JPS60155357A - Surface machining device - Google Patents

Abstract

PURPOSE:To enable a bottom surface plate to be uniformly brought into slide contact with a work and an intermediate correcting surface place, by rocking in the radial direction at least the bottom surface plate of the upper and the bottom surface plates which grind the work held to a carrier engaged with a sun gear and an internal gear. CONSTITUTION:A work 31, when it is machined, is held to a carrier 32 engaged with an internal gear 7 and a sun gear 8, and if driving shafts 2-5 are rotated, the carrier 32 while revolving on its own axis is rotated around the sun gear, grinding upper and bottom surfaces of the work 31 by a bottom surface plate unit 9 and an upper surface plate 10. Here a bottom surface plate 13 is rotated while performing a rocking motion in the radial direction by the peripheral motion of an eccentric shaft 16 because in the unit 9 a rocking gear 15 is driven in its revolving direction on its own axis by the internal gear 7 simultaneously the bottom surface plate 13 is forced to be driven in the rotary direction by a supporting bed 19. Accordingly, the carrier 32, whose rotation on its own axis and around the sun gear results in a rocking motion of the work 31, causes the work 31 to be uniformly brought into slide contact with a grinding surface of the bottom surface plate 13 while a difference of relative speed to increase between both the work and the plate, similarly rocking also a correcting surface plate 41 to be slided with the upper and the bottom surface plates.

Description

[Detailed description of the invention] The present invention relates to a plane processing device.

As a surface processing device such as a lapping machine or a honing machine, the workpiece is equipped with a sun gear, an internal gear, and an upper and lower surface plate that are driven and rotated by a drive source, and is held on a carrier that rotates and revolves while meshing with both of the gears. It is conventionally known that the process is performed using a surface plate below 1.

In this type of flat surface machining equipment, it is important to have the workpiece come into even sliding contact with the machining surface of the surface plate in order to prevent uneven wear on the surface plate and improve machining accuracy. Since the surface plate simply rotates around its center, the range of sliding contact with the workpiece is limited, which not only tends to cause uneven wear on the surface plate and reduce machining accuracy, but also causes uneven wear. The drawback was that the surface plate had to be adjusted frequently.

The present invention aims to improve machining accuracy by configuring a workpiece so that it can be brought into even sliding contact with the machining surface of a surface plate, thereby preventing uneven wear of the surface plate.

In addition, in order to shorten workpiece machining time and increase production capacity, it is necessary to increase the relative speed difference between the surface plate and the workpiece, but if the driving speed of the carrier, that is, the workpiece, is increased,
As a result, not only is the machining accuracy significantly reduced, but
Carrier wear and damage to the workpiece is likely to occur. This tendency is particularly noticeable when processing extremely thin workpieces that require high precision, such as silicon wafers.

Another object of the present invention is to increase the relative speed difference between the surface plate and the workpiece without increasing the driving speed of the workpiece.

Furthermore, the modification of the "-" surface plate Φ can be easily and accurately performed by using the modification mid-foot m (see Japanese Utility Model Publication No. 58-4!11720) that was previously proposed by the present inventors. However, in order to shorten the correction time and perform more efficient corrections, it is necessary to evenly rub the surface plate and the intermediate surface plate for correction with a large relative speed difference.

Another object of the present invention is to enable the surface plate to be evenly rubbed against the intermediate surface plate for repair at a high speed, thereby increasing the repair efficiency.

] In order to achieve the object 1, the flat processing device of the present invention has the following features:
The present invention is characterized in that at least the lower surface plate is configured to be swingable in the radial direction.

Embodiments of the present invention will be described in detail below with reference to the drawings.

In FIG. 1, reference numeral 1 denotes the fuselage body, and numerals 2 to 5 denote first to fourth drive shafts supported by the fuselage body l via bearings 6 so as to be rotatable concentrically and independently, respectively. An internal gear 7 is attached to the drive shaft 2 on a support portion 2a provided at its upper end, and a sun gear 8 located at the center of the internal gear 7 is attached to the third drive shaft 4. and fourth drive shaft 3
and 5 have a lower surface plate unit 9 and a shoe foot 7+o, respectively.
He said a few words.

As is clear from FIGS. 2 and 3, the lower surface plate unit 8 has a lower surface plate 13 whose second surface is a grinding surface +3a, and four hollow portions are formed at both ends of the lower surface plate 13 in the diametrical direction. 14.
14, and a rocking gear 15.1 is provided in the recesses 14, 14.
5, and these gears 15 and the lower surface plate 13 are rotatably connected by an eccentric shaft 16 via a bearing 17. The lower surface plate unit 8 is meshed with a floating gear 18 which is freely rotatably mounted on the drive shaft 4 of the second drive shaft 3, and in this state, the lower surface plate unit 8 is fixed on the second drive shaft 3. It is listed on. A protruding shaft 20 is provided on the lower surface of the lower surface plate 13 at a position concentric with the eccentric shaft 16, and the protruding shaft 20 is fitted into a recessed hole 21 cut in the upper surface of the support base 18.
The lower surface plate unit 9 is forcibly driven in the circumferential direction by the second drive shaft 3 due to the engagement between these recessed holes 21 and the protruding shaft 20. The recessed hole 21 has a protruding shaft 20
It is necessary to form it in a size that allows for swinging.

Furthermore, the surface plate 10 is rotatable by the fourth drive shaft 5 and movable by the fourth drive shaft 5, and these are connected as follows. That is, the mounting member 25 that swings in the axial direction by the rotation of the cam 24 is attached to the fourth drive shaft 5 via the eccentric cam 24, and is fixed to the mounting member 25 and the top of the fourth drive shaft 5. Connecting member 26 and pin 2
The mounting member 25 and the upper surface plate 10 are locked to each other by a key 28, and when the pin 27 is installed in the state shown in the figure, the 4th The drive shaft 5 and the holding member 25, that is, the upper surface plate l
The upper surface plate lO rotates eccentrically. When the pin 27 is removed, the upper surface plate 10 becomes free with respect to the fourth drive shaft 5, and only performs a swinging motion in the radial direction by the cam 24 without rotating.

- The first to fourth drive shafts 2 to 5 are connected to a drive source (not shown) such as a motor via a gear mechanism, a clutch mechanism, a speed reduction mechanism, etc., respectively.

When processing a workpiece 31 using the plane processing apparatus having the above configuration, as shown in FIG.
is held by a carrier 32, and the carrier 32 is meshed with the internal gear 7 and the sun gear 8. In this state, each drive shaft 2
5 is rotated, the carrier 32 revolves around the sun gear 8 while rotating, and the upper and lower surfaces of the workpiece 31 are processed by the lower foot unit 8 and the upper surface plate 10.

At this time, in the lower surface plate unit 8, the internal gear 7 and the floating gear. The rocking gear 15 meshing with the lower surface plate 1 is driven in the rotation direction by the ten internal gear gear 7, and at the same time, the lower surface plate 1
3 is forcibly driven in the rotational direction by the support base 18 via the protruding shaft 20, the lower surface plate 13 undergoes a radial rocking motion due to the circumferential movement of the eccentric shaft 16 with the eccentricity #X1 as the radius. It will rotate while doing this. Therefore, together with the swinging of the workpiece 31 accompanying the rotation and revolution of the carrier 32, the workpiece 31 comes into even sliding contact with the machining surface 13a of the upper surface plate 13, and moreover, the lower surface plate is prevented from swinging. Compared to the conventional one which only rotates without movement, the relative speed difference between the foot plate 13 and the workpiece 31 becomes larger.

On the other hand, the upper surface plate 10 performs the above-mentioned eccentric rotational motion and rocking motion in a non-rotating state by attaching and detaching the pin 27, but is configured to perform the same rotational rocking motion as the lower surface plate 13. Alternatively, it may be configured to perform only normal rotation like the conventional one.

The correction of the two-legged upper surface plate 10 and the lower surface plate 13 can be performed using a correction intermediate surface plate 4o as shown in FIGS. 4 to 6. This intermediate surface plate 4o has a correction surface 41a on both upper and lower surfaces.
, 41a is provided, and the correction surface plate 41 is provided with the correction surface plate 41 having the correction surface l! A
Four parts 42 are formed at both ends in the diametrical direction on both the upper and lower surfaces of 41, and a swinging gear 43 is disposed in each recess 42, and the gear 43 and the correction surface plate 41 are connected to an eccentric shaft 44.
is rotatably connected via a bearing 45, at least one of the swinging gears 43 is meshed with the internal gear 7 and the sun gear 8, and the two correction surfaces 41a, 41
Place a in contact with the upper and lower surface plates 10.13.

When the plane processing device is driven in this state, the swing gear 43
rotates and revolves around its axis, so the correction surface plate 41 of the intermediate surface plate 40 rotates and swings in its radial direction, similar to the case of the lower surface plate unit 9, and the correction surfaces 41a, 41a and the upper and lower positions @10. 13 is performed. After rubbing for a certain period of time, the medium surface plate 40 is turned over by 1".
Perform the same adjustment. This makes it possible to mechanically and mechanically correct the surface plate by alternately rubbing the three surfaces together.

In this case, the lower surface plate 13, the constant plate 10 and the correction surface plate 41
The eccentricity L, X2, L is X7 < L <
It is desirable to set the relationship of Xl.

As described above, according to the present invention, since the lower surface plate is configured to be able to swing in the radial direction, the lower surface plate can be brought into even sliding contact with the workpiece and the intermediate surface plate for correction, and moreover, The difference in sliding contact speed can be increased.

[Brief explanation of the drawing]

FIG. 1 is a vertical cross-sectional view of an embodiment of the flat processing apparatus of the present invention, and FIGS. 2 and 3 are longitudinal cross-sectional views of main parts for explaining the configuration of the lower surface plate unit. side view and plan view,
FIG. 4 is a longitudinal cross-sectional view of the flat surface machining apparatus of the present invention in a state where the surface plate is being corrected, FIG. 5 is a partial view thereof, and FIG. 6 is a partially cutaway plan view of the intermediate surface plate for correction. 7. Internal gear, 8. Sun gear, 8. Lower surface plate unit, 10. Upper surface plate, 13. Lower surface plate, 31. Work. 32.8 carriers. Patent applicant: Nagaoka Seiki Co., Ltd. 1 Figure S;,; 2! j'＜1 Figure 4

Claims (1)

[Claims] 1. A sun gear, an internal gear, and an upper surface plate that are rotatable by a drive source, and a workpiece held by a carrier meshing with both gears is ground by the upper and lower surface plates, at least A flat processing device characterized in that a lower surface plate is configured to be capable of swinging in a radial direction.