JP6545311B1 - Polishing machine - Google Patents

Abstract

A polishing apparatus performs polishing of a workpiece in a short time. SOLUTION: A polishing apparatus 1 holds a peripheral edge of an optical element W (workpiece), and holds it by a holder 10 which rotates around an optical axis (central axis) A1 direction of the optical element W as a rotation center The first main spindle 20 on which the first grindstone 21 for polishing the first surface of the optical element W mounted is mounted, and the optical element W held by the holder 10 on the opposite side to the first surface And a second main spindle 30 on which a second grinding stone 31 for polishing the second surface is mounted. [Selected figure] Figure 1

Description

  The present invention relates to a polishing apparatus for polishing both sides of a workpiece.

  Heretofore, an optical element such as a lens made of a material such as glass has been polished by a grindstone after processing such as grinding has been performed. When polishing is performed, the optical element is held by the holder on one side (see, for example, Patent Document 1).

Unexamined-Japanese-Patent No. 2010-153440

  By the way, when the optical element is held by the holder at the first surface, the polishing of the first surface is performed to polish the first surface after the polishing of the second surface opposite to the first surface is finished. After changing the orientation of the optical element, it will be held again by the holder.

  As described above, the processing time required for polishing has been lengthened by the operation of changing the direction of the optical element.

  An object of the present invention is to provide a polishing apparatus capable of polishing a workpiece in a short time.

In one aspect, the polishing apparatus holds a peripheral edge of a workpiece, and rotates the holder about the central axis direction of the workpiece, and a first surface of the workpiece held by the holder. A first spindle on which is mounted a first grinding wheel for grinding a second grinding wheel for grinding a second surface of the workpiece held by the holder on the opposite side to the first surface A second main shaft on which the wheel is mounted, a driving roller for rotating the holder, a driven roller for rotating by contacting the holder, the workpiece, the first grinding wheel, and the second grinding wheel The holder is provided with two coolant covers disposed opposite to each other, the holder being in contact with the drive roller and the driven roller and having a ring shape, and the ring shape being fixed with respect to the rotation ring Tea And a pressing portion fixed to the chuck in a state in which the peripheral edge of the workpiece is sandwiched between the chuck and the chuck, and the rotary ring includes the drive roller and the driven roller. The chuck and the pressing portion are longer in the central axis direction of the workpiece, and one of the two coolant covers is provided with an opening for avoiding interference with the first main shaft. The other of the two coolant covers is provided with an opening for avoiding interference with the second main shaft.

  According to the above aspect, the workpiece can be polished in a short time.

It is a top view showing the polish device concerning one embodiment. It is an enlarged plan view showing a holder etc. in one embodiment. It is a left side view showing an example of arrangement of a drive roller and a driven roller in one embodiment.

A polishing apparatus according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a plan view showing the polishing apparatus 1.

FIG. 2 is an enlarged plan view showing the holder 10 and the like.
FIG. 3 is a left side view showing an arrangement example of the drive roller 61 and the driven roller 71. As shown in FIG.

  In addition, although the X direction, the Y direction, and the Z direction shown in FIG. 1, FIG. 2 and FIG. 3 are only directions for convenience of explanation, for example, the X direction and the Y direction are horizontal directions, and the Z direction is Vertical direction.

  As shown in FIG. 1, the polishing apparatus 1 includes a holder 10, a first spindle 20, a second spindle 30, a first XY stage 40, a second XY stage 50, and a holder driving unit 60. , A driven portion 70, a coolant receiving portion 80, and coolant covers 91 and 92, and the optical element W such as a lens is polished. The material of the optical element W is, for example, glass. The optical element W is an example of a workpiece, and the workpiece may be made of a material other than glass. Further, although the optical element W is shown in a biconvex shape in FIGS. 1 and 2, it may be an optical element W having a meniscus shape or another shape. The optical element W may have an aspheric shape or a spherical shape.

  As shown in FIG. 2, the holder 10 includes a rotating ring 11, a chuck 12, a fixing screw 13, a pressing portion 14, and a fixing screw 15.

  The rotating ring 11 has a ring shape (cylindrical shape), and is fixed to a chuck 12 described later at a portion projecting inward along the entire circumferential direction. Further, around the rotation ring 11, a convex portion 11a contacting the drive roller 61 and the driven roller 71, which will be described later, protrudes outward over the entire circumferential direction. The convex portion 11 a is narrowed as the width in the X direction approaches the tip.

  The rotating ring 11 is longer in the X direction than any of the driving roller 61 and the driven roller 71, and the chuck 12 and the pressing portion 14 described later. Therefore, scattering of the coolant on the drive roller 61 and the driven roller 71 can be suppressed.

  The chuck 12 has a ring shape and is fixed to the rotating ring 11 by a plurality of fixing screws 13.

  The pressing portion 14 has a ring shape, and is fixed to the chuck 12 by the fixing screw 15 in a state in which the peripheral edge Wa protruding in the radial direction from the optical element W is sandwiched between the pressing portion 14 and the chuck 12. In order to further fix the fixing of the optical element W, the optical element W and the holder 10 may be fixed by an adhesive, and the adhesive may be melted after the polishing of the optical element W.

  The holder 10 rotates about the optical axis (central axis of the workpiece) A1 direction (X direction) of the optical element W shown in FIG. 1 as the rotation ring 11 contacts and rotates the drive roller 61. Do.

  As shown in FIG. 1, the first spindle 20 has a first grindstone 21, a coupling 22, a grindstone rotating motor 23, and a mounting member 24.

  The first grindstone 21 is detachably attached to the first spindle 20, and used to polish the first surface (left side surface in FIG. 1) of the optical element W.

  The coupling 22 couples the rotation shaft of the first grinding wheel 21 and the output shaft of the grinding wheel rotating motor 23.

The grinding wheel rotating motor 23 is a motor for rotating the first grinding wheel 21.
The first main axis 20 (the rotation center A2 of the first grindstone 21) is inclined at an angle θ in the horizontal plane with respect to the direction of the optical axis A1 of the optical element W. The first main spindle 20 may be disposed parallel to the direction of the optical axis A1, but by inclining the angle θ, the diameter of the first grindstone 21 can be increased, and the first grindstone 21 can be The holder 10 can be approached.

  The angle θ of the first main shaft 20 and the angle θ of the second main shaft 30 are, for example, 30 °. However, the angle θ of the first main spindle 20 and the angle θ of the second main spindle 30 may be different from each other.

  The mounting member 24 is arranged to mount the first main spindle 20 on a Y table 43 of a first XY stage 40 described later.

  The second spindle 30 has a second grindstone 31, a coupling 32, a grindstone rotating motor 33, and a mounting member 34.

  The second grindstone 31 is detachably attached to the second main spindle 30, and is used to polish the second surface (right side surface in FIG. 1) opposite to the first surface of the optical element W. Used.

  The coupling 32 couples the rotation shaft of the first grinding wheel 31 and the output shaft of the grinding wheel rotating motor 33.

The grinding wheel rotating motor 33 is a motor for rotating the second grinding wheel 31.
The second main axis 30 (the rotation center A3 of the second grindstone 31) is inclined at an angle θ in the horizontal plane with respect to the direction of the optical axis A1 of the optical element W. The second main axis 30 may be disposed parallel to the direction of the optical axis A1, but by inclining the angle θ, the diameter of the second grindstone 31 can be increased, and the second grindstone 31 can be The holder 10 can be approached.

  The mounting member 34 is arranged to mount the second main spindle 30 on the Y table 53 of the second XY stage 50 described later.

  As described above, since the holder 10 holds the peripheral edge Wa of the optical element W, the first main axis 20 and the second main axis 30 simultaneously polish the first surface and the second surface of the optical element W. can do.

  The first XY stage 40 has an X-table 41, an X-axis drive motor 42, a Y-table 43, and a Y-axis drive motor 44.

The X-table 41 is moved in the X direction by the drive of the X-axis drive motor 42.
The Y table 43 and the Y axis drive motor 44 move in the X direction by being disposed on the X table 41. In addition, the Y table 43 moves in the Y direction by the drive of the Y axis drive motor 44.

  That is, the Y table 43 moves in the X direction and the Y direction. As described above, since the first spindle 20 is attached to the Y table 43 by the attachment member 24, the first spindle 20 is movable in the X direction and the Y direction.

  The second XY stage 50 has an X-table 51, an X-axis drive motor 52, a Y-table 53, and a Y-axis drive motor 54.

The X table 51 is moved in the X direction by the drive of the X axis drive motor 52.
The Y table 53 and the Y axis drive motor 54 move in the X direction by being arranged on the X table 51. Further, the Y table 53 is moved in the Y direction by the drive of the Y axis drive motor 54.

  That is, the Y table 53 moves in the X direction and the Y direction. As described above, since the second spindle 30 is attached to the Y table 53 by the mounting member 34, the second spindle 30 is movable in the X direction and the Y direction.

  As shown in FIG. 2, the holder drive unit 60 includes a drive roller 61, a drive shaft 62, a coupling 63, and a holder drive motor 64.

  The driving roller 61 is a roller made of, for example, rubber or urethane, and rotates the holder 10 by rotating while being in contact with the convex portion 11 a of the rotating ring 11.

The drive shaft 62 is a drive shaft that transmits power for rotating the drive roller 61.
The coupling 63 couples the drive shaft 62 and the output shaft of the holder drive motor 64.

The driven unit 70 includes a driven roller 71 and a driven shaft 72.
As described above, the driven roller 71 is provided with the recessed portion 71a in contact with the convex portion 11a of the rotating ring 11 along the entire circumferential direction. The recess 71 a is narrowed as the width in the X direction (rotation center) approaches the bottom.

  The driven roller 71 rotates by coming into contact with the convex portion 11 a of the rotary ring 11 which is rotated by the drive of the drive roller 61 (the holder drive unit 60).

  The driven shaft 72 rotatably supports the driven roller 71 via a bearing. Therefore, the driven shaft 72 does not rotate.

  Although it is an example, as shown in FIG. 3, the driven roller 71 (following part 70) is arrange | positioned at equal intervals mutually in the circumferential direction of the rotation ring 11 (holder 10). Further, only one drive roller 61 (holder drive unit 60) is disposed in the circumferential direction of the rotary ring 11 (holder 10). The holder driving unit 60 and at least one driven unit 70 adjacent to the holder driving unit 60 rotate as shown in FIG. 3 and a position where they are retracted away from the ink jet head 11 when taking out the rotation ring 11 or the like. It may be movable to a position in contact with the ring 11.

  As shown in FIG. 1, the coolant receiver 80 is disposed below the optical element W, the first grindstone 21, and the second grindstone 31. The coolant receiver 80 receives the coolant at the time of polishing. The coolant may be drained from the coolant receiver 80 by a drainage pipe connected to the coolant receiver 80.

  The coolant covers 91 and 92 are, for example, plate-like members disposed so as to face each other with the optical element W, the first grindstone 21 and the second grindstone 31 interposed therebetween. The coolant covers 91 and 92 suppress scattering of the coolant at the time of polishing.

  The coolant cover 91 is provided with an opening for avoiding interference with the first main shaft 20, and the coolant cover 92 is provided with an opening for avoiding interference with the second main shaft 30. Good to have been.

  In the present embodiment described above, the polishing apparatus 1 includes the holder 10, the first main spindle 20, and the second main spindle 30. The holder 10 holds the peripheral edge Wa of the optical element W, which is an example of a workpiece, and rotates around the direction of the optical axis A1 of the optical element W as a rotation center. The first main spindle 20 is mounted with a first grindstone 21 for polishing the first surface of the optical element W held by the holder 10. The second spindle 30 is mounted with a second grindstone 31 for polishing a second surface of the optical element W held by the holder 10 on the opposite side to the first surface.

  As described above, since the holder 10 holds the peripheral edge Wa of the optical element W, the first surface and the first surface are not required to change the direction of the optical element W as in the case where the optical element W is held on one side. Polishing of the second surface can be performed. Therefore, according to the present embodiment, the optical element W (workpiece) can be polished in a short time.

  Further, in the present embodiment, the first main axis 20 and the second main axis 30 are inclined with respect to the direction of the optical axis A1 of the optical element W. Thereby, the optical element W can be polished at the peripheral edge of the first grindstone 21 and the second grindstone 31. Therefore, the diameters of the first grindstone 21 and the second grindstone 31 can be increased, and the first grindstone 21 and the second grindstone 31 can be made to approach the holder 10.

  Further, in the present embodiment, when the first main shaft 20 and the second main shaft 30 simultaneously polish the first surface and the second surface of the optical element W, the polishing of the optical element W can be further shortened. It can be carried out.

DESCRIPTION OF SYMBOLS 1 Polishing device 10 Holder 11 Rotational ring 11a Convex part 12 Chuck 13 Fixing screw 14 Pressing part 15 Fixing screw 20 1st spindle 21 1st grindstone 22 coupling 23 Grinding wheel motor 24 mounting member 30 2nd spindle 31 1st spindle 2 grinding wheels 32 coupling 33 grinding wheel rotating motor 34 mounting member 40 first XY stage 41 X table 42 X axis drive motor 43 Y table 44 Y axis drive motor 50 second XY stage 51 X table 52 X axis drive motor 53 Y-table 54 Y-axis drive motor 60 Holder drive part 61 Drive roller 62 Drive shaft 63 Coupling 64 Holder drive motor 70 Followed part 71 Followed roller 71a Recessed part 72 Followed shaft 80 Coolant receiving part 91, 92 Coolant cover A1 Optical axis A2 rotation Center A3 rotation Heart W optical element Wa periphery

Claims (3)

A holder that holds the periphery of a workpiece and rotates about the central axis direction of the workpiece;
A first spindle on which a first grindstone for grinding a first surface of the workpiece held by the holder is mounted;
A second main shaft on which a second grindstone for polishing a second surface opposite to the first surface of the workpiece held by the holder is mounted ;
A driving roller that rotates the holder, and a driven roller that rotates by contacting the holder;
The workpiece, the first grindstone, and two coolant covers disposed to face each other with the second grindstone interposed therebetween .
The holder is in contact with the drive roller and the driven roller and has a ring shape, and the chuck is fixed to the rotation ring and has a ring shape, and the periphery of the workpiece is between the chuck and the chuck. And a pressing portion fixed to the chuck in a state of being sandwiched between
The rotating ring is longer in the central axis direction of the workpiece than the drive roller, the driven roller, the chuck, and the pressing portion.
One of the two coolant covers is provided with an opening for avoiding interference with the first main shaft, and the other of the two coolant covers avoids interference with the second main shaft. There is an opening for the
A polishing apparatus characterized by   The polishing apparatus according to claim 1, wherein the first main spindle and the second main spindle are inclined with respect to the central axis direction of the workpiece.   The polishing apparatus according to claim 1, wherein the first main spindle and the second main spindle simultaneously polish the first surface and the second surface of the workpiece.

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