JP2003071687A - Surface grinding method and surface grinding machine - Google Patents

Surface grinding method and surface grinding machine

Info

Publication number
JP2003071687A
JP2003071687A JP2001257821A JP2001257821A JP2003071687A JP 2003071687 A JP2003071687 A JP 2003071687A JP 2001257821 A JP2001257821 A JP 2001257821A JP 2001257821 A JP2001257821 A JP 2001257821A JP 2003071687 A JP2003071687 A JP 2003071687A
Authority
JP
Japan
Prior art keywords
workpiece
grinding
grindstone
rotary
planetary mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001257821A
Other languages
Japanese (ja)
Inventor
Kazuharu Komata
和春 小俣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daisho Seiki Corp
Original Assignee
Daisho Seiki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daisho Seiki Corp filed Critical Daisho Seiki Corp
Priority to JP2001257821A priority Critical patent/JP2003071687A/en
Publication of JP2003071687A publication Critical patent/JP2003071687A/en
Pending legal-status Critical Current

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  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a surface grinding method and a surface grinding machine utilizing a planetary mechanism for improving grinding precision and rigidity and simplifying construction. SOLUTION: The grinding method comprises fixing a grinding spindle center O1 of a rotary grinding wheel 5 and rotating a workpiece W as well as revolving it around the grinding spindle center O1 . Preferably, the workpiece W is revolved so that a revolution track C1 of a rotation spindle center O2 is within the grinding rage of the rotary grinding wheel 5. The surface grinding machine comprises a rotary grinding spindle 1 having the fixed grinding spindle center O1 and the workpiece driving planetary mechanism for holding the workpiece W rotatable and revolvable around the grinding spindle center O1 . The planetary mechanism has a revolution radius E set so that the revolution track C1 of the rotation spindle center O2 of the workpiece W is within the grinding rage of the rotary grinding wheel 5.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本願発明は加工物の平面を回
転砥石により研削する平面研削方法及び平面研削盤に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface grinding method and a surface grinding machine for grinding a flat surface of a workpiece with a rotary grindstone.

【0002】[0002]

【従来の技術】回転砥石を用いた平面研削方法及び平面
研削盤において、研削面全体の均一な研削を図るため、
いわゆるプラネタリー研削方式を採用した平面研削方法
及び平面研削盤がある。
2. Description of the Related Art In a surface grinding method and a surface grinder using a rotary grindstone, in order to uniformly grind the entire grinding surface,
There are a surface grinding method and a surface grinder that employ a so-called planetary grinding method.

【0003】従来のこの種プラネタリー研削方式は、加
工物を定位置に固定し、回転砥石を砥石軸芯回りに自転
させながら加工物周囲を公転させることにより、加工物
の平面を研削する方式となっている。
The conventional planetary grinding system of this type grinds a flat surface of a workpiece by fixing the workpiece at a fixed position and revolving the periphery of the workpiece while rotating a rotating grindstone around the axis of the grindstone. Has become.

【0004】[0004]

【発明が解決しようとする課題】従来のように、プラネ
タリー機構を回転砥石の駆動に利用し、回転砥石を自転
させると共に加工物の周りを公転させることにより平面
研削を行なう方式では、次のような課題をある。
As in the conventional method, the planetary mechanism is used to drive the rotary grindstone, and the rotary grindstone is rotated and revolves around the workpiece. There are such challenges.

【0005】(1)砥石軸を自転及び公転可能に支持す
るプラネタリー機構は、コラム等に片持支持せざるを得
ないが、このような片持ち支持構造は、砥石軸の剛性低
下及び振動発生の原因になる。
(1) The planetary mechanism for supporting the grindstone shaft so that it can rotate and revolve has to be supported by a column or the like in a cantilever manner. However, such a cantilevered support structure reduces the rigidity of the grindstone shaft and causes vibration. It causes the occurrence.

【0006】(2)砥石軸を自転及び公転可能に支持す
るプラネタリー機構は構造が複雑化するため、砥石軸内
から研削面に流す冷却液の配管構造も複雑化する。
(2) Since the planetary mechanism for supporting the grindstone shaft so as to be able to rotate and revolve has a complicated structure, the piping structure of the cooling liquid flowing from the grindstone shaft to the grinding surface is also complicated.

【0007】(3)砥石軸を自転及び公転可能に支持す
るプラネタリー機構は構造が複雑なため、砥石軸の寸法
が制限され、この点でも砥石軸の剛性低下の原因にな
る。
(3) Since the planetary mechanism for supporting the grindstone shaft so as to be able to rotate and revolve has a complicated structure, the size of the grindstone shaft is limited, and this also causes a decrease in the rigidity of the grindstone shaft.

【0008】[0008]

【課題を解決するための手段】本願発明は上記課題を解
決するものであり、請求項1記載の平面研削方法は、加
工物を、プラネタリー機構により自転させると共に砥石
軸芯回りに公転させることにより、加工物の研削面を平
面研削することを特徴としている。
SUMMARY OF THE INVENTION The present invention is to solve the above-mentioned problems, and a surface grinding method according to claim 1 is to rotate a workpiece by a planetary mechanism and revolve it around a wheel axis. Is characterized in that the ground surface of the workpiece is surface-ground.

【0009】請求項2記載の発明は、請求項1記載の平
面研削方法において、加工物を、自転軸芯の公転軌跡が
回転砥石の研削範囲内に納まるように公転させることを
特徴としている。
According to a second aspect of the present invention, in the surface grinding method according to the first aspect, the workpiece is revolved so that the revolution locus of the rotation axis falls within the grinding range of the rotary grindstone.

【0010】請求項3記載の平面研削盤は、砥石軸芯位
置が固定された砥石軸と、加工物を自転可能かつ砥石軸
芯回り公転可能に保持する加工物駆動用のプラネタリー
機構を備えたことを特徴としている。
A surface grinder according to a third aspect of the present invention includes a grindstone shaft having a fixed grindstone shaft center position, and a planetary mechanism for driving the workpiece so that the workpiece can be rotated and revolved around the grindstone axis. It is characterized by that.

【0011】請求項4記載の発明は、請求項3記載の平
面研削盤において、プラネタリー機構は、加工物の自転
軸芯の公転軌跡が回転砥石の研削範囲内に納まるように
公転半径を設定してあることを特徴としている。
According to a fourth aspect of the present invention, in the surface grinding machine according to the third aspect, the planetary mechanism sets the revolution radius such that the revolution locus of the rotation axis of the workpiece falls within the grinding range of the rotary grindstone. It is characterized by being done.

【0012】[0012]

【発明の実施の形態】[回転砥石]図1は本願発明が適
用される立軸型平面研削盤を一部断面で示す正面図であ
り、砥石軸1は垂直姿勢に配置されると共に昇降操作可
能にコラム(図示せず)に支持されている。砥石軸1の
回転軸芯O1位置は固定されており、図示しない駆動機
構により回転軸芯O1回りに回転(X1)するようになっ
ている。砥石軸1の下端には砥石ホルダー2が設けら
れ、該砥石ホルダー2の下面に円筒状の回転砥石5が着
脱自在に固定されている。砥石軸1内には下端が開口す
る冷却液通路6が形成されており、該冷却液通路6は図
示しない冷却液供給源に接続し、研削面30に冷却液を
供給できるようになっている。
BEST MODE FOR CARRYING OUT THE INVENTION [Rotating Grinding Wheel] FIG. 1 is a front view showing a vertical cross-section surface grinding machine to which the present invention is applied in a partial cross section. The grinding wheel shaft 1 is arranged in a vertical posture and can be moved up and down. Is supported by a column (not shown). The position of the rotary shaft core O1 of the grindstone shaft 1 is fixed, and is rotated (X1) around the rotary shaft core O1 by a drive mechanism (not shown). A grindstone holder 2 is provided at the lower end of the grindstone shaft 1, and a cylindrical rotary grindstone 5 is detachably fixed to the lower surface of the grindstone holder 2. A cooling liquid passage 6 having an open lower end is formed in the grindstone shaft 1, and the cooling liquid passage 6 is connected to a cooling liquid supply source (not shown) so that the cooling liquid can be supplied to the grinding surface 30. .

【0013】[加工物駆動用のプラネタリー機構]回転
砥石5の下方にはプラネタリー用のハウジング10が配
置されており、該ハウジング10は静止部材であって床
面等に固定されている。該ハウジング10の上壁に形成
されたドラム支持用ボス部10aには、加工物公転用の
回転ドラム11が砥石軸芯O1と同一軸芯回りに回転可
能に支持されている。回転ドラム11の下端部には従動
プーリ12が固着され、該従動プーリ12はハウジング
10の外壁面に設けられた加工物公転用の駆動モータ1
4の駆動プーリ15にベルト16を介して連動連結して
いる。回転ドラム11の上端にはカバー18が固着され
ている。
[Planetary Mechanism for Driving a Workpiece] A planetary housing 10 is disposed below the rotary grindstone 5, and the housing 10 is a stationary member and is fixed to the floor or the like. On the drum supporting boss 10a formed on the upper wall of the housing 10, a rotary drum 11 for revolving the workpiece is rotatably supported about the same axis as the grindstone axis O1. A driven pulley 12 is fixed to the lower end portion of the rotating drum 11, and the driven pulley 12 is provided on the outer wall surface of the housing 10 and is a drive motor 1 for revolving a workpiece.
4 is connected to the drive pulley 15 via a belt 16. A cover 18 is fixed to the upper end of the rotary drum 11.

【0014】回転ドラム11内には、砥石軸芯(回転ド
ラム軸芯)O1から偏芯した位置に、砥石軸芯O1と平行
な自転軸芯O2を有する加工物自転用の回転軸20が回
転可能に支持されている。加工物自転用の回転軸20の
上端には、加工物治具21を介して加工物Wが着脱可能
に固定され、上記回転軸20の下端には伝動ギヤ23が
固着されている。該伝動ギヤ23は、回転ドラム11の
下方に配置された加工物自転用の駆動モータ24の駆動
ギヤ25に噛み合っている。上記加工物自転用の駆動モ
ータ24は、砥石軸芯(回転ドラム軸芯)O1と同一軸
芯に配置されると共に、取付台26等に固定されてい
る。
Inside the rotary drum 11, a rotary shaft 20 for rotating a workpiece rotates, having a rotary shaft center O2 parallel to the grindstone shaft center O1 at a position eccentric from the grindstone shaft center (rotating drum shaft center) O1. Supported as possible. The workpiece W is detachably fixed to the upper end of the rotary shaft 20 for rotating the workpiece via a workpiece jig 21, and the transmission gear 23 is fixed to the lower end of the rotary shaft 20. The transmission gear 23 meshes with a drive gear 25 of a drive motor 24 for rotating the workpiece, which is arranged below the rotary drum 11. The drive motor 24 for rotating the workpiece is arranged on the same axis as the grindstone axis (rotary drum axis) O1, and is fixed to the mount 26 and the like.

【0015】図2は回転砥石5及びプラネタリー機構の
平面図であり、加工物自転用の回転軸20の偏芯量(公
転半径)Eは、少なくとも円筒状回転砥石5の外周面5
aの半径R1より小さく設定されており、該実施の形態
では、回転砥石5の外周面5aの半径R1よりは小さ
く、かつ、回転砥石5の内周面5bの半径よりも若干大
きい程度に設定されている。符号C1で示す円周は自転
用回転軸芯O2の公転軌跡を示している。このように加
工物Wの公転半径Eを回転砥石5の外周面5aの半径R
より小さく設定することにより、加工物Wは、いずれの
公転位置(たとえば公転位置A1,A2,A3,A4等)にお
いても、自転軸芯O2回りの自転により加工物Wの研削
面(上面)全体が研削され得るようになっている。
FIG. 2 is a plan view of the rotary grindstone 5 and the planetary mechanism. The eccentricity (revolution radius) E of the rotary shaft 20 for rotating the workpiece is at least the outer peripheral surface 5 of the cylindrical rotary grindstone 5.
It is set to be smaller than the radius R1 of a, and in this embodiment, is set to be smaller than the radius R1 of the outer peripheral surface 5a of the rotary grindstone 5 and slightly larger than the radius of the inner peripheral surface 5b of the rotary grindstone 5. Has been done. The circumference indicated by reference numeral C1 indicates the orbit of the rotation axis O2 for rotation. In this way, the revolution radius E of the workpiece W is set to the radius R of the outer peripheral surface 5a of the rotary grindstone 5.
By setting the workpiece W to be smaller, at any revolution position (for example, revolution position A1, A2, A3, A4, etc.), the entire ground surface (upper surface) of the workpiece W is rotated by the rotation around the rotation axis O2. Can be ground.

【0016】[0016]

【作用】(1)図1において、加工物装着時は、回転砥
石5を回転砥石軸1と共に上昇させておき、加工物自転
用の回転軸20の上端に、加工物治具21を介して加工
物Wを固定する。
(1) In FIG. 1, when the workpiece is mounted, the rotary grindstone 5 is raised together with the rotary grindstone shaft 1, and the workpiece jig 21 is provided on the upper end of the rotary shaft 20 for rotating the workpiece. The workpiece W is fixed.

【0017】(2)加工物自転用の駆動モータ24を駆
動することにより、駆動ギヤ25及び伝動ギヤ23を介
して加工物自転用の回転軸20を自転軸芯O2回りに回
転させ、それにより加工物Wを自転軸芯O2回りに自転
(X2)させる。
(2) By rotating the workpiece rotation drive motor 24, the workpiece rotation shaft 20 is rotated about the rotation axis O2 through the drive gear 25 and the transmission gear 23. The workpiece W is rotated (X2) around the rotation axis O2.

【0018】(3)回転砥石5を回転させながら下降さ
せ、所定の研削代により加工物Wの上端研削面30を研
削すると共に、加工物公転用の駆動モータ14を駆動
し、回転ドラム11を砥石軸芯O1回りに回転すること
により、加工物Wを砥石軸芯O1回りに公転させる。研
削中は、砥石軸1の冷却液通路6から研削面30に向け
て冷却液を供給し、研削面30を冷却する。
(3) The rotating grindstone 5 is lowered while rotating to grind the upper end ground surface 30 of the workpiece W with a predetermined grinding allowance, and the driving motor 14 for revolving the workpiece is driven to rotate the rotary drum 11. The workpiece W is revolved around the grindstone axis O1 by rotating around the grindstone axis O1. During the grinding, the cooling liquid is supplied from the cooling liquid passage 6 of the grindstone shaft 1 toward the grinding surface 30 to cool the grinding surface 30.

【0019】このように、加工物Wを自転軸芯O2回り
に自転させると共に砥石軸芯O1回りに回転砥石周囲を
公転させ、研削面30を平面研削する。
In this way, the workpiece W is rotated about the axis of rotation O2 and the periphery of the rotary grindstone is revolved around the axis O1 of the grindstone to grind the ground surface 30.

【0020】自転用の駆動モータ24を回転ドラム11
の回転軸芯O1と同一軸芯上に配置し、取付台26等の
静止部材に固定しているので、回転ドラム11の回転中
でも何等支障なく自転用の回転軸20に自転用動力を伝
達することができ、しかも、回転ドラム11に駆動モー
タを取り付ける場合に比べると、該駆動モータ24の配
線等が簡単になる。
The drive motor 24 for rotating the rotary drum 11
Since it is arranged on the same axis as the rotation axis O1 and is fixed to a stationary member such as the mounting base 26, the rotation power is transmitted to the rotation shaft 20 for rotation without any trouble even when the rotating drum 11 is rotating. In addition, the wiring of the drive motor 24 and the like are simpler than when the drive motor is attached to the rotary drum 11.

【0021】[0021]

【発明の効果】以上説明したように本願発明によると、
回転砥石5の砥石軸芯O1位置を固定し、加工物をプラ
ネタリー機構により、自転させると共に砥石軸芯O1回
りに砥石周囲を公転させることにより、加工物を平面研
削するようにしているので、次のような利点がある。
As described above, according to the present invention,
Since the grindstone axis O1 position of the rotary grindstone 5 is fixed, the workpiece is rotated by the planetary mechanism and the periphery of the grindstone is revolved around the grindstone axis O1, so that the workpiece is surface-ground. It has the following advantages.

【0022】(1)回転砥石5の砥石軸芯O1位置を固
定式としているので、砥石軸1の径寸法等の限定が殆ど
なくなり、砥石軸1の剛性向上が簡単に行なえる。
(1) Since the position of the grindstone shaft core O1 of the rotary grindstone 5 is fixed, there is almost no limitation on the diameter dimension of the grindstone shaft 1 and the rigidity of the grindstone shaft 1 can be easily improved.

【0023】(2)プラネタリー機構を、加工物の自転
及び公転のために用いるので、プラネタリー機構を重心
の低い位置で両持ち支持することにより、支持剛性が向
上し、研削中の振動等の発生を抑えることができ、加工
精度が向上する。
(2) Since the planetary mechanism is used for rotating and revolving the workpiece, supporting the planetary mechanism on both sides at a position with a low center of gravity improves the support rigidity, vibration during grinding, etc. Can be suppressed and the processing accuracy is improved.

【0024】(3)回転砥石5の砥石軸芯O1位置を固
定式としているので、砥石軸1の昇降機構を簡素化する
ことができると共に強度を向上させることができる。
(3) Since the position of the grindstone shaft core O1 of the rotary grindstone 5 is fixed, the lifting mechanism of the grindstone shaft 1 can be simplified and the strength can be improved.

【0025】(4)回転砥石5の砥石軸芯O1位置を固
定式としているので、研削面30に供給する冷却液通路
6の配管構造が簡素化できる。
(4) Since the position of the grindstone axis O1 of the rotary grindstone 5 is fixed, the piping structure of the cooling liquid passage 6 supplied to the grinding surface 30 can be simplified.

【0026】(5)プラネタリー機構を、加工物の自転
及び公転のために用いるので、プラネタリー機構を重心
の低い位置で両持ち支持することにより、従来のように
コラムに保持されて回転砥石を自転及び公転可能に支持
するものに比べて、寸法限定が緩和され、剛性向上が可
能となる。
(5) Since the planetary mechanism is used for rotating and revolving the workpiece, the planetary mechanism is supported on both sides at a position where the center of gravity is low, so that the planetary mechanism is held on the column as in the conventional case and the rotating grindstone is used. As compared with the one that supports and is capable of rotating and revolving, the dimensional limitation is relaxed, and the rigidity can be improved.

【0027】(6)加工物を、自転軸芯O1の公転軌跡
C1が回転砥石5の研削範囲内に納まるように公転させ
ることにより、研削面全体における研削精度が一層均一
化される。
(6) By revolving the workpiece so that the revolution locus C1 of the rotation axis O1 falls within the grinding range of the rotary grindstone 5, the grinding accuracy on the entire grinding surface is made more uniform.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本願発明が適用される平面研削盤を、一部断
面にして示す正面図である。
FIG. 1 is a front view showing a partial cross section of a surface grinder to which the present invention is applied.

【図2】 回転砥石及びプラネタリー機構の平面図であ
る。
FIG. 2 is a plan view of a rotary grindstone and a planetary mechanism.

【符号の説明】[Explanation of symbols]

1 砥石軸 5 回転砥石 10 プラネタリー機構のハウジング 11 加工物公転用の回転ドラム 12、15 加工物公転用のプーリ 14 加工物公転用の駆動モータ 20 加工物自転用の回転軸 24 加工物自転用の駆動モータ 1 wheel axis 5 rotating whetstone 10 Housing of planetary mechanism 11 Rotating drum for revolving workpieces 12, 15 Pulley for workpiece revolution 14 Drive motor for work revolution 20 Rotating shaft for rotation of workpiece 24 Drive motor for workpiece rotation

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 回転砥石の砥石軸芯位置を固定し、 加工物を、プラネタリー機構により自転させると共に砥
石軸芯回りに公転させることにより、加工物の研削面を
平面研削することを特徴とする平面研削方法。
1. A grinding surface of a workpiece is surface-ground by fixing the position of the spindle axis of a rotary grindstone, rotating the workpiece by a planetary mechanism and revolving around the spindle axis of the workpiece. Surface grinding method.
【請求項2】 加工物を、自転軸芯の公転軌跡が回転砥
石の研削範囲内に納まるように公転させることを特徴と
する請求項1記載の平面研削方法。
2. The surface grinding method according to claim 1, wherein the workpiece is revolved so that the revolving locus of the rotating shaft core falls within the grinding range of the rotary grindstone.
【請求項3】 砥石軸芯位置が固定された砥石軸と、 加工物を自転可能かつ砥石軸芯回り公転可能に保持する
加工物駆動用のプラネタリー機構を備えたことを特徴と
する平面研削盤。
3. A surface grinding machine comprising: a grindstone shaft having a fixed grindstone shaft center position; and a workpiece driving planetary mechanism for holding the workpiece so as to be rotatable and revolvable around the grindstone shaft center. Board.
【請求項4】 プラネタリー機構は、加工物の自転軸芯
の公転軌跡が回転砥石の研削範囲内に納まるように公転
半径を設定してあることを特徴とする請求項3記載の平
面研削盤。
4. The surface grinding machine according to claim 3, wherein the planetary mechanism has a revolution radius set such that the revolution trajectory of the rotation axis of the workpiece falls within the grinding range of the rotary grindstone. .
JP2001257821A 2001-08-28 2001-08-28 Surface grinding method and surface grinding machine Pending JP2003071687A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001257821A JP2003071687A (en) 2001-08-28 2001-08-28 Surface grinding method and surface grinding machine

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006026751A (en) * 2004-07-12 2006-02-02 Koyo Seiko Co Ltd Grinder
JP2006142437A (en) * 2004-11-19 2006-06-08 Amada Co Ltd Nozzle cleaning device
JP2014027006A (en) * 2012-07-24 2014-02-06 Disco Abrasive Syst Ltd Processing method of wafer
CN104149022A (en) * 2014-08-06 2014-11-19 江苏远业液压机械有限公司 Ball grinder
CN108326684A (en) * 2018-04-12 2018-07-27 青岛瑞顺通工贸有限公司 A kind of sponge column continuous grinding machine

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006026751A (en) * 2004-07-12 2006-02-02 Koyo Seiko Co Ltd Grinder
JP4572608B2 (en) * 2004-07-12 2010-11-04 株式会社ジェイテクト Grinding equipment
JP2006142437A (en) * 2004-11-19 2006-06-08 Amada Co Ltd Nozzle cleaning device
JP2014027006A (en) * 2012-07-24 2014-02-06 Disco Abrasive Syst Ltd Processing method of wafer
CN104149022A (en) * 2014-08-06 2014-11-19 江苏远业液压机械有限公司 Ball grinder
CN104149022B (en) * 2014-08-06 2017-01-18 江苏远业液压机械有限公司 Ball grinder
CN108326684A (en) * 2018-04-12 2018-07-27 青岛瑞顺通工贸有限公司 A kind of sponge column continuous grinding machine

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