of the Related Art Generally, as shown in FIG. 17, a double-side polishing apparatus for polishing uses a work holding hole of a carrier 120 mounted on a lower platen 110 while being engaged with a sun gear 100 and an internal gear 101. The work W is accommodated in the lower surface plate 121 by rotating the sun gear 100, the internal gear 101, the carrier 120 and the upper surface plate 130 while pressing the work W with the upper surface plate 130. Both surfaces of the work W held by the carrier 120 are polished by the lower surface plate 110 and the upper surface plate 130 while revolving. If the polishing pad 140 stuck on the surface of the lower surface plate 110 or the upper surface plate 130 is unevenly worn due to a long polishing operation, the polishing pad 14 is fixed with a predetermined dresser.
A dressing operation for flattening the surface of the polishing pad 140 by, for example, shaving the surface of the polishing pad 140 is performed. FIG. 18 is a plan view showing an example of a conventional dresser, and FIG.
It is sectional drawing of the dresser shown in FIG. As shown in FIGS. 18 and 19, the dresser 200 has a gear portion 21 on its outer peripheral surface.
A pellet 220, which is a dressing member for a surface plate, is fixed to substantially the entirety of one surface of the base 210 having the substrate 1. When the lower platen 110 and the upper platen 130 are simultaneously dressed using such a dresser 200, all the carriers 120 are removed from the double-side polishing device, and the dresser 200 is mounted on the double-side polishing device instead of the carrier 120. I do. Specifically, as shown in FIG. 20, the dresser 200-1 with the pellet 220 turned downward.
The dresser 200-2 with the pellet 220 facing upward is placed on the lower platen 110 in a state where the dresser 200-2 meshes with the sun gear 100 and the internal gear 101, respectively. Then, these dressers 200-1 and 200-2 are moved by the upper platen 130.
By rotating the sun gear 100, the internal gear 101, the lower platen 110, and the upper platen 130 while pressing 00-2, the dressers 200-1 and 200-2 revolve around themselves, similarly to the carrier 120. Thus, the polishing pad 140 of the lower platen 110 is dressed by the pellet 220 of the dresser 200-1 and the upper platen 130
Polishing pad 140 is the pellet 2 of the dresser 200-2.
20 for dressing.

[0003]

However, the conventional dresser 200 has the following problems. Pellet 2
Since 20 is fixed to the dressers 200-1 and 200-2, dress unevenness occurs. That is, as shown in FIG. 21, the dress trajectory of each pellet 220 with respect to the polishing pad 140 draws a cycloid curve S having a constant period, and the dress direction is limited to the direction of the cycloid curve S and is always constant. Therefore, the entire polishing pad 140 cannot be dressed uniformly and uniformly. A technique similar to the dresser shown in FIG.
There are techniques described in Japanese Patent Publication No. 3 and Japanese Patent Publication No. Hei 9-9142, but these techniques do not solve the above problem.

The present invention has been made to solve the above-mentioned problem, and has as its object to provide a dresser capable of uniformly and uniformly dressing the entire polished surface of a surface plate.

[0005]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, a first aspect of the present invention provides a rotatable lower stool, a sun gear rotatable at the center of the lower stool, and a concentric outside of the sun gear. A rotatable internal gear arranged in a shape,
A plurality of carriers arranged around the center of the sun gear in a state of being meshed with the sun gear and the internal gear, and an upper surface plate rotatable while holding a work held by these carriers together with a lower surface plate. In a dresser capable of dressing the lower surface plate and the upper surface plate of a double-side polishing machine,
A base having an outer shape substantially coinciding with the carrier, the gear of which can mesh with the sun gear and the internal gear; a shaft rotatably fitted in one or more holes formed in the base; and a shaft. A rotating body attached to both ends of the rotating body and having a pair of plates having a diameter larger than the hole diameter, and a dressing member for a platen provided on a surface of at least one of the pair of plates of the rotating body. . With this configuration, the dresser is placed on the lower platen, and the gear portion of the base is meshed with the sun gear and the internal gear,
When the sun gear and the internal gear are rotated, the dresser revolves around the sun gear while rotating. And
When these platens are rotated while the dresser is sandwiched between the lower platen and the upper platen, the rotating body that makes a pair of plate portions contact these platens is rotated by the rotation of the platen. Rotate around the part. As a result, the pair of plate portions provided with the dressing members for the platen revolve around the base while rotating, and revolve around the sun gear integrally with the base, so that they are in contact with these plate portions. The polished surface of the surface plate is dressed uniformly and evenly by the dressing member for the surface plate.

[0006] In particular, the invention of claim 2 is the dresser of claim 1, wherein the dressing members for the platen are provided on the surfaces of both plate portions of the rotating body. According to a third aspect of the present invention, in the dresser of the first or second aspect, one of the plate portions of the rotating body is detachably attached to an end of the shaft portion.

According to a fourth aspect of the present invention, in the dresser according to any one of the first to third aspects, a gear housing hole communicating with one or more holes is provided in a central portion of the base, and the gear housing hole is provided. One gear is freely rotatably fitted in the hole, a gear portion is formed on the shaft portion of the rotating body, and this gear portion is meshed with one gear in the gear storage hole. With this configuration, the one gear loosely fitted into the gear storage hole at the center of the base rotates at a speed lower than the rotation speed of the base or is in a non-rotation state. The rotating body rotates at a speed corresponding to the rotation speed of the base. Further, a fifth aspect of the present invention is the dresser according to the fourth aspect, wherein a driving unit for rotating one gear is provided. With this configuration, the rotation speed of one gear can be freely controlled by the drive unit.

The dressing member for the surface plate may be any material that can polish the polished surface of the surface plate, and any material can be used as the dressing member for the surface plate.
Therefore, as a good example, the invention of claim 6 is based on claim 1
In the dresser according to any one of claims 4 to 4,
The dressing member for the platen was configured to be any of pellets, flocking, or a scraper.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1 is a perspective view showing a dresser according to a first embodiment of the present invention, partially cut away, and FIG.
3 is a sectional view taken along the line AA in FIG. 1, and FIG. 3 is a plan view. As shown in these figures, the dresser 1 is an instrument for dressing a lower platen and an upper platen, which will be described later, and is composed of a base 2 and six rotating bodies 3.

The base 2 has an outer shape conforming to a carrier to be described later, and has a gear portion 20 on an outer peripheral portion that can mesh with a sun gear and an internal gear. The base 2 is provided with six holes 21 penetrating in the thickness direction of the base 2 in a point-symmetric state.

The rotating body 3 is rotatably fitted in a hole 21 of the base 2. FIG. 4 is an exploded perspective view of the rotating body 3. As shown in FIG. 4, each rotating body 3 has one shaft 30
And a pair of disk portions 31 and 32 having a larger diameter than the hole 21. Specifically, the disk part 31 is fixed to the upper end of the shaft part 30. On the other hand, the disc portion 32 has a hole 32a at the center thereof, and a female screw portion 32b is formed on the inner periphery of the hole 32a.
Is engraved. Thereby, the female screw part 32b of the disk part 32 is connected to the male screw part 30b formed at the lower end of the shaft part 30.
, The disk 32 can be removably attached to the lower end of the shaft 30 to assemble the rotating body 3. Pellets 4, which are dressing members for the surface plate, are fixed to the surfaces of the pair of disk portions 31, 32.

Here, a method of assembling the dresser 1 will be described. FIG. 5 is a sectional view showing a method of assembling the dresser 1. As shown in FIG. 5, the shaft 30 of the rotating body 3 is inserted downward into the hole 21 of the base 2. Then, the male screw portion 30 b of the shaft portion 30 projects from the lower surface of the base 2. The dresser 1 can be assembled by screwing the female screw portion 32b of the disk portion 32 into the male screw portion 30b.

Next, the operation of the dresser 1 when the dresser 1 of this embodiment is used in a double-side polishing apparatus will be described. FIG. 6 is a sectional view showing the double-side polishing apparatus 1. The double-side polishing apparatus shown in FIG. 6 is a well-known double-side polishing apparatus for polishing both surfaces of the work W using a lower platen 110 and an upper platen 130. Lower surface plate 110 is rotating shaft 1
The lower surface plate 110 has a sun gear 100 fixed to an upper end portion of a rotating shaft 111 thereof. The internal gear 101 concentrically arranged with the lower surface plate 110 and the sun gear 100.
Are rotatably supported. In addition, these lower platen 11
The gears 102, 112, and 103 are provided below the gears 0, the sun gear 100, and the internal gear 101, and are driven by the motors 118a, 118b, and 118c, thereby meshing with the gears 102, 112, and 103. 1
The sun gear 100, the lower stool 110, and the internal gear 101 can be independently rotated via the intermediary gear 17. A polishing pad 140a (polishing surface) is attached to the surface of the lower surface plate 110. On the other hand, the upper stool 130 is suspended just above the lower stool 110, and descends to clamp the work W together with the lower stool 110. The polishing pad 140b (polishing surface) is also attached to the surface of the upper platen 130. Thus, the upper platen 130 and the lower platen 110 are rotated in opposite directions to each other, and at least one of the sun gear 100 and the internal gear 101 is driven to rotate, so that the carrier 120 revolves around the sun gear 100 and the carrier 120 revolves. The held work W can be polished on both sides.

As shown in FIG. 7, the dresser 1 is set in such a double-side polishing apparatus as shown in FIG.
The carrier 100 and the internal gear 10 (see FIG. 1)
1 and the polishing pad 1 of the lower platen 110.
This can be performed by placing the device on the 40a. Then, as shown by a two-dot chain line in FIG. 6, the upper platen 130 is lowered, and the motors 118 a, 118 b, and 118 b are sandwiched by the ten dressers 1 between the upper platen 130 and the lower platen 110.
When the motor 118c is driven, the motors 118a, 118b, 1
18c is transmitted to the sun gear 10 via the gear mechanism 117.
0, lower surface plate 110, internal gear 101, upper surface plate 1
The sun gear 100, the lower platen 110, the internal gear 101, and the upper platen 130 rotate, and the dresser 1 revolves around the sun gear 100. As a result, each rotating body 3 attached to the base 2 of the dresser 1 revolves around the center of the dresser 1, and the entire six rotating bodies 3 revolve around the carrier 100 integrally with the dresser 1. However, in the dresser 1 of this embodiment, each rotating body 3 further rotates in the hole 21 of the base 2. This is understood to be due to the rotational force of the lower stool 110 and the upper stool 130. That is, the disk portion 31 of the rotating body 3 is
Since it is in contact with the 30 polishing pads 140b, it is affected by the peripheral speed of the upper platen 130 as shown in FIG. The peripheral speed of the upper stool 130 increases as it approaches the outer periphery of the upper stool 130. For this reason, the polishing pad 140 of the upper surface plate 130 is provided at the right peripheral portion of the disc portion 31 at a large peripheral speed V1.
b comes into contact, and a small peripheral velocity V
2, the polishing pad 140b comes into contact. As a result, the disk portion 31 receives a rotational force corresponding to the difference V1-V2 between the peripheral speeds V1 and V2 from the upper surface plate 130,
The disk portion 31 tries to rotate in the direction of arrow B. On the other hand, the disk portion 32 tends to rotate in the direction of arrow C opposite to the arrow B by receiving the rotational force of the lower surface plate 110 rotating in the opposite direction to the upper surface plate 130. As a result, the rotating body 3 rotates by the difference between the rotational force in the direction of arrow B and the rotational force in the direction of arrow C. Therefore, the six rotating bodies 3 correspond to FIG.
As shown in (5), it moves along the cycloid curve S while rotating. As a result, the pellets 4 fixed to the disk portions 31 and 32 dress the polishing pads 140a and 140b of the lower surface plate 110 and the upper surface plate 130 not only in the direction of the cycloid curve S but also in the rotation direction of the rotating body 3. Therefore, the polishing pads 140a and 140b are uniformly and uniformly dressed.

(Second Embodiment) FIG. 10 is a sectional view showing a dresser according to a second embodiment of the present invention. The dresser of this embodiment differs from the dresser of the first embodiment in that six rotating bodies 3 are rotated by the action of one gear 22 provided at the center of the base 2. Specifically, a center hole 23 penetrating in the thickness direction is formed in the center of the base 2, and 6
A gear storage hole 24 communicating with the two holes 21 is formed. The shaft portion 25 of the gear 22 is rotatably inserted into the center hole 23, and the gear 22 is housed in the gear housing hole 24. That is, the gear 22 is freely rotatably fitted into the gear storage hole 24. In addition, each rotating body 3
A gear portion 33 is also formed on the shaft portion 30 of the
Are meshed with the gear 22.

With this configuration, the dresser is used for the carrier 1
When rotating around 00, the six rotating bodies 3 revolve around the center of the base 2, but the gear 22 rotates at a speed lower than the revolving speed of the rotating body 3 or enters a non-rotating state. For this reason,
The revolving rotating body 3 is rotated at high speed by receiving the resistance due to the meshing force between the gear portion 33 and the gear 22. The other configuration, operation, and effect are the same as those of the first embodiment, and the description thereof is omitted.

(Third Embodiment) FIG. 11 is a sectional view showing a dresser according to a third embodiment of the present invention. The dresser of this embodiment differs from the second embodiment in that it has a drive unit for driving and rotating the gear 22. Specifically, a small motor 26 as a driving unit is fixed to the base 2, and a rotation shaft 27 of the small motor 26 is used as a shaft of the gear 22. Thus, by driving the small motor 26, the gear 22 rotates, and the six rotating bodies 3 in which the gear portion 33 meshes with the gear 22 rotate within the hole 21. As described above, according to the present embodiment, the rotation speed of the rotating body 3 can be freely controlled by the small motor 26, so that optimal dressing according to the conditions of the polishing pads 140a and 140b, which are the polishing surfaces, can be performed. It is possible and very convenient.

The present invention is not limited to the above embodiment, and various modifications and changes can be made within the scope of the invention. For example, in the above embodiment,
Pellets 4 are attached to both the pair of disk portions 31 and 32 of the rotating body 3.
However, it is also possible to adopt a structure in which the pellets 4 are fixed to only one of the disk portions 31 and 32. Specifically, as shown in FIG. 12, the disk portion 31 of the rotating body 3 ′ is fitted into the concave portion 2 a formed in the base 2, and the surface of the disk portion 31 and the surface of the base 2 are flush with each other. Pellets 4 only on plate 32
Is fixed. Thus, the disk portion 31 is not affected by the rotational force of the upper platen 130, and only the disk portion 32 is
The rotating body 3 'of this dresser
It rotates faster than the rotator 3 shown in the first embodiment. Further, as shown in FIG. 13, the dresser can be held by the head 300 from the side where the disk portion 31 is present, so that by rotating the head 300 and the lower platen 301, The board 301 can also be dressed. In the above embodiment, the six rotating bodies 3 are rotatably attached to the base 2.
Is not limited to six. In addition, the shape and size of all the disk portions 31 and 32 of the six rotating bodies 3 are set to be the same. For example, as shown in FIG. FIG. 15
As shown in (2), the rotating body 3 having the large-diameter disk portions 31 and 32 may be eccentrically attached to the base 2. Further, as shown in FIGS. 16A and 16B, a large rotating body 3-1 and a small rotating body 3-2 may be mixed. In the above embodiment, the pellets 4 are used as the dressing member for the platen. However, it is a matter of course that flocking or a scraper may be used instead of the pellets 4.

[0019]

As described above in detail, according to the dresser of the present invention, it is possible to uniformly and evenly dress the polished surfaces of the upper and lower platens, so that a dresser having high dressing performance can be provided. There is an excellent effect that it can be done. In particular, according to the dresser of the fourth aspect, the rotating body rotates at a high speed corresponding to the rotation speed of the base, so that the dressing efficiency can be improved. According to the dresser of the invention of claim 5,
Since the rotation speed of the rotating body can be freely controlled by the driving unit, it is possible to perform optimal dressing according to the conditions of the polishing surface, which is very convenient.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a dresser according to a first embodiment of the present invention, partially cut away.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a plan view of the dresser shown in FIG. 1;

FIG. 4 is an exploded perspective view of a rotating body.

FIG. 5 is a cross-sectional view showing a method of assembling a rotating body to a base.

FIG. 6 is a sectional view showing a double-side polishing apparatus.

FIG. 7 is a schematic plan view showing a method of setting a dresser on a double-side polishing apparatus.

FIG. 8 is a plan view for explaining that a rotating body rotates.

FIG. 9 is a plan view showing a dressing state of the dresser.

FIG. 10 is a sectional view showing a dresser according to a second embodiment of the present invention.

FIG. 11 is a sectional view showing a dresser according to a third embodiment of the present invention.

FIG. 12 is a sectional view showing a first modification of the dresser.

FIG. 13 is a sectional view showing an example in which the dresser of FIG. 12 is applied to a single-side polishing apparatus.

FIG. 14 is a plan view showing a second modification of the dresser.

FIG. 15 is a plan view showing a third modification of the dresser.

FIG. 16 is a plan view showing another modification of the dresser. FIG. 16A shows an example in which one large rotating body and one small rotating body are attached to a base, and FIG. ) Shows an example in which one large rotating body and two small rotating bodies are attached to a base.

FIG. 17 is a cross-sectional view showing a general polishing double-side polishing apparatus.

FIG. 18 is a plan view showing an example of a conventional dresser.

FIG. 19 is a sectional view of the dresser shown in FIG. 18;

FIG. 20 is a plan view showing a set state of a conventional dresser.

FIG. 21 is a plan view showing a dressing state of a conventional dresser.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Lesser, 2 ... Substrate, 3 ... Rotating body, 4 ... Pellet, 20 ... Gear part, 21 ... Hole, 30 ... Shaft part, 30
b: male screw part, 31, 32: disk part, 32a: hole,
32b ... female screw part, 100 ... sun gear, 101 ...
Internal gear, 110: Lower surface plate, 130: Upper surface plate, 140a, 140b: Polishing pad.

Claims (6)

[Claims] 1. A rotatable lower surface plate, a sun gear rotatable at the center of the lower surface plate, a rotatable internal gear concentrically arranged outside the sun gear, and the sun gear and the internal gear. The above-mentioned double-side polishing apparatus comprising a plurality of carriers arranged around the center of the sun gear in a meshed state, and an upper platen rotatable while holding the work held by these carriers together with the lower platen. A dresser capable of dressing the lower platen and the upper platen, having an outer shape substantially coinciding with the carrier, and having a gear portion capable of meshing with the sun gear and the internal gear, and a dresser formed on the base. A rotating body having a shaft portion rotatably fitted in the hole and a pair of plate portions attached to both ends of the shaft portion and having a diameter larger than the hole diameter; A dressing member for a surface plate provided on a surface of at least one of the pair of plate portions. 2. The dresser according to claim 1, wherein the dressing member for the platen is provided on a surface of both plate portions of the rotating body. 3. The dresser according to claim 1, wherein one plate of the rotating body is detachably attached to an end of the shaft. 4. The dresser according to claim 1, further comprising: a gear receiving hole communicating with the one or more holes in a central portion of the base, wherein one gear is provided in the gear receiving hole. And a gear portion is formed on a shaft portion of the rotating body, and the gear portion and one gear in the gear housing hole are meshed with each other. 5. The dresser according to claim 4, further comprising a drive unit for rotating said one gear. 6. The dresser according to claim 1, wherein the dressing member for a platen is any one of a pellet, a flocking, and a scraper.