JP2019166607A - Polishing machine - Google Patents

Abstract

To provide a polishing apparatus, which can polish a work-piece in a short time.SOLUTION: A polishing apparatus 1 comprises: a holder 10 that holds a peripheral edge of an optical element W (a work-piece) and rotates with an optical shaft (a center shaft) A1 direction of the optical element W as a rotation center; a first main shaft 20 to which is attached a first grindstone 21 that polishes a first surface of the optical element W held by the holder 10; and a second main shaft 30 to which is attached a second grindstone 31 that polishes a second surface at the opposite side of the first surface, of the optical element W held by the holder 10.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a polishing apparatus for polishing both surfaces of a workpiece.

  Conventionally, an optical element such as a lens made of a material such as glass is polished by a grindstone after processing such as grinding. When polishing is performed, the optical element is held by a holder on one side (see, for example, Patent Document 1).

JP 2010-153440 A

  By the way, when the optical element is held by the holder on the first surface, the polishing of the first surface after the polishing of the second surface opposite to the first surface is completed. After changing the direction of the optical element, it is held again by the holder.

  As described above, the processing time required for polishing is increased due to the operation of changing the direction of the optical element.

  An object of the present invention is to provide a polishing apparatus capable of polishing a workpiece in a short time.

  In one aspect, the polishing apparatus holds a peripheral edge of the workpiece, rotates around the central axis direction of the workpiece, and a first surface of the workpiece held by the holder. A first main shaft on which a first grindstone for polishing a surface is mounted, and a second grindstone for polishing a second surface opposite to the first surface of the workpiece held by the holder. And a second main shaft to which is mounted.

  According to the above aspect, the workpiece can be polished in a short time.

1 is a plan view showing a polishing apparatus according to an embodiment. It is an enlarged plan view which shows the holder etc. in one Embodiment. It is a left view which shows the example of arrangement | positioning of the drive roller and driven roller in one Embodiment.

A polishing apparatus according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a plan view showing the polishing apparatus 1.

FIG. 2 is an enlarged plan view showing the holder 10 and the like.
FIG. 3 is a left side view illustrating an arrangement example of the driving roller 61 and the driven roller 71.

  The X direction, the Y direction, and the Z direction shown in FIGS. 1, 2, and 3 are only directions for convenience of explanation. For example, the X direction and the Y direction are horizontal directions, and the Z direction is Vertical direction.

  As shown in FIG. 1, the polishing apparatus 1 includes a holder 10, a first main shaft 20, a second main shaft 30, a first XY stage 40, a second XY stage 50, and a holder driving unit 60. And a follower 70, a coolant receiver 80, and coolant covers 91 and 92, and polish the optical element W such as a lens. The material of the optical element W is made of glass, for example. The optical element W is an example of a workpiece, and the workpiece may be made of a material other than glass. 1 and 2, the optical element W is shown as a biconvex shape, but it may be a meniscus or other shape of the optical element W. Further, the optical element W may have an aspherical shape, or may have a spherical shape.

  As shown in FIG. 2, the holder 10 includes a rotating ring 11, a chuck 12, a fixing screw 13, a pressing portion 14, and a fixing screw 15.

  The rotating ring 11 has a ring shape (cylindrical shape) and is fixed to a chuck 12 described later at a portion protruding inward over the entire circumference in the circumferential direction. Further, around the rotating ring 11, a convex portion 11 a that contacts a driving roller 61 and a driven roller 71 described later protrudes outward over the entire circumferential direction. The convex portion 11a becomes narrower as the width in the X direction approaches the tip.

  Note that the rotating ring 11 is longer in the X direction than any of the drive roller 61 and the driven roller 71, and the chuck 12 and the pressing portion 14 described later. Therefore, it is possible to prevent the coolant from scattering on the driving roller 61 and the driven roller 71.

  The chuck 12 has a ring shape and is fixed to the rotating ring 11 by a plurality of fixing screws 13.

  The pressing portion 14 has a ring shape and is fixed to the chuck 12 by a fixing screw 15 with a peripheral edge Wa protruding in the radial direction from the optical element W sandwiched between the pressing portion 14 and the chuck 12. In order to more firmly fix the optical element W, the optical element W and the holder 10 may be fixed with an adhesive, and the adhesive may be dissolved after the optical element W is polished.

  The holder 10 rotates around the optical axis (center axis of the workpiece) A1 direction (X direction) of the optical element W shown in FIG. 1 as the rotation ring 11 contacts the driving roller 61 and rotates. To do.

  As shown in FIG. 1, the first main shaft 20 includes a first grindstone 21, a coupling 22, a grindstone rotating motor 23, and an attachment member 24.

  The first grindstone 21 is detachably attached to the first main shaft 20 and is used to polish the first surface (left side surface in FIG. 1) of the optical element W.

  The coupling 22 connects the rotating shaft of the first grindstone 21 and the output shaft of the grindstone rotating motor 23.

The grindstone rotating motor 23 is a motor for rotating the first grindstone 21.
The first main shaft 20 (the rotation center A2 of the first grindstone 21) is inclined with respect to the optical axis A1 direction of the optical element W by an angle θ in the horizontal plane. Although the first main axis 20 may be arranged in parallel with the optical axis A1 direction, the diameter of the first grindstone 21 can be increased by tilting the angle θ, and the first grindstone 21 is The holder 10 can be approached.

  The angle θ of the first main shaft 20 and the angle θ of the second main shaft 30 are 30 ° as an example. However, the angle θ of the first main shaft 20 and the angle θ of the second main shaft 30 may be different from each other.

  The mounting member 24 is arranged to mount the first main shaft 20 on a Y table 43 of a first XY stage 40 described later.

  The second main shaft 30 includes a second grindstone 31, a coupling 32, a grindstone rotating motor 33, and an attachment member 34.

  The second grindstone 31 is detachably attached to the second main shaft 30 and polishes the second surface (the right side surface in FIG. 1) opposite to the first surface of the optical element W. Used.

  The coupling 32 connects the rotating shaft of the first grindstone 31 and the output shaft of the grindstone rotating motor 33.

The grindstone rotating motor 33 is a motor for rotating the second grindstone 31.
The second main shaft 30 (rotation center A3 of the second grindstone 31) is inclined with respect to the direction of the optical axis A1 of the optical element W by an angle θ in the horizontal plane. The second main shaft 30 may be arranged in parallel with the optical axis A1 direction. However, by tilting the angle θ, the diameter of the second grindstone 31 can be increased, and the second grindstone 31 is The holder 10 can be approached.

  The attachment member 34 is arranged to attach the second main shaft 30 onto a Y table 53 of a second XY stage 50 described later.

  As described above, since the holder 10 holds the peripheral edge Wa of the optical element W, the first main shaft 20 and the second main shaft 30 polish the first surface and the second surface of the optical element W at the same time. can do.

  The first XY stage 40 includes an X table 41, an X axis drive motor 42, a Y table 43, and a Y axis drive motor 44.

The X table 41 moves in the X direction by driving the X-axis drive motor 42.
Since the Y table 43 and the Y-axis drive motor 44 are arranged on the X table 41, they move in the X direction. Further, the Y table 43 moves in the Y direction by the drive of the Y-axis drive motor 44.

  That is, the Y table 43 moves in the X direction and the Y direction. As described above, since the first main shaft 20 is mounted on the Y table 43 by the mounting member 24, the first main shaft 20 is movable in the X direction and the Y direction.

  The second XY stage 50 includes an X table 51, an X axis drive motor 52, a Y table 53, and a Y axis drive motor 54.

The X table 51 is moved in the X direction by the drive of the X-axis drive motor 52.
Since the Y table 53 and the Y-axis drive motor 54 are arranged on the X table 51, they move in the X direction. The Y table 53 is moved in the Y direction by the drive of the Y-axis drive motor 54.

  That is, the Y table 53 moves in the X direction and the Y direction. As described above, since the second main shaft 30 is attached to the Y table 53 by the attachment member 34, the second main shaft 30 is movable in the X direction and the Y direction.

  As shown in FIG. 2, the holder driving unit 60 includes a driving roller 61, a driving shaft 62, a coupling 63, and a holder driving motor 64.

  The driving roller 61 is a roller made of rubber or urethane, for example, and rotates the holder 10 by rotating while contacting the convex portion 11 a of the rotating ring 11.

The drive shaft 62 is a drive shaft that transmits power for rotating the drive roller 61.
The coupling 63 connects the drive shaft 62 and the output shaft of the holder drive motor 64.

The driven unit 70 includes a driven roller 71 and a driven shaft 72.
As described above, the driven roller 71 is provided with the concave portion 71a that contacts the convex portion 11a of the rotating ring 11 over the entire circumference. The recess 71a becomes narrower as the width in the X direction (rotation center) approaches the bottom.

  The driven roller 71 rotates by contacting the convex portion 11a of the rotating ring 11 that rotates by driving of the driving roller 61 (holder driving unit 60).

  The driven shaft 72 rotatably supports the driven roller 71 via a bearing. Therefore, the driven shaft 72 does not rotate.

  As an example, as shown in FIG. 3, three driven rollers 71 (driven units 70) are arranged at equal intervals in the circumferential direction of the rotating ring 11 (holder 10). Further, only one drive roller 61 (holder drive unit 60) is arranged in the circumferential direction of the rotating ring 11 (holder 10). Note that the holder driving unit 60 and at least one driven unit 70 adjacent to the holder driving unit 60 are rotated as shown in FIG. It is good to be able to move to a position in contact with the ring 11.

  As illustrated in FIG. 1, the coolant receiver 80 is disposed below the optical element W, the first grindstone 21, and the second grindstone 31. The coolant receiver 80 receives the coolant during polishing. The coolant may be discharged from the coolant receiver 80 by a drain pipe connected to the coolant receiver 80.

  The coolant covers 91 and 92 are, for example, plate-like members arranged to face each other with the optical element W, the first grindstone 21, and the second grindstone 31 in between. The coolant covers 91 and 92 suppress the splashing of the coolant during polishing.

  The coolant cover 91 is provided with an opening for avoiding interference with the first main shaft 20, and the coolant cover 92 is provided with an opening for avoiding interference with the second main shaft 30. It is good to have been.

  In the present embodiment described above, the polishing apparatus 1 includes the holder 10, the first main shaft 20, and the second main shaft 30. The holder 10 holds the peripheral edge Wa of the optical element W, which is an example of a workpiece, and rotates about the optical axis A1 direction of the optical element W as a rotation center. A first grindstone 21 for polishing the first surface of the optical element W held by the holder 10 is mounted on the first main shaft 20. The second main shaft 30 is equipped with a second grindstone 31 for polishing a second surface opposite to the first surface of the optical element W held by the holder 10.

  In this way, since the holder 10 holds the peripheral edge Wa of the optical element W, the first surface and The second surface can be polished. Therefore, according to the present embodiment, it is possible to polish the optical element W (workpiece) in a short time.

  In the present embodiment, the first main shaft 20 and the second main shaft 30 are inclined with respect to the optical axis A1 direction of the optical element W. Thereby, the optical element W can be polished at the periphery of the first grindstone 21 and the second grindstone 31. Accordingly, the diameters of the first grindstone 21 and the second grindstone 31 can be increased, and the first grindstone 21 and the second grindstone 31 can be brought close to the holder 10.

  In the present embodiment, when the first main shaft 20 and the second main shaft 30 polish the first surface and the second surface of the optical element W simultaneously, the polishing of the optical element W can be performed in a shorter time. It can be carried out.

DESCRIPTION OF SYMBOLS 1 Polishing apparatus 10 Holder 11 Rotating ring 11a Protruding part 12 Chuck 13 Fixing screw 14 Holding part 15 Fixing screw 20 1st main shaft 21 1st grindstone 22 Coupling 23 Whetstone rotating motor 24 Mounting member 30 2nd main shaft 31 1st 2 grinding wheel 32 coupling 33 grinding wheel rotation motor 34 mounting member 40 first XY stage 41 X table 42 X axis drive motor 43 Y table 44 Y axis drive motor 50 second XY stage 51 X table 52 X axis drive motor 53 Y table 54 Y-axis drive motor 60 Holder drive unit 61 Drive roller 62 Drive shaft 63 Coupling 64 Holder drive motor 70 Driven portion 71 Driven roller 71a Recessed portion 72 Driven shaft 80 Coolant receiving portion 91, 92 Coolant cover A1 Optical axis A2 Rotation Center A3 rotation Heart W optical element Wa periphery

In one aspect, the polishing apparatus holds a peripheral edge of the workpiece, rotates around the central axis direction of the workpiece, and a first surface of the workpiece held by the holder. A first main shaft on which a first grindstone for polishing a surface is mounted, and a second grindstone for polishing a second surface opposite to the first surface of the workpiece held by the holder. A second main shaft on which the holder is mounted, a driving roller that rotates the holder, a driven roller that rotates by contacting the holder, the workpiece, the first grindstone, and the second grindstone. Two coolant covers disposed opposite to each other, the holder being in contact with the drive roller and the driven roller and having a ring shape, and a ring shape fixed to the rotation ring. Presenting tea And a pressing portion that is fixed to the chuck and has a ring shape with the periphery of the workpiece sandwiched between the chuck and the rotating ring includes the driving roller, the driven roller, It is longer in the central axis direction of the workpiece than the chuck and the pressing portion, and one of the two coolant covers is provided with an opening for avoiding interference with the first main shaft. The other of the two coolant covers is provided with an opening for avoiding interference with the second main shaft.

Claims (3)

A holder that holds the periphery of the workpiece and rotates around the center axis direction of the workpiece;
A first spindle on which a first grindstone for polishing a first surface of the workpiece held by the holder is mounted;
A second main shaft on which a second grindstone for polishing a second surface opposite to the first surface of the workpiece held by the holder is mounted. apparatus.   The polishing apparatus according to claim 1, wherein the first main shaft and the second main shaft are inclined with respect to the central axis direction of the workpiece.   The polishing apparatus according to claim 1, wherein the first main shaft and the second main shaft polish the first surface and the second surface of the workpiece simultaneously.

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