CN102825516A - Rotation and revolution device of polishing plate and operating method of polishing plate using same - Google Patents

Rotation and revolution device of polishing plate and operating method of polishing plate using same Download PDF

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Publication number
CN102825516A
CN102825516A CN2012102060296A CN201210206029A CN102825516A CN 102825516 A CN102825516 A CN 102825516A CN 2012102060296 A CN2012102060296 A CN 2012102060296A CN 201210206029 A CN201210206029 A CN 201210206029A CN 102825516 A CN102825516 A CN 102825516A
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CN
China
Prior art keywords
rotation
gear
revolution
polishing plate
axle
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Pending
Application number
CN2012102060296A
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Chinese (zh)
Inventor
马久镐
朴炳奎
郑昱
李大渊
宋在翊
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LG Corp
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LG Chemical Co Ltd
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Filing date
Publication date
Application filed by LG Chemical Co Ltd filed Critical LG Chemical Co Ltd
Publication of CN102825516A publication Critical patent/CN102825516A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/242Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
    • B24B7/245Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass discontinuous
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • B24B41/047Grinding heads for working on plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/10Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B24B47/12Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

A rotation and revolution device of a polishing plate can improve polishing rate of glass substrates for the polishing plate is enabled to simultaneously have rotation and revolution.

Description

The device of polishing plate rotation and revolution and use the polishing plate method of operating of this device
The cross reference of related application
The application requires to enjoy the priority of on June 16th, 2011 at the korean patent application No.10-2011-0058532 of Korea S's submission according to 35USC 119 (a), and the full content of this application mode is by reference included this paper in.
Technical field
The present invention relates to a kind of device and a kind of polishing plate method of operating of using this device that is used to make polishing plate rotation (rotation) and revolution (revolution); More specifically; Relate to a kind of device and a kind of polishing plate method of operating of using this device that is used to make polishing plate rotation and revolution, said apparatus and method can improve the polishing rate of glass substrate through allowing polishing plate rotation and revolution.
Background technology
Usually, it is highly important that to make the glass substrate that is applied to LCD keep its flatness (flatness), thereby present image exactly in certain level.Therefore, the trickle inhomogeneous or fluctuating that is present in the surface of glass substrate should be removed through glossing.
The what is called that the glossing of glass substrate can be divided into what is called that independent glass substrate is polished one by one " operating sequence control array (Oscar) " method and a series of glass substrates of the continuous polishing method of " lining up (inline) ".Glossing only also can be divided into " single-sided polishing " and " twin polishing " that two surfaces of glass substrate are all polished to a surface finish of glass substrate.
With reference to Fig. 1; It schematically shows the polished glass substrate equipment of a routine; Remain in the state on the lower panel 2 through carriage 4 at glass substrate G; Polissoir 10 is with a upper board (or polishing plate) 8---wherein polishing pad 6 is mounted to this upper board (polishing plate)---brings to said glass substrate G and contacts, and when rotating said polishing plate 8, between polishing plate 8 and glass substrate G, supplies polishing fluid simultaneously, grinds said glass substrate G thus.For this, be formed on a plurality of slit 8a in the polishing plate 8 and be installed in polishing plate 8 tops and flexible pipes 3 said polishing plate 8 isolated positions through use, polissoir 10 is by free-falling supply polishing liquid.
Polishing plate 8 rotates by the rotatory force that transmits from an axle 7.Yet,, aspect the polishing rate that improves glass substrate G, have restriction because only polishing plate 8 rotates.
Summary of the invention
The present invention is designed for the solution prior art problems, therefore an object of the present invention is to provide a kind of device that can allow polishing plate (or axle) rotation and revolution, and the polishing plate method of operating of using this device.
Another object of the present invention provides a kind of device of the polishing rate that can improve glass substrate and the polishing plate method of operating of using this device.
On the one hand, the invention provides a kind of device that is used to make polishing plate rotation and revolution, comprising: a cylinder component (20) has a hollow bulb that forms along its length and the outer peripheral edges gear (26) with the outer peripheral edges of being formed on; An axle (50); Be installed in along its length in the said hollow bulb and by said cylinder component (20) supporting with can be in the position rotation at the center of departing from said cylinder component (20); A shaft gear (51) is mounted to the outer peripheral edges of said axle (50), and said axle (50) is connected to a polishing plate; An and rim gear wheel (60); Have an internal gear (61) and an outer gear (62); Said internal gear (61) is formed on the inner peripheral of this rim gear wheel; Said outer gear (62) is formed on the outer peripheral edges of this rim gear wheel, and said internal gear (61) is installed to be with said shaft gear (51) and meshes.Make under the situation of said cylinder component (20) rotation a driving force being sent to said cylinder component (20); Said axle (50) revolves round the sun in said hollow bulb by means of eccentricity (eccentricity), and said revolution is under the state that said shaft gear (51) and said internal gear (61) mesh, to carry out.
At this moment, a driving force is being sent to said outer gear (62) so that under the situation of said rim gear wheel (60) rotation, said shaft gear (51) but rotation.
Said rim gear wheel (60) can be through using the driving force rotation that transmits from a rotation motor, and said cylinder component (20) can be through using the driving force rotation that transmits from a revolution motor.
In addition; A plurality of gears (71), (72), (73), (74) and (75) can be installed between said rim gear wheel (60) and said rotation motor; With the driving force of the said rotation motor of permission transmission, thus adjusting gear speed reducing ratio (reduction rate).
In addition, a plurality of gears (22), (23) and (24) can be installed between said outer peripheral edges gear (26) and said revolution motor, with the driving force of the said revolution motor of permission transmission, thus the adjusting gear speed reducing ratio.
Simultaneously; On the other hand; The present invention also provides the polishing plate method of operating of the device that a kind of use makes polishing plate rotation and revolution; Wherein be connected to axle (50) rotation and the revolution that is used for the polishing plate of polished glass substrate, make polishing plate rotation simultaneously and revolution through promoting (force).
The said device that uses in the said method can comprise: a cylinder component (20) has a hollow bulb that forms along its length and the outer peripheral edges gear (26) with the outer peripheral edges of being formed on; An axle (50); Be installed in along its length in the said hollow bulb and by said cylinder component (20) supporting with can be in the position rotation at the center of departing from said cylinder component (20); A shaft gear (51) is mounted to the outer peripheral edges of said axle (50), and said axle (50) is connected to said polishing plate; An and rim gear wheel (60); Have an internal gear (61) and an outer gear (62); Said internal gear (61) is formed on the inner peripheral of this rim gear wheel; Said outer gear (62) is formed on the outer peripheral edges of this rim gear wheel, and said internal gear (61) is mounted to mesh with said shaft gear (51).Along with said cylinder component (20) passes through a driving force rotation, said axle (50) revolves round the sun in said hollow bulb by means of eccentricity, and said revolution is under the state that said shaft gear (51) and said internal gear (61) mesh, to carry out.In addition, make under the situation of said rim gear wheel (60) rotation said shaft gear (51) rotation a driving force being sent to said outer gear (62).
The said driving force that is used for said rotation can be transmitted by a rotation motor; The said driving force that is used for said revolution is transmitted by a revolution motor; A plurality of gears (71), (72), (73), (74) and (75) can be installed between said rim gear wheel (60) and said rotation motor; With the driving force of the said rotation motor of permission transmission, thus the adjusting gear speed reducing ratio, and a plurality of gears (22), (23) and (24) are installed between said outer peripheral edges gear (26) and said revolution motor; With the driving force of the said revolution motor of permission transmission, thus the adjusting gear speed reducing ratio.
The polishing plate method of operating that is used to make the device of polishing plate rotation and revolution and use this device according to the present invention produces following effect.
At first, polishing plate (or, axle) rotation simultaneously and revolution.
Secondly, through allowing polishing plate (or, axle) rotation simultaneously and revolution, can improve the polishing rate of glass substrate.
Description of drawings
Other purposes of the present invention and aspect will be from becoming clear the description to embodiment, in said accompanying drawing with reference to the accompanying drawings:
Fig. 1 is the side view that the polished glass substrate equipment of a routine is shown;
Fig. 2 is the stereogram that the device that is used to make polishing plate rotation and revolution according to a preferred embodiment of the invention is shown;
Fig. 3 is the stereogram that the revolution unit of using in the device of Fig. 2 is shown;
Fig. 4 is the vertical cross-section figure that the cylinder component that uses in the device of Fig. 2 and axle are shown;
Fig. 5 is the stereogram that the rotation unit that uses in the device of Fig. 2 is shown.
< reference marker >
20: cylinder component 21: the revolution motor
22,23,24: gear 25: hollow bulb
26: outer peripheral edges gear 50: axle
51: shaft gear 60: rim gear wheel
61: internal gear 62: outer gear
70: rotation motor 71,72,73,74,75: gear
100: the device that is used to make polishing plate rotation and revolution
G: glass substrate d: eccentric distance
The specific embodiment
Hereinafter, will describe the preferred embodiments of the invention in detail with reference to accompanying drawing.Before describing; Should understand to should not be construed as with the term that uses in the claim of enclosing and be limited to common implication and dictionary meanings at specification; But should be explained based on implication and notion according to the principle that allows the suitable qualification term of the artificial best interpretations of invention corresponding to technical elements of the present invention.Therefore, the description that this paper provides just is merely the preferred exemplary of example purpose, is not intended to restriction scope of the present invention, therefore should understand under the situation that does not depart from purport of the present invention and scope, can make other to the present invention and be equal to replacement and modification.
Fig. 2 is the stereogram that the device that is used to make polishing plate rotation and revolution according to a preferred embodiment of the invention is shown.
With reference to Fig. 2, device 100 comprises the revolution unit and the rotation unit that is used to make axle 50 rotations that is used to make axle 50 revolution.
Simultaneously, axle 50 is connected to a polishing plate 8 (referring to Fig. 1) (not shown among Fig. 2).Thereby, in the present invention, if axle 50 rotation, also rotation of polishing plate 8.In addition, if axle 50 revolution, polishing plate 8 also revolves round the sun.In addition, if axle 50 rotation simultaneously and revolution, polishing plate 8 is rotation simultaneously and revolution also.Therefore, in the present invention, the rotation of polishing plate 8 has been represented in the rotation of axle 50, and the revolution of polishing plate 8 has been represented in the revolution of axle 50.
Revolution unit comprises: a cylinder component 20; A revolution motor 21 is used to provide the driving force that allows said cylinder component 20 rotations; And a plurality of gears 22,23 and 24, be used for the driving force of revolution motor 21 is sent to cylinder component 20.Said revolution unit allows to install the axle 50 that passes said cylinder component 20 and revolves round the sun based on the center of cylinder component 20.
As shown in Figure 4, cylinder component 20 comprises that the hollow bulb that forms along the length direction of this cylinder component 25, one are installed in outer peripheral edges gear 26 and the bearing 27 that is used to support said axle 50 of the outer peripheral edges of this cylinder component.Cylinder component 20 is fixed in the framework 30.
Said hollow bulb 25 is formed in the cylinder component 20 along the length direction of cylinder component 20, driving force and rotation that said outer peripheral edges gear 26 receives from revolution motor 21.
The said axle 50 that passes said hollow bulb 25 is installed in bearing 27 supportings, but 50 rotations of feasible axle.Said axle 50 is installed to be the predetermined distance d in center that departs from said cylinder component 20.Thereby, if cylinder component 20 rotation, the circle that it is eccentric distance d that a radius is drawn in axle 50 revolution simultaneously.
Revolution motor 21 is sent to outer peripheral edges gear 26 through a plurality of gears 22,23 and 24 with driving force.A plurality of gears 22,23 preferably have different number of teeth orders with 24, the feasible velocity of rotation (R.P.M.) that can reduce revolution motor 21.Fig. 3 shows three gears 22,23 and 24 and is installed to be and is meshing with each other, and can change the speed reducing ratio that the combination of gear obtains to want according to multiple mode.
The rotation unit allows the 50 center rotations based on axle 50 of said axle.As shown in Figure 5, the rotation unit comprises: an axle 50 has the shaft gear 51 that is mounted to this; A rim gear wheel 60, installation are used for and 51 engagements of said shaft gear; A rotation motor 70; And a plurality of gears 71,72,73,74 and 75, be used for the driving force of this rotation motor 70 is sent to said rim gear wheel 60.
Said axle 50 is installed in the hollow bulb 25 along the length direction of said cylinder component 20.Said axle 50 is installed in the position of the predetermined distance d in center that departs from said cylinder component 20.Said axle 50 by bearing 27 supportings with can rotation.
Shaft gear 51 is installed in the outer peripheral edges of said axle 50, and polishing plate 8 (referring to Fig. 1) (not shown among Fig. 5) is installed in the lower end of axle 50.
Rim gear wheel 60 is installed in the upside of cylinder component 20.Rim gear wheel 60 comprises an internal gear 61 and an outer gear 62, and internal gear 61 is formed on the inner peripheral of this rim gear wheel, and outer gear 62 is formed on the outer peripheral edges of this rim gear wheel.Said internal gear 61 is installed to be and shaft gear 51 engagements, and said outer gear 62 is installed to be and said gear 75 engagements.
Rim gear wheel 60 was opened rotation in 20 minutes with cylinder component.In other words, rim gear wheel 60 is through the driving force rotation of rotation motor 70, and cylinder component 20 is through the driving force rotation of revolution motor 21.
Rim gear wheel 60 has an internal diameter that allows said axle 50 rotations simultaneously and revolution (diameter that is formed by the inner peripheral of rim gear wheel 60).In other words, axle 50 is installed in a position and a revolution that departs from the center of cylinder component 20, the circle that to draw a radius simultaneously be eccentric distance d.At this moment, rim gear wheel 60 has like next internal diameter, this internal diameter keep said axle 50 when revolving round the sun as stated with internal gear 61 engagements, thereby said axle 50 can while rotation and revolution.
Rotation motor 70 is sent to outer gear 62 through a plurality of gears 71,72,73,74 and 75 with driving force.Said a plurality of gear 71,72,73,74 preferably has different number of teeth orders with 75, the feasible velocity of rotation (R.P.M.) that can reduce rotation motor 70.Although Fig. 5 shows five gears 71,72,73,74 and 75 and is installed to be and is meshing with each other, can change the speed reducing ratio that the combination of gear obtains to want according to multiple mode.
Now, with the operating process of describing according to the device 100 of the preferred embodiments of the invention.This operating process also refers to the polishing plate method of operating.Simultaneously; In this method of operating; Through using carriage 4 (Fig. 1) that glass substrate G (referring to Fig. 1) is placed on the upper surface of lower panel 2 and between polishing plate 8 and glass substrate G, being well-known in the art, will be not described in detail the polishing fluid supply here.
At first, if 70 work of rotation motor, the driving force of said rotation motor 70 is transferred into outer gear 62 through a plurality of gears 71,72,73,74 and 75, thereby makes said rim gear wheel 60 rotations.If rim gear wheel 60 rotations with shaft gear 51 rotations of said internal gear 61 engagements, thereby make 50 rotations of said axle.As shown in Figure 5, if rim gear wheel 60 along counterclockwise (along the direction of arrow, its from above be counterclockwise when observing) rotation, then said axle 50 is also along (along the direction of arrow) rotation counterclockwise.
Simultaneously, if 21 work of revolution motor, the driving force of said revolution motor 21 is sent to outer peripheral edges gear 26 through a plurality of gears 22,23 and 24, thereby makes said cylinder component 20 rotations.
If cylinder component 20 rotations, axle 50 are the rotation circle that to draw a radius simultaneously be eccentric distance d around the center of cylinder component 20.At this moment, for the speed reducing ratio that obtains to want, interchangeable said gear 22,23 and 24 changes speed reducing ratio.
As shown in Figure 3, if cylinder component 20 along clockwise direction (along the direction of arrow, this direction of arrow from above be clockwise direction when observing) rotation, axle 50 is (when observing from the top) " revolution " also along clockwise direction.
Owing to when shaft gear 51 keeps with internal gear 61 engagements, revolve round the sun, therefore during revolving round the sun, carry out rotation constantly.
As stated, device 100 according to the present invention can improve polishing rate, because revolution motor 21 and rotation motor 70 are all worked and made polishing plate 8 rotation simultaneously and revolution.For example, can the polishing rate of glass substrate G be improved more than the 0.3 μ m/min according to device 100 of the present invention.
Simultaneously; All work feasible 50 although be exemplified as revolution motor 21 with rotation motor 70---also be; Polishing plate 8---rotation simultaneously and revolution; But in device 100 according to the present invention, be at rotation motor 70 under the situation of the state of closing down, can make polishing plate 8 rotation simultaneously and revolution through only moving said revolution motor 21.Although rotation motor 70 is closed down, but axle 50 also rotations, because said shaft gear 51 keeps and internal gear 61 engagements when axle 50 revolution.
In addition, also possible is to make said polishing plate 8 rotations through only moving said rotation motor 70 and closing down said revolution motor 21.This understands for those of ordinary skills, is not described in detail here.

Claims (8)

1. device that is used to make polishing plate rotation and revolution comprises:
A cylinder component (20) has a hollow bulb that forms along its length and the outer peripheral edges gear (26) with the outer peripheral edges of being formed on;
An axle (50); Be installed in along its length in the said hollow bulb and by cylinder component (20) supporting with can be in the position rotation at the center of departing from said cylinder component (20); A shaft gear (51) is mounted to the outer peripheral edges of said axle (50), and said axle (50) is connected to a polishing plate; And
A rim gear wheel (60); Have an internal gear (61) and an outer gear (62); Said internal gear (61) is formed on the inner peripheral of this rim gear wheel; Said outer gear (62) is formed on the outer peripheral edges of this rim gear wheel, and said internal gear (61) is installed to be with said shaft gear (51) and meshes
Wherein, A driving force is being sent to said cylinder component (20) so that under the situation of said cylinder component (20) rotation; Said axle (50) revolves round the sun in said hollow bulb by means of eccentricity, and said revolution is under the state that said shaft gear (51) and said internal gear (61) mesh, to carry out.
2. the device that makes polishing plate rotation and revolution according to claim 1 wherein is sent to said outer gear (62) in driving force and makes under the situation of said rim gear wheel (60) rotation said shaft gear (51) rotation.
3. the device that makes polishing plate rotation and revolution according to claim 2; Wherein said rim gear wheel (60) is through using the driving force rotation that transmits from a rotation motor, and said cylinder component (20) is through using the driving force rotation that transmits from a revolution motor.
4. the device that makes polishing plate rotation and revolution according to claim 3; A plurality of gears (71), (72), (73), (74) and (75) wherein are installed between said rim gear wheel (60) and said rotation motor; With the driving force of the said rotation motor of permission transmission, thus the adjusting gear speed reducing ratio.
5. the device that makes polishing plate rotation and revolution according to claim 3; A plurality of gears (22), (23) and (24) wherein are installed between said outer peripheral edges gear (26) and said revolution motor; With the driving force of the said revolution motor of permission transmission, thus the adjusting gear speed reducing ratio.
6. a use makes the polishing plate method of operating of the device of polishing plate rotation and revolution, wherein through promoting to be connected to axle (50) rotation and the revolution that is used for the polishing plate of polished glass substrate, makes rotation simultaneously of said polishing plate and revolution.
7. use according to claim 6 makes the polishing plate method of operating of the device of polishing plate rotation and revolution, and wherein said device comprises:
A cylinder component (20) has a hollow bulb that forms along its length and the outer peripheral edges gear (26) with the outer peripheral edges of being formed on;
An axle (50); Be installed in along its length in the said hollow bulb and by cylinder component (20) supporting with can be in the position rotation at the center of departing from said cylinder component (20); A shaft gear (51) is mounted to the outer peripheral edges of said axle (50), and said axle (50) is connected to said polishing plate; And
A rim gear wheel (60); Have an internal gear (61) and an outer gear (62); Said internal gear (61) is formed on the inner peripheral of this rim gear wheel; Said outer gear (62) is formed on the outer peripheral edges of this rim gear wheel, and said internal gear (61) is installed to be with said shaft gear (51) and meshes
Wherein, Along with said cylinder component (20) passes through a driving force rotation; Said axle (50) revolves round the sun in said hollow bulb by means of eccentricity, and said revolution is under the state that said shaft gear (51) and said internal gear (61) mesh, to carry out, and
Wherein, a driving force is being sent to said outer gear (62) so that under the situation of said rim gear wheel (60) rotation, said shaft gear (51) rotation.
8. use according to claim 7 makes the polishing plate method of operating of the device of polishing plate rotation and revolution,
The driving force that wherein is used for said rotation is transmitted by a rotation motor, and the driving force that is used for said revolution transmits by a revolution motor, and
A plurality of gears (71), (72), (73), (74) and (75) wherein are installed between said rim gear wheel (60) and said rotation motor; To allow to transmit the driving force of said rotation motor; Thereby adjusting gear speed reducing ratio; And a plurality of gears (22), (23) and (24) are installed between said outer peripheral edges gear (26) and said revolution motor, and with the driving force of the said revolution motor of permission transmission, thus the adjusting gear speed reducing ratio.
CN2012102060296A 2011-06-16 2012-06-18 Rotation and revolution device of polishing plate and operating method of polishing plate using same Pending CN102825516A (en)

Applications Claiming Priority (2)

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KR1020110058532A KR20120139021A (en) 2011-06-16 2011-06-16 Apparatus for rotation and revolution of polishing plate, and operation methods for the same
KR10-2011-0058532 2011-06-16

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KR (1) KR20120139021A (en)
CN (1) CN102825516A (en)
TW (1) TW201300195A (en)

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CN105108636B (en) * 2015-08-20 2017-11-24 苏州富强科技有限公司 It is a kind of to be used for the grinding and polishing tool with face of cylinder workpiece
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CN103894908A (en) * 2014-04-17 2014-07-02 台州联帮机器人科技有限公司 Rotating mechanism of machine frame in abrasive belt grinding machine
CN106392835A (en) * 2015-07-30 2017-02-15 南京德朔实业有限公司 Sander

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Application publication date: 20121219